CN106756828A - 一种含钨自润滑刀具镀层制备方法 - Google Patents

一种含钨自润滑刀具镀层制备方法 Download PDF

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CN106756828A
CN106756828A CN201611149200.9A CN201611149200A CN106756828A CN 106756828 A CN106756828 A CN 106756828A CN 201611149200 A CN201611149200 A CN 201611149200A CN 106756828 A CN106756828 A CN 106756828A
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文晓斌
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Abstract

本发明公开了一种含钨自润滑刀具镀层制备方法,包括下述步骤:S100:预处理,去除合金材料上的污染物,使合金材料表面清洁、干燥;S200:上挂架和抽真空;S300:离子清洗;S400:沉积钨金属打底;S500:沉积钨/碳过渡层:S600:沉积碳/钨自润滑复合镀层。通过上述方法制备的含钨自润滑碳基镀层刀具,其表面为碳/钨自润滑复合镀层(钨原子百分含量5~10%),其间掺杂有纳米碳化钨相,既可保证刀具在切削过程中表面能形成具有润滑作用的连续固态润滑层,又可增加刀具的表面硬度。并且,刀具基材与表面碳/钨复合镀层之间具有钨和钨/碳过渡层,可减小残余应力,增加镀层与刀具基体的结合强度。

Description

一种含钨自润滑刀具镀层制备方法
技术领域
本发明涉及镀层制备方法,特别是涉及一种含钨自润滑刀具镀层制备方法。
背景技术
作为基础产业的制造业正在发生着革命性的变化,制造技术也已产生了质的变化。尤其是近几年高速切削加工技术的应用,在大幅度提高生产效率的同时也极大地提高了产品的质量,可以认为高速切削加工技术已成为切削制造业的主流。
高速切削加工技术的发展与应用同时带动了相关技术的迅速发展,而高速切削刀具技术是实现高速加工的关键技术之一,而刀具材料的高温性能是影响高速切削刀具技术发展的重中之重。由于在高速切削加工中所产生的切削热对刀具的磨损比常规切削高得多,因此对刀具材料有更高的要求:高硬度、高强度和耐磨性;高的韧性和抗冲击能力;高的红硬性和化学稳定性;抗热冲击能力。
刀具表面涂层技术是应市场需求而发展起来的一种表面改性技术,自上世纪60年代出现以来,该项技术在金属切削刀具制造业内得到了极为广泛的应用。尤其是高速切削加工技术出现之后,涂层技术更是得到了迅猛的发展与应用,并成为高速切削刀具制造的关键技术之一。该项技术通过化学或物理的方法在刀具表面形成某种薄膜,使切削刀具获得优良的综合切削性能,从而满足高速切削加工的要求。归纳起来切削刀具表面涂层技术具有以下特点:1)采用涂层技术可在不降低刀具强度的条件下,大幅度地提高刀具表面硬度;2)随着涂层技术的飞速发展,薄膜的化学稳定性及高温抗氧化性更加突出,从而使高速切削加工成为可能;3)润滑薄膜具有良好的固相润滑性能,可有效地改善加工质量,也适合于干式切削加工;4)涂层技术作为刀具制造的最终工序,对刀具精度几乎没有影响,并可进行重复涂层工艺。
涂层切削刀具所带来的益处:可大幅度提高切削刀具寿命;有效地提高切削加工效率;明显提高被加工工件的表面质量;有效地减少刀具材料的消耗,降低加工成本;减少冷却液的使用,降低成本,有利于环境保护。
中国专利(专利号:ZL200710017202.7)公开了一种掺杂铬的非晶态石墨减摩镀层,该镀层硬度仅为1500HV~2200HV,厚度1.0μm~1.5μm,不适合作为高速切削刀具镀层使用。中国专利(申请号:200610068975.3)报道了一种自润滑软涂层刀具镀层,该镀层材料由Ti、Zr和MoS2组层,制备工艺较复杂,且其润滑介质为MoS2,其缺点是吸湿性强,在一定的相对湿度下摩擦系数和磨损率都会急剧上升,应用范围有一定局限性。
发明内容
本发明的目的在于克服以上技术的不足之处,提供一种含钨自润滑刀具镀层制备方法,使刀具硬度更高,以提升刀具使用寿命。
为解决上述技术问题,本发明采用如下的技术方案:
一种含钨自润滑刀具镀层制备方法,包括下述步骤:
S100:预处理,去除合金材料上的污染物,使合金材料表面清洁、干燥;
S200:上挂架和抽真空,将合金材料放置在挂架上,将所述挂架放置在离子镀膜设备的真空室内,所述真空室内具有钨靶和石墨靶,将真空室抽真空到:3×10-5Torr~8×10-5Torr;
S300:离子清洗,在所述真空室内通入溅射气体,对合金材料进行高能离子轰击清洗;
S400:沉积钨金属打底,保持溅射气体流量,调整至负偏压值,开启钨靶电流;
S500:沉积钨/碳过渡层:保持溅射气体流量,开启石墨靶;
S600:沉积碳/钨自润滑复合镀层:保持溅射气体流量,沉积时间为180~240min。
其中,所述挂架的部分结构如图1所示,图中所示是三轴联动结构的一部分,一级转动机构能够自转,二级转动机构安装在一级转动机构上,二级转动机构也能够自转,三级转动机构安装在二级转动机构上,三级转动机构也能够自转。图中所示为二级转动机构和安装在二级转动机构上的三级转动机构。
通过在纯碳镀层中掺杂少量(相对原子百分含量5~10%)的金属钨,在保持低的摩擦系数的同时,可提高镀层硬度,降低镀层的内应力,提高镀层与基体的结合强度,并有利于非晶碳的石墨化。掺入的钨元素与镀层中的碳元素反应生成纳米碳化钨相,使镀层成为非晶碳中掺杂纳米碳化钨的纳米复合镀层。本发明所提供的含钨自润滑碳基刀具镀层,其厚度为1.5μm~2.5μm,硬度为2500HV~3000HV;摩擦系数为0.05~0.09。该镀层能够明显提高刀具的使用寿命,在相同的条件下,镀有该镀层的刀具的使用寿命较无镀层的刀具提高了2~3倍。
前述的一种含钨自润滑刀具镀层制备方法中,所述步骤S300中,所述溅射气体是氩气,首先使流量保持在30~40sccm,调整负偏压值为-500~-350V,保持15~25min;然后将氩气流量调整至20~30sccm,进行正常离子清洗,此时调整负偏压值为-350~-200V,持续10~20min。
前述的一种含钨自润滑刀具镀层制备方法中,所述步骤S400中,将溅射气体的流量保持在20~30sccm,将负偏压调整至-80~-120V,并将电流值调整为3~5A,沉积时间5~10min。
前述的一种含钨自润滑刀具镀层制备方法中,所述步骤S500中,将溅射气体的流量保持在20~30sccm,调整负偏压值至-60~-90V,钨靶电流由3~5A线性减小到0.5~1A,石墨靶电流线性增大到6~9A,沉积时间为30~60min。
前述的一种含钨自润滑刀具镀层制备方法中,所述步骤S600中,将溅射气体的流量保持在20~30sccm,调整负偏压值至-60~-90V,钨靶电流控制在0.5~1A,石墨靶电流控制在6~9A。
前述的一种含钨自润滑刀具镀层制备方法中,所述真空室内有两个钨靶和两个石墨靶,所述挂架是三轴联动挂架。
前述的一种含钨自润滑刀具镀层制备方法中,所述步骤S100中,首先将合金材料放置在清洗架上,然后依次经过超声波除油、活化、表调、脱水和烘干,去除合金材料表面的油污和氧化皮。清洗架的结构如图2所示。
与现有技术相比,通过上述方法制备的含钨自润滑碳基镀层刀具,其表面为碳/钨自润滑复合镀层(钨原子百分含量5~10%),其间掺杂有纳米碳化钨相,既可保证刀具在切削过程中表面能形成具有润滑作用的连续固态润滑层,又可增加刀具的表面硬度。并且,刀具基材与表面碳/钨复合镀层之间具有钨和钨/碳过渡层,可减小残余应力,增加镀层与刀具基体的结合强度。使用该含钨自润滑碳基镀层的刀具,可广泛应用在干切削和难加工材料的切削加工,是一种环境效益和经济效益俱佳的工艺选择,具有广阔的应用前景。
附图说明
图1是挂架的一种实施例的部分结构示意图;
图2是清洗架的一种实施例的结构示意图。
下面结合附图和具体实施方式对本发明作进一步的说明。
具体实施方式
本发明的实施例1:一种含钨自润滑刀具镀层制备方法,刀具:挤压丝锥,材质:W6Mo5Cr4V2高速钢,包括下述步骤:
S100:预处理,去除刀具上的污染物,使刀具表面清洁、干燥。具体的,首先将刀具放置在清洗架上,然后依次经过超声波除油、活化、表调、脱水和烘干,去除刀具表面的油污和氧化皮。;
S200:上挂架和抽真空,将刀具放置在挂架上,将所述挂架放置在离子镀膜设备的真空室内,所述真空室内具有钨靶和石墨靶,将真空室抽真空到:3×10-5Torr,所述真空室内有两个钨靶和两个石墨靶,所述挂架是三轴联动挂架;
S300:离子清洗,在所述真空室内通入溅射气体,对刀具进行高能离子轰击清洗,所述溅射气体是氩气,首先使流量保持在30sccm,调整负偏压值为-500V,保持15min;然后将氩气流量调整至20sccm,进行正常离子清洗,此时调整负偏压值为-350V,持续10min;
S400:沉积钨金属打底,保持溅射气体流量,调整至负偏压值,开启钨靶电流,将溅射气体的流量保持在20sccm,将负偏压调整至-80V,并将电流值调整为3A,沉积时间5min;
S500:沉积钨/碳过渡层:保持溅射气体流量,开启石墨靶,将溅射气体的流量保持在20sccm,调整负偏压值至-60V,钨靶电流由3A线性减小到0.5A,石墨靶电流线性增大到6A,沉积时间为30min;
S600:沉积碳/钨自润滑复合镀层:保持溅射气体流量,沉积时间为180min;将溅射气体的流量保持在20sccm,调整负偏压值至-60V,钨靶电流控制在0.5A,石墨靶电流控制在6A。
镀膜结束后,关闭钨靶和石墨靶电源、偏压电源、氩气,并冷却至室温后取出丝锥即可。本实施例所得到的挤压丝锥镀层厚度为1.87μm,硬度为2735HV,摩擦系数为0.08。
实施例2:一种含钨自润滑刀具镀层制备方法,刀具:刀片,材质:YT14硬质合金,包括下述步骤:
S100:预处理,去除合金材料上的污染物,使合金材料表面清洁、干燥。具体的,首先将合金材料放置在清洗架上,然后依次经过超声波除油、活化、表调、脱水和烘干,去除合金材料表面的油污和氧化皮。;
S200:上挂架和抽真空,将合金材料放置在挂架上,将所述挂架放置在离子镀膜设备的真空室内,所述真空室内具有钨靶和石墨靶,将真空室抽真空到:8×10-5Torr,所述真空室内有两个钨靶和两个石墨靶,所述挂架是三轴联动挂架;
S300:离子清洗,在所述真空室内通入溅射气体,对合金材料进行高能离子轰击清洗,所述溅射气体是氩气,首先使流量保持在40sccm,调整负偏压值为-350V,保持25min;然后将氩气流量调整至30sccm,进行正常离子清洗,此时调整负偏压值为-200V,持续20min;
S400:沉积钨金属打底,保持溅射气体流量,调整至负偏压值,开启钨靶电流,将溅射气体的流量保持在30sccm,将负偏压调整至-120V,并将电流值调整为5A,沉积时间10min;
S500:沉积钨/碳过渡层:保持溅射气体流量,开启石墨靶,将溅射气体的流量保持在30sccm,调整负偏压值至-90V,钨靶电流由5A线性减小到1A,石墨靶电流线性增大到9A,沉积时间为60min;
S600:沉积碳/钨自润滑复合镀层:保持溅射气体流量,沉积时间为240min;将溅射气体的流量保持在30sccm,调整负偏压值至-90V,钨靶电流控制在1A,石墨靶电流控制在9A。
镀膜结束后,关闭钨靶和石墨靶电源、偏压电源、氩气,并冷却至室温后取出刀片即可。本实施例所得到的刀片镀层厚度为2.26μ,硬度为2658HV,摩擦系数为0.07。
实施例3:一种含钨自润滑刀具镀层制备方法,刀具:钻头,材质:W18Cr4V高速钢,包括下述步骤:
S100:预处理,去除合金材料上的污染物,使合金材料表面清洁、干燥。具体的,首先将合金材料放置在清洗架上,然后依次经过超声波除油、活化、表调、脱水和烘干,去除合金材料表面的油污和氧化皮。;
S200:上挂架和抽真空,将合金材料放置在挂架上,将所述挂架放置在离子镀膜设备的真空室内,所述真空室内具有钨靶和石墨靶,将真空室抽真空到:5×10-5Torr,所述真空室内有两个钨靶和两个石墨靶,所述挂架是三轴联动挂架;
S300:离子清洗,在所述真空室内通入溅射气体,对合金材料进行高能离子轰击清洗,所述溅射气体是氩气,首先使流量保持在35sccm,调整负偏压值为-400V,保持20min;然后将氩气流量调整至25sccm,进行正常离子清洗,此时调整负偏压值为-250V,持续15min;
S400:沉积钨金属打底,保持溅射气体流量,调整至负偏压值,开启钨靶电流,将溅射气体的流量保持在25sccm,将负偏压调整至-100V,并将电流值调整为4A,沉积时间8min;
S500:沉积钨/碳过渡层:保持溅射气体流量,开启石墨靶,将溅射气体的流量保持在25sccm,调整负偏压值至-70V,钨靶电流由4A线性减小到0.7A,石墨靶电流线性增大到7A,沉积时间为45min;
S600:沉积碳/钨自润滑复合镀层:保持溅射气体流量,沉积时间为210min;将溅射气体的流量保持在25sccm,调整负偏压值至-75V,钨靶电流控制在0.85A,石墨靶电流控制在7.5A。
镀膜结束后,关闭钨靶和石墨靶电源、偏压电源、氩气,并冷却至室温后取出钻头即可。本实施例所得到的钻头镀层厚度为2.07μm,硬度为2896HV,摩擦系数为0.08。

Claims (7)

1.一种含钨自润滑刀具镀层制备方法,其特征在于,包括下述步骤:
S100:预处理,去除合金材料上的污染物,使合金材料表面清洁、干燥;
S200:上挂架和抽真空,将合金材料放置在挂架上,将所述挂架放置在离子镀膜设备的真空室内,所述真空室内具有钨靶和石墨靶,将真空室抽真空到:3×10-5Torr~8×10- 5Torr;
S300:离子清洗,在所述真空室内通入溅射气体,对合金材料进行高能离子轰击清洗;
S400:沉积钨金属打底,保持溅射气体流量,调整至负偏压值,开启钨靶电流;
S500:沉积钨/碳过渡层:保持溅射气体流量,开启石墨靶;
S600:沉积碳/钨自润滑复合镀层:保持溅射气体流量,沉积时间为180~240min。
2.根据权利要求1所述的一种含钨自润滑刀具镀层制备方法,其特征在于,所述步骤S300中,所述溅射气体是氩气,首先使流量保持在30~40sccm,调整负偏压值为-500~-350V,保持15~25min;然后将氩气流量调整至20~30sccm,进行正常离子清洗,此时调整负偏压值为-350~-200V,持续10~20min。
3.根据权利要求2所述的一种含钨自润滑刀具镀层制备方法,其特征在于,所述步骤S400中,将溅射气体的流量保持在20~30sccm,将负偏压调整至-80~-120V,并将电流值调整为3~5A,沉积时间5~10min。
4.根据权利要求3所述的一种含钨自润滑刀具镀层制备方法,其特征在于,所述步骤S500中,将溅射气体的流量保持在20~30sccm,调整负偏压值至-60~-90V,钨靶电流由3~5A线性减小到0.5~1A,石墨靶电流线性增大到6~9A,沉积时间为30~60min。
5.根据权利要求4所述的一种含钨自润滑刀具镀层制备方法,其特征在于,所述步骤S600中,将溅射气体的流量保持在20~30sccm,调整负偏压值至-60~-90V,钨靶电流控制在0.5~1A,石墨靶电流控制在6~9A。
6.根据权利要求1至5任一项所述的一种含钨自润滑刀具镀层制备方法,其特征在于,所述真空室内有两个钨靶和两个石墨靶,所述挂架是三轴联动挂架。
7.根据权利要求6所述的一种含钨自润滑刀具镀层制备方法,其特征在于,所述步骤S100中,首先将合金材料放置在清洗架上,然后依次经过超声波除油、活化、表调、脱水和烘干,去除合金材料表面的油污和氧化皮。
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