CN111754490B - Graphite boat film rewinding detection method, device and system based on vision - Google Patents
Graphite boat film rewinding detection method, device and system based on vision Download PDFInfo
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Abstract
The invention discloses a graphite boat rewinding detection method, device and system based on vision, belongs to the technical field of tubular PECVD equipment, and is used for solving the technical problems of complex structure and low detection precision of the traditional rewinding detection, and the method comprises the following steps: acquiring graphite boat images acquired at different positions of a graphite boat; 2) Performing image processing on each graphite boat image to obtain a larger distance value of the distance between the edge of the silicon wafer in the graphite boat image and the edge of the graphite boat groove which is closer to the silicon wafer; 3) And judging whether the silicon wafers in the corresponding graphite boat grooves have the film reversing or not based on the larger distance value. The invention has the advantages of high detection precision, high detection reliability and the like.
Description
Technical Field
The invention mainly relates to the technical field of tubular PECVD equipment, in particular to a graphite boat film-rewinding detection method, device and system based on vision.
Background
The PECVD equipment is coating deposition equipment in semiconductor processing, can be applied to a photovoltaic cell silicon wafer coating process, and improves the power generation efficiency of the photovoltaic cell. The existing tubular PECVD equipment adopts a graphite boat to bear silicon wafers for coating process production, and the automatic loading and unloading system is connected with a conveying belt of an automatic inserting machine to realize automatic loading and unloading of the graphite boat. The graphite boat carries out silicon wafer inserting through the automatic inserting machine, then is conveyed to an automatic material feeding and discharging system of PECVD through the conveying belt, and finally is grabbed onto the boat pushing mechanism through the manipulator, so that automatic material feeding and discharging of the graphite boat is realized. In the process of conveying the graphite boat, due to the fact that the situation that the silicon wafers possibly fall down in the graphite boat is caused by mechanical vibration or improper insertion of the inserting machine, the falling silicon wafers can cause poor film coating, the product quality is affected, the product cost is increased, and therefore the phenomenon that the falling film occurs in the graphite boat needs to be detected before the graphite boat enters a furnace for processing.
The existing graphite boat rewinding detection device is complex and can only detect completely fallen reworks, for example, the patent application of the invention of a graphite boat lateral rewinding mechanism 201611117340.8 with a rewinding detection device is disclosed, a plurality of photoelectric switches are arranged above a graphite boat, a plurality of light reflecting seats are arranged below the graphite boat, when the graphite boat moves below the photoelectric switches, if no reworks exist in the graphite boat, light emitted by the photoelectric switches can pass through a groove on the graphite boat and then irradiate the light reflecting seats and reflect back to the photoelectric switches, and therefore the rewinding detection is achieved. However, the structure of the solution is complex, and the solution is influenced by the installation precision and the detection precision of the photoelectric switch, so that the silicon wafer with larger dumping angle can only be detected for dumping at a small angle or unstably placed silicon wafers can not be detected, and the dumping detection rate can not meet the requirements.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: aiming at the technical problems existing in the prior art, the invention provides a visual graphite boat rewinding detection method, device and system with high detection precision and high detection reliability.
In order to solve the technical problems, the technical scheme provided by the invention is as follows:
a graphite boat film rewinding detection method based on vision comprises the following steps:
1) Acquiring graphite boat images acquired at different positions of a graphite boat;
2) Performing image processing on each graphite boat image to obtain a larger distance value of the distance between the edge of the silicon wafer in the graphite boat image and the edge of the graphite boat groove which is closer to the silicon wafer;
3) And judging whether the silicon wafers in the corresponding graphite boat grooves have the film reversing or not based on the larger distance value.
As a further improvement of the above technical scheme:
in step 2), the specific process of image processing is:
2.1 Image calibration correction: calibrating the peripheral edge position coordinates of the graphite boat in the image, respectively carrying out trapezoidal correction on the two pictures according to edge positioning, and intercepting the image within the edge line of the graphite boat;
2.2 Image segmentation and truncation: dividing and intercepting each graphite boat image subjected to coordinate calibration and trapezoid correction, dividing and marking each graphite boat groove for placing a silicon wafer according to image coordinates, and obtaining n x m 'groove images (n, m';
2.3 Image gray scale processing: graying the cut-out 'slot image (n, m)' to convert the color image into a gray image;
2.4 Edge detection filtering): performing edge detection filtering on the single 'slot image (n, m)', and performing binarization processing on the filtered image to form an edge detected 'slot image (n, m)';
2.5 Image synthesis: overlapping the slot images (n, m) obtained by cutting each image to synthesize a new slot image (n, m), and then carrying out image stitching on the new slot image (n, m) according to the rank number to synthesize a final graphite boat binarization image;
2.6 Silicon wafer offset distance detection: and extracting the silicon wafer edge image in the graphite boat binarization image, and calculating a larger distance value k (n, m) of the distance between the silicon wafer edge and the edge of the graphite boat groove which is closer.
In step 2.1), the position coordinates of the peripheral edge of the graphite boat in the images are calibrated by identifying the coordinate marks preset at the edge of the graphite boat in each image.
In step 2.2), the process of segmentation and identification is: and (3) calibrating and placing silicon chip slot space images according to image coordinates, dividing the images, extracting single slot space images by adopting a mask algorithm, and extracting n x m slot images (n, m).
In step 2.5), the pixels of each pixel point are added and averaged to achieve a superposition of "slot images (n, m)".
In step 2.6), the number of pixel points is converted into the actual separation position distance by the two edge lines to obtain a larger distance value k (n, m).
The specific process of the step 3) is as follows:
taking an average value k (avg) of larger distance values of the distances between the edges of the silicon wafers and the edges of the grooves;
solving the deviation k1 (n, m) =k (n, m) -k (avg) of each silicon wafer edge from the groove edge; if the deviation k1 (n, m) is larger than the preset threshold k2, judging that the silicon wafer in the (n, m) th groove is inverted.
In step 1), graphite boat images acquired at both end positions of the graphite boat are acquired.
The invention also discloses a graphite boat film rewinding detection device based on vision, which comprises:
the acquisition module is used for acquiring graphite boat images acquired at different positions of the graphite boat;
the image processing module is used for carrying out image processing on each graphite boat image to obtain a larger distance value of the distance between the edge of the silicon wafer in the graphite boat image and the edge of the nearer graphite boat groove;
and the judging module is used for judging whether the silicon wafers in the corresponding graphite boat grooves have rewinding or not based on the larger distance value.
The invention further discloses a graphite boat film rewinding detection system based on vision, which comprises an image acquisition assembly and the graphite boat film rewinding detection device based on vision, wherein the image acquisition assembly comprises a plurality of image acquisition units which are arranged at different positions of a graphite boat to be detected.
Compared with the prior art, the invention has the advantages that:
the method comprises the steps of collecting front images of the silicon wafer graphite boat at different positions, processing the collected images through an image processing algorithm (including coordinate positioning of each point, segmentation and interception, image filtering, edge detection, software ranging and the like), detecting the edge distance between the edge of the silicon wafer and a graphite boat groove, judging whether the inverted film exists through the silicon wafer deviation distance, and detecting the silicon wafer inclination distance by adopting the image processing algorithm, wherein the influence of the deviation of the installation position of a detection device is small, the visual image collection precision is high, and the slightly deviated distance of the silicon wafer inclination can be detected, so that the detection precision and the detection reliability can be better; with the improvement of the vision acquisition precision, the detection precision can be correspondingly improved; in addition, through a plurality of vision collection images, can mutually verify, further improve the reliability of detecting.
Drawings
FIG. 1 is a flow chart of an embodiment of the method of the present invention.
FIG. 2 is an image of a cut out silicon wafer trench of the present invention.
Fig. 3 is a structural view of a detecting device according to an embodiment of the present invention.
The reference numerals in the figures denote: 1. a support frame; 2. a graphite boat; 3. a mounting bracket; 4. a first image acquisition unit; 5. and a second image acquisition unit.
Detailed Description
The invention is further described below with reference to the drawings and specific examples.
As shown in fig. 1 and 2, the visual graphite boat film-rewinding detection method of the embodiment includes the steps of:
1) Acquiring graphite boat 2 images acquired at different positions of the graphite boat 2;
2) Performing image processing on each graphite boat 2 image to obtain a larger distance value of the distance between the edge of the silicon wafer in the graphite boat 2 image and the edge of the graphite boat groove which is closer to the silicon wafer;
3) And judging whether the silicon wafers in the corresponding graphite boat grooves have the film reversing or not based on the larger distance value.
According to the invention, the front images of the silicon wafer graphite boat 2 are acquired at different positions, the acquired images are processed through an image processing algorithm to detect the edge distance between the edge of the silicon wafer and the graphite boat groove, and whether the inverted film exists is judged through the silicon wafer deviation distance; with the improvement of the vision acquisition precision, the detection precision can be correspondingly improved; in addition, through a plurality of vision collection images, can mutually verify, further improve the reliability of detecting.
In this embodiment, in step 2), the specific procedure of image processing is:
2.1 Image calibration correction: calibrating the peripheral edge position coordinates of the graphite boat 2 in the image, respectively carrying out trapezoidal correction on the two pictures according to edge positioning, and intercepting the image within the edge line of the graphite boat 2; specifically, the coordinates of the peripheral edge of the graphite boat 2 in the images are calibrated by identifying coordinate marks preset at the edge of the graphite boat 2 in each image;
2.2 Image segmentation and truncation: dividing and intercepting each graphite boat 2 image subjected to coordinate calibration and trapezoid correction, dividing and marking each graphite boat groove for placing a silicon wafer according to the image coordinates to obtain n x m 'groove images (n, m';
2.3 Image gray scale processing: graying the cut-out 'slot image (n, m)' to convert the color image into a gray image;
2.4 Edge detection filtering): performing edge detection filtering on the single 'slot image (n, m)', and performing binarization processing on the filtered image to form an edge detected 'slot image (n, m)';
2.5 Image synthesis: overlapping the slot images (n, m) cut and extracted by each image to synthesize a new slot image (n, m), and then splicing the new slot images (n, m) according to the rank number to synthesize a final binarized image of the graphite boat 2;
2.6 Silicon wafer offset distance detection: and extracting the silicon wafer edge image in the binarized image of the graphite boat 2, and calculating a larger distance value k (n, m) of the distance between the silicon wafer edge and the edge of the graphite boat slot which is closer.
In this embodiment, in step 2.2), the process of dividing and identifying is: and (3) calibrating and placing silicon chip slot space images according to image coordinates, dividing the images, extracting single slot space images by adopting a mask algorithm, and extracting n x m slot images (n, m).
In this embodiment, in step 2.5), pixels of each pixel point are added and averaged to realize superposition of "slot images (n, m)"; in step 2.6), the number of pixel points is converted into the actual separation position distance by the two edge lines to obtain a larger distance value k (n, m).
In this embodiment, the specific process of step 3) is as follows:
taking an average value k (avg) of larger distance values of the distances between the edges of the silicon wafers and the edges of the grooves;
solving the deviation k1 (n, m) =k (n, m) -k (avg) of each silicon wafer edge from the groove edge; if the deviation k1 (n, m) is larger than the preset threshold k2, judging that the silicon wafer in the (n, m) th groove is inverted.
In this embodiment, in step 1), images of the graphite boat 2 acquired at both end positions of the graphite boat 2 are acquired.
The invention also discloses a graphite boat film rewinding detection device based on vision, which comprises:
the acquisition module is used for acquiring graphite boat 2 images acquired at different positions of the graphite boat 2;
the image processing module is used for carrying out image processing on each graphite boat 2 image to obtain a larger distance value of the distance between the edge of the silicon wafer in the graphite boat 2 image and the edge of the graphite boat groove which is closer to the silicon wafer;
and the judging module is used for judging whether the silicon wafers in the corresponding graphite boat grooves have rewinding or not based on the larger distance value.
As shown in fig. 3, the invention also discloses a graphite boat film rewinding detection system based on vision, which comprises an image acquisition assembly and the graphite boat film rewinding detection device based on vision as described above, wherein the image acquisition assembly comprises a plurality of image acquisition units which are arranged at different positions of the graphite boat 2 to be detected. The graphite boat 2 is placed on the support frame 1, the support frame 1 is composed of high-temperature-resistant silicon carbide rods, the support frame 1 is installed in a boat taking and placing device, and the graphite boat 2 is moved to a position to be detected on the support frame for detection. In a specific embodiment, the number of the image acquisition units is two, namely the first image acquisition unit 4 and the second image acquisition unit 5, and the two image acquisition units are respectively arranged at two ends of the graphite boat 2 to be detected through the mounting bracket 3, and are used for respectively acquiring images of the silicon wafer loaded on the graphite boat 2 from two ends of the graphite boat 2, and the two images acquired from different positions have complementarity, so that the inverted film of the graphite boat 2 can be checked more reliably.
Specifically, the first image acquisition unit 4 and the second image acquisition unit 5 have the same structure and both comprise an ultra-high definition camera and a light supplementing lamp. In addition, obvious edge coordinate marks are arranged on the periphery of the graphite boat 2 and used for subsequent image processing coordinate positioning. Of course, in other embodiments, three, four or more image capturing units may be used to capture images of the graphite boat 2 from different positions of the graphite boat 2, so as to improve the reliability of the detection.
The method and apparatus of the present invention are further described in conjunction with a complete embodiment:
1. and (3) image acquisition: after the graphite boat 2 reaches the detection position, the first image acquisition unit 4 and the second image acquisition unit 5 start a light supplementing lamp, the images of the graphite boat 2 are respectively acquired by an ultra-high definition camera, and the acquired images are respectively a first image and a second image;
2. calibrating and correcting an image: respectively identifying the edge coordinate marks of the graphite boat 2 of the two images, calibrating the peripheral edge position coordinates of the graphite boat 2, respectively carrying out trapezoidal correction on the two images according to edge positioning, and intercepting the images within the edge line of the graphite boat 2;
3. image segmentation and interception: the method comprises the steps of respectively dividing and intercepting two graphite boat 2 images subjected to coordinate calibration and trapezoid correction, dividing and marking each groove for placing a silicon wafer according to image coordinates, and specifically comprises the following steps: according to the image coordinates, the space images of the silicon wafer grooves are calibrated and placed, the images are divided, a mask algorithm is adopted to extract single groove space images, n x m pieces of groove images (n, m) are extracted, as shown in fig. 3, the sizes of the silicon wafer grooves in fig. 3 are 190mm x 11mm, n x m pieces of silicon wafer groove images of the space images of the silicon wafer grooves are extracted altogether, and the n x m pieces of silicon wafer groove images are marked as the groove images (n, m);
4. image gray scale processing: graying the cut-out 'slot image (n, m)' to convert the color image into a gray image;
5. edge detection filtering: performing edge detection filtering on the single 'slot image (n, m)', wherein the filtering method can comprise a differential filter, a wavelet filter, a convolution filter and the like, and performing binarization processing on the filtered image to form the 'slot image (n, m)' after edge detection;
6. and (3) image synthesis: overlapping the slot images (n, m) of the first image and the second image which are cut and extracted, namely adding pixels of each pixel point, taking an average value, synthesizing a new slot image (n, m), and performing image stitching on the new slot image (n, m) according to a row and column number to synthesize a final binarized image of the graphite boat 2;
7. detecting the offset distance of a silicon wafer: extracting a silicon wafer edge image in the binarization image of the graphite boat 2, and calculating a larger distance value k (n, m) of the distance between the silicon wafer edge and the edge of the groove of the graphite boat 2 which is closer (the number of pixel points between two edge lines is converted into an actual interval position distance);
8. and (3) rewinding extraction and judgment: and (3) taking an average value of the edge distances of the spacing grooves of the edge images of the silicon wafers processed in the previous step, wherein the average value is k (avg), calculating the deviation k1 (n, m) =k (n, m) -k (avg) of the edge distances of each silicon wafer, and judging the silicon wafer in the (n, m) th groove of the wafer as a inverted wafer if the deviation k1 (n, m) is larger than a threshold k2 (the threshold is set according to the actual situation).
The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above examples, and all technical solutions belonging to the concept of the present invention belong to the protection scope of the present invention. It should be noted that modifications and adaptations to the invention without departing from the principles thereof are intended to be within the scope of the invention as set forth in the following claims.
Claims (9)
1. A graphite boat film rewinding detection method based on vision is characterized by comprising the following steps:
1) Acquiring images of the graphite boat (2) acquired at different positions of the graphite boat (2);
2) Performing image processing on the images of the graphite boats (2) to obtain a larger distance value of the distance between the edge of the silicon wafer in the image of the graphite boat (2) and the edge of the graphite boat groove which is closer to the edge;
3) Judging whether the silicon wafers in the corresponding graphite boat grooves have inverted wafers or not based on the larger distance value;
in step 2), the specific process of image processing is:
2.1 Image calibration correction: calibrating the peripheral edge position coordinates of the graphite boat in the image, respectively carrying out trapezoidal correction on the two images according to edge positioning, and intercepting the image within the edge line of the graphite boat (2);
2.2 Image segmentation and truncation: dividing and intercepting the images of each graphite boat (2) subjected to coordinate calibration and trapezoid correction respectively, dividing and marking each graphite boat groove for placing a silicon wafer according to the image coordinates to obtain n x m 'groove images (n, m';
2.3 Image gray scale processing: graying the cut-out 'slot image (n, m)' to convert the color image into a gray image;
2.4 Edge detection filtering): performing edge detection filtering on the single 'slot image (n, m)', and performing binarization processing on the filtered image to form an edge detected 'slot image (n, m)';
2.5 Image synthesis: overlapping the slot images (n, m) obtained by cutting each image to synthesize a new slot image (n, m), and then splicing the new slot images (n, m) according to the row and column numbers to synthesize a final binarized image of the graphite boat (2);
2.6 Silicon wafer offset distance detection: and extracting the silicon wafer edge image in the binarized image of the graphite boat (2), and calculating a larger distance value k (n, m) between the silicon wafer edge and the edge of the graphite boat groove which is closer.
2. The visual-based graphite boat rewinding detection method as claimed in claim 1, characterized in that in step 2.1), the coordinates of the peripheral edge position of the graphite boat (2) in the images are calibrated by identifying the coordinate marks preset at the edge of the graphite boat (2) in each image.
3. The visual graphite boat rewind detection method of claim 1, wherein in step 2.2), the process of dividing and marking is: and (3) calibrating and placing silicon chip slot space images according to image coordinates, dividing the images, extracting single slot space images by adopting a mask algorithm, and extracting n x m slot images (n, m).
4. A visual graphite boat rewinding detection method as claimed in any one of claims 1 to 3, characterized in that in step 2.5) pixels of each pixel are added and averaged to realize a superposition of "slot images (n, m)".
5. A method of detecting a graphite boat rewinding process based on vision as claimed in any one of claims 1 to 3, characterized in that in step 2.6) the number of pixel points is converted into the actual distance of the interval position by two edge lines to obtain a larger distance value k (n, m).
6. The visual graphite boat rewinding detection method as claimed in any one of claims 1 to 3, wherein the specific process of step 3) is as follows:
taking an average value k (avg) of larger distance values of the distances between the edges of the silicon wafers and the edges of the grooves;
solving the deviation k1 (n, m) =k (n, m) -k (avg) of each silicon wafer edge from the groove edge; if the deviation k1 (n, m) is larger than the preset threshold k2, judging that the silicon wafer in the (n, m) th groove is inverted.
7. A visual-based graphite boat rewinding detection method as claimed in any one of claims 1 to 3, characterized in that in step 1), images of the graphite boat (2) acquired at both end positions of the graphite boat (2) are acquired.
8. A vision-based graphite boat rewind detection apparatus for performing the steps of the vision-based graphite boat rewind detection method according to any one of claims 1 to 7, comprising:
the acquisition module is used for acquiring images of the graphite boat (2) acquired at different positions of the graphite boat (2);
the image processing module is used for carrying out image processing on the images of the graphite boats (2) to obtain a larger distance value of the distance between the edge of the silicon wafer in the image of the graphite boat (2) and the edge of the graphite boat groove which is closer to the edge of the silicon wafer;
and the judging module is used for judging whether the silicon wafers in the corresponding graphite boat grooves have rewinding or not based on the larger distance value.
9. The vision-based graphite boat film rewinding detection system is characterized by comprising an image acquisition assembly and the vision-based graphite boat film rewinding detection device as claimed in claim 8, wherein the image acquisition assembly comprises a plurality of image acquisition units which are arranged at different positions of a graphite boat (2) to be detected.
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