CN104375242B - Nesting sub-ring based wavelength selection switch for silica-based micro-ring resonant cavity - Google Patents
Nesting sub-ring based wavelength selection switch for silica-based micro-ring resonant cavity Download PDFInfo
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- CN104375242B CN104375242B CN201410620971.6A CN201410620971A CN104375242B CN 104375242 B CN104375242 B CN 104375242B CN 201410620971 A CN201410620971 A CN 201410620971A CN 104375242 B CN104375242 B CN 104375242B
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- wavelength
- subring
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- selective switches
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
- G02B6/29335—Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
- G02B6/29338—Loop resonators
Abstract
A nesting sub-ring based wavelength selection switch for a silica-based micro-ring resonant cavity in the technical field of optical fiber communication comprises a to-be-processed signal producing module, a wavelength selection switch module and a processed signal observation and analysis module, wherein the to-be-processed signal producing module produces a to-be-processed optical signal and inputs the to-be-processed optical signal into the input end of the wavelength selection switch module, and the output end of the wavelength selection switch module outputs a processed signal to the processed signal observation and analysis module. The nesting sub-ring based wavelength selection switch for the silica-based micro-ring resonant cavity is applied to a wavelength division multiplexing photo-communication network, and a configuration scheme is provided for the wavelength selection switch in a reconfigurable optical add drop multiplexer unit.
Description
Technical field
The present invention relates to a kind of device of technical field of optical fiber communication, specifically one kind are based on nested subring to silicon substrate
The wavelength-selective switches of micro-ring resonant cavity.
Background technology
Along with the high speed development of information age, network data total amount constantly lifting so that based on wavelength-division multiplex technique
More efficient data management allocative decision is needed in optical communication network.Reconstructable OADM unit can provide flexibly
Wavelength channel management and configuring technical, are the basic modules in wavelength division multiplex optical communications network of future generation.Wavelength-selective switches are
Core devices in reconstructable OADM unit.By controlling the absorbance of each wavelength channel, wavelength-selective switches energy
Enough between different optical-fiber network switching nodes, realize flexible Route Selection.
Find through the literature search to prior art, existing wavelength-selective switches are broadly divided into four big class, respectively base
In microcomputer electric regulating system, liquid crystal grating, silicon planar lightwave wire road and silicon substrate integrated light guide.Compared to other
Three class wavelength-selective switches, the wavelength-selective switches based on silicon substrate integrated light guide can be in conjunction with ripe CMOS (Complementary Metal Oxide Semiconductor)
Semiconductor CMOS process is realized integrated on extensive piece, can substantially reduce the cost of manufacturing development.Meanwhile, the high refraction of silicon materials
The high light field containment characteristic of rate and silicon waveguide can effectively reduce device size, more conforms to the development trend of device miniaturization.
C.Doerr et al. delivered on optoelectronic laser association of U.S. view CLEO in 2011
" Monolithicgridless 1x2wavelength-selective switch in silicon single-chip integration no grid 1
× 2 silicon substrate wavelength-selective switches " and Y.Goebuchi et al. are in the 535-548 page of volume 16 of Optics Express in 2008
" Optical cross-connect circuit using hitless wavelength selective switch is based on
Propose respectively in the optical cross connection circuit of lossless wavelength-selective switches " based on cascading Mach-once moral interferometer and micro-loop were humorous
Shake the silicon substrate wavelength-selective switches in chamber, and this two schemes all achieve the interchannel Route Selection of different wave length, but weak point
It is that volume is larger, overall structure is more complicated, and needs the precise coordination be aligned of multiple subelements, increased the difficulty of practical adjustments
Degree.
Chinese patent literature CN103986671, publication date 2014-8-13, disclose a kind of technical field of optical fiber communication
Clog-free 2 × 2 Optical Switch Nodes based on nested type silicon-based micro ring resonator, by the setting of two centrosymmetry and by insulator
The nested type silicon-based micro ring resonator of the S type structure that upper silicon wafer is made is constituted, nested type silicon-based micro ring resonator relative two
Individual U-shaped waveguide coupling forms a directional coupler, and the outside of two U-shaped waveguides is respectively provided with a micro-ring resonator；This light is handed over
Change node and include two groups of input and output totally four switching ports.But the prior art compares that the application is disadvantageous in that can only
Realize two wavelength to the route of two ports, and do not enable multiple wavelength to the route of two ports.
Content of the invention
The present invention is directed to deficiencies of the prior art, provides one kind based on nested subring to silicon-based micro ring resonator
Wavelength-selective switches, the present invention is applied to wavelength division multiplex optical communications network, is the wavelength in reconstructable OADM unit
Selecting switch provides a kind of constructing plan, and the device entirety preparation technology of the present invention is partly led with ripe CMOS (Complementary Metal Oxide Semiconductor)
Body CMOS technology is mutually compatible, also has compact conformation concurrently, is easy to the advantage adjusting.
The present invention is achieved by the following technical solutions, and the present invention includes：Pending signal generating module, wavelength select
Signal observation and analysis module after switch module and process, wherein：Pending signal generating module produces pending optical signal simultaneously
By the input input of wavelength-selective switches module, the outfan of the wavelength-selective switches module signal observation and analysis mould to after process
Signal after block output process；
Described wavelength-selective switches module is 1 × 2 wavelength-selective switches, specifically includes based on outer shroud nesting subring pair
, in this silicon-based micro ring resonator, there are the two phase interactions propagated in opposite direction in the silicon-based micro ring resonator of structural modelss simultaneously
Pattern, realizes the on-off control of wavelength channel by the pattern adjusting two interactions.
The mode of the pattern of two interactions of described regulation refers to：The girth of outer shroud in adjustment silicon-based micro ring resonator
The number that do not divide resonance peak peak-to-peak to adjust division resonance with the ratio of the girth of nested subring, and then adjust wavelength channel
Absorbance, realize being turned on or off of wavelength channel.
The homology equation of two outfans of described wavelength-selective switches module is respectively：
Wherein：
riAnd κi, i=1,2 be respectively length be Li, i=1, the straight-through coefficient of 2 directional coupler and the coefficient of coup, A
Then be respectively the individual pen transfer rate of outer shroud and single nested subring with a, Ф withIt is the individual pen phase of outer shroud and single nested subring
Move.
The individual pen phase shift Ф of described adjustment outer shroud and single nested subring withBy regulation ring around nested subring pair
Power on micro-nano heating plate is realizing.
Described pending optical signal is 10Gb/s light non-return-to-zero pseudo-random sequence.
The quantity of described nested subring pair be 1 to and more than.
Described pending signal generating module includes tunable laser and Electro-optical Modulation module, wherein, tunable laser
Produce continuous light carrier and output port is connected with the input port of Electro-optical Modulation module, Electro-optical Modulation module will be sent out by the signal of telecommunication
The electric pseudorandom sequence modulates that raw device produces, on light carrier, produce pending light pseudo-random sequence.
After described process, signal observation and analysis module includes：Power splitter, domain observations analysis system and time domain are seen
Cls analysis system, wherein, the input of power splitter is communicated with the outfan of 1 × 2 wavelength-selective switches module, power beam splitting
The output of device is connected with time domain observation and analysis system and domain observations analysis system respectively, is respectively used to observe at wavelength selection
Eye pattern after reason and the frequency spectrum of observation output signal.
The number that the present invention increases nested subring pair can achieve the resonance of two neighboring division several wavelength channels peak-to-peak
Selectively unlocking and closing.
The wavelength-selective switches of the present invention can make full use of the space of intra resonant cavity so that device overall structure is tight,
Volume is only the micron order of magnitude, actual preparation containing one group of nested subring silicon base 1 X 2 wavelength to subring pair nested with two groups
Selecting switch size is only respectively 40 μm of 140 μ m and 40 μm of 240 μ m.Simultaneously as wavelength proposed by the invention selects
Switch carries out selectivity division for the original resonance wavelength of single silicon-based micro ring resonator, so compared to based on cascade silicon substrate
The wavelength-selective switches of micro-ring resonant cavity do not need accurately to be directed at the resonance peak of each subring, thus practical adjustments can be more square
Just.Additionally, the overall preparation technology of device is completely compatible with ripe complementary metal oxide semiconductors (CMOS) CMOS technology, it is suitable to low
Cost exploitation and large-scale integrated.The feasibility of the program carries out system by 10-Gb/s light non-return-to-zero pseudo-random sequence and tests
Card.Due to above, this kind of knot is had many advantages, such as to 1 × 2 wavelength-selective switches of silicon-based micro ring resonator based on nested subring
The wavelength-selective switches of structure have preferable development and application prospect.
Brief description
Fig. 1 is overall structure diagram of the present invention；
In Fig. 2：A () is based on one group of nested subring, 1 × 2 structure for wavelength selection switch of silicon-based micro ring resonator to be illustrated
Figure, (b) is the partial enlarged drawing being nested with subring pair with dotted line frame in (a)；
In Fig. 3：A () is based on outfan in one group of nested subring 1 × 2 wavelength-selective switches to silicon-based micro ring resonator
1 normalization transmission spectrum, (b) is based on defeated in one group of nested subring 1 × 2 wavelength-selective switches to silicon-based micro ring resonator
Go out the normalization transmission spectrum at end 2, (c) is the office in 1551.8nm～1555.8nm wave-length coverage in figure (a) and figure (b)
Portion's enlarged drawing；
In Fig. 4：A () is that the micro-nano microscope of the wavelength-selective switches containing one group of nested subring pair of actual preparation shines
Piece, (b) is the micro-nano microphotograph of the wavelength-selective switches containing two nested subrings pair；
In Fig. 5：A () is to survey 1 × 2 wavelength-selective switches output to silicon-based micro ring resonator based on one group of nested subring
The normalization transmission spectrum at end 2, in (b), solid line is λ in figure (a)1Normalized transmission spectrum enlarged drawing near wavelength, dotted line
It is the normalization transmission spectrum being obtained using scattering matrix method the Fitting Calculation, (c)～(f) is that Fig. 4 (a) heater is applied respectively
After 0.0mW, 5.8mW, 11.1mW and 16.1mW heating power, the normalization transmission spectrum of outfan 1；
In Fig. 6：A () is to survey 1 × 2 wavelength-selective switches output to silicon-based micro ring resonator based on two groups of nested subrings
The normalization transmission spectrum at end 1, (b)～(f) is that in Fig. 4 (b), heater applies 4.5mW, 8.8mW, 13.0mW, 17.0mW respectively
Normalization transmission spectrum with outfan 1 after 20.7mW heating power；
Fig. 7 is the opening machine system test device figure of embodiment 1；
In Fig. 8：(a-I), (a-II) is respectively when based on one group of nested subring 1 × 2 wavelength to silicon-based micro ring resonator
The heater of selecting switch applies 0.0mW respectively, outfan 1 and outfan 2 after 5.8mW, 11.1mW and 16.1mW heating power
In wavelength X1～λ4The time domain eye at place, (b-I) is respectively with (b-II) and works as based on two groups of nested subrings to silicon-based micro ring resonance
The heater of 1 × 2 wavelength-selective switches in chamber applies 0.0mW respectively, and 4.5mW, 8.8mW, 13.0mW, 17.0mW and 20.7mW add
The time domain eye at wavelength X 1 '～λ 6 ' place of outfan 1 and outfan 2 after thermal power.
Specific embodiment
Below embodiments of the invention are elaborated, the present embodiment is carried out under premised on technical solution of the present invention
Implement, give detailed embodiment and specific operating process, but protection scope of the present invention is not limited to following enforcements
Example.
Embodiment 1
As shown in figure 1, the present embodiment includes：Pending signal generating module, based on nested subring to silicon-based micro ring resonance
Signal observation and analysis module after 1 × 2 wavelength-selective switches module in chamber and process.Wherein, pending signal generating module
Input with 1 × 2 wavelength-selective switches module to silicon-based micro ring resonator based on nested subring is connected, and after process, signal is seen
Survey and be connected with the output of 1 × 2 wavelength-selective switches module to silicon-based micro ring resonator based on nested subring with analysis module.
In Fig. 2, (a) is the device junction based on one group of nested subring 1 × 2 wavelength-selective switches to silicon-based micro ring resonator
Structure schematic diagram.By being introduced into nested subring in single silicon-based micro ring resonator to so that exist in same resonator cavity simultaneously
Two patterns propagated in opposite direction.Intercoupling between this two patterns and effect can make some of outer annular resonant cavity
There is resonance division, and then the absorbance of the original wavelength channel of change in wavelength, realize being turned on or off of wavelength channel.According to
Scattering matrix method is derived and is calculated, and in Fig. 2, the homology equation of outfan 1 and outfan 2 is respectively：
Wherein：MT、MDRepresent nested subring respectively to transmission
End and the transmission equation of reflection end, can be expressed as：
Wherein：riAnd κi, i=1,
2 be respectively length be Li, i=1, the straight-through coefficient of 2 directional coupler and the coefficient of coup, A and a is then respectively outer shroud and list
Individual nesting subring individual pen transfer rate, Ф andIt is the individual pen phase shift of outer shroud and single nested subring.In practice can be by adjusting
Power on the micro-nano heating plate of nested subring pair come to change Ф andValue, and then do not moving outer shroud resonance wavelength
Under the premise of change division resonance wavelength position, thus realizing the Route Selection of different wave length.Simulation result shows, when slit width
Spend for 0.18 μm, straight line coupling length L1=4 μm, L2=2 μm, R=10 μm of nested subring radius, simultaneously inner and outer ring girth than etc.
When 4, the extinction ratio of device output end 1 and outfan 2 is respectively 18dB and 20dB.By increase nested subring to and outer shroud it
Between coupling or the loss reducing device, extinction ratio can also increase further.
As shown in figure 4, described is selected to 1 × 2 wavelength of silicon-based micro ring resonator based on one group of subring nested with two groups
The microphotograph of switch.Device under test is prepared on silicon silicon-on-insulator chip on insulator and is completed, and pushes up silicon
Thickness is 220nm.Device overall structure is completed by 248-nm deep UV photoetching and follow-up plasma deep silicon etching technique.
Device input/output port is coupled with single-mode fiber using grating coupler.Prepared thermo-optic effect micro-nano heating plate with embedding
Set subring, to partially overlapping, will pass through the position that thermo-optic effect adjusts division resonance peak, realizes the Route Selection to wavelength.
Divide for based on 1 × 2 wavelength-selective switches of the silicon-based micro ring resonator containing one group of subring pair nested with two groups
Do not design and demonstrate four groups and six groups of system test to prove the feasibility of the present invention：1) for based on one group of nested subring pair
Silicon-based micro ring resonator 1 × 2 wavelength-selective switches, micro-nano heater is applied respectively with 0.0mW, 5.8mW, 11.1mW and
Four wavelength channel λ are observed after 16.1mW heating power1～λ4The eye pattern at place, 2) for the silicon substrate based on two groups of nested subrings pair
1 × 2 wavelength-selective switches of micro-ring resonant cavity, apply 0.0mW, 4.5mW, 8.8mW, 13.0mW respectively to micro-nano heater,
The eye pattern at six wavelength channel λ 1 '～λ 6 ' places is observed after 17.0mW and 20.7mW heating power.The output of every group of experiment in test
End 1 and outfan 2 eye pattern as shown in FIG. 7 and 8 it can be seen that actual measurement structure demonstrate device proposed by the invention can be real
The routing function of existing wavelength channel, this has been well demonstrated that proposed by the invention humorous to silicon-based micro ring based on nested subring
Shake chamber 1 × 2 wavelength-selective switches feasibility.
Claims (7)
1. a kind of based on nested subring to the wavelength-selective switches of silicon-based micro ring resonator it is characterised in that include：Pending letter
Number occur module, wavelength-selective switches module and process after signal observation and analysis module, wherein：Pending signal generating module is produced
The pending optical signal of life the input input by wavelength-selective switches module, the outfan of wavelength-selective switches module is to place
Signal after the module output of signal observation and analysis is processed after reason；
Described wavelength-selective switches module is 1 × 2 wavelength-selective switches, specifically includes the structure based on outer shroud nesting subring pair
, in this silicon-based micro ring resonator, there are two interactions propagated in opposite direction in the silicon-based micro ring resonator of pattern simultaneously
Pattern, in adjustment silicon-based micro ring resonator, the girth of outer shroud is peak-to-peak to adjust division resonance with the ratio of the girth of nested subring
Do not divide the number of resonance peak, and then the absorbance of adjustment wavelength channel, realize being turned on or off of wavelength channel.
2. the wavelength-selective switches based on nested subring to silicon-based micro ring resonator according to claim 1, is characterized in that,
The homology equation of described two outfans of 1 × 2 wavelength-selective switches module is respectively：
Wherein：
riAnd κi, i=1,2 be respectively length be Li, i=1, the straight-through coefficient of 2 directional coupler and the coefficient of coup, A and a
Then be respectively the individual pen transfer rate of outer shroud and single nested subring, Ф withIt is the individual pen phase shift of outer shroud and single nested subring.
3. the wavelength-selective switches based on nested subring to silicon-based micro ring resonator according to claim 2, is characterized in that,
The individual pen phase shift Ф of described adjustment outer shroud and single nested subring withBy regulation ring around nested subring pair micro-nano heating plate
On power realizing.
4. the wavelength-selective switches based on nested subring to silicon-based micro ring resonator according to claim 2, is characterized in that,
Described pending optical signal is 10Gb/s light non-return-to-zero pseudo-random sequence.
5. the wavelength-selective switches based on nested subring to silicon-based micro ring resonator according to claim 3 or 4, its feature
It is that the quantity of described nested subring pair is at least 1 right.
6. the wavelength-selective switches based on nested subring to silicon-based micro ring resonator according to claim 5, is characterized in that,
Described pending signal generating module includes tunable laser and Electro-optical Modulation module, and wherein, tunable laser produces continuous
Light carrier and output port is connected with the input port of Electro-optical Modulation module, Electro-optical Modulation module will be produced by electric signal generator
Electric pseudorandom sequence modulates on light carrier, produce pending light pseudo-random sequence.
7. the wavelength-selective switches based on nested subring to silicon-based micro ring resonator according to claim 5, is characterized in that,
After described process, signal observation and analysis module includes：Power splitter, domain observations analysis system and time domain observation and analysis system
System, wherein, the input of power splitter is communicated with the outfan of 1 × 2 wavelength-selective switches module, the output of power splitter
It is connected with time domain observation and analysis system and domain observations analysis system respectively, be respectively used to observe the eye pattern after wavelength selection is processed
Frequency spectrum with observation output signal.
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| JP2003527625A (en) * | 1999-10-14 | 2003-09-16 | ランブダ・クロツシング・リミテツド | Integrated optical device for data communication |
| US6947632B2 (en) * | 2002-01-03 | 2005-09-20 | Fischer Sylvain G | Method of implementing the kerr effect in an integrated ring resonator (the kerr integrated optical ring filter) to achieve all-optical wavelength switching, as well as all-optical tunable filtering, add-and -drop multiplexing, space switching and optical intensity modulation |
| US6928209B2 (en) * | 2003-02-15 | 2005-08-09 | Intel Corporation | Optical add and drop multiplexer using ring resonators |
| US8494323B2 (en) * | 2010-11-29 | 2013-07-23 | Octrolix Bv | Optical system having a symmetrical coupling region for coupling light between waveguides including an optically resonant element |
| CN103986671B (en) * | 2014-05-20 | 2017-02-15 | 上海交通大学 | Non-blocking 2 * 2 optical switching node based on embedded type silicon substrate micro-ring resonant cavities |
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