CN106706600B - A kind of long-range LIBS test macro having Multi probe optical signal collector unit - Google Patents
A kind of long-range LIBS test macro having Multi probe optical signal collector unit Download PDFInfo
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/718—Laser microanalysis, i.e. with formation of sample plasma
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- G—PHYSICS
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Abstract
The invention belongs to atomic emission detection equipment related fieldss, and a kind of long-range LIBS test macro for having Multi probe optical signal collector unit is disclosed, and including pulse laser, beam expanding lens, focusing microscope group, two dichroscopes, multipath light signal collector unit and spectrometer etc.；Wherein for multipath light signal collector unit, it includes multiple sub- collection probes, multi-channel optical fibre bundling device channel and transmission fiber, and each height is collected probe and is made of small-bore lens, substitutes optical elements of large caliber thus to combine the acquisition function of completing to remote LIBS signal.Through the invention, it can effectively solve the problem that the problems such as system cost is high, collecting signal is weak and detection accuracy is poor, and compared with existing equipment convenient for executing the high efficient detection to the uncertain measurand of all kinds of detection ranges.
Description
Technical field
The invention belongs to atomic emission detection equipment related fieldss, have Multi probe light more particularly, to one kind
The long-range LIBS test macro of signal collection unit, can by low cost, convenient for manipulation and it is high-precision in a manner of execute LIBS
Test, and it is particularly suitable for the long-range detection occasion of the environment such as radiation, high temperature, explosion and deep space.
Background technique
Technology is again for laser induced breakdown spectroscopy (Laser-Induced Breakdown Spectroscopy, abbreviation LIBS)
Referred to as laser microprobe technology, it carries out ablation to material using high energy laser, and it is close to form high temperature, high electron number on the surface of the material
The plasma of degree, and analyzed by the characteristic spectral line and its intensity of multielement in plasma, it can be achieved that material
The qualitative analysis of middle each element composition and content.Compared with traditional Detection Techniques, LIBS technology have it is real-time, quick, be not necessarily to
Sample pretreatment thus is increasingly widely applied, it can be achieved that multielement such as detects at the multinomial advantage simultaneously.
It is found in practice, when test object distance is farther out or when personnel can not be close, often requires to use long-range LIBS skill
Art carries out in-situ investigation to substance.However, current long-range LIBS technology is still faced with laser energy remote transmission and plasma
The two big outstanding problems of efficient collection of body spectrum.In order to improve these problems, some solution party have been proposed in the prior art
Case.For example, WO03/027650A discloses a kind of analysis system detected at a distance based on LIBS technology to polycyclic aromatic hydrocarbon, receive
Collecting system uses optic fibre light path formula, collects more useful signals, but its optical element need to improve laser energy using heavy caliber
Can transmission and collecting efficiency, and needing for fibre-optical probe to be placed in detected object before testing nearby just can effective collecting signal；For another example,
CN103954593A discloses a kind of plasma signal acquisition device based on laser induced breakdown spectroscopy, utilizes two
A above collection len collects plasma signal from different perspectives, and signal inputs multiple spectrometers respectively and will use after Signal averaging
In spectrum analysis, but it must be simultaneously using multiple spectrometers be arrived, and equipment cost significantly increases；In addition, CN103411932B is draped over one's shoulders
A kind of LIBS test macro and test method based on remote zoom path multiplexing is revealed, although LIBS excitation and light can be realized
The path multiplexing of spectrum signal acquisition, but further investigations have shown that, which acquires also with optical elements of large caliber
Signal, optical elements of large caliber grinds difficulty, and is easily deformed, thus there are detection system costs of manufacture high, detection accuracy is not
The problems such as stablizing.
Summary of the invention
For the above insufficient or Improvement requirement of the prior art, the present invention provides one kind to have the collection of Multi probe optical signal
The long-range LIBS test macro of unit, wherein the characteristics of by comprehensively considering long-range LIBS characterization processes itself and various limitations,
Design re-started to its whole light path layout and construction arrangement, at the same to significant components such as multipath light signal collector unit with
Concrete composition structure, critical performance parameters and mutual cooperation mode of focusing microscope group etc. etc. are made further optimization and are ground
Study carefully, more actual test shows that remote LIBS signal can not only can be realized merely with conventional small-bore eyeglass in it
Acquisition, and also can effectively solve the problems such as system cost is high, collecting signal is weak and detection accuracy is poor compared with existing equipment, because
And it is particularly suitable for executing the efficient detection to the uncertain measurand of all kinds of detection ranges.
To achieve the above object, it is proposed, according to the invention, provide and a kind of have the long-range of Multi probe optical signal collector unit
LIBS test macro, the test macro include pulse laser, beam expanding lens, focusing microscope group, the first dichroscope, the second dichroic
Mirror, multipath light signal collector unit and spectrometer, it is characterised in that:
The pulse laser is used to emit the laser beam of required pulse energy and wavelength, these laser beams are logical first
It crosses the beam expanding lens execution and expands processing, then along optical axis through the focusing microscope group to realize light beam in different location
Focusing；First dichroscope, the second dichroscope and optical axis are in a certain angle and be set in parallel to each other in the tune
The rear of burnt microscope group, thus laser beam remotely propagated and is focused at a little form plasma on measurand surface
Optical signal, while the plasma optical signal is given into backpropagation；
The multipath light signal collector unit and the focusing microscope group are arranged in same optical axis, and for backpropagation
Plasma optical signal execute collection；The optical signal collector unit includes multiple sub- collections probes, collects respectively with each height
The fine optical-fiber bundling device for closing beam passage, all light splitting optical fiber signalings close beam of the light splitting being correspondingly connected with of popping one's head in, and will coupling
Combining optical signal afterwards is sent to the transmission fiber of the spectrometer；In addition, each height collects probe by small-bore lens group
At.
As a further preferred embodiment of the present invention, the pulse laser is preferably nanosecond laser, and its laser
Output wavelength is set to 1064nm, and laser single-pulse energy is set to 30 millijoules~300 millijoules.
As a further preferred embodiment of the present invention, the beam expanding lens is preferably manufactured using ultraviolet quartz material, and its
Entrance pupil bore is set to be greater than the hot spot of the pulse laser.
As a further preferred embodiment of the present invention, the lens of the focusing microscope group are preferably coated with the height of 1064nm thoroughly
Film, and first dichroscope, the second dichroscope are preferably coated with the high-reflecting film and 200nm~800nm of 1064nm
High transmittance film.
As a further preferred embodiment of the present invention, the sub- collection probe is the small-bore of 6mm~50mm by diameter
Lens composition, is further preferably made of the small-bore lens of 10mm~20mm.
As a further preferred embodiment of the present invention, the total quantity of the sub- collection probe is preferably 3 or more.
As a further preferred embodiment of the present invention, the total quantity of the sub- collection probe is preferably 5, and in them
One be disposed in planar central, remaining four evenly around being arranged in its surrounding.
As a further preferred embodiment of the present invention, the total quantity of the sub- collection probe is preferably 5, and in them
Three be linearly arranged in plane upper side, remaining two it is each linearly be arranged in downside.
As a further preferred embodiment of the present invention, the service band for collecting optical fiber is preferably 200nm~800nm.
As a further preferred embodiment of the present invention, echelle spectrometer or Czerny- is can be used in the spectrometer
Turner spectrometer.
As a further preferred embodiment of the present invention, the measurand is preferably arranged in second dichroscope
Rear, and its horizontal space between this second dichroscope is freely adjustable.
As a further preferred embodiment of the present invention, above-mentioned long-range LIBS test macro further includes reinforced electric coupled apparatus
And central processing unit, wherein the reinforced electric coupled apparatus is used to execute the spectrometer plasma after light-splitting processing
Optical signal executes photoelectric conversion, its spectral signal is then analyzed by the central processing unit and is exported.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, mainly have below
Technological merit:
1, whole light path layout and construction arrangement are re-started by testing the feature of itself in conjunction with long-range LIBS
Design, overall system structure is compact, is convenient for manipulation, and wherein adjustable focus focusing unit is matched with multipath light signal collector unit
It closes and is arranged in same optical axis, be accordingly not only conducive to flexible modulation in practical applications, but also can efficiently realize to detection range
The long-range detection of uncertain all kinds of measurands；
2, especially, in the present invention to the concrete composition structure of optical signal collector unit, combination settings mode etc. specially into
Design is gone, wherein small-bore collecting son probe by the way that Selection utilization is multiple and combining and complete adopting in real time for long-range LIBS signal
Collection, the collected multipath light signal of institute is transmitted and merged into via multiple beams of optical fiber Channel Synchronous executes light splitting all the way, is setting in this way
The standby link that designs and manufactures need not use any bigbore optical element but the small-bore eyeglass of routine, while only need one
Spectrometer can freely change quantity and arrangement of son probe etc. to carry out the system reform, accordingly according to actual experiment demand
System cost can be greatly lowered, and whole collection subsystem is not limited by optical element bore, be remarkably improved acquisition effect
Rate, while helping to enhance collecting signal and improving detection accuracy；
3, the present invention is also to some critical performance parameters (mirror including optical signal collector unit for influencing integrated testability precision
Piece arrangement mode, quantity and job specifications etc.) further optimization design has been made, more test shows that above-mentioned parameter can
Ensure reliablely and stablely to execute long-range LIBS test technology, and gives full play to multiple small-bore combination acquisition effects for collecting son probe
Fruit further increases detection accuracy compared with existing heavy caliber acquisition mode.
Detailed description of the invention
Fig. 1 is the long-range LIBS for having Multi probe optical signal collector unit constructed by the preferred embodiment for the present invention
The overall construction schematic diagram of test macro；
Fig. 2 more specifically shows the structure composition schematic diagram of multipath light signal collector unit shown in Fig. 1；
Fig. 3 a, 3b and 3c are respectively illustrated to be visited according to multiple small-bore collection designed by the preferred embodiment for the present invention
The arrangement figure of head；
Fig. 4 is to execute long-range LIBS spectrogram obtained to micro alloyed steel sample using test macro of the invention；
Fig. 5 is that 1-5 small-bore collection probes have been respectively adopted, and mutually copes with same micro alloyed steel sample and respectively obtains
Spectral intensity comparison diagram, wherein choose tri- spectral lines of Mn element 403.075nm, 403.30nm and 403.44nm intensity and be
The intensity of characteristic wavelength；
Fig. 6 is mutually to cope with the spectrum that 7 parts of micro alloyed steel samples respectively obtain by taking 3 small-bore collection probes as an example
Intensity contrast figure, wherein choosing the intensity of tri- spectral lines of Mn element 403.075nm, 403.30nm and 403.44nm and being characterized wave
Long intensity；
In all the appended drawings, identical appended drawing reference is used to denote the same element or structure, in which:
1- pulse laser；2- beam expanding lens；3- focusing microscope group；The first dichroscope of 4-；The second dichroscope of 5-；6- detection
Object；7- multipath light signal collector unit；8- spectrometer；9- reinforced electric coupled apparatus；10- central processing unit；11- is received
Collection probe；12- light splitting is fine to close beam passage；13- optical-fiber bundling device；14- transmission fiber
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
Fig. 1 is the long-range LIBS for having Multi probe optical signal collector unit constructed by the preferred embodiment for the present invention
The overall construction schematic diagram of test macro, Fig. 2 more specifically show the structure of multipath light signal collector unit shown in Fig. 1
Composition schematic diagram.As shown in Figures 1 and 2, which mainly includes pulse laser 1, beam expanding lens 2, adjusts
The constituent element such as burnt microscope group 3, the first dichroscope 4, the second dichroscope 5, multipath light signal collector unit 7 and spectrometer 8, under
Face will carry out specific explanations explanation to it.
Pulse laser 1 for example can be selected nanosecond laser, can also using picosecond or femto-second laser.Laser output wave
Long is preferably 1064nm.According to different test objects, laser single-pulse energy can be carried out in several millijoules to several hundred millijoule ranges
Flexible modulation.When in use, it is used to emit the laser beam of required pulse energy and wavelength, these laser beams pass through first
The execution of beam expanding lens 2 expands processing, then along optical axis through focusing microscope group 3 to realize light beam in the focusing of different location.
In the process, ultraviolet quartz material preferably can be used in beam expanding lens, and its entrance pupil bore is set greater than to the hot spot of laser,
Accordingly according to test macro constructed by the present invention, beam divergence angle can be effectively reduced, realizes that focal beam spot is smaller
Purpose.In addition, can be changed by adjusting focusing system microscope group spacing for the flexible modulation for realizing long-range LIBS system detection distance
Become the focal length of light path system.Preferably, the lens of focusing microscope group 3 are coated with 1064nm high transmittance film, to improve transmitance, effectively
Ground reduces optical energy loss.
First dichroscope 4, the second dichroscope 5 is in a certain angle with optical axis and is set in parallel to each other described
The rear of focusing microscope group 3, thus laser beam is remotely propagated and is focused on 6 surface of measurand a little come formed etc. from
Daughter optical signal, while the plasma optical signal is given into backpropagation.As shown in fig. 1, the two dichroscopes are for example
It can be coated with 1064nm high-reflecting film and 200-800nm high transmittance film, they are in same optical axis in the vertical direction, and by laser light
It is accurately converged in measurand 6 after the conversion of Shu Zhihang optical path；Equally, plasma optical signal is back through the two dichroics
Then mirror reaches multipath light signal collector unit 7.
As one of key improvements of the invention, multipath light signal collector unit 7 and focusing microscope group 3 are arranged in same optical axis
On, and for executing collection to the plasma optical signal of backpropagation.It is specific as shown in Figure 2, the optical signal collector unit
May include multiple sub- collections probes 11, collect with each height that probe is correspondingly connected with respectively divide optical-fiber bundling device channel 12, will
All light splitting optical fiber signalings close the optical-fiber bundling device 13 of beam, and combining optical signal is sent to the transmission of the spectrometer 8
Optical fiber 14.It is important to note that the sub- collection probe is made of the small-bore lens that diameter is 6mm~50mm, into
One step is preferably made of the small-bore lens of 10mm~20mm, and the single or multiple heavy caliber light in existing equipment are substituted with this
Element is learned, multipath light signal collected transmits through multiple beams of optical fiber, merges into all the way, be transferred under the action of optical-fiber bundling device
It is divided in spectrometer, accordingly not only effectively increases the collection efficiency of LIBS signal, but also receipts can be further enhanced
Collect signal and improves detection accuracy.
Above-mentioned test macro may be fitted with reinforced electric coupled apparatus (ICCD) 9 and central processing unit 10, wherein
The reinforced electric coupled apparatus 9 is used to execute the spectrometer plasma optical signal execution photoelectricity turn after light-splitting processing
It changes, its spectral signal is then analyzed by the central processing unit 10 and is exported.More specifically, central processing unit example
For example computer, ICCD can pass through setting ICCD detector and in the present invention for realizing the photoelectric conversion of spectral signal
Gain size and the gate-width time obtain optimal spectrum data, while by adjusting the ginseng such as optical system and pulsed laser energy
Number selection the mcxst optimizing experimental parameters, quality controllable qualitative and quantitative analysis is carried out to test substance.
The course of work of test macro according to the invention is explained further below in conjunction with specific embodiment.
Embodiment 1
Firstly, selecting cylindrical micro alloyed steel sample (GSB 03-2453-2008 national standard sample), guarantee two circles
Plane is parallel, and carries out careful grinding and buffing processing to one of disk, guarantees the smooth and smooth of sample surfaces,
And using buffed surface as detection faces, the preparation of micro alloyed steel sample is completed.
Then, the whether not damaged scuffing of each optical element of remote laser probe analyzer is checked, whether is laser pulse
Detection sample surfaces are accurately focused on, plasma signal collects whether light path system normally collects plasma optical signal, light
Whether spectrometer work is normal.
Then, spectra collection carries out under air environment, and experimental provision is as shown in Figure 1.For example use Q-switch Nd:YAG
Pulse laser as excitation light source, collected and be transmitted to by multipath light signal collector unit by the plasma resonance light inspired
Spectrometer 8 (wave-length coverage 200-850nm).This spectrum data gathering distance is 2 meters, and (i.e. the second dichroscope 5 is to tested pair
As the horizontal distance between 6).To obtain optimal spectral intensity and spectrum signal-to-background ratio, preferably by laser arteries and veins in the present embodiment
It rushes energy and is set as 60mJ, delay and gate-width are set to 3 μ s and 16us.Under process above parameter, the micro- conjunction of standard sample is acquired
The plasma spectrometry of Jin Gang accordingly obtains micro alloyed steel sample LIBS spectrogram as shown in Figure 4, the results showed that according to this hair
The bright long-range detection that can efficiently realize all kinds of measurands uncertain to detection range.
A preferred embodiment according to the invention, as shown in Fig. 3 a to 3c, it is shown that the sub- collection probe
The further preferred design of quantity and its specific arrangement mode.As shown, its total quantity is preferably for example 5, and in addition to
Conventional entirety is linearly except formula arrangement, and can also be designed to: one of which is disposed in planar central, remaining
Four evenly around being arranged in its surrounding；Or three in them are linearly arranged in plane upper side, remaining two it is each linearly
It is arranged in downside.Actual test shows that above-mentioned quantity and arrangement mode further help to ensure that and reliablely and stablely executes remotely
LIBS test technology, and give full play to multiple small-bore combination collection effects for collecting son probe.
In order to more clearly visible prove above-mentioned conclusion, national standard micro alloyed steel sample (1#-7#) can be acquired respectively to obtain
Obtain spectroscopic data.Acquisition mode is respectively adopted according to 1-5 designed by the present invention identical sub- probe collection spectrum numbers of collection
According to each sample acquires 10 width spectrograms.Mn element 403.075nm, 403.30nm, 403.44nm tri- is chosen in this example
The intensity of spectral line and the intensity for being characterized wavelength.For choosing No. 7 samples, in the case where 1-5 collection is popped one's head in, spectral intensity is compared
As shown in Figure 5.From Fig. 5, it is apparent that spectral intensity is remarkably reinforced in the case where multiple collections son probe, plasma letter
Number collection efficiency and intensity, which obtain, further to be promoted.
Embodiment 2
Microelement in micro alloyed steel is carried out with telescopic system further, it is also possible to be utilized respectively 3 collection son probes
Contrasting detection.Here it is different (two 2 inches, one 1 inch) that 3 collections probe may be designed as size, but close size and
Telescope primary mirror chip size is identical, has comparison meaning.Specific steps are as follows:
Firstly, selecting cylindrical micro alloyed steel sample (GSB 03-2453-2008 national standard sample), guarantee two circles
Plane is parallel, and carries out careful grinding and buffing processing to one of disk, guarantees the smooth and smooth of sample surfaces,
And using buffed surface as detection faces, the preparation of micro alloyed steel sample is completed.
Then, the whether not damaged scuffing of each optical element of remote laser probe analysis system is checked, laser pulse is
No accurately to focus on detection sample surfaces, plasma signal collects whether light path system normally collects plasma optical signal,
Whether spectrometer work is normal.Whether each element of telescopic system is not damaged, and whether mounting means is appropriate.
Then, spectra collection carries out under air environment, and experimental provision is as shown in Figure 1.Q-switch Nd for example can be used:
YAG pulse laser as excitation light source, collected and passed by multipath light signal collector unit by the plasma resonance light inspired
Transport to spectrometer 8 (wave-length coverage 200-850nm).This spectrum data gathering distance is 2 meters；To obtain optimal spectral intensity
With spectrum signal-to-background ratio, pulsed laser energy is preferably set to 60mJ, and delay and gate-width are set to 3 μ s and 16us.In process above
Under parameter, the plasma spectrometry of standard sample micro alloyed steel is acquired.
National standard micro alloyed steel sample (1#-7#) spectroscopic data is acquired respectively.Acquisition mode is respectively adopted: (one) 3
Probe collection spectroscopic data is collected, each sample acquires 10 width spectrograms；(2) lens cone for telescope collects spectroscopic data, each sample
Product acquire 10 width spectrograms.Telescope is for example Memade commercialization telescope.Mn element 403.075nm is chosen in this example,
The intensity of tri- spectral lines of 403.30nm, 403.44nm and the intensity for being characterized wavelength.1#-7# sample is chosen, is visited in 3 collections
The lower spectral intensity of head and telescopic system collection spectral intensity comparison are specific as shown in Figure 6.Even if it can be seen from the figure that adopting
In the case where with 3 collection son probes, spectral intensity is remarkably reinforced than identical size telescope spectral intensity, plasma letter
Number collection efficiency synchronization gain improves.
To sum up, through the invention constructed overall system structure it is compact, convenient for manipulation, be not only conducive in practical applications
Flexible modulation, and can efficiently realize the long-range detection of all kinds of measurands uncertain to detection range, thus it is especially suitable
In the long-range detection occasion of the environment such as radiation, high temperature, explosion and deep space.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (10)
1. a kind of long-range LIBS test macro for having Multi probe optical signal collector unit, which includes pulse laser
(1), beam expanding lens (2), focusing microscope group (3), the first dichroscope (4), the second dichroscope (5), multipath light signal collector unit
(7) and spectrometer (8), it is characterised in that:
The pulse laser (1) is used to emit the laser beam of required pulse energy and wavelength, these laser beams are logical first
It crosses the beam expanding lens (2) execution and expands processing, then along optical axis through the focusing microscope group (3) to realize light beam not
With the focusing of position；First dichroscope (4), the second dichroscope (5) and optical axis are in a certain angle and in parallel to each other
Rear in the focusing microscope group (3) is set, thus laser beam is remotely propagated and is focused at one on measurand surface
The plasma optical signal is given backpropagation to form plasma optical signal by point；
The multipath light signal collector unit (7) and the focusing microscope group (3) are arranged in same optical axis, and for passing to reversed
The plasma optical signal broadcast executes collection；The multipath light signal collector unit include multiple sub- collections probes (11), respectively with
Each height collects the optical fiber conjunction for dividing optical-fiber bundling device channel (12), all light splitting optical fiber signalings close beam that probe is correspondingly connected with
Beam device (13), and the transmission fibers (14) of the spectrometer (8) is sent to by optical signal is combined；In addition, in entire test system
The quantity of spectrometer described in system is only one；Each height is collected probe and is made of small-bore lens, and these are small-bore
The diameter of lens is 6mm~50mm, thus completes the real-time of long-range LIBS signal using the multiple sub- collection probe to combine
Acquisition.
2. long-range LIBS test macro as described in claim 1, which is characterized in that the pulse laser (1) is swashed for nanosecond
Light device, and its laser output wavelength is set to 1064nm, and laser single-pulse energy is set to 30 millijoules~300 millijoules.
3. long-range LIBS test macro as claimed in claim 1 or 2, which is characterized in that the beam expanding lens (2) uses ultraviolet stone
The manufacture of English material, and its entrance pupil bore is set to be greater than the hot spot of the pulse laser.
4. long-range LIBS test macro as claimed in claim 1 or 2, which is characterized in that the lens of the focusing microscope group (3) are equal
It is coated with the high transmittance film of 1064nm, and first dichroscope (4), the second dichroscope (5) are coated with the height of 1064nm instead
The high transmittance film of film and 200nm~800nm.
5. LIBS test macro as claimed in claim 1 or 2 long-range, which is characterized in that the diameter of the small-bore lens is
10mm~20mm.
6. long-range LIBS test macro as claimed in claim 1 or 2, which is characterized in that the multiple sub- collection is popped one's head in total
Quantity is 3 or more.
7. long-range LIBS test macro as claimed in claim 6, which is characterized in that the total quantity of the multiple sub- collection probe
It is 5, and one of which is disposed in planar central, remaining four evenly around being arranged in its surrounding.
8. long-range LIBS test macro as claimed in claim 6, which is characterized in that the total quantity of the multiple sub- collection probe
It is 5, and three in them are linearly arranged in plane upper side, other two is linearly arranged in downside.
9. long-range LIBS test macro as claimed in claim 1 or 2, which is characterized in that the measurand is disposed in institute
The rear of the second dichroscope (5) is stated, and its horizontal space between this second dichroscope is freely adjustable.
10. long-range LIBS test macro as claimed in claim 1 or 2, which is characterized in that above-mentioned long-range LIBS test macro is also
Including reinforced electric coupled apparatus (9) and central processing unit (10), wherein the reinforced electric coupled apparatus is used for the light
Spectrometer executes the plasma optical signal execution photoelectric conversion after light-splitting processing, then analyzes it by the central processing unit
It spectral signal and is exported.
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| CN108982467B (en) * | 2018-06-15 | 2024-06-25 | 中国工程物理研究院材料研究所 | Raman fiber micro probe with low spectrum background |
| CN112129742A (en) * | 2020-09-10 | 2020-12-25 | 刘舆帅 | Coal element detector |
| CN113740318B (en) * | 2021-08-24 | 2023-05-30 | 苏州热工研究院有限公司 | Laser-induced breakdown spectroscopy detection system and detection method |
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Inventor after: Li Xiangyou Inventor after: Li Wanting Inventor after: Zhu Zhihao Inventor after: Hao Zhongqi Inventor after: Guo Lianbo Inventor after: Zeng Xiaoyan Inventor before: Li Xiangyou Inventor before: Li Wanting Inventor before: Zhu Zhihao Inventor before: Hao Zhongqi Inventor before: Guo Lianbo Inventor before: Zeng Xiaoyan Inventor before: Lu Yongfeng |