CN106702477A - Coaxial electrode for film guide furnace - Google Patents
Coaxial electrode for film guide furnace Download PDFInfo
- Publication number
- CN106702477A CN106702477A CN201710091492.3A CN201710091492A CN106702477A CN 106702477 A CN106702477 A CN 106702477A CN 201710091492 A CN201710091492 A CN 201710091492A CN 106702477 A CN106702477 A CN 106702477A
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- CN
- China
- Prior art keywords
- electrode
- insulation sleeve
- cooling holes
- guided mode
- coaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/34—Edge-defined film-fed crystal-growth using dies or slits
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/20—Aluminium oxides
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Resistance Heating (AREA)
- Vertical, Hearth, Or Arc Furnaces (AREA)
Abstract
The invention relates to a coaxial electrode for a film guide furnace. An electrode perforate is formed in an electrode main body (11); an insulating sleeve is arranged in the electrode perforate; a right electrode (13) is arranged in the insulating sleeve; a sealing sleeve (15) is arranged at the lower end of the electrode perforate; a sealing body is arranged between the outer edge surface of the sealing sleeve and the inner edge surface of the electrode perforate; a sealing body is arranged between the inner edge surface of the sealing sleeve and the outer edge surface of the right electrode; at least one cooling hole A (5) is formed in one side of the electrode perforate; the upper end of the cooling hole is connected with a left electrode (3). The left electrode parallel with the right electrode is arranged on the outer edge surface of the electrode main body, so the electrode structure is greatly simplified; furthermore, the electrode main body adopts a cylindrical structure, so the sealing property between the electrode and a furnace chamber is greatly improved and leakage of the furnace chamber is effectively avoided; the coaxial electrode for the film guide furnace has the characteristics of simple structure, high sealing property and convenience in assembling and disassembling.
Description
【Technical field】
The present invention relates to a kind of coaxial electrode, more particularly to a kind of coaxial electrode for guided mode stove, and in particular to one kind draws
The guided mode stove coaxial electrode of sapphire crystal.
【Background technology】
It is known, in today that science and technology is developed rapidly, the application of crystal widely, from navigation to space flight, from microelectronics to light
Electronics, from automatically control to intellectual technology, from computer to communication, from life science to medical technology, from civilian technology to state
Anti- science and technology can leave crystalline material without which new and high technology, and different crystal has different abilities, various people
Each side shows its own prowess in modern science and technology for work crystal；By taking sapphire as an example, because sapphire has excellent optical property, mechanicalness
Can and chemical stability, its intensity is high, hardness is big, resistance to erosion and anticorrosive, can be close under 2000 DEG C of mal-conditions of high temperature
Work, and it also has good heat conductivity and electric insulating quality, it is most important that and sapphire also has good printing opacity
Property, it is widely used in the technical fields such as infrared window, high intensity optical window and medicine equipment；
And sapphire needs to be realized by single crystal growing furnace in growth, then single crystal growing furnace is just into crystalline substance important in LED industry chain
Body growth apparatus, form because sapphire monocrystal must slowly grow under conditions of high temperature with inert gas shielding, therefore
The electrode being connected with heater, its sealing, electric conductivity and heat resistance etc. are particularly important.At present, sapphire furnace is used
All there is complex structure in electrode, size is larger mostly, install the drawbacks such as trouble, simultaneously as electrode sealing property is bad, easily
There is leakage etc. in contact surface.
【The content of the invention】
In view of not enough present in background technology, the invention discloses a kind of coaxial electrode for guided mode stove, the present invention passes through
Right electrode is set on electrode body, the left electrode with right electrode runs parallel is set on the outer edge surface of electrode body, right electrode with
Electrode body is isolated by insulation sleeve, enormously simplify electrode structure, because electrode body is cylindrical structural, is substantially increased
Sealing property between electrode and furnace chamber, is effectively prevented the leakage of furnace chamber and reduces difficulty of electrode dismounting etc..
In order to realize the purpose of foregoing invention, the present invention is adopted the following technical scheme that：
A kind of coaxial electrode for guided mode stove, including left electrode, electrode body, right electrode and insulation sleeve, on electrode body
Electrode perforations are provided with, insulation sleeve is provided with the electrode perforations, right electrode is provided with the insulation sleeve, under electrode perforations
End is provided with sealing shroud, and seal, the inner edge of sealing shroud are provided between the outer edge surface of the sealing shroud and the inner edge surface of electrode perforations
Seal is provided between the outer edge surface of face and right electrode, at least one Cooling Holes A, the cooling are provided with the side of electrode perforations
Hole A upper ends connect left electrode and form the described coaxial electrode for guided mode stove.
The described coaxial electrode for guided mode stove, the Cooling Holes A is set to three in sector, in three coolings
The upper end of hole A is provided with the upper end of the deep-slotted chip breaker A, the deep-slotted chip breaker A of three Cooling Holes A of insertion by cover plate for sealing, in deep-slotted chip breaker A
Side be provided with through hole, the through hole connects left electrode, and three arcs of Cooling Holes A of insertion are provided with the lower end of three Cooling Holes A
Shape groove B, cover plate is provided with the openend of the deep-slotted chip breaker B, and the cover plate is provided with through hole, the through hole jointing A.
The described coaxial electrode for guided mode stove, the seal is O-ring seal.
The described coaxial electrode for guided mode stove, the sealing shroud is fixed in electrode perforations by retaining ring.
The described coaxial electrode for guided mode stove, the insulation sleeve includes insulation sleeve epimere, insulation sleeve stage casing and insulation
Set hypomere, the upper end of the insulation sleeve epimere is provided with annular boss, insulation sleeve stage casing is provided with the lower end of insulation sleeve epimere, described
The lower end in insulation sleeve stage casing is provided with insulation sleeve hypomere, and sealing shroud is provided with the lower end of insulation sleeve hypomere.
The described coaxial electrode for guided mode stove, the electrode body is cylindrical structural, in the outer rim of electrode body
Face is provided with electrode fixed cover, and the electrode fixed cover connects body of heater.
The described coaxial electrode for guided mode stove, the outer edge surface of the left electrode upper end is provided with screw thread, in left electrode
Insertion to the hole of Cooling Holes A is provided with the middle part of upper end, annular groove A is provided with the periphery in hole.
The described coaxial electrode for guided mode stove, the outer edge surface of the right electrode upper end is provided with screw thread, in right electrode
Cooling Holes B is provided with the middle part of upper end, annular groove B is provided with the periphery of Cooling Holes B.
The described coaxial electrode for guided mode stove, the lower end of the right electrode is provided with joint B.
Due to using above-mentioned technical proposal, the present invention to have the advantages that：
A kind of coaxial electrode for guided mode stove of the present invention, the present invention is right by setting right electrode on electrode body
Electrode is isolated with electrode body by insulation sleeve, further, the left side with right electrode runs parallel is set on the outer edge surface of electrode body
Electrode, enormously simplify electrode structure, while the upper end of right electrode of the invention and left electrode is respectively equipped with annular groove, in annular
Sealing ring is set, it is ensured that the sealing property between electrode and heating coil, further, because electrode body is cylinder in groove
Structure, substantially increases the sealing property between electrode and furnace chamber, is effectively prevented leakage of furnace chamber etc., and the present invention has knot
Structure is simple, good seal performance and the characteristics of be convenient to mount and dismount.
【Brief description of the drawings】
Fig. 1 is structural representation of the invention；
Fig. 2 is partial schematic sectional view of the invention；
In figure：1st, annular groove A；2nd, cover plate；3rd, left electrode；4th, deep-slotted chip breaker A；5th, Cooling Holes A；6th, joint A；7th, annular groove B；8、
Cooling Holes B；9th, insulation sleeve epimere；10th, insulation sleeve stage casing；11st, electrode body；12nd, insulation sleeve hypomere；13rd, right electrode；14th, it is close
Seal；15th, sealing shroud；16th, retaining ring；17th, joint B；18th, deep-slotted chip breaker B.
【Specific embodiment】
With reference to the following examples, the present invention can be explained in greater detail；But, the invention is not limited in these embodiments.
A kind of coaxial electrode for guided mode stove with reference to described in accompanying drawing 1~2, including left electrode 3, electrode body 11, the right side
Electrode 13 and insulation sleeve, the electrode body 11 are set to cylindrical structural, and electrode is provided with the outer edge surface of electrode body 11
Fixed cover, the electrode fixed cover connects body of heater；When mounted, sealing ring is provided between electrode fixed cover and body of heater, in reality
In, sealing ring can select O-ring seal, and electrode fixed cover can be bolted on body of heater；
Further, electrode perforations, the center of the center deviation electrode body 11 of electrode perforations, in institute are provided with electrode body 11
State and insulation sleeve be provided with electrode perforations, the insulation sleeve includes insulation sleeve epimere 9, insulation sleeve stage casing 10 and insulation sleeve hypomere 12,
The upper end of the insulation sleeve epimere 9 is provided with annular boss, and insulation sleeve stage casing 10 is provided with the lower end of insulation sleeve epimere 9, described exhausted
The lower end in edge set stage casing 10 is provided with insulation sleeve hypomere 12, and sealing shroud 15, the insulation sleeve are provided with the lower end of insulation sleeve hypomere 12
Right electrode 13 is inside provided with, the outer edge surface of the upper end of right electrode 13 is provided with screw thread, is provided with cold in the middle part of the upper end of right electrode 13
But hole B8, annular groove B7 is provided with the periphery of Cooling Holes B8, and the lower end of the right electrode 13 is provided with joint B17.In electrode perforations
Lower end be provided with sealing shroud 15, the sealing shroud 15 is fixed in electrode perforations by retaining ring 16, in the outer rim of sealing shroud 15
Seal is provided between face and the inner edge surface of electrode perforations, is provided between the inner edge surface of sealing shroud 15 and the outer edge surface of right electrode 13
Seal, is provided with least one Cooling Holes A5, in the center deviation electrode body 11 of Cooling Holes A5 in the side of electrode perforations
The heart, in actual implementation process, the Cooling Holes A5 is preferably set to three in sector, three upper ends of Cooling Holes A5
The upper end for being provided with the deep-slotted chip breaker A4, the deep-slotted chip breaker A4 of three Cooling Holes A5 of insertion is sealed by cover plate 2, the one of deep-slotted chip breaker A4
Side is provided with through hole, and the through hole connects left electrode 3, and the left electrode 3 is L-shaped structure, one end and the electrode body 11 of left electrode 3
Parallel and interval setting, the other end of left electrode 3 is fixed on the outer edge surface of electrode body 11 by soldering, on left electrode 3
The outer edge surface at end is provided with screw thread（As shown in Figure 1）, insertion to the L-shaped hole of Cooling Holes A5 is provided with the middle part of the upper end of left electrode 3,
Annular groove A1 is provided with the periphery in hole.The deep-slotted chip breaker B18 of three Cooling Holes A5 of insertion is provided with the lower end of three Cooling Holes A5,
The openend of the deep-slotted chip breaker B18 is provided with cover plate, and the cover plate is provided with through hole, the through hole jointing A6；The cooling
Hole A5 upper ends connect left electrode 3 and form the described coaxial electrode for guided mode stove, wherein the seal is O-ring seal.
The present invention when specifically used, by setting right electrode 13, right electrode 13 and electrode body on electrode body 11
11 are isolated by insulation sleeve, further, the left electrode 3 parallel with right electrode 13 are set on the outer edge surface of electrode body 11, greatly
Electrode structure is simplified greatly, while the upper end of right electrode 13 of the invention and left electrode 3 is respectively equipped with annular groove, in annular groove
Sealing ring is set, it is ensured that the sealing property between electrode and heating coil, further, due to electrode body 11 for cylinder is tied
Structure, substantially increases the sealing property between electrode and furnace chamber, is effectively prevented leakage of furnace chamber etc., and the present invention is by actual
Application, clearly, the present invention has a simple structure to effect, good seal performance and the characteristics of be convenient to mount and dismount, and is especially suitable for big
The promotion and application of scope.
Part not in the detailed description of the invention is prior art.
The embodiment selected herein for the open purpose of the present invention, is presently considered to be suitable, but, Ying Liao
Solution, it is contemplated that all changes for belonging to the embodiment in this design and invention scope including all and improvement.
Claims (9)
1. a kind of coaxial electrode for guided mode stove, including left electrode（3）, electrode body（11）, right electrode（13）And insulation sleeve,
It is characterized in that：In electrode body（11）Electrode perforations are provided with, insulation sleeve are provided with the electrode perforations, in the insulation sleeve
It is provided with right electrode（13）, sealing shroud is provided with the lower end of electrode perforations（15）, the sealing shroud（15）Outer edge surface worn with electrode
Seal, sealing shroud are provided between the inner edge surface in hole（15）Inner edge surface and right electrode（13）Outer edge surface between be provided with sealing
Body, at least one Cooling Holes A is provided with the side of electrode perforations（5）, the Cooling Holes A（5）Upper end connects left electrode（3）Formed
The described coaxial electrode for guided mode stove.
2. the coaxial electrode of guided mode stove is used for as claimed in claim 1, it is characterized in that：The Cooling Holes A（5）It is spaced in sector
Three are set to, in three Cooling Holes A（5）Upper end be provided with three Cooling Holes A of insertion（5）Deep-slotted chip breaker A（4）, the arc
Groove A（4）Upper end pass through cover plate（2）Sealing, in deep-slotted chip breaker A（4）Side be provided with through hole, the through hole connects left electrode（3）,
In three Cooling Holes A（5）Lower end be provided with three Cooling Holes A of insertion（5）Deep-slotted chip breaker B（18）, in the deep-slotted chip breaker B（18）'s
Openend is provided with cover plate, and the cover plate is provided with through hole, the through hole jointing A（6）.
3. the coaxial electrode of guided mode stove is used for as claimed in claim 1, it is characterized in that：The seal is O-ring.
4. the coaxial electrode of guided mode stove is used for as claimed in claim 1, it is characterized in that：The sealing shroud（15）By retaining ring
（16）It is fixed in electrode perforations.
5. the coaxial electrode of guided mode stove is used for as claimed in claim 1, it is characterized in that：The insulation sleeve includes insulation sleeve epimere
（9）, insulation sleeve stage casing（10）With insulation sleeve hypomere（12）, the insulation sleeve epimere（9）Upper end be provided with annular boss, insulation
Set epimere（9）Lower end be provided with insulation sleeve stage casing（10）, the insulation sleeve stage casing（10）Lower end be provided with insulation sleeve hypomere（12）,
In insulation sleeve hypomere（12）Lower end be provided with sealing shroud（15）.
6. the coaxial electrode of guided mode stove is used for as claimed in claim 1, it is characterized in that：The electrode body（11）It is cylinder
Structure, in electrode body（11）Outer edge surface be provided with electrode fixed cover, the electrode fixed cover connects body of heater.
7. the coaxial electrode of guided mode stove is used for as claimed in claim 1, it is characterized in that：The left electrode（3）The outer rim of upper end
Face is provided with screw thread, in left electrode（3）Insertion to Cooling Holes A is provided with the middle part of upper end（5）Hole, be provided with annular in the periphery in hole
Groove A（1）.
8. the coaxial electrode of guided mode stove is used for as claimed in claim 1, it is characterized in that：The right electrode（13）The outer rim of upper end
Face is provided with screw thread, in right electrode（13）Cooling Holes B is provided with the middle part of upper end（8）, in Cooling Holes B（8）Periphery be provided with annular
Groove B7.
9. the coaxial electrode of guided mode stove is used for as claimed in claim 1, it is characterized in that：The right electrode（13）Lower end be provided with
Joint B（17）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710091492.3A CN106702477B (en) | 2017-02-21 | 2017-02-21 | Coaxial electrode for guided-mode furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710091492.3A CN106702477B (en) | 2017-02-21 | 2017-02-21 | Coaxial electrode for guided-mode furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106702477A true CN106702477A (en) | 2017-05-24 |
| CN106702477B CN106702477B (en) | 2023-05-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710091492.3A Active CN106702477B (en) | 2017-02-21 | 2017-02-21 | Coaxial electrode for guided-mode furnace |
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| Country | Link |
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| CN (1) | CN106702477B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201588009U (en) * | 2010-01-26 | 2010-09-22 | 中国电子科技集团公司第二十六研究所 | Concentric water cooling electrode of single crystal furnace |
| DE102010005911A1 (en) * | 2010-01-27 | 2011-07-28 | Diether 65375 Böttger | Electrode for electrical heating of a glass melt in a glass melting furnace or a channel in which the electrodes are guided from above and/or from below, comprises a 2-in-1 electrode assembly from a concentric stick electrode |
| CN102995106A (en) * | 2012-09-25 | 2013-03-27 | 北京京运通科技股份有限公司 | Electrode of heating device for zone melting furnace |
| CN103160919A (en) * | 2013-03-09 | 2013-06-19 | 青海铸玛蓝宝石晶体有限公司 | Heating electrodes in sapphire crystal Kyropoulos production device |
| CN103590115A (en) * | 2013-08-21 | 2014-02-19 | 西安隆基硅材料股份有限公司 | Double-heater combined electrode structure of single crystal furnace |
| CN206494983U (en) * | 2017-02-21 | 2017-09-15 | 洛阳金诺光电子材料有限公司 | A kind of coaxial electrode for guided mode stove |
-
2017
- 2017-02-21 CN CN201710091492.3A patent/CN106702477B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201588009U (en) * | 2010-01-26 | 2010-09-22 | 中国电子科技集团公司第二十六研究所 | Concentric water cooling electrode of single crystal furnace |
| DE102010005911A1 (en) * | 2010-01-27 | 2011-07-28 | Diether 65375 Böttger | Electrode for electrical heating of a glass melt in a glass melting furnace or a channel in which the electrodes are guided from above and/or from below, comprises a 2-in-1 electrode assembly from a concentric stick electrode |
| CN102995106A (en) * | 2012-09-25 | 2013-03-27 | 北京京运通科技股份有限公司 | Electrode of heating device for zone melting furnace |
| CN103160919A (en) * | 2013-03-09 | 2013-06-19 | 青海铸玛蓝宝石晶体有限公司 | Heating electrodes in sapphire crystal Kyropoulos production device |
| CN103590115A (en) * | 2013-08-21 | 2014-02-19 | 西安隆基硅材料股份有限公司 | Double-heater combined electrode structure of single crystal furnace |
| CN206494983U (en) * | 2017-02-21 | 2017-09-15 | 洛阳金诺光电子材料有限公司 | A kind of coaxial electrode for guided mode stove |
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| Publication number | Publication date |
|---|---|
| CN106702477B (en) | 2023-05-30 |
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