CN106711098A - IC plastic packaging structure and production method thereof - Google Patents

IC plastic packaging structure and production method thereof Download PDF

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Publication number
CN106711098A
CN106711098A CN201611133299.3A CN201611133299A CN106711098A CN 106711098 A CN106711098 A CN 106711098A CN 201611133299 A CN201611133299 A CN 201611133299A CN 106711098 A CN106711098 A CN 106711098A
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China
Prior art keywords
lcp
emc
layer
encapsulated
chip
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Application number
CN201611133299.3A
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Chinese (zh)
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CN106711098B (en
Inventor
李宗亚
周松
肖汉武
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WUXI ZHONGWEI HIGH-TECH ELECTRONICS Co Ltd
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WUXI ZHONGWEI HIGH-TECH ELECTRONICS Co Ltd
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Priority to CN201611133299.3A priority Critical patent/CN106711098B/en
Publication of CN106711098A publication Critical patent/CN106711098A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293Organic, e.g. plastic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3121Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

The invention relates to an IC plastic packaging structure and a production method thereof. The IC plastic packaging structure comprises an LCP substrate, an EMC packaging layer, and an LCP sealing layer. The LCP substrate comprises an LCP pre-molding layer and a lead wire frame, and the upper surface of the LCP substrate is provided with a chip, which is provided with the EMC packaging layer, and the outer part of the EMC packaging layer is provided with the LCP sealing layer in a packaged manner. The production method of the IC plastic packaging structure comprises steps that (1) the lower surface of the lead wire frame adopts an LCP material to produce the LCP substrate; (2) the upper surface of the LCP substrate is provided with a chip; (3)the chip is provided with the EMC packaging layer in a packaged manner; (4) the redundant EMC packaging layer is removed; (5) the outer part of the EMC packaging layer is provided with the LCP sealing layer in a packaged manner; (6) the redundant LCP sealing layer and the redundant LCP pre-molding layer disposed on the lower part of the lead wire frame are removed; (7) a semi-finished product is segmented to form an independent packaging body. The defect of the plastic packaging based on the EMC on a water and gas permeation prevention aspect is improved, and the water and gas permeation prevention performance of the plastic packaging is improved, and therefore the reliability of the plastic packaging is enhanced.

Description

IC plastic capsulation structures and preparation method thereof
Technical field
The present invention relates to a kind of IC(Integrated circuit)Plastic capsulation structure and preparation method thereof, belongs to IC manufacturing skill Art field.
Background technology
Plastic Package is better than air-tight packaging in terms of size, weight, performance, cost.Estimate that plastic device accounts for world business With the 97% of chip package market.But common plasticses encapsulate used encapsulating material predominantly epoxy resin, its anti-entering property of aqueous vapor Can be poor, failure mechanism such as burn into crackle, interface debonding highly significant that aqueous vapor induces, these deficiencies limit Plastic Package Application in highly reliable integrated antenna package.
The content of the invention
The purpose of the present invention is to overcome the deficiencies in the prior art, there is provided a kind of IC plastic capsulation structures and its preparation Method, improves deficiency of the Plastic Package based on EMC in terms of waterproof impervious, lifts the waterproof gas accessibility of Plastic Package Can, so that the reliability of reinforced plastics encapsulation.
According to the present invention provide technical scheme, a kind of IC plastic capsulation structures, it is characterized in that:Including LCP substrates, EMC Encapsulated layer and LCP sealants, LCP substrates include LCP pre-moldings layer and are arranged at the lead frame of LCP pre-moldings layer upper surface; In the upper surface chip of the LCP substrates, chip is packaged in the upper surface of LCP substrates by EMC encapsulated layers, in EMC encapsulatings One layer of LCP sealant of outer envelope of layer.
The preparation method of the IC plastic capsulation structures, it is characterized in that, comprise the following steps:
(1)LCP substrates are formed by pre-molding using LCP materials in the lower surface of lead frame;
(2)In LCP upper surface of base plate assembling chips;
(3)Chip after assembling is encapsulated using epoxy resin, EMC encapsulated layers are obtained;
(4)Shape, size requirement according to product, removes unnecessary EMC encapsulated layers;
(5)In one layer of LCP material of EMC encapsulated layers outer envelope, LCP sealants are obtained;
(6)Shape, size requirement according to product, removes LCP unnecessary below unnecessary LCP sealants and lead frame pre- Molding layer;
(7)By step(6)The semi-finished product segmentation for obtaining is shaped to independent packaging body.
Further, load, bonding technology assembling chip are used in the LCP upper surface of base plate.
Further, the chip is encapsulated using compression mould or injection mold technique.
Further, one layer of LCP sealing is encapsulated using the injection molding technique of injection mould outside the EMC encapsulated layers Layer.
Further, the packaging body that the step is obtained obtains independence through the muscle that hits, deflashing, plating, printing, shaping Packaging body.
Further, the gross thickness of the EMC encapsulated layers and LCP sealants is 0.25~1.2mm.
Compared with the prior art the present invention has advantages below:Plastic Package of the present invention using LCP materials substrate with EMC is encapsulated in inside by LCP outer containment layers, compared with existing all EMC materials are encapsulated, encapsulating structure tool of the invention There is stronger waterproof gas infiltration capability.
Brief description of the drawings
Fig. 1 is the schematic diagram of IC plastic capsulation structures of the present invention.
Fig. 2-1~Fig. 2-9 is the flow chart of the preparation method for stating IC plastic capsulation structures of the invention.Wherein:
Fig. 2-1 is the schematic diagram of the LCP substrates.
Fig. 2-2 is the schematic diagram in LCP substrate surface assembling chips.
Fig. 2-3 is the schematic diagram that chip is encapsulated using epoxy resin.
Fig. 2-4 is the schematic diagram of EMC encapsulated layer redundances.
Fig. 2-5 is the schematic diagram of the unnecessary EMC encapsulated layers of removal.
Fig. 2-6 is the schematic diagram in EMC encapsulated layer outer envelope LCP sealants.
Fig. 2-7 is the schematic diagram of redundance in LCP sealants and LCP pre-moldings layer.
Fig. 2-8 is the unnecessary LCP sealants of removal and the schematic diagram of LCP pre-moldings layer.
Fig. 2-9 is the schematic diagram for obtaining individual packages body.
Label in figure:Lead frame 1, LCP pre-moldings layer 2, EMC encapsulated layers 3, LCP sealants 4, chip 5.
Specific embodiment
With reference to specific accompanying drawing, the invention will be further described.
As shown in Figure 1:IC plastic capsulation structures of the present invention, including LCP substrates, EMC encapsulated layers 3 and LCP sealants 4, LCP substrates include LCP pre-moldings layer 2 and are arranged at the lead frame 1 of 2 upper surface of LCP pre-moldings layer;In the LCP substrates Upper surface chip 5, chip 5 is packaged in the upper surface of LCP substrates by EMC encapsulated layers 3, in the outside bag of EMC encapsulated layers 3 One layer of LCP sealant 4 of envelope.
The preparation method of the IC plastic capsulation structures, comprises the following steps:
(1)As shown in Fig. 2-1, LCP substrates are formed by pre-molding using LCP materials in the lower surface of lead frame 1;
(2)As shown in Fig. 2-2, using the load of standard, bonding technology in LCP upper surface of base plate assembling chip 5;
(3)As Figure 2-3, using compression mould or injection mold technique, will be wrapped using epoxy resin on the chip 5 after assembling Envelope, obtains EMC encapsulated layers 3;
(4)Shape, size requirement according to product, to step(3)The packaging body of EMC encapsulatings is completed, unnecessary EMC is calculated The position of encapsulated layer 3;As in Figure 2-4, the part in EMC encapsulated layers 3 beyond dotted line is unnecessary part;
(5)As shown in Figure 2-5, using machining process, EMC encapsulated layers 3 unnecessary beyond dotted line in Fig. 2-4 are removed;
(6)As shown in figures 2-6, using the injection molding technique of injection mould, in EMC encapsulated layers 3 outer envelope, one layer of LCP material, Obtain LCP sealants 4;
(7)As illustrated in figs. 2-7, according to product shape, size requirement, the packaging body to having completed LCP sealants 4 are calculated Obtain the position of unnecessary LCP materials;In Fig. 2-7, the part in LCP sealants 4 and LCP pre-moldings layer 2 beyond dotted line is many Remaining part;
(8)As illustrated in figs. 2 through 8, using machining process, it is unnecessary below unnecessary LCP sealants 4 and lead frame 1 to remove LCP pre-moldings layer 2;
(9)As shown in figs. 2-9, by the conventional muscle that hits, deflashing, plating, printing, forming method by step(8)Half for obtaining Finished product segmentation is shaped to independent packaging body.
In actual applications, the gross thickness of EMC encapsulated layers 3 and LCP sealants 4 is usually the EMC bags in 0.25~1.2mm The thickness of sealing 3 is limited to the thickness of its inside chip, and the thickness of LCP sealants 4 is received to be flowed in weaker under LCP molten conditions Property, both thickness are not associated necessarily apparently at present.
IC plastic capsulation structures of the present invention, on the lead frames using LCP(Liquid crystal polymer)By pre-molding shape Into substrate as integrated circuit package substrate, on the substrate complete load, bonding after, using EMC(Epoxy resin)Pass through Compress mould or be encapsulated for chip and bonding wire by injection mold technique, and primary is carried out by the way of machining and be processed into Type EMC epoxy resin, then covered epoxy resin using LCP, then by LCP unnecessary around pin by machining Method carry out post forming to LCP liquid crystal polymers, remove LCP unnecessary around pin, finally by the muscle that hits, go to fly Side, plating, shaping, form a complete independent plastic packaging body.The present invention can solve LCP materials can not directly to lead key The problem that the IC of conjunction is encapsulated, because it has the ability that the erosions such as aqueous vapor are more preferably resisted than common EMC materials, so as in height There is preferable application prospect in reliable Plastic Package product.

Claims (7)

1. a kind of IC plastic capsulation structures, it is characterized in that:Including LCP substrates, EMC encapsulated layers(3)With LCP sealants(4), LCP Substrate includes LCP pre-moldings layer(2)Be arranged at LCP pre-moldings layer(2)The lead frame of upper surface(1);In the LCP substrates Upper surface chip(5), chip(5)By EMC encapsulated layers(3)The upper surface of LCP substrates is packaged in, in EMC encapsulated layers(3) One layer of LCP sealant of outer envelope(4).
2. a kind of preparation method of IC plastic capsulation structures, it is characterized in that, comprise the following steps:
(1)In lead frame(1)Lower surface using LCP materials by pre-molding formation LCP substrates;
(2)In LCP upper surface of base plate assembling chips(5);
(3)By the chip after assembling(5)Encapsulated using epoxy resin, obtained EMC encapsulated layers(3);
(4)Shape, size requirement according to product, removes unnecessary EMC encapsulated layers(3);
(5)In EMC encapsulated layers(3)One layer of LCP material of outer envelope, obtains LCP sealants(4);
(6)Shape, size requirement according to product, removes unnecessary LCP sealants(4)And lead frame(1)Lower section is unnecessary LCP pre-moldings layer(2);
(7)By step(6)The semi-finished product segmentation for obtaining is shaped to independent packaging body.
3. the preparation method of IC plastic capsulation structures as claimed in claim 2, it is characterized in that:In the LCP upper surface of base plate Using load, bonding technology assembling chip(5).
4. the preparation method of IC plastic capsulation structures as claimed in claim 2, it is characterized in that:The chip(5)Using compression Mould or injection mold technique are encapsulated.
5. the preparation method of IC plastic capsulation structures as claimed in claim 2, it is characterized in that:In the EMC encapsulated layers(3)Outward Portion one layer of LCP sealant is encapsulated using the injection molding technique of injection mould(4).
6. the preparation method of IC plastic capsulation structures as claimed in claim 2, it is characterized in that:The step(6)The envelope for obtaining Dress body obtains independent packaging body through the muscle that hits, deflashing, plating, printing, shaping.
7. the preparation method of IC plastic capsulation structures as claimed in claim 2, it is characterized in that:The EMC encapsulated layers(3)With LCP sealants(4)Gross thickness be 0.25~1.2mm.
CN201611133299.3A 2016-12-10 2016-12-10 IC plastic capsulation structure and preparation method thereof Active CN106711098B (en)

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CN106711098B CN106711098B (en) 2019-04-12

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108878299A (en) * 2018-02-23 2018-11-23 无锡中微高科电子有限公司 The preparation method of frame clsss integrated circuit Plastic Package is carried out by laser
CN108899306A (en) * 2018-07-13 2018-11-27 中国电子科技集团公司第五十八研究所 A kind of integrated circuit plastics seal structure and preparation method thereof
CN110739277A (en) * 2019-09-11 2020-01-31 珠海格力电器股份有限公司 kinds of packaging structure and manufacturing method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0927573A (en) * 1995-07-13 1997-01-28 Mitsubishi Electric Corp Semiconductor device
JP2003335365A (en) * 2002-05-17 2003-11-25 Sumitomo Chem Co Ltd Press-through-pack package
CN103208488A (en) * 2012-01-12 2013-07-17 盈胜科技股份有限公司 Thin-type multilayer array type light-emitting diode optical engine

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0927573A (en) * 1995-07-13 1997-01-28 Mitsubishi Electric Corp Semiconductor device
JP2003335365A (en) * 2002-05-17 2003-11-25 Sumitomo Chem Co Ltd Press-through-pack package
CN103208488A (en) * 2012-01-12 2013-07-17 盈胜科技股份有限公司 Thin-type multilayer array type light-emitting diode optical engine

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108878299A (en) * 2018-02-23 2018-11-23 无锡中微高科电子有限公司 The preparation method of frame clsss integrated circuit Plastic Package is carried out by laser
CN108899306A (en) * 2018-07-13 2018-11-27 中国电子科技集团公司第五十八研究所 A kind of integrated circuit plastics seal structure and preparation method thereof
CN110739277A (en) * 2019-09-11 2020-01-31 珠海格力电器股份有限公司 kinds of packaging structure and manufacturing method thereof

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