CN114414031A - Energy storage battery monitoring and early warning device and method - Google Patents
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- CN114414031A CN114414031A CN202111526082.XA CN202111526082A CN114414031A CN 114414031 A CN114414031 A CN 114414031A CN 202111526082 A CN202111526082 A CN 202111526082A CN 114414031 A CN114414031 A CN 114414031A
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- 238000004146 energy storage Methods 0.000 title claims abstract description 63
- 238000012544 monitoring process Methods 0.000 title claims abstract description 55
- 238000000034 method Methods 0.000 title claims description 26
- 239000013307 optical fiber Substances 0.000 claims abstract description 88
- 238000004519 manufacturing process Methods 0.000 claims abstract description 6
- 239000010408 film Substances 0.000 claims description 78
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 38
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 38
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 37
- 229910052710 silicon Inorganic materials 0.000 claims description 37
- 239000010703 silicon Substances 0.000 claims description 37
- 239000000758 substrate Substances 0.000 claims description 30
- 238000005516 engineering process Methods 0.000 claims description 20
- 229920002120 photoresistant polymer Polymers 0.000 claims description 16
- 230000003287 optical effect Effects 0.000 claims description 15
- 238000005530 etching Methods 0.000 claims description 13
- 230000005236 sound signal Effects 0.000 claims description 10
- 239000010409 thin film Substances 0.000 claims description 10
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 7
- 238000002310 reflectometry Methods 0.000 claims description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- 238000000708 deep reactive-ion etching Methods 0.000 claims description 6
- 238000004518 low pressure chemical vapour deposition Methods 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 4
- 238000000347 anisotropic wet etching Methods 0.000 claims description 3
- 238000004806 packaging method and process Methods 0.000 claims description 3
- 229910000679 solder Inorganic materials 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 description 4
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- 238000003860 storage Methods 0.000 description 2
- 206010000369 Accident Diseases 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/42—Methods or arrangements for servicing or maintenance of secondary cells or secondary half-cells
- H01M10/48—Accumulators combined with arrangements for measuring, testing or indicating the condition of cells, e.g. the level or density of the electrolyte
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Abstract
The invention discloses an energy storage battery monitoring and early warning device which comprises an MEMS (micro electro mechanical system) film optical fiber sound pressure sensor, wherein the MEMS film optical fiber sound pressure sensor is connected with an optical fiber regulator through an optical fiber, and the optical fiber regulator is connected with a monitoring computer through a network cable. The invention also discloses a manufacturing method of the MEMS film optical fiber sound pressure sensor, and the invention can be used for carrying out real-time monitoring and early warning on thermal runaway of an energy storage battery in an energy storage power station.
Description
Technical Field
The invention belongs to the technical field of monitoring of overcharge faults of energy storage batteries of energy storage power stations, relates to an energy storage battery monitoring and early warning device, and further relates to an early warning method of the monitoring and early warning device.
Background
At present, the power load of a power system is continuously increased, the running peak-valley difference of a power grid is gradually enlarged, and an energy storage power station is developed for solving the problem of insufficient power during the power consumption peak. The power station can store surplus electric energy in the power utilization valley period by using the energy storage battery, can solve the problems of insufficient power and the like when a new energy system is connected to a network on a large scale, and ensures the continuity and stability of the operation of the whole power grid. In many energy storage power stations at present, a smoke alarm device is still used for alarm processing of fire, however, fire smoke caused by overcharge and explosion of energy storage batteries in the power stations is an accident, and therefore early warning work needs to be carried out on the energy storage batteries.
The overcharge of energy storage battery can lead to inside temperature to rise, and inside chemical receives the temperature influence can decompose a large amount of gas, makes battery internal pressure grow, can lead to battery safety valve to open suddenly after a period of time, if the battery continues the overcharge this moment, will probably lead to battery thermal runaway, causes the fire incident. In the process, the safety valve can generate a special sound at the moment of being broken, the acoustic signal characteristic of the safety valve is obvious, and the sensitivity of the safety valve is superior to that of the existing schemes of visible light, infrared light, gas detection and the like, so that the acoustic signal can be effectively recognized as the characteristic acoustic signal to monitor the energy storage battery and give an early warning.
Compared with the traditional sound pressure sensor, the Micro-Electro-Mechanical System (MEMS) sound pressure sensor manufactured based on the MEMS has the advantages of intelligence, small volume, low cost, high performance, low power consumption and the like, and is widely applied to the fields of instrument measurement, wireless communication, aerospace and the like. In addition, compared with electrical sensors, the optical fiber sensor is passive in nature and strong in electromagnetic interference resistance, is very suitable for measurement of various devices in a power grid, and has been researched greatly at home and abroad in recent years.
Disclosure of Invention
The invention aims to provide an energy storage battery monitoring and early warning device which can be used for carrying out real-time monitoring and early warning on thermal runaway of an energy storage battery in an energy storage power station.
The invention also provides a monitoring and early warning method of the energy storage battery monitoring and early warning device.
The invention also provides a manufacturing method of the MEMS film optical fiber sound pressure sensor in the energy storage battery monitoring and early warning device.
The first technical scheme adopted by the invention is that the energy storage battery monitoring and early warning device comprises an MEMS film optical fiber sound pressure sensor, wherein the MEMS film optical fiber sound pressure sensor is connected with an optical fiber regulator through an optical fiber, and the optical fiber regulator is connected with a monitoring computer through a network cable.
The first technical scheme of the invention is also characterized in that:
the MEMS film optical fiber sound pressure sensor has the following structure: the silicon nitride film is characterized by comprising a silicon nitride film, a silicon substrate is arranged below the silicon nitride film, a cavity is formed between the silicon nitride film and the silicon substrate, and two ends of the silicon nitride film and two ends of the silicon substrate are fixedly supported through supporting layers respectively; a round through hole is formed in the center of the silicon substrate, and a collimation and beam expansion optical fiber is installed in the cylindrical hole along the vertical direction; the bottom of the silicon nitride film is provided with a high-reflectivity film.
The silicon nitride film is a textured film structure, and the corrugation of the textured film structure is triangular.
The collimating beam expanding optical fiber forms interference fringes on the high emissivity film, and an F-P interference cavity is formed between the silicon nitride film and the silicon substrate.
The second technical scheme adopted by the invention is that the monitoring and early warning method of the energy storage battery monitoring and early warning device specifically comprises the following processes: the internal temperature of the energy storage battery is increased due to overcharge of the energy storage battery, chemical substances in the energy storage battery are affected by temperature and can decompose a large amount of gas, the internal pressure of the energy storage battery is increased, the safety valve on the energy storage battery is suddenly opened, a characteristic sound signal is generated in the moment that the safety valve is broken, after the MEMS thin-film optical fiber sound pressure sensor arranged near the safety valve 2 receives the signal, the optical signal is transmitted to the optical fiber demodulator by utilizing the optical fiber, the signal is converted into an electric signal after the demodulation of the optical fiber demodulator, the electric signal is uploaded to the monitoring computer through a network cable, and the monitoring computer realizes the positioning monitoring of the signal and informs a worker to process the signal in time through the safety alarm module.
The third technical scheme adopted by the invention is that the manufacturing method of the MEMS film optical fiber sound pressure sensor specifically comprises the following steps:
step 1, coating a layer of photoresist on the upper surface of a silicon substrate;
step 2, exposing and developing the light diffracted by the parallel light beams through Mask in the photoresist to form a pattern;
step 5, etching the silicon substrate by using a DRIE deep etching technology through a hydrofluoric acid solution to form a supporting layer, and sputtering and depositing SiO on the lower surface of the silicon nitride film2A high reflectance film;
step 6, preparing a circular silicon wafer with the same diameter as the silicon nitride film, and also utilizing the DRIE technology to axially etch a circular through hole at the center of the circular silicon wafer, wherein the diameter of the circular through hole is larger than that of the collimation beam expansion optical fiber;
and 8, mounting the collimation and beam expansion optical fiber in the round through hole through solder, and packaging to obtain the MEMS film optical fiber sound pressure sensor.
The invention has the beneficial effects that: the miniature early warning sensor is arranged on each battery, so that the battery positioning method has the capability of positioning the fault battery directly, and the error problems of the method for mathematically analyzing the fault distance and positioning the fault battery by using the time transmitted by the sound velocity are solved. In addition, the MEMS film optical fiber sound pressure sensor is based on an MEMS manufacturing process and an optical interference technology, optical fibers are used for carrying out rapid and low-loss optical signal transmission, and the MEMS film optical fiber sound pressure sensor has the advantages of small size, low cost, high sensitivity, strong anti-electromagnetic interference capability and the like, can better carry out real-time monitoring and early warning on the overcharge accident of the energy storage battery, and provides an effective method for avoiding the occurrence of safety accidents.
Drawings
Fig. 1 is a schematic structural diagram of an energy storage battery monitoring and early warning device according to the present invention;
FIG. 2 is a schematic structural diagram of an MEMS thin-film optical fiber sound pressure sensor in the energy storage battery monitoring and early warning device of the invention;
FIG. 3 is a block diagram of the working principle of the energy storage battery monitoring and early warning device of the present invention;
fig. 4 is a process flow chart of the MEMS thin-film optical fiber sound pressure sensor in the energy storage battery monitoring and early warning apparatus of the present invention.
In the figure, 1, an MEMS thin-film optical fiber sound pressure sensor, 101, a silicon nitride film, 102, a supporting layer, 103, a silicon substrate, 104, a collimating and beam expanding optical fiber and 105, a high-reflectivity film;
2. safety valve, 3 energy storage battery, 4 optical fiber, 5 optical fiber demodulator, 6 network cable, 7 monitoring computer.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
The energy storage battery monitoring and early warning device comprises an MEMS (micro electro mechanical system) film optical fiber sound pressure sensor 1, an optical fiber demodulator 5 and a monitoring computer 7, wherein the MEMS film optical fiber sound pressure sensor is a micro-sensor manufactured based on a micro-electromechanical system technology and a Fabry-Perot (Fabry-Perot) interference technology;
the MEMS film optical fiber sound pressure sensor 1 is arranged near a safety valve 2 of each energy storage battery 3 in a power station, and the sensor is manufactured based on an MEMS process, so that the sensor has the advantages of small size and small occupied space, and only one energy storage battery 3 is used for description in the figure. Therefore, the sound early warning sensor device of the safety valve 2 is formed, and the sound early warning sensor devices of the safety valves of the energy storage batteries form a sound early warning sensor array of an energy storage battery system.
The MEMS film optical fiber sound pressure sensor is manufactured based on an MEMS technology, mainly comprises a silicon nitride film, a supporting layer, a silicon substrate, a high-reflectivity film, a collimation and beam expansion optical fiber and the like, can convert sound signals into optical signals, and transmits the optical signals through the optical fiber; the optical fiber demodulator is used for demodulating an optical signal acquired by the sensor after sound-light conversion into an electric signal and uploading the electric signal to the monitoring computer through a network cable; the monitoring computer monitors the received sound signal of the safety valve of the energy storage battery in real time, and can give an early warning after the safety valve is suddenly opened.
As shown in fig. 2, the structure of the MEMS thin-film optical fiber acoustic pressure sensor 1 is: the silicon nitride film structure comprises a silicon nitride film 101, a silicon substrate 103 is arranged below the silicon nitride film 101, a cavity is formed between the silicon nitride film 101 and the silicon substrate 103, and two ends of the silicon nitride film 101 and two ends of the silicon substrate 103 are fixedly supported through a support layer 102 respectively; a round through hole is formed in the center of the silicon substrate 103, and a collimation and beam expansion optical fiber 104 is arranged in the cylindrical hole along the vertical direction; the bottom of the silicon nitride film 101 is provided with a high-reflectivity film 105, and based on an optical Fabry-Perot (Fabry-Perot) interference technology, interference fringes are formed on the high-reflectivity film through a collimating beam expanding optical fiber 104, and an F-P interference cavity, which can be referred to as an F-P cavity for short, is formed in the cavity.
The silicon nitride film 101 is of a textured film structure, the surface corrugation is triangular, the mechanical deformation performance of the diaphragm can be effectively improved, the internal stress of the film is reduced, and the sensitivity of sound pressure generated when the detection safety valve is popped up is improved. The support layer 102 is a silicon substrate after etching, and plays a role in fixing and supporting the silicon nitride film. The silicon substrate is used for installing the collimation and beam expansion optical fiber after being etched, and is connected with the supporting layer by utilizing a silicon-silicon bonding technology.
The MEMS film optical fiber sound pressure sensor 1 is processed by adopting a micro-electro-mechanical technology, has small volume, is convenient to be combined with an energy storage battery system, is more accurate and sensitive in detecting characteristic sound signals generated by the safety valve broken by gas, and is beneficial to point-to-point installation.
The MEMS film optical fiber sound pressure sensor 1 can be arranged near a safety valve of each energy storage battery to detect characteristic sound signals of the energy storage batteries. The corresponding information data of a single characteristic sound signal is preset at the detection end of the computer, and the sound signal detected by the sensor is transmitted to the detection end through conversion and is compared with the preset information, so that the fault battery can be accurately positioned in time.
The MEMS film optical fiber sound pressure sensor 1 utilizes the optical fiber 4 to transmit signals, the volume of the optical fiber 4 is fine, so that the transmission optical fiber 4 is arranged in a gap between two adjacent batteries in a battery storage rack to be wired, then the optical fiber 4 of each sensor is bound and arranged together at the back of the battery storage rack, and the optical fiber is introduced into a power station monitoring center and connected to the optical fiber demodulator 5.
The optical fiber demodulator 5 can be installed at a fixed point in a power station monitoring center, collects transmission data of each optical fiber 4 based on the multiplexing technology of the demodulator, and can perform real-time data monitoring only by connecting through a network cable 6 and uploading signals to a monitoring computer 7.
The optical fiber demodulator 5 is provided with an ASE broadband light source, a 3db coupler and a photoelectric conversion module. And an optical signal emitted by the ASE broadband light source and an optical signal transmitted by an optical fiber are emitted to the photoelectric conversion module through the 3db coupler, the optical signal is demodulated, the optical signal is converted into an electric signal, and the array real-time monitoring of the energy storage battery in the energy storage power station is realized by utilizing an optical fiber multiplexing technology.
The monitoring computer 7 is provided with a monitoring and early warning safety module which can monitor the characteristic sound signal generated by the safety valve being broken in real time, and the monitoring computer monitors the signal and informs related personnel to process the signal in time through the safety warning module so as to prevent the battery from being overcharged continuously to cause fire.
The working principle of the energy storage battery monitoring and early warning device of the invention is that, as shown in fig. 3, the internal temperature is increased due to the overcharge of the energy storage battery 3, the chemical substances in the internal part are affected by the temperature to decompose a large amount of gas, the internal pressure is increased to cause the battery safety valve 2 to open suddenly, a characteristic sound signal is generated at the moment when the safety valve 2 is broken, at this moment, the MEMS thin-film optical fiber sound pressure sensor 1 (since the MEMS thin-film optical fiber sound pressure sensor 1 is installed near the safety valve 2 of each energy storage battery 3, the number of the MEMS thin-film optical fiber sound pressure sensors 1 is n, the sensors in fig. 3 represent the MEMS thin-film optical fiber sound pressure sensors 1) which receive the signal, the optical signal is transmitted to the optical fiber demodulator 5 by using the optical fiber 4, and is converted into an electric signal after being demodulated by the optical fiber demodulator 5 and then transmitted to the monitoring computer 7 through the network 6, the monitoring computer 7 realizes the positioning monitoring of the signal and informs related personnel to process in time through a safety alarm module so as to prevent the occurrence of fire.
The invention realizes real-time monitoring and early warning of the ejection of the safety valve 2 caused by the overcharge of the energy storage battery 3, realizes fault location of each energy storage battery 3 in the energy storage power station, is beneficial to rescue and prevention of safety personnel in time, and prevents fire accidents caused by further overcharge, thereby causing greater property loss and casualties.
Energy storage battery monitoring of the present inventionIn the working process of the early warning device: when sound is generated from the outside, the generated sound pressure acts on the silicon nitride film 101 to cause the silicon nitride film 101 to deform towards the direction of the cavity, so that the length of the F-P cavity is changed, and the reflection intensity I of the interference light beam is causedRPhase difference from interferenceSimply, the optical signal is caused to change, and the relationship is as follows:
wherein R is the reflectance of the reflecting surface, I0Is the incident light intensity.
Therefore, the optical signal can be transmitted through the optical fiber 4, and is demodulated into an electric signal by the optical fiber demodulator 5, and the electric signal is uploaded to the monitoring computer 7, so that the monitoring of the characteristic acoustic signal of the safety valve 2 can be realized.
The invention also provides a process manufacturing method of the MEMS film optical fiber sound pressure sensor 1, which comprises the following specific steps:
(1) FIG. 4a is a silicon substrate on which a photoresist is coated by a spin coating method, as shown in FIG. 4 b;
(2) after the photoresist is spin-coated, the parallel light beams are exposed and developed in the photoresist through the light diffracted by the Mask of the Mask to form a pattern, as shown in fig. 4 c;
(3) after the photoresist pattern is successfully formed, etching the underlying silicon substrate 103 by using a KOH anisotropic wet etching method with the patterned photoresist as a mask, as shown in fig. 4 d;
(4) after the etching is finished, removing the photoresist by using an acetone solution, and depositing a silicon nitride film 101 on the patterned silicon substrate 103 by using a Low Pressure Chemical Vapor Deposition (LPCVD) technology, as shown in FIG. 4 e;
(5) the silicon substrate 103 is etched away by a hydrofluoric acid (HF) solution using a DRIE deep etching technique to form a support layer 102, and the lower surface of the silicon nitride film 101 is provided withSurface sputter deposited with SiO2 High reflectivity film 105, as shown in fig. 4 f.
(6) Then preparing a circular silicon wafer g with the same diameter as the film, and also axially etching a circular through hole by using the DRIE technology, wherein the diameter of the circular through hole is larger than that of the collimation beam expanding optical fiber 104, as shown in FIG. 4 h;
(7) bonding the 4h and the 4f into a whole by using a silicon-silicon bonding technology to realize a cavity type structure, as shown in fig. 4 i; finally, the collimating beam expanding optical fiber 104 is installed in the circular through hole through solder, and the MEMS film optical fiber sound pressure sensor 1 is obtained through packaging.
Claims (7)
1. Energy storage battery monitoring and early warning device, its characterized in that: the MEMS film optical fiber sound pressure sensor is connected with an optical fiber regulator through an optical fiber, and the optical fiber regulator is connected with a monitoring computer through a network cable.
2. The energy storage battery monitoring and early warning device of claim 1, wherein: the MEMS film optical fiber sound pressure sensor is arranged near a safety valve of each energy storage battery.
3. The energy storage battery monitoring and early warning device as claimed in claim 1 or 2, wherein: the MEMS film optical fiber sound pressure sensor has the following structure: the silicon nitride film is characterized by comprising a silicon nitride film, a silicon substrate is arranged below the silicon nitride film, a cavity is formed between the silicon nitride film and the silicon substrate, and two ends of the silicon nitride film and two ends of the silicon substrate are fixedly supported through supporting layers respectively; a round through hole is formed in the center of the silicon substrate, and a collimation and beam expansion optical fiber is installed in the cylindrical hole along the vertical direction; the bottom of the silicon nitride film is provided with a high-reflectivity film.
4. The energy storage battery monitoring and early warning device of claim 3, wherein: the silicon nitride film is of a textured film structure, and the corrugation of the textured film structure is triangular.
5. The energy storage battery monitoring and early warning device of claim 3, wherein: the collimation beam expanding optical fiber forms interference fringes on the high emissivity film, and an F-P interference cavity is formed between the silicon nitride film and the silicon substrate.
6. The monitoring and early warning method of the energy storage battery monitoring and early warning device is characterized in that: the method specifically comprises the following steps: the internal temperature of the energy storage battery is increased due to overcharge of the energy storage battery, chemical substances in the energy storage battery are affected by temperature and can decompose a large amount of gas, the internal pressure of the energy storage battery is increased, the safety valve on the energy storage battery is suddenly opened, a characteristic sound signal is generated in the moment that the safety valve is broken, after the MEMS thin-film optical fiber sound pressure sensor arranged near the safety valve 2 receives the signal, the optical signal is transmitted to the optical fiber demodulator by utilizing the optical fiber, the signal is converted into an electric signal after the demodulation of the optical fiber demodulator, the electric signal is uploaded to the monitoring computer through a network cable, and the monitoring computer realizes the positioning monitoring of the signal and informs a worker to process the signal in time through the safety alarm module.
The manufacturing method of the MEMS film optical fiber sound pressure sensor is characterized by comprising the following steps: the method specifically comprises the following steps:
step 1, coating a layer of photoresist on the upper surface of a silicon substrate;
step 2, exposing and developing the light diffracted by the parallel light beams through Mask in the photoresist to form a pattern;
step 3, after the photoresist pattern is formed, etching the silicon substrate by using the patterned photoresist as a mask by using a KOH anisotropic wet etching method;
step 4, after the etching is finished, removing the photoresist by using an acetone solution, and depositing a silicon nitride film on the patterned silicon substrate by using a Low Pressure Chemical Vapor Deposition (LPCVD) technology;
step 5, etching the silicon substrate by using a DRIE deep etching technology through a hydrofluoric acid solution to form a supporting layer, and sputtering and depositing SiO on the lower surface of the silicon nitride film2A high reflectance film;
step 6, preparing a circular silicon wafer with the same diameter as the silicon nitride film, and also utilizing the DRIE technology to axially etch a circular through hole at the center of the circular silicon wafer, wherein the diameter of the circular through hole is larger than that of the collimation beam expansion optical fiber;
step 7, bonding the silicon nitride film processed in the step 5 and the round silicon wafer processed in the step 6 into a whole by using a silicon-silicon bonding technology to realize a cavity type structure;
and 8, mounting the collimation and beam expansion optical fiber in the round through hole through solder, and packaging to obtain the MEMS film optical fiber sound pressure sensor.
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2024055209A1 (en) * | 2022-09-14 | 2024-03-21 | 宁德时代新能源科技股份有限公司 | Hard-shell battery detection device, method, and system |
GB2624307A (en) * | 2022-10-13 | 2024-05-15 | Bae Systems Plc | Improvements in a cell assembly safety system |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103542926A (en) * | 2013-10-09 | 2014-01-29 | 中国船舶重工集团公司第七一五研究所 | Optical-fiber micro-electro-mechanical hydrophone and production method thereof |
CN104502016A (en) * | 2014-12-04 | 2015-04-08 | 刘玉珏 | F-P pressure sensor with adjustable cavity length based on MEMS technology and formation method thereof |
CN106768279A (en) * | 2017-01-20 | 2017-05-31 | 哈尔滨工业大学 | Optical fiber F P sound pressure sensors based on metal line film |
CN109238437A (en) * | 2018-08-28 | 2019-01-18 | 电子科技大学 | A kind of Fabry-perot optical fiber sonic probe based on silicon nitride MEMS film |
CN110188737A (en) * | 2019-06-18 | 2019-08-30 | 郑州大学 | The thermal runaway method for early warning of acoustical signal processing is opened based on lithium cell safety valve |
CN111007461A (en) * | 2019-12-26 | 2020-04-14 | 郑州大学 | Lithium battery thermal runaway positioning system and method based on acoustic signals |
CN210576113U (en) * | 2019-10-08 | 2020-05-19 | 国网江苏省电力有限公司电力科学研究院 | Energy storage battery cabin |
CN111256808A (en) * | 2020-03-04 | 2020-06-09 | 电子科技大学 | Optical fiber micro-opto-electro-mechanical system ultrasonic sensor with composite membrane structure and manufacturing method thereof |
CN214040083U (en) * | 2021-02-04 | 2021-08-24 | 昆明理工大学 | Energy storage system lithium ion battery fire early warning system |
CN113466701A (en) * | 2021-06-29 | 2021-10-01 | 武汉理工大学 | FBG-based energy storage battery internal multi-parameter integrated online monitoring system and method |
CN113552110A (en) * | 2021-07-16 | 2021-10-26 | 中国民航大学 | Raman spectrum-based dynamic early warning system and method for thermal runaway of lithium ion battery |
-
2021
- 2021-12-14 CN CN202111526082.XA patent/CN114414031A/en active Pending
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103542926A (en) * | 2013-10-09 | 2014-01-29 | 中国船舶重工集团公司第七一五研究所 | Optical-fiber micro-electro-mechanical hydrophone and production method thereof |
CN104502016A (en) * | 2014-12-04 | 2015-04-08 | 刘玉珏 | F-P pressure sensor with adjustable cavity length based on MEMS technology and formation method thereof |
CN106768279A (en) * | 2017-01-20 | 2017-05-31 | 哈尔滨工业大学 | Optical fiber F P sound pressure sensors based on metal line film |
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