CN106756893A - A kind of graphite boat handling equipment and its loading and unloading method - Google Patents
A kind of graphite boat handling equipment and its loading and unloading method Download PDFInfo
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- CN106756893A CN106756893A CN201611022032.7A CN201611022032A CN106756893A CN 106756893 A CN106756893 A CN 106756893A CN 201611022032 A CN201611022032 A CN 201611022032A CN 106756893 A CN106756893 A CN 106756893A
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- pallet
- graphite boat
- bearing area
- expansion link
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
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Abstract
A kind of graphite boat handling equipment and its loading and unloading method, device includes manipulator, pallet, expansion link and support, manipulator is connected with support, on pallet bearing area, the first articulated section and the second articulated section are sequentially provided with along the direction away from graphite boat, first articulated section and support lower hinge, second articulated section is hinged with expansion link lower end, and expansion link upper end is hinged with frame upper.Method includes that step S1, mechanical hand-motion tray motion to bearing area are located at directly over the support gap of graphite boat；S2, expansion link are shunk, and pallet is rotated down around the first articulated section, and bearing area moves to graphite boat side；S3, mechanical hand-motion pallet vertical move downwardly to bearing area positioned at support clearance side lower section；S4, expansion link elongation, pallet are rotated up around the first articulated section, and bearing area is entered in support gap；S5, mechanical hand-motion pallet vertical are moved to pick up graphite boat to leave and take boat position upwards.The present invention smoothly can capture graphite boat in horizontal movement insufficient space.
Description
Technical field
The present invention relates to solar silicon cell production technology, more particularly to a kind of graphite boat handling equipment and its up and down
Material method.
Background technology
PECVD（Plasma Enhanced Chemical Vapor Deposition, PECVD
Deposition apparatus）It is one of most important process equipment on solar silicon cell production line, can be in silicon cell by the equipment
One layer of anti-reflective film of upper plating, the purpose of cell piece efficiency is improved so as to reach.Graphite boat is that silicon cell holds in technical process
Load instrument, silicon cell by it is automatic insert take piece machine（It is automatic insert to take piece machine be realize the silicon cell production automation another
Visual plant, inserts and takes out graphite boat for silicon chip, realizes that silicon chip is exchanged between the gaily decorated basket and graphite boat）Load graphite boat,
Graphite boat is transferred to by the automatic loading and unloading system of PECVD again and pushes away boat system, push away boat system most at last graphite boat transmit to
In reaction boiler tube.After the completion of technique, then opposite transmitting procedure is performed, the silicon cell after technical process will be completed and taken out.
As shown in Figure 1, the main working process of traditional graphite boat automatic loading and unloading system is：Manipulator（In figure not
Sign）Pallet 1 is driven to enter from horizontal direction in the support gap 21 at the two ends of graphite boat 2, will by the upward action of manipulator
Graphite boat 2 is picked up, and after the disengaging of graphite boat 2 takes boat position, to boat target location is put, then manipulator is moved downward robot movement
Graphite boat 2 is fallen, support gap 21 is exited in the horizontal counter motion of last machinery hand-motion pallet 1.
On existing silicon cell production line, it is automatic insert the graphite boat 2 that takes between piece machine and PECVD transmit, it is necessary to produce
Human users carry boat dolly to realize.With the continuous progress of technology, in order to realize the automation of silicon cell production line, improve
Production efficiency, it is desirable to realize PECVD device and it is automatic insert take the automatic transmission of graphite boat 2 between piece machine, need to exist for this
The guide rail of transmission graphite boat 2 is installed on PECVD base plates, graphite boat 2 is grabbed from the cache shelf of PECVD using automatic loading and unloading system
Get on guide rail, then by guide rail by graphite boat 2 be sent to it is automatic insert take piece machine.Traditional graphite boat automatic loading and unloading system
Its pallet 1 can only enter in the support gap 21 of graphite boat 2 from horizontal direction, and picking and placeing the position of boat needs to be filled to pallet 1 is reserved
The horizontal movement space of foot, because the guide rail and PECVD down tubes installed are pushed away, boat is basic in sustained height, cause it is traditional it is automatic on
Its pallet 1 of blanking system is not enough in the horizontal space that the upper and lower pipe of guide rail picks and places boat, can be interfered in motion process, it is impossible to suitable
Profit enters in the support gap 21 at the two ends of graphite boat 2.
The content of the invention
The technical problem to be solved in the present invention is to overcome the deficiencies in the prior art, there is provided a kind of simple structure, it is easy to use,
The graphite boat handling equipment that can be smoothly captured in the case of horizontal space deficiency.
Further, the present invention also provides the loading and unloading method of the graphite boat handling equipment.
In order to solve the above technical problems, the present invention uses following technical scheme：
A kind of graphite boat handling equipment, including manipulator, pallet and support, the manipulator are connected with the support, graphite
Boat handling equipment also includes expansion link, and bearing area, the first hinge are sequentially provided with along the direction away from graphite boat on the pallet
Socket part and the second articulated section, first articulated section and the support lower hinge, second articulated section and the expansion link
Lower end is hinged, and the expansion link upper end is hinged with the frame upper.
As the further improvement of above-mentioned technical proposal：
The detection briquetting for detecting the presence of graphite boat is provided with the bearing area.
The locating slot that position form fit is picked up with graphite boat is provided with the bearing area.
The expansion link is electric pushrod, cylinder or hydraulic cylinder.
The pallet is provided with a pair catch for detecting pallet rotation limit position.
The support includes top board and a pair of side plates below top board, and the top board is fixedly connected with the side plate,
The expansion link is located between a pair of side plates and upper end is hinged with the top board, and a pair of hangers are installed with the pallet, described
First articulated section is two and is divided on a pair of hangers that the hanger is corresponded with the side plate and is hinged.
The manipulator is connected with the top board.
A kind of loading and unloading method of above-mentioned graphite boat handling equipment, comprises the following steps：
S1, pallet positioning：Mechanical hand-motion tray motion to bearing area is located at directly over the support gap of graphite boat；
S2, pallet are opened：Expansion link is shunk, and pallet is rotated down around the first articulated section, and bearing area moves to graphite boat side；
S3, pallet decline：Mechanical hand-motion pallet vertical moves downwardly to bearing area positioned at support clearance side lower section；
S4, pallet closure：Expansion link is extended, and pallet is rotated up around the first articulated section, and bearing area is entered in support gap；
S5, crawl graphite boat：Mechanical hand-motion pallet vertical is moved to pick up graphite boat to leave and takes boat position upwards.
A kind of loading and unloading method of above-mentioned graphite boat handling equipment, comprises the following steps：
S1, pallet positioning：Mechanical hand-motion tray motion is until bearing area is located at directly over the support gap of graphite boat；
S2, pallet are opened：Expansion link extends, and pallet is rotated up around the first articulated section, and bearing area moves to graphite boat side；
S3, pallet decline：Mechanical hand-motion pallet vertical moves downwardly to bearing area positioned at support clearance side lower section；
S4, pallet closure：Expansion link is shunk, and pallet is rotated down around the first articulated section, and bearing area enters in support gap；
S5, crawl graphite boat：Mechanical hand-motion pallet vertical is moved to pick up graphite boat to leave and takes boat position upwards.
Compared with prior art, the advantage of the invention is that：Graphite boat handling equipment simple structure disclosed by the invention,
During pickup graphite boat, can be first by mechanical hand-motion tray motion up to bearing area is located at directly over the support gap of graphite boat, so
Rear telescopic rod is shunk, and pallet is rotated down around the first articulated section, and bearing area moves to graphite boat side, then rear machinery hand-motion support
Disk vertical downward movement to bearing area is located at support clearance side lower section, and last expansion link elongation, pallet is upward around the first articulated section
Rotate, bearing area enters in support gap, mechanical hand-motion pallet vertical is moved to pick up graphite boat to leave upwards and takes boat
Position, it is very easy to use, make the bearing area of pallet suitable by only relying on the vertical movement of manipulator and the rotary motion of pallet
Profit enters in the support gap of graphite boat, and without the motion of pallet horizontal direction, considerably reduces horizontal motion empty
Between demand, it is to avoid interference during pickup graphite boat.
The loading and unloading method of graphite boat handling equipment of the present invention, step is simple, easy to operate, can be in horizontal space not
Successful pickup graphite boat in the case of foot.
Brief description of the drawings
Fig. 1 is the structural representation of traditional graphite boat automatic loading and unloading system.
Fig. 2 is the main structure diagram of graphite boat handling equipment of the present invention.
Fig. 3 is the dimensional structure diagram of graphite boat handling equipment of the present invention.
Fig. 4 is the principle schematic of graphite boat handling equipment of the present invention.
Principle schematic when Fig. 5 is graphite boat handling equipment use state of the present invention.
Fig. 6 is the first step and structural representation at second of graphite boat loading and unloading embodiment of the method one of the present invention.
Structural representation when Fig. 7 is the 3rd of graphite boat loading and unloading embodiment of the method one of the present invention.
Structural representation when Fig. 8 is the 4th of graphite boat loading and unloading embodiment of the method one of the present invention.
Structural representation when Fig. 9 is the 5th of graphite boat loading and unloading embodiment of the method one of the present invention.
Each label is represented in figure：1st, pallet；11st, bearing area；12nd, the first articulated section；13rd, the second articulated section；14th, position
Groove；15th, hanger；2nd, graphite boat；21st, support gap；3rd, support；31st, top board；32nd, side plate；4th, expansion link；5th, briquetting is detected；6、
Catch.
Specific embodiment
The present invention is described in further details below with reference to Figure of description and specific embodiment.
As shown in Figures 2 and 3, the graphite boat handling equipment of the present embodiment, including manipulator（Not shown in figure）, pallet
1 and support 3, manipulator is connected with support 3, and graphite boat handling equipment also includes expansion link 4, along away from graphite on pallet 1
The direction of boat 2 is sequentially provided with bearing area 11, the first articulated section 12 and the second articulated section 13, the first articulated section 12 and the bottom of support 3
It is hinged, the second articulated section 13 is hinged with the lower end of expansion link 4, the upper end of expansion link 4 and the upper articulation of support 3.As shown in Figure 4 and Figure 5,
Expansion link 4 is simplified to the transformable straight-bar of length, and it is the rotating shaft between the upper end of expansion link 4 and the top of support 3 to rotate secondary A, is rotated
Secondary C is the rotating shaft between the lower end of expansion link 4 and pallet 1, and it is the rotating shaft between pallet 1 and the bottom of support 3 to rotate secondary B, rotates secondary
A, B are fixed relative to the position of manipulator, therefore are simplified to the rotation pair of position fixation, and rotating secondary C then can be along with B point
For the track in the center of circle is moved, in the present embodiment, pallet 1 is provided with a pair catch 6 for detecting the rotation limit position of pallet 1.
When pallet 1 is in closure state, the contractive action of expansion link 4 can be formed along the upward pulling force of expansion link 4 in C points, produce pallet 1
One moment of torsion turned clockwise along rotation secondary B, the one of catch 6 on pallet 1 is encountered installed in pallet front shroud（In figure
Do not identify）Microswitch so as to expansion link 4 stop indentation instruction, the closing course of pallet 1 then pass through another piece of catch 6
Its closing position is controlled with microswitch.
It is the graphite boat handling equipment simple structure, very easy to use, only rely on vertical movement and the pallet 1 of manipulator
Rotary motion the bearing area 11 of pallet 1 can be made smoothly to enter in the support gap 21 of graphite boat 2, and without the level of pallet 1
The motion in direction, considerably reduce the demand in horizontal motion space, it is to avoid interference during pickup graphite boat 2.
In the present embodiment, the detection briquetting 5 for detecting the presence of graphite boat 2 is provided with bearing area 11, when bearing area 11 is entered
After entering in support gap 21 and contact with graphite boat 2, detection briquetting 5 is pressurized and is triggered, and manipulator starts vertically after receiving instruction
So as to graphite boat 2 be lifted, setting detection briquetting 5 can be prevented effectively from manipulator misoperation for motion upwards.
In the present embodiment, the locating slot 14 that position form fit is picked up with graphite boat 2, graphite boat 2 are provided with bearing area 11
Pickup position enter in bearing area 11 after effectively positioned, graphite boat 2 is slided in preventing motion, and improve equipment can
By property.
In the present embodiment, expansion link 4 is electric pushrod, electric pushrod also known as linear actuator, is a kind of rotation by motor
The power-jdriven gear of the dynamic straight reciprocating motion for being changed into push rod of transhipment, reliability is high, is easy to implement far distance controlled, concentrates
Control and automatically control.Cylinder or hydraulic cylinder can be also used in other embodiments, can be by the rotation of telescopic drive pallet 1
Can.
In the present embodiment, support 3 includes top board 31 and a pair of side plates 32 located at the lower section of top board 31, top board 31 and side plate 32
It is fixedly connected, expansion link 4 is located between a pair of side plates 32 and upper end is hinged with top board 31, and a pair of hangers 15 are installed with pallet 1,
First articulated section 12 is two and is divided on a pair of hangers 15 that hanger 15 is corresponded with side plate 32 and is hinged, on the graphite boat
Blanking device is symmetrical structure, and balance, good stability after stress, reliability are high.
In the present embodiment, manipulator is connected with top board 31, and in other embodiments, manipulator also can be with any block side plate 32
Connection is connected with a pair of side plates 32 simultaneously.
The embodiment one of the loading and unloading method of above-mentioned graphite boat handling equipment
The loading and unloading method of the graphite boat handling equipment of the present embodiment, comprises the following steps：
As shown in fig. 6, S1, pallet 1 are positioned：Mechanical hand-motion pallet 1 moves to bearing area 11 positioned at the support gap of graphite boat 2
Directly over 21, it is ensured that pallet 1 with original state after follow-up rotation twice through being entered in support gap 21；
S2, pallet 1 are opened：Expansion link 4 is shunk, and pallet 1 is rotated down around the first articulated section 12, and bearing area 11 moves to graphite boat
2 sides, it is to avoid during subsequent mechanical hand-motion 1 vertical downward movement of pallet, bearing area 11 interferes with graphite boat 2；
As shown in fig. 7, S3, pallet 1 decline：The mechanical vertical downward movement of hand-motion pallet 1 to bearing area 11 is located at support gap
21 side-lowers, when the distance of vertical downward movement is rotated up with pallet 1 can flatly with the support position of graphite boat 2（Hold
The upside of support gap 21）Contact as optimal；
As shown in figure 8, S4, pallet 1 are closed：Expansion link 4 extends, and pallet 1 is rotated up around the first articulated section 12, and bearing area 11 is entered
Enter to support gap 21, bearing area 11 can smoothly by the support of graphite boat 2 during subsequent mechanical hand-motion 1 upward vertical movement of pallet
Rise；
S5, crawl graphite boat 2：Graphite boat 2 is picked up to leave and takes boat position by the mechanical upward vertical movement of hand-motion pallet 1.
The loading and unloading method of the graphite boat handling equipment, step is simple, easy to operate, only relies on the vertical fortune of manipulator
The rotary motion of dynamic and pallet 1 can be such that the bearing area 11 of pallet 1 smoothly enters in the support gap 21 of graphite boat 2, and need not
The motion of the horizontal direction of pallet 1, considerably reduce the demand in horizontal motion space, it is to avoid during pickup graphite boat 2
Interference.
The embodiment two of the loading and unloading method of above-mentioned graphite boat handling equipment
The loading and unloading method of the graphite boat handling equipment of the present embodiment is essentially identical with embodiment one, and difference is：
First expansion link 4 can be extended in S2, pallet 1 is rotated up around the first articulated section 12, bearing area 11 moves to the side of graphite boat 2
Face；Correspondingly, then need to shrink expansion link 4 in S4, pallet 1 is rotated down around the first articulated section 12, and bearing area 11 enters to
In support gap 21, also can reach and the identical technique effect of embodiment one.
Furthermore, it is necessary to explanation, because the telescopic process and embodiment one of expansion link 4 are conversely, then need to expansion link 4
Maximal dilation amount carry out accommodation or change different size expansion link 4.
Although the present invention is disclosed above with preferred embodiment, but it is not limited to the present invention.It is any to be familiar with ability
The technical staff in domain, in the case where technical solution of the present invention scope is not departed from, all using the technology contents pair of the disclosure above
Technical solution of the present invention makes many possible variations and modification, or the Equivalent embodiments for being revised as equivalent variations.Therefore, it is every
Without departing from the content of technical solution of the present invention, according to the technology of the present invention essence to any simple modification made for any of the above embodiments,
Equivalent variations and modification, all should fall in the range of technical solution of the present invention protection.
Claims (9)
1. a kind of graphite boat handling equipment, including manipulator, pallet（1）And support（3）, the manipulator and the support
（3）Connection, it is characterised in that：Graphite boat handling equipment also includes expansion link（4）, the pallet（1）On along away from graphite
Boat（2）Direction be sequentially provided with bearing area（11）, the first articulated section（12）With the second articulated section（13）, first articulated section
（12）With the support（3）Lower hinge, second articulated section（13）With the expansion link（4）Lower end is hinged, described flexible
Bar（4）Upper end and the support（3）Upper articulation.
2. graphite boat handling equipment according to claim 1, it is characterised in that：The bearing area（11）Inside be provided with for
Detect the presence of graphite boat（2）Detection briquetting（5）.
3. graphite boat handling equipment according to claim 1, it is characterised in that：The bearing area（11）Inside it is provided with and stone
Mo Zhou（2）Pick up the locating slot of position form fit（14）.
4. graphite boat handling equipment according to claim 1, it is characterised in that：The expansion link（4）For electric pushrod,
Cylinder or hydraulic cylinder.
5. graphite boat handling equipment according to claim 1, it is characterised in that：The pallet（1）It is provided with a pair of use
To detect pallet（1）The catch of rotation limit position（6）.
6. graphite boat handling equipment according to any one of claim 1 to 5, it is characterised in that：The support（3）Bag
Include top board（31）And located at top board（31）A pair of side plates of lower section（32）, the top board（31）With the side plate（32）It is fixed to connect
Connect, the expansion link（4）Positioned at a pair of side plates（32）Between and upper end and the top board（31）It is hinged, the pallet（1）It is upper solid
It is provided with a pair of hangers（15）, first articulated section（12）For two and it is divided into a pair of hangers（15）On, the hanger（15）
With the side plate（32）One-to-one corresponding is hinged.
7. graphite boat handling equipment according to claim 6, it is characterised in that：The manipulator and the top board（31）
Connection.
8. the loading and unloading method of the graphite boat handling equipment any one of a kind of claim 1 to 7, it is characterised in that：
Comprise the following steps：
S1, pallet（1）Positioning：Mechanical hand-motion pallet（1）Move to bearing area（11）Positioned at graphite boat（2）Support gap
（21）Surface；
S2, pallet（1）Open：Expansion link（4）Shrink, pallet（1）Around the first articulated section（12）Rotate down, bearing area（11）Fortune
Move to graphite boat（2）Side；
S3, pallet（1）Decline：Mechanical hand-motion pallet（1）Vertical downward movement is to bearing area（11）Positioned at support gap（21）
Side-lower；
S4, pallet（1）Closure：Expansion link（4）Elongation, pallet（1）Around the first articulated section（12）It is rotated up, bearing area（11）Enter
Enter to support gap（21）It is interior；
S5, crawl graphite boat（2）：Mechanical hand-motion pallet（1）Upward vertical movement is by graphite boat（2）Pick up to leave and take boat position
Put.
9. the loading and unloading method of the graphite boat handling equipment any one of a kind of claim 1 to 7, it is characterised in that：
Comprise the following steps：
S1, pallet（1）Positioning：Mechanical hand-motion pallet（1）Motion is until bearing area（11）Positioned at graphite boat（2）Support gap
（21）Surface；
S2, pallet（1）Open：Expansion link（4）Elongation, pallet（1）Around the first articulated section（12）It is rotated up, bearing area（11）Fortune
Move to graphite boat（2）Side；
S3, pallet（1）Decline：Mechanical hand-motion pallet（1）Vertical downward movement is to bearing area（11）Positioned at support gap（21）
Side-lower；
S4, pallet（1）Closure：Expansion link（4）Shrink, pallet（1）Around the first articulated section（12）Rotate down, bearing area（11）Enter
Enter support gap（21）It is interior；
S5, crawl graphite boat（2）：Mechanical hand-motion pallet（1）Upward vertical movement is by graphite boat（2）Pick up to leave and take boat position
Put.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611022032.7A CN106756893B (en) | 2016-11-21 | 2016-11-21 | A kind of graphite boat handling equipment and its loading and unloading method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611022032.7A CN106756893B (en) | 2016-11-21 | 2016-11-21 | A kind of graphite boat handling equipment and its loading and unloading method |
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| Publication Number | Publication Date |
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| CN106756893A true CN106756893A (en) | 2017-05-31 |
| CN106756893B CN106756893B (en) | 2019-05-14 |
Family
ID=58969642
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| Application Number | Title | Priority Date | Filing Date |
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| CN201611022032.7A Active CN106756893B (en) | 2016-11-21 | 2016-11-21 | A kind of graphite boat handling equipment and its loading and unloading method |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108300981A (en) * | 2017-12-20 | 2018-07-20 | 湖南红太阳光电科技有限公司 | A kind of preheating cabinet for graphite boat |
| CN110745821A (en) * | 2019-12-11 | 2020-02-04 | 凯盛石墨碳材料有限公司 | Automatic feeding and discharging device for graphite purification furnace |
| CN111754490A (en) * | 2020-06-28 | 2020-10-09 | 湖南红太阳光电科技有限公司 | Graphite boat sheet-reversing detection method, device and system based on vision |
| CN112407896A (en) * | 2020-11-05 | 2021-02-26 | 苏州质达飞检测科技有限公司 | Foldable quantitative material transmission equipment |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040040510A1 (en) * | 2002-09-04 | 2004-03-04 | Anthony Dip | Semiconductor wafer susceptor |
| CN101866990A (en) * | 2010-06-18 | 2010-10-20 | 无锡尚德太阳能电力有限公司 | Automatic wafer ascending and descending device of quartz boat |
| CN102709212A (en) * | 2012-03-20 | 2012-10-03 | 深圳市大族光伏科技股份有限公司 | Automatic loading and unloading device for PECVD (plasma enhanced chemical vapor deposition) equipment |
| CN202549895U (en) * | 2012-01-12 | 2012-11-21 | 无锡尚德太阳能电力有限公司 | Solar cell substrate feeding and blanking device of plasma enhanced CVD system |
| CN204946877U (en) * | 2015-09-09 | 2016-01-06 | 张家港市超声电气有限公司 | Silicon chip flower basket inclination flip device |
| CN105609456A (en) * | 2015-12-24 | 2016-05-25 | 中国电子科技集团公司第四十八研究所 | Graphite boat carrying apparatus and interconnection type graphite boat loading and unloading sheet production line |
-
2016
- 2016-11-21 CN CN201611022032.7A patent/CN106756893B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040040510A1 (en) * | 2002-09-04 | 2004-03-04 | Anthony Dip | Semiconductor wafer susceptor |
| CN101866990A (en) * | 2010-06-18 | 2010-10-20 | 无锡尚德太阳能电力有限公司 | Automatic wafer ascending and descending device of quartz boat |
| CN202549895U (en) * | 2012-01-12 | 2012-11-21 | 无锡尚德太阳能电力有限公司 | Solar cell substrate feeding and blanking device of plasma enhanced CVD system |
| CN102709212A (en) * | 2012-03-20 | 2012-10-03 | 深圳市大族光伏科技股份有限公司 | Automatic loading and unloading device for PECVD (plasma enhanced chemical vapor deposition) equipment |
| CN204946877U (en) * | 2015-09-09 | 2016-01-06 | 张家港市超声电气有限公司 | Silicon chip flower basket inclination flip device |
| CN105609456A (en) * | 2015-12-24 | 2016-05-25 | 中国电子科技集团公司第四十八研究所 | Graphite boat carrying apparatus and interconnection type graphite boat loading and unloading sheet production line |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108300981A (en) * | 2017-12-20 | 2018-07-20 | 湖南红太阳光电科技有限公司 | A kind of preheating cabinet for graphite boat |
| CN108300981B (en) * | 2017-12-20 | 2020-05-15 | 湖南红太阳光电科技有限公司 | Preheating box for graphite boat |
| CN110745821A (en) * | 2019-12-11 | 2020-02-04 | 凯盛石墨碳材料有限公司 | Automatic feeding and discharging device for graphite purification furnace |
| CN111754490A (en) * | 2020-06-28 | 2020-10-09 | 湖南红太阳光电科技有限公司 | Graphite boat sheet-reversing detection method, device and system based on vision |
| CN111754490B (en) * | 2020-06-28 | 2023-08-08 | 湖南红太阳光电科技有限公司 | Graphite boat film rewinding detection method, device and system based on vision |
| CN112407896A (en) * | 2020-11-05 | 2021-02-26 | 苏州质达飞检测科技有限公司 | Foldable quantitative material transmission equipment |
| CN112407896B (en) * | 2020-11-05 | 2022-12-13 | 晖朗(盐城)电子科技有限公司 | Foldable quantitative material transmission equipment |
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| CN106756893B (en) | 2019-05-14 |
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