CN106840023B - The complex-curved optical parametric of heavy caliber is accurately tested and caliberating device and method - Google Patents
The complex-curved optical parametric of heavy caliber is accurately tested and caliberating device and method Download PDFInfo
- Publication number
- CN106840023B CN106840023B CN201610590665.1A CN201610590665A CN106840023B CN 106840023 B CN106840023 B CN 106840023B CN 201610590665 A CN201610590665 A CN 201610590665A CN 106840023 B CN106840023 B CN 106840023B
- Authority
- CN
- China
- Prior art keywords
- complex
- curved
- measured
- adjustment mechanism
- laser tracker
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses the complex-curved optical parametric of heavy caliber, accurately test and caliberating device, the device complex-curved tested and demarcated for be measured；The complex-curved face shape that the device detects to obtain using test calibration module acquisition laser interferometer, and control signal is sent to laser interferometer, compensating element, and complex-curved adjustment mechanism to be measured, adjustment mechanism is controlled to the relative position of three and the adjustment of relative angle so that the root-mean-square error of complex-curved face shape is minimum and defocusing amount is zero；Using transformation matrix calibrating device, transformation matrix of coordinates of the Calibration of Laser tracker during station is turned；Based on transformation matrix of coordinates, face graphic data is subjected to coordinate transform into the same coordinate system；All face graphic datas in the same coordinate system are modeled and analyzes and calculates, then complex-curved optical check design of Compensator result to be measured is gone forward side by side one-step optimization, optimum results are the optimal optical check design of Compensator result based on speculum actual measurement parameter.
Description
Technical field
The present invention relates to complex-curved detection technique field, and in particular to the complex-curved optical parametric of heavy caliber is accurately tested
With caliberating device and method.
Background technology
Complex-curved heavy caliber is the important element of contemporary optics system.In complex-curved manufacturing process, top
Put the important parameter that the geometric parameters such as radius of curvature, off-axis amount and bias are statement reflectings surface, the accurate test of its optical parametric
It is the key that ensures its quality in development process with demarcation.
Currently, the method for measuring complex-curved optical parametric be mainly using steel ruler or known length distance bar measurement,
Direct measurement two ways is carried out using laser tracker.When being measured using the distance bar of steel ruler or known length, read using estimating
Mode, the precision of steel ruler and measurement bar it is relatively low and can not accurate measurement to the complex-curved vertex position of heavy caliber, cause this
The precision of measuring method is relatively low；When carrying out direct measurement using laser tracker, compensating element, and complex-curved can only be measured
A part of reference plane, the accidentalia in test process can be amplified due to the missing of reference plane information, cause optical parametric to be tested
The reduction of precision.
The content of the invention
In view of this, the invention provides the complex-curved optical parametric of heavy caliber accurately test and caliberating device and method,
The measurement of compensating element, and complex-curved all reference planes is realized by turning station, can be realized to complex-curved vertex curvature half
Footpath R, the off-axis amount optical parametric such as d and eccentric Δ accurate test and demarcation, data processing and calculating process are simpler, operation letter
Just, testing cost is low, versatility is good for folk prescription.
In order to solve the above-mentioned technical problem, the present invention is realized in：The complex-curved optical parametric of heavy caliber is accurately surveyed
Examination and caliberating device, the device complex-curved tested and demarcated for be measured；Including：Laser tracker, laser interferometer,
Compensating element, transformation matrix calibrating device and test calibration module；Compensating element, and it is to be measured it is complex-curved be sequentially placed in it is sharp
On the emitting light path of optical interferometer.
Targeted to be measured of the device complex-curved by reflecting surface and be enclosed in the reference plane of reflecting surface surrounding and formed.
Transformation matrix calibrating device includes M position ball seat set in advance and the target ball on ball seat；Wherein appoint
Three target balls of anticipating are not conllinear.
Laser tracker is set in turn on the N number of position chosen in complex-curved reflecting surface both sides to be measured, is surveyed respectively
Examination obtains the face graphic data of complex-curved reflecting surface to be measured and all reference planes, and tests the position for obtaining M target ball simultaneously
Put coordinate.
Test calibration module obtains the complex-curved face shape that laser interferometer detects to obtain, and sends control signal to sharp
Optical interferometer, compensating element, and complex-curved adjustment mechanism to be measured, control adjustment mechanism realize the relative position to three
With the adjustment of relative angle so that laser interferometer detects the root-mean-square error minimum and defocus of obtained complex-curved face shape
Amount is zero；Test calibration module obtains the complex-curved reflection to be measured that laser tracker tests acquisition on N number of position simultaneously
The position coordinates of the face graphic data and M target ball of face and all reference planes, the position coordinates based on M target ball, which is established, to swash
Transformation matrix of coordinates of the optical tracker system during the station of N number of position turn；Based on transformation matrix of coordinates, the face that N number of position is obtained
Graphic data carries out coordinate transform into the same coordinate system；All face graphic datas in the same coordinate system are modeled and analyzes and counts
Calculate, be compensated the interval L of element and complex-curved center to be measured, complex-curved off-axis amount d and offset Δ to be measured；By between
Complex-curved optical check design of Compensator result to be measured is substituted into every L to go forward side by side one-step optimization, obtains complex-curved top to be measured
Point radius of curvature R；Vertex curvature radius R, off-axis amount d and offset Δ are substituted into optical check design of Compensator result and gone forward side by side
One-step optimization, optimum results are the optimal optical check design of Compensator result based on speculum actual measurement parameter.
Further, adjustment mechanism includes the first adjustment mechanism, the second adjustment mechanism, the 3rd adjustment mechanism；Laser interference
Instrument, compensating element, and it is to be measured it is complex-curved respectively by the first adjustment mechanism, the second adjustment mechanism and the 3rd adjustment mechanism carry out
The adjustment of relative position and relative angle.
Further, M and N relation is：3MN ＞ 6 (N-1)+3M.
Further, N 2, M 4.
Further, method specifically comprises the following steps：
Step 1) adjusts the relative position and relative angle of the first adjustment mechanism, the second adjustment mechanism and the 3rd adjustment mechanism
Degree, makes that the root-mean-square error for the complex-curved face shape that laser interferometer detects to obtain is minimum and defocusing amount is zero.
Laser tracker is sequentially placed on N number of position by step 2), and laser tracker is tested to be measured on each position
Complex-curved reflecting surface and all face graphic datas for surveying reference plane, and the target ball position for testing M fixed ball seat is sat
Mark.
Step 3) is based on the target ball position coordinate measured in step 2), establishes laser tracker and turns to stand in N number of position
Transformation matrix of coordinates in journey.
Step 4) is based on transformation matrix of coordinates, and the face graphic data that N number of position is obtained carries out coordinate transform to same coordinate
In system.
Step 5) is modeled to all face graphic datas in the same coordinate system and analyzes and calculate, and is compensated element with treating
Survey the interval L at complex-curved center, complex-curved off-axis amount d and offset Δ to be measured.
Step 6), which will be spaced L and substitute into complex-curved optical check design of Compensator result to be measured, goes forward side by side one-step optimization, obtains
To complex-curved vertex curvature radius R to be measured.
Vertex curvature radius R, off-axis amount d and the offset Δ that step 7) obtains step 5) and step 6) substitute into optics inspection
One-step optimization of going forward side by side is tested in design of Compensator result, and optimum results are that the optimal optical check based on speculum actual measurement parameter is mended
Repay device design result.
Further, in step 3), laser tracker turns in first position and second place Liang Ge positions during station
Coordinate conversion matrix includes the relative translation amount P between the first and second opening position rectangular coordinate systems and the angle around each reference axis
Q is measured, specific method for solving is：In the target ball position Coordinate Conversion that N number of opening position measures it is right angle first by laser tracker
Coordinate under coordinate system；According to the relative translation amount P between the first and second opening position rectangular coordinate systems and around each reference axis
Angular metric Q structures turn station error and turn the evaluation function of station error, for turning the evaluation function of station error using singular value point
Solution solves to obtain P and Q.
Wherein laser tracker is respectively x in the target ball position coordinate that i-th of opening position measuresi, yi；Then turn station error
For：ei=Qxi+P-yi, i=1,2 ..., N.
The evaluation function for turning station error is
Beneficial effect：
The beneficial effects of the invention are as follows：The present invention turns station conversion square by establishing laser tracker in diverse location
Battle array, can test compensating element, and complex-curved all reference planes and carry out modeling analysis, it is complex-curved to realize heavy caliber
The accurate test of optical parametric and demarcation.This method clear physical concept, data processing is simple with modeling, easy to operate, test
Cost is low, precision is high, versatility is good.
Brief description of the drawings
Fig. 1 is the apparatus structure schematic diagram that the complex-curved optical parametric of heavy caliber of the present invention is accurately tested；
Fig. 2 is the apparatus structure schematic diagram for establishing transformation matrix between two laser trackers of the present invention；
The complex-curved optical parametric of heavy caliber that Fig. 3 is the present invention is accurately tested and the flow chart of demarcation.
Embodiment
The present invention will now be described in detail with reference to the accompanying drawings and examples.
Embodiment 1, as shown in figure 1, the device accurately tested of the complex-curved optical parametric of heavy caliber of the present invention includes：Swash
In optical tracker system such as Fig. 1 shown in position 1 and position 2, laser interferometer 3, compensating element, 4, to be measured complex-curved 5, adjustment mechanism
6th, adjustment mechanism 7, adjustment mechanism 8 and test calibration module.
As shown in Fig. 2 the device for establishing transformation matrix between two laser trackers of the present invention includes laser tracker
In Fig. 2 shown in position 1 and position 2, ball seat 9, ball seat 10, ball seat 11, ball seat 12.
With reference to Fig. 1 and Fig. 2 illustrate the present invention embodiment, the complex-curved optical parametric of heavy caliber accurately test and
Caliberating device is tested and demarcated for be measured complex-curved 5；To be measured complex-curved 5 by reflecting surface and are enclosed in reflecting surface
The reference plane composition of surrounding.
Transformation matrix calibrating device includes M position ball seat set in advance and the target ball on ball seat；Wherein appoint
Three target balls of anticipating are not conllinear.
Position relationship is specially：Compensating element, 4 and to be measured complex-curved 5 emergent lights for being sequentially placed in laser interferometer 3
Lu Shang；N number of position is chosen in be measured complex-curved 5 reflecting surface both sides, laser tracker is set in turn on N number of position,
Test obtains the face graphic data of complex-curved 5 reflecting surface to be measured and all reference planes respectively, and tests simultaneously and obtain M target
The position coordinates of ball.
Test calibration module obtains laser interferometer 3 and detects obtained complex-curved face shape, and send control signal to
Laser interferometer 3, compensating element, 4 and complex-curved 5 adjustment mechanism to be measured, control adjustment mechanism are realized to the relative of three
Position and the adjustment of relative angle so that the root-mean-square error that laser interferometer 3 detects obtained complex-curved face shape is minimum
And defocusing amount is zero；Test calibration module obtains laser tracker tests acquisition on N number of position to be measured complex-curved 5 simultaneously
Reflecting surface and the face graphic data of all reference planes and the position coordinates of M target ball, the position coordinates based on M target ball
The transformation matrix of coordinates established during laser tracker turns station in N number of position；Based on transformation matrix of coordinates, N number of position is obtained
The face graphic data obtained carries out coordinate transform into the same coordinate system；All face graphic datas in the same coordinate system are modeled point
Analyse and calculate, be compensated the interval L, to be measured complex-curved 5 off-axis amount d and bias of element 4 and complex-curved 5 center to be measured
Measure Δ；L will be spaced substitute into be measured complex-curved 5 optical check design of Compensator result and go forward side by side one-step optimization, obtain to be measured multiple
The vertex curvature radius R of miscellaneous curved surface 5；Vertex curvature radius R, off-axis amount d and offset Δ are substituted into optical check compensator to set
One-step optimization of being gone forward side by side in result is counted, optimum results are the optimal optical check design of Compensator knot based on speculum actual measurement parameter
Fruit.
In the present embodiment, it is assumed that the positional number of laser tracker is N, and target ball number is M, and the laser of each position tracks
Instrument has 6 parameters, relative translation amount x, y, z and the angular metric α around each reference axis, beta, gamma in space, and each fixed measuring point has 3
Measured value, horizontal angle H, angle of pitch V, distance D.According to collinearity equations, the laser tracker of each position and each fixed survey
There can be 3 equations between point, then the solving condition that laser tracker turns station is：
3MN ＞ 6 (N-1)+3M 1
In the present invention, the positional number N of laser tracker is 2, and fixed measuring point number M is 4, meets the solving condition of formula 1, can
Solved with carrying out the station relation that turns of laser tracker.
Embodiment 2, the complex-curved optical parametric of the heavy caliber of such as embodiment 1 are accurately tested and test and the mark of caliberating device
Determine method, this method specifically comprises the following steps：
Step 1) adjusts the first adjustment mechanism 6, the relative position of the second adjustment mechanism 7 and the 3rd adjustment mechanism 8 and relative
Angle, it is zero laser interferometer 3 is detected the root-mean-square error minimum of obtained complex-curved face shape and defocusing amount；
Laser tracker is sequentially placed on N number of position by step 2), and laser tracker is tested to be measured multiple on each position
The reflecting surface of miscellaneous curved surface 5 and all face graphic datas for surveying reference plane, and the target ball position for testing M fixed ball seat is sat
Mark；
Step 3) is based on the target ball position coordinate measured in step 2), establishes laser tracker and turns to stand in N number of position
Transformation matrix of coordinates in journey；
The coordinate conversion matrix that laser tracker turns in first position and second place Liang Ge positions during station includes the
Relative translation amount P between the one and second place rectangular coordinate system and angular metric Q around each reference axis, specific method for solving
For：
First, (X, Y, the Z) that can be converted to the data (H, V, D) that laser tracker directly measures under rectangular coordinate system is sat
Mark form, i.e.,：
Assuming that fixed measuring point target ball is y in the coordinate that laser tracker is under the coordinate system of position 2i, tracked in laser
The coordinate that instrument is under the coordinate system of position 1 is xi, turn in the parameter of station, relative translation amount is P (x, y, z), around the angle of each reference axis
Measure as Q (α, beta, gamma), because the relative position between fixed measuring point is changeless, then laser tracker is located at position respectively
When putting 1 and position 2, yiAnd xiBetween Existential Space geometric transform relation, i.e.,：
ei=Qxi+P-yi 3
In formula, eiTo turn station error.
To resolve the optimal P and Q that turn in the relation of station, the evaluation function that turns station error of the structure for all fixed measuring points
For：
In formula, N is the number of fixed measuring point, in the present invention, N 4.
For formula 4, solve to obtain turn station parameter a P and Q using singular value decomposition method, then laser tracker is in position 2
The measured value of arbitrfary point can be obtained by the measurement point at position 1 through coordinate transform, and physical relationship is as follows：
Y=Qx+P 5
Step 4) is based on transformation matrix of coordinates, and the face graphic data that N number of position is obtained carries out coordinate transform to same coordinate
In system；
Step 5) to all face graphic datas in the same coordinate system be modeled analyze and calculate, be compensated element 4 with
The interval L at complex-curved 5 center to be measured, to be measured complex-curved 5 off-axis amount d and offset Δ；
Step 7), which will be spaced L and substitute into be measured complex-curved 5 optical check design of Compensator result, goes forward side by side one-step optimization, obtains
To be measured complex-curved 5 vertex curvature radius R；
Vertex curvature radius R, off-axis amount d and the offset Δ that step 8) obtains step 5) and step 6) substitute into optics inspection
One-step optimization of going forward side by side is tested in design of Compensator result, and optimum results are that the optimal optical check based on speculum actual measurement parameter is mended
Repay device design result.
To sum up, presently preferred embodiments of the present invention is these are only, is not intended to limit the scope of the present invention.It is all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements made etc., the protection of the present invention should be included in
Within the scope of.
Claims (6)
- Accurately 1. test and caliberating device, the device are carried out the complex-curved optical parametric of heavy caliber for complex-curved (5) to be measured Test and demarcation；It is characterised in that it includes：Laser tracker, laser interferometer (3), compensating element, (4), transformation matrix demarcation Mechanism and test calibration module；Compensating element, (4) and complex-curved (5) to be measured are sequentially placed in the laser interferometer (3) Emitting light path on；The device targeted complex-curved (5) to be measured is by reflecting surface and is enclosed in the reference plane of reflecting surface surrounding and forms；The transformation matrix calibrating device includes M position ball seat set in advance and the target ball on ball seat；Wherein appoint Three target balls of anticipating are not conllinear；The laser tracker is set in turn on N number of position of the reflecting surface both sides of complex-curved (5) to be measured selection, respectively Test obtains the reflecting surface of complex-curved (5) to be measured and the face graphic data of all reference planes, and tests simultaneously and obtain M target ball Position coordinates；The test calibration module obtains the complex-curved face shape that laser interferometer (3) detection obtains, and sends control signal To the adjustment mechanism of laser interferometer (3), compensating element, (4) and complex-curved (5) to be measured, control adjustment mechanism is realized to three The relative position of person and the adjustment of relative angle so that laser interferometer (3) detection obtain complex-curved face shape it is square Root error is minimum and defocusing amount is zero；The test calibration module obtains laser tracker and acquisition is tested on N number of position simultaneously Complex-curved (5) to be measured reflecting surface and the face graphic data of all reference planes and the position coordinates of M target ball, based on M The transformation matrix of coordinates that the position coordinates of individual target ball is established during laser tracker turns station in N number of position；Based on the seat Transformation matrix is marked, the face graphic data that N number of position is obtained carries out coordinate transform into the same coordinate system；To in the same coordinate system All face graphic datas, which are modeled, to be analyzed and calculates, and is compensated the interval L of element (4) and complex-curved (5) center to be measured, is treated Survey off-axis the amount d and offset Δ of complex-curved (5)；The optical check compensator for being spaced L substitutions complex-curved (5) to be measured is set Meter result is gone forward side by side one-step optimization, obtains the vertex curvature radius R of complex-curved (5) to be measured；By vertex curvature radius R, d is measured off axis And offset Δ substitutes into optical check design of Compensator result one-step optimization of going forward side by side, optimum results are to be surveyed based on speculum The optimal optical check design of Compensator result of parameter.
- 2. the complex-curved optical parametric of heavy caliber as claimed in claim 1 is accurately tested and caliberating device, it is characterised in that institute Stating adjustment mechanism includes the first adjustment mechanism (6), the second adjustment mechanism (7), the 3rd adjustment mechanism (8)；Laser interferometer (3), Compensating element, (4) and complex-curved (5) to be measured are respectively by the first adjustment mechanism (6), the second adjustment mechanism (7) and the 3rd adjustment Mechanism (8) carries out the adjustment of relative position and relative angle.
- 3. the complex-curved optical parametric of heavy caliber as claimed in claim 1 is accurately tested and caliberating device, it is characterised in that M Relation with N is：3MN ＞ 6 (N-1)+3M.
- 4. the complex-curved optical parametric of heavy caliber as claimed in claim 3 is accurately tested and caliberating device, it is characterised in that N For 2, M 4.
- 5. the complex-curved optical parametric of heavy caliber as claimed in claim 2 is accurately tested and the test of caliberating device and demarcation side Method, it is characterised in that this method specifically comprises the following steps：Step 1) adjusts the relative position of first adjustment mechanism (6), the second adjustment mechanism (7) and the 3rd adjustment mechanism (8) And relative angle, the root-mean-square error of complex-curved face shape for obtaining laser interferometer (3) detection is minimum and defocusing amount is Zero；Laser tracker is sequentially placed on N number of position by step 2), and laser tracker tests complexity to be measured on each position The reflecting surface of curved surface (5) and all face graphic datas for surveying reference plane, and the target ball position for testing M fixed ball seat is sat Mark；Step 3) is based on the target ball position coordinate measured in step 2), establishes laser tracker during the station of N number of position turn Transformation matrix of coordinates；Step 4) is based on the transformation matrix of coordinates, and the face graphic data that N number of position is obtained carries out coordinate transform to same coordinate In system；Step 5) is modeled to all face graphic datas in the same coordinate system and analyzes and calculate, and is compensated element (4) with treating Survey interval L, off-axis the amount d and offset Δ of complex-curved (5) to be measured at complex-curved (5) center；Step 7) goes forward side by side the optical check design of Compensator result for being spaced L and substituting into complex-curved (5) to be measured one-step optimization, obtains The vertex curvature radius R of complex-curved (5) to be measured；Vertex curvature radius R, off-axis amount d and the offset Δ that step 8) obtains step 5) and step 6) substitute into optical check and mended One-step optimization of being gone forward side by side in device design result is repaid, optimum results are the optimal optical check compensator based on speculum actual measurement parameter Design result.
- 6. test as claimed in claim 5 and scaling method, it is characterised in that in the step 3), laser tracker is the The coordinate conversion matrix that one position and second place Liang Ge positions turn during standing includes the first and second opening position rectangular co-ordinates Relative translation amount P between the system and angular metric Q around each reference axis, specific method for solving are：First by laser tracker N number of The target ball position Coordinate Conversion that opening position measures is the coordinate under rectangular coordinate system；Sat according to the first and second opening position right angles Mark the relative translation amount P between system and the angular metric Q structures around each reference axis turn station error and turn the evaluation function of station error, Solve to obtain P and Q using singular value decomposition method for the evaluation function for turning station error；Wherein laser tracker is respectively x in the target ball position coordinate that i-th of opening position measuresi, yi；Then turning station error is：ei =Qxi+P-yi, i=1,2 ..., N；The evaluation function for turning station error is
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610590665.1A CN106840023B (en) | 2016-07-25 | 2016-07-25 | The complex-curved optical parametric of heavy caliber is accurately tested and caliberating device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610590665.1A CN106840023B (en) | 2016-07-25 | 2016-07-25 | The complex-curved optical parametric of heavy caliber is accurately tested and caliberating device and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106840023A CN106840023A (en) | 2017-06-13 |
| CN106840023B true CN106840023B (en) | 2018-02-16 |
Family
ID=59145797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610590665.1A Active CN106840023B (en) | 2016-07-25 | 2016-07-25 | The complex-curved optical parametric of heavy caliber is accurately tested and caliberating device and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106840023B (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109099871B (en) * | 2018-06-08 | 2020-01-21 | 华中科技大学 | Interference detection alignment method based on circular target |
| CN109724532B (en) * | 2018-12-17 | 2020-04-10 | 中国科学院长春光学精密机械与物理研究所 | Accurate testing device and method for geometric parameters of complex optical curved surface |
| CN109656013B (en) * | 2018-12-17 | 2020-08-21 | 中国科学院长春光学精密机械与物理研究所 | Large-aperture telescope primary mirror chamber assembly method based on laser tracker |
| CN111076899B (en) * | 2019-12-11 | 2021-11-16 | 北京空间机电研究所 | High-precision large-caliber aspheric surface vertical surface shape detection automatic adjustment method |
| CN111023971B (en) * | 2019-12-19 | 2021-06-01 | 中国科学院光电技术研究所 | Method for non-contact measurement of surface shape of large-aperture optical element based on laser tracker |
| CN111649701B (en) * | 2020-06-30 | 2021-10-29 | 长春博信光电子有限公司 | Method and device for detecting eccentricity value of toric mirror |
| CN114543670B (en) * | 2022-01-28 | 2023-03-21 | 中国科学院长春光学精密机械与物理研究所 | Optical element pose auxiliary calibration method and system based on machine vision |
| CN116593137B (en) * | 2023-07-14 | 2023-09-29 | 苏州然玓光电科技有限公司 | Interferometer-based optical lens quality testing method and system |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5729344A (en) * | 1995-04-10 | 1998-03-17 | Nippon Aspherical Lens Co., Ltd. | Method and apparatus for forming an optical surface by optical etching |
| CN102288132B (en) * | 2011-05-18 | 2013-04-17 | 中国科学院长春光学精密机械与物理研究所 | Method for measuring vertex curvature radius deviation of aspheric surface by using laser tracking instrument |
| CN102168955B (en) * | 2011-05-18 | 2012-09-19 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting curvature radius of optical spherical surface |
| CN103591888B (en) * | 2013-10-28 | 2016-04-27 | 中国科学院长春光学精密机械与物理研究所 | The measuring method of large-caliber off-axis non-spherical optical element geometric parameter |
| CN104006759A (en) * | 2014-05-05 | 2014-08-27 | 中国科学院长春光学精密机械与物理研究所 | Composite detection method for large-diameter non-spherical reflector with large deviation in polishing process |
| CN104165598B (en) * | 2014-08-05 | 2017-01-25 | 中国科学院长春光学精密机械与物理研究所 | Automatic reflection light spot positioning method for large-caliber mirror interferometer vertical type detection |
-
2016
- 2016-07-25 CN CN201610590665.1A patent/CN106840023B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN106840023A (en) | 2017-06-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106840023B (en) | The complex-curved optical parametric of heavy caliber is accurately tested and caliberating device and method | |
| US10932865B2 (en) | Precision detection method and device for surgical robot positioning system | |
| CN102207371B (en) | Three-dimensional point coordinate measuring method and measuring apparatus thereof | |
| CN103697824B (en) | For the system calibrating method of the gauge head of coordinate measuring machine | |
| CN105423917B (en) | The scaling method of Position-Sensitive Detector position error | |
| CN102519397B (en) | Method for measuring curvature radius of optical spherical surface | |
| CN114323571B (en) | Multi-optical-axis consistency detection method for photoelectric aiming system | |
| Acero et al. | Verification of an articulated arm coordinate measuring machine using a laser tracker as reference equipment and an indexed metrology platform | |
| CN105890875B (en) | A kind of projection objective performance testing device and method based on mask plate | |
| CN106441168A (en) | Rolling linear guide rail pair slider profile accuracy measurement method | |
| CN109724532B (en) | Accurate testing device and method for geometric parameters of complex optical curved surface | |
| CN111256592B (en) | External parameter calibration device and method for structured light sensor | |
| CN103862327A (en) | Ball joint center position detecting method | |
| CN111325793A (en) | System and method for dynamically calibrating pixel size based on light spot in image measurement | |
| CN108519054A (en) | The caliberating device and scaling method of arc-shaped infrared target simulator | |
| CN100590382C (en) | Large sized platform deflection amount photoelectric measuring method | |
| US7307706B2 (en) | Optical testing method and apparatus | |
| CN107588737B (en) | A kind of roller gear circular pitch deviation measurement method based on line-structured light | |
| CN103822580B (en) | The multiple spot real-time measurement system of extra-long frame deformation and attitude and method | |
| CN107764518B (en) | A kind of optical lens focal length measuring equipment and method | |
| CN112082482B (en) | Visual positioning method for workpiece with edge feature only, application and precision evaluation method | |
| CN108801187B (en) | The geometric error discrimination method of guide rail slide unit movement based on coordinate transform | |
| CN106645168A (en) | Detection method for surface concave-convex defect of boom cylinder of crane | |
| CN110428471A (en) | A kind of accurate method for self-locating for the measurement of freeform optics surface sub-aperture deviation | |
| CN105466455A (en) | Angular accuracy calibration system and method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |