CN106771580A - The investigating method of the quartz wafer on-line grinding based on inertial navigation mechanism - Google Patents
The investigating method of the quartz wafer on-line grinding based on inertial navigation mechanism Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
- G01C21/10—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration
- G01C21/12—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning
- G01C21/16—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning by integrating acceleration or speed, i.e. inertial navigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R23/00—Arrangements for measuring frequencies; Arrangements for analysing frequency spectra
- G01R23/02—Arrangements for measuring frequency, e.g. pulse repetition rate; Arrangements for measuring period of current or voltage
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- Automation & Control Theory (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
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Abstract
The invention discloses the investigating method of the quartz wafer on-line grinding based on inertial navigation mechanism, comprise the following steps：The automatic search routine of initialization data, resonant frequency, tracking frequency measurement flow, inertial navigation flow；The advantage of the invention is that：Quartz wafer grinds the automatic search method of online frequency measurement, with various, the full-automatic wafer grinding of strong interference immunity, stable, statistical parameter.
Description
Technical field
The present invention relates to quartz wafer field, in particular, it is related to the quartz wafer based on inertial navigation mechanism to exist
The investigating method of line grinding.
Background technology
Electronics and information industry is mainstay of the national economy industry, and quartz oscillator has pole in electronic information industry
Its consequence.China is the big producer of quartz crystal oscillator, but product quality still has larger gap compared with developed countries.
Industry development is very rapid in recent years, to the on-line grinding quartz wafer high accuracy frequency analysis prison in quartz crystal oscillator production process
The demand of control equipment is also being continuously increased, while proposing requirement higher to the observation and control ability of the equipment.
Quartz wafer grinding is essential step in quartz crystal oscillator production process, and quartz wafer electric parameter measurement is this
Crucial observation and control technology in one step, domestic many research institutions have all carried out research and probe to it.20th century the nineties, day
The transmission method principle that Tianjin university is based on international standard is measured the electrical parameter of quartz wafer.From 2002 to 2004
Year, BJ Mechanical Industry College is to distributed constant in the principle and π networks of π network techniques measurement quartz wafer electrical parameter to measurement essence
The influence of degree is studied.College of Information Science and Engineering of Central South University proposed one kind in 2004 and uses Direct Digital frequently
Rate synthesizer (DDS) as exciting signal source method and realize quartz wafer electrical parameter computer measurement system based on this
System.BJ University of Aeronautics ＆ Astronautics devised the quartz wafer Electric Power Measurement System that a kind of frequency is up to 200 MHz in 2006.
Harbin Institute of Technology in 2009 designs quartz wafer parameter measurement system based on π Network Maximum Transmission measuring methods, if
Selection has the digital signal processor (DSP) of high-speed data disposal ability as the control module of system in meter.Ground in product
Hair field, quartz wafer Technology of Frequency Measurement by Using both domestic and external has a long way to go.250A, 250B series of network analyzer of S＆A companies of the U.S.
With the frequency measurement scope of the E5100 series of network analyzers of Hewlett-Packard in 20 KHz-400 KHz and 0.5 MHz-200
MHz, load resonant frequency certainty of measurement is reached within 2 ppm, represents world's highest water in quartz wafer static state frequency measurement field
It is flat.It is domestic that except the KH1200 testers of Hong Kong Kolinker companies, its error and 250B are suitable, then without other like products
Substitute.Various research contents described above and commercial product both for quartz wafer fixed resonance under static state frequently
Rate is measured.
Mill is constantly to slide relative to quartz wafer in quartz wafer grinding production process, is not to begin under detecting head
There is quartz wafer eventually, resonance signal is interruption；Meanwhile, DDS swept frequency ranges and radio frequency needed for different frequency range quartz wafer
Exciting power is different；Therefore, the resonant frequency ginseng of quartz wafer is real-time and accurately measured in the dynamic process of grinding
Number, makes chip in disk reach target frequency and overclocking production accident caused by overmastication can not occur, it is desirable to phase exactly
The measurement and control instrument answered possesses " dynamic useful signal extraction ", " dynamic DDS swept frequency ranges modification " and " dynamic power feedback " work(
Energy.Therefore, research contents mentioned above and commercial product can not meet the technical requirements of online frequency measurement.Permitted both at home and abroad at present
Many quartz wafer manufacturing firms all use the online frequency monitoring instrument of TRANSAT companies of the U.S.（ALC）Chip frequency is carried out
Line observing and controlling.Traditional ALC systems possess " dynamic useful signal extraction ", " dynamic DDS swept frequency ranges modification " and " dynamic power is anti-
Feedback " function, can realize the online frequency measurement function in quartz wafer production, and this technology is monopolized by foreign countries at present.But, with
Quartz crystal oscillator industry technology make rapid progress, traditional ALC does not update therewith, is occurred in that increasingly in production practices
The problem that can not ignore more.
First, the resonant frequency of quartz crystal oscillator product is improved constantly, and highest frequency range has reached 50 MHz -60 MHz, very
Multiple enterprises can run into during actually used ALC and such as " saltus step of frequency measurement value occur in some frequency ranges " and cannot effectively control
, even there is overclocking event in the defect of amount of grinding, be particularly substantially increased in more than 40MHZ occurrence frequencies sometimes, have a strong impact on
Product quality and manufacturing schedule.This is because when measuring occurs in ALC by mistake, its frequency measuring method does not have according to actual grinding situation
Removal " measured frequency by mistake ", occurring the problem of frequency measurement value saltus step in noise circumstance also just turns into inevitable, while ALC swept frequency ranges are very
The big probability for also increasing frequency measurement value saltus step.
Secondly, many enterprises " after chip starts grinding, ALC starts the frequency measurement of display can occur during using ALC
Value is different with the actual resonance frequency value of quartz wafer " and cause the ALC cannot normally to monitor the process of lapping of quartz wafer, this is
Due to ALC press it is incorrect to the search of quartz wafer resonant frequency after start button cause, and resonant frequency search is incorrect
It is search quartz wafer resonant frequency method imperfection in the frequency measurement program due to ALC.While during using ALC sometimes
There is the phenomenon of " display frequency occurs during frequency measurement to dap ", when this happens, ALC can not recover normal frequency measurement
Function, display frequency is abnormal always.
Meanwhile, as the yield of quartz crystal oscillator is greatly improved, the consumption of abrasive sand, quartz wafer grinding carrier and abrasive disk
Amount is very huge, and the service efficiency for how improving abrasive sand, quartz wafer grinding carrier and abrasive disk is that each manufacturer reduces life
Produce the key of cost.From the angle of grinder management and control, corresponding measuring and controlling equipment need to have statistics abrasive disk in quartz wafer frequently
Rate is distributed the ability with grinding rate, to assess the crudy of preceding working procedure and the state of grinding system, is ground as changing
The foundation of sand, quartz wafer grinding carrier and maintenance grinding card.However, ALC systems are only provided " to reach grinding target frequency to stop
Control strategy only ", monitoring isoparametric to grinding rate and frequency scattered error and corresponding control strategy and exception policy are simultaneously
Without reference to this results in it and abrasive sand, quartz wafer grinding carrier and abrasive disk surface state cannot be monitored, to grinding
During occur unusual condition can not effectively judge and deal with.
Therefore, with reference to produce reality research and the exploration online Technology of Frequency Measurement by Using of quartz wafer, traditional ALC system trays are broken away from
Structure, for online frequency measurement and control method in " there is frequency measurement value saltus step in some frequency ranges ", " display frequency value is not after starting frequency measurement
It is right ", " easily by external interference ", the solution of " cannot in real time accurate monitoring grinder state " these problems, be very urgent
With it is necessary.
The content of the invention
Instant invention overcomes the deficiencies in the prior art, there is provided the quartz wafer on-line grinding based on inertial navigation mechanism
Investigating method, has the advantages that certainty of measurement high, strong interference immunity, stable, statistical parameter be various, control strategy is opened.
Technical scheme is as follows：
The investigating method of the quartz wafer on-line grinding based on inertial navigation mechanism, comprises the following steps：Initialization data step,
The automatic search routine step of resonant frequency, tracking frequency measurement process step, inertial navigation process step；
101）Initialization data is set and detecting step：To the parameter of abnormal monitoring, Statisti-cal control, frequency measurement strategy and polish process
Initialize installation is carried out, and self-inspection is carried out to grinder control module, it is ensured that equipment control is normal；
102）The automatic search routine step of resonant frequency：Step 101）After setting, searched for automatically by resonant frequency, searched for automatically
Frequency error factor parameter setting and automatic search complete data processing to carry out automatic search；
103）Tracking and testing process step：By step 102）Automatically after searching for successfully, into tracking and testing, it includes being joined
Number initialization, sweep parameters set, carry out DDS frequency sweeps, the treatment of frequency sweep data, the further analyzing and processing of data and to parameter
Reset；
104）Inertial navigation process step：In step 103）Start inertial navigation during treatment abnormal data, first according to quartz-crystal
The current grinding rate of piece obtains the initial frequency and cut-off frequency of DDS frequency sweeps, then according to the initial frequency of the DDS frequency sweeps for obtaining
Update peak value constraint, search width, frequency sweep amplitude, frequency sweep stepped parameter respectively with cut-off frequency, the frequency sweep initial frequency is
Current swept frequency value makes up lacking for partial data plus resonant frequency speed and the product value of the specified number of turns for analog parameter
Lose；The sweep parameters of DDS are write DDS, return to step 103 by parameter after the completion of updating）In DDS frequency sweeps.
Further, the step 101）In parameter include abnormal monitoring parameter, Statisti-cal control parameter, frequency measurement strategy ginseng
Number, polish process parameter, for online frequency measurement during various exception controls and Statisti-cal control.
Further, the step 102）At the beginning of resonant frequency is searched for and includes data automatically in the automatic search routine of resonant frequency
Beginningization, frequency measurement and sweep parameters are set, and DDS data acquisitions in an automatic search are not completed, then proceed to search for resonance automatically
Frequency, carries out DDS data acquisitions, if collection is completed, carries out the judgement whether frequency switching time reaches, if reached,
And the initial frequency of current search frequency range is already less than the grinding initial frequency that quartz wafer is set, then enters automatic search and complete
Flow chart of data processing, otherwise carries out automatic search rate handoff parameter setting procedure, and parameter is reset, and continues data
Collection, if do not reached, proceeds data acquisition.
Further, the step 103）, step 104）Middle DDS sweep methods are from initial frequency frequency sweep to cutoff frequency
Rate, then from cut-off frequency frequency sweep to initial frequency, so go round and begin again.
Further, the step 103）The treatment of middle frequency sweep data includes the operation to urgent pause, and then DDS is swept
The judgement whether frequency data acquisition completes, and successfully sentenced to obtain whether to search for according to tracking frequency measurement resonant frequency searching method
It is disconnected, if being judged as that the operation without urgent pause, the data acquisition of DDS frequency sweeps are completed above, but search for and be successfully judged as unsuccessful,
Then into the further analyzing and processing of data, if operation, the data acquisition of DDS frequency sweeps without urgent pause are completed, search for and successfully sentence
It is success to break, then whether peak-to-peak value is judged more than binding occurrence, is judged as NO, then at the further analysis of data
Reason, is judged as YES, then judged whether in the range of bandwidth constraints by resonant frequency value, if it is determined that be not, then into number
According to further analyzing and processing, if the judgment is Yes, then resonant frequency is stored in array, judge whether to receive lap information, such as
Whether fruit receives lap information, then calculate scattered error and judge the number of turns more than counting rate binding occurrence, if not receiving lap information,
Then directly judge that whether the number of turns, more than counting rate binding occurrence, if it is obtains speed and calculate frequency again by least square method
Average value, if no more than counting rate binding occurrence, skips acquisition speed, directly calculates average frequency value, and turn to data
Further analyzing and processing.
Further, the further analyzing and processing of the data includes carrying out the data for obtaining with the monitoring parameter for setting
Compare, it includes the judgement to frequency scattered error, grinding rate and the grinding number of turns, and compares with target frequency, wherein referring to
The resonance times measured in fixing turn are pointed out " frequency measurement exception " less than the number of times of setting, and enter inertial navigation flow.
Further, the amendment of the parameter includes that the modification of sweep parameters and online frequency measurement real time data send the time,
Include frequency sweep initial frequency, frequency sweep by frequency, frequency sweep amplitude, frequency sweep stepping, frequency sweep speed if modification sweep parameters are set
Degree；Search width, peak value constraint and bandwidth constraints, these parameters are frequency measurement parameter, for searching for resonant frequency, if do not changed
Sweep parameters set and then judge that online frequency measurement real time data sends the time, and it is average to obtain resonant frequency if the time of specifying is reached
Value, and resonant frequency average value, scattered error, grinding rate are sent, tracking and testing flow is returned to if the specified time is not reached
The treatment of data acquisition.
Advantage is the present invention compared to existing technology：Innovatively propose that a kind of quartz wafer based on inertial navigation mechanism exists
The investigating method of line grinding, can be correctly searched for by automatic search resonant frequency method proposed by the present invention after frequency measurement starts
To the current resonant frequency of quartz wafer, frequency measurement exception can occur in Frequency Measurement System by inertial navigation mechanism proposed by the present invention
When the measurement for carrying out resonant frequency that can remain valid until recover normal frequency measurement function, by online survey proposed by the present invention
Control strategy and exception policy during frequency, the unusual condition that can effectively occur simultaneously are dealt with, are carried according to the present invention
The method design for going out has various strong interference immunity, stable, statistical parameter, control strategy opening, abnormal frequency measurement complete
Quartz wafer grinds online Frequency Measurement System, and abnormal frequency measurement is completely even more the data to frequency scattered error, grinding rate and the grinding number of turns
Real-time comparison is carried out, it is the active demand of current domestic major quartz crystal oscillator production firms.Achievement of the invention is to improving
Quartz wafer industry production efficiency and product quality play an important roll, to improving China's quartz crystal oscillator industry whole competitiveness
It is significant.
Brief description of the drawings
Fig. 1 is that quartz wafer grinds online Frequency Measurement System framework map；
Fig. 2 is human-computer interaction interface main interface design；
Fig. 3 is human-computer interaction interface Administrator interface；
Fig. 4 is human-computer interaction interface abnormal monitoring parameter setting interface；
Fig. 5 is human-computer interaction interface Statisti-cal control parameter setting interface；
Fig. 6 is that human-computer interaction interface frequency measurement policing parameter sets interface；
Fig. 7 is human-computer interaction interface polish process parameter setting interface；
Fig. 8 is the harmonic wave of quartz wafer；
Fig. 9 is online frequency measurement general flow chart；
Figure 10 is the automatic search routine figure of resonant frequency；
Figure 11 is automatic search resonant frequency searching method flow chart；
Figure 12 is automatic search resonant frequency searching method schematic diagram；
Figure 13 is waveform-matching approach flow chart；
Figure 14 is data smoothing process chart；
Figure 15 is maximizing method flow diagram；
Figure 16 completes flow chart of data processing figure for automatic search；
Figure 17 filters method flow diagram of averaging for automatic search resonant frequency；
Figure 18 is tracking frequency measurement general flow chart.
Specific embodiment
Below by specific embodiment, and with reference to accompanying drawing, technical scheme is described in further detail.Should
Work as understanding, implementation of the invention is not limited to the following examples, done to the present invention any formal flexible and/
Or change falls within the scope of the present invention.
Quartz wafer grinds online Frequency Measurement System：It is as shown in Figure 1 that quartz wafer grinds online Frequency Measurement System.The present invention is proposed
Online frequency measurement and control method be applied to the Frequency Measurement System built based on the system architecture.The online Frequency Measurement System of quartz wafer by
MCU, DDS scan module, power amplification circuit module, π lattice networks module, discharge circuit module, peak detection circuit module,
Filter circuit module, touch screen circuitry module and power module are constituted.The DDS is Direct Digital Synthesizer.
It is interactive main interface, the Administrator interface of the quartz wafer online Frequency Measurement System of grinding as shown in Fig. 2 ~ Fig. 7,
Abnormal monitoring parameter setting interface, Statisti-cal control parameter setting interface, frequency measurement policing parameter set interface, polish process parameter and set
Interface is put, wafer grinding machine start-up and shut-down control switch, grinder lap signal detection means and abrasive sand start-up and shut-down control switch are connected
System is connected to, the input of π network interface circuit modules and output electrode are connected to the counter electrode slot of grinder upper millstone；
System power supply interface is connected to 220V civil powers, while ensureing there is arrangement chip to be measured on grinder.To quartz wafer grinder
Control module carries out self-inspection, it is ensured that equipment control is normal.
Quartz wafer grind online frequency measurement general flow chart as shown in figure 9, interaction main interface judge whether to press grinding by
Button, press grinding button after enter the automatic search routine of resonant frequency, if resonant frequency search less than, and search be less than bull ring
Number setting value, then continue automatic search resonant frequency, if greater than grinding number of turns setting value, then stops grinding, the main boundary of touch-screen
Face display search abnormal prompt information, into standby flow.If into the automatic search routine of resonant frequency and searching resonance
Frequency then enters tracking frequency measurement flow, according to whether resonant frequency if there is exception, is then judged beyond constraint, if exceeding
Constraint then stops grinding, into standby flow, if entering inertial navigation flow without departing from constraint, returns to tracking frequency measurement stream
Journey.If there is no exception, then return to tracking frequency measurement flow and continue frequency measurement.Specifically include following steps：Initialization data step,
The automatic search routine step of resonant frequency, tracking frequency measurement process step, inertial navigation process step；
101）Initialization data is set and detecting step：To the parameter of abnormal monitoring, Statisti-cal control, frequency measurement strategy and polish process
It is configured, and self-inspection is carried out to grinder control module, it is ensured that equipment control is normal.The parameter includes exception in touch-screen
Monitoring parameter sets interface, Statisti-cal control parameter setting interface, frequency measurement policing parameter setting interface, polish process parameter setting circle
In face set relevant parameter, for online frequency measurement during various exception controls and Statisti-cal control.Specific main setting
Parameter is abnormal and operation exception data the setting of the frequency measurement of abnormal monitoring, the control strategy of Statisti-cal control, number of turns statistics, statistics
The setting of parameter and finishing number of turns data, the frequency sweep amplitude of frequency measurement strategy, search width, sweep velocity, the constraint of low frequency peak value, height
The constraint of frequency peak value, swept frequency, scattered error constraint and the setting of frequency calibration data, the initial frequency of polish process, cut-off frequency
With the setting of normal speed data.
102）The automatic search routine of resonant frequency：As shown in Figure 10, step 101）After setting, searched automatically by resonant frequency
Rope, automatic search rate handoff parameter are set and automatic search completes data processing to carry out automatic search.Resonant frequency is automatic
Search routine includes data initialization, and frequency measurement and sweep parameters are set, and DDS data acquisitions in an automatic search are not completed, and are only entered
Whether row promptly suspends the judgement pressed, as long as not pressing urgent pause, then proceeds to search for resonant frequency automatically, carries out
DDS data acquisitions, if collection is completed, carry out the judgement whether frequency switching time reaches, if reach, and current search
The initial frequency of frequency range then enters automatic search and completes data processing stream already less than the grinding initial frequency that quartz wafer is set
Journey, otherwise carries out automatic search rate handoff parameter setting procedure, and parameter is reset, and continues data acquisition, if
Do not reach, then proceed data acquisition.
103）Tracking and testing process step：As shown in figure 18, by step 102）It is automatic search for successfully after, including carry out with
Track frequency measurement parameter initialization, sweep parameters set, carry out DDS frequency sweeps, the treatment of frequency sweep sampled data, the further analysis of data
Process and parameter is reset.
The treatment of the frequency sweep data includes the operation judges to urgent pause, while the operation differentiates the place of frequency sweep data
Whether reason is appropriate.Then the judgement for whether being completed to the data acquisition of DDS frequency sweeps, and according to tracking frequency measurement resonant frequency searching method
To judge whether that resonant frequency is searched for successfully, if being judged as that the operation without urgent pause, DDS frequency sweep data acquisitions are complete above
Into, but search for and be successfully judged as unsuccessful, then into the further analyzing and processing of data, if operation, DDS without urgent pause are swept
Frequency data acquisition is completed, and is searched for and be successfully judged as successfully, then whether peak-to-peak value is judged more than binding occurrence, is judged as NO,
Then into the further analyzing and processing of data, it is judged as YES, then is judged whether in the range of bandwidth constraints by resonant frequency value,
If it is determined that be not, then into the further analyzing and processing of data, if the judgment is Yes, then resonant frequency to be stored in array,
Judge whether to receive lap information, if receiving lap information, calculate scattered error and judge the number of turns whether more than counting rate about
Whether beam value, if not receiving lap information, directly judge the number of turns more than counting rate binding occurrence, if it is by minimum
Square law obtains speed and calculates average frequency value again, if no more than counting rate binding occurrence, skips acquisition speed, directly counts
Average frequency value is calculated, and turns to the further analyzing and processing of data.
The further analyzing and processing of the data, including the monitoring parameter of setting in the data and the touch-screen that obtain is carried out
Compare, it includes the judgement to frequency scattered error, grinding rate and the grinding number of turns, and compares with target frequency, wherein referring to
Less than the number of times of setting, main interface can be pointed out " frequency measurement exception " resonance times measured in fixing turn, and enter inertial navigation stream
Journey.
The modification reset including sweep parameters of the parameter and online frequency measurement real time data send the time, if repaiied
Change sweep parameters set then include sweep parameters and resonant frequency search parameter, wherein sweep parameters include frequency sweep initial frequency,
Frequency sweep is by frequency, frequency sweep amplitude, frequency sweep stepping, sweep velocity；Wherein resonant frequency search parameter includes search width, peak value
Constraint and bandwidth constraints, these parameters are frequency measurement parameter, for searching for resonant frequency, are sentenced if not changing sweep parameters and setting
Disconnected online frequency measurement real time data sends the time, obtains resonant frequency average value if the time of specifying is reached, and send resonance frequently
Rate average value, scattered error, grinding rate, return to the treatment of the data acquisition of tracking and testing flow if the specified time is not reached.
104）Inertial navigation flow：In step 103）Start inertial navigation during treatment abnormal data, first according to quartz-crystal
The current grinding rate of piece obtains the initial frequency and cut-off frequency of DDS frequency sweeps, then according to the initial frequency of the DDS frequency sweeps for obtaining
Update the parameters such as peak value constraint, search width, frequency sweep amplitude, frequency sweep stepping, the frequency sweep initial frequency respectively with cut-off frequency
For current frequency sweep initial frequency value adds resonant frequency speed and the product value of the specified number of turns, part number is made up for analog parameter
According to missing；The sweep parameters of DDS are write DDS, the DDS frequency sweeps in return to step 103 by parameter after the completion of updating.
DDS sweep methods are from initial frequency frequency sweep to cut-off frequency, then to be swept from cut-off frequency in the step 103,104
Frequency so goes round and begins again to initial frequency.Many methods can be related in automatic search resonant frequency includes resonant frequency searcher
Method, waveform-matching approach, point of proximity data smoothing processing method, maximizing method and automatic search resonant frequency filtering are asked
Mean Method.Automatic search is completed, and data have the handling process of oneself.
As shown in figure 11, the resonant frequency searching method in automatic search, dot count i=0, matching are processed by sampled value
Counting how many times j=0.After initialization, into every section of specified matching times are searched for automatically, judge whether j reaches and search for every section of finger automatically
Determine matching times, if reached, terminate；Peak-to-peak value resets if not reaching, and harmonic wave signal original position resets, right
The preset value of i and DDS frequency sweep sampling numbers is compared, if i has resonance less than the preset value of DDS frequency sweep sampling numbers
The point searching method of frequency 8 is traveled through, and as shown in figure 12, the figure is the schematic diagram of 8 point searching methods traversal, by 8 point search sides
Method traversal obtains resonant frequency.If preset values of the i not less than DDS frequency sweep sampling numbers, enter in the successful judgement of search,
If search is unsuccessful, the judgement for returning to j carries out next round circulation, if searched for successfully, enters and judges whether peak-to-peak value is big
In peak value constraint, if set up, calculate resonant frequency value simultaneously store resonant frequency, this section this matching resonant frequency number of times
+ 1, and j++, the judgement for returning to j carries out next round circulation, if invalid, the judgement for directly returning to j carries out next round circulation.
Waveform-matching approach is as shown in figure 13.According to the wave character of harmonic wave, 8 are taken according to time sequencing on waveform
Individual point carries out amplitude com parison, wherein spacing between 1,2,3,4,5,6,7 point is a search width, 7,8 points of spacing is searched for 3
Suo Kuandu, if the 4th point is maximum, the 7th point is minimum value, and 1,2,3 points of value increases successively, and 5,6 two points of value subtracts successively
It is small, then it is the waveform that the waveform is matching, this section of waveform interception is out done into the treatment of point of proximity data smoothing.
Point of proximity data smoothing process chart is as shown in figure 14.Because harmonic wave has some burr signals, pass through
Burr signal can be filtered after the treatment of point of proximity data smoothing.The treatment of point of proximity data smoothing is to each on the harmonic wave of interception
The value of point takes the average value of adjacent three point value.
Maximizing method flow diagram is as shown in figure 15.Maximizing method asks the harmonic wave after data smoothing maximum
Position where value, the position where maximum be resonant frequency where position, then the initial frequency according to frequency sweep ask
Go out real-time resonant frequencies.
It is as shown in figure 16 that automatic search completes flow chart of data processing.This frequency measurement before automatic search is completed is tried to achieve first to specify
The maximum of secondary matching resonance times, and starting bin sequential value and automatic search band number according to automatic search, to each
After the resonant frequency of frequency range storage using signal elimination method is surveyed by mistake, obtain the resonance times of this frequency range and rejected signal is surveyed by mistake
Resonant frequency average value afterwards, then by comparing acquisition resonance maximum times, judges that resonance maximum times are more than binding occurrence, then
Frequency measurement flow is tracked, resonance maximum times are less than binding occurrence, then judges the grinder number of turns whether more than abnormal monitoring parameter
Search exceptional value in interface is set, if great-than search exceptional value, then it is assumed that specified in grinder operation and do not searched in the number of turns
Resonant frequency, terminates automatic search routine, and search abnormal information is shown in touch-screen main interface, and system enters standby stream
Journey；Otherwise continue automatic search routine.
As shown in figure 17 for automatic search resonant frequency filters method flow diagram of averaging, wherein first to resonant frequency data
Carry out bubble sort method to be ranked up, then compared by the parameter set at abnormal monitoring interface, in data group in order
Every adjacent two data of arrangement carries out the measuring and calculating of number of effective points, and its value have to be larger than set parameter start and end lower limit, i.e.,
EffectiveNum in figure this parameter value for comparing, casts out the data less than start and end lower limit, then to maximum in array and
Minimum value and spacing filtering number are compared, more than filtering number and be valid data, during its parameter for comparing is figure
FilterSpace, and all valid data are averaged, obtain required automatic search resonant frequency filtering and average.
Embodiment described above is a kind of preferably scheme of the invention, not makees any formal to the present invention
Limitation, also has other variants and remodeling on the premise of without departing from the technical scheme described in claim.
Claims (7)
1. the investigating method of the quartz wafer on-line grinding of inertial navigation mechanism is based on, it is characterised in that comprised the following steps：Just
The automatic search routine step of beginningization data step, resonant frequency, tracking frequency measurement process step, inertial navigation process step；
101）Initialization data is set and detecting step：To the parameter of abnormal monitoring, Statisti-cal control, frequency measurement strategy and polish process
Initialize installation is carried out, and self-inspection is carried out to grinder control module, it is ensured that equipment control is normal；
102）The automatic search routine step of resonant frequency：Step 101）After setting, searched for automatically by resonant frequency, searched for automatically
Frequency error factor parameter setting and automatic search complete data processing to carry out automatic search；
103）Tracking and testing process step：By step 102）Automatically after searching for successfully, into tracking and testing, it includes being joined
Number initialization, sweep parameters set, carry out DDS frequency sweeps, the treatment of frequency sweep data, the further analyzing and processing of data and to parameter
Reset；
104）Inertial navigation process step：In step 103）Start inertial navigation during treatment abnormal data, first according to quartz-crystal
The current grinding rate of piece obtains the initial frequency and cut-off frequency of DDS frequency sweeps, then according to the initial frequency of the DDS frequency sweeps for obtaining
Update peak value constraint, search width, frequency sweep amplitude, frequency sweep stepped parameter respectively with cut-off frequency, the frequency sweep initial frequency is
Current swept frequency value makes up lacking for partial data plus resonant frequency speed and the product value of the specified number of turns for analog parameter
Lose；The sweep parameters of DDS are write DDS, return to step 103 by parameter after the completion of updating）In DDS frequency sweeps.
2. the investigating method of the quartz wafer on-line grinding of inertial navigation mechanism, its feature are based on according to claim 1
It is, the step 101）In parameter include abnormal monitoring parameter, Statisti-cal control parameter, frequency measurement policing parameter, polish process
Parameter, for online frequency measurement during various exception controls and Statisti-cal control.
3. the investigating method of the quartz wafer on-line grinding of inertial navigation mechanism, its feature are based on according to claim 1
It is, the step 102）Search includes data initialization to resonant frequency automatically in the automatic search routine of resonant frequency, frequency measurement with
Sweep parameters are set, and DDS data acquisitions in an automatic search are not completed, then proceed to search for resonant frequency automatically, carry out DDS
Data acquisition, if collection is completed, carries out the judgement whether frequency switching time reaches, if reached, and current search would be frequently
The initial frequency of section then enters automatic search and completes data processing stream already less than the grinding initial frequency that quartz wafer is set
Journey, otherwise carries out automatic search rate handoff parameter setting procedure, and parameter is reset, and continues data acquisition, if
Do not reach, then proceed data acquisition.
4. the investigating method of the quartz wafer on-line grinding of inertial navigation mechanism, its feature are based on according to claim 1
It is, the step 103）, step 104）Middle DDS sweep methods are from initial frequency frequency sweep to cut-off frequency, then from cutoff frequency
Rate frequency sweep is so gone round and begun again to initial frequency.
5. the investigating method of the quartz wafer on-line grinding of inertial navigation mechanism, its feature are based on according to claim 1
It is, the step 103）The treatment of middle frequency sweep data includes the operation to urgent pause, is then to DDS frequency sweep data acquisitions
The judgement of no completion, and according to tracking frequency measurement resonant frequency searching method come obtain whether search for successfully judgement, if more than
It is judged as that the operation without urgent pause, the data acquisition of DDS frequency sweeps are completed, but searches for and be successfully judged as unsuccessful, then into data
Further analyzing and processing, if operation, the data acquisition of DDS frequency sweeps without urgent pause are completed, search for and be successfully judged as successfully, then
Whether peak-to-peak value is judged more than binding occurrence, is judged as NO, then into the further analyzing and processing of data, be judged as YES,
Then judged whether in the range of bandwidth constraints by resonant frequency value, if it is determined that be not, then further dividing into data
Analysis is processed, and if the judgment is Yes, then resonant frequency is stored in into array, judges whether to receive lap information, if receiving number of turns letter
Breath, then calculate scattered error and judge that whether the number of turns, more than counting rate binding occurrence, if not receiving lap information, directly judges circle
Whether number is more than counting rate binding occurrence, and if it is obtain speed by least square method calculates average frequency value again, if
No more than counting rate binding occurrence, then skip acquisition speed, directly calculates average frequency value, and turn to the further analysis of data
Treatment.
6. the investigating method of the quartz wafer on-line grinding of inertial navigation mechanism, its feature are based on according to claim 5
It is that the further analyzing and processing of the data includes comparing the data for obtaining with the monitoring parameter for setting, and it includes
Judgement to frequency scattered error, grinding rate and the grinding number of turns, and compare with target frequency, wherein being measured in the number of turns specifying
Resonance times less than setting number of times, point out " frequency measurement exception ", and enter inertial navigation flow.
7. the investigating method of the quartz wafer on-line grinding of inertial navigation mechanism, its feature are based on according to claim 6
It is that the amendment of the parameter includes that the modification of sweep parameters and online frequency measurement real time data send the time, if modification frequency sweep
Parameter setting then includes frequency sweep initial frequency, frequency sweep by frequency, frequency sweep amplitude, frequency sweep stepping, sweep velocity；Search width,
Peak value is constrained and bandwidth constraints, and these parameters are frequency measurement parameter, for searching for resonant frequency, if not changing sweep parameters setting
Then judge that online frequency measurement real time data sends the time, obtain resonant frequency average value if the time of specifying is reached, and send humorous
Vibration frequency average value, scattered error, grinding rate, return to the place of the data acquisition of tracking and testing flow if the specified time is not reached
Reason.
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| CN108663569A (en) * | 2018-05-16 | 2018-10-16 | 浙江大学台州研究院 | The high-precision frequency statistics calibration method of quartz wafer grinding |
| CN109940506A (en) * | 2019-03-27 | 2019-06-28 | 浙江大学台州研究院 | The quartz wafer resonance frequency and scattered error statistical method distinguished based on chip |
| CN112162146A (en) * | 2020-09-09 | 2021-01-01 | 浙江大学台州研究院 | Online grinding frequency measurement system |
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