WO2022052187A1

WO2022052187A1 - Online grinding frequency measurement system

Info

Publication number: WO2022052187A1
Application number: PCT/CN2020/118129
Authority: WO
Inventors: 潘凌锋; 郭彬; 陈浙泊; 陈一信; 林建宇; 余建安; 颜文俊; 林斌; 周巍; 吴荻苇
Original assignee: 浙江大学台州研究院
Priority date: 2020-09-09
Filing date: 2020-09-27
Publication date: 2022-03-17
Also published as: CN112162146B; CN112162146A

Abstract

An online grinding frequency measurement system, comprising a frequency measurement test function and an online frequency measurement function. The frequency measurement test function comprises a single frequency sweep dual-resonance frequency waveform matching function, a single frequency sweep resonance frequency data processing function, and a data processing function in unit time. The on-line frequency measurement function comprises an automatic search function and a tracking frequency measurement function. The online grinding frequency measurement system capable of accurately distinguishing a dual-mode frequency has a high processing efficiency and a high processing accuracy.

Description

An online grinding frequency measurement system

technical field

The invention relates to the field of quartz wafers, in particular to an online grinding frequency measurement system.

Background technique

The core components of crystal oscillators (active crystal oscillators, oscillators) and crystal resonators (passive crystal oscillators, crystals) are quartz wafers. The design of quartz wafers largely determines the performance of oscillators and resonators. The material of the quartz wafer is quartz rod (quartz). Due to the anisotropic characteristics of the crystal, the quartz wafers cut from different directions of the quartz rod have completely different effects. The cutting method of the quartz rod determines the elasticity of the quartz wafer. Constant, dielectric constant, expansion coefficient, temperature characteristics, etc., such as frequency temperature coefficient, frequency thickness coefficient, stress compensation coefficient, etc. The differences in these characteristics determine the application of crystals in different occasions. Quartz bar cutting capabilities (eg, cutting accuracy, double corner cutting technology) often reflect the technical capabilities of a crystal manufacturer.

Common cutting methods include single-angle AT, BT, tuning fork, double-angle SC, IT, etc. SC cut is a relatively common cut, especially in oven controlled crystal oscillators (OCXOs), which have important applications.

at the corner

When the stress coefficient of the double-turn quartz wafer is zero, this type of cut resonator is called an SC (stressed-stress, compensated-compensated) cut-type resonator, that is, a stress-compensated resonator.

Since SC-cut resonators have the characteristics of stress compensation and thermal transient compensation, using SC-cut resonators has the following advantages:

1. Good startup characteristics. Because the thermal overshoot of the SC-cut resonator is about two orders of magnitude smaller than that of the AT-cut, the frequency stability of the SC-cut crystal oscillator can be achieved quickly after power-on, and generally, the stability can reach 2×10 ^-9 after power-on for 6 minutes.

2. The aging rate is small. The stress effect of SC-cut resonators is small, and the aging caused by the stress effect is also small. The aging rate of the high-precision SC-cut resonator can reach (10 ^-11 ~ 10 ^-12 )/d.

3. The amplitude-frequency effect is small. The amplitude-frequency effect of the SC-cut resonator is about half that of the AT-cut, which means that the excitation level of the SC-cut resonator can be an order of magnitude larger than that of the AT-cut without increasing aging.

4. Good short-term frequency stability. After the excitation level is increased, the signal-to-noise ratio relative to white noise is improved, so the far-end phase noise can be improved, and the current highest level can reach (-160 to 170) dBc/Hz. After the stress effect is reduced, the stress changes caused by the aging of the casing, brackets, electrodes, etc., and the thermal stress changes caused by temperature fluctuations will not cause excessive frequency fluctuations, so the near-end phase noise is reduced. At present, the near-end phase noise at a frequency offset of 10 Hz can reach (-130 to 140) dBc/Hz.

5. Good anti-radiation performance.

6. Good anti-acceleration performance.

7. Good frequency temperature coefficient.

8. Can work above 100℃.

In summary, it can be seen that for those low-noise crystal oscillators used in ranging, high-speed target tracking, and outer space communication systems, as well as crystal oscillators that require fast start-up, and crystal oscillators used in environments with strong radiation, strong vibration, and severe temperature changes , it is appropriate to use the crystal oscillator made of SC cut resonator. Of course, the price of the crystal oscillator will be higher at this time.

The only downside of the SC-cut resonator is the presence of an unwanted B-mode vibration that is about 9.5% higher frequency than the C-mode vibration we want. Therefore, the B-mode suppression network must be added to the SC-cut crystal oscillator to ensure that the crystal oscillator works in the C-mode and the B-mode does not vibrate. Some SC-cut crystal oscillators still have B-mode oscillation due to improper design of the B-mode suppression network or deterioration of network components. At this time, there are two cases. One is that only the B-mode oscillates and the C-mode does not oscillate. If the user uses a frequency meter to test that the oscillation frequency is about 10% higher than the required frequency, it can be judged that it is working in B-mode oscillation. Another case is that the B-mode and C-mode oscillate at the same time, and the two interact to produce an FM output.

In the current online grinding process of quartz wafers, the used quartz wafer online grinding analysis and measurement and control instrument can stably track frequency measurement and control the grinding process of AT-cut quartz wafers. Since the AT-cut quartz wafer has only one resonance frequency, only one resonance waveform is generated when the frequency is swept near the resonance frequency, and the design of the existing measurement and control instrument is only for the frequency measurement of the quartz wafer with only one resonance waveform. and control.

The SC-cut double-corner quartz crystal has two resonant frequencies of B mode and C mode, and the difference between the two frequencies is about 9.5%. The C-mode resonant frequency may be measured, but it cannot be confirmed whether the currently measured resonant frequency is the B-mode resonant frequency or the C-mode resonant frequency. Therefore, the following problems exist in the frequency measurement of the SC-cut quartz wafer online grinding process using the existing measurement and control instrument:

1. The resonant frequency obtained by automatic frequency search cannot confirm whether it is the resonant frequency of the B mode or the resonant frequency of the C mode, but we need the C mode frequency. The final frequency is wrong and the B-mode frequency has been overclocked, which will cause the entire disk to be scrapped.

2. Even if the current measurement and control instrument measures the correct C-mode frequency and stably tracks the shutdown, we cannot get the B-mode frequency, and the user still cannot confirm whether the final frequency obtained by grinding is correct. It can only be confirmed after measurement on a standard instrument such as a network analyzer, resulting in extremely low efficiency. If the frequencies of mode B and mode C can be obtained at the same time during the grinding process, it can not only confirm whether the frequency finally obtained at present is correct, but also carry out the current grinding of SC-cut quartz wafers through the proportion information and the change curve of the proportion information during the grinding process. Performance analysis.

3. During the automatic frequency search process of the currently used frequency measuring instrument, since only one frequency value is searched, it is impossible to confirm whether the searched frequency is the B-mode frequency or the C-mode frequency.

At the same time, the frequency of the current SC-cut quartz wafer needs to be confirmed after grinding, and the frequency of the B-mode and C-mode can only be confirmed by a network analyzer or other frequency measurement device, but the frequency cannot be confirmed in the grinding machine, resulting in The efficiency is extremely low, and it is easy to break the wafer and cause losses when taking the material back and forth.

Based on the above reasons, the current grinding process of SC-cut quartz wafers is basically based on the number of turns to judge the thickness for shutdown control, and then use a network analyzer or other frequency measurement device to confirm the frequency. This method will cause the shutdown frequency to be extremely low. Stable, low repetition accuracy, and the possibility of error in frequency judgment.

Therefore, in the grinding process of SC-cut quartz wafers, it is of great significance to develop an online frequency measuring instrument that can measure the resonance frequencies of B-mode and C-mode in real time.

SUMMARY OF THE INVENTION

The invention overcomes the deficiencies of the prior art, and provides an online grinding frequency measurement system with high processing efficiency, high processing precision and accurate dual-mode frequency distinction.

The technical scheme of the present invention is as follows:

An online grinding frequency measurement system, including a frequency measurement test function and an online frequency measurement function;

The frequency measurement test function includes the single-sweep double-resonance frequency waveform matching function, the single-sweep resonant frequency data processing function, and the unit time data processing function; the specific process is as follows:

1.1) Parameter setting steps: read the frequency measurement test parameters and SC chip setting parameters in the power-down storage module in the system;

Frequency measurement test parameters, read through the power-down storage module, including sweep frequency parameters and frequency measurement parameters; the sweep frequency parameters include sweep start frequency and sweep cutoff frequency, sweep step, sweep speed, sweep frequency Amplitude, frequency measurement parameters include high frequency search width, low frequency search width and peak constraint; SC chip setting parameters, read through the power-down storage module, including SC frequency ratio, frequency ratio upper limit, frequency ratio lower limit;

The constraints are judged on the above parameters. If the above parameters do not meet the constraints, write them into the power-down storage module according to the newly set values. If the above parameters do not exist in the power-down storage module, the above parameters are Set the parameter to the default value and write it to the power-down memory module;

Send the above frequency measurement test parameters and SC chip parameters to the display module for display respectively. Users can modify the parameters according to their needs. If the modified parameters are different from the values stored in the current MCU, the values in the MCU will be updated to the new displayed parameters. value;

1.2) Frequency sweep preparation steps: Initialize the relevant variables of the frequency measurement test function, including variables displayed on the interface, statistical variables and frequency measurement variables; The sampling times are cleared, and the sampling completion flag of the sweeping signal on the rising and falling edges is cleared; set the parameters of the sweeping module according to the sweeping parameters set in the frequency measurement test interface, and control the sweeping module to sweep the frequency;

1.3) Waveform matching steps: If the sampling on the rising edge or the falling edge is completed in step 1.2), enter the single-sweep dual-resonance frequency waveform matching function, and perform the single-sweep resonant frequency data after the single-sweep dual-resonance frequency waveform matching. processing to obtain the average value of the high-frequency resonance frequency and the low-frequency resonance frequency in a unit time, which is used for the next data processing comparison, and at the same time clears the variables related to a single frequency sweep; when the unit time set in the data processing per unit time After arrival, carry out relevant data processing, calculate the average and standard deviation of all high-frequency and low-frequency resonance frequencies measured in unit time, calculate the average value of real-time peak height and resonance width, and calculate the ratio of high-frequency and low-frequency frequencies. , and set the interface frequency measurement result indicator at the same time, and after the relevant data processing is completed, the data will be sent to the display module for display. Set it as the sweep cutoff frequency, and the initial value of the average low-frequency resonant frequency is set as the sweep start frequency. At the same time, the statistical variables such as frequency, peak height, and line width corresponding to the high and low frequencies are cleared, and the next round of measurement is performed. frequency process;

The online frequency measurement function includes automatic search function and tracking frequency measurement function; the automatic search function realizes the search for the current frequency of the SC chip, and performs different processing according to the different results of the automatic search. If the frequency is not searched within the specified number of turns, the system prompts Search for abnormal alarm, if one frequency is found, the single-frequency tracking and frequency measurement process will be carried out. If two frequencies are found, the dual-frequency tracking and frequency measurement process will be carried out; at the same time, when the system has abnormal frequency measurement and the frequency does not reach the shutdown threshold, it will call the automatic Search function re-search frequency;

The tracking frequency measurement function includes frequency measurement parameter initialization, frequency sweep parameter setting, single frequency tracking function, dual frequency tracking function and switching function between the two functions;

The dual-frequency tracking function analyzes the resonant waveform measured by a single sweep of two frequency tracking and frequency measurement. The sweep frequency range of the two frequency tracking and frequency measurement can ensure that the two resonant frequencies are covered. The waveforms between F1 and F2 include no waveform detected, one waveform detected, two or more waveforms detected; the frequency sweep range of F1 and F2 is related to the search width. Under a certain search width, the frequency of F1 There will be a certain overlapping area between the sweep frequency range and the frequency sweep range of F2; for the overlapping area, first determine whether there is an overlapping area between the sweep frequency ranges of F1 and F2. If there is an overlapping area, then F1+24SSL>F2-12SSH, and it is necessary to judge F1 Whether the frequency measured in the sweep frequency range is F2; if there is no overlapping area, then F2-12SSH>F1+24SSL, the frequency measured in F1 is not F2;

Among them, the single-sweep frequency measurement includes the first scheme and the second scheme; the first scheme adopts a 9-point waveform matching algorithm for the waveform within the low-frequency sweep frequency range of the single sweep. After matching a waveform, according to the proportional coefficient, The high-frequency resonance frequency 9-point waveform matching is performed for the N*SSH range near 1.095, where N is the system setting parameter, and SSH is the high-frequency search width; when N is set to 0, it is equivalent to an 18-point waveform matching algorithm; if the waveform is matched , and the obtained ratio of the high-frequency resonant frequency to the low-frequency resonant frequency is within the range of the maximum frequency ratio and the minimum frequency ratio, it is considered that the qualified high-frequency resonant frequency and low-frequency resonant frequency have been obtained, and the frequency measurement is completed. Enter the wafer to distinguish the array; if the high-frequency waveform in the specified range is not matched, continue to perform the 9-point waveform matching of the low-frequency resonant frequency until the high-frequency resonant frequency and low-frequency resonant frequency that meet the conditions are found; If the point still does not match the high-frequency resonance frequency and low-frequency resonance frequency that meet the conditions, the frequency measurement is ended;

The second scheme uses the 9-point matching algorithm for a single resonant waveform in the sweep frequency range to perform full-range frequency measurement, and stores the measured resonant frequencies in the array. After the full-range frequency measurement is completed, the data in the array is processed uniformly. ;Through two rounds of loops, take out two different data in the array in turn for division operation, if the quotient is within the range of the maximum frequency ratio and the minimum value of the frequency ratio, it is considered that this frequency measurement has detected the qualified low-frequency resonant frequency and If the high-frequency resonant frequency is not within the range, the low-frequency resonant frequency and high-frequency resonant frequency that meet the conditions have not been measured in this frequency measurement;

The sweep frequency range of the single frequency tracking function should cover the low frequency frequency sweep frequency range corresponding to the current frequency as a high frequency frequency, and the high frequency resonance frequency sweep frequency range corresponding to the current frequency as a low frequency frequency; the current frequency is regarded as a single frequency tracking frequency range. and the judgment basis of another frequency in the double resonant frequency of the SC chip; in the single frequency sweep frequency measurement process, the current frequency must be measured first. If the current frequency is not measured, the other two frequency sweep ranges will not be measured Frequency judgment, if the current frequency is measured, the forward frequency waveform and the backward frequency waveform are judged;

Frequency measurement parameter initialization and frequency sweep parameter setting. Frequency measurement parameters include the relevant frequency measurement parameters in the dual-frequency tracking frequency measurement process and the relevant frequency measurement parameters in the single-frequency tracking frequency measurement process. The frequency sweep parameters are set according to the results of automatic search. parameter, if two resonant frequencies are found in the automatic search, the sweep parameters of the dual-frequency tracking process are set, and if one frequency is found in the automatic search, the sweep parameters of the single-frequency tracking process are set;

In the single-sweep and dual-resonance frequency waveform matching process of dual-frequency tracking, the whole-band waveform matching is performed on the low-frequency sweep frequency range first, and then the corresponding first and second solutions are selected according to the resonant frequency matching results of the low-frequency frequency;

The single frequency sweep of single frequency tracking sweeps the frequency in the frequency range corresponding to the current frequency, the forward frequency and the backward frequency, so the frequency measurement of the three frequency bands is analyzed; the system considers the current frequency to be measured during the current grinding process. The real frequency of the frequency, must ensure that the current frequency that meets the conditions is measured before the waveform matching of the forward frequency segment and the backward frequency segment, otherwise the frequency measurement will be ended directly;

The switching function between the two functions. After the single frequency sweep frequency measurement data processing is completed, it is passed through the chip discrimination algorithm. If the system is currently in the single frequency tracking frequency measurement process, the current frequency, forward frequency and backward frequency are obtained. The number of wafers is measured. If the system is currently in the dual-frequency tracking frequency measurement process, the number of wafers measured corresponding to the low-frequency frequency and the high-frequency frequency is obtained; the frequency is switched according to the measured number of wafers.

Compared with the prior art, the present invention has the following advantages:

1. During the grinding process of the present invention, the B-mode frequency and the C-mode frequency of the quartz wafer can be automatically searched, and according to the proportional relationship, it can be confirmed whether the searched frequency is the B-mode frequency or the C-mode frequency.

2. During the tracking frequency measurement process of the present invention, the B-mode frequency and the C-mode frequency can be tracked in real time, and corresponding statistics can be provided in real time, such as the number of quartz wafers measured in one circle, the dispersion difference of a single piece, the dispersion difference of the whole disk, grinding It also displays the change curve of the resonant frequency of the wafer and the change curve of the dispersion difference during the grinding process. The user can judge the incoming material of the wafer and the grinding machine disk surface, carrier and sand liquid situation during the grinding process according to this information.

3. If only one frequency is searched in the automatic search process of the present invention, the system can track the frequency in real time, and at the same time search for another frequency in real time during the tracking process, until two resonance frequencies are searched and confirm whether it is the B-mode frequency or the B-mode frequency according to the proportional relationship. C mode frequency. Real-time dual-frequency tracking frequency measurement is performed after two qualified frequencies are measured.

4. In the present invention, only one frequency may be measured during the search process, and two resonance frequencies may appear during the grinding process. Therefore, a method of switching from single-frequency tracking frequency measurement to dual-frequency tracking frequency measurement must be provided, so that the The grinding process of SC-cut quartz wafers is smarter.

5. The present invention provides a frequency measurement test method in a grinding machine. When the quartz wafer is in the grinding machine, the user can manually set the frequency sweep parameters and frequency measurement parameters, and realize the measurement of the dual resonance frequency of the quartz wafer in the grinding machine through the frequency measurement test function. The number of times, the resonant linewidth, frequency sweep amplitude and standard deviation of B mode and C mode are counted. The user can judge whether the resonant waveform is normal through this information, and can perform polynomial fitting on the full-band search width and frequency sweep amplitude obtained during the frequency measurement test process to obtain the search width and frequency sweep amplitude polynomial coefficients used in the online frequency measurement process.

Description of drawings

Fig. 1 is the resonant waveform diagram of SC-cut quartz wafer of the present invention;

Fig. 2 is the general flow chart of the frequency measurement test function of the present invention;

Fig. 3 is the frequency measurement test interface of the present invention;

Fig. 4 is the waveform matching flow chart of single frequency sweep and dual resonance frequency of frequency measurement test of the present invention;

5 is a schematic diagram of the data acquisition and processing process of the present invention;

Fig. 6 is the frequency measurement test single frequency sweep resonant frequency data processing flow chart of the present invention;

Fig. 7 is the online frequency measurement flow chart of the present invention;

Fig. 8 is the automatic search flow chart of the present invention;

Fig. 9 is the automatic search single frequency sweep data processing flow of the present invention;

Fig. 10 is the automatic search full frequency band data processing flow chart of the present invention;

11 is a schematic diagram of the frequency measurement resonance waveform distribution of the single frequency sweep of two frequency tracking processes of the present invention;

Fig. 12 is the relation diagram of sweep frequency range and search line width of the present invention;

13 is a schematic diagram of frequency measurement scheme selection for single frequency sweep of two frequency tracking processes of the present invention;

14 is a schematic diagram of the sweep frequency range of the single-frequency tracking and frequency measurement process flow of the present invention;

Fig. 15 is the dual-frequency tracking frequency measurement process flow of the present invention: a single-frequency sweep waveform matching flow chart;

Fig. 16 is the single frequency tracking frequency measurement flow chart of the present invention, the single frequency sweep double resonance frequency matching flow chart;

FIG. 17 is a flow chart of frequency switching of tracking frequency measurement according to the present invention.

detailed description

The technical solutions of the present invention will be further described in detail below through specific embodiments and in conjunction with the accompanying drawings. It should be understood that the implementation of the present invention is not limited to the following examples, and any modifications and/or changes made to the present invention will fall within the protection scope of the present invention.

As shown in Figure 1 to Figure 17, an online grinding frequency measurement system has the following functions:

1. During the grinding process, the B-mode frequency and C-mode frequency of the quartz wafer can be automatically searched, and according to the proportional relationship, it can be confirmed whether the searched frequency is the B-mode frequency or the C-mode frequency.

2. In the process of tracking frequency measurement, it can track the B-mode frequency and C-mode frequency in real time, and provide corresponding statistics in real time, such as the number of quartz wafers measured in one circle, the dispersion of a single wafer, the dispersion of the whole disk, the grinding rate, etc. It also displays the change curve of the resonant frequency of the wafer and the change curve of the dispersion difference during the grinding process. The user can judge the incoming material of the wafer and the grinding machine disk surface, carrier and sand liquid situation during the grinding process according to this information.

3. If only one frequency is searched in the automatic search process, the system can track the frequency in real time, and at the same time search for another frequency in real time during the tracking process, until two resonance frequencies are searched and confirm whether it is the B mode frequency or the C mode according to the proportional relationship. frequency. Real-time dual-frequency tracking frequency measurement is performed after two qualified frequencies are measured.

4. Since only one frequency may be measured during the search process, and two resonant frequencies may appear during the grinding process, it is necessary to provide a method to switch from single-frequency tracking frequency measurement to dual-frequency tracking frequency measurement, so that the SC cut The grinding process of type quartz wafers is smarter.

5. Provide a frequency measurement test method in the grinding machine. When the quartz wafer is in the grinding machine, the user can manually set the frequency sweep parameters and frequency measurement parameters, and realize the measurement of the dual resonance frequency of the quartz wafer in the grinding machine through the frequency measurement test function. The number of times, the resonant linewidth, frequency sweep amplitude and standard deviation of B mode and C mode are counted. The user can judge whether the resonant waveform is normal through this information, and can perform polynomial fitting on the full-band search width and frequency sweep amplitude obtained during the frequency measurement test process to obtain the search width and frequency sweep amplitude polynomial coefficients used in the online frequency measurement process.

Since the SC-cut quartz wafer has two resonant frequencies, namely the B-mode frequency and the C-mode frequency, the B-mode frequency value is about 9.5% higher than the C-mode frequency value, so the sweep frequency range must cover these two frequency values.

Figure 1 shows the resonant waveforms of the B mode and the C mode of the SC-cut quartz wafer, where FB is the resonant frequency value of the B mode, and FC is the resonant frequency value of the C mode.

An online grinding frequency measurement system includes a frequency measurement test function and an online frequency measurement function.

The frequency measurement test function provides the function of point 5 above. Through the frequency sweep parameters and frequency measurement parameters set by the user, the B-mode resonance frequency and C-mode resonance frequency of the SC quartz crystal can be measured in real time, and the frequency ratio, B-mode frequency and The C-mode frequency corresponds to the resonant line width of the waveform, the number of frequencies measured per unit time, and the standard deviation per unit time and other statistical information. The user can judge the frequency and performance of the quartz crystal through these information, and can guide the user to set the online measurement. frequency parameters.

Specifically, for the frequency measurement test function, the user sets the frequency sweep parameters through the interface: start frequency, cutoff frequency, frequency sweep step, frequency sweep speed, frequency sweep amplitude, and set frequency measurement parameters: high frequency search width, low frequency search width, After peak constraint, press the "Start" button to start frequency measurement. In the frequency measurement process, the system invokes the dual-resonance frequency waveform matching algorithm. If two resonant frequencies that meet the conditions are detected, the two resonant frequencies, their corresponding resonant widths and real-time peak heights will be displayed, and the standard deviation and Valid times; if only one resonance frequency is detected, the information corresponding to the resonance frequency will be displayed.

Through the design of the above functions, the frequency measurement function of this system can not only measure the B-mode and C-mode frequencies of SC-cut quartz wafers, but also the frequencies of single-resonant frequency quartz wafers such as AT, realizing the compatibility of the two functions.

As shown in Figure 2, the frequency measurement test function includes a single-sweep dual-resonance frequency waveform matching function, a single-sweep resonant frequency data processing function, and a unit time data processing function; the specific process is as follows:

As shown in Figure 3, the above frequency measurement test parameters and SC chip parameters are respectively sent to the display module for display. As long as the displayed parameters are different from the values stored in the current MCU, the values in the MCU will be updated to the new displayed parameter values. .

The specific above parameters, to determine whether they meet the constraints are as follows:

The difference between the sweep cutoff frequency and the sweep start frequency is the sweep frequency range. The sweep start frequency and sweep cutoff frequency range from 1MHz to 120MHz, and the sweep cutoff frequency to the sweep start frequency must meet the If it is greater than 0MHz and less than 20MHz, if it is not satisfied, set the start frequency and cutoff frequency to the default values, the default start frequency is 9MHz, and the default cutoff frequency is 11MHz.

The value range of the sweep frequency step is 100Hz～8000Hz. If the conditions are not met, set the sweep frequency step according to the sweep frequency range. When the sweep frequency range is less than 2MHz, set the sweep frequency step to 1000Hz. When the sweep frequency range is From 2MHz to 4MHz, set the sweep frequency step to 2000Hz. When the sweep frequency range is 4MHz to 6MHz, set the sweep frequency step to 3000Hz. When the sweep frequency range is greater than 6MHz, set the sweep frequency step to 4000Hz.

The value range of the frequency sweep speed is 2us～100uS. If the condition is not met, it is set to the default value of 50uS.

The constraints that need to be satisfied between the frequency sweep range, frequency sweep step and frequency sweep speed are: (frequency sweep range / frequency sweep step * frequency sweep speed) > 4mS, if not satisfied, these parameters need to be Set as default.

The value range of the frequency sweep amplitude is 5～4000mm/min. If this condition is not met, it is set to the default value of 1000mm/min.

The value range of the low frequency search width and the high frequency search width is 1 to 400kHz. If this condition is not met, both are set to the default value of 33kHz.

The value range of the peak constraint is 1 to 2000. If the condition is not met, it is set to the default value of 500;

The SC frequency ratio is the ratio of the high frequency and the low frequency of the SC-cut quartz wafer. It is floating-point data and occupies 4 bytes. According to the characteristics of the SC-cut quartz wafer, the value ranges from 1.05 to 1.25. this condition, set it to the default value of 1.095.

The upper limit of the frequency ratio is a proportional value, and its value ranges from 1 to 99. If the conditions are not met, it is set to the default value of 10; through the SC frequency ratio and the upper limit of the frequency ratio, the maximum value of (high frequency frequency/low frequency frequency) is determined. The formula is: (high frequency frequency/low frequency frequency) maximum value=SC frequency ratio+(SC frequency ratio-1)*frequency ratio upper limit/100.

The lower limit of the frequency ratio is a proportional value, and its value ranges from 1 to 99. If the conditions are not met, set it to the default value of 10; through the SC frequency ratio and the lower limit of the frequency ratio, determine the minimum value of (high frequency/low frequency) The formula is: (high frequency frequency/low frequency frequency) minimum value=SC frequency ratio-(SC frequency ratio-1)*frequency ratio lower limit/100.

If the above parameters do not meet the constraints, write them into the power-down storage module according to the newly set values. If the above parameters do not exist in the power-down storage module, set the above parameters as default values and write them into the power-down storage module.

1.2) Frequency sweep preparation steps: Initialize the relevant variables of the frequency measurement test function, including variables displayed on the interface, statistical variables and frequency measurement variables; Clear the sampling times, and clear the rising and falling edge sweep signal sampling completion flags; set the sweep module parameters according to the sweep parameters set in the frequency measurement test interface, and control the sweep module to sweep the frequency.

The variables displayed on the interface include high-frequency frequency-related display variables and low-frequency frequency-related display variables. The initialization includes: clearing the average value of resonance frequency per unit time, clearing the number of resonance frequencies per unit time, and clearing the standard deviation of resonance frequency per unit time. , The number of resonance frequencies measured within 1 second is cleared;

Statistical variables also include high-frequency frequency-related statistical variables and low-frequency frequency-related statistical variables. The initialization includes: setting the average value of the resonance frequency during the frequency measurement and test, wherein the average value of the high-frequency resonance frequency is initially set to the sweep cutoff frequency, and the low-frequency resonance frequency The average frequency is set as the sweep start frequency; the single sweep instantaneous frequency storage array is cleared; the single sweep instantaneous peak height storage array is cleared; the single sweep instantaneous resonance width storage array is cleared; single sweep The number of times the resonant frequency is measured is cleared; the instantaneous frequency, peak height and resonance width variables when the peak-to-peak value of the single sweep frequency is the largest are cleared; the frequency measurement test in a unit time is cleared for each sweep of the resonant frequency storage array; unit time The real-time peak height storage array is cleared for each frequency sweep of the frequency measurement test; the storage array of the resonance width of each frequency sweep of the frequency measurement test is cleared to zero in unit time; the maximum and minimum values;

The frequency measurement variable is the search width used in the waveform matching, and the waveform search width of the high-frequency resonant frequency and the low-frequency resonant frequency are respectively set. Width Set the high frequency search width and low frequency search width respectively through the frequency measurement interface.

Before the frequency sweeping module starts frequency sweeping, first clear the signal sampling times of the rising and falling edges, and clear the rising and falling edge sweep signal sampling completion flags. Set the parameters of the frequency sweep module according to the frequency sweep parameters set in the frequency measurement test interface, and control the frequency sweep module to sweep the frequency.

1.3) Waveform matching steps: As shown in Figure 4 and Figure 5, if the rising edge or falling edge sampling is completed in step 1.2), the waveform matching function of single frequency sweep and dual resonance frequency is entered. The current system adopts the way of data acquisition and processing at the same time, whether it is the frequency measurement test process, or the automatic search and tracking frequency measurement process, all of them are processed in this way. The frequency sweep module repeatedly sweeps the frequency back and forth between the start frequency and the cutoff frequency. During the process of sweeping the frequency sweep module from the start frequency to the cutoff frequency (this process is defined as the rising edge of the sweep frequency), it processes the cutoff frequency sweep of the previous cycle. Sampling data in the process of starting frequency; in the process of sweeping the frequency sweep module from the cutoff frequency to the starting frequency (this process is defined as the falling edge of the sweep frequency), process the sampling data in the process of sweeping the starting frequency to the cutoff frequency in this cycle . This processing method can improve the efficiency of frequency measurement. Compared with the separate processing of data acquisition and processing, the current method can double the efficiency of frequency measurement, making the system more in line with the needs of dynamic frequency measurement.

After the single-sweep and double-resonance frequency waveforms are matched, perform single-sweep resonant frequency data processing to obtain the average value of the high-frequency and low-frequency resonant frequencies per unit time, which is used for the next data processing and comparison. The frequency-related variables are cleared to zero, so that data processing per unit time is performed; after the unit time set in the data processing per unit time arrives, relevant data processing is performed, and all high-frequency and low-frequency resonant frequencies measured in the unit time are averaged. value and standard deviation, find the average value of real-time peak height and resonance width, find the ratio of high frequency and low frequency, set the interface frequency measurement result indicator at the same time, and send the data to the display module after processing the relevant data. Display, after completing the frequency measurement process in this round of unit time, set the initial value of the high frequency resonant frequency average as the sweep cutoff frequency, and set the initial value of the low frequency resonant frequency average as the sweep start frequency. Statistical variables such as frequency, peak height, and line width corresponding to high frequency and low frequency are cleared, and the next round of frequency measurement process is performed.

Among them, the specific steps of the single-sweep dual-resonance frequency waveform matching function are as follows:

1.3.1.1) Waveform matching is performed for all sampling points starting from the starting point and ending at the cut-off point -9SSmin; wherein, SSmin is the smaller value of the low-frequency search width and the high-frequency search width;

1.3.1.2) Use the low-frequency search width and high-frequency search width as parameters to perform 9-point waveform matching. If the matching is successful, the peak-to-peak value of the successfully matched waveform is obtained, and the peak-to-peak value is the difference between the maximum and minimum amplitudes in the waveform. ; Among them, the data collected at the falling edge is processed during the rising edge of the frequency sweep, and the peak-to-peak value of the waveform is the difference between the amplitude of the sixth point in the waveform and the amplitude of the fourth point in the waveform; the rising edge is processed during the falling edge of the frequency sweep To collect data, the peak-to-peak value of the waveform is the difference between the amplitude of the 4th point in the waveform and the amplitude of the 6th point in the waveform;

1.3.1.3) After the waveform is successfully matched, compare the peak-to-peak value of the waveform with the peak-to-peak value constraint set on the interface. If the peak-to-peak value of the waveform is greater than the peak value constraint set on the interface, the search is considered successful, and the search width SS when the search is successful is recorded;

1.3.1.4) Intercept the length of the center 6SS of the successfully searched waveform, remove the length of the beginning 2SS and the end SS, and then perform data smoothing processing, where SS is the search width; after smoothing, find the maximum amplitude value in the 6SS waveform and the position of the minimum amplitude value in the entire waveform;

1.3.1.5) Calculate the current instantaneous resonant frequency, real-time peak height and resonant width according to the sweep start frequency, sweep cut-off frequency, and the position of the maximum and minimum amplitude values in the 6SS waveform in the entire waveform; among them, The processing process of the rising edge of the frequency sweep and the falling edge of the frequency sweep are different. The rising edge of the frequency sweep process processes the data of the falling edge. The specific data processing formula is as follows:

Instantaneous resonance frequency=Fend-(the position of the maximum amplitude in the 6SS waveform)*sweep step

Among them, Fend is the sweep cutoff frequency;

Real-time peak height = maximum value of 6SS waveform amplitude - minimum value of 6SS waveform amplitude;

Resonance line width = (the position of the maximum value of the 6SS waveform amplitude - the position of the minimum value of the 6SS waveform) * frequency sweep step / 3;

The falling edge process of sweep frequency processes the rising edge data, and the specific data processing formula is as follows:

Instantaneous resonance frequency = Fstart + (the position of the maximum amplitude in the 6SS waveform) * frequency sweep step

Among them, Fstart is the sweep start frequency;

Resonance line width = (the position of the minimum value of the 6SS waveform amplitude - the position of the maximum value of the 6SS waveform) * frequency sweep step / 3;

1.3.1.6) Determine whether the peak-to-peak value of the resonant frequency measured this time is greater than the peak-to-peak value of the previously measured resonant frequency. The peak height of the measured resonance frequency is set as the peak height of the peak-to-peak maximum resonance frequency, and the resonance width measured this time is set as the resonance width of the peak-to-peak maximum resonance frequency;

1.3.1.7) Determine whether the number of resonance frequencies measured during the single-frequency sweep waveform matching process is greater than the set threshold; if it is greater than the set threshold, exit the frequency measurement process directly and enter the single-frequency sweep data processing flow; if it is less than and When the resonant frequency is detected, the sampling point will advance 6SS for the next waveform matching; if it is less than and the resonant frequency is not detected, the sampling point will advance 1 point for the next waveform matching;

1.3.1.8) If at least one resonant frequency is detected in this single-sweep waveform matching process, enter the single-sweep resonant frequency data processing process, otherwise exit this frequency measurement directly and wait for the next sampling to complete.

As shown in Figure 6, the single frequency sweep resonant frequency data processing function includes 3 situations: more than 2 resonant frequencies are measured, 2 resonant frequencies are measured, and 1 resonant frequency is measured;

If more than 2 resonant frequencies are detected, first traverse all the resonant frequencies in the storage array, and take out two data from the array in turn through two rounds of loops for division operation. If the quotient is within the range of the maximum frequency ratio and the minimum frequency ratio, Then take out these two data and store them in the resonant frequency storage array in unit time corresponding to high frequency and low frequency respectively, and store the corresponding real-time peak height and resonant line width in the unit time corresponding to high frequency and low frequency respectively. , the real-time peak height storage array and resonance width storage array of each sweep; at the same time, the number of resonance frequencies per unit time of high frequency and low frequency is incremented by 1. When storing in the corresponding storage array, if the number of stored data is When the size is larger than the size of the array, stack processing is required to remove the data stored first, and then store the data stored later into the array; if the number of data is less than the size of the array, it is directly stored;

If two data that meet the conditions are obtained, the traversal loop is exited, the data processing is considered to be completed, and the high frequency and low frequency of this sweep are obtained;

If no qualified data is obtained by traversing all frequencies in the storage array, extract the frequency, real-time peak height and resonance width corresponding to the maximum peak-to-peak value in a single frequency measurement process; the specific extraction includes the following four cases:

The first type is that the number of low-frequency resonance frequencies in the current unit time is 0 and the number of high-frequency resonance frequencies is not 0. At this time, it is judged whether the ratio of the average high-frequency resonance frequency to the frequency corresponding to the maximum peak-to-peak value of a single frequency measurement is greater than the minimum frequency ratio , if it is greater than the frequency corresponding to the maximum peak-to-peak value is considered to be the low frequency resonance frequency, otherwise it is considered to be the high frequency resonance frequency;

The second is that the number of low-frequency resonant frequencies in the current unit time is not 0 and the number of high-frequency resonant frequencies is 0. At this time, it is judged whether the ratio of the frequency corresponding to the maximum peak-to-peak value of a single frequency measurement to the average value of the low-frequency resonant frequency is greater than the minimum frequency ratio. If it is greater than the frequency, the maximum peak-to-peak frequency is considered to be the high frequency resonance frequency, otherwise it is considered to be the low frequency resonance frequency;

The third type of frequency of the low frequency resonance frequency per unit time and the frequency of the high frequency resonance frequency per unit time are both 0, and the frequency corresponding to the maximum peak-to-peak value is the average value of the high frequency resonance frequency per unit time and the average value of the low frequency resonance frequency per unit time. Compare and see which frequency is closer to it. If it is closer to the average value of the low-frequency resonant frequency, it will be stored in the low-frequency unit time per sweep resonance frequency storage array, otherwise it will be stored in the high-frequency unit time each time. Sweep the resonant frequency storage array, and store the corresponding real-time peak height and resonance width into the high-frequency and low-frequency corresponding unit time respectively in the real-time peak-height storage array and the resonance width storage array for each sweep;

In the fourth type, the number of low-frequency resonance frequencies in the current unit time and the number of high-frequency resonance frequencies in the current unit time are both non-zero, and the processing method is the same as the third type;

Measure two resonant frequencies, and divide the two measured data. If the quotient is within the range of the maximum frequency ratio and the minimum frequency ratio, the two data are stored in the corresponding units of high frequency and low frequency respectively. The resonant frequency storage array for each frequency sweep in time, and the corresponding real-time peak height and resonance width are stored in the high frequency and low frequency corresponding unit time per unit time. Add 1 to the number of resonance frequencies per unit time at low frequencies;

If the ratio of the two data does not meet the frequency ratio constraints, extract the frequency, real-time peak height and resonance width corresponding to the maximum peak-to-peak value in the single-frequency sweep waveform matching process, and the specific extraction method is related to the measurement of more than two resonance frequencies. same;

When one resonant frequency is measured, extract the frequency, real-time peak height and resonant line width corresponding to the maximum peak-to-peak value in the single-sweep waveform matching process. The specific extraction method is the same as when more than two resonant frequencies are measured.

As shown in Figure 7, the online frequency measurement function includes automatic search function and tracking frequency measurement function. The automatic search function realizes the search of the current frequency of the SC chip, and performs different processing according to the different results of the automatic search. If the frequency is not searched within the specified number of turns, the system will prompt an abnormal search alarm, and if a frequency is searched, it will perform single-frequency tracking. In the frequency measurement process, if two frequencies are found, the dual-frequency tracking frequency measurement process will be carried out; at the same time, when the system has abnormal frequency measurement and the frequency does not reach the shutdown threshold, the automatic search function will be called to search for the frequency again.

The automatic search function specifically includes data initialization, frequency sweep and frequency measurement parameter settings, single frequency sweep double resonance frequency waveform matching function, single frequency sweep data processing function, full frequency band data processing function and frequency band switching function;

Data initialization is used to initialize the variables related to frequency statistics. The variables that need to be initialized include: frequency measurement related variables during a single frequency sweep, full-band sub-sweep dual-resonance frequency-related variables, and full-band sub-sweep single resonance frequency. Frequency measurement related variables, automatic search process related control variables and frequency sweep module control variables;

The initialization of frequency measurement-related variables during a single frequency sweep includes: clearing the statistical variables of the number of resonance frequencies, setting the maximum number of resonance frequencies, clearing the storage array of the instantaneous resonance frequency, and clearing the peak-to-peak maximum instantaneous resonance frequency;

The initialization of the variables related to the full-band sub-sweep dual-resonance frequency measurement includes: the current position of the full-band sweep is cleared to zero, the full-band starts from 0, and can be divided into 36 sections at most, and the high-frequency and low-frequency resonances are detected in each sweep frequency band. The frequency times storage array is cleared, and the high frequency and low frequency measured resonance frequency storage array of each sweep frequency band is cleared;

The initialization of the variables related to the frequency measurement of the single resonant frequency of the whole frequency band segmented frequency sweep includes: clearing the storage array of the number of times the single resonant frequency is measured in each sweep frequency band, and clearing the storage array of the single resonance frequency measured in each sweep frequency band;

The initialization of control variables related to the automatic search process includes: automatic search process start flag setting, automatic search frequency measurement result flag setting, automatic search frequency switching flag setting, automatic search frequency switching timing time reset, automatic search process lap statistics clear;

The initialization of the control variables of the frequency sweeping module includes: clearing the edge jump flag of the frequency sweeping module, clearing the statistics of the sampling data on the rising and falling edges of the frequency sweeping module, and completing the sampling of the rising and falling edges of the frequency sweeping module. The flag bit is cleared, and the frequency sweep module sweeps the rising edge and the falling edge of the sampling processing flag bit.

Frequency sweep and frequency measurement parameter settings include setting sweep frequency parameters and frequency measurement parameters;

Sweep parameters include sweep start frequency, sweep cut-off frequency, sweep step, sweep speed and sweep amplitude; in the automatic search sweep process, the method of periodic sweep within the specified number of turns is used. The frequency sweep of a cycle is a segmented frequency sweep from the target frequency to the end of the starting frequency. The frequency sweep of each segment is repeated within a specified time period. The frequency sweep range of each frequency sweep is related to the frequency. The high frequency resonant frequency and the low frequency resonant frequency must be included.

When the automatic search sweep starts, first set the sweep parameters near the target frequency set on the main interface;

The setting process of sweep start frequency and sweep cutoff frequency is as follows:

2.1.1) Low frequency resonance frequency FL = target frequency set on the main interface;

2.1.2) Calculate the low frequency search width according to the low frequency resonance frequency:

It is an nth-order polynomial, where SSLRatio is the low-frequency search line width coefficient, and FL is the low-frequency resonant frequency;

2.1.3) The current system sets the effective waveform range to 9SS and the sweep frequency range to 36SS, and takes the resonant frequency as the center to add 18SS and subtract 18SS respectively; the low frequency sweep start frequency FLstart=FL-18*SSL, the low frequency sweep Cutoff frequency FLend=FL+18*SSL;

2.1.4) Obtain the high frequency frequency FH=FL*FRatio according to the frequency ratio, wherein FRatio is the frequency ratio of the high frequency frequency and the low frequency frequency of the SC chip;

2.1.5) Obtain the high frequency sweep start frequency and the high frequency sweep cutoff frequency according to the methods of steps 2.1.2) and 2.1.3); calculate the sweep frequency range according to the high and low frequency sweep start frequency and cutoff frequency: FRange =Fmax-Fmin, where Fmax is the maximum value of the start frequency and cutoff frequency of the high and low frequency sweep, and Fmin is the minimum value of the start frequency and cutoff frequency of the high and low frequency sweep;

2.1.6) Take FRange as the center to expand the sweep frequency range by n times, and set the corresponding sweep frequency start frequency and sweep cutoff frequency. n is a positive integer. The success rate and accuracy of frequency measurement of the resonant frequency will be reduced accordingly;

2.1.7) Set the low frequency value of this sweep to the high frequency value of the next sweep, and obtain the sweep start frequency and sweep cutoff frequency;

Set the sweep step according to the sweep range. If the sweep range is greater than 8MHz, set the sweep step to 4kHz. If the sweep range is 6 to 8MHz, set the sweep step to 3kHz. If the sweep range is 4 ～6MHz, set the sweep frequency step to 2kHz, if the sweep frequency range is 3～4MHz, set the sweep frequency step to 1.5kHz, if the sweep frequency range is less than 3MHz, set the sweep frequency step to 1kHz;

Set the peak constraint according to the sweep start frequency. If the sweep start frequency is less than 8MHz, set the peak constraint as the low frequency peak constraint. If the sweep start frequency is greater than or equal to 8MHz, set the peak constraint as the high frequency peak constraint;

Find the sweep amplitude based on the sweep center frequency:

is an nth-order polynomial, where SRRatio is the sweep amplitude coefficient, and Fmiddle is the sweep center frequency;

Subdivide the frequency range of this segment into N equal subdivisions to obtain the subdivided frequencies, and calculate the corresponding search widths of high frequency and low frequency according to the subdivided frequencies;

Set the average high frequency frequency of this section as the cutoff frequency of the sweep, and set the average low frequency of this section as the start frequency of the sweep;

Set the frequency sweeping module according to the frequency sweeping parameters obtained above, and start the frequency sweeping.

Single frequency measurement resonance frequency waveform matching function, when the single sampling is completed, enter the automatic search single frequency sweep double resonance frequency waveform matching; automatic search single frequency measurement dual resonance frequency waveform matching function and single frequency measurement test function The waveform matching function of sweep frequency and dual resonant frequency is basically the same. The difference is: before starting the 9-point waveform matching algorithm for all sweep frequency points, first judge whether the number of resonance frequencies measured in the current segment is less than the set threshold, and if it is less than the 9-point waveform Otherwise, it is considered that the amount of data collected in this section is sufficient, and this 9-point waveform matching process is skipped;

Due to the large sweep frequency range of each segment in the automatic search process, the search widths corresponding to different frequencies will be different, so multiple search widths are used for matching in the 9-point waveform matching process.

The single-frequency sweep data processing flow of automatic search and the single-frequency sweep data processing flow of frequency measurement test adopt different data processing strategies, because the accuracy of the automatic search process will directly affect the performance of tracking and frequency measurement. The requirements of the process are relatively high, and the resonant frequency obtained by automatic search is required to be relatively accurate.

The single-frequency sweep data processing flow of automatic search is basically the same as the single-frequency sweep data processing flow of frequency measurement test. There are three cases of resonance frequency and one resonance frequency measured;

When more than 2 resonant frequencies are measured, the two data in the instantaneous resonant frequency storage array are sequentially taken out through two cycles for division operation; if the quotient is within the range of the maximum frequency ratio and the minimum frequency ratio, the two data are taken out. Store the resonant frequency storage arrays corresponding to the high frequency and low frequency of this section respectively, and at the same time add 1 to the number of resonant frequencies measured in this section of high frequency and low frequency, and then exit the traversal loop, it is considered that the high frequency and low frequency of this sweep are obtained. frequency, this data processing is completed, otherwise continue to traverse the instantaneous resonance frequency storage array;

If no qualified data is obtained by traversing all frequencies in the storage array, the resonant frequency corresponding to the maximum peak-to-peak value of this sweep is stored in the resonant frequency storage array of this section, and the number of resonance frequencies measured in this section is added 1;

This section of the resonant frequency storage array stores the data that only one resonant frequency is searched and two resonant frequencies that meet the conditions appear in the automatic search process, and are also processed separately in the data processing process after the automatic search is over; that is, The resonant frequency storage array of this section is not the same storage space as the resonant frequency storage array corresponding to the above-mentioned high frequency and low frequency frequencies, but is a different storage array, because the automatic search process has high requirements on the accuracy of the searched resonant frequency, and at the same time There is also the possibility that only one resonant frequency may be found in the automatic search process, so the data of two resonant frequencies that meet the conditions and the data of only one resonant frequency will be stored separately, and the data will also be processed after the automatic search. Separate processing, so as to ensure the accuracy of the data.

When two resonant frequencies are measured, divide the two measured data, if the quotient is within the range of the maximum frequency ratio and the minimum frequency ratio, store these two data in the high frequency and low frequency of this section respectively. The corresponding resonant frequency is stored in the array, and the number of resonant frequencies measured at high and low frequencies in this section is incremented by 1; if the quotient is not within the range of the maximum frequency ratio and the minimum frequency ratio, the peak-to-peak value of this frequency sweep will be the maximum. The resonance frequency corresponding to the value can be stored in the resonance frequency storage array of this section, and the number of resonance frequencies measured in this section is increased by 1;

When one resonance frequency is measured, the resonance frequency corresponding to the maximum peak-to-peak value of this sweep frequency can be stored in the resonance frequency storage array of this section, and the number of resonance frequencies measured in this section is increased by 1;

Frequency band switching function, by setting a specified time to perform repeated frequency sweep and frequency measurement of a single frequency band, when the specified time arrives, it is judged whether the frequency sweep of the whole frequency band is completed. Whether the frequency is less than the starting frequency of wafer grinding set by the user, if it is less than the frequency sweep of the whole frequency band, the data processing function of the whole frequency band is performed; if it is not lower than the frequency switching;

The frequency switching process is as follows:

① Determine whether the current number of sweep frequency bands is greater than the maximum number of sweep frequency bands set by the system. If it is greater, it will directly exit the frequency switching process and enter the full frequency band data processing process; if not, add 1 to the current sweep frequency band number;

②Using the high-frequency resonant frequency of the next sweep frequency obtained in the last sweep frequency parameter calculation, obtain new sweep frequency parameters and frequency measurement parameters through the above-mentioned automatic search sweep frequency parameter and frequency measurement parameter setting method;

③ According to the newly obtained frequency sweep parameters, set the frequency sweep module to sweep the frequency; at the same time, set the control variable of the frequency sweep module: the edge hopping flag of the frequency sweep module is cleared to zero, and the number of sampling data on the rising and falling edges of the frequency sweep module is counted. Cleared, the sweeping rising edge and falling edge sampling completion flag bit of the frequency sweeping module is cleared, and the sweeping frequency rising edge and falling edge sampling processing flag bit of the frequency sweeping module is cleared to zero.

Full-band data processing function, if the full-band frequency sweep is completed, enter the full-band data processing, which includes the following steps:

2.1.1) Traverse the high-frequency and low-frequency resonance frequencies measured in all frequency bands during the automatic search process; if the number of high-frequency and low-frequency resonance frequencies measured in the current segment is greater than or equal to the number of successful automatic search resonance frequencies set by the system, the After eliminating the interference value with all the data in the low-frequency resonant frequency storage array, the average value of the remaining data is obtained, and the number of remaining data is returned; times, the search of high-frequency and low-frequency resonant frequencies is considered to be successful, and at the same time, it is judged whether the number of remaining data is greater than the maximum number of resonance frequencies of all segments. The number of data, and then proceed to the next segment of data processing, otherwise proceed to the next segment of data processing, until the completion of all segments of data processing;

If the number of high-frequency and low-frequency resonant frequencies measured in the current segment is less than the number of successful resonant frequencies set by the system for automatic search, the data processing of the next segment will be performed until the data processing of all segments is completed;

2.1.2) Determine whether the search for high-frequency and low-frequency resonant frequencies is successful. If the search is successful, determine whether the ratio of high-frequency resonant frequency to low-frequency resonant frequency is within the range of the maximum frequency ratio and the minimum frequency ratio. If it is within the range, It is considered that both resonant frequencies have been searched, and the high-frequency resonant frequency and low-frequency resonant frequency used in the tracking frequency measurement process are set to the high-frequency and low-frequency resonant frequencies detected by the automatic search respectively, and the tracking frequency measurement process is entered; if the search is unsuccessful , then perform full-band single-resonance frequency data processing;

2.1.3) Single resonance frequency data processing, traverse the single resonance frequency data measured in the whole frequency band, if the number of single resonance frequencies measured in the current segment is greater than or equal to the number of successful resonance frequencies set by the system, the single resonance frequency will be stored in an array. After the interference value of all the data is eliminated, the average value of the remaining data is obtained, and the number of remaining data is returned; if the number of remaining data is still greater than or equal to the number of successful resonance frequencies set by the system, it is considered a single resonance The frequency search is successful, and at the same time, it is judged whether the number of remaining data is greater than the maximum number of resonance frequencies of all segments. If it is greater than the number of maximum resonance frequencies of all segments, set the number of remaining data of the segment after data processing, and then proceed to the next segment. Data processing, otherwise, proceed to the data processing of the next segment until the data processing of all segments is completed;

If the number of single resonance frequencies measured in the current segment is less than the number of successful resonance frequencies set by the system, the data processing of the next segment will be performed until the data processing of all segments is completed;

2.1.4) Determine whether the search for the single resonant frequency is successful. If the search is successful, set the high-frequency resonance frequency used in the tracking frequency measurement process to automatically search and measure the single resonance frequency, and enter the tracking frequency measurement process; if the search is unsuccessful, judge Whether the number of automatic search laps has reached the number of automatic search abnormal laps set by the system, if it is reached, the automatic search will be stopped, and the system will automatically search for an abnormal alarm; if not, it will continue the full-frequency automatic search process;

2.1.5) According to the result of automatic search, send the resonant frequency data to the interface display; if the double resonant frequency search is successful, the high frequency and low frequency resonant frequencies will be calibrated and sent to the interface display, if the single resonant frequency search is successful, then The single resonance frequency is calibrated and sent to the interface for display.

The tracking frequency measurement function includes dual frequency tracking function, single frequency tracking function, frequency measurement parameter initialization, frequency sweep parameter setting and switching function between the two functions;

As shown in Figure 11, the dual-frequency tracking function analyzes the resonant waveform measured by a single sweep of two frequency tracking and frequency measurement. The waveform in the frequency process is shown in Figure 11 below:

The waveforms between the two resonant frequencies F1 and F2 obtained by sweeping include no waveforms, one waveform, two or more waveforms detected; therefore, the combination of waveforms in the two frequency sweep ranges exists. 3*3=9 cases. The frequency sweep range of F1 and F2 is related to the search width. Under a certain search width, there will be a certain overlap between the frequency sweep range of F1 and the frequency sweep range of F2; The relationship diagram is shown in Figure 12. For the overlapping area, first determine whether there is an overlapping area between the frequency sweep ranges of F1 and F2. If there is an overlapping area, then F1+24SSL>F2-12SSH, and it is necessary to determine whether the frequency measured in the frequency sweeping range of F1 is F2; if there is no overlap area, then F2-12SSH>F1+24SSL, the frequency detected in F1 is not F2;

Specifically, when there is an overlapping area, that is, F1+24SSL>F2-12SSH, so in this case, it is possible to measure the frequency of F2 within the frequency sweep range of F1.

Therefore, in the process of frequency measurement, it is necessary to first judge whether there is an overlapping area between the sweep frequency ranges of F1 and F2. If there is an overlapping area, it is necessary to judge whether the frequency measured in the sweep frequency range of F1 is F2.

If there is no overlapping area, that is, F2-12SSH>F1+24SSL, the frequency detected in F1 will definitely not be F2.

In the figure, F1 is the low-frequency resonant frequency in the SC dual-resonance frequency, F2 is the high-frequency resonant frequency in the SC dual-resonance frequency, F1s is the starting frequency of the low-frequency sweep frequency range, F1e is the cut-off frequency of the low-frequency sweep frequency range, and F2s is the starting frequency of the high frequency sweep range, and F2e is the cutoff frequency of the high frequency sweep range.

The frequency measurement of a single sweep in the two frequency tracking processes includes the first scheme and the second scheme.

The first scheme uses a 9-point waveform matching algorithm for the waveform in the low-frequency sweep range of a single sweep. When a waveform is matched, according to the proportional coefficient, the high-frequency resonance frequency 9-point waveform matching is performed for the N*SSH range near 1.095. , N is the system setting parameter, SSH is the high-frequency search width; when N is set to 0, it is equivalent to an 18-point waveform matching algorithm; if the waveform is matched, and the ratio of the obtained high-frequency resonant frequency and low-frequency resonant frequency is in the frequency ratio Within the range of the maximum value and the minimum value of the frequency ratio, it is considered that the high-frequency resonant frequency and low-frequency resonant frequency that meet the conditions have been obtained. The frequency measurement is completed and stored in the chip discrimination array; if the high-frequency waveform in the specified range does not match, then Continue to match the 9-point waveform of the low-frequency resonant frequency until the high-frequency resonant frequency and low-frequency resonant frequency that meet the conditions are found; Then end the frequency measurement;

When the waveform is not detected in the dual-frequency tracking function of the tracking frequency measurement function, in this case, it may be that there is no chip under the probe during the frequency sweep, or it may be that the resonant frequency is not detected during the frequency sweep. At this time, the number of times that the frequency is not measured continuously by the wafer discrimination algorithm will be incremented by 1, and at the same time, it can be judged whether the frequency measurement of the wafer has ended.

At this time, the full-band frequency measurement is carried out respectively in the frequency sweep range where frequency 1 and frequency 2 are located, and frequency 1 and frequency 2 are not measured, and this frequency measurement is ended. The frequency measurement adopts the second scheme;

When the previous waveform is detected, in this case, two methods can be used to deal with it.

Method 1 is: firstly perform a full-band frequency measurement within the frequency sweep range where frequency 1 is located. After measuring frequency 1, perform 9-point matching on the N*SS range near 1.095. The result is that the frequency cannot be matched, and the measurement is ended. frequency.

Method 2 is: perform full-band frequency measurement respectively within the frequency sweep range where frequency 1 and frequency 2 are located, and the result of frequency measurement is that only frequency 1 is measured, and it is stored in the array where frequency 1 is located.

Comparing the two methods, method 1 has fewer matching times for frequency 2 than method 2, so method 1 is better. The frequency measurement adopts the first scheme;

When two or more waveforms are detected within the frequency sweep range of frequency 1, in this case, two methods can be used to deal with it.

Method 1: Perform full-band frequency measurement in the frequency sweep range where frequency 1 is located. The frequency measurement result is to measure 2 frequencies or more than 2 frequency values in the frequency band where frequency 1 is located. At this time, take the value with the highest frequency as frequency 1 And store in the array where frequency 1 is. Perform 9-point matching on the N*SS range near 1.095, the result is that the frequency cannot be matched, and this frequency measurement is ended.

Method 2: Perform full-band frequency measurement in the frequency sweep range where frequency 1 and frequency 2 are located. The frequency measurement result is to measure 2 frequencies or more than 2 frequency values in the frequency band where frequency 1 is located. At this time, take the value with the largest frequency. as frequency 1 and store in the array where frequency 1 is located.

Comparing the two methods, method 1 has fewer frequency measurements for frequency 2 than method 2, so method 1 is better. However, in the actual frequency measurement, the situation that the waveform is not detected in the frequency sweep range of frequency 2 cannot be known in advance, so the frequency measurement of frequency 2 needs to be carried out in the whole frequency range. Among them, the frequency measurement is carried out by the second scheme;

When the latter waveform is measured, in this case, since the frequency cannot be measured in the frequency sweep range of frequency 1, but it is not known in the actual situation, so the best solution is: for the frequency sweep range of frequency 1 and frequency 2 respectively. Perform full-band frequency measurement, the result of frequency measurement is that only frequency 2 is measured, and it is stored in the array where frequency 2 is located. Among them, the frequency measurement is carried out by the second scheme;

When two or more waveforms are measured in the frequency sweep range of frequency 2, in this case, because the frequency cannot be measured in the frequency sweep range of frequency 1, but it is not known in the actual situation, so the best solution is: 1 and frequency 2 are respectively in the sweeping frequency range of full-band frequency measurement. The result of frequency measurement is that only 2 frequencies or more than 2 frequency values in the frequency band where frequency 2 is located are measured. Store in the array where frequency 1 is located. Among them, the frequency measurement is carried out by the second scheme;

When two waveforms are detected, which are respectively in the two frequency sweep ranges, in this case, since the two waveforms are respectively in the two frequency sweep ranges, if the two waveforms are two waveforms that meet the conditions, then this is the case. The two waveforms must have a proportional relationship of about 1.095; if there is only one waveform at this ratio, we think that frequency 1 is the correct waveform.

Through the above ideas, the best solution for us to deal with this situation is to first perform a full-band frequency measurement on the frequency band where frequency 1 is located. After measuring frequency 1, store it in the array where frequency 1 is located, and measure the N corresponding to frequency 1. *The frequency waveform matching is performed within the range of 1.095. If it matches frequency 2, it will be stored in the array where frequency 2 is located. If it does not match, the frequency measurement will be ended. The frequency measurement adopts the first scheme;

When one waveform is detected within the frequency sweep range of frequency 1, and two or more waveforms are detected within the frequency sweep range of frequency 2, perform full-band frequency measurement on the frequency band where frequency 1 is located. Enter the array where frequency 1 is located. If the proportional relationship between the frequency measured at frequency 2 and the frequency measured at frequency 1 is not within ±N*1.095, then frequency 1 is considered to be a valid signal, and stored in the array where frequency 1 is located, frequency 2 The signal measured at 1 is invalid; therefore, the processing method is the same as the measured two waveforms in the two frequency sweep ranges. The frequency measurement adopts the first scheme;

When two or more waveforms are measured in the frequency sweep range of frequency 1, and one waveform is measured in the frequency sweep range of frequency 2, the best processing plan at this time is to measure two waveforms, and sweep the frequencies at the two frequencies respectively. 1 waveform is detected within the frequency range and within the frequency sweep range of

frequency

1, and 2 or more waveforms are detected within the frequency range of frequency 2 sweep frequency. 2. At this time, perform waveform matching on the frequency 1 frequency band at ±N*1.095. If the frequency is matched, the frequency will be stored. If the frequency cannot be matched, the frequency measurement will be ended.

However, since the waveform situation is not known in advance, according to the above processing idea, only when two or more waveforms are measured at frequency 1, the full-band frequency sweep of frequency 2 is performed first. Therefore, in this case, the frequency bands where frequency 1 and frequency 2 are located are matched in the full frequency band respectively, and 2 or more frequency values are obtained at

frequency

1 and 1 frequency value at frequency 2. At this time, frequency 2 is used as the base number. , divide it by 1.095 and find out if there is a frequency of frequency 1 at ±N, and store it if so. Among them, the frequency measurement is carried out by the second scheme;

When two or more waveforms are measured in the frequency sweep range of frequency 1 and frequency 2, respectively, perform full-band frequency measurement on the frequency bands where frequency 1 and frequency 2 are located, and then process the corresponding data; program proceed.

The analysis results of each case are shown in Figure 13. Through the analysis of the above nine cases, the following conclusions can be drawn:

In each case, it is necessary to first perform a full-band frequency measurement on the frequency band where frequency 1 is located. The processing of Band 2 will be different according to the frequency measurement result of Band 1.

If a waveform is detected within the frequency sweep range, scheme 1 is used, that is, the waveform matching method at ±N*1.095 is used for frequency 2, and scheme 2 is used for other cases.

The overall treatment scheme should be a combination of scheme 1 and scheme 2, and different schemes should be used according to different situations.

As shown in Figure 14, the frequency sweep range of the single frequency tracking function should cover the low frequency frequency sweep range corresponding to the current frequency as the high frequency frequency, and the high frequency resonant frequency sweep range corresponding to the current frequency as the low frequency frequency; The current frequency is used as the basis for tracking a single frequency and for judging another frequency in the dual resonant frequency of the SC chip; in the process of single frequency sweep frequency measurement, the current frequency must be measured first, if the current frequency is not measured, no additional Judgment of the two frequency sweep ranges, if the current frequency is measured, the forward frequency waveform and the backward frequency waveform are judged;

The frequency measurement resonance waveform analysis and specific processing process of a single frequency sweep are as follows:

2.2.1) If the resonant waveform is not matched within the current frequency sweep range, no matter whether there is a resonant waveform in the forward frequency sweep range and the backward frequency sweep range, no waveform matching will be performed;

2.2.2) If a qualified resonant waveform is matched within the current frequency sweep range, the waveform matching is performed for the forward frequency sweep range at ±N*(1/1.095), and the backward frequency sweep range is at ±N*(1/1.095). ±N*1.095 for waveform matching, according to the matching results to determine whether it is within the frequency ratio range, if so, store it in the correlation array respectively;

2.2.3) If two or more resonant waveforms are matched within the current frequency sweeping range, then the three sweeping frequency ranges are respectively measured in the entire frequency range, and the data is judged according to the frequency measurement results.

Frequency measurement parameter initialization and frequency sweep parameter setting. Frequency measurement parameters include the relevant frequency measurement parameters in the dual-frequency tracking frequency measurement process and the relevant frequency measurement parameters in the single-frequency tracking frequency measurement process. The specific setting steps of frequency measurement parameter initialization are as follows:

2.3.1) During the single sweep frequency measurement in the dual-frequency tracking frequency measurement, the number of resonance frequencies measured by the low frequency frequency and the high frequency frequency respectively is cleared, the instantaneous resonance frequency array is cleared, and the peak-to-peak maximum resonance frequency is cleared; During a single sweep frequency measurement in the single-frequency tracking frequency measurement process, the number of resonance frequencies measured by the current frequency, forward frequency and backward frequency are cleared to zero, the instantaneous resonance frequency array is cleared to zero, and the peak-to-peak maximum resonance frequency is cleared to zero. ;

2.3.2) The variables used in the wafer discrimination algorithm, the variables corresponding to high frequency and low frequency in the dual-frequency tracking frequency measurement process correspond to the current frequency, forward frequency and backward frequency in the single-frequency tracking frequency measurement process The variables are initialized separately; the number of consecutively unmeasured resonant frequencies, the number of consecutively measured resonant frequencies, and the number of consecutively unmeasured resonant frequencies after the resonant frequency is continuously measured are cleared, and the single-chip dispersion value is cleared to zero. The count of the single-chip scattered difference is cleared, all the single-chip scattered difference value storage arrays are cleared to zero within the specified time, the single-chip instantaneous resonance frequency value storage array is cleared, and the single-chip instantaneous resonance frequency storage array within one circle is cleared. The statistical variable of the number of instantaneous resonant frequencies is cleared, the total number of chips measured in this circle is cleared, the total number of chips measured in the previous circle is cleared, the number of data variables of the single-chip average value of the resonance frequency is cleared, and the single-chip frequency measurement is performed online. The resonant frequency average storage array is cleared to zero, the online frequency measurement timing segmented chip number storage array is cleared to zero, and the online frequency measurement timing segment is cleared to the previous circle.

2.3.3) Initialize the variables related to the number of turns and speed judgment, including: clearing the abnormal monitoring time of the lap count, clearing the continuous lap speed stability flag, clearing the current value of the online frequency measurement single-turn timing section division, and resonant frequency averaging Value storage stack initial storage flag;

2.3.4) Initialization of tracking frequency measurement statistics variables. Since the statistics of tracking frequency measurement are mainly used to display variable statistics on the interface such as the real-time frequency of the whole disk, grinding rate, and number of grinding circles, while the dual-frequency tracking process displays the related statistics of the low-frequency resonance frequency and high-frequency resonance frequency of the SC wafer, while The single resonance frequency tracking frequency measurement process displays the statistics of one of the low frequency resonance frequency and the high frequency resonance frequency of the SC wafer. Therefore, the dual frequency tracking frequency measurement process and the single frequency tracking frequency measurement process can share a set of parameters, which is the low frequency resonance frequency. Frequency and high frequency resonance frequency related statistics;

2.3.5) Initialization of frequency sweep module control variables;

Sweep parameters Set sweep parameters according to the results of automatic search. If two resonant frequencies are found in automatic search, set sweep parameters of dual-frequency tracking process. If one frequency is found in automatic search, set sweep parameters of single-frequency tracking process. frequency parameter;

The specific setting steps of frequency sweep parameters are as follows:

2.4.1) When dual-frequency tracking frequency measurement, set the waveform peak constraint value according to the low-frequency resonance frequency; when single-frequency tracking frequency measurement, set the waveform peak constraint value according to the current resonance frequency;

2.4.2) Set the search width according to the waveform search width coefficient; in the case of dual-frequency tracking frequency measurement, set the corresponding search width according to the high-frequency resonant frequency and low-frequency resonant frequency obtained by automatic search, and the formula obtained by the search width is the N order of the frequency Multi-polynomial; when single-frequency tracking frequency measurement, the forward frequency and backward frequency are calculated according to the current resonance frequency obtained by automatic search, the forward frequency is the current frequency divided by the frequency ratio, the backward frequency is the current frequency * frequency ratio, and then Set the corresponding search width according to the current frequency, forward frequency and backward frequency, wherein the calculation of the forward frequency search width uses the low frequency search width coefficient, and the calculation of the current frequency and the backward frequency search width uses the high frequency search width coefficient;

2.4.3) Obtain the corresponding sweep frequency range according to the search width and current frequency; when dual-frequency tracking frequency measurement,

The sweep frequency range of high frequency frequency is: (high frequency resonance frequency -12SS) ~ (high frequency resonance frequency +24SS);

The sweep frequency range of low frequency frequency is: (low frequency resonance frequency -12SS) ~ (low frequency resonance frequency +24SS)

When single frequency tracking frequency measurement,

The sweep frequency range of the current frequency is: (current resonance frequency -12SS) ~ (current resonance frequency +24SS);

The sweep frequency range of the forward frequency is: (forward resonance frequency -12SS) ~ (forward resonance frequency +24SS);

The sweep frequency range of the backward frequency is: (backward resonance frequency -12SS) ~ (backward resonance frequency +24SS)

Where SS is the search width of the corresponding frequency;

2.4.4) Obtain the frequency sweep amplitude according to the resonant frequency and the frequency sweep amplitude coefficient, in which the high frequency resonance frequency is used to calculate the dual frequency tracking frequency measurement, and the current resonance frequency is used to calculate the single frequency tracking frequency measurement;

2.4.5) Calculate the frequency sweep step according to the search width of the low frequency frequency and the search width of the forward frequency;

2.4.6) Set the sweep start frequency and sweep cut-off frequency of the current sweep module according to the sweep frequency range corresponding to each frequency, calculate the sweep frequency points corresponding to each frequency band, and each frequency band corresponds to the sweep frequency in the total sweep frequency range. frequency starting position;

2.4.7) Set the parameters of the frequency sweep module according to the frequency sweep parameters obtained above, and start the frequency sweep.

In the single-sweep and dual-resonance frequency waveform matching process of dual-frequency tracking, the full-band waveform matching is performed for the low-frequency sweep frequency range first, and then the corresponding first and second schemes are selected according to the resonant frequency matching results of the low-frequency frequency.

The results of the full-band waveform matching in the low frequency sweep range are respectively processed in the high frequency sweep range. The specific steps are as follows:

2.5.1) The 9-point waveform matching algorithm is used to perform full-band waveform matching in the low-frequency sweep frequency range. The search width adopts the low-frequency search width. If a waveform that matches the waveform characteristics is matched, it is judged whether the waveform meets the peak constraint condition. The peak constraint condition is to obtain the current waveform position that is successfully matched. After smoothing the waveform, the maximum peak value is obtained as the resonant frequency value, and it is judged whether the resonant frequency is within the bandwidth constraint range, and the frequency is stored in the low-frequency single Array of instantaneous resonant frequencies of the second sweep, and at the same time determine whether the peak-to-peak value corresponding to this frequency is greater than the peak-to-peak value of the frequency measured in the low-frequency frequency range of this sweep. For the resonant frequency measured this time, advance the waveform matching point of the low frequency sweep frequency range by 6SSL and continue to perform waveform matching until the matching point is advanced to the total number of sampling points of the low frequency sweep frequency -9SSL; Within the wide constraint range, move the waveform matching point of the low frequency sweep frequency range forward by 1 point to continue waveform matching until the matching point is advanced to the total number of sampling points of the low frequency sweep frequency -9SSL;

2.5.2) Carry out frequency measurement in the high frequency sweep range according to the frequency measurement results in the low frequency sweep frequency range;

If the resonant frequency is not detected in the low frequency sweep range, use the same method to perform full-band waveform matching in the high frequency sweep range; Frequency measurement; if a qualified resonant frequency is detected in the high-frequency sweep range, the resonant frequency will be set as the high-frequency resonant frequency measured by this frequency measurement, and the high-frequency resonant frequency search success flag will be set at the same time. ; If two or more qualified resonant frequencies are detected in the high-frequency sweep range, the resonant frequency with the largest peak-to-peak value is set as the high-frequency resonant frequency measured by this frequency measurement, and the high-frequency resonant frequency will be set at the same time. Resonant frequency search success flag;

If a resonant frequency is detected in the low frequency sweep range, the resonant frequency is set as the low frequency resonant frequency measured in this frequency measurement, and the waveform matching range of the high frequency frequency is set by the low frequency resonant frequency; high frequency frequency = low frequency frequency * frequency ratio, and then calculate the position of the high frequency frequency in the sweep frequency range according to the high frequency frequency; when the sweep frequency module rises, it satisfies the

where F _S is the starting frequency of the sweep,

is the position of the forward frequency in the sweep frequency range, and F _f is the forward frequency value; it satisfies the falling edge of the sweep frequency module

After getting the position of the forward frequency in the sweep frequency range, according to the system setting parameters,

Perform point-by-point waveform matching within the frequency range; use the same method as above to perform waveform matching within this frequency range; if the waveform is not matched, end the frequency measurement; Whether the ratio of the low-frequency resonant frequency is within the frequency ratio range, if so, it is considered that the matched frequency within the high-frequency sweep frequency range is the high-frequency resonant frequency, and the low-frequency and high-frequency resonant frequency search success flags will be set. After the frequency measurement is over, exit the single-sweep dual-resonance frequency matching process; if two or more qualified waveforms are matched, divide the corresponding resonant frequency value with the low-frequency resonant frequency value to determine whether the ratio is In the frequency ratio range, if there are still two or more resonant frequencies within the frequency ratio range, the frequency with the largest peak-to-peak value is taken as the high-frequency resonant frequency;

If two or more resonant frequencies are detected in the low-frequency sweep range, the full-band waveform matching is performed on the high-frequency sweep range; if no resonant frequency is detected in the high-frequency sweep range, the low-frequency sweep The frequency with the largest peak-to-peak value measured is taken as the low-frequency resonance frequency, and this frequency measurement is over; if there is at least one resonance frequency measured within the high-frequency sweep frequency range, the low-frequency and high-frequency frequencies are taken out through two rounds of cycles. Divide operation to determine whether the quotient is within the frequency ratio range. If the two frequencies are considered to be the low-frequency resonant frequency and the high-frequency resonant frequency, the cycle ends, and this frequency measurement ends;

When the resonant frequency is measured in the low frequency sweep range and the high frequency sweep range at the same time, but the ratio is not within the frequency ratio range, the system considers the resonant frequency measured in the low frequency sweep range to be valid, because the SC chip needs frequencies are low frequencies.

Single-frequency tracking and frequency measurement use the current frequency for frequency tracking, so when obtaining the corresponding forward frequency or backward frequency, the analysis is based on the current frequency; the specific steps are as follows:

2.6.1) Perform full-band waveform matching within the frequency sweep range corresponding to the current frequency. If a waveform that meets the characteristic conditions is matched, the peak constraint judgment and the bandwidth constraint judgment are respectively made to obtain the qualified resonance frequency;

2.6.2) If the current frequency that meets the conditions is not detected, the current frequency measurement will end; if a current frequency that meets the conditions is detected, the waveform matching will be performed in the specified range near the forward frequency corresponding to the current frequency; forward Frequency = current frequency/frequency ratio, and then calculate the position of the forward frequency within the sweep frequency range according to the forward frequency;

where F _S is the starting frequency of the sweep,

Point-by-point waveform matching within the range;

2.6.3) When a current frequency that meets the conditions is measured, perform point-by-point matching in the specified range within the forward frequency sweep range. If a waveform that meets the characteristics is matched, its frequency value is obtained, and the current frequency and the obtained frequency are obtained. If the ratio is within the range of the maximum frequency ratio and the minimum value of the frequency ratio, it is considered that the forward frequency that meets the conditions is obtained, and the current frequency measurement is ended. If the ratio is not within the frequency ratio range, continue. Match until all points are matched;

2.6.4) A current frequency that meets the conditions is measured. If the specified range within the forward frequency sweep range does not match the forward frequency that meets the conditions, the same method is used to measure the frequency within the backward frequency sweep range. Specify the range to perform point-by-point waveform matching. If the backward frequency that meets the conditions is obtained, the frequency measurement will be ended. If not, the matching will continue until all points are matched;

2.6.5) When two or more current frequencies are detected, first perform full-band waveform matching on the forward frequency sweep range; if the waveform is not matched, perform full-band waveform matching on the backward frequency sweep range ; If the waveform is matched, the current frequency and the forward frequency will be taken out through 2 rounds of cycles to perform division operation to determine whether the ratio is within the range of the maximum frequency ratio and the minimum frequency ratio. If it is within the range, the current frequency will be stored separately. and forward frequency, end the cycle, and end this frequency measurement at the same time, if there is no current frequency and forward frequency within the range, then perform full-band waveform matching on the backward frequency sweep range;

2.6.6) After the full-band matching of the backward frequency sweep frequency range is completed, determine the number of matched waveforms; if no waveforms are matched, store the frequency with the largest peak-to-peak value in the current frequency array as the current frequency, and end this frequency measurement ; If the waveform is matched, the backward frequency and the current frequency are taken out through 2 rounds of cycles for division operation to determine whether the ratio is within the range of the maximum frequency ratio and the minimum value of the frequency ratio. If it is within the range, the current frequency is stored separately. and backward frequency to end the cycle and end this frequency measurement at the same time.

The specific steps for switching functions between the two functions are as follows:

2.7.1) The system uses statistics of the number of wafers measured in the specified circle to judge the frequency measurement abnormality, single-frequency tracking and dual-frequency tracking frequency measurement results; first determine whether the system is currently in single-frequency tracking or dual-frequency tracking;

2.7.2) If the system is in single frequency tracking, it is judged whether the number of chips at the current frequency measured by the specified circle is less than the threshold value of the number of chips set by abnormal frequency measurement, if it is less than the frequency threshold set by abnormal shutdown , the frequency value is the 80% position between the initial frequency of wafer grinding set by the user and the target frequency. If the set frequency threshold is reached, the grinder will be shut down, and the system will prompt that the frequency measurement of the single frequency tracking process is abnormal; If the number is greater than the threshold of the number of wafers set for abnormal frequency measurement, the forward frequency and the backward frequency are used to measure the number of wafers to determine whether it is greater than the threshold of successful frequency measurement. Process, if it is less than, judge whether the current frequency reaches the shutdown threshold set by single-frequency frequency measurement, if so, shut down the grinder, and the system prompts that the single-frequency frequency measurement reaches the shutdown frequency threshold, otherwise, continue the single-frequency tracking frequency measurement process;

When the system is in the single-frequency tracking frequency measurement process, since it is impossible to confirm whether the current frequency is a low-frequency frequency or a high-frequency frequency, a shutdown frequency threshold for single-frequency frequency measurement is set. When the current frequency reaches the shutdown frequency threshold, the grinder will be shut down to prevent the wafer Grinding overclocking;

2.7.3) If the system is in dual-frequency tracking, take the value of the low frequency frequency and the high frequency frequency with the less number of wafers measured, and judge whether it is less than the abnormal frequency measurement threshold. If it is less than the frequency, judge the low frequency frequency or the high frequency frequency according to the system settings. Whether the frequency measurement abnormal shutdown threshold is reached, if it is reached, the grinder will be shut down, and the system will prompt that the frequency measurement is abnormal during the dual-frequency tracking process. If it is not reached, it will enter the automatic search process; Then continue the dual-frequency tracking frequency measurement process.

The above-mentioned embodiment is only a preferred solution of the present invention, and does not limit the present invention in any form, and there are other variations and modifications under the premise of not exceeding the technical solution recorded in the claims.

Claims

The SC-cut quartz wafer online grinding frequency measurement system is characterized in that it includes a frequency measurement test function and an online frequency measurement function;

The frequency measurement test function includes the single-sweep double-resonance frequency waveform matching function, the single-sweep resonant frequency data processing function, and the unit time data processing function; the specific process is as follows:

1.1) Parameter setting steps: read the frequency measurement test parameters and SC chip setting parameters in the power-down storage module in the system;

Frequency measurement test parameters, read through the power-down storage module, including sweep frequency parameters and frequency measurement parameters; the sweep frequency parameters include sweep start frequency and sweep cutoff frequency, sweep step, sweep speed, sweep frequency Amplitude, frequency measurement parameters include high frequency search width, low frequency search width and peak constraint; SC chip setting parameters, read through the power-down storage module, including SC frequency ratio, frequency ratio upper limit, frequency ratio lower limit;

The constraints are judged on the above parameters. If the above parameters do not meet the constraints, write them into the power-down storage module according to the newly set values. If the above parameters do not exist in the power-down storage module, the above parameters are Set the parameter to the default value and write it to the power-down memory module;

Send the above frequency measurement test parameters and SC chip parameters to the display module for display respectively. Users can modify the parameters according to their needs. If the modified parameters are different from the values stored in the current MCU, the values in the MCU will be updated to the new displayed parameters. value;

1.2) Frequency sweep preparation steps: Initialize the relevant variables of the frequency measurement test function, including variables displayed on the interface, statistical variables and frequency measurement variables; The sampling times are cleared, and the sampling completion flag of the rising and falling frequency sweep signals is cleared; according to the sweep parameters set in the frequency measurement test interface, set the parameters of the sweep module, and control the sweep module to sweep the frequency;

1.3) Waveform matching steps: If the sampling on the rising edge or the falling edge is completed in step 1.2), enter the single-sweep dual-resonance frequency waveform matching function, and perform the single-sweep resonant frequency data after the single-sweep dual-resonance frequency waveform matching. processing to obtain the average value of the high-frequency resonance frequency and the low-frequency resonance frequency in a unit time, which is used for the next data processing comparison, and at the same time clears the variables related to a single frequency sweep; when the unit time set in the data processing per unit time After arrival, carry out relevant data processing, calculate the average and standard deviation of all high-frequency and low-frequency resonance frequencies measured in unit time, calculate the average value of real-time peak height and resonance width, and calculate the ratio of high-frequency and low-frequency frequencies. , and set the interface frequency measurement result indicator at the same time, and after the relevant data processing is completed, the data will be sent to the display module for display. Set it as the sweep cutoff frequency, and the initial value of the average low-frequency resonant frequency is set as the sweep start frequency. At the same time, the statistical variables such as frequency, peak height, and line width corresponding to the high and low frequencies are cleared, and the next round of measurement is performed. frequency process;

The online frequency measurement function includes automatic search function and tracking frequency measurement function; the automatic search function realizes the search for the current frequency of the SC chip, and performs different processing according to the different results of the automatic search. If the frequency is not searched within the specified number of turns, the system prompts Search for abnormal alarm, if one frequency is found, the single-frequency tracking and frequency measurement process will be carried out. If two frequencies are found, the dual-frequency tracking and frequency measurement process will be carried out; at the same time, when the system has abnormal frequency measurement and the frequency does not reach the shutdown threshold, it will call the automatic Search function re-search frequency;

The tracking frequency measurement function includes dual frequency tracking function, single frequency tracking function, frequency measurement parameter initialization, frequency sweep parameter setting and switching function between the two functions;

The dual-frequency tracking function analyzes the resonant waveform measured by a single sweep of two frequency tracking and frequency measurement. The sweep frequency range of the two frequency tracking and frequency measurement can ensure that the two resonant frequencies are covered. The waveforms between F1 and F2 include no waveform detected, one waveform detected, two or more waveforms detected; the frequency sweep range of F1 and F2 is related to the search width. Under a certain search width, the frequency of F1 There will be a certain overlapping area between the frequency sweeping range and the frequency sweeping range of F2; for the overlapping area, first determine whether there is an overlapping area between the sweeping frequency ranges of F1 and F2. If there is an overlapping area, then F1+24SSL>F2-12SSH, and it is necessary to judge F1 Whether the frequency measured in the sweep frequency range is F2; if there is no overlapping area, then F2-12SSH>F1+24SSL, the frequency measured in F1 is not F2;

Among them, the single-sweep frequency measurement includes the first scheme and the second scheme; the first scheme adopts a 9-point waveform matching algorithm for the waveform within the low-frequency sweep frequency range of the single sweep. After matching a waveform, according to the proportional coefficient, The high-frequency resonance frequency 9-point waveform matching is performed for the N*SSH range near 1.095, where N is the system setting parameter, and SSH is the high-frequency search width; when N is set to 0, it is equivalent to an 18-point waveform matching algorithm; if the waveform is matched , and the obtained ratio of the high-frequency resonant frequency to the low-frequency resonant frequency is within the range of the maximum frequency ratio and the minimum frequency ratio, it is considered that the qualified high-frequency resonant frequency and low-frequency resonant frequency have been obtained, and the frequency measurement is completed. Enter the wafer to distinguish the array; if the high-frequency waveform in the specified range is not matched, continue to perform the 9-point waveform matching of the low-frequency resonant frequency until the high-frequency resonant frequency and low-frequency resonant frequency that meet the conditions are found; If the point still does not match the high-frequency resonance frequency and low-frequency resonance frequency that meet the conditions, the frequency measurement is ended;

The second scheme uses the 9-point matching algorithm for a single resonant waveform in the sweep frequency range to perform full-range frequency measurement, and stores the measured resonant frequencies in the array. After the full-range frequency measurement is completed, the data in the array is processed uniformly. ;Through two rounds of loops, take out two different data in the array in turn for division operation, if the quotient is within the range of the maximum frequency ratio and the minimum value of the frequency ratio, it is considered that this frequency measurement has detected the qualified low-frequency resonant frequency and If the high-frequency resonant frequency is not within the range, the low-frequency resonant frequency and high-frequency resonant frequency that meet the conditions have not been measured in this frequency measurement;

The sweep frequency range of the single-frequency tracking function should cover the low-frequency frequency sweep range corresponding to the current frequency as a high-frequency frequency, and the high-frequency resonant frequency sweep range corresponding to the current frequency as a low-frequency frequency; the current frequency is used as a single-frequency tracking and the judgment basis of another frequency in the double resonant frequency of the SC chip; in the single frequency sweep frequency measurement process, the current frequency must be measured first. If the current frequency is not measured, the other two frequency sweep ranges will not be measured Frequency judgment, if the current frequency is measured, the forward frequency waveform and the backward frequency waveform are judged;

Frequency measurement parameter initialization and frequency sweep parameter setting. Frequency measurement parameters include the relevant frequency measurement parameters in the dual-frequency tracking frequency measurement process and the relevant frequency measurement parameters in the single-frequency tracking frequency measurement process. The frequency sweep parameters are set according to the results of automatic search. parameter, if two resonant frequencies are found in the automatic search, the sweep parameters of the dual-frequency tracking process are set, and if one frequency is found in the automatic search, the sweep parameters of the single-frequency tracking process are set;

In the single-sweep and dual-resonance frequency waveform matching process of dual-frequency tracking, the whole-band waveform matching is performed on the low-frequency sweep frequency range first, and then the corresponding first and second solutions are selected according to the resonant frequency matching results of the low-frequency frequency;

The single frequency sweep of single frequency tracking sweeps the frequency in the frequency range corresponding to the current frequency, the forward frequency and the backward frequency, so the frequency measurement of the three frequency bands is analyzed; the system considers the current frequency to be measured during the current grinding process. The real frequency of the frequency, must ensure that the current frequency that meets the conditions is measured before the waveform matching of the forward frequency segment and the backward frequency segment, otherwise the frequency measurement will be ended directly;

The switching function between the two functions. After the single frequency sweep frequency measurement data processing is completed, it is passed through the chip discrimination algorithm. If the system is currently in the single frequency tracking frequency measurement process, the current frequency, forward frequency and backward frequency are obtained. The number of wafers is measured. If the system is currently in the dual-frequency tracking frequency measurement process, the number of wafers measured corresponding to the low-frequency frequency and the high-frequency frequency is obtained; the frequency is switched according to the measured number of wafers.
SC-cut quartz wafer on-line grinding and frequency measuring system according to claim 1, is characterized in that, in step 1.1), the difference between the frequency sweep cut-off frequency and the frequency sweep start frequency is the frequency sweep range, and the frequency sweep start frequency and The value range of the sweep cutoff frequency is 1MHz~120MHz, and the sweep cutoff frequency to the sweep start frequency must be greater than 0MHz and less than 20MHz. If not, set the start frequency and cutoff frequency to the default values. The default value is 9MHz, and the default value of the cutoff frequency is 11MHz;

The value range of the sweep frequency step is 100Hz～8000Hz. If the conditions are not met, set the sweep frequency step according to the sweep frequency range. When the sweep frequency range is less than 2MHz, set the sweep frequency step to 1000Hz. When the sweep frequency range is 2MHz～4MHz, set the sweep frequency step to 2000Hz, when the sweep frequency range is 4MHz～6MHz, set the sweep frequency step to 3000Hz, when the sweep frequency range is greater than 6MHz, set the sweep frequency step to 4000Hz;

The value range of the sweep speed is 2uS～100uS, if the condition is not met, it is set to the default value of 50uS;

The constraints that need to be satisfied between the frequency sweep range, frequency sweep step and frequency sweep speed are: (frequency sweep range / frequency sweep step * frequency sweep speed) > 4mS, if not satisfied, these parameters need to be set to default;

The value range of the frequency sweep amplitude is 5 to 4000. If this condition is not met, it is set to the default value of 1000;

The value range of the low frequency search width and the high frequency search width is 1 to 400kHz. If this condition is not met, both are set to the default value of 33kHz;

The value range of the peak constraint is 1 to 2000. If the condition is not met, it is set to the default value of 500;

The SC frequency ratio is the ratio of the high frequency and the low frequency of the SC-cut quartz wafer. It is floating-point data and occupies 4 bytes. According to the characteristics of the SC-cut quartz wafer, the value ranges from 1.05 to 1.25. this condition, set it to the default value of 1.095;

The upper limit of the frequency ratio is a proportional value, and its value ranges from 1 to 99. If the conditions are not met, it is set to the default value of 10; through the SC frequency ratio and the upper limit of the frequency ratio, the maximum value of (high frequency frequency/low frequency frequency) is determined. value, the formula is: (high frequency frequency / low frequency frequency) maximum value = SC frequency ratio + (SC frequency ratio -1) * frequency ratio upper limit / 100;

The lower limit of the frequency ratio is a proportional value, and its value ranges from 1 to 99. If the conditions are not met, set it to the default value of 10; through the SC frequency ratio and the lower limit of the frequency ratio, determine the minimum value of (high frequency/low frequency) The formula is: (high frequency frequency/low frequency frequency) minimum value=SC frequency ratio-(SC frequency ratio-1)*frequency ratio lower limit/100.
The SC-cut quartz wafer on-line grinding frequency measurement system according to claim 1, wherein the variables displayed on the interface in step 1.2) include high-frequency frequency-related display variables and low-frequency frequency-related display variables, and the initialization includes: unit time The average value of the internal resonance frequency is cleared, the number of resonance frequencies per unit time is cleared, the standard deviation of the resonance frequency per unit time is cleared, and the number of resonance frequencies measured within 1 second is cleared;

Statistical variables also include high-frequency frequency-related statistical variables and low-frequency frequency-related statistical variables. The initialization includes: setting the average value of the resonance frequency during the frequency measurement test, where the average value of the high frequency resonance frequency is initially set to the sweep cutoff frequency, and the low frequency resonance frequency is initialized. The average frequency is set as the sweep start frequency; the single sweep instantaneous frequency storage array is cleared; the single sweep instantaneous peak height storage array is cleared; the single sweep instantaneous resonance width storage array is cleared; single sweep The number of times the resonant frequency is measured is cleared; the instantaneous frequency, peak height and resonance width variables when the peak-to-peak value of the single sweep frequency is the largest are cleared; the frequency measurement test in a unit time is cleared for each sweep of the resonant frequency storage array; unit time The real-time peak height storage array is cleared for each frequency sweep of the frequency measurement test; the storage array of the resonance width of each frequency sweep of the frequency measurement test is cleared to zero in unit time; the maximum and minimum values;

The frequency measurement variable is the search width used in the waveform matching, and the waveform search width of the high-frequency resonant frequency and the low-frequency resonant frequency are respectively set. Width Set the high frequency search width and low frequency search width respectively through the frequency measurement interface.
SC-cut quartz wafer online grinding frequency measurement system according to claim 1, is characterized in that, in step 1.3), the concrete steps of single frequency sweep double resonance frequency waveform matching function are as follows:

1.3.1.1) Waveform matching is performed for all sampling points starting from the starting point and ending at the cut-off point -9SSmin; wherein, SSmin is the smaller value of the low-frequency search width and the high-frequency search width;

1.3.1.2) Use the low-frequency search width and high-frequency search width as parameters to perform 9-point waveform matching. If the matching is successful, the peak-to-peak value of the successfully matched waveform is obtained, and the peak-to-peak value is the difference between the maximum and minimum amplitudes in the waveform. ; Among them, the data collected at the falling edge is processed during the rising edge of the frequency sweep, and the peak-to-peak value of the waveform is the difference between the amplitude of the sixth point in the waveform and the amplitude of the fourth point in the waveform; the rising edge is processed during the falling edge of the frequency sweep To collect data, the peak-to-peak value of the waveform is the difference between the amplitude of the 4th point in the waveform and the amplitude of the 6th point in the waveform;

1.3.1.3) After the waveform is successfully matched, compare the peak-to-peak value of the waveform with the peak-to-peak value constraint set on the interface. If the peak-to-peak value of the waveform is greater than the peak value constraint set on the interface, the search is considered successful, and the search width SS when the search is successful is recorded;

1.3.1.4) Intercept the length of the center 6SS of the successfully searched waveform, remove the length of the beginning 2SS and the end SS, and then perform data smoothing processing, where SS is the search width; after smoothing, find the maximum amplitude value in the 6SS waveform and the position of the minimum amplitude value in the entire waveform;

1.3.1.5) Calculate the current instantaneous resonant frequency, real-time peak height and resonant width according to the sweep start frequency, sweep cut-off frequency, and the position of the maximum and minimum amplitude values in the 6SS waveform in the entire waveform; among them, The processing process of the rising edge of the frequency sweep and the falling edge of the frequency sweep are different. The rising edge of the frequency sweep process processes the data of the falling edge. The specific data processing formula is as follows:

Instantaneous resonance frequency=Fend-(the position of the maximum amplitude in the 6SS waveform)*sweep step

Among them, Fend is the sweep cutoff frequency;

Real-time peak height = maximum value of 6SS waveform amplitude - minimum value of 6SS waveform amplitude;

Resonance line width = (the position of the maximum value of the 6SS waveform amplitude - the position of the minimum value of the 6SS waveform) * frequency sweep step / 3;

The falling edge process of sweep frequency processes the rising edge data, and the specific data processing formula is as follows:

Instantaneous resonance frequency = Fstart + (the position of the maximum amplitude in the 6SS waveform) * frequency sweep step

Among them, Fstart is the sweep start frequency;

Real-time peak height = maximum value of 6SS waveform amplitude - minimum value of 6SS waveform amplitude;

Resonance line width = (the position of the minimum value of the 6SS waveform amplitude - the position of the maximum value of the 6SS waveform) * frequency sweep step / 3;

1.3.1.6) Determine whether the peak-to-peak value of the resonant frequency measured this time is greater than the peak-to-peak value of the previously measured resonant frequency. The peak height of the measured resonance frequency is set as the peak height of the peak-to-peak maximum resonance frequency, and the resonance width measured this time is set as the resonance width of the peak-to-peak maximum resonance frequency;

1.3.1.7) Determine whether the number of resonance frequencies measured during the single-frequency sweep waveform matching process is greater than the set threshold; if it is greater than the set threshold, exit the frequency measurement process directly and enter the single-frequency sweep data processing flow; if it is less than and When the resonant frequency is detected, the sampling point will advance 6SS for the next waveform matching; if it is less than and the resonant frequency is not detected, the sampling point will advance 1 point for the next waveform matching;

1.3.1.8) If at least one resonant frequency is detected in this single-sweep waveform matching process, enter the single-sweep resonant frequency data processing process, otherwise exit this frequency measurement directly and wait for the next sampling to complete.
The SC-cut quartz wafer on-line grinding frequency measuring system according to claim 1, characterized in that, in step 1.3), the single frequency sweep resonant frequency data processing function includes 3 kinds of situations, when more than 2 resonant frequencies are measured, 2 resonance frequencies and 1 resonance frequency measured;

If more than 2 resonant frequencies are detected, first traverse all the resonant frequencies in the storage array, and take out two data from the array in turn through two rounds of loops for division operation. If the quotient is within the range of the maximum frequency ratio and the minimum frequency ratio, Then take out these two data and store them in the resonant frequency storage array in unit time corresponding to high frequency and low frequency respectively, and store the corresponding real-time peak height and resonant line width in the unit time corresponding to high frequency and low frequency respectively. , the real-time peak height storage array and resonance width storage array of each sweep; at the same time, the number of resonance frequencies per unit time of high frequency and low frequency is incremented by 1. When storing in the corresponding storage array, if the number of stored data is When the size is larger than the size of the array, stack processing is required to remove the data stored first, and then store the data stored later into the array; if the number of data is less than the size of the array, it is directly stored;

If two data that meet the conditions are obtained, the traversal loop is exited, the data processing is considered to be completed, and the high frequency and low frequency of this frequency sweep are obtained;

If no qualified data is obtained by traversing all frequencies in the storage array, extract the frequency, real-time peak height and resonance width corresponding to the maximum peak-to-peak value in a single frequency measurement process; the specific extraction includes the following four cases:

The first type is that the number of low-frequency resonance frequencies in the current unit time is 0 and the number of high-frequency resonance frequencies is not 0. At this time, it is judged whether the ratio of the average high-frequency resonance frequency to the frequency corresponding to the maximum peak-to-peak value of a single frequency measurement is greater than the minimum frequency ratio , if it is greater than the frequency corresponding to the maximum peak-to-peak value is considered to be the low frequency resonance frequency, otherwise it is considered to be the high frequency resonance frequency;

The second is that the number of low-frequency resonant frequencies in the current unit time is not 0 and the number of high-frequency resonant frequencies is 0. At this time, it is judged whether the ratio of the frequency corresponding to the maximum peak-to-peak value of a single frequency measurement to the average value of the low-frequency resonant frequency is greater than the minimum frequency ratio. If it is greater than the frequency, the maximum peak-to-peak frequency is considered to be the high frequency resonance frequency, otherwise it is considered to be the low frequency resonance frequency;

The third type of frequency of the low frequency resonance frequency per unit time and the frequency of the high frequency resonance frequency per unit time are both 0, and the frequency corresponding to the maximum peak-to-peak value is the average value of the high frequency resonance frequency per unit time and the average value of the low frequency resonance frequency per unit time. Compare and see which frequency is closer to it. If it is closer to the average value of the low-frequency resonant frequency, it will be stored in the low-frequency unit time per sweep resonance frequency storage array, otherwise it will be stored in the high-frequency unit time each time. Sweep the resonant frequency storage array, and store the corresponding real-time peak height and resonance width into the high-frequency and low-frequency corresponding unit time respectively in the real-time peak-height storage array and the resonance width storage array for each sweep;

In the fourth type, the number of low-frequency resonance frequencies in the current unit time and the number of high-frequency resonance frequencies in the current unit time are both non-zero, and the processing method is the same as the third type;

Measure two resonant frequencies, and divide the two measured data. If the quotient is within the range of the maximum frequency ratio and the minimum frequency ratio, the two data are stored in the corresponding units of high frequency and low frequency respectively. The resonant frequency storage array for each frequency sweep in time, and the corresponding real-time peak height and resonance width are stored in the high frequency and low frequency corresponding unit time per unit time. Add 1 to the number of resonance frequencies per unit time at low frequencies;

If the ratio of the two data does not meet the frequency ratio constraints, extract the frequency, real-time peak height and resonance width corresponding to the maximum peak-to-peak value in the single-frequency sweep waveform matching process, and the specific extraction method is related to the measurement of more than two resonance frequencies. same;

When one resonant frequency is measured, extract the frequency, real-time peak height and resonant line width corresponding to the maximum peak-to-peak value in the single-sweep waveform matching process. The specific extraction method is the same as when more than two resonant frequencies are measured.
The SC-cut quartz wafer on-line grinding frequency measurement system according to claim 1, wherein the automatic search function specifically includes data initialization, frequency sweep and frequency measurement parameter setting, single frequency sweep and dual resonance frequency waveform matching function, single Sub-sweep frequency data processing function, full frequency band data processing function and frequency band switching function;

Data initialization is used to initialize the variables related to frequency statistics. The variables that need to be initialized include: frequency measurement related variables during a single frequency sweep, full-band sub-sweep dual-resonance frequency-related variables, and full-band sub-sweep single resonance frequency. Frequency measurement related variables, automatic search process related control variables and frequency sweep module control variables;

Frequency sweep and frequency measurement parameter settings include setting sweep frequency parameters and frequency measurement parameters;

Sweep parameters include sweep start frequency, sweep cut-off frequency, sweep step, sweep speed and sweep amplitude; in the automatic search sweep process, the method of periodic sweep within the specified number of turns is used. The frequency sweep of a cycle is a segmented frequency sweep from the target frequency to the end of the starting frequency. The frequency sweep of each segment is repeated within a specified time period. The frequency sweep range of each frequency sweep is related to the frequency. Must include high frequency resonant frequency and low frequency resonant frequency;

Single-sweep resonant frequency waveform matching function, when the single-time sampling is completed, enter the automatic search for single-sweep double-resonance frequency waveform matching; automatically search for single-time frequency measurement dual-resonance frequency waveform matching function and single-time frequency measurement test function. The waveform matching function of sweep frequency and dual resonant frequency is basically the same. The difference is: before starting the 9-point waveform matching algorithm for all sweep frequency points, first judge whether the number of resonance frequencies measured in the current segment is less than the set threshold, and if it is less than the 9-point waveform Otherwise, it is considered that the amount of data collected in this section is sufficient, and this 9-point waveform matching process is skipped;

Due to the large sweep frequency range of each segment in the automatic search process, the search width corresponding to different frequencies will be different, so the 9-point waveform matching process adopts multiple search widths for matching;

The single frequency sweep data processing function includes processing the following three situations: more than 2 resonant frequencies are measured, 2 resonant frequencies are measured, and 1 resonant frequency is measured;

When more than 2 resonant frequencies are measured, the two data in the instantaneous resonant frequency storage array are sequentially taken out through two cycles for division operation; if the quotient is within the range of the maximum frequency ratio and the minimum frequency ratio, the two data are taken out. Store the resonant frequency storage arrays corresponding to the high frequency and low frequency of this section respectively, and at the same time add 1 to the number of resonant frequencies measured in this section of high frequency and low frequency, and then exit the traversal loop, it is considered that the high frequency and low frequency of this sweep are obtained. frequency, this data processing is completed, otherwise continue to traverse the instantaneous resonance frequency storage array;

If no qualified data is obtained by traversing all frequencies in the storage array, the resonant frequency corresponding to the maximum peak-to-peak value of this sweep is stored in the resonant frequency storage array of this section, and the number of resonance frequencies measured in this section is added 1;

The resonant frequency storage array of this section stores the data that only one resonant frequency is searched and two resonant frequencies that meet the conditions during the automatic search process are stored separately, and are also processed separately in the data processing process after the automatic search is over;

When two resonant frequencies are measured, divide the two measured data, if the quotient is within the range of the maximum frequency ratio and the minimum frequency ratio, store these two data in the high frequency and low frequency of this section respectively. The corresponding resonant frequency is stored in the array, and the number of resonant frequencies measured at high and low frequencies in this section is incremented by 1; if the quotient is not within the range of the maximum frequency ratio and the minimum frequency ratio, the peak-to-peak value of this frequency sweep will be the maximum. The resonance frequency corresponding to the value can be stored in the resonance frequency storage array of this section, and the number of resonance frequencies measured in this section is increased by 1;

When one resonance frequency is measured, the resonance frequency corresponding to the maximum peak-to-peak value of this sweep frequency can be stored in the resonance frequency storage array of this section, and the number of resonance frequencies measured in this section is increased by 1;

Frequency band switching function, by setting a specified time to perform repeated frequency sweep and frequency measurement of a single frequency band, when the specified time arrives, it is judged whether the frequency sweep of the whole frequency band is completed. Whether the frequency is less than the starting frequency of wafer grinding set by the user, if it is less than the frequency sweep of the whole frequency band, the data processing function of the whole frequency band is performed; if it is not lower than the frequency switching;

Full-band data processing function, if the full-band frequency sweep is completed, enter the full-band data processing, which includes the following steps:

2.1.1) Traverse the high-frequency and low-frequency resonance frequencies measured in all frequency bands during the automatic search process; if the number of high-frequency and low-frequency resonance frequencies measured in the current segment is greater than or equal to the number of successful automatic search resonance frequencies set by the system, the After eliminating the interference value with all the data in the low-frequency resonant frequency storage array, the average value of the remaining data is obtained, and the number of remaining data is returned; times, the search of high-frequency and low-frequency resonant frequencies is considered to be successful, and at the same time, it is judged whether the number of remaining data is greater than the maximum number of resonance frequencies of all segments. The number of data, and then proceed to the next segment of data processing, otherwise directly proceed to the next segment of data processing, until the data processing of all segments is completed, and the segment with the largest number of eligible data is found;

If the number of high-frequency and low-frequency resonant frequencies measured in the current segment is less than the number of successful resonant frequencies set by the system for automatic search, the data processing of the next segment will be performed until the data processing of all segments is completed;

2.1.2) Determine whether the search for high-frequency and low-frequency resonant frequencies is successful. If the search is successful, determine whether the ratio of high-frequency resonant frequency to low-frequency resonant frequency is within the range of the maximum frequency ratio and the minimum frequency ratio. If it is within the range, It is considered that both resonant frequencies have been searched, and the high-frequency resonant frequency and low-frequency resonant frequency used in the tracking frequency measurement process are set to the high-frequency and low-frequency resonant frequencies detected by the automatic search respectively, and the tracking frequency measurement process is entered; if the search is unsuccessful , then perform full-band single-resonance frequency data processing;

2.1.3) Single resonance frequency data processing, traverse the single resonance frequency data measured in the whole frequency band, if the number of single resonance frequencies measured in the current segment is greater than or equal to the number of successful resonance frequencies set by the system, the single resonance frequency will be stored in an array. After the interference value of all the data is eliminated, the average value of the remaining data is obtained, and the number of remaining data is returned; if the number of remaining data is still greater than or equal to the number of successful resonance frequencies set by the system, it is considered a single resonance The frequency search is successful, and at the same time, it is judged whether the number of remaining data is greater than the maximum number of resonance frequencies of all segments. If it is greater than the number of maximum resonance frequencies of all segments, set the number of remaining data of the segment after data processing, and then proceed to the next segment. Data processing, otherwise, proceed to the data processing of the next segment until the data processing of all segments is completed;

If the number of single resonance frequencies measured in the current segment is less than the number of successful resonance frequencies set by the system, the data processing of the next segment will be performed until the data processing of all segments is completed;

2.1.4) Determine whether the search for the single resonant frequency is successful. If the search is successful, set the high-frequency resonance frequency used in the tracking frequency measurement process to automatically search and measure the single resonance frequency, and enter the tracking frequency measurement process; if the search is unsuccessful, judge Whether the number of automatic search laps has reached the number of automatic search abnormal laps set by the system, if it is reached, the automatic search will be stopped, and the system will automatically search for an abnormal alarm; if not, it will continue the full-frequency automatic search process;

2.1.5) According to the result of automatic search, send the resonant frequency data to the interface display; if the double resonant frequency search is successful, the high frequency and low frequency resonant frequencies will be calibrated and sent to the interface display, if the single resonant frequency search is successful, then The single resonance frequency is calibrated and sent to the interface for display;

Resonant frequency number statistical variable reset, resonant frequency number maximum setting, instantaneous resonant frequency storage array reset and peak-to-peak maximum instantaneous resonant frequency reset;

The initialization of the variables related to the full-band sub-sweep dual-resonance frequency measurement includes: the current position of the full-band sweep is cleared to zero, the full-band starts from 0, and can be divided into 36 sections at most, and the high-frequency and low-frequency resonances are detected in each sweep frequency band. The frequency times storage array is cleared, and the high frequency and low frequency measured resonance frequency storage array of each sweep frequency band is cleared;

The initialization of the variables related to the frequency measurement of the single resonant frequency of the whole frequency band segmented frequency sweep includes: clearing the storage array of the number of times the single resonant frequency is measured in each sweep frequency band, and clearing the storage array of the single resonance frequency measured in each sweep frequency band;

The initialization of control variables related to the automatic search process includes: automatic search process start flag setting, automatic search frequency measurement result flag setting, automatic search frequency switching flag setting, automatic search frequency switching timing time reset, automatic search process lap statistics clear;

The initialization of the control variables of the frequency sweeping module includes: clearing the edge jump flag of the frequency sweeping module, clearing the statistics of the sampling data on the rising and falling edges of the frequency sweeping module, and completing the sampling of the rising and falling edges of the frequency sweeping module. The flag bit is cleared, and the frequency sweep module sweeps the rising edge and the falling edge of the sampling processing flag bit is cleared;

When the automatic frequency sweep starts, first set the sweep parameters near the target frequency set on the main interface;

The setting process of sweep start frequency and sweep cutoff frequency is as follows:

2.1.1) Low frequency resonance frequency FL = target frequency set on the main interface;

2.1.2) Calculate the low frequency search width according to the low frequency resonance frequency:
It is an nth-order polynomial, where SSLRatio is the low-frequency search line width coefficient, and FL is the low-frequency resonant frequency;

2.1.3) The current system sets the effective waveform range to 9SS and the sweep frequency range to 36SS, taking the resonance frequency as the center to add 18SS and subtract 18SS respectively; the low frequency sweep start frequency FLstart=FL- 18*SSL, the low frequency sweep Cutoff frequency FLend=FL+18*SSL;

2.1.4) Obtain the high frequency frequency FH=FL*FRatio according to the frequency ratio, wherein FRatio is the frequency ratio of the high frequency frequency and the low frequency frequency of the SC chip;

2.1.5) Obtain the high frequency sweep start frequency and the high frequency sweep cutoff frequency according to the methods of steps 2.1.2) and 2.1.3); calculate the sweep frequency range according to the high and low frequency sweep start frequency and cutoff frequency: FRange =Fmax-Fmin, where Fmax is the maximum value of the start frequency and cutoff frequency of the high and low frequency sweep, and Fmin is the minimum value of the start frequency and cutoff frequency of the high and low frequency sweep;

2.1.6) Take FRange as the center to expand the sweep frequency range by n times, and set the corresponding sweep frequency start frequency and sweep cutoff frequency. n is a positive integer. The success rate and accuracy of frequency measurement of the resonant frequency will be reduced accordingly;

2.1.7) Set the low frequency value of this sweep to the high frequency of the next sweep, and get the sweep start frequency and sweep cutoff frequency;

Set the sweep step according to the sweep range. If the sweep range is greater than 8MHz, set the sweep step to 4kHz. If the sweep range is 6 to 8MHz, set the sweep step to 3kHz. If the sweep range is 4 ～6MHz, set the sweep frequency step to 2kHz, if the sweep frequency range is 3～4MHz, set the sweep frequency step to 1.5kHz, if the sweep frequency range is less than 3MHz, set the sweep frequency step to 1kHz;

Set the peak constraint according to the sweep start frequency. If the sweep start frequency is less than 8MHz, set the peak constraint as the low frequency peak constraint. If the sweep start frequency is greater than or equal to 8MHz, set the peak constraint as the high frequency peak constraint;

Find the sweep amplitude based on the sweep center frequency:
is an nth-order polynomial, where SRRatio is the sweep amplitude coefficient, and Fmiddle is the sweep center frequency;

Subdivide the frequency range of this segment into N equal subdivisions to obtain the subdivided frequencies, and calculate the search width corresponding to the high frequency and the low frequency according to the subdivided frequencies;

Set the average high frequency frequency of this section as the cutoff frequency of the sweep, and set the average low frequency of this section as the start frequency of the sweep;

Set the frequency sweeping module according to the above-obtained frequency sweeping parameters, and start frequency sweeping;

The frequency switching process is as follows:

① Determine whether the current number of sweep frequency bands is greater than the maximum number of sweep frequency bands set by the system. If it is greater, it will directly exit the frequency switching process and enter the full frequency band data processing process; if not, add 1 to the current sweep frequency band number;

②Using the high-frequency resonant frequency of the next sweep frequency obtained in the last sweep frequency parameter calculation, obtain new sweep frequency parameters and frequency measurement parameters through the above-mentioned automatic search sweep frequency parameter and frequency measurement parameter setting method;

③ According to the newly obtained frequency sweep parameters, set the frequency sweep module to sweep the frequency; at the same time, set the control variable of the frequency sweep module: the edge hopping flag of the frequency sweep module is cleared to zero, and the number of sampling data on the rising and falling edges of the frequency sweep module is counted. Cleared, the sweeping rising edge and falling edge sampling completion flag bit of the frequency sweeping module is cleared, and the sweeping frequency rising edge and falling edge sampling processing flag bit of the frequency sweeping module is cleared to zero.
The SC-cut quartz wafer on-line grinding frequency measurement system according to claim 1, characterized in that, when no waveform is detected in the dual-frequency tracking function of the tracking frequency measurement function, there is no wafer or no measurement under the probe during this frequency sweep. to the resonant frequency, so that when the number of times the frequency is not measured continuously by the chip discrimination algorithm, it will be incremented by 1, and at the same time, it will be judged whether the frequency measurement of the chip is over; , when both frequency 1 and frequency 2 are not measured, this frequency measurement is ended; and the frequency measurement is carried out using the second scheme;

When the previous waveform is measured, first perform a full-band frequency measurement within the frequency sweep range of frequency 1. After measuring frequency 1, perform 9-point matching on the N*SS range near 1.095. The result is that the frequency cannot be matched. Secondary frequency measurement; wherein the frequency measurement is carried out using the first scheme;

When two or more waveforms are detected in the frequency sweep range of frequency 1, the full-band frequency measurement is carried out respectively in the frequency sweep range of frequency 1 and frequency 2, and the frequency measurement result is that the two frequencies or If there are more than 2 frequency values, at this time, take the value with the largest frequency as frequency 1 and store it in the array where frequency 1 is located; the frequency measurement adopts the second scheme;

When the latter waveform is measured, the full-band frequency measurement is carried out respectively in the frequency sweep range of frequency 1 and frequency 2. The frequency measurement result is that only frequency 2 is measured, and it is stored in the array where frequency 2 is located; The second plan is carried out;

When two or more waveforms are detected in the frequency sweep range of frequency 2, perform full-band frequency measurement in the sweep frequency range of frequency 1 and frequency 2 respectively. The result of frequency measurement is that only 2 frequencies in the frequency band of frequency 2 are measured. Or more than 2 frequency values, at this time, take the value with the largest frequency as frequency 1 and store it in the array where frequency 1 is located; the frequency measurement is carried out by the second scheme;

When two waveforms are measured, and they are respectively within the two frequency sweep ranges, perform full-band frequency measurement on the frequency band where frequency 1 is located. After measuring frequency 1, store it in the array where frequency 1 is located, and measure the The frequency waveform matching is performed within the range of N*1.095. If the frequency 2 is matched, it will be stored in the array where the frequency 2 is located. If the frequency cannot be matched, the frequency measurement will be ended; the frequency measurement is performed using the first scheme;

When one waveform is detected within the frequency sweep range of frequency 1, and two or more waveforms are detected within the frequency sweep range of frequency 2, perform full-band frequency measurement on the frequency band where frequency 1 is located. Enter the array where frequency 1 is located. If the proportional relationship between the frequency measured at frequency 2 and the frequency measured at frequency 1 is not within ±N*1.095, then frequency 1 is considered to be a valid signal, and stored in the array where frequency 1 is located, frequency 2 The measured signal is invalid signal; wherein the frequency measurement adopts the first scheme;

When two or more waveforms are detected within the frequency sweep range of frequency 1, when one waveform is detected within the frequency sweep range of frequency 2, perform full-band matching on the frequency bands where frequency 1 and frequency 2 are located respectively, and obtain 2 waveforms at frequency 1. and above frequency value, 1 frequency value at frequency 2, at this time, take frequency 2 as the base number, divide it by 1.095, and find out whether there is a frequency of frequency 1 at ±N. Secondary frequency measurement; wherein the frequency measurement is carried out by the second scheme;

When two or more waveforms are measured in the frequency sweep range of frequency 1 and frequency 2, respectively, perform full-band frequency measurement on the frequency bands where frequency 1 and frequency 2 are located, and then process the corresponding data; program is carried out.
SC-cut quartz wafer on-line grinding and frequency measurement system according to claim 1, is characterized in that, the frequency measurement resonance waveform analysis and concrete processing process of single frequency sweep in single frequency tracking function are as follows:

2.2.1) If the resonant waveform is not matched in the current frequency sweep range, no matter whether there is a resonant waveform in the forward frequency sweep range and the backward frequency sweep range, the waveform matching will not be performed;

2.2.2) If a qualified resonant waveform is matched within the current frequency sweep range, the waveform matching is performed for the forward frequency sweep range at ±N*(1/1.095), and the backward frequency sweep range is at ±N*(1/1.095). ±N*1.095 for waveform matching, according to the matching results to determine whether it is within the frequency ratio range, if so, store it in the correlation array respectively;

2.2.3) If two or more resonant waveforms are matched within the current frequency sweep range, the frequency measurement in the entire frequency range shall be carried out for the three sweep frequency ranges respectively, and the data shall be judged according to the frequency measurement results;

The specific setting steps of frequency measurement parameter initialization are as follows:

2.3.1) During the single sweep frequency measurement in the dual-frequency tracking frequency measurement, the number of resonance frequencies measured by the low frequency frequency and the high frequency frequency respectively is cleared, the instantaneous resonance frequency array is cleared, and the peak-to-peak maximum resonance frequency is cleared; During a single sweep frequency measurement in the single-frequency tracking frequency measurement process, the number of resonance frequencies measured by the current frequency, forward frequency and backward frequency are cleared to zero, the instantaneous resonance frequency array is cleared to zero, and the peak-to-peak maximum resonance frequency is cleared to zero. ;

2.3.2) The variables used in the wafer discrimination algorithm, the variables corresponding to high frequency and low frequency in the dual-frequency tracking frequency measurement process correspond to the current frequency, forward frequency and backward frequency in the single-frequency tracking frequency measurement process The variables are initialized separately; the number of consecutive unmeasured resonant frequencies, the number of consecutively measured resonant frequencies, and the number of consecutive unmeasured resonant frequencies after the resonant frequency has been continuously measured are cleared, and the single-chip dispersion value is cleared to zero, and the statistical The count of the single-chip scattered difference is cleared, all the single-chip scattered difference value storage arrays are cleared to zero within the specified time, the single-chip instantaneous resonance frequency value storage array is cleared, and the single-chip instantaneous resonance frequency storage array within one circle is cleared. The statistical variable of the number of instantaneous resonant frequencies is cleared, the total number of chips measured in this circle is cleared, the total number of chips measured in the previous circle is cleared, the number of data variables of the single-chip average value of the resonance frequency is cleared, and the single-chip frequency measurement is performed online. The resonant frequency average storage array is cleared to zero, the online frequency measurement timing segmented chip number storage array is cleared to zero, and the online frequency measurement timing segment is cleared to the previous circle.

2.3.3) Initialize the variables related to the number of turns and speed judgment, including: clearing the abnormal monitoring time of the lap count, clearing the continuous lap speed stability flag, clearing the current value of the online frequency measurement single-lap timing section division, and resonant frequency averaging Value storage stack initial storage flag;

2.3.4) Initialization of tracking frequency measurement statistics variables. Since the statistics of tracking frequency measurement are mainly used to display variable statistics on the interface such as the real-time frequency of the whole disk, grinding rate, and number of grinding cycles, while the dual-frequency tracking process displays the related statistics of the low-frequency resonance frequency and high-frequency resonance frequency of the SC wafer, while The single resonance frequency tracking frequency measurement process displays the statistics of one of the low frequency resonance frequency and the high frequency resonance frequency of the SC wafer. Therefore, the dual frequency tracking frequency measurement process and the single frequency tracking frequency measurement process can share a set of parameters, which is the low frequency resonance frequency. Frequency and high frequency resonance frequency related statistics;

2.3.5) Initialization of frequency sweep module control variables;

The specific setting steps of frequency sweep parameters are as follows:

2.4.1) When dual-frequency tracking frequency measurement, set the waveform peak constraint value according to the low-frequency resonance frequency; when single-frequency tracking frequency measurement, set the waveform peak constraint value according to the current resonance frequency;

2.4.2) Set the search width according to the waveform search width coefficient; in the case of dual-frequency tracking frequency measurement, set the corresponding search width according to the high-frequency resonant frequency and low-frequency resonant frequency obtained by automatic search, and the formula obtained by the search width is the N order of the frequency Multi-polynomial; when single-frequency tracking frequency measurement, the forward frequency and backward frequency are calculated according to the current resonance frequency obtained by automatic search, the forward frequency is the current frequency divided by the frequency ratio, the backward frequency is the current frequency * frequency ratio, and then Set the corresponding search width according to the current frequency, forward frequency and backward frequency, wherein the calculation of the forward frequency search width uses the low frequency search width coefficient, and the calculation of the current frequency and the backward frequency search width uses the high frequency search width coefficient;

2.4.3) Obtain the corresponding sweep frequency range according to the search width and current frequency; when dual-frequency tracking frequency measurement,

The sweep frequency range of high frequency frequency is: (high frequency resonance frequency -12SS) ~ (high frequency resonance frequency +24SS);

The sweep frequency range of low frequency frequency is: (low frequency resonance frequency -12SS) ~ (low frequency resonance frequency +24SS)

When single frequency tracking frequency measurement,

The sweep frequency range of the current frequency is: (current resonance frequency -12SS) ~ (current resonance frequency +24SS);

The sweep frequency range of the forward frequency is: (forward resonance frequency -12SS) ~ (forward resonance frequency +24SS);

The sweep frequency range of the backward frequency is: (backward resonance frequency -12SS) ~ (backward resonance frequency +24SS)

where SS is the search width of the corresponding frequency;

2.4.4) Obtain the frequency sweep amplitude according to the resonant frequency and the frequency sweep amplitude coefficient, in which the high frequency resonance frequency is used to calculate the dual frequency tracking frequency measurement, and the current resonance frequency is used to calculate the single frequency tracking frequency measurement;

2.4.5) Calculate the frequency sweep step according to the search width of the low frequency frequency and the search width of the forward frequency;

2.4.6) Set the sweep start frequency and sweep cutoff frequency of the current sweep module according to the sweep frequency range corresponding to each frequency, calculate the sweep frequency points corresponding to each frequency band, and each frequency band corresponds to the sweep frequency in the total sweep frequency range. frequency starting position;

2.4.7) Set the parameters of the frequency sweep module according to the frequency sweep parameters obtained above, and start the frequency sweep.
The SC-cut quartz wafer on-line grinding frequency measurement system according to claim 1, is characterized in that, the result of full-band waveform matching in the low frequency sweep frequency range is respectively carried out in the waveform processing in the high frequency sweep frequency range, and the concrete steps are as follows:

2.5.1) The 9-point waveform matching algorithm is used to perform full-band waveform matching in the low-frequency sweep frequency range. The search width adopts the low-frequency search width. If a waveform that matches the waveform characteristics is matched, it is judged whether the waveform meets the peak constraint condition. The peak constraint condition is to obtain the current waveform position that is successfully matched. After smoothing the waveform, the maximum peak value is obtained as the resonant frequency value, and it is judged whether the resonant frequency is within the bandwidth constraint range, and the frequency is stored in the low-frequency single Array of instantaneous resonant frequencies of the second sweep, and at the same time determine whether the peak-to-peak value corresponding to this frequency is greater than the peak-to-peak value of the frequency measured in the low-frequency frequency range of this sweep. For the resonant frequency measured this time, advance the waveform matching point of the low frequency sweep frequency range by 6SSL and continue to perform waveform matching until the matching point is advanced to the total number of sampling points of the low frequency sweep frequency -9SSL; Within the wide constraint range, move the waveform matching point of the low frequency sweep frequency range forward by 1 point to continue waveform matching until the matching point is advanced to the total number of sampling points of the low frequency sweep frequency -9SSL;

2.5.2) Carry out frequency measurement in the high frequency sweep range according to the frequency measurement results in the low frequency sweep frequency range;

If the resonant frequency is not detected in the low frequency sweep range, use the same method to perform full-band waveform matching in the high frequency sweep range; Frequency measurement; if a qualified resonant frequency is detected in the high-frequency sweep range, the resonant frequency will be set as the high-frequency resonant frequency measured by this frequency measurement, and the high-frequency resonant frequency search success flag will be set at the same time. ; If two or more qualified resonant frequencies are detected in the high-frequency sweep range, the resonant frequency with the largest peak-to-peak value is set as the high-frequency resonant frequency measured by this frequency measurement, and the high-frequency resonant frequency will be set at the same time. Resonant frequency search success flag;

If a resonant frequency is detected in the low frequency sweep range, the resonant frequency is set as the low frequency resonant frequency measured in this frequency measurement, and the waveform matching range of the high frequency frequency is set by the low frequency resonant frequency; high frequency frequency = low frequency frequency * frequency ratio, and then calculate the position of the high frequency frequency in the sweep frequency range according to the high frequency frequency; when the sweep frequency module rises, it satisfies the
where F S is the starting frequency of the sweep,
is the position of the forward frequency in the sweep frequency range, and F f is the forward frequency value; it satisfies the falling edge of the sweep frequency module
After getting the position of the forward frequency in the sweep frequency range, according to the system setting parameters,
Perform point-by-point waveform matching within the frequency range; use the same method as above to perform waveform matching within this frequency range; if the waveform is not matched, end the frequency measurement; Whether the ratio of the low-frequency resonant frequency is within the frequency ratio range, if so, it is considered that the matched frequency within the high-frequency sweep frequency range is the high-frequency resonant frequency, and the low-frequency and high-frequency resonant frequency search success flags will be set. After the frequency measurement is over, exit the single-sweep dual-resonance frequency matching process; if two or more qualified waveforms are matched, divide the corresponding resonant frequency value with the low-frequency resonant frequency value to determine whether the ratio is In the frequency ratio range, if there are still two or more resonant frequencies within the frequency ratio range, the frequency with the largest peak-to-peak value is taken as the high-frequency resonant frequency;

If two or more resonant frequencies are detected in the low-frequency sweep range, the full-band waveform matching is performed on the high-frequency sweep range; if no resonant frequency is detected in the high-frequency sweep range, the low-frequency sweep The frequency with the largest peak-to-peak value measured is taken as the low-frequency resonance frequency, and this frequency measurement is over; if there is at least one resonance frequency measured within the high-frequency sweep frequency range, the low-frequency and high-frequency frequencies are taken out through two rounds of cycles. Divide operation to determine whether the quotient is within the frequency ratio range. If the two frequencies are considered to be the low-frequency resonant frequency and the high-frequency resonant frequency, the cycle ends, and this frequency measurement ends;

When the resonant frequency is measured in the low frequency sweep range and the high frequency sweep range at the same time, but the ratio is not within the frequency ratio range, the system considers the resonant frequency measured in the low frequency sweep range to be valid, because the SC chip needs frequencies are low frequencies.
The SC-cut quartz wafer on-line grinding frequency measurement system according to claim 1, wherein the single frequency tracking frequency measurement performs frequency tracking with the current frequency, so when acquiring the corresponding forward frequency or backward frequency, both The current frequency is used as the basis for analysis; the specific steps are as follows:

2.6.1) Perform full-band waveform matching within the frequency sweep range corresponding to the current frequency. If the waveforms that meet the characteristic conditions are matched, the peak constraint judgment and the bandwidth constraint judgment are respectively made to obtain the qualified resonance frequency;

2.6.2) If the current frequency that meets the conditions is not detected, the current frequency measurement will end; if a current frequency that meets the conditions is detected, the waveform matching will be performed in the specified range near the forward frequency corresponding to the current frequency; forward Frequency = current frequency/frequency ratio, and then calculate the position of the forward frequency within the sweep frequency range according to the forward frequency;
where F S is the starting frequency of the sweep,
is the position of the forward frequency in the sweep frequency range, and F f is the forward frequency value; it satisfies the falling edge of the sweep frequency module
After getting the position of the forward frequency in the sweep frequency range, according to the system setting parameters,
Point-by-point waveform matching within the range;

2.6.3) When a current frequency that meets the conditions is measured, perform point-by-point matching in the specified range within the forward frequency sweep range. If a waveform that meets the characteristics is matched, its frequency value is obtained, and the current frequency and the obtained frequency are obtained. If the ratio is within the range of the maximum frequency ratio and the minimum value of the frequency ratio, it is considered that the forward frequency that meets the conditions is obtained, and the current frequency measurement is ended. If the ratio is not within the frequency ratio range, continue. Match until all points are matched;

2.6.4) A current frequency that meets the conditions is measured. If the specified range within the forward frequency sweep range does not match the forward frequency that meets the conditions, the same method is used to measure the frequency within the backward frequency sweep range. Specify the range to perform point-by-point waveform matching. If the backward frequency that meets the conditions is obtained, the frequency measurement will be ended. If not, the matching will continue until all points are matched;

2.6.5) When two or more current frequencies are detected, first perform full-band waveform matching on the forward frequency sweep range; if the waveform is not matched, perform full-band waveform matching on the backward frequency sweep range ; If the waveform is matched, the current frequency and the forward frequency will be taken out through 2 rounds of cycles for division operation, to determine whether the ratio is within the range of the maximum frequency ratio and the minimum value of the frequency ratio. If it is within the range, the current frequency will be stored separately. and forward frequency, end the cycle, and end this frequency measurement at the same time, if there is no current frequency and forward frequency within the range, then perform full-band waveform matching on the backward frequency sweep range;

2.6.6) After the full-band matching of the backward frequency sweep frequency range is completed, determine the number of matched waveforms; if no waveforms are matched, store the frequency with the largest peak-to-peak value in the current frequency array as the current frequency, and end this frequency measurement ; If the waveform is matched, the backward frequency and the current frequency are taken out through 2 rounds of cycles for division operation to determine whether the ratio is within the range of the maximum frequency ratio and the minimum value of the frequency ratio. If it is within the range, the current frequency is stored separately. and backward frequency to end the cycle and end this frequency measurement at the same time.