CN205529005U - Organic material evaporation plant - Google Patents
Organic material evaporation plant Download PDFInfo
- Publication number
- CN205529005U CN205529005U CN201620248773.6U CN201620248773U CN205529005U CN 205529005 U CN205529005 U CN 205529005U CN 201620248773 U CN201620248773 U CN 201620248773U CN 205529005 U CN205529005 U CN 205529005U
- Authority
- CN
- China
- Prior art keywords
- crucible
- organic material
- adapter sleeve
- vaporising device
- heater strip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses an organic material evaporation plant, including ceramic seal electrode, adapter sleeve and evaporation source, the adapter sleeve seals to join in marriage mutually with ceramic seal electrode and evaporation source respectively and connects to the ceramic seal electrode lead the inside that electrical pillar extended to the adapter sleeve, the evaporation source includes the base that meets with the adapter sleeve, one side that the base deviates from the adapter sleeve is provided with the ceramics seat, is provided with the crucible on the ceramics seat, the coiling has a heater strip in the crucible, what the pin of heater strip passed the bottom of crucible, ceramics seat and base and ceramic seal electrode leads electrical pillar looks turn -on connection. The utility model discloses an organic material evaporation plant simple structure is compact, and installation and maintenance are all comparatively convenient, add the thermocouple, can be in the heating process audio -visual monitoring temperature, be favorable to control material's evaporation, adopting tantalum heater strip or tungsten heater strip as heating medium, can reaching the higher temperature, rate of heating is fast, and is efficient, and the power consumption is low, have the protection casing, play thermal -insulated antifouling waiting effect, reduced the heat energy loss.
Description
Technical field
This utility model relates to a kind of vaporising device, particularly relates to a kind of organic material vaporising device.
Background technology
Vacuum thermal evaporation plated film is in organic EL (Electro Luminescence) electroluminescent, organic solar batteries, metal electrode, the industries such as packaging for foodstuff are widely used, and the industrialization of respective films device is applied the most widely, its ultimate principle is that the means utilizing heating make source by thermal evaporation, gas phase is become by solid phase/liquid phase, then gas molecule or atom transport between evaporation source and substrate (substrate), and the molecule of final evaporation or atom are in the upper deposition of substrate (substrate).
In organic light-emitting display device, launch the organic luminous layer of visible ray and close to the organic layer of organic luminous layer by utilizing various method to be formed.Especially vacuum deposition method is frequently used due to its simple technique.In vacuum deposition method, being filled in smelting furnace by the deposition material of powdery or solid-state, and form deposition film on desired region by heating smelting furnace, and in prior art, evaporation equipment structure is complicated, installation and maintenance are complicated, and power consumption is big, and cost is high.
Utility model content
The purpose of this utility model is to solve above-mentioned the deficiencies in the prior art, it is provided that a kind of organic material vaporising device.
In order to achieve the above object, the technical scheme that this utility model is used is:
A kind of organic material vaporising device, including crunch seal electrode, adapter sleeve and evaporation source, described adapter sleeve seals mutually with crunch seal electrode and evaporation source respectively and connects, and the conductive pole of described crunch seal electrode extends to the inside of described adapter sleeve,
Wherein, described evaporation source includes the pedestal connected with adapter sleeve, described pedestal deviates from the side of described adapter sleeve and is provided with ceramics seat, it is provided with crucible on described ceramics seat, being wound with heater strip in described crucible, the pin of described heater strip passes the bottom of crucible, ceramics seat and pedestal and is conducted with the conductive pole of described crunch seal electrode and is connected.
Further, described evaporation source also includes a protective cover, described protective cover side and described pedestal Joint, and described ceramics seat, crucible are respectively positioned on the inner chamber of described protective cover.
Further, connect for screw thread between described protective cover and described pedestal.
Further, described protective cover is cylindric rustless steel protective cover.
Further, described pedestal being provided with one and abuts against through the outer surface of described ceramics seat with described crucible for the thermocouple of thermometric, the thermometric end of described thermocouple, the pin of described thermocouple is conducted with the conductive pole of described crunch seal electrode and is connected.
Further, for welding between described ceramic package electrode and adapter sleeve, and it is provided with sealing ring between ceramic package electrode and adapter sleeve.
Further, described crucible detachable interposing is connected on described ceramics seat.
Further, described crucible at least includes silica crucible, alumina ceramic crucible.
Further, in described crucible, heater strip coiling is in the shape of a spiral.
Further, described heater strip is tantalum wire or kanthal silk.
The beneficial effects of the utility model are mainly reflected in:
The most simple and compact for structure, it is the most convenient to install and keep in repair；
2. it is additionally arranged thermocouple, temperature can be monitored in heating process intuitively, be conducive to controlling the evaporation of material；
3. using tantalum heater strip or tungsten heater strip as adding thermal medium, can reach higher temperature, firing rate is fast, and efficiency is high, consumes energy low；
4. there is protective cover, play heat insulation antifouling grade and act on, reduce heat energy loss.
Accompanying drawing explanation
Fig. 1 is the structural representation of this utility model a kind of organic material vaporising device；
Fig. 2 is the cross section structure schematic diagram of this utility model a kind of organic material vaporising device.
Detailed description of the invention
This utility model provides a kind of organic material vaporising device.Below in conjunction with accompanying drawing, technical solutions of the utility model are described in detail, so that it is more readily understood and grasps.
As depicted in figs. 1 and 2, a kind of organic material vaporising device, including crunch seal electrode 1, adapter sleeve 2 and evaporation source 3, adapter sleeve 2 seals with crunch seal electrode 1 and evaporation source 3 phase respectively and connects, and the conductive pole 4 of crunch seal electrode 1 extends to the inside of adapter sleeve 2, form overall parts, can mount on vacuum coating cavity.Wherein, evaporation source 3 includes the pedestal 5 connected with adapter sleeve 2, pedestal 5 deviates from the side of adapter sleeve 2 and is provided with ceramics seat 6, crucible 7 it is provided with on ceramics seat 6, being wound with heater strip 8 in crucible 7, the pin of heater strip 8 passes the bottom of crucible 7, ceramics seat 6 and pedestal 5 and is conducted with the conductive pole 4 of crunch seal electrode 1 and is connected.
More specifically describe, for welding between ceramic package electrode 1 with adapter sleeve 2, and it is provided with sealing ring 11 between ceramic package electrode and adapter sleeve, good seal performance, the main body of ceramic package electrode uses 304 rustless steels, and its mounting interface is KF25 or KF40 quick release flange, there are in the middle of ceramic package electrode four conductive poles, conductive pole is preferably copper electrode, ceramic material insulation welded seal is used between the main body of copper electrode and ceramic package electrode, wherein two power supplies as heater strip, two signals as thermocouple 9.Being fixed by screw between pedestal 5 and adapter sleeve 2, pedestal 5 is preferably stainless steel, and it offers the through hole passed for thermocouple 9, heater strip 8 pin.Ceramics seat 6 prepares for aluminium oxide ceramics, and it is also provided with the through hole passed for heater strip 8 and thermocouple 9.Crucible 7 detachable interposing is connected on ceramics seat 6.
Being optimized this case, evaporation source 3 also includes a protective cover 10, protective cover 10 side and pedestal 5 Joint, and ceramics seat 6, crucible 7 are respectively positioned on the inner chamber of protective cover 10.Protective cover 10 can play heat insulation antipollution effect, prevents heat energy loss and external contaminants from producing evaporating organic materials and pollutes.For convenience of the installation between protective cover and pedestal, connect for screw thread between protective cover and pedestal, can easily realize the assembly and disassembly between protective cover and pedestal by rotating protective cover.Protective cover is preferably cylindric rustless steel protective cover, has with low cost, protects reliable advantage.
Abutting against through the outer surface of ceramics seat 6 with crucible 7 it addition, be provided with one on pedestal 5 for the thermocouple 9 of thermometric, the thermometric end of thermocouple 9, the pin of thermocouple 9 is conducted with the conductive pole of crunch seal electrode 1 and is connected.Thermocouple can monitor temperature in heating process intuitively, is conducive to controlling the evaporation of organic material.More refining, thermocouple is K-type thermocouple, and a diameter of 0.5 ~ 1.5mm of thermometric end, thermocouple is bolted on pedestal.
Crucible finally carrying out refinement describe, crucible at least includes silica crucible, alumina ceramic crucible.In crucible, heater strip coiling is in the shape of a spiral.Heater strip 8 is tantalum wire or kanthal silk, a diameter of 0.1 ~ 1mm of heater strip, and kanthal silk is Kanthal B alloy wire.It should be noted that the organic material vaporising device of this case uses direct current supply, during work, voltage is less than 10V, and electric current is less than 10A, and after tested, power when major part organic material steams is less than 30W.As can be seen here, the organic material vaporising device of this case has the feature of low-power consumption, and the running voltage less than 10V is harmless simultaneously.
Above the technical solution of the utility model is fully described; it should be noted that; detailed description of the invention of the present utility model is also not limited by the description set out above; all technical schemes that those of ordinary skill in the art is formed in the aspect employing equivalents such as structure, method or function or equivalent transformation according to spirit of the present utility model, within all falling within protection domain of the present utility model.
Claims (10)
1. an organic material vaporising device, it is characterized in that: include crunch seal electrode, adapter sleeve and evaporation source, described adapter sleeve seals mutually with crunch seal electrode and evaporation source respectively and connects, and the conductive pole of described crunch seal electrode extends to the inside of described adapter sleeve
Wherein, described evaporation source includes the pedestal connected with adapter sleeve, described pedestal deviates from the side of described adapter sleeve and is provided with ceramics seat, it is provided with crucible on described ceramics seat, being wound with heater strip in described crucible, the pin of described heater strip passes the bottom of crucible, ceramics seat and pedestal and is conducted with the conductive pole of described crunch seal electrode and is connected.
A kind of organic material vaporising device the most according to claim 1, it is characterised in that: described evaporation source also includes a protective cover, described protective cover side and described pedestal Joint, and described ceramics seat, crucible are respectively positioned on the inner chamber of described protective cover.
A kind of organic material vaporising device the most according to claim 2, it is characterised in that: connect for screw thread between described protective cover and described pedestal.
4. according to a kind of organic material vaporising device described in Claims 2 or 3, it is characterised in that: described protective cover is cylindric rustless steel protective cover.
A kind of organic material vaporising device the most according to claim 1, it is characterized in that: be provided with one on described pedestal for the thermocouple of thermometric, the thermometric end of described thermocouple abuts against through the outer surface of described ceramics seat with described crucible, and the pin of described thermocouple is conducted with the conductive pole of described crunch seal electrode and is connected.
A kind of organic material vaporising device the most according to claim 1, it is characterised in that: for welding between described ceramic package electrode and adapter sleeve, and it is provided with sealing ring between ceramic package electrode and adapter sleeve.
A kind of organic material vaporising device the most according to claim 1, it is characterised in that: described crucible detachable interposing is connected on described ceramics seat.
A kind of organic material vaporising device the most according to claim 1, it is characterised in that: described crucible at least includes silica crucible, alumina ceramic crucible.
9. according to a kind of organic material vaporising device described in claim 1 or 8, it is characterised in that: in described crucible, heater strip coiling is in the shape of a spiral.
A kind of organic material vaporising device the most according to claim 9, it is characterised in that: described heater strip is tantalum wire or kanthal silk.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620248773.6U CN205529005U (en) | 2016-03-29 | 2016-03-29 | Organic material evaporation plant |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620248773.6U CN205529005U (en) | 2016-03-29 | 2016-03-29 | Organic material evaporation plant |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205529005U true CN205529005U (en) | 2016-08-31 |
Family
ID=56786607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620248773.6U Active CN205529005U (en) | 2016-03-29 | 2016-03-29 | Organic material evaporation plant |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205529005U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105648405A (en) * | 2016-03-29 | 2016-06-08 | 苏州方昇光电装备技术有限公司 | Organic material evaporator |
| CN110983258A (en) * | 2019-12-13 | 2020-04-10 | 山东国晶新材料有限公司 | Ceramic point source for evaporation equipment |
-
2016
- 2016-03-29 CN CN201620248773.6U patent/CN205529005U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105648405A (en) * | 2016-03-29 | 2016-06-08 | 苏州方昇光电装备技术有限公司 | Organic material evaporator |
| CN110983258A (en) * | 2019-12-13 | 2020-04-10 | 山东国晶新材料有限公司 | Ceramic point source for evaporation equipment |
| CN110983258B (en) * | 2019-12-13 | 2021-01-08 | 山东国晶新材料有限公司 | Ceramic point source for evaporation equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105648405A (en) | Organic material evaporator | |
| CN203741407U (en) | Magnetron sputtering rotating target | |
| CN102271451B (en) | A kind of cathode construction of laminar flow electric arc plasma generator | |
| CN205529005U (en) | Organic material evaporation plant | |
| CN204881138U (en) | Novel vacuum smelting furnace | |
| CN203474925U (en) | High temperature continuous electrolysis experimental furnace with good sealing structure | |
| CN202329218U (en) | Water-cooled electrode of high temperature vacuum furnace | |
| CN205029901U (en) | Novel explosion -proof energy -conserving electromagnetic heating stick | |
| CN110562972A (en) | Self-heating graphitizing furnace for superfine powder | |
| CN207763236U (en) | Circulating-heating single-ended electrode heating tube | |
| CN103469318B (en) | A kind of calcining method for cleaning of spinneret | |
| CN212205609U (en) | Small-sized vacuum arc furnace for preparing refractory high-entropy alloy | |
| CN206341444U (en) | A kind of pre-heater | |
| CN105624612A (en) | Metal evaporation device applied to evaporation coatings | |
| CN205666971U (en) | Silicon nitride ceramic immersion heating pipe | |
| CN102984836A (en) | High-power heater capable of quickly warming and cooling | |
| CN210518975U (en) | Water-electricity connecting device for arc plasma generator | |
| CN205576265U (en) | Be applied to metal evaporation plant of evaporation coating film | |
| CN203368804U (en) | Novel electrode structure for resistance furnace | |
| CN201282104Y (en) | Novel electronic gun with oil immerson water cooling device | |
| CN104363671A (en) | Inner heater of liquid zinc corrosion resistance alloy | |
| CN206109509U (en) | Titanium sponge heating heat preservation stove silk structure | |
| CN205342134U (en) | Superconductive cable vacuum soldering system | |
| KR101116594B1 (en) | Electrode for high power system | |
| CN205746196U (en) | Based on electrically heated LED lamp holder, equipment is installed |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: Room 102, A4 Building, 218 Xinghu Street, Suzhou Industrial Park, Jiangsu Province Patentee after: Suzhou Fang Sheng Au Optronics Co Address before: 215 000 A4-102, 218 Xinghu Street, Suzhou Industrial Park, Jiangsu Province Patentee before: Suzhou Fangsheng Optoelectronics Equipment & Technology Co., Ltd. |