CN117805126A - In-boat defect online detection system and detection method of graphite boat for silicon wafer - Google Patents
In-boat defect online detection system and detection method of graphite boat for silicon wafer Download PDFInfo
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- CN117805126A CN117805126A CN202311847675.5A CN202311847675A CN117805126A CN 117805126 A CN117805126 A CN 117805126A CN 202311847675 A CN202311847675 A CN 202311847675A CN 117805126 A CN117805126 A CN 117805126A
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- 238000001514 detection method Methods 0.000 title claims abstract description 55
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 50
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 50
- 239000010439 graphite Substances 0.000 title claims abstract description 50
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 31
- 230000007547 defect Effects 0.000 title claims abstract description 31
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 31
- 239000010703 silicon Substances 0.000 title claims abstract description 31
- 235000012431 wafers Nutrition 0.000 claims description 29
- 239000007788 liquid Substances 0.000 claims description 11
- 230000000007 visual effect Effects 0.000 claims description 6
- 238000007689 inspection Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 11
- 239000000919 ceramic Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000012634 fragment Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000011895 specific detection Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention discloses an on-line detection system and a detection method for defects in a graphite boat for a silicon wafer, wherein the on-line detection system comprises a main body frame, shooting modules, a graphite boat, a control device and a computer, wherein each shooting module comprises a camera, a lens and a light source, the lens is arranged on the camera, the light source is arranged on the lens, the shooting modules are arranged at equal intervals, and the distance between two shooting modules spaced by one shooting module is smaller than the shooting range of the camera; the graphite boat is positioned below the shooting module; the control is used for controlling the shooting module to work, and the computer is used for processing the image information uploaded by the shooting module.
Description
Technical Field
The invention relates to an on-line detection system and a detection method for defects in a graphite boat for a silicon wafer.
Background
The invention discloses an on-line detection system and a detection method for defects in a graphite boat for a silicon wafer, and relates to the technical field of photovoltaic detection. In the existing TOPCON technical route in the photovoltaic industry, in order to improve the conversion efficiency and the production efficiency of silicon wafers, a graphite boat with better electric conduction and heat conduction performance is commonly used as a supporting carrier of solar silicon wafers in a film plating process section, and in the process of inserting, taking and glow discharging, the boat body is easily influenced by mechanical stress and structural thermal expansion to cause deformation of the silicon wafers in the boat and damage of the boat body, and the method mainly comprises the following steps: silicon wafer warpage, empty wafer, lamination, boat body boat blade deformation dislocation, stuck point damage, fragments in stuck points, ceramic sleeve damage and associated ceramic surface PLOY silicon precipitation and other defects.
However, the traditional detection structure needs at least two stations to acquire a plurality of image surfaces successively, a large amount of time cost and structure cost are needed to be invested, if fragments falling in a boat in the production process are not cleaned timely, the reflection of fragments under a camera can directly influence the deformation detection of a silicon wafer, even if a background plate is added, the background plate is still easily affected by high temperature, the deformation of a plate and even fire occur, potential risks are brought to the operation of equipment, and the detection requirements of the upper edge of the silicon wafer on the surface of the boat blade and the defects of the clamping points in the boat can not be met.
The invention comprises the following steps:
the invention aims to solve the defects in the prior art and provides an on-line detection system and method for defects in a graphite boat for a silicon wafer.
The on-line defect detection system for the graphite boat for the silicon wafer comprises a main body frame, a shooting module, the graphite boat, a control device and a computer, wherein the shooting module comprises a camera, a lens and a light source, the lens is arranged on the camera, the light source is arranged on the lens, the shooting modules are arranged at equal intervals, and the distance between two shooting modules separated by one shooting module is smaller than the shooting range of the camera; the graphite boat is positioned below the shooting module;
the control is used for controlling the shooting module to work, and the computer is used for processing the image information uploaded by the shooting module.
Working principle: the method comprises the steps of improving a detection mode of vertical shooting by an original camera matched with a fixed focus lens into a detection mode of the camera matched with a liquid zoom lens, wherein the specific detection mode is that in the process of the in-out movement of a graphite boat, when graphite boat in-out movement information data acquired by a sensor are received, a shooting setting is started, a graphite boat leaf image reaching a designated position is acquired, then an image plane with the boat leaf surface being about 20CM deep downwards is acquired in a zooming mode so as to realize detection of stuck point defects, and then a detection result processed by a system is displayed on a computer screen and is simultaneously transmitted to machine equipment; when the image is acquired, a photographing mode of multi-camera cross coverage is adopted, the upper and lower effective areas of each camera are extracted after the central boat leaf of each camera is shielded, and then the effective areas are synthesized through an algorithm.
The graphite boat in place is sensed, and the graphite boat further comprises a receiving sensor for sensing the graphite boat and transmitting a signal to the control device.
In order to capture satisfactory images, the camera is an area camera.
In order to acquire an image plane with the boat blade surface being about 20CM deep downwards so as to detect stuck point defects, the lens is a liquid zoom lens.
An on-line detection method for defects in a graphite boat of a graphite boat for a silicon wafer, which comprises the following steps:
s1: arranging a plurality of shooting modules in a cross coverage shooting mode;
s2: shooting a boat leaf image of a graphite boat reaching a designated position;
s3: acquiring an intra-boat image with the downward depth of the boat blade surface of about 20CM through a liquid zoom lens;
s4: receiving and processing a plurality of image data, and judging whether a plurality of detection positions such as boat leaves and boat interiors of the graphite boat have defects or not;
s5: uploading the detection result to the terminal.
In order to realize the shooting of the cross coverage so as to ensure the shooting graphite boat with multiple angles, the shooting mode of the cross coverage in S1 is as follows:
one shooting module is arranged at the center of the detection module, the detection module is moved to the center of the boat in the boat fixing mode, boat center boat leaves in the center camera visual field range are found, five boat leaves are arranged at intervals in the same mode as the center of the visual field range, two adjacent cameras are arranged until all cameras are popularized, the detection module comprises a plurality of shooting modules,
the shooting module comprises an area array camera, a liquid zoom lens and a light source, wherein the lens is arranged on the camera, and the light source is arranged on the lens.
Further preprocessing the appearance image of the upper surface of the silicon wafer acquired by multiple machine positions, and arranging shooting modules comprises the following steps: the method comprises the steps of extracting boat leaf characteristics in photos in an upper range and a lower range after shielding central three boat leaves, sequentially covering parameter adjusting ranges to edge boat leaves according to the preset number of pixels diffused outwards from the center, covering the central shielding positions of a single camera by the edge regions of adjacent cameras, covering all boats She Weizhi in a single boat groove according to the method, avoiding the influence of chip reflection under the cameras on deformation detection of silicon wafers, then sequentially shooting photos of stuck points and ceramic sleeves by utilizing a multi-stage zooming mode, and realizing the detection requirements of the upper edges of silicon wafers on the surfaces of the boat leaves and the defects of stuck points in the boats under a plurality of focal lengths.
The beneficial effects are that:
compared with the prior art, the invention adopts the vision system with the multi-level zooming covering large depth of field to complete the acquisition of the original images with multi-type defects in the graphite boat, so as to reduce the investment of a large amount of time cost and structural cost; the shooting mode of multi-camera cross coverage is adopted, so that the influence of chip reflection under a camera on the deformation detection of the silicon wafer can be effectively eliminated, and the detection requirements of the upper edge of the silicon wafer on the surface of the boat blade with two focal lengths and the defect of the clamping point in the boat are met, and the conversion efficiency and the production efficiency of the silicon wafer are further improved; therefore, the method is compatible effectively, and a large amount of time cost and labor cost for transformation are saved.
Drawings
FIG. 1 is a schematic diagram of an in-boat defect on-line detection system of a graphite boat for silicon wafers;
FIG. 2 is a schematic diagram of a multi-camera cross-over;
in the figure, 1, camera, 2, lens, 3, light source, 4, main body frame.
Detailed Description
The present invention will be further described in detail with reference to the following examples and drawings for the purpose of enhancing the understanding of the present invention, which examples are provided for the purpose of illustrating the present invention only and are not to be construed as limiting the scope of the present invention.
Embodiment one:
as shown in fig. 1, a camera 1, a lens 2, a light source 3, a main body frame 4;
the on-line defect detection system for the graphite boat for the silicon wafer comprises a main body frame 4, a shooting module, the graphite boat, a control device and a computer, wherein the shooting module comprises a camera 1, a lens 2 and a light source 3, the lens 2 is arranged on the camera 1, the light source 3 is arranged on the lens 2, the shooting modules are arranged at equal intervals, and the distance between two shooting modules of one shooting module is smaller than the shooting range of the camera 1; the graphite boat is positioned below the shooting module; the control is used for controlling the shooting module to work, and the computer is used for processing the image information uploaded by the shooting module.
In this embodiment, the device further includes a receiving sensor, the receiving sensor is used for sensing the graphite boat and transmitting signals to the control device, the graphite boat is transported to a predetermined position through the transportation mechanism, when the graphite boat is in place, the receiving sensor senses the graphite boat, the signals are transmitted to the control device, and the control device controls the shooting module to work.
In the present embodiment, the camera 1 is an area camera 1.
In the present embodiment, the lens 2 is a liquid zoom lens 2.
Specifically, the detection mode of the original camera 1 matched with the fixed focus lens 2 for vertical shooting is improved to be that the camera 1 is matched with the liquid zoom lens 2 for detection, the specific detection mode is that in the process of the in-out movement of a graphite boat, when graphite boat in-out movement information data acquired by a sensor are received, shooting setting is started, a graphite boat leaf image reaching a designated position is acquired, then an image plane with the boat leaf surface being about 20CM deep downwards is acquired in a zooming mode to realize detection of stuck point defects, and then a detection result processed by a system is displayed on a computer screen and is simultaneously transmitted to machine equipment;
embodiment two:
as shown in fig. 2;
an on-line detection method for defects in a graphite boat of a graphite boat for a silicon wafer, which comprises the following steps:
s1: arranging a plurality of shooting modules in a cross coverage shooting mode;
s2: shooting an image of the graphite boat reaching a designated position;
s3: acquiring an image with the downward depth of about 20CM on the surface of a boat blade through a liquid zoom lens;
s4: receiving and processing the image data, and judging whether defects exist or not;
s5: uploading the detection result to the terminal.
The shooting mode of the cross coverage in the S1 is as follows:
one shooting module is arranged at the center of the detection module, the detection module is moved to the center of the boat slot in the boat slot fixing mode, boat slot center boat leaves in the visual field range of the center camera are found, five boat leaves are used as the center of the visual field range in the same way to set two adjacent cameras until all cameras are popularized,
the detection module comprises a plurality of shooting modules, each shooting module comprises an area array camera, a liquid zoom lens and a light source, the lenses are arranged on the cameras, and the light sources are arranged on the lenses.
In order to further preprocess the appearance image of the upper surface of the silicon wafer acquired by multiple machine positions, the arrangement of the shooting modules comprises the following steps: and extracting boat leaf features in the photos in the upper and lower ranges after shielding the central three boat leaves, wherein the parameter adjusting range is sequentially covered to the edge boat leaves according to the preset number of pixels which are diffused outwards from the center, and the central shielding position of the single camera can be covered by the edge area of the adjacent camera.
According to the method, all boats She Weizhi in a single boat groove can be covered, the influence of chip reflection under a camera on deformation detection of a silicon wafer is avoided, then photographs of stuck points and ceramic sleeves are sequentially taken in a multi-stage zooming mode, and the detection requirements of the upper edge of the silicon wafer on the surface of a boat blade and the defects of stuck points in the boat under a plurality of focal lengths are met.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the invention.
Claims (7)
1. The on-line defect detection system for the graphite boat for the silicon wafer is characterized by comprising a main body frame, shooting modules, a graphite boat, a control device and a computer, wherein each shooting module comprises a camera, a lens and a light source, the lens is arranged on the camera, the light sources are arranged on the lens, the shooting modules are arranged at equal intervals, and the distance between the two shooting modules of one shooting module is smaller than the shooting range of the camera; the graphite boat is positioned below the shooting module;
the control is used for controlling the shooting module to work, and the computer is used for processing the image information uploaded by the shooting module.
2. The on-line inspection system of defects in a graphite boat for silicon wafers of claim 1 further comprising a receiver sensor for sensing the graphite boat and transmitting a signal to the control device.
3. The on-line defect detection system for a graphite boat for silicon wafers of claim 1, wherein the camera is an area array camera.
4. The on-line defect detection system for a graphite boat for silicon wafers of claim 1, wherein the lens is a liquid zoom lens.
5. The on-line defect detection method in the graphite boat is characterized by comprising the following steps of:
s1: arranging a plurality of shooting modules in a cross coverage shooting mode;
s2: shooting a boat leaf image of the graphite boat reaching a designated position;
s3: acquiring an intra-boat image with the downward depth of the boat blade surface of about 20CM through a liquid zoom lens;
s4: receiving and processing a plurality of image data, and judging whether a plurality of detection positions such as boat leaves and boat interiors of the graphite boat have defects or not;
s5: uploading the detection result to the terminal.
6. The on-line defect detection method for graphite boats according to claim 5, wherein the shooting mode of cross coverage in S1 is as follows:
a shooting module is arranged at the center of a detection module, the detection module is moved to the center of a boat groove in a boat groove fixing mode, boat groove center boat leaves in the visual field range of a center camera are found, five boat leaves are used as the center of the visual field range in the same mode to set two adjacent cameras, and all cameras are promoted;
the detection module comprises a plurality of shooting modules, each shooting module comprises an area array camera, a liquid zoom lens and a light source, the lens is arranged on the camera, and the light source is arranged on the lens.
7. The on-line defect detection method for graphite boats as defined in claim 6, wherein the arrangement of the photographing modules further comprises the steps of:
and extracting boat leaf features in the photos in the upper and lower ranges after shielding the central three boat leaves, wherein the parameter adjusting range is sequentially covered to the edge boat leaves according to the preset number of pixels which are diffused outwards from the center, and the central shielding position of the single camera can be covered by the edge area of the adjacent camera.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311847675.5A CN117805126A (en) | 2023-12-29 | 2023-12-29 | In-boat defect online detection system and detection method of graphite boat for silicon wafer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311847675.5A CN117805126A (en) | 2023-12-29 | 2023-12-29 | In-boat defect online detection system and detection method of graphite boat for silicon wafer |
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| Publication Number | Publication Date |
|---|---|
| CN117805126A true CN117805126A (en) | 2024-04-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202311847675.5A Pending CN117805126A (en) | 2023-12-29 | 2023-12-29 | In-boat defect online detection system and detection method of graphite boat for silicon wafer |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117949462A (en) * | 2024-03-26 | 2024-04-30 | 广州市易鸿智能装备股份有限公司 | Online high-speed high-precision burr detection method, device and storage medium |
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2023
- 2023-12-29 CN CN202311847675.5A patent/CN117805126A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117949462A (en) * | 2024-03-26 | 2024-04-30 | 广州市易鸿智能装备股份有限公司 | Online high-speed high-precision burr detection method, device and storage medium |
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