CN106829359A

CN106829359A - Electronic component handling apparatus and electronic component inspection device

Info

Publication number: CN106829359A
Application number: CN201610832319.XA
Authority: CN
Inventors: 高田冬生; 清水博之; 桐原大辅
Original assignee: Seiko Epson Corp
Current assignee: Seiko Epson Corp
Priority date: 2015-09-30
Filing date: 2016-09-19
Publication date: 2017-06-13
Also published as: TW201713959A; TWI657253B; TWI657029B; TW201831388A

Abstract

Electronic component handling apparatus and electronic component inspection device that the present invention is provided, can efficiently convey the electronic unit for for example needing to check again for.Electronic component handling apparatus have delivery section (23), and the delivery section (23) can be conveyed and is placed with as the pallet (200) as mounting part of the IC equipment (90) of electronic unit.Delivery section (23) can will be placed with the second place different from first position that the pallet of IC equipment (90) (200) is delivered to the first position and IC equipment (90) after configuration before carrying out the second inspection has carried out the first inspection for configuring the IC equipment (90) before the first inspection that carries out.

Description

Electronic component handling apparatus and electronic component inspection device

Technical field

The present invention relates to electronic component handling apparatus and electronic component inspection device.

Background technology

In the past, it is known to the electronic component inspection device for checking the electrical characteristics of electronic unit such as semiconductor element, in the electricity It is configured in subassembly check device, electronic unit is classified according to the inspection result in inspection portion.And, the classification bag Include " inspection result is qualified ", " inspection result is unqualified ", " need to check again for (for example, referring to patent document 1) " etc..

Patent document 1：Japanese Unexamined Patent Publication 2000-258507 publications

In existing electronic component inspection device, in the case that the inspection result of electrical characteristics is " need to check again for ", must Corresponding electronic unit must be again positioned over electronic component inspection device.

However, the placement operation is, for example, to be carried out via the hand of operating personnel, so the operating personnel can feel very numb It is tired.

In addition, electrical characteristics inspection result in the case of " need to check again for ", it is necessary to by corresponding electronic unit with The state for being placed in pallet (mounting part) is positioned over electronic component inspection device again, but the placement operation is, for example, via behaviour Make what the hand of personnel was carried out, so the operating personnel can feel pretty troublesome.

Further, since the precision of above-mentioned placement operation is different, it is possible to make electronic unit produce position to offset on pallet Or depart from pallet.

Additionally, it is contemplated that carrying out the structure of the placement operation automatically using delivery section, but carrying out placement handling situations automatically Down, it is necessary to accurately carry out the conveying of delivery section.

In addition, in existing electronic component inspection device, the conveying direction generally quilt of the electronic unit on inspection portion periphery In one direction, but because the user using electronic component inspection device is different, there are the feelings for wanting to change the conveying direction in limitation Condition.However, the change of conveying direction is impossible.

The content of the invention

The present invention is made to solve at least a portion of above-mentioned problem, can be used as in the following manner or application Example is realized.

The electronic component handling apparatus of [application examples 1] the application example are characterised by that, with delivery section, the delivery section can Conveying is placed with the mounting part of electronic unit, and the delivery section can will be placed with the mounting part of the electronic unit First position is delivered to, the first position is that configuration carries out the position of the electronic unit before the first inspection, and can be conveyed To the second place, the second place is the electronic unit after configuration before carrying out the second inspection has carried out first inspection The position different from the first position.

For example in the case where being checked again for electronic unit, the electronic unit for checking again for object was placed with the past Mounting part, be for example configured at first position from the second place via the hand of the operating personnel of electronic component handling apparatus.So And according to the application example, by the automatic transport of delivery section, the trouble thus, it is possible to save aforesaid operations personnel is efficiently conveyed Mounting part.Thus, it is possible to be checked again for rapidly.

[application examples 2] is in the electronic component handling apparatus that above-mentioned application examples is recorded, it is however preferred to have the conveying electronics Multiple electronic unit delivery heads of part.

Conveying direction thereby, it is possible to set electronic unit freely is conveyed.

[application examples 3] is preferably carrying out second inspection in the electronic component handling apparatus that above-mentioned application examples is recorded In the case of looking into, the mounting part that the delivery section can will be placed with the electronic unit is conveyed from the second place To the first position.

Thus, for example second check be to having carried out the first inspection after the checking again for of electronic unit in the case of, The electronic unit that can check again for the needs promptly moves to the state that can be checked again for.

[application examples 4] in the electronic component handling apparatus that above-mentioned application examples is recorded, preferably described first checks and institute It is identical inspection to state the second inspection.

Thereby, it is possible to electronic unit is checked again for.

[application examples 5] in the electronic component handling apparatus that above-mentioned application examples is recorded, preferably described first checks and institute It is different inspections to state the second inspection.

Electronic unit is checked thereby, it is possible to change inspection condition.

[application examples 6] in the electronic component handling apparatus that above-mentioned application examples is recorded, preferably described first position and institute The second place is stated positioned at the inside of the electronic component handling apparatus.

Thus, when the second inspection is carried out, can omit will load part temporarily to the outside of electronic component handling apparatus Discharge.

[application examples 7] in the electronic component handling apparatus that above-mentioned application examples is recorded, preferably it is assumed that mutually orthogonal X When direction and Y-direction, the delivery section has the mounting part transfer robot along the X-direction conveying mounting part.

The structure be placed with the mounting part of the electronic unit for being scheduled for the second inspection it is every a collection of be the feelings of Under condition effectively, the raising of productivity ratio (the conveying number of the electronic unit of time per unit) can be realized.

[application examples 8] in the electronic component handling apparatus that above-mentioned application examples is recorded, preferably described first position and institute The second place is stated positioned at the outside of the electronic component handling apparatus.

Thus, for example to electronic unit check again for the midway of action, be from first position or the second place In the case of taking out mounting part, the taking-up operation becomes easy.

[application examples 9] in the electronic component handling apparatus that above-mentioned application examples is recorded, preferably it is assumed that mutually orthogonal X When direction and Y-direction, the delivery section has：In the first position side along the Y-direction conveying dress for loading part Carrier aircraft, the second place side along the Y-direction conveying it is described mounting part unloader and along the X-direction convey The mounting part transfer robot of the mounting part.

Thus, for example compared with the conveying of the X-direction and Y-direction that carry out loading part using a conveying mechanism, can Realize the raising of productivity ratio (the conveying number of the electronic unit of time per unit).

[application examples 10] is in the electronic component handling apparatus that above-mentioned application examples is recorded, it is however preferred to have setting is from described the One checks the setting screen for being checked to described second and being automatically switched.

Thus, according to the operation of setting screen, promptly carry out being checked to the second switching for checking from first.

[application examples 11] in the electronic component handling apparatus that above-mentioned application examples is recorded, preferably described setting screen sets The ON/OFF of the automatic switchover.

Thus, can for example be automatically switched at the desired moment according to the species of electronic unit.

[application examples 12] in the electronic component handling apparatus that above-mentioned application examples is recorded, preferably described setting screen can Set the number of times of the automatic switchover.

Thus, the setting of desired number of times according to the species of electronic unit, can for example be carried out.

[application examples 13] is in the electronic component handling apparatus that above-mentioned application examples is recorded, it is however preferred to have setting is from described the One checks to the described second setting screen for checking manual switching.

Thus, for example can according to the operating personnel of electronic component handling apparatus and the species of electronic unit, carry out from First checks to the second switching for checking.

[application examples 14] in the electronic component handling apparatus that above-mentioned application examples is recorded, preferably possessing can show Carry out the described first state for checking and carry out the display part of the described second state for checking.

Thus, the operating personnel of electronic component handling apparatus will appreciate that the current state of the electronic component handling apparatus.

The electronic component inspection device of [application examples 15] the application example is characterised by having：Delivery section, it can be conveyed It is placed with the mounting part of electronic unit；With inspection portion, it checks the electronic unit, and the delivery section will can be loaded The mounting part for stating electronic unit is delivered to first position, and the first position is that configuration carries out the electricity before the first inspection The position of subassembly, and the second place can be delivered to, the second place be before the second inspection is carried out configuration carried out it is described The position different from the first position of the electronic unit after the first inspection.

For example in the case where being checked again for electronic unit, the electronic unit for checking again for object was placed with the past Mounting part, be for example configured at first position from the second place via the hand of the operating personnel of electronic component handling apparatus.So And according to the application example, by the automatic transport of delivery section, the trouble of aforesaid operations personnel can be saved, efficiently conveying is loaded Part.Thus, it is possible to promptly be checked again for.

The electronic component handling apparatus of [application examples 16] the application example are characterised by, possess to convey and are placed with electronics The delivery section of the mounting part of part, the delivery section has：The load of the mounting electronic unit of the covering mounting part The holding section put the cover portion in face and can engage with the mounting part.

According to the application example, by the engaging of holding section, mounting part can be stably conveyed.Further, since being provided with The cover of mounting surface is covered, so in the state of electronic unit is placed in mounting part, cap assembly overlay electronic part.Thus, it is possible to Enough prevent electronic unit from departing from from mounting part.Therefore, it is possible to electronic unit is stably conveyed together with mounting part.

[application examples 17] in the electronic component handling apparatus that above-mentioned application examples 16 is recorded, preferably described holding section is set There is multiple, each holding section can move on the direction parallel with the mounting surface towards mutually different direction.

By two engagings of holding section, mounting part can be more stably conveyed.Other holding section is configured to move It is dynamic, engaging and releasing thus, it is possible to carry out holding section.

[application examples 18] in the electronic component handling apparatus that above-mentioned application examples 16 or 17 is recorded, preferably described engaging Portion is in the claw-like with the recess being recessed towards the direction parallel with the mounting surface.

Thus, being partly into recess for part, the state that can stably maintain holding section to engage are loaded.

[application examples 19] in the electronic component handling apparatus that above-mentioned application examples 17 or 18 is recorded, preferably each engaging The close to each other and separate holding section is configured in portion, is being engaged with the mounting part in the case of.

Thus, for example when delivery section is close to mounting part, each holding section can approach in the state of separation.Therefore exist When delivery section is close to mounting part, it is prevented from holding section and hinders it to approach.

[application examples 20] in the electronic component handling apparatus that above-mentioned application examples 19 is recorded, preferably each holding section leads to The cylinder crossed supply action fluid and act is acted, in the state of the action fluid is not supplied, each holding section As close state.

Thus, even if in the case of for example producing unfavorable condition in cylinder and acting unexpected stopping, holding section can also turn into Close state.Even if therefore generating unfavorable condition in fastening state lower cylinder, it is also possible to prevent mounting part from delivery section Undesirably fall off.

[application examples 21] in the electronic component handling apparatus any one of above-mentioned application examples 16~20, preferably exists In the case of the direction top view orthogonal with the mounting surface, the mounting part is in rectangular with side long and short side Shape, the holding section engages with the short side of the mounting part.

Thus, the situation ratio on side long is engaged with holding section, rocking when can suppress to load component feed.

[application examples 22] in the electronic component handling apparatus any one of above-mentioned application examples 16~21, preferably institute State cover portion has hole in the part abutted with the electronic unit.

Thereby, it is possible to reduce the area that cover portion is abutted with electronic unit.Therefore can for example suppress to be transferred to from delivery section The vibration of electronic unit.

[application examples 23] in the electronic component handling apparatus any one of above-mentioned application examples 16~21, preferably institute State cover portion has protuberance in the part abutted with the electronic unit.

Thereby, it is possible to electronic unit is pressed on into mounting part using protuberance.Therefore, it is possible to by electronic unit with mounting Part is stably conveyed together.

[application examples 24] in the electronic component handling apparatus any one of above-mentioned application examples 16~23, preferably institute The part at least being abutted with the electronic unit of cover portion is stated, is made up of conductive material.

Thereby, it is possible to preventing or suppressing electronic unit powered.

[application examples 25] is preferably described conductive in the electronic component handling apparatus that above-mentioned application examples 24 is recorded Material be electroconductive resin.

Hardness is low for example compared with metal material for electroconductive resin material, it is possible to preventing or suppressing to damage the ministry of electronics industry Part.

[application examples 26] in the electronic component handling apparatus any one of above-mentioned application examples 16~25, preferably institute Stating cover portion can abut with the mounting surface.

Thereby, it is possible to further improve the stability under fastening state.

[application examples 27] in the electronic component handling apparatus any one of above-mentioned application examples 16~26, preferably institute Stating delivery section has the force section that the cover portion exerts a force towards the mounting surface.

Thereby, it is possible to make holding section engage with mounting part in the state of force.Therefore, it is possible to further improve engaging Stability under state.

[application examples 28] in the electronic component handling apparatus that above-mentioned application examples 27 is recorded, preferably described force section is set There is multiple.

Thereby, it is possible to be exerted a force to mounting part in multiple positions.Therefore, it is possible to further improve the stabilization under fastening state Property.

[application examples 29] in the electronic component handling apparatus that above-mentioned application examples 28 is recorded, preferably described in top view During mounting surface, each force section be configured for line segment link each force section allocation position and formed be shaped as square Shape.

[application examples 30] in the electronic component handling apparatus any one of above-mentioned application examples 16~29, preferably institute State cover portion to be configured to be moved to the mounting surface, movable range is more than 2mm and below 4mm.

Thus, when cover portion is pressed against mounting portion, a part for pressing force can be avoided.Therefore, it is possible to prevent cover portion with Mounting portion is pressed more than the power for needing.Its result can relax the impact for putting on mounting part and electronic unit.

[application examples 31] in the electronic component handling apparatus any one of above-mentioned application examples 16~30, preferably institute Stating delivery section has the buffer part for relaxing the impact applied from the direction intersected with the mounting surface.

Thus, delivery section can relax the impact produced when cover portion is abutted with mounting part.Therefore, it is possible to relax applying In the impact of mounting part and electronic unit.

The electronic component inspection device of [application examples 32] the application example is characterised by, possesses to convey and is placed with electronics The delivery section of the mounting part of part and the inspection portion of the inspection electronic unit, the delivery section have：Cover the mounting The cover portion of the mounting surface of the mounting electronic unit of part and the holding section that can be engaged with the mounting part.

According to the application example, by the engaging of holding section, mounting part can be stably conveyed.Further, since being provided with The cover of mounting surface is covered, so being placed under mounting unit status in electronic unit, cap assembly overlay electronic part.Thus, it is possible to Prevent electronic unit from departing from mounting part.Therefore, it is possible to electronic unit is stably conveyed together with mounting part.

The electronic component handling apparatus of [application examples 33] the application example are characterised by possessing：Mounting electronics can be conveyed The delivery section of the mounting part of part, be capable of configuration inspection electronic unit inspection portion inspection area, can configure and be placed with Be transported to the electronic unit of the inspection area the mounting part and positioned at than the inspection area more by described First configuration section of the conveying direction upstream side of electronic unit and can configuring is placed with the institute from inspection area conveying State the mounting part of electronic unit and be located at than the inspection area more by the conveyance direction downstream side of the electronic unit And second configuration section different from first configuration section, being provided with the delivery section and first configuration section will be described defeated Send the upstream side location division of portion and first configuration section positioning.

Thereby, it is possible to the first configuration section and delivery section are positioned.Therefore conveyed to the first configuration section from the second configuration section Load part and in the first configuration section configuration mounting part, can accurately carry out configuration operation.

[application examples 34] in the electronic component handling apparatus that above-mentioned application examples 33 is recorded, preferably in the delivery section and Second configuration section is provided with the downstream location division for positioning the delivery section and second configuration section.

Thereby, it is possible to the second configuration section and delivery section are positioned.Therefore conveyed to the second configuration section from the first configuration section Load part and in the second configuration section configuration mounting part, can accurately carry out configuration operation.

[application examples 35] in the electronic component handling apparatus that above-mentioned application examples 33 or 34 is recorded, preferably described upstream Side location division has：It is arranged at the convex portion of the delivery section and is arranged at first configuration section and supplies convex portion insertion Recess.

Thus, by the way that convex portion to be inserted the simple structure of recess etc, the first configuration section and delivery section can be positioned.

The electronic component handling apparatus of [application examples 36] the application example are characterised by possessing：Mounting electronics can be conveyed The delivery section of the mounting part of part, can configure it is described mounting part the first configuration section, the mounting part can be configured And second configuration section different from first configuration section and the test zone in the inspection portion for being capable of configuration inspection electronic unit Domain, the electronic unit of the inspection area is transported in first configuration section mounting, is carried in second configuration section The electronic unit from inspection area conveying is put, being provided with the delivery section and second configuration section will be described defeated Send the downstream location division of portion and second configuration section positioning.

Thereby, it is possible to the second configuration section and delivery section are positioned.Therefore conveyed to the second configuration section from the first configuration section Mounting part, and in the second configuration section configuration mounting part, can accurately carry out configuration operation.

[application examples 37] in the electronic component handling apparatus that above-mentioned application examples 36 is recorded, preferably described downstream positions Portion is by being arranged at the convex portion of the delivery section and being arranged at second configuration section and constituted for the recess that the convex portion is inserted.

Thus, by the way that convex portion to be inserted the simple structure of recess etc, the second configuration section and delivery section can be positioned.

[application examples 38] in the electronic component handling apparatus any one of above-mentioned application examples 33~37, preferably exists In first configuration section and second configuration section, it is described mounting part be configured to along with first configuration section with And the direction movement that the direction of second configuration section arrangement intersects, and with limit the mounting part to the mounting portion The limiting part of the movement in the orthogonal direction of the moving direction of part.

Thereby, it is possible to prevent the mounting part for being configured at the first configuration section and the second configuration section from producing position to offset.

[application examples 39] in the electronic component handling apparatus that above-mentioned application examples 38 is recorded, preferably described second configuration section The mounting part limitation direction width than the mounting part of first configuration section limitation direction width It is small.

Particularly in the first configuration section mounting mounting part of narrow width, the positioning carried out by upstream side location division has very much Profit.

[application examples 40] in the electronic component handling apparatus that above-mentioned application examples 39 is recorded, preferably described first configuration section Width be more than 136mm and below 137mm, the width of second configuration section is more than 136.5mm and below 137.5mm.

[application examples 41] in the electronic component handling apparatus any one of above-mentioned application examples 38~40, preferably institute Limiting part is stated to be made up of two opposed wall portions of the direction arranged in first configuration section and second configuration section respectively, The upstream side location division and downstream location division configuration are located at from second configuration section in described two wall portions Towards the wall portion in the direction of first configuration section.

In existing electronic component inspection device, manufactured on the basis of the first configuration section side, it is possible to reducing chi Very little error.

[application examples 42] in the electronic component handling apparatus any one of above-mentioned application examples 38~41, preferably institute Stating limiting unit has the guide portion of the guiding mounting part.

Thereby, it is possible to easily be positioned.

[application examples 43] in the electronic component handling apparatus that above-mentioned application examples 42 is recorded, preferably described guide portion is in cone Shape.

Thereby, it is possible to be positioned easily and successfully.

The electronic component inspection device of [application examples 44] the application example is characterised by possessing：Mounting electronics can be conveyed The delivery section of the mounting part of part, be capable of configuration inspection electronic unit inspection portion inspection area, can configure and be placed with It is delivered to the mounting part of the electronic unit of the inspection area and more leans on the electricity positioned at than the inspection area First configuration section of the conveying direction upstream side of subassembly, can configure be placed with from the inspection area conveying the electronics The mounting part of part and be located at than the inspection area more by the electronic unit conveyance direction downstream side and with institute State the second different configuration section of the first configuration section and check the inspection portion of the electronic unit, in the delivery section and described First configuration section is provided with the upstream side location division for positioning the delivery section and first configuration section.

Thereby, it is possible to the first configuration section and delivery section are positioned.Therefore conveyed to the first configuration section from the second configuration section Mounting part, and in the first configuration section configuration mounting part, can accurately carry out configuration operation.

The electronic component handling apparatus of [application examples 45] the application example are characterised by possessing：Can configure and convey First delivery section of electronic unit, the second delivery section that can configure and convey the electronic unit and inspection can be configured Look into the inspection area in the inspection portion of the electronic unit, first delivery section configures the electronic unit, can be along towards institute The direction of inspection area and the direction movement away from the inspection area are stated, second delivery section configures the ministry of electronics industry Part, can move along the direction towards the inspection area and away from the direction of the inspection area.

Thereby, it is possible to suitably change conveying direction of the electronic unit relative to inspection area, therefore can for example set Multiple transport models (mode of movement) corresponding with electronic unit, and one can be selected to perform from above-mentioned pattern.

[application examples 46] in the electronic component handling apparatus that above-mentioned application examples 45 is recorded, preferably described first delivery section The direction that the electronic unit is conveyed with second delivery section is mutually opposite direction.

Thus, for example when being checked using inspection portion, electronic unit can be made to enter from mutually opposite direction.Cause The direction of operating personnel's identification electronic unit towards inspection area of this electronic component handling apparatus such that it is able to confirm to check dress In putting the action of which transport model being currently in above-mentioned multiple transport models.

[application examples 47] in the electronic component handling apparatus that above-mentioned application examples 45 or 46 is recorded, preferably described first Delivery section and second delivery section are able to adjust the temperature of the electronic unit.

Thereby, it is possible to electronic unit is adjusted to be adapted to the temperature of inspection.

[application examples 48] in the electronic component handling apparatus any one of above-mentioned application examples 45~47, preferably institute State the first delivery section and second delivery section is respectively arranged with multiple.

Thereby, it is possible to realize the raising of productivity ratio (the conveying number of the electronic unit of time per unit).

[application examples 49] in the electronic component handling apparatus that above-mentioned application examples 48 is recorded, preferably described first delivery section Moment with second delivery section towards the inspection area is mutually the same.

Thereby, it is possible to carried out simultaneously using inspection portion the inspection of electronic unit to being conveyed by the first delivery section and to by The inspection of the electronic unit of the second delivery section conveying.

[application examples 50] in the electronic component handling apparatus that above-mentioned application examples 48 is recorded, preferably described first delivery section Moment with second delivery section towards the inspection area is different from each other.

Thereby, it is possible to be loaded as much as possible in inspection portion and check by the first delivery section conveying come electronic unit, separately Outward, before and after the inspection, it is also possible to load and check the ministry of electronics industry conveyed by the second delivery section as much as possible in inspection portion Part.

[application examples 51] in the electronic component handling apparatus any one of above-mentioned application examples 45~50, preferably institute State electronic unit has at least carried out 1 inspection in the inspection portion.

Electronic unit thereby, it is possible at least carried out 1 inspection to this using inspection portion is checked again for.

[application examples 52] preferably possesses described in being positioned in the electronic component handling apparatus that above-mentioned application examples 51 is recorded Inspection portion has at least carried out 1 mounting portion of the electronic unit of inspection.

Thereby, it is possible to according to inspection result, classify to electronic unit.

[application examples 53] in the electronic component handling apparatus that above-mentioned application examples 52 is recorded, preferably described mounting portion is not moved It is dynamic.

Thus, it is configured with the region of the various movable parts more than comparing even if mounting portion is located at, also can be steady in the mounting portion Fixed mounting checks the electronic unit for finishing.

[application examples 54] in the electronic component handling apparatus any one of above-mentioned application examples 45~53, preferably has The standby transfer robot that multiple electronic units are conveyed from the mounting portion to second delivery section, the transfer robot The interval of multiple electronic units can be changed.

Thus, the mounting portion as delivery source each electronic unit interval and as the second defeated of conveying destination In the case of sending the interval difference of each electronic unit in portion, it is also possible to which electronic unit is rapid and successfully from delivery source to defeated Destination is sent to convey.

[application examples 55] in the electronic component handling apparatus any one of above-mentioned application examples 45~50, preferably institute Electronic unit is stated to be not inspected in the inspection portion.

Thereby, it is possible under the conditions of mutually different inspection to the electronic unit that is conveyed by the first delivery section and by second The electronic unit of delivery section conveying is checked.

[application examples 56] in the electronic component handling apparatus that above-mentioned application examples 55 is recorded, preferably described first delivery section Or second delivery section can adjust the temperature of the electronic unit.

The electronic component inspection device of [application examples 57] the application example is characterised by possessing：Can configure and convey First delivery section of electronic unit, the second delivery section that can configure and convey the electronic unit, the inspection ministry of electronics industry The inspection portion of part and the inspection area in the inspection portion can be configured, first delivery section configures the electronic unit, energy Enough directions along towards the inspection area and the direction movement away from the inspection area, second delivery section configure institute Electronic unit is stated, can be moved along the direction towards the inspection area and away from the direction of the inspection area.

Brief description of the drawings

The face side that Fig. 1 is observes the brief perspective views of the first embodiment of electronic component inspection device of the invention.

Fig. 2 is the schematic top of the common operating state for representing the electronic component inspection device shown in Fig. 1.

Fig. 3 is the schematic top of the operating state of resurveying for representing the electronic component inspection device shown in Fig. 1 in order.

Fig. 4 is the schematic top of the operating state of resurveying for representing the electronic component inspection device shown in Fig. 1 in order.

Fig. 5 is the schematic top of the operating state of resurveying for representing the electronic component inspection device shown in Fig. 1 in order.

Fig. 6 is the schematic top of the operating state of resurveying for representing the electronic component inspection device shown in Fig. 1 in order.

Fig. 7 is the schematic top of the operating state of resurveying for representing the electronic component inspection device shown in Fig. 1 in order.

Fig. 8 is the schematic top of the operating state of resurveying for representing the electronic component inspection device shown in Fig. 1 in order.

Fig. 9 is the operating state of resurveying for representing electronic component inspection device of the invention (second embodiment) in order Schematic top.

Figure 10 is the operating state of resurveying for representing electronic component inspection device of the invention (the 3rd implementation method) in order Schematic top.

Figure 11 is the operating state of resurveying for representing electronic component inspection device of the invention (the 3rd implementation method) in order Schematic top.

Figure 12 is the one of the operation screen used in the setting of the action of resurveying of the electronic component inspection device shown in Fig. 1 Individual example.

Figure 13 is the one of the operation screen used in the setting of the action of resurveying of the electronic component inspection device shown in Fig. 1 Individual example.

Figure 14 is the one of the operation screen used in the setting of the action of resurveying of the electronic component inspection device shown in Fig. 1 Individual example.

Figure 15 is the one of the guidance panel used in the setting of the action of resurveying of the electronic component inspection device shown in Fig. 1 Individual example.

Figure 16 is the brief perspective views of the 4th implementation method that electronic component inspection device of the invention is observed from face side.

Figure 17 is the schematic top of the common operating state for representing the electronic component inspection device shown in Figure 16.

Figure 18 is the schematic top of the operating state of resurveying for representing the electronic component inspection device shown in Figure 16 in order.

Figure 19 is the schematic top of the operating state of resurveying for representing the electronic component inspection device shown in Figure 16 in order.

Figure 20 is the schematic top of the operating state of resurveying for representing the electronic component inspection device shown in Figure 16 in order.

Figure 21 is the schematic top of the operating state of resurveying for representing the electronic component inspection device shown in Figure 16 in order.

Figure 22 is the schematic top of the operating state of resurveying for representing the electronic component inspection device shown in Figure 16 in order.

Figure 23 is the schematic top of the operating state of resurveying for representing the electronic component inspection device shown in Figure 16 in order.

Figure 24 is the stereogram for representing the conveyor pallet structure (delivery section) shown in Figure 16.

Figure 25 is the sectional view for representing the conveyor pallet structure (delivery section) shown in Figure 24.

Figure 26 is the sectional view for representing the conveyor pallet structure (delivery section) shown in Figure 24.

Figure 27 is the sectional view for representing the conveyor pallet structure (delivery section) shown in Figure 24.

Figure 28 is the front view of the linking part shown in Figure 24, is to represent the shape that conveyor pallet structure (delivery section) is rising The figure of state.

Figure 29 is the side view of the linking part shown in Figure 24, is to represent the shape that conveyor pallet structure (delivery section) is rising The figure of state.

Figure 30 is the front view of the linking part shown in Figure 24, is to represent the shape that conveyor pallet structure (delivery section) is declining The figure of state.

Figure 31 is the side view of the linking part shown in Figure 24, is to represent the shape that conveyor pallet structure (delivery section) is declining The figure of state.

Figure 32 is the figure for illustrating the effect of upstream side location division and downstream location division, be represent delivery site in The figure of the state of the top of the second place.

Figure 33 is the figure for illustrating the effect of upstream side location division and downstream location division, is to represent that delivery section declines State figure.

Figure 34 is the figure for illustrating the effect of upstream side location division and downstream location division, be represent delivery site in The figure of the state of the top of first position.

Figure 35 is the figure for illustrating the effect of upstream side location division and downstream location division, is to represent that delivery section declines State figure.

Figure 36 is the conveyor pallet structure (conveying for representing electronic component inspection device of the invention (the 5th implementation method) Portion) stereogram.

Figure 37 is the conveyor pallet structure (conveying for representing electronic component inspection device of the invention (the 6th implementation method) Portion) sectional view.

Figure 38 be represent electronic component inspection device of the invention (the 7th implementation method) upstream side location division and under Swim the figure of side location division.

Figure 39 is the brief perspective views of the 8th implementation method that electronic component inspection device of the invention is observed from face side.

Figure 40 is the common operating state (usual transport model) for representing the electronic component inspection device shown in Figure 39 Schematic top.

Figure 41 is that the operating state of resurveying for representing the electronic component inspection device shown in Figure 39 in order (checks again for conveying Pattern) schematic top.

Figure 42 is that the operating state of resurveying for representing the electronic component inspection device shown in Figure 39 in order (checks again for conveying Pattern) schematic top.

Figure 43 is that the operating state of resurveying for representing the electronic component inspection device shown in Figure 39 in order (checks again for conveying Pattern) schematic top.

Figure 44 is that the operating state of resurveying for representing the electronic component inspection device shown in Figure 39 in order (checks again for conveying Pattern) schematic top.

Figure 45 is that the operating state of resurveying for representing the electronic component inspection device shown in Figure 39 in order (checks again for conveying Pattern) schematic top.

Figure 46 is that the operating state of resurveying for representing the electronic component inspection device shown in Figure 39 in order (checks again for conveying Pattern) schematic top.

Figure 47 is that the operating state of resurveying for representing the electronic component inspection device shown in Figure 39 in order (checks again for conveying Pattern) schematic top.

Figure 48 is that the operating state of resurveying for representing the electronic component inspection device shown in Figure 39 in order (checks again for conveying Pattern) schematic top.

Figure 49 is the figure of the operating state for representing the equipment delivery head that the electronic component inspection device shown in Figure 39 possesses.

Figure 50 is the figure of the operating state for representing the equipment delivery head that the electronic component inspection device shown in Figure 39 possesses.

Figure 51 is represent electronic component inspection device of the invention (the 9th implementation method) in order different from Figure 40 The schematic top of operating state (parallel transport model).

Figure 52 is represent electronic component inspection device of the invention (the 9th implementation method) in order different from Figure 40 The schematic top of operating state (parallel transport model).

Specific embodiment

Below according to preferred embodiment shown in the drawings, electronic component handling apparatus of the invention and electricity are described in detail Subassembly check device.

In the following embodiments, for convenience of description, as shown in figure 1,3 mutually orthogonal axles are set into X-axis, Y Axle and Z axis.In addition, the X/Y plane comprising X-axis and Y-axis is set into level, Z axis are set to vertical.In addition, will be parallel to X-axis Direction be referred to as " X-direction ", the direction parallel to Y-axis is referred to as " Y-direction ", and the direction parallel to Z axis is referred to as " Z-direction ".In addition, Described " level " is not limited to fully horizontally, as long as the conveying of electronic unit is unobstructed, also wrap in present specification Containing relative to level somewhat (being, for example, less than 5 °) inclined state.

In addition, the check device (electronic component inspection device) shown in following implementation method, e.g. for checking, trying The IC such as BGA (Ball grid array) package, LGA (Land grid array) package are tested (hereinafter referred to as " check ") to set The electricity of the electronic units (electronic component) such as standby, LCD (Liquid Crystal Display), CIS (CMOS Image Sensor) The device of characteristic.In addition, it is following for convenience of description, using using IC equipment as the above-mentioned electronic unit for being checked situation Illustrated to represent, be set to " IC equipment 90 ".

First embodiment

Fig. 1 is the brief perspective views of the first embodiment that electronic component inspection device of the invention is observed from face side. Fig. 2 is the schematic top of the common operating state for representing the electronic component inspection device shown in Fig. 1.Fig. 3~Fig. 8 is respectively In order represent Fig. 1 shown in electronic component inspection device operating state of resurveying schematic top.Figure 12~Figure 14 distinguishes It is an example of the operation screen used in the setting of the action of resurveying of the electronic component inspection device shown in Fig. 1.Figure 15 It is an example of the guidance panel used in the setting of the action of resurveying of the electronic component inspection device shown in Fig. 1.

Referring to above-mentioned accompanying drawing to the first of electronic component handling apparatus of the invention and electronic component inspection device Implementation method is illustrated.

As shown in Figure 1 and Figure 2,1 point of check device is pallet supply area A1, the (hereinafter referred to as " confession of equipment supply area To region ") A2, inspection area A3, equipment recovery zone (hereinafter referred to as " recovery zone ") A4, pallet remove region A5.And And, IC equipment 90 removes region A5 from pallet supply area A1 to pallet successively via above-mentioned each region, in the test zone of midway Domain A3 is checked.So, check device 1 possess each region conveying IC equipment 90 electronic component handling apparatus, checking Inspection portion 16, the control unit 800 checked in the A3 of region.And, check device 1 is also equipped with monitor 300, guidance panel 700th, signal lamp 400.

In addition, in check device 1, pallet supply area A1, pallet will be configured with and remove a side of region A5 (in Fig. 2 Downside) as face side, by its opposition side, that is, be configured with a side (upside in Fig. 2) of inspection area A3 as rear side To use.

Pallet supply area A1 generally is supplied with being arranged with the pallet (mounting portion of multiple IC equipment 90 of non-inspection state Part) 200 confession material portion.In pallet supply area, A1 can be laminated multiple pallets 200.

Supply area A2 is to supply the multiple IC equipment 90 configured on the pallet 200 from pallet supply area A1 respectively It is given to the region of inspection area A3.In addition, in the way of across pallet supply area A1 and supply area A2, being provided with along level Direction conveys conveyor pallet structure 11A, 11B of pallet 200 one by one.Conveyor pallet structure 11A be can make pallet 200 with The IC equipment 90 of the pallet 200 is placed in together, towards the positive side and the move portion of minus side way moving of Y-direction.Thus, it is possible to Make the stabilization of IC equipment 90 and send into supply area A2.In addition, conveyor pallet structure 11B is can to make empty pallet 200 towards Y-direction Minus side, i.e., the move portion for being moved from supply area A2 to pallet supply area A1.

In supply area, A2 is provided with：Temperature adjustment portion 12 and the equipment delivery head 13 as electronic unit delivery head.

Temperature adjustment portion 12 is the part that can unify to cool down, heat multiple IC equipment 90, also referred to as " temperature-uniforming plate ".Profit The temperature-uniforming plate is used, the IC equipment 90 before inspection portion 16 checks is cooled down or heated in advance, can be adjusted to be adapted to be somebody's turn to do The temperature of inspection.In the structure shown in Fig. 2, temperature adjustment portion 12 is configured along Y-direction, is fixed with 2.And, it is defeated by pallet IC equipment 90 of the mechanism 11A from the pallet 200 that pallet supply area A1 moves into (conveying comes) is sent, a certain temperature is transported to and is adjusted Whole 12.

Equipment delivery head 13 be supported to can in the A2 of supply area in X direction, Y-direction and Z-direction movement.Thus Equipment delivery head 13 can be responsible for the IC equipment 90 between the pallet 200 moved into from pallet supply area A1 and temperature adjustment portion 12 Conveying and the IC equipment 90 between temperature adjustment portion 12 and equipment supply unit 14 described later conveying.

Inspection area A3 is the region for checking IC equipment 90.In the inspection area, A3 is provided with inspection portion 16 and equipment conveying First 17.In addition, be additionally provided with by across the equipment supply unit 14 moved in the way of supply area A2 and inspection area A3 and with Across the equipment recoverer 18 that the mode of inspection area A3 and recovery zone A4 is moved.

Equipment supply unit 14 is the IC equipment 90 that mounting temperature is adjusted and conveys (movement) to inspection the IC equipment 90 Move portion near portion 16, also referred to as " supply shuttle plate ".The equipment supply unit 14 is supported to can be in supply area Moved in X direction between A2 and inspection area A3.In addition, in the structure shown in Fig. 2, equipment supply unit 14 is configured along Y-direction There are 2, the IC equipment 90 in temperature adjustment portion 12 is transported to a certain equipment supply unit 14.In addition, in equipment supply unit 14, It is same with temperature adjustment portion 12, IC equipment 90 can be cooled down or heat, the IC equipment 90 is adjusted to be adapted to the temperature of inspection.

Inspection portion 16 is the electrical characteristics unit for checking, testing IC equipment 90.It is provided with to keep IC equipment in inspection portion 16 Multiple probes that 90 state is electrically connected with the terminal of the IC equipment 90.And, the terminal of IC equipment 90 is electrically connected with probe and (connect Touch), the inspection of IC equipment 90 is carried out via probe.According to the inspection control unit possessed in the tester being connected with inspection portion 16 The program of middle storage carries out the inspection of IC equipment 90.In addition in inspection portion 16, it is same with temperature adjustment portion 12, can cool down or Person heating IC equipment 90, the IC equipment 90 is adjusted to be adapted to the temperature of inspection.

Equipment delivery head 17 is supported in the A3 of inspection area to be moved along Y-direction.Thus, the energy of equipment delivery head 17 IC equipment 90 on enough equipment supply units 14 that will be moved into from supply area A2 is conveyed, is placed in inspection portion 16.In addition, equipment Delivery head 17 can also cool down or heat IC equipment 90, and the IC equipment 90 is adjusted to be adapted to the temperature of inspection.

Equipment recoverer 18 is the IC equipment 90 of the inspection end for being positioned in inspection portion 16 and the IC equipment 90 is conveyed into (shifting It is dynamic) to the move portion of recovery zone A4, also referred to as " recovery shuttle plate ".The equipment recoverer 18 is supported to can be in inspection Look into and moved in X direction between region A3 and recovery zone A4.In addition, in the structure shown in Fig. 2, equipment recoverer 18 and equipment Supply unit 14 is identical, and 2 are configured with along Y-direction, and the IC equipment 90 in inspection portion 16 is conveyed, is placed in a certain equipment recoverer 18.The conveying is carried out by equipment delivery head 17.

Recovery zone A4 is to reclaim the multiple regions of IC equipment 90 for checking and terminating.In the recovery zone, A4 is provided with recovery and uses Pallet 19 and equipment delivery head 20.Generally also prepare empty pallet 200 in recovery zone A4 in addition.

Recovery pallet 19 is the mounting portion for loading IC equipment 90, is fixed in the A4 of recovery zone, in the structure shown in Fig. 2 In, 3 are configured with X direction.Empty pallet 200 is also the mounting portion for loading IC equipment 90 in addition, and 3 are configured with X direction. And the IC equipment 90 moved on the equipment recoverer 18 of recovery zone A4 conveyed, be placed in above-mentioned recovery pallet 19 with And some in the pallet 200 of sky.Thus, IC equipment 90 is classified according to inspection result, reclaims.

Equipment delivery head 20 be supported in the A4 of recovery zone can in X direction, Y-direction and Z-direction movement.By This, the slave unit recoverer 18 of IC equipment 90 can be delivered to recovery pallet 19, empty pallet 200 by equipment delivery head 20.

In addition, in the way of across supply area A2 and recovery zone A4, (mounting part is defeated to be provided with conveyor pallet structure Send robot) 15.Conveyor pallet structure 15 is the movement that can make pallet 200 towards the positive side and minus side way moving of X-direction Portion.

Using the conveyor pallet structure 15, for example, can make what whole IC equipment 90 were removed in the A2 of supply area The empty pallet 200 of state is conveyed towards the positive side of X-direction.And after the conveying, empty pallet 200 passes through conveyor pallet structure 11B returns to pallet supply area A1 from supply area A2.

In addition, conveyor pallet structure 15 can make to remove the empty pallets 200 moved into of region A5 in recovery zone from pallet Towards the conveying of X-direction positive side in A4.And after the conveying, empty pallet 200 is configured at the position for reclaiming IC equipment 90, becomes Some in the pallet 200 of above-mentioned 3 skies.

It is to reclaim, remove the pallet 200 for being arranged with the multiple IC equipment 90 for checking the state that finishes that pallet removes region A5 Except material portion.The multiple pallets 200 of region A5 stackings can be removed in pallet.

In addition, in the way of removing region A5 across recovery zone A4 and pallet, being provided with and being conveyed one by one along Y-direction Conveyor pallet structure 22A, 22B of pallet 200.Conveyor pallet structure 22A be pallet 200 can be made towards the positive side of Y-direction and The move portion of minus side way moving.Thus, for example, can will check that the IC equipment 90 for finishing is delivered to pallet from recovery zone A4 Remove region A5.In addition, conveyor pallet structure 22B is can be used in reclaim the empty pallet 200 of IC equipment 90 towards Y-direction Positive side, i.e., remove the move portion that region A5 is moved to recovery zone A4 from pallet.

In such check device 1, as the delivery section 23 that can convey pallet 200, it is provided with pallet supply area Between A1 and supply area A2 along Y-direction conveying pallet 200 loading machine be conveyor pallet structure 11A, recovery zone A4 with Pallet remove region A5 between along Y-direction conveying pallet 200 unloader be conveyor pallet structure 22A, supply area A2 with The conveyor pallet structure 15 of pallet 200 is conveyed between the A4 of recovery zone in X direction.Thus, with for example using a conveying mechanism Carry out the X-direction of pallet 200 to be compared with the conveying of Y-direction, the productivity ratio (conveying of the IC equipment 90 of time per unit can be realized Number) raising.

Control unit 800 for example has drive control part.Drive control part for example controls conveyor pallet structure 11A, 11B, temperature Degree adjustment portion 12, equipment delivery head 13, equipment supply unit 14, conveyor pallet structure 15, inspection portion 16, equipment delivery head 17, set Standby recoverer 18, equipment delivery head 20, the driving of each several part of conveyor pallet structure 22A, 22B.

In addition, the inspection control unit of above-mentioned tester enters for example according to the program of the middle storage in memory (not shown) Row is configured at the inspection of electrical characteristics of IC equipment 90 in inspection portion 16 etc..

Operation condition that operating personnel can set via monitor 300, confirm check device 1 etc..The monitor 300 has There is the display picture (display part) 301 being for example made up of liquid crystal panel, be configured at the front upper lateral part of check device 1.Such as Fig. 1 institutes Show, the right side in the figure that pallet removes region A5 is provided with the Mouse table 600 of mounting mouse, the mouse is shown in prison in operation Used during the picture of visual organ 300.

In addition, the lower right in relative to monitor 300 by Fig. 1 is configured with guidance panel 700.The phase of guidance panel 700 For the order that monitor 300 individually sends desired action to check device 1.As shown in figure 15, guidance panel 700 is wrapped Containing button 701~714,5 row are arranged with from the upside in figure.

The first row positioned at topmost in fig .15 is configured with button 701 and button 702.Above-mentioned button is check device The switching button of 1 main power source, collectively referred to as " POWER ", are " ON " according to button 701, and button 702 is distributed for " OFF ".

703~button of button 706 is configured with the secondary series positioned at the downside of first row.It is according to button 703 " START ", button 704 is " HOME ", and button 705 is " PAUSE ", and button 706 is distributed for " RESET ".

707~button of button 710 is configured with the 3rd row positioned at the downside of secondary series.It is " CLEAN according to button 707 OUT ", button 708 is " SKIP ", and button 709 is " RETRY ", and button 710 is distributed for " ONE CYCLE ".

711~button of button 713 is configured with the 4th row positioned at tertial downside.It is " ALARM according to button 711 RESET ", button 712 is " TRAY END ", and button 713 " TRAY FEED " is distributed.

Button 714 is configured with the 5th row positioned at the downside of the 4th row.Divide for " COVEROPEN " according to button 714 Match somebody with somebody.

In addition, signal lamp 400 can be by lighting color combination, the operating state of report check apparatus 1 etc..Signal Lamp 400 is configured at the top of check device 1.Additionally, loudspeaker 500 is built-in with check device 1, using the loudspeaker 500 It is capable of operating state of report check apparatus 1 etc..

As shown in Fig. 2 in check device 1, being divided by the first next door 61 between pallet supply area A1 and supply area A2 (separation), is divided, between inspection area A3 and recovery zone A4 between supply area A2 and inspection area A3 by the second next door 62 Divided by the 3rd next door 63, divided by the 4th next door 64 between recovery zone A4 and pallet removing region A5.Above-mentioned next door has Keep the function of the air-tightness in each region.Also, the most appearance quilt cover of check device 1 is covered, the cover for example includes front shroud 70, side cover 71st, side cover 72, back cover 73, overhead guard 74.

As described above, in check device 1, IC equipment 90 according to inspection portion 16 according to inspection result, in recovery zone A4 is classified, reclaims.The classification for example has " inspection result is qualified ", " inspection result is unqualified ", " need to check again for ".In this reality In applying mode, in 3 kinds of pallets 200 of the IC equipment 90 in 3~Fig. 8 of classification chart, be referred to as successively from left side " pallet 200A ", " pallet 200B ", " pallet 200C ".In check device 1, as an example, pallet 200A is assigned as " inspection result conjunction The pallet 200 of lattice ", pallet 200B is assigned as the pallet 200 of " inspection result is unqualified ", and pallet 200C is assigned as " needing again The pallet 200 of secondary inspection ".

Illustrate to check again for the situation of the IC equipment 90 on pallet 200C, i.e., work(of resurveying automatically referring to Fig. 3~Fig. 8 Energy.

In addition, the inspection referred to as " first checks " before checking again for, checks again for referred to as " second checks ".Therefore, One checks that with the second inspection be identical inspection.Check again for (resurvey) Producing reason can for example enumerate because check when inspection The mutual loose contact of terminal of portion 16 and IC equipment 90 and cannot to judge inspection result be " qualified " or " unqualified ".

In check device 1, the second place P2 of first position P1 and the position different from first position P1 is set with.First Position P1 is the position of the pallet 200 that configuration is placed with the IC equipment 90 before the first inspection in the A1 of pallet supply area.Separately Outward, second place P2 is removed in the A5 of region in pallet, is the IC equipment after configuration before second checks has been placed with the first inspection The position of 90 pallet 200 (pallet 200C).

In addition, as shown in figure 1, pallet supply area A1 and pallet remove region A5 all to the outside dew of check device 1 Go out.Therefore, first position P1 and second place P2 turn into the state of the outside for being set in check device 1.Thus, for example In check device 1 check again for the midway of action, the feelings of pallet 200 are taken out from first position P1 or second place P2 Under condition, the taking-up operation can become easy.

Each IC equipment 90 for carrying out the batch of amount of the first inspection is deposited in first position P1, as described above in check device (reference picture 2) is conveyed in 1, then as the state shown in Fig. 3.As shown in Figure 3, the pallet of region A5 is removed in pallet 200A is placed with multiple IC equipment 90, but still in the idle condition of IC equipment 90 can be loaded.In addition, being removed positioned at pallet The pallet 200C of the second place P2 of region A5 is piled as IC equipment 90 as much as possible is placed with by multiple IC equipment 90 State.

And, as shown in figure 4, the conveyor pallet structure 22A for constituting delivery section 23 will be placed with the pallet of IC equipment 90 200C is delivered to recovery zone A4 from second place P2.

Next, as shown in figure 5, from recovery zone A4 be transported to pallet 200C by conveyor pallet structure 15 (delivery section 23) The assigned position of supply area A2, that is, be transported to the position before the P1 of first position.

Next, as shown in fig. 6, conveyor pallet structure 11A (delivery section 23) conveys pallet 200C from supply area A2 To the first position P1 of pallet supply area A1.The conveying of such pallet 200C as shown in Fig. 3~Fig. 6 is carried out until being located at Untill whole pallet 200C of second place P2 are transported to first position P1.

Next, as shown in fig. 7, conveyor pallet structure 11A conveyings and take positioned at a pallet 200C of first position P1 Go out to the A2 of supply area.In addition, the pallet 200A that pallet is removed in the A5 of region is delivered to recovery area by conveyor pallet structure 22A In the A4 of domain, as the state that destination stopping is conveyed at it.

Next, as shown in figure 8, identical with the first inspection, using equipment recoverer 18 by the IC equipment on pallet 200C 90 are transported to recovery zone A4.Additionally, the IC equipment 90 is set to " inspection result is qualified ".And, equipment delivery head 20 will set The clearance spaces of the pallet 200A conveyed for the IC equipment 90 on recoverer 18, being placed in the A4 of recovery zone are formed at pallet The empty pocket of 200A.

As described above, in the case where to be checked again for, be able to will be placed with as its inspection by the use of delivery section 23 The pallet 200C of the IC equipment 90 of object is delivered to first position P1 from second place P2.Thus, as can start to examine again The state looked into.In the past, the pallet 200C for being placed with IC equipment 90 is for example configured at via the hand of operating personnel from second place P2 First position P1.However, in check device 1, by the automatic transport of delivery section 23, the fiber crops of aforesaid operations personnel can be saved It is tired, efficiently convey pallet 200C.Thereby, it is possible to be checked again for rapidly.

Next, explanation can check the first setting screen 3, second to the second automatic switchover setting for checking from first The setting screen 5 of setting screen 4 and the 3rd.Above-mentioned setting screen mirrors the display picture 301 of monitor 300.And, pass through Appropriate operation, thus, it is possible to carry out being checked to the second switching for checking from first rapidly.

As shown in figure 12, the first setting screen 3 includes the first menu group 31 and the second menu group 32.

First menu group 31 includes 311~button of button 317, is " Exit " according to button 311, and button 312 is " Shut Down ", button 313 is " Device Set ", and button 314 is " Unit Set ", and button 315 is " Maintenance ", button 316 is " My Pad ", and button 317 is distributed for " Calculator ".

Second menu group 32 includes 321~button of button 3211, is " Set up " according to button 321, and button 322 is " Tray Form ", button 323 is " Plate Form ", and button 324 is " Tray Assign ", and button 325 is " Temp.Offset ", button 326 is " Contact ", and button 327 is " Tester I/F ", and button 328 is " Bin ", button 329 It is " DblDevice " that button 3210 is " Cleaning ", button 3211 is distributed for " FIFO ".

And, if being operated sequentially the button 313 of the first menu group 31, the button 324 of the second menu group 32, second sets Determine picture 4 to be shown in display picture 301.

As shown in figure 13, the second setting screen 4 includes the first menu group 41, the second menu group 42, the 3rd menu group 43, the Four menu groups 44, the 5th menu group 45, the 6th menu group 46.

First menu group 41 represents that the conveying in the IC equipment 90 of check device 1 is acted, and generally (checks again for comprising representing Before) conveying direction arrow plot 411, represent pallet 200 configuration tray arrangement Figure 41 2, the conveying that checks again for of expression The arrow plot 413 in direction." Normal Test " is marked on arrow plot 411, " Retest " is marked on arrow plot 413.

Second menu group 42 is the setting screen " Tray of the conveying implementation method of pallet when setting is checked again for Transport as Retest ", comprising check box 421~423.It is " Same as Normal Test " according to check box 421, Check box 422 is " Color trays according to Normal Test setting ", and check box 423 is " Original setting " is distributed.

3rd menu group 43 is the setting screen " Auto of the ON/OFF that can set the automatic switchover for checking again for Retest ", comprising check box 431~434.It is " Retest Automatically " according to check box 431, check box 432 is " Max_times ", check box 433 is " Manual select at Lot End ", and check box 434 is distributed for " OFF ".

Additionally, moving to the second inspection automatically after being checked first, i.e., to carry out the automatic switchover that (hope) is checked again for In the case of, " inspection " input is input into check box 431, and in check box 432 is input into " number of times of automatic switchover " and set.

In addition, manually to move to the second inspection after being checked first, i.e., the manual switching that checked again for In the case of, it is input into " inspection " in check box 433.Then, after the 3rd setting screen 5 is shown, it is operated sequentially guidance panel 700 button 709, button 703 (reference picture 15).Thus, check device 1 can move to the second inspection.Additionally, in the 3rd setting After the display of picture 5 operate guidance panel 700 button 708 in the case of, the tenth skill of check device 1 and be not moved to the second inspection Look into.

In addition, being input into " inspection " in check box 434 in the case of the switching for not carrying out (be not intended to) checking again for.

4th menu group 44 is the setting screen " Unloading of the action for setting the pallet 200 that pallet removes region A5 sides Tray Mode ", comprising check box 441~443.It is " Automatically ejects trays according to check box 441 After clean-out ", check box 442 is " Auto.sets Empty trays to the Unloader lane at Initial Start ", check box 443 is " Auto.sets Empty trays to the Unloader lane at Retest start " are distributed.

5th menu group 45 is setting screen " the Tray X- for setting pallet 200 towards the occupation mode of the action of X-direction Skip setting (Only Permulation) ", comprising check box 451 and check box 452.It is according to check box 451 " Disable Unloader Tray ", check box 452 is distributed for " Disable Loader Tray ".

6th menu group 46 is that the pallet 200, pallet for setting pallet supply area A1 removes the pallet 200 of region A5, returns Receive the recovery setting screen (table) of the species of pallet 19 etc. of region A4.Longitudinal direction in Figure 13 is assigned as " Loader ", " Empty Tray1 ", " Empty Tray2 ", " Auto1 ", " Auto2 ", " Auto3 ", " Fix1 ", " Fix2 ", " Fix3 ", laterally " Type " is assigned as, " Direction ".

In addition, in the second setting screen 4 in addition to the menu group 46 of the first menu group the 41~the 6th, also button 471~ 476.It is " Load/Unload Position " according to button 471, button 472 is " Store ", and button 473 is " Recall ", is pressed Button 474 is " OK ", and button 475 is " Cancel ", and button 476 is distributed for " Apply ".

After the input checking of check box 433 of the 3rd menu group 43 of the second setting screen 4, the shown in display Figure 14 the 3rd Setting screen 5.3rd setting screen 5 includes the first reporting unit 51, the second reporting unit 52, layout 53.

First error coded display part 511, display unit of the reporting unit 51 comprising display error coded (Error Code) (Unit) unit display part 512, the message display part 513 of display message (Message).Additionally, passing through message display part 513, check device 1 can show the state for being currently at and carrying out the common inspection of action i.e. first, or in carrying out Check again for the state of the i.e. second inspection.Thus, operating personnel will appreciate that the current state of check device 1.

Unit name display part 521 of second reporting unit 52 comprising display unit name (Unit Name), show it is aobvious in message Show portion 513 display message the reason for etc. (Cause and Countermeasure) the reason for display part 522.

Layout 53 schematically illustrates each mechanism for constituting check device 1.

Second embodiment

The second of electronic component handling apparatus of the invention and electronic component inspection device is illustrated referring to the figure Implementation method, by with the difference of above-mentioned implementation method centered on illustrate, omit the explanation of identical item.

The check device 1A of present embodiment in addition to second checks difference, other and above-mentioned first embodiment phase Together.

In the check device 1A of present embodiment, second checks it is the inspections different from the first inspection, is examined to first IC equipment 90 after looking into changes the inspection of inspection condition.Second inspection is not particularly limited, for example, can enumerate cooling or heat The high or low inspection of temperature when IC equipment 90 makes the temperature of the IC equipment 90 be checked than first, change and controlled in above-mentioned inspection Inspection of program stored in portion etc..

As shown in figure 9, the pallet 200 for loading the IC equipment 90 for carrying out the second inspection is allocated to pallet 200C.And, with Above-mentioned first embodiment it is identical when checking again for, be delivered to the pallet 200C of first position P1 by pallet from second place P2 Conveying mechanism 11A is taken out in the A2 of supply area.IC equipment 90 on pallet 200C is transported to through path as shown in Figure 9 Pallet 200B is simultaneously loaded.In such manner, it is possible to be changed the second inspection of the condition of inspection to IC equipment 90.

Additionally, difference of the path from the path shown in Fig. 8 shown in Fig. 9 is following aspect.

In the path shown in Fig. 9, IC equipment 90 is via forward in two equipment supply units, 14, two equipment recoverers 18 Cover the equipment recoverer 18 of equipment supply unit 14 of 70 sides.On the other hand, in the path shown in Fig. 8, IC equipment 90 is via back cover The equipment supply unit 14 and equipment recoverer 18 of 73 sides.It is finally " inspection result is unqualified ".

3rd implementation method

Figure 10 and Figure 11 are respectively to represent electronic component inspection device of the invention (the 3rd implementation method) in order Resurvey the schematic top of operating state.

Hereinafter, the of electronic component handling apparatus of the invention and electronic component inspection device is illustrated with reference to above-mentioned figure Three implementation methods, by with the difference of above-mentioned implementation method centered on illustrate, omit the explanation of identical item.

The check device 1B of present embodiment except first position and the second place setting position difference in addition to, other Structure is identical with above-mentioned first embodiment.

As shown in Figure 10, Figure 11, in the check device 1B that present embodiment is put, first position P1b and second place P2b In the inside of check device 1B, first position P1b is set in the A2 of supply area, and second place P2b is set at recovery area In the A4 of domain.Thus, when the second inspection is carried out, the outside that pallet 200C is temporarily expelled to check device 1B can be omitted.Separately Outward, the conveying of the pallet 200C between first position P1b and second place P2b can be responsible for by conveyor pallet structure 15.

It is effective in the case of one to be formed in as above per batch of pallet 200C.

4th implementation method

Figure 16 is the brief perspective views of the implementation method that electronic component inspection device of the invention is observed from face side.Figure 17 It is the schematic top of the common operating state for representing the electronic component inspection device shown in Figure 16.Figure 18~Figure 23 is by suitable Sequence represents the schematic top of the operating state of resurveying of the electronic component inspection device shown in Figure 16.Figure 24 is represented shown in Figure 16 Conveyor pallet structure (delivery section) stereogram.Figure 25 is the section view for representing the conveyor pallet structure (delivery section) shown in Figure 24 Figure.Figure 26 is the sectional view for representing the conveyor pallet structure (delivery section) shown in Figure 24.Figure 27 is to represent the pallet shown in Figure 24 The sectional view of conveying mechanism (delivery section).Figure 28 is the front view of the linking part shown in Figure 24, is to represent that conveyor pallet structure is (defeated Send portion) figure of state that is rising.Figure 29 is the side view of the linking part shown in Figure 24, is to represent that conveyor pallet structure is (defeated Send portion) figure of state that is rising.Figure 30 is the front view of the linking part shown in Figure 24, is to represent that conveyor pallet structure is (defeated Send portion) figure of state that is declining.Figure 31 is the side view of the linking part shown in Figure 24, is to represent that conveyor pallet structure is (defeated Send portion) figure of state that is declining.Figure 32 is the figure for illustrating the effect of upstream side location division and downstream location division, It is to represent delivery site in the figure of the state of the top of the second place.Figure 33 is for illustrating upstream side location division and downstream The figure of the effect of location division, is the figure for representing the state that delivery section have dropped.Figure 34 be for illustrate upstream side location division and The figure of the effect of downstream location division, is to represent delivery site in the figure of the state of the top of first position.Figure 35 is for saying The figure of the effect of bright upstream side location division and downstream location division, is the figure for representing the state that delivery section have dropped.

The of electronic component handling apparatus of the invention and electronic component inspection device is illustrated referring to above-mentioned figure Four implementation methods, pair with above-mentioned implementation method identical structure, item mark identical reference and the description thereof will be omitted.

Additionally, below for convenience of description, in the path of conveying electronic unit, (the initial examination when generally checking When), supply electronic unit side is referred to as " upstream side ", discharge electronic unit side is referred to as in " downstream ".

As shown in Figure 16, Figure 17,1001 points of check device be pallet supply area A1, equipment supply area (hereinafter referred to as Be " supply area ") A2, inspection area A3, equipment recovery zone (hereinafter referred to as " recovery zone ") A4, pallet remove region A5.And, IC equipment 90 removes region A5 from pallet supply area A1 to pallet successively via above-mentioned each region, in the inspection of midway Region A3 is looked into be checked.So check device 1001 possess each region conveying IC equipment 90 electronic component handling apparatus, Inspection portion 16, the control unit 1800 checked in the A3 of inspection area.And, check device 1001 be also equipped with monitor 300, Guidance panel 1700, signal lamp 400.

Additionally, in check device 1001, side (Figure 17 that pallet supply area A1, pallet remove region A5 will be configured with In downside) as face side, by its opposite side, that is, be configured with a side (upside in Figure 17) conduct of inspection area A3 Rear side is used.

Pallet supply area A1 is typically to be supplied to the pallet (mounting portion of the multiple IC equipment 90 for being arranged with non-inspection state Part) 200 confession material portion.Multiple pallets 200 can be laminated in pallet supply area A1.

Here, as shown in Figure 25~Figure 27, the tabular that pallet 200 is rectangle is formed with multiple recessed in the surface side of a side Portion 202.The configuration IC equipment 90 in the recess 202.In addition, what the edge part 201 that pallet 200 forms short-movie side was protruded laterally Shape.Additionally, " mounting surface " of pallet 200 includes the upper surface of pallet 200 and the interior table of recess 202 in this manual Face.

Multiple IC equipment 90 that supply area A2 is arranged on the pallet 200 from pallet supply area A1 are supplied respectively It is given to the region of inspection area A3.Additionally, in the way of across pallet supply area A1 and supply area A2, being provided with along level Direction conveys conveyor pallet structure 11A, 11B of pallet 200 one by one.Conveyor pallet structure 11A be can make pallet 200 with The IC equipment 90 of the pallet 200 is placed in together towards the positive side and the move portion of minus side way moving of Y-direction.Thereby, it is possible to By the stabilization feeding of IC equipment 90 supply area A2.In addition, conveyor pallet structure 11B is can to make empty pallet 200 towards Y-direction Minus side, i.e., the move portion for being moved from supply area A2 to pallet supply area A1.

In supply area, A2 is provided with temperature adjustment portion 12 and equipment delivery head 13.

Temperature adjustment portion 12 is unified cooling, heats the part of multiple IC equipment 90, also referred to as " temperature-uniforming plate ".Using this Temperature-uniforming plate, pre-cools or heats the IC equipment 90 before inspection portion 16 checks, can be adjusted to be adapted to the temperature of the inspection. In the structure shown in Figure 17, temperature adjustment portion 12 is configured along Y-direction, is fixed with 2.And, by conveyor pallet structure 11A from The IC equipment 90 that pallet supply area A1 is moved on the pallet 200 of (conveying comes) is transported to a certain temperature adjustment portion 12.

Equipment delivery head 13 be supported in the A2 of supply area can in X direction, Y-direction and Z-direction movement.By This, the IC that equipment delivery head 13 can be responsible between the pallet 200 moved into from pallet supply area A1 and temperature adjustment portion 12 sets Standby 90 conveying, the conveying of the IC equipment 90 between temperature adjustment portion 12 and equipment supply unit 14 described later.

Inspection area A3 is the region for checking IC equipment 90.In the inspection area, A3 is provided with inspection portion 16 and equipment conveying First 17.In addition, being additionally provided with by across the equipment supply unit 14 moved in the way of supply area A2 and inspection area A3, to cross over The equipment recoverer 18 that the mode of inspection area A3 and recovery zone A4 is moved.

Equipment supply unit 14 is can to load IC equipment 90 that temperature is adjusted and the IC equipment 90 is conveyed into (movement) to arrive Move portion near inspection portion 16, also referred to as " supply shuttle plate ".The equipment supply unit 14 is supported to can be in supply Moved in X direction between region A2 and inspection area A3.In addition, in the structure shown in Figure 17, equipment supply unit 14 is along Y-direction 2 are configured with, the IC equipment 90 in temperature adjustment portion 12 is transported to some equipment supply unit 14.Additionally, in equipment supply It is identical with temperature adjustment portion 12 in portion 14, IC equipment 90 can be cooled down or heat, the IC equipment 90 is adjusted to be adapted to inspection Temperature.

Inspection portion 16 is the unit of the electrical characteristics for checking, testing IC equipment 90.It is provided with to keep IC to set in inspection portion 16 Multiple probes that standby 90 state is electrically connected with the terminal of the IC equipment 90.And, the terminal of IC equipment 90 is electrically connected with probe (contact), the inspection of IC equipment 90 is carried out via probe.According to the inspection control possessed in the tester being connected with inspection portion 16 The program stored in portion processed carries out the inspection of IC equipment 90.Additionally, in inspection portion 16, it is identical with temperature adjustment portion 12, can Cooling or heating IC equipment 90, the IC equipment 90 is adjusted to be adapted to the temperature of inspection.

Equipment delivery head 17 is supported to be moved along Y-direction in the A3 of inspection area.Thus, the energy of equipment delivery head 17 IC equipment 90 on enough equipment supply units 14 that will be moved to from supply area A2 is conveyed, is placed in inspection portion 16.Additionally, setting Standby delivery head 17 can also cool down or heat IC equipment 90, and the IC equipment 90 is adjusted to be adapted to the temperature of inspection.

Equipment recoverer 18 is can be positioned in the IC equipment 90 and IC equipment 90 is defeated that the inspection in inspection portion 16 terminates (movement) to the move portion of recovery zone A4 is sent, also referred to as " recovery shuttle plate ".The equipment recoverer 18 is supported to energy It is enough to be moved in X direction between inspection area A3 and recovery zone A4.In addition, in the structure shown in Figure 17, equipment recoverer 18 is identical with equipment supply unit 14, and 2 are configured with along Y-direction, and the IC equipment 90 in inspection portion 16 is conveyed, is placed in any one Equipment recoverer 18.The conveying is carried out by equipment delivery head 17.

Recovery zone A4 is to reclaim the region for checking the multiple IC equipment 90 for terminating.In the recovery zone, A4 is provided with recovery With pallet 19 and equipment delivery head 20.In addition, generally also preparing empty pallet 200 in recovery zone A4.

Recovery pallet 19 is the mounting portion for loading IC equipment 90, is fixed in the A4 of recovery zone, in the knot shown in Figure 17 In structure, 3 are configured with X direction.In addition, the pallet 200 of sky is also the mounting portion for loading IC equipment 90,3 are configured with X direction It is individual.And, the IC equipment 90 on the equipment recoverer 18 of recovery zone A4 that moves to is conveyed, is placed in above-mentioned recovery pallet 19 and sky pallet 200 in some.Thus, IC equipment 90 is classified according to inspection result, reclaims.

In addition, in the way of across supply area A2 and recovery zone A4, (mounting part is defeated to be provided with conveyor pallet structure Send robot) 115.Conveyor pallet structure 115 is the shifting that can make pallet 200 towards the positive side and minus side way moving of X-direction Dynamic portion.

Using the conveyor pallet structure 115, for example, can make what whole IC equipment 90 were removed in the A2 of supply area The empty pallet 200 of state is conveyed towards the positive side of X-direction.And, after the conveying, empty pallet 200 passes through conveyor pallet Structure 11B returns to pallet supply area A1 from supply area A2.

In addition, conveyor pallet structure 115 can make to remove the empty pallets 200 moved into of region A5 in recovery zone from pallet Towards the conveying of X-direction positive side in A4.And, after the conveying, empty pallet 200 is configured at the position for reclaiming IC equipment 90, It is some in the pallet 200 of above-mentioned 3 skies.

In addition, in the way of removing region A5 across recovery zone A4 and pallet, being provided with and being conveyed one by one along Y-direction Conveyor pallet structure 22A, 22B of pallet 200.Conveyor pallet structure 22A be pallet 200 can be made towards the positive side of Y-direction and The move portion of minus side way moving.Thus, can will for example check that the IC equipment 90 for finishing is delivered to pallet from recovery zone A4 Remove region A5.In addition, conveyor pallet structure 22B is can be used in reclaim the empty pallet 200 of IC equipment 90 towards Y-direction Positive side, i.e., remove the move portion that region A5 is moved towards recovery zone A4 from pallet.

In such check device 1001, as the delivery section 123 that can convey pallet 200, it is provided with pallet supply Between region A1 and supply area A2 along Y-direction conveying pallet 200 loading machine be conveyor pallet structure 11A, in recovery zone It is conveyor pallet structure 22A that A4 and pallet are removed between the A5 of region along the unloader of Y-direction conveying pallet 200, in supply area The conveyor pallet structure 115 of pallet 200 is conveyed between A2 and recovery zone A4 in X direction.Thus, for example conveyed with using one Mechanism carries out the X-direction of pallet 200 and is compared with the conveying of Y-direction, can realize productivity ratio (the IC equipment 90 of time per unit Conveying number) raising.

Control unit 1800 for example has drive control part.Drive control part for example controls conveyor pallet structure 11A, 11B, temperature Degree adjustment portion 12, equipment delivery head 13, equipment supply unit 14, conveyor pallet structure 115, inspection portion 16, equipment delivery head 17, set Standby recoverer 18, equipment delivery head 20, the driving of each several part of conveyor pallet structure 22A, 22B.

Additionally, the inspection control unit of above-mentioned tester is carried out for example according to the program being stored in memory (not shown) It is configured at the inspection of electrical characteristics of IC equipment 90 in inspection portion 16 etc..

Operation condition that operating personnel can set via monitor 300, confirm check device 1001 etc..The monitor 300 have the display picture (display part) 301 being for example made up of liquid crystal panel, and are configured in the face side of check device 1001 Portion.As shown in figure 16, the right side in the figure that pallet removes region A5 is provided with the Mouse table 600 of mounting mouse, and the mouse exists Operation is used when being shown in the picture of monitor 300.

In addition, the lower right in relative to monitor 300 by Figure 16 is configured with guidance panel 1700.Guidance panel 1700 Relative to the order that monitor 300 individually sends desired action to check device 1001.

In addition, signal lamp 400 can be by lighting color combination, the operating state of report check apparatus 1001 etc.. Signal lamp 400 is configured at the top of check device 1001.Additionally, being built-in with loudspeaker 500 in check device 1001, raised using this Sound device 500 is also capable of operating state of report check apparatus 1001 etc..

As shown in figure 17, in check device 1001, by the first next door 61 between pallet supply area A1 and supply area A2 Divide (separation), divided by the second next door 62 between supply area A2 and inspection area A3, inspection area A3 and recovery zone A4 Between divided by the 3rd next door 63, recovery zone A4 and pallet are divided between removing region A5 by the 4th next door 64.Above-mentioned next door Function with the air-tightness for keeping each region.Also, the most appearance of check device 1001 is covered by cover, the cover for example includes preceding Cover 70, side cover 71, side cover 72, back cover 73, overhead guard 74.

As described above, in check device 1001, IC equipment 90, according to inspection result, is being reclaimed according in inspection portion 16 Region A4 is classified, reclaims.The classification for example has " inspection result is qualified ", " inspection result is unqualified ", " need to check again for ". In present embodiment, in 3 kinds of pallets 200 that the IC equipment 90 in Figure 18~Figure 23 is classified, " pallet is referred to as successively from left side 200A ", " pallet 200B ", " pallet 200C ".In check device 1001, as an example, pallet 200A is assigned as " inspection Come to an end fruit it is qualified " pallet 200, pallet 200B is assigned as the pallet 200 of " inspection result is unqualified ", by pallet 200C It is assigned as the pallet 200 of " need to check again for ".

Illustrate to check again for the situation of the IC equipment 90 on pallet 200C referring to Figure 18~Figure 23, i.e., resurvey automatically Function.

In addition, the inspection referred to as " first checks " before checking again for, will check again for referred to as " second checks ".Therefore, First checks that with the second inspection be identical inspection.As check again for (resurvey) Producing reason can for example enumerate because check when Inspection portion 16 cannot judge that inspection result is " qualified " or " not conform to the mutual loose contact of the terminal of IC equipment 90 Lattice ".

In check device 1001, set mutually different first position P11, second place P12, the 3rd position P13 with And the 4th position P14.First position P11 is set in the A2 of supply area.Second place P12 is set in the A4 of recovery zone.The Three position P13 are set in the A1 of pallet supply area, are the pallets 200 for configuring the IC equipment 90 before being placed with the first inspection Position.It is that configuration has been placed with the first inspection before second checks in addition, the 4th position P14 is set in pallet removing in the A5 of region The position of the pallet 200 (pallet 200C) of the IC equipment 90 after looking into.

In addition, as shown in figure 16, pallet supply area A1 and pallet remove region A5 all to the outer of check device 1001 Expose in portion.Therefore, the 3rd position P13 and the 4th position P14 also turn into the state of the outside for being set in check device 1001. Thus, for example carry out checking again for the midway of action in check device 1001, be from the 3rd position P13 or the 4th position In the case that P14 takes out pallet 200, the taking-up operation becomes easy.

Each IC equipment 90 for carrying out the batch of amount of the first inspection is deposited in the 3rd position P13, and inspection is delivered to as described above (reference picture 17) is looked into device 1001, then as the state shown in Figure 18.As shown in Figure 18, remove region A5's in pallet Pallet 200A is placed with multiple IC equipment 90, but still in the idle condition of IC equipment 90 can be loaded.In addition, positioned at pallet The pallet 200C of the 4th position P14 of region A5 is removed as IC equipment 90 as much as possible is placed with, i.e., by multiple IC equipment 90 states piled.

And, as shown in figure 19, the conveyor pallet structure 22A for constituting delivery section 123 will be placed with the pallet of IC equipment 90 200C is delivered to second place P12 from the 4th position P14.

Next, as shown in figure 20, conveyor pallet structure 115 (delivery section 123) is transported to first from second place P12 Put P11.

Next, as shown in figure 21, conveyor pallet structure 11A (delivery section 123) is delivered to the 3rd from first position P11 Put P13.The conveying of the pallet 200C shown in such Figure 18~Figure 21 is performed until the whole support positioned at the 4th position P14 Untill disk 200C is transported to the 3rd position P13.

Next, as shown in figure 22, conveyor pallet structure 11A conveyings are located at a pallet 200C of the 3rd position P13, and Taken out in the A2 of supply area.In addition, the pallet 200A that pallet is removed in the A5 of region is delivered to recovery by conveyor pallet structure 22A In the A4 of region, as the state that destination stopping is conveyed at it.

Next, as shown in figure 23, it is identical with the first inspection, using equipment recoverer 18 by the IC equipment on pallet 200C 90 are transported to recovery zone A4.Additionally, the IC equipment 90 is set to " inspection result is qualified ".And, equipment delivery head 20 will set The clearance spaces of the pallet 200A conveyed for the IC equipment 90 on recoverer 18, being placed in the A4 of recovery zone, that is, be formed at support The empty pocket of disk 200A.

As described above, in the case where to be checked again for, be able to will be placed with as its inspection by the use of delivery section 123 The pallet 200C of the IC equipment 90 of object, the 3rd position P13 is delivered to from the 4th position P14.Thus, as can start again The state of inspection.In the past, the pallet 200C for being placed with IC equipment 90 is for example configured via the hand of operating personnel from the 4th position P14 In the 3rd position P13.However, in check device 1001, by the automatic transport of delivery section 123, aforesaid operations can be saved The trouble of personnel, efficiently conveys pallet 200C.Thereby, it is possible to be checked again for rapidly.

Next, describing conveyor pallet structure 115 in detail.

As shown in Figure 24~Figure 31, conveyor pallet structure 115 has conveying mechanism main body 130 and by conveying mechanism main body 130 linking parts 140 linked with driving source (not shown).Additionally, driving source is not particularly limited, for example, can be rolled using having Ballscrew and linear guides, make conveying mechanism main body 130 in X direction and Y-direction movement mechanism.

As shown in figure 24, conveying mechanism main body 130 have be fixed on the base material 131 of linking part 140 and relative to base material 131 can slide and constitute and can hold the hand 132 of pallet 200.

Base material 131 is made up of the metallic plate in long strip-board shape extended along Y-direction.In addition, each long side of base material 131 The bending in the way of being protruded towards-Z sides of edge part 1313.Hand 132, hand are inserted to the inner side of each edge part 1313 of the bending 132 can slide along Y-direction.

In addition, being formed with the narrow slit 1311 extended along Y-direction in base material 131, bolt 1312 is inserted with the narrow slit 1311. The bolt 1312 fixes base material 131 and hand 132.Loosering a bolt in the state of 1312, as base material 131 and hand 132 The state that can be slided along Y-direction, in the state of bolt 1312 is tightened, the slip as base material 131 and hand 132 is limited State.Thereby, it is possible to adjust position of the hand 132 relative to base material 131.The Y side of conveying mechanism main body 130 can be adjusted To length.

As shown in Figure 24~Figure 27, hand 132 has can be slidably inserted into the base portion 1321 of base material 131, be fixed on base 2 bars 1322 in portion 1321, the damper 1323 for being arranged at bar 1322, it is fixed on each bar 1322 via damper 1323 The cap assembly 150 as cover portion, hold the handle part 8 of pallet 200, the pin of base portion 1321 be fixed on via connecting rod 1325 (convex portion) 101.

Base portion 1321 is made up of the long-bar metal plate extended along Y-direction.In addition, the edge part of each long side of base portion 1321 1324 bendings in the way of being protruded towards-Z sides.Bar 1322 is respectively fixed with the edge part 1324 of the bending of the base portion 1321.

Each bar 1322 is configured in parallel to each other along Y-direction.In addition, the both ends 1326 of bar 1322 are respectively towards-Z pleurapophysis Go out ground bending.In addition, being each provided with 2 respectively near the both ends 1326 of each bar 1322 amounts to 4 dampers 1323.

Each damper 1323 is configured to flexible along Z-direction.The damper 1323 has a force section in inner side, and with cover Part 150 links.

In addition, the telescopic extensions of damper 1323 are preferably more than 2mm, below 4mm, more preferably more than 2.5mm, Below 3.5mm.Thereby, it is possible to the movable range of the Z-direction of cap assembly 150 is set into above-mentioned number range.Therefore, in cap assembly 150 when being pressed against pallet 200, can effectively avoid a part for pressing force.As a result, be prevented from cap assembly 150 with Pallet 200 is pressed more than the power for needing.Therefore, it is possible to relax the impact for putting on pallet 200 and IC equipment 90.

Connecting rod 1325 is set in X direction.In addition, the upper of base portion 1321 is fixed in the end of+X sides of connecting rod 1325 Portion, the end of-X sides is more prominent more to-X sides than base portion 1321.Bar-shaped pin is fixed with the downside of the end of-X sides of the protrusion 101.Therefore, pin 101 is set in the way of being protruded towards-Z sides.

Cap assembly 150 is the part of covering pallet 200 when handle part 8 holds pallet 200.The cap assembly 150 is that have gold The double-layer structural of category layer 151 and conductive resin layer 152.In addition, conductive resin layer 152 presses it with metal level 151 from downside Order is laminated.

The hardness of metal level 151 is higher, is responsible for improving the rigidity of the entirety of cap assembly 150.The structural material of metal level 151 does not have It is particularly limited to, for example, can uses various metal materials such as stainless steel, aluminium, aluminium alloy etc..

On the other hand, conductive resin layer 152 is the part abutted with pallet 200, IC equipment 90.Conductive resin layer 152 have resin bed 1521 and the scattered electroconductive stuffing 1522 in resin bed 1521.Therefore, conductive resin layer 152 Hardness is lower than metal level 151.Therefore, and the situation ratio that is directly contacted with pallet 200, IC equipment 90 of metal level 151, it is prevented from Damage pallet 200, IC equipment 90.

Also, conductive resin layer 152 is conductive.Thus, when being contacted with powered IC equipment 90, can remove Its electronics.Therefore, it is possible to prevent IC equipment 90 powered.

The structural material of resin bed 1521 is not particularly limited, for example, can use acrylic acid series, polyurethane series, polyester System, epoxies, polyvinyl chloride, melamine series, polyimides system etc..

In addition, the structural material of electroconductive stuffing 1522 is not particularly limited, for example, can enumerate Zinc oxide, titanium oxide System, Sn system, indium oxide system, antimony oxide system etc..

As shown in Figure 24~Figure 27, the bullet that handle part 8 has 2 arms 81, the cylinder 82 for driving each arm 81, links each arm 81 Spring 83.

Arm 81 has strip parts 811 and from the one end of strip parts 811 towards the tine 812 of the sagging setting in downside.Each arm 81 strip parts 811 be configured to along Y-direction it is same linear, the other end be the side opposite with tine 812 end that This is linked by cylinder 82 and spring 83.

The bottom of each tine 812 is the claw-like with the recess 813 opened towards mutually opposing direction.Pallet 200 Edge part 201 can enter the tine 812 recess 813.Can be connect in each arm 81 as the tine 812 of holding section Engage with pallet 200 in the state of near.Under the fastening state, pallet 200 is held by each arm 81.Therefore, it is possible to stably defeated Send pallet 200.

Cylinder 82 is by supply and discharging operation fluid thus along each arm 81 of Y-direction moving operation.In addition, cylinder 82 Base portion 1321 is fixed on top.

Under the state of cylinder 82 that action fluid is fed into, direction moving operation of each arm 81 towards separation.On the other hand, In the state of the separation of each arm 81, if action fluid is discharged from cylinder 82, each arm 81 is towards close direction moving operation.

Spring 83 is made up of the extension spring that two ends link with each arm 81 respectively.Thus, each arm 81 is either close connects The released state that nearly state still separate, all as the state stretched towards direction close to each other.Even if thus, for example in cylinder In the case that 82 action surprisingly stops, each arm 81 is also close state.Even if as a result, holding the shape of pallet 200 State lower cylinder 82 produces unfavorable condition, it is also possible to continue to hold pallet 200, is prevented from pallet 200 and surprisingly departs from (to fall from arm 81 Under).

Next, the action of the such conveyor pallet structure 115 of explanation.

Figure 25 is to represent that conveyor pallet structure 115 is located at the figure of the state of the top of second place P12.As described above, The pallet 200 for being configured at second place P12 is placed with the IC equipment 90 for checking again for.In this condition, it is double such as in Figure 25 Shown in chain-dotted line, each arm 81 turns into proximity state.

And, fluid is acted from the proximity state to the supply of cylinder 82, thus such as shown in solid, 81 points of each arm in Figure 25 Released state is not turned into towards separate direction moving operation.

As shown in figure 26, released state subiculum disk carrying mechanism 115 is being kept to decline.The decline is performed until bar Untill the end of 1322 bending abuts with the edge part of pallet 200.Thus, as described later, hand 132 can stably hold Pallet 200.In addition, in the state of the abutting, cap assembly 150 is abutted with the upper surface of pallet 200 and IC equipment 90, is turned into Cover the state of the upper surface of pallet 200.

Additionally, as described above, before as abutting state, cap assembly 150 be located at than bar 1322 end more on the lower Side.Therefore, with the decline of conveyor pallet structure 115, cap assembly 150 is first abutted with the upper surface of pallet 200.Now, cover portion The impact that part 150 is abutted with pallet 200 is absorbed by damper 1323.Pallet 200, IC equipment 90 are put on therefore, it is possible to relax Impact.In addition, under fastening state, as the state that cap assembly 150 is exerted a force towards pallet 200, can more stably convey Pallet 200.

Particularly as shown in figure 24, damper 1323 is provided with 4, is respectively arranged at the adjacent corner of cap assembly 150.I.e. When being observed from Z-direction, 4 dampers 1323 are configured to rectangle.Therefore, it is possible to balancedly absorb impact as far as possible.

In addition, as shown in figure 26, before turning into abutting state when conveyor pallet structure 115 declines, arm 81 is not towards mutually Move and as released state in same direction.Thus, with the decline of conveyor pallet structure 115, be prevented from tine 812 with Pallet 200 contacts and hinders to decline.

Next, as shown in figure 27, from the discharging operation fluid of cylinder 82, making each arm 81 turn into proximity state.It is close at this Under state, the edge part of pallet 200 is set to enter in the recess 813 of tine 812 and engage.Thus, each arm 81 can hold support Disk 200.

Then, conveying mechanism main body 130 is risen and is moved towards -X direction, pallet 200 is moved to first position P11. In the movement, the upper surface for being held in the pallet 200 of each arm 81 turns into the state covered by cap assembly 150.Thereby, it is possible to Prevent IC equipment 90 from departing from pallet 200.Therefore, it is possible to stably carry out the conveying of IC equipment 90 and pallet 200.

Also, as shown in figure 24, in check device 1001, conveyor pallet structure 115 holds the short of (engaging) pallet 200 Side and constitute.Therefore, compared with the situation that conveyor pallet structure 115 holds side long, pallet 200 can stably be conveyed.

As shown in Figure 24 and Figure 28~Figure 31, linking part 140 have be connected with driving source base portion 141, cylinder 142, The support plate 143 that supports cylinder 142, the web 144 for being fixed on base portion 141,145, be arranged at the damper of web 144 (buffer part) 146, the damper (buffer part) 147 for being arranged at web 145.

Base portion 141 have in X direction and Y-direction configuration the first plate-like portion 1411 and be arranged at the first plate-like portion The edge part of 1411+Y sides and in X direction and Z-direction configuration the second plate-like portion 1412.From under the first plate-like portion 1411 Surface sags are provided with support plate 143.

Cylinder 142 has piston rod 1421, and thus supply or discharging operation fluid make piston rod 1421 flexible along Z-direction And constitute.In addition, being linked with the base material 131 of conveying mechanism main body 130 in piston rod 1421.Thus, carry out acting the confession of fluid To or discharge, the descending operation thus, it is possible to carry out conveying mechanism main body 130.

As shown in Figure 24 and Figure 28~Figure 31, web 144 is the long strip-board shape extended along Z-direction.In addition, linking The top of plate 144 is formed with the protuberance 1441 protruded towards +Y direction as tabular.The protuberance 1441 is provided with damper 146。

In addition, web 144 has two projections 1442,1443.The lower end that projection 1442 is arranged at web 144 is attached Closely, projection 1443 is arranged near upper end, i.e. the vicinity of protuberance 1441.Projection 1442 as shown in Figure 28 and Figure 30, defeated Send mechanism body 130 rise when, abutted with protuberance described later 1451, can limit transport mechanism body 130 it is further up. On the other hand, projection 1443 is abutted when conveying mechanism main body 130 declines with protuberance described later 1451, being capable of limit transport Mechanism body 130 further declines.

Web 145 is the long strip-board shape extended along Z-direction.The web 145 is configured at the-X sides of web 144, than Web 144 more to+Y lateral deviations from.The second plate-like portion 1412 of base portion 141 is fixed in the upper end of web 145.

In addition, being provided with the protuberance 1451 protruded towards +Y direction as tabular in the bottom of web 145.In the protrusion Portion 1451 is provided with damper 147.In addition, protuberance 1451 has the part 1452 protruded towards the side of web 144.The part 1452 is the part abutted with damper 146.

In such linking part 140, such as Figure 28 and as shown in Figure 29, in the shape that conveying mechanism main body 130 rises Under state, damper 147 is abutted with base material 131, can absorb the impact during abutting.In addition, as shown in Figure 30 and Figure 31 that Sample in the state of conveying mechanism main body 130 have dropped, damper 146 is supported with the part 1452 of the protrusion of protuberance 1451 Connect, the impact during abutting can be absorbed.

So according to linking part 140, the impact of the lifting along with conveying mechanism main body 130 can be relaxed.Therefore, defeated When sending mechanism body 130 to lift, impact can be relaxed and put on pallet 200, as a result, can relax that IC equipment 90 is put on Impact, IC equipment 90 can be more efficiently prevented from and undesirably fall off pallet 200.

Here, as shown in Figure 24 and Figure 32~Figure 35, check device 1001 possesses upstream side location division 10A and downstream Location division 10B.

Bullport (recess) 102A that upstream side location division 10A is inserted by above-mentioned pin 101 and supply and marketing 101 is constituted.

Bullport 102A is arranged in first position P11 in X direction opposed pairs wall portion (limiting part) 103,104 Positioned at the wall portion 103 of-X sides.

Wall portion 103,104 is crossed over inside and outside check device 1001 and extended along Y-direction.The wall portion 103,104 prevents configuration Deviate in the X direction in the pallet 200 in the P11 of first position, and the pallet 200 to being carried out using conveyor pallet structure 11A The movement of Y direction guide.

Additionally, region by wall portion 103,104 and therebetween constitutes the first configuration section.

Bullport (recess) 102B that downstream location division 10B is inserted by above-mentioned pin 101 and supply and marketing 101 is constituted.

Wall portion (limiting part) 105,106 is crossed over inside and outside check device 1001 and extended along Y-direction.The wall portion 105, 106 prevent the pallet 200 being configured in second place P12 from deviateing in the X direction, and to being entered using conveyor pallet structure 22A The movement of the Y direction of capable pallet 200 is guided.

Additionally, region by wall portion 105,106 and therebetween constitutes the second configuration section.

Next, the action of explanation conveyor pallet structure 115 and upstream side location division 10A and downstream location division The effect of 10B.Figure 32~Figure 35 used below, illustrates to convey the situation of pallet 200 from second place P12 to first position P11.

Figure 32 is to represent the figure that the state of pallet 200 is configured with second place P12.In the state of shown in the Figure 32, Conveyor pallet structure 115 is located at the top of second place P12.

Figure 33 is conveyor pallet structure 115 is dropped from the state of shown in Figure 32 and hold the figure of pallet 200.In the decline When, the pin 101 of conveyor pallet structure 115 is directed and is inserted into bullport 102B.Thereby, it is possible to by conveyor pallet structure 115 Positioned relative to second place P12.Therefore, in the state of the positioning, hand 132 is acted, support is held thus, it is possible to correct Disk 200.

Next, as shown in figure 34, conveyor pallet structure 115 is with holding the state of pallet 200 towards first position P11's Move top.And, as shown in figure 35, conveyor pallet structure 115 drop in the state of pallet 200 with being held.In the decline, pin 101 are directed and are inserted into bullport 102A.Thereby, it is possible to conveyor pallet structure 115 is positioned relative to first position P11. And, in the state of the positioning, the holding of the pallet 200 of hand 132 is released, thus, it is possible to pallet 200 is correctly configured at First position P11.

In addition it is also possible to pin 101 not inserted into bullport 102A, 102B, make in the case where being collided with wall portion 103,105 The action of conveyor pallet structure 115 stops and constitutes.

So, according to check device 1001, even if positioning, second of such as first position P11 and conveyor pallet structure 115 Position P12 is insufficient with the positioning of conveyor pallet structure 115, it is also possible to prevent conveyor pallet structure 115 from declining.Therefore, it is possible to Prevent conveyor pallet structure 115 from being collided with wall portion 103,104,105,106.

In addition, the configuration operation such as holding or its releasing of pallet 200 is carried out in the state of positioning, it is possible to will support Disk 200 is correctly delivered to first position P11 from second place P12.

In addition, in check device 1001, by the way that pin 101 to be inserted the straightforward procedure of bullport 102A etc, can be by Conveyor pallet structure 115 is positioned with first position P11, and inserts being simply formed for bullport 102B etc by by pin 101, Conveyor pallet structure 115 and second place P12 can be positioned.

In addition, as shown in figure 32, the separating distance of wall portion 103 and wall portion 104, the i.e. width W1 of first position P11 compares wall Portion 105 and the separating distance of wall portion 106, i.e. the width W2 of the second place are small.Width W1 be more than 136mm, below 137mm, it is wide Degree W2 is more than 136.5mm, below 137.5mm.This is the specification of the existing apparatus without function of resurveying automatically.

In the specification of such existing apparatus, pallet is conveyed in the first position P11 from second place P12 to narrow width In the case of 200, the positioning of upstream side location division 10A is particularly conducive to.

In addition, as described above, the bullport 102A of upstream side location division 10A be arranged in wall portion 103,104 by-X sides Wall portion 103.Also, the bullport 102B of downstream location division 10B is arranged at the wall portion by-X sides in wall portion 105,106 105.Designed on the basis of the end that check device 1001 is typically-X sides by the upstream side of the conveying direction of IC equipment 90.Therefore, Left with towards+X sides, the accumulated error of design has the trend of increase.In check device 1001, the wall portion 103 in-X sides is matched somebody with somebody Bullport 102A is put, the wall portion 105 in-X sides configures bullport 102B, the accumulated error thus, it is possible to suppress design as far as possible. Therefore, it is possible to pin 101 is correct and be smoothly inserted into bullport 102A, 102B.

5th implementation method

Hereinafter, the 5th of electronic component handling apparatus of the invention and electronic component inspection device is illustrated with reference to the figure Implementation method, by with the difference of above-mentioned implementation method centered on illustrate, omit the explanation of identical item.

Present embodiment is in addition to the structure difference of cap assembly, and other structures are identical with above-mentioned 4th implementation method.

As shown in figure 36, in the conveyor pallet structure 115A of check device 1001A, cap assembly 150A is formd by metal It is netted that the yarn woven that material is constituted is formed.It is in the position abutted with IC equipment 90 i.e. in whole observation cap assembly 150A It is provided with the shape in multiple holes.

According to such cap assembly 150A, the area that cap assembly 150A is abutted with IC equipment 90 can be reduced.Thus, for example Even if producing vibration along with the movement of conveyor pallet structure 115A, it is also possible to suppress the vibration and transmitted via cap assembly 150A To IC equipment 90.

6th implementation method

The 6th of electronic component handling apparatus of the invention and electronic component inspection device is illustrated referring to the figure Implementation method, by with the difference of above-mentioned implementation method centered on illustrate, omit the explanation of identical item.

As shown in figure 37, in the conveyor pallet structure 115B of check device 1001B, it is arranged at conveying mechanism main body 130B Cap assembly 150B have lower surface protrude multiple projections (protuberance) 153.The projection 153 as shown in figure 37, is arranged at In conveyor pallet structure 115B the position abutted with IC equipment 90 in the state of holding pallet 200.In addition, projection 153 is from Z side Area during to observation is smaller than IC equipment 90.

According to such cap assembly 150B, the area that cap assembly 150B is abutted with IC equipment 90 can be made than the 4th embodiment party Formula is small.Even if thus, for example producing vibration along with the movement of conveyor pallet structure 115B, it is also possible to suppress the vibration via Cap assembly 150B is transferred to IC equipment 90.Also, projection 153 can press IC equipment 90, it is possible to more stably conveying IC Equipment 90.

7th implementation method

The 7th of electronic component handling apparatus of the invention and electronic component inspection device is illustrated referring to the figure Implementation method, by with the difference of above-mentioned implementation method centered on illustrate, omit the explanation of identical item.

Present embodiment is in addition to the structure difference of wall portion, and other structures are identical with above-mentioned 4th implementation method.

As shown in figure 38, in check device 1001C, the edge part in the+X sides of wall portion 103 is provided with and inclines relative to Z axis Oblique inclined plane (guide portion) 103a.Edge part in the-X sides of wall portion 104 is provided with and (draws relative to the inclined inclined plane of Z axis Lead portion) 104a.Edge part in the+X sides of wall portion 105 is provided with relative to Z axis inclined inclined plane (guide portion) 105a.In wall The edge part of-X the sides in portion 106 is provided with relative to Z axis inclined inclined plane (guide portion) 106a.

So making wall portion 103~106 turns into taper, thus has the following advantages that.As shown in the double dot dash line in Figure 38, When first position P11 matches somebody with somebody tray 200, though the position of pallet 200 towards-X lateral deviations from, the end of-X sides of pallet 200 with incline Inclined-plane 103a is abutted, and as shown by arrows in FIG., pallet 200 can also be inclined by face 103a guiding and be configured at first position P11.

So, according to check device 1001C, though the positioning of first position P11 and pallet 200 slightly offset from, it is also possible to Pallet 200 is configured at first position P11.Therefore, it is possible to pallet 200 more correctly is configured at into first position P11.

Additionally, be not limited to illustrate such situation, for example, being contacted with IC equipment 90 in the inclined plane 104a of wall portion 104 In the case of can also obtain effect same as described above.Even if in addition, second place P12 match somebody with somebody tray 200 in the case of, Inclined plane 105a, 106a can also play function same as described above.

8th implementation method

Figure 39 is the brief perspective views of the 8th implementation method that electronic component inspection device of the invention is observed from face side. Figure 40 is the brief vertical view of the common operating state (usual transport model) for representing the electronic component inspection device shown in Figure 39 Figure.Figure 41~Figure 48 is respectively to represent that the operating state of resurveying of the electronic component inspection device shown in Figure 39 (is examined again in order Look into transport model) schematic top.Figure 49 and Figure 50 are respectively to represent that the electronic component inspection device shown in Figure 39 is had The figure of the operating state of standby equipment delivery head.

Hereinafter, the of electronic component handling apparatus of the invention and electronic component inspection device is illustrated with reference to above-mentioned figure Eight implementation methods, pair with above-mentioned implementation method identical structure, item mark identical reference and the description thereof will be omitted.

Check device 2001 shown in Figure 39, Figure 40 can be with various transport models conveying IC equipment 90.In this embodiment party In formula, transport model have convey the usual transport model of unchecked IC equipment 90 as shown in figure 40, as shown in Figure 41~Figure 48 The IC equipment 90 that conveying should be checked again for checks again for transport model.

As shown in figure 40,2001 points of check device is pallet supply area A1, the (hereinafter referred to as " confession of equipment supply area To region ") A2, inspection area A3, equipment recovery zone (hereinafter referred to as " recovery zone ") A4, pallet remove region A5.And And, such as under usual transport model, IC equipment 90 removes region A5 from pallet supply area A1 to pallet successively via above-mentioned Each region, the inspection area A3 in midway is checked.

So, check device 2001 possesses the electronic component handling apparatus (automatic sorting in each region conveying IC equipment 90 Machine), the inspection portion 16, the control unit 2800 that are checked in the A3 of inspection area.And, check device 2001 possesses monitor 300th, signal lamp 400, guidance panel 2700.

Additionally, in check device 2001, side (Figure 40 that pallet supply area A1, pallet remove region A5 will be configured with In downside) as face side, by its opposite side, that is, be configured with a side (upside in Figure 40) conduct of inspection area A3 Rear side is used.

Pallet supply area A1 is the pallet (mounting part) for being supplied to the multiple IC equipment 90 for being arranged with non-inspection state 200 confession material portion.Multiple pallets 200 can be laminated in pallet supply area A1.

Multiple IC equipment 90 that supply area A2 is arranged on the pallet 200 from pallet supply area A1 are supplied respectively It is given to the region of inspection area A3.Additionally, in the way of across pallet supply area A1 and supply area A2, being provided with along level Direction conveys conveyor pallet structure 11A, 11b of pallet 200 one by one.Conveyor pallet structure 11a be can make pallet 200 with Be placed in the IC equipment 90 of the pallet 200 together towards Y-direction positive side shifting move portion.Thereby, it is possible to IC equipment 90 is steady Surely supply area A2 is sent into.In addition, conveyor pallet structure 11b is can to make empty pallet 200 towards the minus side of Y-direction i.e. from supply The move portion that region A2 is moved to pallet supply area A1.

In supply area, A2 is provided with temperature adjustment portion 12, equipment delivery head 13, conveyor pallet structure 215.

Temperature adjustment portion 12 is the part that can unify to cool down, heat multiple IC equipment 90, also referred to as " temperature-uniforming plate ".Profit The temperature-uniforming plate is used, the IC equipment 90 before inspection portion 16 checks is pre-cooled or heat, can be adjusted to be adapted to the temperature of the inspection Degree.In the structure shown in Figure 40, temperature adjustment portion 12 is configured along Y-direction, is fixed with 2.And, by conveyor pallet structure IC equipment 90 of the 11a from the pallet 200 that pallet supply area A1 moves into (conveying comes) is transported to a certain temperature adjustment portion 12.

Equipment delivery head 13 be supported in the A2 of supply area can in X direction, Y-direction and Z-direction movement.By This, the IC that equipment delivery head 13 can be responsible between the pallet 200 moved into from pallet supply area A1 and temperature adjustment portion 12 sets Standby 90 conveying, the conveying of the IC equipment 90 between temperature adjustment portion 12 and equipment supply unit 214 described later.

Conveyor pallet structure 215 is the empty pallet 200 of the state for being removed whole IC equipment 90 in supply area The mechanism conveyed towards the positive side of X-direction in A2.And, after the conveying, empty pallet 200 by conveyor pallet structure 11b from Supply area A2 returns to pallet supply area A1.

Inspection area A3 is the region for checking IC equipment 90.In the inspection area, A3 is provided with inspection portion 16 and equipment conveying First 17.In addition, be additionally provided with the equipment supply unit 214 moved in the way of across supply area A2 and inspection area A3 and with Across the equipment recoverer 218 that the mode of inspection area A3 and recovery zone A4 is moved.

The IC equipment 90 that the configuration of equipment supply unit 214 temperature is adjusted, being supported to can be in supply area A2 and inspection Moved in X direction between the A3 of region.Thus, equipment supply unit 214 can be approached relative to inspection portion 16, separated such that it is able to IC equipment 90 is transported near inspection portion 16.So, equipment supply unit 214 turns into the conveying of conveying IC equipment 90 in X direction Portion's (the first delivery section), also referred to as " supply shuttle plate ".In addition, in the structure shown in Figure 40, the edge of equipment supply unit 214 Y-direction is configured with 2.And, the IC equipment 90 in temperature adjustment portion 12 is transported to standby a certain in the A2 of supply area Individual equipment supply unit 214.So, two equipment supply units 214 are set, thus, it is possible to realize the productivity ratio (IC of time per unit The conveying number of equipment 90) raising.It is identical with temperature adjustment portion 12 additionally, in equipment supply unit 214, can cool down or Person heating IC equipment 90, the IC equipment 90 is adjusted to be adapted to the temperature of inspection.

Inspection portion 16 is the unit of the electrical characteristics for checking, testing IC equipment 90.Multiple is provided with to keep in inspection portion 16 The probe that the state of IC equipment 90 is electrically connected with the terminal of the IC equipment 90.And, the terminal of IC equipment 90 is electrically connected with probe (contact), the inspection of IC equipment 90 is carried out via probe.According to the inspection control possessed in the tester being connected with inspection portion 16 The program stored in portion processed carries out the inspection of IC equipment 90.Additionally, in inspection portion 16, it is identical with temperature adjustment portion 12, can Cooling or heating IC equipment 90, the IC equipment 90 is adjusted to be adapted to the temperature of inspection.

Equipment delivery head 17 is supported in the A3 of inspection area to be moved along Y-direction.Thus, the energy of equipment delivery head 17 IC equipment 90 on enough equipment supply units 214 that will be moved into from supply area A2 is conveyed, is placed in inspection portion 16.Additionally, setting Standby delivery head 17 can also cool down or heat IC equipment 90, and the IC equipment 90 is adjusted to be adapted to the temperature of inspection.

Equipment recoverer 218 configures the IC equipment 90 that the inspection in inspection portion 16 terminates, and being supported to can be in test zone Moved in X direction between domain A3 and recovery zone A4.Thus, equipment recoverer 218 can be approached relative to inspection portion 16, divided From such that it is able to the IC equipment 90 in self-check in future portion 16 is transported to recovery zone A4.So, equipment recoverer 218 is used as along X Direction conveys the delivery section (the second delivery section) of IC equipment 90, also referred to as " recovery shuttle plate ".In addition, shown in Figure 40 In structure, equipment recoverer 218 is identical with equipment supply unit 214, and 2 are configured with along Y-direction.And, the IC in inspection portion 16 Equipment 90 is conveyed, is placed in standby some equipment recoverer 218 in the A3 of inspection area.The conveying is by equipment delivery head 17 are carried out.Additionally, equipment recoverer 218 can also be identical with temperature adjustment portion 12, equipment supply unit 214, IC can be adjusted and set Constituted for 90 temperature.In addition, setting two equipment recoverers 218, the raising thus, it is possible to realize productivity ratio.

Recovery zone A4 is to reclaim the region for checking the multiple IC equipment 90 for terminating.In the recovery zone, A4 is provided with recovery With pallet 219, equipment delivery head (transfer robot) 20, conveyor pallet structure 221.In addition, in recovery zone A4, generally conveying The pallet 200 of sky is ready under pattern.

Recovery with pallet 219 be positioned in inspection portion 16 at least carried out 1 time inspection IC equipment 90 mounting portion, with The mode not moved in the A4 of recovery zone is fixed.Thus, even if various movable in the equipment delivery head 220 being configured with more than comparing etc. The recovery zone A4 in portion, also stabilization mounting can check the IC equipment 90 for finishing on recovery pallet 219.Additionally, in Figure 40 institutes In the structure shown, recovery pallet 219 is configured with 3 in X direction.

In addition, the pallet 200 of sky is also configured with 3 in X direction.The empty pallet 200 turns under usual transport model Being positioned in inspection portion 16 has at least carried out 1 mounting portion of the IC equipment 90 of inspection.And, the equipment for moving to recovery zone A4 IC equipment 90 on recoverer 218 conveyed, load into the pallet 200 of recovery pallet 219 and sky some.By This, IC equipment 90 is classified according to inspection result, reclaims.

Equipment delivery head 220 be supported in the A4 of recovery zone can in X direction, Y-direction and Z-direction movement.By This, the slave unit recoverer 218 of IC equipment 90 for example can be delivered to recovery and used by equipment delivery head 220 under usual transport model Pallet 219, empty pallet 200.

As shown in Figure 49, Figure 50, equipment delivery head 220 has multiple adsorption sections 210, above-mentioned adsorption section 210 and injector (not shown) connects and IC equipment 90 is adsorbed in the action by the injector one by one.Hold and convey thereby, it is possible to unified Multiple IC equipment 90.In addition, equipment delivery head 220 with each adsorption section 210 each other in X direction and Y-direction close to, separate side Formula is constituted.Thereby, it is possible to changing and adjusting the mutual interval of IC equipment 90 adsorbed by each adsorption section 210.Can carry out so Adjustment, even if thus delivery source (such as equipment recoverer 218) each IC equipment 90 interval and conveying destination (example Such as reclaim with pallet 219) each IC equipment 90 interval difference in the case of, also can rapidly and successfully by IC equipment 90 from Delivery source is delivered to conveying destination.

Furthermore it is preferred that for equipment delivery head 13, equipment delivery head 17 are also identical with equipment delivery head 220, can change, adjust The mutual interval of the IC equipment 90 of whole holding and constitute.

Conveyor pallet structure 221 is to make to remove the empty pallet 200 that region A5 is moved into from pallet under usual transport model The mechanism conveyed in X direction in the A4 of recovery zone.And, after the conveying, empty pallet 200 is configured at recovery IC equipment 90 Position, become some in the pallet 200 of above-mentioned 3 skies.So in check device 2001, in recovery zone, A4 sets Tray conveying mechanism 221, sets conveyor pallet structure 215 in supply area A2 in addition.Thus, for example conveyed with using one The conveying that mechanism carries out the X-direction of the pallet 200 of sky is compared, and can realize the raising of productivity ratio.

It is to be reclaimed under usual transport model, remove to be arranged with and check that finishing multiple IC of state sets that pallet removes region A5 Standby 90 pallet 200 except material portion.The multiple pallets 200 of region A5 stackings can be removed in pallet.

In addition, in the way of removing region A5 across recovery zone A4 and pallet, being provided with and being conveyed one by one along Y-direction Conveyor pallet structure 22A, 22b of pallet 200.Conveyor pallet structure 22a is the movement that pallet 200 can be made to be moved along Y-direction Portion.Thus, for example under usual transport model, can will check that the IC equipment 90 for finishing is delivered to pallet and removes from recovery zone A4 Remove region A5.In addition, conveyor pallet structure 22b is that the empty support for reclaiming IC equipment 90 can be used under usual transport model Disk 200 removes the move portion that region A5 is moved to recovery zone A4 from pallet.

Control unit 2800 for example has drive control part.Drive control part for example controls conveyor pallet structure 11A, 11b, temperature Degree adjustment portion 12, equipment delivery head 13, equipment supply unit 214, conveyor pallet structure 215, inspection portion 16, equipment delivery head 17, Equipment recoverer 218, equipment delivery head 220, conveyor pallet structure 221, the drive of each several part of conveyor pallet structure 22A, 22b It is dynamic.

Additionally, the inspection control unit of above-mentioned tester enters for example according to the program of the middle storage in memory (not shown) Row is configured at the inspection of electrical characteristics of IC equipment 90 in inspection portion 16 etc..

Operating personnel can be via monitor 300, operation condition for set, confirming check device 2001 etc..The monitor 300 have the display picture (display part) 301 being for example made up of liquid crystal panel, and are configured in the face side of check device 2001 Portion.As shown in figure 39, the right side in the figure that pallet removes region A5 is provided with the Mouse table 600 of mounting mouse, and the mouse exists Operation is used when being shown in the picture of monitor 300.

In addition, the lower right in relative to monitor 300 by Figure 39 is configured with guidance panel 2700.Guidance panel 2700 Relative to the order that monitor 300 individually sends desired action to check device 2001.

In addition, signal lamp 400 can be by lighting color combination, the operating state of report check apparatus 2001 etc.. Signal lamp 400 is configured at the top of check device 2001.Additionally, being built-in with loudspeaker 500 in check device 2001, raised using this Sound device 500 is also capable of operating state of report check apparatus 2001 etc..

As shown in figure 40, in check device 2001, the quilt of the first next door 61 between pallet supply area A1 and supply area A2 Divide (separation), divided by the second next door 62 between supply area A2 and inspection area A3, inspection area A3 and recovery zone A4 Between divided by the 3rd next door 63, recovery zone A4 and pallet are divided between removing region A5 by the 4th next door 64.In addition, supply Divided by the 5th next door 65 between region A2 and recovery zone A4.Above-mentioned next door has the function of the air-tightness for keeping each region. Also, the most appearance of check device 2001 is covered by cover, the cover for example includes front shroud 70, side cover 71, side cover 72, back cover 73, top Cover 74.

As described above, check device 2001 is the conveying (ginseng that can respectively carry out the IC equipment 90 under usual transport model According to Figure 40) and check again for IC equipment 90 under transport model conveying (41~Figure 48 of reference picture) device.

Usual transport model is the unchecked IC equipment 90 of conveying and the pattern classified according to the inspection result in inspection portion 16.

As shown in figure 40, under usual transport model, IC equipment 90 is configured in pallet drainage area on pallet 200 first Domain A1.Then, the action that IC equipment 90 begins through conveyor pallet structure 11a from the state is transported to together with pallet 200 In the A2 of supply area.

In the A2 of supply area, the action that IC equipment 90 passes through equipment delivery head 13, via temperature adjustment portion 12, is conveyed To equipment supply unit 214.

Next, the IC equipment 90 on equipment supply unit 214 is transported to inspection by the action of the equipment supply unit 214 In the A3 of region.

In the A3 of inspection area, IC equipment 90 is placed in inspection portion 16 by the action of equipment delivery head 17, in the inspection Portion 16 is looked into be checked.And, after inspection terminates, the action that IC equipment 90 passes through equipment delivery head 17 is transported to and is located at Equipment recoverer 218 in the A3 of inspection area.

Next, the IC equipment 90 on equipment recoverer 218 is transported to recovery by the action of the equipment recoverer 218 In the A4 of region.

In the A4 of recovery zone, IC equipment 90 according to the inspection result in inspection portion 16, and by the dynamic of equipment delivery head 220 Make, be transported to the pallet of 3 recovery pallets 219 and 3 one party of the pallet of sky 200.Thus, to an IC equipment 90 usual transport model terminates.Additionally, in the structure shown in Figure 40, IC equipment 90 is conveyed, is placed in 3 recovery supports The recovery of the rightmost side in disk 219 pallet 219.

So, in check device 2001, IC equipment 90 is divided according to the inspection result in inspection portion 16 in recovery zone A4 Class.And, the classification for example includes " inspection result is qualified ", " inspection result is unqualified ", " need to check again for ".In this embodiment party In formula, two, the left side pallet 200 in 3 pallets of sky 200 in Figure 41~Figure 48 is assigned to " inspection result is qualified " use Pallet 200a, one, right side pallet is assigned to the pallet 200b of " inspection result is unqualified ".In addition, 3 recovery supports Disk 219 is all assigned to the recovery pallet 219 of " need to check again for ".The reasons why being checked again for (resurvey) as needs is for example It is " to close that inspection result cannot be judged the mutual loose contact of terminal that inspection portion 16 and IC equipment 90 when checking can be enumerated Lattice " or " unqualified ".

Next, 41~Figure 48 of reference picture illustrates to check again for transport model.

It is that conveying is checked in usual transport model 2 and temporarily terminated but IC equipment that the inspection terminates to check again for transport model The IC equipment 90 (hereinafter referred to as " IC equipment 90a ") that should be checked again in 90 simultaneously checks again for result classification according to inspection portion 16 Pattern.Selection checks again for transport model for example on monitor 300, is thus automatically switched to again from usual transport model Secondary inspection transport model such that it is able to carry out checking again for for IC equipment 90a.

Figure 41 represents the state terminated to the usual transport model of the IC equipment 90 of batch.In Figure 41, in left side Pallet 200a is placed with multiple IC equipment 90, but still in the idle condition of IC equipment 90 can be loaded.In addition, the rightmost side return Receipts pallet 219 turns into the state for being placed with IC equipment 90a.

Act equipment delivery head 220 since the state shown in Figure 41, thus as shown in figure 42, IC equipment 90a from return Receive and use pallet 219, to the equipment of the side (upside in Figure 42) in two equipment recoverers 218 in the A4 of recovery zone Recoverer 218 is conveyed.The equipment recoverer 218 of one side is referred to as " equipment recoverer 218a " below, will be remaining another The equipment recoverer 218 of side (downside in Figure 42) is referred to as " equipment recoverer 218b ".

Next, as shown in figure 43, equipment recoverer 218a in the state of IC equipment 90a is configured with, to inspection area A3 is moved and stopped.Thus, IC equipment 90a is transported near inspection portion 16.

And, equipment delivery head 17 is acted, thus as shown in figure 44, IC equipment 90a is conveyed, is placed in inspection portion 16.Thus, carry out checking again for IC equipment 90a.

Check again for acting equipment delivery head 17 after terminating, thus as shown in figure 45, IC equipment 90a is transported in inspection Look into the equipment recoverer 218a stopped in the A3 of region.

Next, as shown in figure 46, equipment recoverer 218a in the state of IC equipment 90a is configured with, away from test zone Domain A3 and move and stop to recovery zone A4.In addition, the inspection result in IC equipment 90a is for example judged as the feelings of " qualified " Under condition, as shown in figure 46, the pallet 200a in the left side in figure passes through the action of conveyor pallet structure 22a, and region is removed from pallet A5 is moved to recovery zone A4.

Next, equipment delivery head 220 is acted, and thus as shown in figure 47, IC equipment 90a slave unit recoverer 218a, Conveyed to the pallet 200a moved in the A4 of recovery zone.Thus, IC equipment 90a is classified as the IC of " inspection result is qualified " and sets Standby 90.

Next, as shown in figure 48, the pallet 200a of IC equipment 90a is placed with by the action of conveyor pallet structure 22a, Pallet is moved to from recovery zone A4 remove region A5.Thus, the transport model that checks again for IC equipment 90a terminates.

In addition, as described above, in equipment supply unit 214 and equipment recoverer 218, towards inspection area A3 and convey The direction of IC equipment 90 is mutually opposite direction (reference picture 40, Figure 43).In addition, being also phase away from the direction of inspection area A3 Mutual opposite direction.Thus, for example when inspection portion 16 is checked, IC equipment 90 can be made to enter from mutually opposite direction Enter.Therefore, operating personnel recognize IC equipment 90 towards the direction of inspection area A3 such that it is able to confirm that check device 2001 is current It is in the action under usual transport model or in the action under checking again for transport model.

So in check device 2001, can suitably change the conveying direction of IC equipment 90 and constitute, thus, except Outside usual transport model, additionally it is possible to carry out checking again for transport model.

Additionally, checking again under transport model in present embodiment, recovery pallet 219 as described above is assigned to " need to check again for " is used, but is not limited thereto, for example, a pallet 200 in 3 pallets of sky 200 can also be allocated For " need to check again for " is used.

9th implementation method

Figure 51 and Figure 52 are respectively to represent electronic component inspection device of the invention (the 9th implementation method) in order The schematic top of the operating state (parallel transport model) different from Figure 40.

The of electronic component handling apparatus of the invention and electronic component inspection device is illustrated referring to above-mentioned figure Nine implementation methods, by with the difference of above-mentioned implementation method centered on illustrate, omit the explanation of identical item.

Present embodiment in addition to the transport model difference to IC equipment, other structures and above-mentioned 8th implementation method phase Together.

In the present embodiment, check device 2001A is configured to make it possible parallel transport model.Such as Figure 51, Figure 52 Shown, parallel transport model is the unchecked IC equipment 90 (hereinafter referred to as " IC equipment 90b ") since the A1 of pallet supply area Supply, the IC equipment 90b is conveyed to inspection portion 16, and also since pallet remove region A5 unchecked IC equipment 90 The supply of (hereinafter referred to as " IC equipment 90c "), the pattern that the IC equipment 90c is conveyed to inspection portion 16.And, IC equipment 90b All it is that assigned position is classified to according to the inspection result in inspection portion 16 with IC equipment 90c.Additionally, in the present embodiment, point Class destination is some the recovery pallet 219 in recovery pallet 219.

Such parallel transport model is in the feelings different from the inspection for IC equipment 90c of the inspection for IC equipment 90b Under condition effectively.For example, so-called " normal temperature inspection (cold test) " can will be set to for the inspection of IC equipment 90c, will be directed to The inspection of IC equipment 90b is set to so-called " high temperature inspection (hot test) " or " low temperature inspection (low-temperature test) ".Hereinafter join The parallel transport model applied in this case is illustrated according to Figure 51, Figure 52.

Under the parallel transport model, in equipment recoverer 218a and equipment recoverer 218b, by equipment recoverer 218a is used for the conveying of IC equipment 90b, and equipment recoverer 218b is used for the conveying of IC equipment 90c.

In addition, in the present embodiment, in equipment recoverer 218a and equipment recoverer 218b, at least equipment recoverer 218b is identical with equipment supply unit 214, can adjust the temperature of IC equipment 90c.Thus, can be by using equipment recoverer 218b IC equipment 90c is adjusted to be adapted to the temperature of inspection.

As shown in figure 51, IC equipment 90b is identical with usual transport model (reference picture 40), and from pallet supply area, A1 is defeated It is sent to recovery zone A4.And, in the A4 of recovery zone, the action that IC equipment 90b passes through equipment delivery head 220 is conveyed, carried The recovery of the rightmost side in the Figure 51 being placed in 3 recovery pallets 219 pallet 219.

On the other hand, the IC equipment 90c being placed in the A5 of region on pallet 200 is removed in pallet by conveyor pallet structure The action of 22a, is transported in the A4 of recovery zone together with pallet 200.Then, by the action of equipment delivery head 220, IC sets Standby 90c is transported to equipment recoverer 218b in the A4 of recovery zone.Next, the IC equipment 90c on equipment recoverer 218b It is transported in the A3 of inspection area by the action of equipment recoverer 218b.Additionally, IC equipment 90c is in equipment recoverer 218b On be adjusted temperature.And, in the A3 of inspection area, IC equipment 90c is placed in inspection by the action of equipment delivery head 17 Portion 16, is checked in the inspection portion 16.

After inspection terminates, as shown in figure 52, the action that IC equipment 90c passes through equipment delivery head 17 is transported to and is located at Equipment recoverer 218b in the A3 of inspection area.Next, the IC equipment 90c on equipment recoverer 218b is reclaimed by the equipment The action of portion 218b is delivered in the A4 of recovery zone again.In the A4 of recovery zone, inspections of the IC equipment 90c according to inspection portion 16 Come to an end fruit, and by the action of equipment delivery head 220, the recovery pallet 219 of the rightmost side conveyed, being placed in Figure 52.

Action more than in such check device 2001A, parallel transport model terminates.

In such present embodiment, check device 2001A also can suitably change the conveying direction of IC equipment 90, from And parallel transport model can be carried out.And, by the parallel transport model, the use of check device 2001A can be corresponded to Species of IC equipment 90 of person's treatment etc. i.e. demand, the inspection of different condition is carried out using a check device 2001A parallel.

In addition, under parallel transport model, because various conditions are different, equipment supply unit 214 and the court of equipment recoverer 218 Moment to inspection area A3 is mutually identical or different.Various conditions can for example enumerate IC equipment 90b, IC equipment 90c species, Equipment delivery head 13, the size of the responsiveness of equipment delivery head 220, equipment delivery head 13, equipment delivery head 220 movement away from From size, equipment supply unit 214, the size of the responsiveness of equipment recoverer 218 etc..

In equipment supply unit 214 and equipment recoverer 218 at the identical moment towards in the case of the A3 of inspection area, can be with The inspection and the inspection for IC equipment 90c for IC equipment 90b are carried out simultaneously in inspection portion 16.

In addition, equipment supply unit 214 and equipment recoverer 218 the different moment towards inspection area A3 situation Under, can be loaded in inspection portion 16 and check IC equipment 90b as much as possible, before and after the inspection, can be in inspection portion 16 Load and check IC equipment 90c as much as possible.

Additionally, under the parallel transport model of present embodiment, recovery as described above pallet 219 is used as the IC after inspection The classification destination of equipment 90, but be not limited thereto, for example, it is also possible to upper by what is configured in X direction in the A4 of recovery zone The pallet 200 of the rightmost side in Figure 51, the Figure 52 in 3 pallets 200 is stated as the classification destination of the IC equipment 90 after inspection.

Electronic component handling apparatus of the invention and electronic unit inspection are illustrated above in relation to embodiment illustrated Device, but the present invention is not limited to this, each several part for constituting electronic component handling apparatus and electronic component inspection device can be with It is replaced into the arbitrary structures that can play identical function.Alternatively, it is also possible to additional arbitrary structures thing.

In addition, electronic component handling apparatus of the invention and electronic component inspection device can also combine above-mentioned each implementation Structure any of more than two kinds (feature) in mode.

In addition, in above-mentioned 4th~the 7th implementation method, two holding sections are closed with the checkpost long for loading part respectively, but The invention is not limited in this, for example, can also engage with short side respectively.

In addition, in above-mentioned 4th~the 7th implementation method, holding section sets 2, but the invention is not limited in this, More than 3 can be set.In addition, for example in the case where holding section is provided with 4, preferably each holding section respectively with mounting portion Two sides long of part and two short side engagings.

Description of reference numerals：1 ... check device (electronic component inspection device), 11A ... conveyor pallet structures, 11B ... supports Disk carrying mechanism, 12 ... temperature adjustment portions, 13 ... equipment delivery heads, 14 ... equipment supply units, 15 ... conveyor pallet structures (mounting Component feed robot), 16 ... inspection portions, 17 ... equipment delivery heads, 18 ... equipment recoverers, 19 ... recovery pallets, 20 ... Equipment delivery head, 22A ... conveyor pallet structures, 22B ... conveyor pallet structures, 23 ... delivery sections, 3 ... first setting screens, 31 ... first menu groups, 311 ... buttons, 312 ... buttons, 313 ... buttons, 314 ... buttons, 315 ... buttons, 316 ... buttons, 317 ... buttons, 32 ... second menu groups, 321 ... buttons, 322 ... buttons, 323 ... buttons, 324 ... buttons, 325 ... buttons, 326 ... buttons, 327 ... buttons, 328 ... buttons, 329 ... buttons, 3210 ... buttons, 3211 ... buttons, 4 ... second setting pictures Face, 41 ... first menu groups, 411 ... arrow plots, 412 ... tray arrangement figures, 413 ... arrow plots, 42 ... second menu groups, 421 ... check boxes, 422 ... check boxes, 423 ... check boxes, 43 ... the 3rd menu groups, 431 ... check boxes, 432 ... check boxes, 433 ... check boxes, 434 ... check boxes, 44 ... the 4th menu groups, 441 ... check boxes, 442 ... check boxes, 443 ... check boxes, 45 ... the 5th menu groups, 451 ... check boxes, 452 ... check boxes, 46 ... the 6th menu groups, 471 ... buttons, 472 ... buttons, 473 ... buttons, 474 ... buttons, 475 ... buttons, 476 ... buttons, 5 ... the 3rd setting screens, 51 ... first reporting units, 511 ... Error coded display part, 512 ... unit display parts, 513 ... message display parts, 52 ... second reporting units, the name display of Unit 521 ... Portion, 522 ... reason display parts, 53 ... layouts, 61 ... first next doors, 62 ... second next doors, 63 ... the 3rd next doors, 64 ... the 4th Next door, 70 ... front shrouds, 71 ... side covers, 72 ... side covers, 73 ... back covers, 74 ... overhead guards, 90 ... IC equipment, 200 ... pallet (mounting portions Part), 200A ... pallets (mounting part), 200B ... pallets (mounting part), 200C ... pallets (mounting part), 300 ... monitoring Device, 301 ... display pictures (display part), 400 ... signal lamps, 500 ... loudspeakers, 600 ... Mouse tables, 700 ... guidance panels, 701 ... buttons, 702 ... buttons, 703 ... buttons, 704 ... buttons, 705 ... buttons, 706 ... buttons, 707 ... buttons, 708 ... press Button, 709 ... buttons, 710 ... buttons, 711 ... buttons, 712 ... buttons, 713 ... buttons, 714 ... buttons, 800 ... control units, A1 ... pallets supply area, A2 ... equipment supply area (supply area), A3 ... inspection areas, A4 ... equipment recovery zone (is returned Receive region), A5 ... pallets remove region, P1 ... first positions, P2 ... the second places.

Claims

1. a kind of electronic component handling apparatus, it is characterised in that

With delivery section, the delivery section can convey the mounting part for being placed with electronic unit,

The mounting part that the delivery section can will be placed with the electronic unit is delivered to first position, the first position Be that configuration carries out the position of the electronic unit before the first inspection, and the second place can be delivered to, the second place be Carry out configuration before the second inspection carried out described first check after the electronic unit the position different from the first position Put.

2. electronic component handling apparatus according to claim 1, it is characterised in that

With the multiple electronic unit delivery heads for conveying the electronic unit.

3. electronic component handling apparatus according to claim 1 and 2, it is characterised in that

In the case where second inspection is carried out, the delivery section can will be placed with the mounting portion of the electronic unit Part is delivered to the first position from the second place.

4. electronic component handling apparatus according to any one of claims 1 to 3, it is characterised in that

Described first checks that with the described second inspection be identical inspection.

5. electronic component handling apparatus according to any one of claims 1 to 3, it is characterised in that

Described first checks that from the described second inspection be different inspections.

6. electronic component handling apparatus according to any one of Claims 1 to 5, it is characterised in that

The first position and the second place are located at the inside of the electronic component handling apparatus.

7. electronic component handling apparatus according to claim 6, it is characterised in that

It is assumed that when mutually orthogonal X-direction and Y-direction, the delivery section has and conveys the mounting part along the X-direction Mounting part transfer robot.

8. electronic component handling apparatus according to any one of Claims 1 to 5, it is characterised in that

The first position and the second place are located at the outside of the electronic component handling apparatus.

9. electronic component handling apparatus according to claim 8, it is characterised in that

It is assumed that when mutually orthogonal X-direction and Y-direction, the delivery section has：In the first position side along the Y-direction Conveying it is described mounting part loading machine, the second place side along the Y-direction conveying it is described mounting part unloader, And along the mounting part transfer robot of the X-direction conveying mounting part.

10. electronic component handling apparatus according to any one of claim 1~9, it is characterised in that

The setting screen for being checked to described second and being automatically switched is checked from described first with setting.

11. electronic component handling apparatus according to claim 10, it is characterised in that

The setting screen sets the ON/OFF of the automatic switchover.

12. electronic component handling apparatus according to claim 10 or 11, it is characterised in that

The setting screen can set the number of times of the automatic switchover.

13. electronic component handling apparatus according to any one of claim 1~9, it is characterised in that

Checked to the described second setting screen for checking manual switching from described first with setting.

14. electronic component handling apparatus according to any one of claim 1~13, it is characterised in that

Possesses the display that can be shown and carry out the described first state for checking and carrying out the described second state for checking Portion.

15. a kind of electronic component inspection devices, it is characterised in that have：

Delivery section, it can convey the mounting part for being placed with electronic unit；With

Inspection portion, it checks the electronic unit,