CN111076899B - High-precision large-caliber aspheric surface vertical surface shape detection automatic adjustment method - Google Patents
High-precision large-caliber aspheric surface vertical surface shape detection automatic adjustment method Download PDFInfo
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- CN111076899B CN111076899B CN201911269722.6A CN201911269722A CN111076899B CN 111076899 B CN111076899 B CN 111076899B CN 201911269722 A CN201911269722 A CN 201911269722A CN 111076899 B CN111076899 B CN 111076899B
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Abstract
The invention relates to a high-precision large-caliber aspheric vertical surface shape detection automatic adjustment method, belonging to the field of advanced optical manufacturing and detection; step one, fitting a central reference axis of a zero compensator through a laser tracker; step two, building an aspheric surface vertical detection system; thirdly, sticking 6-8 target balls on the side wall of the top of the reflector to be detected; fitting a ring opening reference surface of the reflector to be measured through a laser tracker; step four, 8-10 target balls are stuck on the side wall of the reflector to be detected; fitting the mechanical axis of the reflector to be measured through a laser tracker; step five, determining a projection axis O' M; step six, adjusting the reflector to be measured through an adjusting table to realize the coincidence of the mechanical axis and the projection axis O' M and complete the adjustment; the invention realizes the accurate adjustment of the spatial position of each optical element in the aspheric surface detection optical path, has the characteristic of high adjustment accuracy, and is very suitable for the processing and detection of the large-caliber aspheric surface reflector with the caliber above meter level.
Description
Technical Field
The invention belongs to the field of advanced optical manufacturing and detection, and relates to a high-precision large-caliber aspheric surface vertical surface shape detection automatic adjustment method.
Background
The large-caliber aspheric reflector is widely applied to the fields of space remote sensing, astronomical observation, military weapons and the like, and the requirement on the machining precision of the reflector is higher and higher along with the development of the optical imaging technology. In the modern numerical control optical processing technology, the processing of the large-caliber aspheric mirror can be generally finished through multiple iterations, so the accuracy and the authenticity of a detection result directly determine the final processing precision and the manufacturing efficiency of the mirror.
For a large-caliber aspheric reflector with a caliber above meter level, as the detection light path is longer, and in order to eliminate the influence of gravity on surface shape detection, the surface shape of the reflector is detected at home and abroad by adopting a mode of vertical optical axis, a general process method is to construct a special vertical detection tower for constructing the detection light path, wherein the detection light path is divided into an upper light path and a lower light path, the upper light path is constructed on a platform above the detection tower and consists of an interferometer, a zero compensator, a folding mirror, an adjusting platform and other elements; the lower light path is built on a ground platform and consists of a reflector to be detected and a matching adjusting table. In order to realize high-precision detection of the surface shape of the large-caliber aspheric reflector, the position relation of optical elements in an upper optical path and a lower optical path needs to meet a theoretical design value, so that the optical path adjustment for the vertical surface shape detection of the large-caliber aspheric surface is of great importance.
In the prior art, firstly, an interferometer in an upper optical path and a zero compensator are required to be adjusted to be strictly coaxial, so that a non-common optical path error is avoided; and then adjusting the position of the reflector to be detected, and finally realizing the auto-collimation interference imaging of the surface shape detection light path. The processes mainly depend on manual adjustment and empirical interpretation, detection personnel firstly carry out primary alignment on a light path to form interference fringes, then acquire surface shape test data through an interferometer, and reversely deduce the adjustment direction according to the positive and negative relations of the inclination, the defocusing and the coma amount in the test data until the aberration in the detection light path reaches the minimum. The method has the defects that in the process of manually adjusting the reflector to be detected, the inclination and translation of the reflector can compensate the coma aberration to a certain extent, the real error distribution on the mirror surface is mixed up, and the error is brought to the mirror surface processing; on the other hand, in the manual adjustment process, detection personnel need to frequently adjust the upper and lower light paths on the detection tower platform, additional vibration is introduced in the personnel moving process to influence the stability of interference fringes and influence interpretation of each aberration, so that accurate control on each aberration cannot be realized, image difference coefficients such as inclination, defocusing and coma cannot be adjusted to 0, and certain detection errors remain.
Disclosure of Invention
The technical problem solved by the invention is as follows: the method overcomes the defects of the prior art, provides the high-precision large-caliber aspheric surface vertical surface shape detection automatic adjustment method, realizes the accurate adjustment of the spatial position of each optical element in the aspheric surface detection light path, has the characteristic of high adjustment precision, and is very suitable for the processing and detection of large-caliber aspheric surface reflectors with meter-class calibers or above.
The technical scheme of the invention is as follows:
a high-precision large-caliber aspheric vertical surface shape detection automatic adjustment method comprises the following steps:
step one, axially and vertically placing a zero position compensator, and sticking 5 target balls on the outer wall of the zero position compensator; the null compensator rotates about an axis; fitting a central reference axis of the zero compensator by a laser tracker;
step two, building an aspheric surface vertical detection system; horizontally placing a reflector to be measured on the upper surface of the adjusting table; placing the folding mirror above the reflector to be measured; horizontally placing a zero compensator, wherein the zero compensator is aligned with the folding mirror;
thirdly, sticking 6-8 target balls on the side wall of the top of the reflector to be detected; fitting a ring opening reference surface of the reflector to be measured through a laser tracker;
step four, 8-10 target balls are stuck on the side wall of the reflector to be detected; fitting the mechanical axis of the reflector to be measured through a laser tracker;
step five, determining a projection axis O' M;
and step six, adjusting the reflector to be measured through the adjusting table to realize the coincidence of the mechanical axis and the projection axis O' M and complete the adjustment.
In the above automatic adjustment method for detecting the vertical surface shape of the high-precision large-caliber aspheric surface, in the first step, 2 target balls are respectively adhered to two axial ends of the zero compensator; wherein 1 target ball is stuck on the axial middle side wall of the zero compensator; the other 2 target balls are adhered to the side walls of the two axial ends of the zero compensator.
In the above method for automatically adjusting the detection of the vertical surface shape of the high-precision large-caliber aspheric surface, in the first step, a specific method for fitting the central reference axis of the zero compensator by the laser tracker comprises the following steps:
horizontally placing the laser tracker on one side of the zero compensator in the axial direction; rotating a zero compensator adhered with the target ball; scanning by a laser tracker to obtain horizontal circular motion tracks of 5 target balls; obtaining central points of 5 circular motion tracks; and performing straight line fitting on the 5 central points to obtain a central reference axis of the zero compensator.
In the above automatic adjustment method for detecting the vertical surface shape of the high-precision large-caliber aspheric surface, in the second step, an included angle between the bending mirror and a central reference axis of the zero compensator is 45 degrees; the detection laser is emitted from the zero compensator and then reaches the reflector to be detected after being refracted by the folding mirror.
In the third step, 6-8 target balls are uniformly distributed along the circumferential direction of the side wall of the top of the reflector to be detected; the method for fitting the reference surface of the ring opening of the reflector to be measured by the laser tracker comprises the following steps: and measuring the relative position information of 6-8 target balls by using a laser tracker, and performing circumference fitting on the positions of 6-8 target balls to obtain a ring reference surface.
In the fourth step, 8-10 target balls are different in axial height along the reflector to be detected; the method for fitting the mechanical axis of the reflector to be measured by the laser tracker comprises the following steps:
rotating a reflector to be detected with the target ball adhered; scanning by a laser tracker to obtain horizontal circular motion tracks of 6-8 target balls; obtaining the central points of 6-8 circular motion tracks; and performing straight line fitting on the 6-8 central points to obtain the mechanical axis of the reflector to be measured.
In the above method for automatically adjusting the detection of the vertical surface shape of the high-precision large-caliber aspheric surface, the method for determining the projection axis O' M is as follows:
the intersection point of the central reference axis and the zero compensator lens is marked as an O point; the intersection point of the central reference axis and the mirror surface of the folding mirror is marked as an M point; making a normal line of the folding mirror through the point O; the intersection point of the normal line and the folding mirror is marked as N point; extending the ON line, taking the point N as the center, and taking the point O' which is the symmetrical point of the point O ON the ON line; and connecting the point O 'with the point M, namely a projection axis O' M.
In the above automatic adjustment method for detecting the vertical surface shape of the high-precision large-caliber aspheric surface, the diameter of the target ball is 0.5 inch.
In the automatic adjusting method for detecting the vertical surface shape of the high-precision large-caliber aspheric surface, the adjusting table realizes six-degree-of-freedom adjustment; during translational motion, the precision is better than 1 μm; the angular error is 1 "during rotation.
Compared with the prior art, the invention has the beneficial effects that:
(1) the invention provides a digitalized and quantified automatic adjusting system and method for detecting a vertical surface shape of a large-caliber aspheric surface, which are used for detecting the spatial position coordinates of a compensator, a folding mirror assembly and a to-be-detected reflector in a detection light path by using a laser tracker, calculating the adjustment quantity of the actual position of the reflector by taking the theoretical spatial detection position of the to-be-detected reflector as a reference, and transmitting the adjustment quantity signal to an electric six-dimensional adjusting table to drive the reflector to perform spatial attitude adjustment;
(2) according to the invention, the adjustment quantity required by the electric six-dimensional adjusting table is obtained according to the surface Zernike coefficients generated by ray tracing and the adjustment quantity matrix relation, so that the whole detection process can realize real-time closed-loop feedback without manual intervention, and the detection precision and the detection efficiency are greatly improved.
Drawings
FIG. 1 is a schematic view of a zero compensator paste target ball of the present invention;
FIG. 2 is a schematic view of an aspheric vertical inspection system according to the present invention.
Detailed Description
The invention is further illustrated by the following examples.
The invention provides a high-precision large-caliber aspheric surface vertical surface shape detection automatic adjusting method, which solves the problem of low large-caliber aspheric surface shape detection precision caused by measurement errors of non-common optical path, mirror aberration compensation and the like introduced by manual adjustment and empirical interpretation in the prior art.
A high-precision large-caliber aspheric vertical surface shape detection automatic adjustment method mainly comprises the following steps:
step one, as shown in fig. 1, a zero compensator 1 is axially and vertically arranged, and 5 target balls 4 are stuck on the outer wall of the zero compensator 1; the target ball 4 has a diameter of 0.5 inches. Wherein 2 target balls 4 are respectively stuck at the two axial ends of the zero compensator 1; wherein 1 target ball 4 is stuck on the axial middle side wall of the zero compensator 1; the other 2 target balls 4 are adhered to the side walls of the two axial ends of the null compensator 1. The null compensator 1 rotates about an axis; the central reference axis 11 of the null compensator 1 is fitted by the laser tracker 6. The specific method for fitting the central reference axis of the zero compensator 1 by the laser tracker 6 comprises the following steps:
horizontally placing the laser tracker 6 on one side of the zero compensator 1 in the axial direction; rotating the zero compensator 1 adhered with the target ball 4; the laser tracker 6 scans and obtains the horizontal circular motion tracks of 5 target balls 4; obtaining central points of 5 circular motion tracks; and performing straight line fitting on the 5 central points to obtain a central reference axis of the zero compensator 1.
Step two, as shown in fig. 2, a vertical detection system of the aspheric surface is built; horizontally placing the reflector 3 to be measured on the upper surface of the adjusting table; placing the folding mirror 2 above the reflector 3 to be measured; horizontally placing the zero compensator 1, wherein the zero compensator 1 is aligned with the folding mirror 2; the included angle between the folding mirror 2 and the central reference axis of the zero compensator 1 is 45 degrees; the detection laser is emitted from the zero compensator 1 and then refracted by the folding mirror 2 to reach the reflector 3 to be detected. Spherical waves or plane waves generated by an external laser interferometer are reflected by the compensator for 45 degrees through the refraction component after being refracted by the compensator, so that each ray of the spherical waves or the plane waves is enabled to be vertically incident to the mirror surface of the reflector to be detected, and high-precision detection of the surface shape is realized.
Thirdly, 6-8 target balls 4 are stuck on the side wall of the top of the reflector 3 to be detected; fitting a ring opening reference surface 31 of the reflector 3 to be measured through a laser tracker 6; 6-8 target balls 4 are uniformly distributed along the circumferential direction of the side wall of the top of the reflector 3 to be measured; the method for fitting the loop reference surface 31 of the reflector 3 to be measured by the laser tracker 6 comprises the following steps: the relative position information of 6-8 target balls 4 is measured by the laser tracker 6, and the positions of the 6-8 target balls 4 are subjected to circumference fitting to obtain the round mouth reference surface 31.
Step four, 8-10 target balls 4 are stuck on the side wall of the reflector 3 to be detected; fitting a mechanical axis 32 of the reflector 3 to be measured through the laser tracker 6; the axial heights of the 8-10 target balls 4 along the reflector 3 to be measured are different; the method for the laser tracker 6 to fit the mechanical axis 32 of the reflector 3 to be measured comprises the following steps:
rotating the reflector 3 to be measured with the target ball 4 adhered; the laser tracker 6 scans and obtains the horizontal circular motion tracks of 6-8 target balls 4; obtaining the central points of 6-8 circular motion tracks; and performing straight line fitting on the 6-8 central points to obtain a mechanical axis 32 of the reflector 3 to be measured.
Step five, determining a projection axis O' M; the method for determining the projection axis O' M comprises the following steps:
the intersection point of the central reference axis 11 and the lens of the zero compensator 1 is marked as an O point; the intersection point of the central reference axis 11 and the mirror surface of the folding mirror 2 is marked as an M point; making a normal line of the folding mirror 2 through the point O; the intersection point of the normal line and the folding mirror 2 is marked as N point; extending the ON line, taking the point N as the center, and taking the point O' which is the symmetrical point of the point O ON the ON line; and connecting the point O 'with the point M, namely a projection axis O' M.
And step six, adjusting the reflector 3 to be measured through the adjusting table 5 to realize the coincidence of the mechanical axis 32 and the projection axis O' M and complete the adjustment. The adjusting table 5 realizes six-degree-of-freedom adjustment; during translational motion, the precision is better than 1 μm; the angular error is 1 "during rotation.
The electric six-dimensional adjusting table 5 can realize spatial six-dimensional direction adjustment, including X, Y, Z three-direction translation and rotation U, V, W around X-axis, Y-axis and Z-axis respectively. In the embodiment, the X-axis and Y-axis translation strokes of the selected electric six-dimensional adjusting table are 50mm, and the resolution precision is better than 1 mu m; the Z axis is consistent with the central axis direction of the aspheric surface reflector to be detected, the translation stroke is 30mm, and the resolution precision is better than 1 mu m; the rotation stroke of the rotation U around the X axis and the rotation V around the Y axis is 15 degrees and the angle error is 1 ', the rotation W around the Z axis can realize 360 degrees rotation and the angle error is 5'. The steps are automatically calculated through a data transmission system and a computer data processing system, closed-loop feedback is carried out according to the actual measurement result, manual adjustment is not needed, and high-precision detection of the vertical surface shape of the large-caliber aspheric reflector can be achieved. The invention achieves final adjustment accuracy better than 5'.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to limit the present invention, and those skilled in the art can make variations and modifications of the present invention without departing from the spirit and scope of the present invention by using the methods and technical contents disclosed above.
Claims (8)
1. A high-precision large-caliber aspheric vertical surface shape detection automatic adjustment method is characterized by comprising the following steps: the method comprises the following steps:
step one, axially and vertically placing a zero position compensator (1), and sticking 5 target balls (4) on the outer wall of the zero position compensator (1); the null compensator (1) rotates around an axis; fitting a central reference axis (11) of the zero compensator (1) through a laser tracker (6);
step two, building an aspheric surface vertical detection system; horizontally placing the reflector (3) to be measured on the upper surface of the adjusting table (5); placing the folding mirror (2) above the reflector (3) to be measured; horizontally placing the zero compensator (1), wherein the zero compensator (1) is aligned to the folding mirror (2);
thirdly, 6-8 target balls (4) are stuck on the side wall of the top of the reflector (3) to be detected; fitting a ring opening reference surface (31) of the reflector (3) to be measured through a laser tracker (6);
step four, 8-10 target balls (4) are stuck on the side wall of the reflector (3) to be detected; fitting a mechanical axis (32) of the reflector (3) to be measured through a laser tracker (6);
step five, determining a projection axis O' M; the method for determining the projection axis O' M comprises the following steps:
the intersection point of the central reference axis (11) and the lens of the zero compensator (1) is marked as an O point; the intersection point of the central reference axis (11) and the mirror surface of the folding mirror (2) is marked as an M point; making a normal line of the folding mirror (2) through the point O; the intersection point of the normal line and the folding mirror (2) is marked as an N point; extending the ON line, taking the point N as the center, and taking the point O' which is the symmetrical point of the point O ON the ON line; connecting the point O 'with the point M, namely obtaining a projection axis O' M;
and step six, adjusting the reflector (3) to be measured through the adjusting table (5), so that the mechanical axis (32) is superposed with the projection axis O' M, and the adjustment is completed.
2. The high-precision large-caliber aspheric vertical surface shape detection automatic adjustment method according to claim 1, characterized in that: in the first step, 2 target balls (4) are respectively adhered to two axial ends of the zero compensator (1); wherein 1 target ball (4) is stuck on the axial middle side wall of the zero compensator (1); the other 2 target balls (4) are adhered to the side walls of the two axial ends of the zero compensator (1).
3. The high-precision large-caliber aspheric vertical surface shape detection automatic adjustment method according to claim 2, characterized in that: in the first step, a specific method for fitting the central reference axis of the zero compensator (1) through the laser tracker (6) comprises the following steps:
horizontally placing the laser tracker (6) on one side of the zero compensator (1) in the axial direction; a zero compensator (1) for rotating the sticking target ball (4); the laser tracker (6) scans and obtains horizontal circular motion tracks of 5 target balls (4); obtaining central points of 5 circular motion tracks; and performing straight line fitting on the 5 central points to obtain a central reference axis of the zero compensator (1).
4. The high-precision large-caliber aspheric vertical surface shape detection automatic adjustment method according to claim 3, characterized in that: in the second step, the included angle between the folding mirror (2) and the central reference axis of the zero compensator (1) is 45 degrees; the detection laser is emitted from the zero compensator (1), refracted by the folding mirror (2) and then reaches the reflector (3) to be detected.
5. The method for automatically adjusting the detection of the vertical surface shape of the high-precision large-caliber aspheric surface according to claim 4, wherein the method comprises the following steps: in the third step, 6-8 target balls (4) are uniformly distributed along the circumferential direction of the side wall of the top of the reflector (3) to be measured; the method for fitting the ring opening reference surface (31) of the reflector (3) to be measured by the laser tracker (6) comprises the following steps: the relative position information of 6-8 target balls (4) is measured through the laser tracker (6), and the positions of the 6-8 target balls (4) are subjected to circumference fitting to obtain a round mouth reference surface (31).
6. The method for automatically adjusting the detection of the vertical surface shape of the high-precision large-caliber aspheric surface according to claim 5, wherein the method comprises the following steps: in the fourth step, the axial heights of 8-10 target balls (4) along the reflector (3) to be measured are different; the method for fitting the mechanical axis (32) of the reflector (3) to be measured by the laser tracker (6) comprises the following steps:
rotating a reflector (3) to be measured, which is adhered with the target ball (4); the laser tracker (6) scans to obtain the horizontal circular motion tracks of 6-8 target balls (4); obtaining the central points of 6-8 circular motion tracks; and performing straight line fitting on 6-8 central points to obtain a mechanical axis (32) of the reflector (3) to be measured.
7. The method for automatically adjusting the detection of the vertical surface shape of the high-precision large-caliber aspheric surface according to claim 6, wherein the method comprises the following steps: the diameter of the target ball (4) is 0.5 inches.
8. The method for automatically adjusting the detection of the vertical surface shape of the high-precision large-caliber aspheric surface according to claim 7, wherein the method comprises the following steps: the adjusting table (5) realizes six-degree-of-freedom adjustment; during translational motion, the precision is better than 1 μm; the angular error is 1 "during rotation.
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