CN106771580B - The investigating method of quartz wafer on-line grinding based on inertial navigation mechanism - Google Patents
The investigating method of quartz wafer on-line grinding based on inertial navigation mechanism Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
- G01C21/10—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration
- G01C21/12—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning
- G01C21/16—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning by integrating acceleration or speed, i.e. inertial navigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R23/00—Arrangements for measuring frequencies; Arrangements for analysing frequency spectra
- G01R23/02—Arrangements for measuring frequency, e.g. pulse repetition rate; Arrangements for measuring period of current or voltage
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- Automation & Control Theory (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
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Abstract
The invention discloses the investigating methods of the quartz wafer on-line grinding based on inertial navigation mechanism, include the following steps: the automatic search routine of initialization data, resonance frequency, tracking frequency measurement process, inertial navigation process；The present invention has the advantages that quartz wafer grinds the automatic search method of online frequency measurement, there is strong interference immunity, the wafer grinding that stable, statistical parameter is various, full-automatic.
Description
Technical field
The present invention relates to quartz wafer fields, more specifically, it is related to existing based on the quartz wafer of inertial navigation mechanism
The investigating method of line grinding.
Background technique
Electronics and information industry is the pillar industries of the national economy, and quartz oscillator has pole in electronic information industry
Its consequence.China is the big producer of quartz crystal oscillator, but product quality still has larger gap compared with developed countries.
Industry development is very rapid in recent years, supervises to the on-line grinding quartz wafer high-precision frequency analysis in quartz crystal oscillator production process
The demand of control equipment is also being continuously increased, while more stringent requirements are proposed to the observation and control ability of the equipment.
Quartz wafer grinding is step essential in quartz crystal oscillator production process, and quartz wafer electric parameter measurement is this
Crucial observation and control technology in one step, domestic many research institutions have all carried out research and probe to it.20th century the nineties, day
The transmission method principle that saliva university is based on international standard measures the electrical parameter of quartz wafer.From 2002 to 2004
Year, BJ Mechanical Industry College is to distribution parameter in the principle and π network of π network technique measurement quartz wafer electrical parameter to measurement essence
The influence of degree is studied.College of Information Science and Engineering, Central South University proposed a kind of using Direct Digital frequency in 2004
Rate synthesizer (DDS) as exciting signal source method and based on this realize quartz wafer electrical parameter computer measurement system
System.BJ University of Aeronautics & Astronautics devised the quartz wafer Electric Power Measurement System that a kind of frequency is up to 200 MHz in 2006.
Harbin Institute of Technology in 2009 designs quartz wafer parameter measurement system based on π Network Maximum Transmission measurement method, if
Control module of the digital signal processor (DSP) with high-speed data processing capacity as system is selected in meter.It is ground in product
Hair field, quartz wafer Technology of Frequency Measurement by Using both domestic and external have a long way to go.250A, 250B series of network analyzer of S&A company, the U.S.
Frequency measurement range with the E5100 series of network analyzer of Hewlett-Packard is in 20 KHz-400 KHz and 0.5 MHz-200
MHz, load resonant frequency measurement accuracy reach within 2 ppm, represent world's highest water in quartz wafer static state frequency measurement field
It is flat.In addition to the KH1200 tester of Hong Kong Kolinker company, error and 250B are suitable for the country, then without other similar products
Substitution.The fixation resonance frequency of various research contents described above and commercial product both for quartz wafer under static state
Rate measurement.
Mill is constantly slided relative to quartz wafer in quartz wafer grinding production process, is not to begin under detecting head
There is quartz wafer eventually, resonance signal is intermittent；Meanwhile DDS swept frequency range and radio frequency needed for different frequency range quartz wafer
Exciting power is different；Therefore, the resonance frequency ginseng of quartz wafer is real-time and accurately measured in the dynamic process of grinding
Number, accurately makes chip in disk reach target frequency and overclocking production accident caused by overmastication cannot occur, it is desirable to phase
The measurement and control instrument answered has " extraction of dynamic useful signal ", " modification of dynamic DDS swept frequency range " and " dynamic power feedback " function
Energy.Therefore, research contents mentioned above and commercial product are not able to satisfy the technical requirements of online frequency measurement.Permitted both at home and abroad at present
More quartz wafer manufacturing firms all use the online frequency monitoring instrument (ALC) of TRANSAT company, the U.S. to carry out chip frequency
Line observing and controlling.Traditional ALC system has " extraction of dynamic useful signal ", " modification of dynamic DDS swept frequency range " and " dynamic power is anti-
Feedback " function, can be realized the online frequency measurement function in quartz wafer production, this technology is monopolized by foreign countries at present.But with
Quartz crystal oscillator industry technology makes rapid progress, and traditional ALC occurs increasingly in production practices there is no updating therewith
The problem of cannot mostly ignoring.
Firstly, the resonance frequency of quartz crystal oscillator product is continuously improved, highest frequency range has reached 50 MHz -60 MHz, very
Multiple enterprises can encounter during actually using ALC such as " to be occurred the jump of frequency measurement value in certain frequency ranges " and can not effectively control
Overclocking event even occurs sometimes, is especially substantially increased, seriously affects in 40MHZ or more occurrence frequency for the defect of amount of grinding
Product quality and manufacturing schedule.This is because there is no according to actual grinding situation for frequency measuring method when accidentally measuring occurs in ALC
Removal " accidentally measured frequency ", occurring the problem of frequency measurement value jump in noise circumstance also just becomes inevitable, while ALC swept frequency range is very
The probability of frequency measurement value jump is also increased greatly.
Secondly, many enterprises can occur during using ALC, " after chip starts grinding, ALC starts the frequency measurement of display
Value is different with the actual resonance frequency value of quartz wafer " and cause ALC that can not normally monitor the process of lapping of quartz wafer, this is
Due to ALC press it is incorrect to the search of quartz wafer resonance frequency after start button cause, and resonance frequency search is incorrect
It is that search quartz wafer resonant frequency method is not perfect in the frequency measurement program due to ALC.Simultaneously using during ALC sometimes
There is " there is a phenomenon where display frequencies to dap during frequency measurement ", when this happens, ALC cannot restore normal frequency measurement
Function, display frequency are abnormal always.
Meanwhile as the yield of quartz crystal oscillator greatly improves, abrasive sand, the consumption of quartz wafer grinding carrier and abrasive disk
Amount is very huge, and how to improve the service efficiency of abrasive sand, quartz wafer grinding carrier and abrasive disk is that each manufacturer reduces life
Produce the key of cost.The angle managed from grinder, corresponding measuring and controlling equipment need to have quartz wafer frequency in statistics abrasive disk
The ability of rate distribution and grinding rate is ground with assessing the processing quality of preceding working procedure and the state of grinding system as replacement
The foundation of sand, quartz wafer grinding carrier and maintenance grinding disk.It " reaches grinding target frequency to stop however, ALC system only provides
Control strategy only ", monitoring and corresponding control strategy and exception policy to the parameters such as grinding rate and frequency scattered error are simultaneously
Without reference to this results in it that can not be monitored to abrasive sand, quartz wafer grinding carrier and abrasive disk surface state, to grinding
The unusual condition occurred in the process effectively cannot judge and deal with.
Therefore, in conjunction with production practical study and the exploration online Technology of Frequency Measurement by Using of quartz wafer, traditional ALC system tray is got rid of
Structure, in online frequency measurement and control method " certain frequency ranges occur frequency measurement value jump ", " start frequency measurement after display frequency value not
It is right ", the solution of " be easy by external interference ", " can not in real time accurate monitoring grinder state " these problems, be very urgent
With it is necessary.
Summary of the invention
The present invention overcomes the deficiencies in the prior art, the quartz wafer on-line grinding based on inertial navigation mechanism is provided
Investigating method has many advantages, such as that measurement accuracy height, strong interference immunity, stable, statistical parameter is various, control strategy is open.
Technical scheme is as follows:
The investigating method of quartz wafer on-line grinding based on inertial navigation mechanism, includes the following steps: initialization data
The automatic search routine step of step, resonance frequency, tracking frequency measurement process step, inertial navigation process step；
101) initialization data setting and detecting step: to abnormal monitoring, Statisti-cal control, frequency measurement strategy and polish process
Parameter carries out Initialize installation, and carries out self-test to grinder control module, it is ensured that equipment control is normal；
102) it the automatic search routine step of resonance frequency: after step 101) setting, is searched for automatically by resonance frequency, is automatic
Data processing is completed in the setting of search rate handoff parameter and automatic search, to carry out automatic search；
103) tracking and testing process step: after being searched for successfully automatically by step 102), into tracking and testing comprising into
Row parameter initialization, sweep parameters setting carry out DDS frequency sweep, the processing of frequency sweep data, and the further analyses of data is handled and right
Parameter is reset；
104) inertial navigation process step: start inertial navigation when step 103) handles abnormal data, first according to stone
The current grinding rate of English chip obtains the initial frequency and cutoff frequency of DDS frequency sweep, then according to the starting of obtained DDS frequency sweep
Frequency and cutoff frequency update peak value constraint, search width, frequency sweep amplitude, frequency sweep stepped parameter, the frequency sweep starting frequency respectively
Rate is product value of the current swept frequency value plus resonance frequency rate and finger fixing turn, makes up partial data for analog parameter
Missing；After the completion of updating DDS, return step 103 is written in the sweep parameters of DDS by parameter) in DDS frequency sweep.
Further, the parameter in the step 101) includes abnormal monitoring parameter, Statisti-cal control parameter, frequency measurement strategy ginseng
Number, polish process parameter, for the various exception controls and Statisti-cal control during online frequency measurement.
Further, resonance frequency is searched for automatically including at the beginning of data in the automatic search routine of step 102) resonance frequency
Beginningization, frequency measurement and sweep parameters setting, in an automatic search DDS data acquisition do not complete, then continue to search for resonance automatically
Frequency carries out the acquisition of DDS data, if acquisition is completed, carries out the judgement whether frequency switching time reaches, if reached,
And the initial frequency of current search frequency range then enters automatic search and completes already less than the grinding initial frequency that quartz wafer is arranged
Otherwise flow chart of data processing carries out automatic search rate handoff parameter setting procedure, resets to parameter, continue data
Acquisition continues data acquisition if do not reached.
Further, the step 103), DDS sweep method is from initial frequency frequency sweep to cutoff frequency in step 104)
Rate, then from cutoff frequency frequency sweep to initial frequency, so in cycles.
Further, the processing of frequency sweep data includes operation to promptly suspending in the step 103), is then swept to DDS
The judgement whether frequency is completed according to acquisition, and successfully sentenced according to tracking frequency measurement resonance frequency searching method to obtain whether to search for
It is disconnected, it completes without operation, the acquisition of DDS frequency sweep data promptly suspended if be judged as above, but searches for and be successfully judged as unsuccessful,
It is then handled into the further analysis of data, if being completed without operation, the acquisition of DDS frequency sweep data promptly suspended, searches for and successfully sentence
Break as success, then judge whether peak-to-peak value is greater than binding occurrence, be judged as NO, then at the further analysis of data
Reason, is judged as YES, then by resonant frequency value judgement whether within the scope of bandwidth constraints, if it is determined that not being then to enter number
According to further analysis processing, if the judgment is Yes, then resonance frequency is stored in array, judges whether to receive lap information, such as
Fruit receives lap information, then calculates scattered error and judge to enclose whether number is greater than counting rate binding occurrence, if not receiving lap information,
Then directly judge to enclose whether number is greater than counting rate binding occurrence, rate is if it is obtained by least square method and calculates frequency again
Average value skips acquisition rate if being not more than counting rate binding occurrence, directly calculating average frequency value, and turns to data
Further analysis processing.
Further, the further analysis processing of the data includes carrying out to the data of acquisition and the monitoring parameter of setting
It compares comprising the judgement to frequency scattered error, grinding rate and bull ring number, and be compared with target frequency, wherein referring to
The resonance times measured in fixing turn are less than the number of setting, prompt " frequency measurement is abnormal ", and enter inertial navigation process.
Further, the amendment of the parameter includes the modification and online frequency measurement real time data sending time of sweep parameters,
It include frequency sweep initial frequency, frequency sweep if modification sweep parameters setting by frequency, frequency sweep amplitude, frequency sweep stepping, frequency sweep speed
Degree；Search width, peak value constraint and bandwidth constraints, these parameters are frequency measurement parameter, for searching for resonance frequency, if do not modified
Sweep parameters setting then judges online frequency measurement real time data sending time, and it is average that resonance frequency is obtained if reaching specified time
Value, and resonance frequency average value, scattered error, grinding rate are sent, tracking and testing process is returned to if not reaching specified time
The processing of data acquisition.
Advantage is the present invention compared with prior art: innovatively proposing that a kind of quartz wafer based on inertial navigation mechanism exists
The investigating method of line grinding, the automatic search resonant frequency method proposed through the invention can correctly search for after frequency measurement starts
The resonance frequency current to quartz wafer, it is abnormal that in Frequency Measurement System frequency measurement can occur for the inertial navigation mechanism proposed through the invention
When the measurement of carry out resonance frequency that can remain valid until restoring normal frequency measurement function, the online survey proposed through the invention
Control strategy and exception policy during frequency, the unusual condition that can effectively occur simultaneously are dealt with, are mentioned according to the present invention
Method out is designed with strong interference immunity, stable, statistical parameter is various, control strategy is open, abnormal frequency measurement is complete
Quartz wafer grinds online Frequency Measurement System, and abnormal frequency measurement is completely even more the data to frequency scattered error, grinding rate and bull ring number
Real-time comparison is carried out, it is current domestic major quartz crystal oscillator production firm urgent need.Achievement of the invention is to improve
Quartz wafer industry production efficiency and product quality play a significant role, to raising China's quartz crystal oscillator industry whole competitiveness
It is significant.
Detailed description of the invention
Fig. 1 is that quartz wafer grinds online Frequency Measurement System framework map；
Fig. 2 is human-computer interaction interface main interface design；
Fig. 3 is human-computer interaction interface administrator setting interface；
Fig. 4 is the design of human-computer interaction interface abnormal monitoring parameter setting interface；
Fig. 5 is the design of human-computer interaction interface Statisti-cal control parameter setting interface；
Fig. 6 is the design of human-computer interaction interface frequency measurement policing parameter set interface；
Fig. 7 is the design of human-computer interaction interface polish process parameter setting interface；
Fig. 8 is the harmonic wave of quartz wafer；
Fig. 9 is online frequency measurement general flow chart；
Figure 10 is the automatic search routine figure of resonance frequency；
Figure 11 is automatic search resonance frequency searching method flow chart；
Figure 12 is automatic search resonance frequency searching method schematic diagram；
Figure 13 is waveform-matching approach flow chart；
Figure 14 is data smoothing process flow diagram；
Figure 15 is maximizing method flow diagram；
Figure 16 is that flow chart of data processing figure is completed in automatic search；
Figure 17 is that automatic search resonance frequency filters method flow diagram of averaging；
Figure 18 is tracking frequency measurement general flow chart.
Specific embodiment
Below by specific embodiment, and in conjunction with attached drawing, technical scheme of the present invention will be further explained in detail.It answers
Work as understanding, implementation of the invention is not limited by the following examples, to the present invention done in any form accommodation and/
Or changes and fall within the scope of the present invention.
Quartz wafer grinds online Frequency Measurement System: it is as shown in Figure 1 that quartz wafer grinds online Frequency Measurement System.The present invention proposes
Online frequency measurement and control method be suitable for the Frequency Measurement System built based on the system architecture.The online Frequency Measurement System of quartz wafer by
MCU, DDS scan module, power amplification circuit module, π lattice network module, operational amplifier circuit module, peak detection circuit module,
Filter circuit module, touch screen circuitry module and power module are constituted.The DDS is Direct Digital Synthesizer.
As shown in Fig. 2 ~ Fig. 7, the interaction main interface of online Frequency Measurement System, administrator setting interface are ground for quartz wafer,
Abnormal monitoring parameter setting interface, Statisti-cal control parameter setting interface, frequency measurement policing parameter set interface, polish process parameter are set
Interface is set, wafer grinding machine start-up and shut-down control switch, grinder lap signal detection device and abrasive sand start-up and shut-down control switch are connected
It is connected to system, by the counter electrode slot for outputting and inputting electrode and being connected to grinder upper millstone of π network interface circuit module；
System power supply interface is connected to 220V alternating current, while guaranteeing there is arrangement chip to be measured on grinder.To quartz wafer grinder
Control module carries out self-test, it is ensured that equipment control is normal.
Quartz wafer grind online frequency measurement general flow chart as shown in figure 9, interaction main interface judge whether to press grinding by
Button, press grinding button after enter the automatic search routine of resonance frequency, if resonance frequency search less than, and search for be less than bull ring
Number setting value then continues automatic search resonance frequency and then stops grinding if it is greater than bull ring number setting value, the main boundary of touch screen
Face display search abnormal prompt information, into standby process.If into the automatic search routine of resonance frequency and searching resonance
Frequency then according to if there is exception then judges whether resonance frequency exceeds constraint into tracking frequency measurement process, if it is exceeding
Constraint then stops grinding, into standby process, if entering inertial navigation process without departing from constraint, back to tracking frequency measurement stream
Journey.If there is no exception, then returns to tracking frequency measurement process and continue frequency measurement.Specifically comprise the following steps: initialization data step,
The automatic search routine step of resonance frequency, tracking frequency measurement process step, inertial navigation process step；
101) initialization data setting and detecting step: to abnormal monitoring, Statisti-cal control, frequency measurement strategy and polish process
Parameter is configured, and carries out self-test to grinder control module, it is ensured that equipment control is normal.The parameter includes in touch screen
Abnormal monitoring parameter setting interface, Statisti-cal control parameter setting interface, frequency measurement policing parameter set interface, polish process parameter are set
The relevant parameter being arranged in interface is set, for the various exception controls and Statisti-cal control during online frequency measurement.It is specific main
Be arranged that frequency measurement that parameter is abnormal monitoring is abnormal and the setting of operation exception data, the control strategy of Statisti-cal control, circle number statistics,
Statistical parameter and the setting for repairing number of full circle data, the frequency sweep amplitude of frequency measurement strategy, search width, sweep velocity, low frequency peak value are about
Beam, high frequency peaks constraint, swept frequency, scattered error constrains and the setting of frequency calibration data, the initial frequency of polish process, cut-off
The setting of frequency and normal speed data.
102) it the automatic search routine of resonance frequency: as shown in Figure 10, after step 101) setting, is searched automatically by resonance frequency
Data processing is completed in rope, the setting of automatic search rate handoff parameter and automatic search, to carry out automatic search.Resonance frequency is automatic
Search routine includes data initialization, and frequency measurement and sweep parameters setting, in an automatic search DDS data acquisition do not complete, only into
Row promptly suspends the judgement whether pressed, as long as not pressing urgent pause, continues to search for resonance frequency automatically, carries out
The acquisition of DDS data carries out the judgement whether frequency switching time reaches if acquisition is completed, if reached, and current search
The initial frequency of frequency range then enters automatic search and completes data processing stream already less than the grinding initial frequency that quartz wafer is arranged
Otherwise journey carries out automatic search rate handoff parameter setting procedure, resets to parameter, continue data acquisition, if
It does not reach, then continues data acquisition.
103) tracking and testing process step: as shown in figure 18, after being searched for successfully automatically by step 102), including carry out with
Track frequency measurement parameter initialization, sweep parameters setting carry out DDS frequency sweep, the processing of frequency sweep sampled data, the further analysis of data
It handles and parameter is reset.
The processing of the frequency sweep data include to the operation judges promptly suspended, while the operation differentiate frequency sweep data place
It whether appropriate manages.Then DDS frequency sweep data are acquired with the judgement whether completed, and according to tracking frequency measurement resonance frequency searching method
To determine whether resonance frequency is searched for successfully, acquired if be judged as above without the operation that promptly suspends, DDS frequency sweep data
At but searching for and be successfully judged as unsuccessful, then handled into the further analysis of data, if being swept without the operation that promptly suspends, DDS
Frequency is completed according to acquisition, is searched for and is successfully judged as success, then judges whether peak-to-peak value is greater than binding occurrence, be judged as NO,
It then handles, is judged as YES into the further analysis of data, then by resonant frequency value judgement whether within the scope of bandwidth constraints,
If it is determined that be not then to be handled into the further analysis of data, if the judgment is Yes, then resonance frequency is stored in array,
Judge whether to receive lap information, if receiving lap information, calculates scattered error and judge to enclose whether number is greater than counting rate about
Beam value directly judges to enclose whether number is greater than counting rate binding occurrence, if it is passes through minimum if not receiving lap information
Square law obtains rate and calculates average frequency value again, if being not more than counting rate binding occurrence, skips acquisition rate, directly counts
Average frequency value is calculated, and turns to the further analysis processing of data.
The further analyses of the data is handled, including to acquisition data and touch screen in the monitoring parameter that is arranged carry out
It compares comprising the judgement to frequency scattered error, grinding rate and bull ring number, and be compared with target frequency, wherein referring to
The resonance times measured in fixing turn are less than the number of setting, and main interface can prompt " frequency measurement is abnormal ", and enter inertial navigation stream
Journey.
The modification reset including sweep parameters and online frequency measurement real time data sending time of the parameter, if repaired
Change sweep parameters setting then include sweep parameters and resonance frequency search parameter, wherein sweep parameters include frequency sweep initial frequency,
Frequency sweep is by frequency, frequency sweep amplitude, frequency sweep stepping, sweep velocity；Wherein resonance frequency search parameter includes search width, peak value
Constraint and bandwidth constraints, these parameters are frequency measurement parameter, for searching for resonance frequency, are sentenced if not modifying sweep parameters setting
Break online frequency measurement real time data sending time, obtain resonance frequency average value if reaching specified time, and sends resonance frequency
Rate average value, scattered error, grinding rate return to the processing of the data acquisition of tracking and testing process if not reaching specified time.
104) inertial navigation process: start inertial navigation when step 103) handles abnormal data, first according to quartz-crystal
The current grinding rate of piece obtains the initial frequency and cutoff frequency of DDS frequency sweep, then according to the initial frequency of obtained DDS frequency sweep
Update the parameters such as peak value constraint, search width, frequency sweep amplitude, frequency sweep stepping, the frequency sweep initial frequency respectively with cutoff frequency
It is current frequency sweep initial frequency value plus the product value of resonance frequency rate and finger fixing turn, makes up part number for analog parameter
According to missing；DDS is written into the sweep parameters of DDS after the completion of parameter update, the DDS frequency sweep in return step 103.
The step 103, DDS sweep method is to sweep from initial frequency frequency sweep to cutoff frequency, then from cutoff frequency in 104
Frequency arrives initial frequency, so in cycles.Can be related to many methods in automatic search resonance frequency includes resonance frequency searcher
Method, waveform-matching approach, point of proximity data smoothing processing method, maximizing method and automatic search resonance frequency filtering are asked
Mean Method.Automatic search is completed, and data have the process flow of oneself.
As shown in figure 11, sampled value is handled dot count i=0, matching by the resonance frequency searching method in automatic search
Counting how many times j=0.After initialization, into every section of specified matching times are searched for automatically, judges whether j reaches and search for every section of finger automatically
Determine matching times, if reached, terminates；Peak-to-peak value is reset if being not achieved, and harmonic wave signal initial position is reset, right
I is compared with the preset value of DDS frequency sweep sampling number, if i is less than the preset value of DDS frequency sweep sampling number, there is resonance
8 point searching method of frequency traversal, as shown in figure 12, the figure is the schematic diagram of 8 point searching methods traversal, passes through 8 point search sides
Method traversal obtains resonance frequency.If i is not less than the preset value of DDS frequency sweep sampling number, enter in the successful judgement of search,
If search is unsuccessful, the judgement for returning to j carries out next round circulation, if searched for successfully, enters judge whether peak-to-peak value is big
It is constrained in peak value, if set up, calculates resonant frequency value and store resonance frequency, this matched resonance frequency number of this section
+ 1, and j++, the judgement for returning to j carries out next round circulation, if invalid, the judgement of directly return j carries out next round circulation.
Waveform-matching approach is as shown in figure 13.According to the wave character of harmonic wave, 8 are taken according to time sequencing on waveform
A point carries out amplitude com parison, wherein the spacing between 1,2,3,4,5,6,7 point is a search width, 7,8 points of spacing is 3 and searches
Suo Kuandu, if the 4th point is maximum value, the 7th point is minimum value, and 1,2,3 points of value is sequentially increased, and the value of 5,6 two o'clocks successively subtracts
It is small, then it is matched waveform for the waveform, this section of waveform interception is come out and does the processing of point of proximity data smoothing.
Point of proximity data smoothing process flow diagram is as shown in figure 14.Since harmonic wave is there are some burr signals, pass through
Burr signal can be filtered out after the processing of point of proximity data smoothing.The processing of point of proximity data smoothing is to each on the harmonic wave of interception
The value of point takes the average value of adjacent three point value.
Maximizing method flow diagram is as shown in figure 15.Maximizing method asks maximum to the smoothed out harmonic wave of data
Position where being worth, the position where maximum value is the position where resonance frequency, is then asked according to the initial frequency of frequency sweep
Real-time resonant frequencies out.
It is as shown in figure 16 that flow chart of data processing is completed in automatic search.It is specified that this frequency measurement before automatic search is completed is acquired first
The maximum value of secondary matching resonance times, and according to the starting bin sequential value searched for automatically and automatic search band number, to each
After the resonance frequency of frequency range storage is using accidentally signal elimination method is surveyed, obtains the resonance times of this frequency range and rejected signal is accidentally surveyed
Resonance frequency average value afterwards judges that resonance maximum times are greater than binding occurrence, then then by comparing resonance maximum times are obtained
Tracking frequency measurement process is carried out, resonance maximum times are less than binding occurrence, then judge whether grinder circle number is greater than abnormal monitoring parameter
Search exceptional value in set interface, if more than search exceptional value, then it is assumed that refer in fixing turn in grinder operation and do not search
Resonance frequency terminates automatic search routine, and search exception information is shown in touch screen main interface, and system enters standby stream
Journey；Otherwise continue automatic search routine.
Method flow diagram of averaging is filtered for automatic search resonance frequency as shown in figure 17, wherein first to resonance frequency data
It carries out bubble sort method to be ranked up, then the parameter by being arranged at abnormal monitoring interface is compared, in data group in order
Each adjacent two data of arrangement carry out the measuring and calculating of number of effective points, and value has to be larger than set parameter start and end lower limit value, i.e.,
This parameter value for comparing of EffectiveNum in figure, casts out the data less than start and end lower limit value, then to maximum in array and
Minimum value is compared with spacing filtering number, is greater than filtering number and for valid data, the parameter compared is in figure
FilterSpace, and all valid data are averaged, it obtains required automatic search resonance frequency filtering and averages.
Above-mentioned embodiment is only a preferred solution of the present invention, not the present invention is made in any form
Limitation, there are also other variations and modifications on the premise of not exceeding the technical scheme recorded in the claims.
Claims (7)
1. the investigating method of the quartz wafer on-line grinding based on inertial navigation mechanism, which comprises the steps of: just
The automatic search routine step of beginningization data step, resonance frequency, tracking frequency measurement process step, inertial navigation process step；
101) initialization data setting and detecting step: to the parameter of abnormal monitoring, Statisti-cal control, frequency measurement strategy and polish process
Initialize installation is carried out, and self-test is carried out to grinder control module, it is ensured that equipment control is normal；
102) it the automatic search routine step of resonance frequency: after step 101) setting, is searched for automatically by resonance frequency, automatic search
Data processing is completed in frequency error factor parameter setting and automatic search, to carry out automatic search；
103) tracking and testing process step: after being searched for successfully automatically by step 102), into tracking and testing comprising joined
Number initialization, sweep parameters setting carry out DDS frequency sweep, and the further analysis of the processing of frequency sweep data, data is handled and to parameter
Reset；
104) inertial navigation process step: start inertial navigation when step 103) handles abnormal data, first according to quartz-crystal
The current grinding rate of piece obtains the initial frequency and cutoff frequency of DDS frequency sweep, then according to the initial frequency of obtained DDS frequency sweep
Update peak value constraint, search width, frequency sweep amplitude, frequency sweep stepped parameter respectively with cutoff frequency, the frequency sweep initial frequency is
Current swept frequency value makes up lacking for partial data for analog parameter plus the product value of resonance frequency rate and finger fixing turn
It loses；After the completion of updating DDS, return step 103 is written in the sweep parameters of DDS by parameter) in DDS frequency sweep.
2. the investigating method of the quartz wafer on-line grinding based on inertial navigation mechanism according to claim 1, feature
It is, the parameter in the step 101) includes abnormal monitoring parameter, Statisti-cal control parameter, frequency measurement policing parameter, polish process
Parameter, for the various exception controls and Statisti-cal control during online frequency measurement.
3. the investigating method of the quartz wafer on-line grinding based on inertial navigation mechanism according to claim 1, feature
Be, in the automatic search routine of step 102) resonance frequency resonance frequency search for automatically include data initialization, frequency measurement and
Sweep parameters setting, in an automatic search DDS data acquisition do not complete, then continue to search for resonance frequency automatically, carry out DDS
Data acquisition carries out the judgement whether frequency switching time reaches if acquisition is completed, if reached, and current search frequency
The initial frequency of section then enters automatic search and completes data processing stream already less than the grinding initial frequency that quartz wafer is arranged
Otherwise journey carries out automatic search rate handoff parameter setting procedure, resets to parameter, continue data acquisition, if
It does not reach, then continues data acquisition.
4. the investigating method of the quartz wafer on-line grinding based on inertial navigation mechanism according to claim 1, feature
It is, DDS sweep method is from initial frequency frequency sweep to cutoff frequency, then from cutoff frequency in the step 103), step 104)
Rate frequency sweep is to initial frequency, so in cycles.
5. the investigating method of the quartz wafer on-line grinding based on inertial navigation mechanism according to claim 1, feature
It is, the processing of frequency sweep data includes the operation to promptly suspending in the step 103), is then to the acquisition of DDS frequency sweep data
The judgement of no completion, and whether successful judgement is searched for obtain according to tracking frequency measurement resonance frequency searching method, if more than
It is judged as and completes without operation, the acquisition of DDS frequency sweep data promptly suspended, but search for and be successfully judged as unsuccessful, then enters data
Further analysis processing, if without promptly suspend operation, DDS frequency sweep data acquisition complete, search for and be successfully judged as success, then
Judge whether peak-to-peak value is greater than binding occurrence, be judged as NO, then handles, be judged as YES into the further analysis of data,
Then by resonant frequency value judgement whether within the scope of bandwidth constraints, if it is determined that not being then to enter further dividing for data
Analysis processing, if the judgment is Yes, is then stored in array for resonance frequency, judges whether to receive lap information, if receiving circle number letter
Breath then calculates scattered error and judges to enclose whether number is greater than counting rate binding occurrence, if not receiving lap information, directly judgement is enclosed
Whether number is greater than counting rate binding occurrence, if it is obtains rate by least square method and calculates average frequency value again, if
No more than counting rate binding occurrence, then acquisition rate is skipped, directly calculating average frequency value, and turns to the further analysis of data
Processing.
6. the investigating method of the quartz wafer on-line grinding according to claim 5 based on inertial navigation mechanism, feature
It is, the further analysis processing of the data includes that the data of acquisition are compared with the monitoring parameter of setting comprising
Judgement to frequency scattered error, grinding rate and bull ring number, and be compared with target frequency, wherein being measured referring in fixing turn
Resonance times be less than the number of setting, prompt " frequency measurement abnormal ", and enter inertial navigation process.
7. the investigating method of the quartz wafer on-line grinding according to claim 6 based on inertial navigation mechanism, feature
It is, the amendment of the parameter includes the modification and online frequency measurement real time data sending time of sweep parameters, if modification frequency sweep
Parameter setting then includes frequency sweep initial frequency, frequency sweep cutoff frequency, frequency sweep amplitude, frequency sweep stepping, sweep velocity；Search width,
Peak value constraint and bandwidth constraints, these parameters are frequency measurement parameter, for searching for resonance frequency, if not modifying sweep parameters setting
Then judge online frequency measurement real time data sending time, obtains resonance frequency average value if reaching specified time, and send humorous
Vibration frequency average value, scattered error, grinding rate return to the place of the data acquisition of tracking and testing process if not reaching specified time
Reason.
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| CN201611203121.1A CN106771580B (en) | 2016-12-23 | 2016-12-23 | The investigating method of quartz wafer on-line grinding based on inertial navigation mechanism |
| CN201910470944.8A CN110125793B (en) | 2016-12-23 | 2016-12-23 | Quartz wafer measurement and control method based on automatic resonant frequency search mechanism |
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| CN111230725B (en) * | 2019-03-27 | 2021-06-15 | 浙江大学台州研究院 | Single-turn segmentation method for quartz wafer resonant frequency based on rotating speed judgment |
| CN112162146B (en) * | 2020-09-09 | 2021-04-27 | 浙江大学台州研究院 | SC cut quartz crystal on-line grinding frequency measurement method |
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| AUPO359096A0 (en) * | 1996-11-13 | 1996-12-05 | Lonsdale, Anthony | Apparatus for tracking resonant frequency |
| JP4810728B2 (en) * | 2000-12-04 | 2011-11-09 | 株式会社ニコン | Polishing condition monitoring method and apparatus, polishing apparatus, and semiconductor device manufacturing method |
| US8834230B2 (en) * | 2008-07-31 | 2014-09-16 | Shin-Etsu Handotai Co., Ltd. | Wafer polishing method and double-side polishing apparatus |
| GB2478590A (en) * | 2010-03-12 | 2011-09-14 | Precitec Optronik Gmbh | Apparatus and method for monitoring a thickness of a silicon wafer |
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| CN108614153B (en) * | 2016-01-22 | 2020-07-07 | 浙江大学台州研究院 | Quartz wafer grinding control method based on waveform matching |
| CN105588980B (en) * | 2016-01-22 | 2018-06-26 | 浙江大学台州研究院 | A kind of method that quartz wafer based on waveform-matching approach grinds online frequency measurement |
| CN205720430U (en) * | 2016-04-28 | 2016-11-23 | 浙江大学台州研究院 | Quartz wafer grinds online Frequency Measurement System |
| CN105866540A (en) * | 2016-04-28 | 2016-08-17 | 浙江大学台州研究院 | Online frequency measurement system for quartz wafer grinding |
| CN110125793B (en) * | 2016-12-23 | 2021-02-26 | 浙江大学台州研究院 | Quartz wafer measurement and control method based on automatic resonant frequency search mechanism |
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| CN110221124B (en) | 2021-02-26 |
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