CN106768279A - Optical fiber F P sound pressure sensors based on metal line film - Google Patents
Optical fiber F P sound pressure sensors based on metal line film Download PDFInfo
- Publication number
- CN106768279A CN106768279A CN201710046777.5A CN201710046777A CN106768279A CN 106768279 A CN106768279 A CN 106768279A CN 201710046777 A CN201710046777 A CN 201710046777A CN 106768279 A CN106768279 A CN 106768279A
- Authority
- CN
- China
- Prior art keywords
- sleeve pipe
- metal film
- optical fiber
- lock pin
- sound pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
Abstract
Optical fiber F P sound pressure sensor of the present invention based on metal line film belongs to sound pressure sensor technical field；The sound pressure sensor includes wavy metal film, cavity sleeve pipe, lock pin and optical fiber；The wavy metal film is fitted in an end face of cavity sleeve pipe with solidification glue as acoustic pressure sensing element, and the lock pin coordinated with cavity internal surface of sleeve pipe is inserted with from another end face of cavity sleeve pipe, and lock pin center is inserted with the smooth optical fiber of end surface grinding；Cavity sleeve pipe, lock pin and fiber-coaxial are set, and are fixed with solidification glue between sleeve pipe and lock pin, are fixed with solidification glue between lock pin and optical fiber；Optical fiber F P sound pressure sensor of the present invention based on metal line film, can solve the problem that the technical problem that diaphragm material or diaphragm shapes are brought.
Description
Technical field
Fiber F-P sound pressure sensor of the present invention based on metal line film belongs to sound pressure sensor technical field.
Background technology
At this stage, diaphragm-type optical-fiber F-P sound pressure sensors with its fast response time, sensitivity is high, making is simple, cost
It is low, receive ambient noise interference the advantages of and greatly develop.The characteristics of diaphragm-type optical-fiber F-P sound pressure sensors be sensitive diaphragm and
Fiber end face constitutes F-P cavity, and extraneous sound pressure signal can vibrate sensitive diaphragm, and then the chamber of change F-P cavity is long, causes anti-
Penetrate optical signal to change, by detecting the change, you can realize the detection of acoustic pressure relevant information to external world.
The performance of this kind of sound pressure sensor is directly related with diaphragm.At present, the diaphragm of diaphragm-type optical-fiber F-P sound pressure sensors
It is the flat film that silicon, silica, silicon nitride or PET material make, these diaphragms are applied in diaphragm-type optical-fiber F-P sound pressure sensors
In, have problems with：
Firstth, for diaphragm material, the diaphragm processing technology based on silicon, silica and silicon nitride material is complicated,
Fabrication cycle is long, high cost；And the diaphragm based on PET material because of processing technology the reason for cause the thickness cannot to reduce, reduce
Mechanical sensitivity；
Secondth, for flat membrane structure, ambient pressure can make plane become on-plane surface, and the error of face shape can be transmitted directly
To in reflected light signal, reflected light signal is set to there is error, which in turn reduces the accuracy of detection.
The content of the invention
For diaphragm-type optical-fiber F-P sound pressure sensors diaphragm material and the problem of diaphragm shapes, the invention discloses one kind
Fiber F-P sound pressure sensor based on metal line film；By changing flat membrane material, solve to be based on silicon, silica and silicon nitride
The diaphragm processing technology of material is complicated, and fabrication cycle is long, the problem of high cost, and the diaphragm based on PET material is because of processing work
The reason for skill, causes the thickness cannot to reduce, and reduces the problem of mechanical sensitivity；By changing diaphragm shapes, solve face shape and miss
Difference is delivered in reflected light signal, reflected light signal is there is error, reduces the problem of the accuracy of detection.
The object of the present invention is achieved like this：
Based on the fiber F-P sound pressure sensor of metal line film, including wavy metal film, cavity sleeve pipe, lock pin and optical fiber；
The wavy metal film is fitted in an end face of cavity sleeve pipe with solidification glue, from cavity sleeve pipe as acoustic pressure sensing element
Another end face be inserted with cavity internal surface of sleeve pipe coordinate lock pin, lock pin center is inserted with the smooth optical fiber of end surface grinding；Cavity
Sleeve pipe, lock pin and fiber-coaxial are set, and are fixed with solidification glue between sleeve pipe and lock pin, solid with solidification glue between lock pin and optical fiber
It is fixed；F-P cavity is constituted between wavy metal film and fiber end face, wavy metal film produces vibration under the effect of extraneous acoustic pressure,
Cause the change that F-P cavity is long, and then cause reflected light signal to change, so as to detect extraneous acoustic pressure relevant information.
The above-mentioned fiber F-P sound pressure sensor based on metal line film, the wavy metal film is middle smooth, marginal belt
There is the structure of fold ripple；The diameter with diameter greater than optical fiber of the central field portion point, central field portion assigns to fiber end face
It is F-P cavity；The cross sectional shape of the fold ripple is periodic sinusoidal, rectangle, triangle or trapezoidal.
The above-mentioned fiber F-P sound pressure sensor based on wavy metal film, processing method is comprised the following steps：
Step a, making wavy metal film；
It is step b, with solidification glue that wavy metal is film adhered on an end face of cavity sleeve pipe；
Step c, the lock pin coordinated with cavity internal surface of sleeve pipe from another end face insertion of cavity sleeve pipe, and it is solid with solidification glue
It is fixed；
Step d, from the lock pin center insertion smooth optical fiber of end surface grinding, adjust fiber lengths, and fixed with solidification glue.
The specific method of step a is as follows：
Step a1, one layer of photoresist of painting in substrate, the substrate is monocrystalline silicon or glass with plane characteristic；
Step a2, using the lay photoetching mask plate for designing, the method not exclusively exposed by photoetching is shifted line membrane structure
Onto photoresist；
Step a3, using magnetron sputtering or electron-beam deposition methods, deposit thickness is on the photoresist with line membrane structure
100nm-1 μm of metal film；
It is step a4, with solidification glue that wavy metal is film adhered on an end face of cavity sleeve pipe；
Step a5, photoresist is eroded using corrosive liquid, obtain wavy metal film.
The specific method of step a is as follows：
Step a1, one layer of photoresist of painting in substrate, the substrate is monocrystalline silicon or glass with plane characteristic；
Step a2, using the lay photoetching mask plate for designing, the method not exclusively exposed by photoetching is shifted line membrane structure
Onto photoresist；
Step a3, using reactive ion etching technology etch substrate, line membrane structure is transferred in substrate；
Step a4, one layer of photoresist of spin coating again in the substrate with line membrane structure；
Step a5, using magnetron sputtering or electron-beam deposition methods, deposit thickness is on the photoresist with line membrane structure
100nm-1 μm of metal film；
It is step a6, with solidification glue that wavy metal is film adhered on an end face of cavity sleeve pipe；
Step a7, photoresist is eroded using corrosive liquid, obtain wavy metal film.
Beneficial effect：
Firstth, complicated for the diaphragm processing technology based on silicon, silica and silicon nitride material, fabrication cycle is long, into
This problem high, present invention employs metal material, by very simple metal working process --- photoetching technique and sputtering
Technology, you can obtain metallic membrane, therefore simplify processing technology, reduce fabrication cycle, reduce cost of manufacture.
Secondth, the reason for for the diaphragm based on PET material because of processing technology, causes the thickness cannot to reduce, and reduces machinery
The problem of sensitivity, present invention employs metal material, using its surface tension it is small the characteristics of, coordinate the 3rd supporting layer edge to have
The structure design of passage, it is ensured that metallic membrane pressure at both sides difference is less than threshold value, makes the machinery of metallic membrane not cracky special
Property gives full play to, and so as to the making thickness of diaphragm is greatly reduced, improves the mechanical sensitivity of the miniature hydrophone of optical fiber.
3rd, become on-plane surface under ambient pressure for flat membrane structure so that reflected light signal has error, reduce
The problem of detection accuracy, the present invention have devised technical scheme of a set of use metal line film as diaphragm again, line membrane structure,
The deformation of its center point can be improved, it is ensured that its center remains as approximate plane under ambient pressure, effectively reduce anti-
Optical signal error is penetrated, is conducive to improving detection accuracy.
Brief description of the drawings
Fig. 1 is the structural representation of fiber F-P sound pressure sensor of the present invention based on metal line film.
Fig. 2 is the schematic cross-section of wavy metal film fold ripple.
Fig. 3 is the process chart one of step a in the fiber F-P sound pressure sensor processing method based on metal line film.
Fig. 4 is the process chart two of step a in the fiber F-P sound pressure sensor processing method based on metal line film.
Fig. 5 is the schematic diagram of the lay photoetching mask plate for designing.
In figure：1 wavy metal film, 2 cavity sleeve pipes, 3 lock pins, 4 optical fiber, 5 solidification glues, 6 substrates, 7 photoresists, 8 corrosion
Liquid.
Specific embodiment
The specific embodiment of the invention is described in further detail below in conjunction with the accompanying drawings.
Specific embodiment one
The fiber F-P sound pressure sensor based on metal line film of the present embodiment, structural representation is as shown in Figure 1.This is based on
The fiber F-P sound pressure sensor of metal line film includes wavy metal film 1, cavity sleeve pipe 2, lock pin 3 and optical fiber 4；The metal
Corrugated film 1 is fitted in an end face of cavity sleeve pipe 2 with solidification glue 5, from the another of cavity sleeve pipe 2 as acoustic pressure sensing element
One end face is inserted with the lock pin 3 coordinated with the inwall of cavity sleeve pipe 2, and the center of lock pin 3 is inserted with the smooth optical fiber 4 of end surface grinding；Cavity
Sleeve pipe 2, lock pin 3 and optical fiber 4 are coaxially disposed, and are fixed with solidification glue 5 between sleeve pipe 2 and lock pin 3, with admittedly between lock pin 3 and optical fiber 4
Change glue 5 to fix；F-P cavity is constituted between wavy metal film 1 and the end face of optical fiber 4, wavy metal film 1 is under the effect of extraneous acoustic pressure
Vibration is produced, causes the change that F-P cavity is long, and then cause reflected light signal to change, so as to detect extraneous acoustic pressure relevant information.
Specific embodiment two
The fiber F-P sound pressure sensor based on metal line film of the present embodiment, on the basis of specific embodiment one, enters one
Step limits the structure of wavy metal film 1.The wavy metal film 1 is middle structure of the smooth, edge with fold ripple；
The diameter with diameter greater than optical fiber 6 of the central field portion point, central field portion assigns to the end face of optical fiber 6 for F-P cavity；The fold
The cross sectional shape of ripple is periodic sinusoidal, rectangle, triangle or trapezoidal.
In the present embodiment, the cross sectional shape of the fold ripple is periodic rectangle, as shown in Figure 2.
Specific embodiment three
The fiber F-P sound pressure sensor based on metal line film of the present embodiment, on the basis of specific embodiment one, enters one
Step limits its processing method, comprises the following steps：
Step a, making wavy metal film 1；
Step b, wavy metal film 1 is fitted on an end face of cavity sleeve pipe 2 with solidification glue 5；
Step c, the lock pin 3 coordinated with the inwall of cavity sleeve pipe 2 from the insertion of another end face of cavity sleeve pipe 2, and with solidifying
Glue 5 is fixed；
Step d, from the center of the lock pin 3 insertion smooth optical fiber 4 of end surface grinding, adjust the length of optical fiber 4, and consolidated with solidification glue 5
It is fixed.
Specific embodiment four
The fiber F-P sound pressure sensor based on metal line film of the present embodiment, on the basis of specific embodiment three, enters one
Step limits the specific method of step a, and process chart is as shown in figure 3, the specific method of step a is as follows：
Step a1, one layer of photoresist 7 of painting in substrate 6, the substrate 6 is monocrystalline silicon or glass with plane characteristic；
Step a2, using the lay photoetching mask plate for designing, the method not exclusively exposed by photoetching is shifted line membrane structure
Onto photoresist 7；
Step a3, using magnetron sputtering or electron-beam deposition methods on the photoresist 7 with line membrane structure deposit thickness
It is 100nm-1 μm of metal film；
Step a4, wavy metal film 1 is fitted on an end face of cavity sleeve pipe 2 with solidification glue 5；
Step a5, photoresist 7 is eroded using corrosive liquid 8, obtain wavy metal film 1.
Specific embodiment five
The fiber F-P sound pressure sensor based on metal line film of the present embodiment, on the basis of specific embodiment three, enters one
Step limits the specific method of step a, and process chart is as shown in figure 4, the specific method of step a is as follows：
Step a1, one layer of photoresist 7 of painting in substrate 6, the substrate 6 is monocrystalline silicon or glass with plane characteristic；
Step a2, using the lay photoetching mask plate for designing, the method not exclusively exposed by photoetching is shifted line membrane structure
Onto photoresist 7；
Step a3, using reactive ion etching technology etch substrate 6, line membrane structure is transferred in substrate 6；
Step a4, one layer of photoresist 7 of spin coating again in the substrate 6 with line membrane structure；
Step a5, using magnetron sputtering or electron-beam deposition methods on the photoresist 7 with line membrane structure deposit thickness
It is 100nm-1 μm of metal film；
Step a6, wavy metal film 1 is fitted on an end face of cavity sleeve pipe 2 with solidification glue 5；
Step a7, photoresist 7 is eroded using corrosive liquid 8, obtain wavy metal film 1.
In specific embodiment four and specific embodiment five, the schematic diagram of the lay photoetching mask plate for designing is as shown in Figure 5.
Claims (5)
1. the fiber F-P sound pressure sensor of metal line film is based on, it is characterised in that including wavy metal film (1), cavity sleeve pipe
(2), lock pin (3) and optical fiber (4)；The wavy metal film (1) is fitted in logical as acoustic pressure sensing element with solidification glue (5)
One end face of chamber sleeve pipe (2), the lock pin coordinated with cavity sleeve pipe (2) inwall is inserted with from another end face of cavity sleeve pipe (2)
(3), lock pin (3) center is inserted with the smooth optical fiber of end surface grinding (4)；Cavity sleeve pipe (2), lock pin (3) and optical fiber (4) coaxially set
Put, it is fixed with solidification glue (5) between sleeve pipe (2) and lock pin (3), it is fixed with solidification glue (5) between lock pin (3) and optical fiber (4)；Gold
F-P cavity is constituted between category corrugated film (1) and optical fiber (4) end face, wavy metal film (1) is produced under the effect of extraneous acoustic pressure and shaken
It is dynamic, cause the change that F-P cavity is long, and then cause reflected light signal to change, so as to detect extraneous acoustic pressure relevant information.
2. the fiber F-P sound pressure sensor based on metal line film according to claim 1, it is characterised in that the metal
Corrugated film (1) is middle structure of the smooth, edge with fold ripple；The central field portion point with diameter greater than optical fiber
(4) diameter, central field portion assigns to optical fiber (4) end face for F-P cavity；The cross sectional shape of the fold ripple is for periodically just
String shape, rectangle, triangle or trapezoidal.
3. the fiber F-P sound pressure sensor based on wavy metal film according to claim 1, it is characterised in that processing
Method is comprised the following steps：
Step a, making wavy metal film (1)；
Step b, wavy metal film (1) is fitted on an end face of cavity sleeve pipe (2) with solidification glue (5)；
Step c, the lock pin (3) coordinated with cavity sleeve pipe (2) inwall from another end face insertion of cavity sleeve pipe (2), and with admittedly
Change glue (5) fixed；
Step d, from lock pin (3) center insertion smooth optical fiber (4) of end surface grinding, adjust optical fiber (4) length, and use solidification glue
(5) it is fixed.
4. the fiber F-P sound pressure sensor based on wavy metal film according to claim 3, it is characterised in that step a
Specific method it is as follows：
Step a1, one layer of photoresist (7) of painting in substrate (6), the substrate (6) is monocrystalline silicon or glass with plane characteristic
Glass；
Step a2, using the lay photoetching mask plate for designing, line membrane structure is transferred to light by the method not exclusively exposed by photoetching
In photoresist (7)；
Step a3, using magnetron sputtering or electron-beam deposition methods, deposit thickness is on the photoresist (7) with line membrane structure
100nm-1 μm of metal film；
Step a4, wavy metal film (1) is fitted on an end face of cavity sleeve pipe (2) with solidification glue (5)；
Step a5, photoresist (7) is eroded using corrosive liquid (8), obtain wavy metal film (1).
5. the fiber F-P sound pressure sensor based on wavy metal film according to claim 3, it is characterised in that step a
Specific method it is as follows：
Step a1, one layer of photoresist (7) of painting in substrate (6), the substrate (6) is monocrystalline silicon or glass with plane characteristic
Glass；
Step a2, using the lay photoetching mask plate for designing, line membrane structure is transferred to light by the method not exclusively exposed by photoetching
In photoresist (7)；
Step a3, using reactive ion etching technology etch substrate (6), line membrane structure is transferred in substrate (6)；
Step a4, one layer of photoresist (7) of spin coating again in the substrate (6) with line membrane structure；
Step a5, using magnetron sputtering or electron-beam deposition methods, deposit thickness is on the photoresist (7) with line membrane structure
100nm-1 μm of metal film；
Step a6, wavy metal film (1) is fitted on an end face of cavity sleeve pipe (2) with solidification glue (5)；
Step a7, photoresist (7) is eroded using corrosive liquid (8), obtain wavy metal film (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710046777.5A CN106768279A (en) | 2017-01-20 | 2017-01-20 | Optical fiber F P sound pressure sensors based on metal line film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710046777.5A CN106768279A (en) | 2017-01-20 | 2017-01-20 | Optical fiber F P sound pressure sensors based on metal line film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106768279A true CN106768279A (en) | 2017-05-31 |
Family
ID=58943904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710046777.5A Pending CN106768279A (en) | 2017-01-20 | 2017-01-20 | Optical fiber F P sound pressure sensors based on metal line film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106768279A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108663538A (en) * | 2018-03-30 | 2018-10-16 | 安徽大学 | It is a kind of to feel shake convoluted diaphragm and the optical fiber acceleration transducer based on it and micro-vibration detecting system |
| CN108761641A (en) * | 2018-07-27 | 2018-11-06 | 纤瑟(天津)新材料科技有限公司 | The method for preparing micro-nano structure in fiber end face by micro-nano structure transfer method |
| CN111256808A (en) * | 2020-03-04 | 2020-06-09 | 电子科技大学 | Optical fiber micro-opto-electro-mechanical system ultrasonic sensor with composite membrane structure and manufacturing method thereof |
| CN112763052A (en) * | 2020-12-16 | 2021-05-07 | 华中科技大学 | Broadband acoustic wave sensor for anti-electronic monitoring |
| CN114414031A (en) * | 2021-12-14 | 2022-04-29 | 西安理工大学 | Energy storage battery monitoring and early warning device and method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102095488A (en) * | 2010-12-03 | 2011-06-15 | 中国电子科技集团公司第四十九研究所 | Optical fiber silicon micro sound pressure sensor-based packaging structure of low-stress convoluted diaphragm |
-
2017
- 2017-01-20 CN CN201710046777.5A patent/CN106768279A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102095488A (en) * | 2010-12-03 | 2011-06-15 | 中国电子科技集团公司第四十九研究所 | Optical fiber silicon micro sound pressure sensor-based packaging structure of low-stress convoluted diaphragm |
Non-Patent Citations (2)
| Title |
|---|
| 刘彬 等: ""银薄膜结构的高灵敏度Fabry-Perot光纤声压传感器"", 《哈尔滨工业大学学报》 * |
| 陈露 等: ""波纹膜片式光纤法布里-珀罗压力传感器"", 《光学学报》 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108663538A (en) * | 2018-03-30 | 2018-10-16 | 安徽大学 | It is a kind of to feel shake convoluted diaphragm and the optical fiber acceleration transducer based on it and micro-vibration detecting system |
| CN108663538B (en) * | 2018-03-30 | 2020-06-16 | 安徽大学 | Vibration-sensing corrugated diaphragm, optical fiber acceleration sensor and micro-vibration detection system |
| CN108761641A (en) * | 2018-07-27 | 2018-11-06 | 纤瑟(天津)新材料科技有限公司 | The method for preparing micro-nano structure in fiber end face by micro-nano structure transfer method |
| CN111256808A (en) * | 2020-03-04 | 2020-06-09 | 电子科技大学 | Optical fiber micro-opto-electro-mechanical system ultrasonic sensor with composite membrane structure and manufacturing method thereof |
| CN112763052A (en) * | 2020-12-16 | 2021-05-07 | 华中科技大学 | Broadband acoustic wave sensor for anti-electronic monitoring |
| CN114414031A (en) * | 2021-12-14 | 2022-04-29 | 西安理工大学 | Energy storage battery monitoring and early warning device and method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106768279A (en) | Optical fiber F P sound pressure sensors based on metal line film | |
| CN106644039A (en) | Optical fiber mini-sized hydrophone | |
| CN109941956B (en) | MEMS sensor and electronic equipment | |
| CN109211281B (en) | A kind of sensor | |
| CN108195494B (en) | Optical pressure sensor based on slit surface plasmon effect and pressure detection method | |
| CN106569155B (en) | A kind of cantilever beam interdigital capacitor magnetic field sensing probe based on giant magnetostrictive thin film | |
| CN108931321A (en) | Beam-island-film integration resonant mode pressure sensor structure and manufacturing method | |
| CN105036054A (en) | MEMS pressure sensor and manufacturing method thereof | |
| CN109275080A (en) | A kind of sensor | |
| CN107917750A (en) | A kind of MEMS hot types sound particle sensor | |
| GB2589415A (en) | An in-plane displacement sensing unit based on a simplified optical nanometer scale resonant cavity | |
| CN105784222A (en) | Bulk acoustic wave wall shear stress sensor | |
| CN105181231A (en) | Pressure sensor of packaging structure and preparation method thereof | |
| CN108663113A (en) | A kind of optic fibre cantilev vibrating sensor and preparation method thereof | |
| CN107664548A (en) | A kind of EFPI fibre optic compression sensors and preparation method thereof | |
| CN106323515A (en) | Optical fiber F-P cavity stress relief pressure sensor | |
| TWI530846B (en) | Acoustic wave touch plate and manufacturing method of the same | |
| CN104181331B (en) | A kind of piezoresistance type acceleration sensor and its manufacturing method | |
| WO2014063409A1 (en) | Capacitive accelerometer of h-shaped beam and manufacturing method | |
| WO2021135112A1 (en) | Mems device | |
| CN1614371A (en) | Pressure sensor of optical fiber micro-electromechanic system | |
| JP2001267588A (en) | Capacitance-type semiconductor sensor and its manufacturing method | |
| CN102435557A (en) | Metal grating coupling SPR (Surface Plasmon Resonance) detection chip and manufacturing method thereof | |
| CN107543648B (en) | High temperature shear stress sensor based on double F-P chambers and preparation method thereof | |
| CN114279551B (en) | Optical fiber sound pressure sensor based on MEMS technology and preparation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170531 |
|
| WD01 | Invention patent application deemed withdrawn after publication |