CN205576265U - Be applied to metal evaporation plant of evaporation coating film - Google Patents
Be applied to metal evaporation plant of evaporation coating film Download PDFInfo
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- CN205576265U CN205576265U CN201620248740.1U CN201620248740U CN205576265U CN 205576265 U CN205576265 U CN 205576265U CN 201620248740 U CN201620248740 U CN 201620248740U CN 205576265 U CN205576265 U CN 205576265U
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- evaporation
- heater strip
- crucible
- alumina ceramic
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Abstract
The utility model discloses a be applied to metal evaporation plant of evaporation coating film, including ceramic seal electrode and metal evaporation main part, wherein, metal evaporation main part includes that it runs through the main part support that three slice at least alumina ceramics pieces formed to support the lead screw by the plural number, and main part support overcoat has the ceramic pipe, runs through being provided with the electrode post on the one of which alumina ceramics piece, and another alumina ceramics piece sets up the crucible, between the two adjacent alumina ceramics pieces of heater strip winding to the heater strip axial centers on the outer wall of crucible, ceramic seal electrode and electrode post looks turn -on connection. The utility model discloses a tantalum heater strip or tungsten heater strip can reach the higher temperature as heating medium, and rate of heating is fast, and the power consumption is low, add the thermocouple, can be in the heating process audio -visual monitoring temperature, be favorable to control material's evaporation, the evaporation material is contactless with the heater strip in the crucible, has increased life, have tantalum paper tinsel layer, it keeps warm to play separates the effect of temperature, reduces the heat energy loss in the heating process.
Description
Technical field
This utility model relates to a kind of evaporation of metal device being applied to evaporation coating, particularly relates to a kind of low-power consumption evaporation of metal device being applied to evaporation coating.
Background technology
Vacuum thermal evaporation plated film is in organic EL (Electro Luminescence) electroluminescent, organic solar batteries, metal electrode, the industries such as packaging for foodstuff are widely used, and the industrialization of respective films device is applied the most widely, its ultimate principle is that the means utilizing heating make source by thermal evaporation, gas phase is become by solid phase/liquid phase, then gas molecule or atom transport between evaporation source and substrate (substrate), molecule or the atom of final evaporation above deposit at substrate (substrate), the thin film required for formation.
Traditional vacuum thermal evaporation coating apparatus employing sheet metal is as metal evaporation sources, and power consumption is big, and heating is slow, and sheet metal contacts with the existence of evaporation material, reduces the service life of vacuum thermal evaporation coating apparatus, and in heating process, does not has relevant monitoring temperature.
Utility model content
The purpose of this utility model is to solve above-mentioned the deficiencies in the prior art, it is provided that a kind of evaporation of metal device being applied to evaporation coating.
In order to achieve the above object, the technical scheme that this utility model is used is:
It is applied to the evaporation of metal device of evaporation coating, it is characterised in that: include crunch seal electrode and evaporation of metal main body,
Wherein, described evaporation of metal main body includes earthenware, crucible, heater strip and main body rack, three piece aluminum oxide potsherds and plural number support screw,
Described main body rack is extended through at least three piece aluminum oxide potsherds by plural number support screw and forms, and is relatively fixed, leaves gap between adjacent alumina potsherd between support screw and alumina ceramic plate,
Described earthenware sheathed with described main body rack on, and be limited between the both sides alumina ceramic plate of main body rack,
Being provided through electrode column on the side alumina ceramic plate of described main body rack, opposite side alumina ceramic plate offers the slotted eye loading described crucible, described crucible is arranged in described slotted eye, and crucible uncovered outwardly,
Between alumina ceramic plate that the axial cross-under of described heater strip is wound on loaded crucible and the alumina ceramic plate that is adjacent, and heater strip is around the outer wall of described crucible, and the two ends of described heater strip are conducted with electrode column respectively and are connected,
Described crunch seal electrode is conducted with described electrode column and is connected.
Further, tantalum foil layer it is provided with between described earthenware and described main body rack.
Further, being provided with the thermocouple for measuring temperature in described evaporation of metal main body, described thermocouple is conducted with described electrode column and is connected, and the temperature-sensitive point of described thermocouple is adjacent with described heater strip.
Further, described electrode column is conducted with described thermocouple and heater strip by an adapter sleeve and is connected.
Further, described thermocouple is S type thermoelectricity occasionally Wolfram rhenium heat electric couple.
Further, the slotted eye surrounding of the alumina ceramic plate of described loaded crucible is provided with the jack hole for cross-under heater strip, the alumina ceramic plate adjacent with the alumina ceramic plate of described loaded crucible is also provided with the jack hole for cross-under heater strip, and described heater strip is connected between two alumina ceramic plates along jack hole.
Further, described heater strip at least includes tantalum wire and tungsten filament.
Further, the line footpath of described heater strip is 0.3 ~ 1mm.
Further, the thickness of described tantalum foil layer is 0.02 ~ 0.1mm, and surface roughness is better than Ra0.8.
Further, described support screw is tungsten bar or molybdenum rod.
The beneficial effects of the utility model are mainly reflected in:
1. using tantalum heater strip or tungsten heater strip as adding thermal medium, can reach higher temperature, firing rate is fast, and efficiency is high, consumes energy low；
2. it is additionally arranged thermocouple, temperature can be monitored in heating process intuitively, be conducive to controlling the evaporation of material；
3. in crucible, evaporation material is contactless with heater strip, adds service life；
4. there is tantalum foil layer, play the effect of insulation thermal insulation, reduce the heat energy loss in heating process, reduce further energy consumption；
5. the interface of crunch seal electrode is vacuum industry standard interfaces, it is easy to installs, change, safeguard.
Accompanying drawing explanation
Fig. 1 is the structural representation that this utility model is applied to the evaporation of metal device of evaporation coating；
Fig. 2 is the cross section structure schematic diagram that this utility model is applied to the evaporation of metal device of evaporation coating.
Detailed description of the invention
This utility model provides the evaporation of metal device being applied to evaporation coating, has the feature of low power consuming.Below in conjunction with accompanying drawing, technical solutions of the utility model are described in detail, so that it is more readily understood and grasps.
nullAs depicted in figs. 1 and 2，It is applied to the evaporation of metal device of evaporation coating，Including crunch seal electrode 1 and evaporation of metal main body，Wherein，Evaporation of metal main body includes earthenware 2、Crucible 3、Heater strip 4 and main body rack，Main body rack is extended through at least three piece aluminum oxide potsherds 5 by plural number support screw 6 and forms，Support screw 6 and alumina ceramic plate 5 are relatively fixed composition main body rack，Concrete，It is made up of four support screws and three alumina ceramic plates，And fastened by nut clip respectively between support screw and alumina ceramic plate，Alumina ceramic plate is round sheet，Support screw is tungsten bar or molybdenum rod，Gap is left between adjacent alumina potsherd 5，Earthenware 2 sheathed with main body rack on，And it is limited between the both sides alumina ceramic plate of main body rack，It adds heat space with alumina ceramic plate formation evaporation of metal main body，Earthenware is processed by aluminium oxide ceramics，Cylindric，Thickness is 1.2mm，The heat of heater strip is played buffer action，Prevent heat-energy losses，Heat is concentrated on heater strip region，Heat utilization ratio is high.
It is provided through electrode column 7 on the side alumina ceramic plate of main body rack, concrete includes four electrode columns, wherein two power supplies as heater strip 4, two signals as thermocouple 8, offering the slotted eye of loaded crucible on opposite side alumina ceramic plate, crucible 3 is arranged in slotted eye, and crucible 3 uncovered outwardly, outside the so-called uncovered inner chamber the most i.e. referring to crucible is exposed to, the uncovered outlet being evaporation of metal.
nullBetween alumina ceramic plate that the axial cross-under of heater strip 4 is wound on loaded crucible and the alumina ceramic plate that is adjacent，So-called is axially the axis direction along earthenware，The i.e. cross-under direction of heater strip is parallel with the axis of earthenware，The description of refinement，The slotted eye surrounding of the alumina ceramic plate of loaded crucible is provided with the jack hole for cross-under heater strip，The alumina ceramic plate adjacent with the alumina ceramic plate of loaded crucible is also provided with the jack hole for cross-under heater strip，Heater strip is connected between two alumina ceramic plates along jack hole，And heater strip is axially about the outer wall of crucible 3，The two ends of heater strip 3 are conducted with electrode column 7 respectively and are connected，Preferably，Electrode column can be connected with heater strip by adapter sleeve 10，Concrete，Adapter sleeve is cylindric，Material is rustless steel or copper，Middle processing hole is used for wearing puts connected piece，Side processing screw hole，Connected piece is fixed by screw hole with marking closely screw，Additionally，Heater strip at least includes tantalum wire and tungsten filament，Its heating-up temperature is more than 1800 DEG C，Exceed the fusing point of most metals，Applied widely.The line footpath of heater strip is 0.3 ~ 1mm, it is simple to coiling, has ensured work efficiency simultaneously.Energising post-heating, heating voltage is less than 24V, belongs to safe voltage.
Crunch seal electrode 1 is conducted with electrode column 7 and is connected, crunch seal electrode uses the KF25 interface of vacuum industry standard, interface material is rustless steel, wherein comprise four copper electrodes, between copper electrode and KF25 interface, use earthenware sealing-in be connected with electrode column with insulation, copper electrode by adapter sleeve and fix, wherein two power supplies as heater strip, two signals as thermocouple, the KF25 interface of crunch seal electrode is directly mounted on vacuum chamber, is sealed by O-ring.
This programme is optimized, tantalum foil layer 9 it is provided with between earthenware and main body rack, tantalum foil layer 9 is rolled into cylindrical shape by thin tantalum skin, joint electric welding, to together, is enclosed within main body rack, and the alumina ceramic plate of its one end and attaching electrode column fixes, the other end is concordant with the alumina ceramic plate of installing crucible, the thickness of tantalum foil layer is 0.02 ~ 0.1mm, and surface roughness is better than Ra0.8, it is possible to have preferable reflection to heat.
Being provided with the thermocouple 8 for measuring temperature in evaporation of metal main body, thermocouple 8 is conducted with electrode column 7 and is connected, and the temperature-sensitive point of thermocouple is adjacent with heater strip.Temperature can be measured in heating process intuitively by thermocouple, be conducive to controlling material evaporation process.Preferred electrode post is conducted with thermocouple by an adapter sleeve and is connected.Preferably, thermocouple is S type thermoelectricity occasionally Wolfram rhenium heat electric couple.The temperature-measuring range of S type thermocouple is 0 ~ 1700 DEG C, and the Range of measuring temp of Wolfram rhenium heat electric couple is 0 ~ 2300 DEG C, and it is made up of two thermometric lines, and one end is fusion welded to together as point for measuring temperature, and near heater strip, additionally two ends are connected with electrode column, for being drawn by temperature signal.
Crucible in this case finally carrying out refinement describe, crucible is similar to beaker-type shape, and volume is about 1 ~ 2mL, it is preferred to use BN material makes, and it, with an edge mouth, prevents the molten metal outflow after fusing.
The following is the examples comparative using this case with traditional metal evaporation sources, with evaporation of aluminum as test sample, when evaporation rate is 6 ~ 8A/S, voltage when traditional boat formula evaporation source reaches this evaporation rate is 2.8 ~ 3.0V, electric current is that between 95 ~ 102A, power is about 300W；And this case carries out evaporation of aluminum, when evaporation rate reaches 6 ~ 8A/S, voltage is 15 ~ 16V, electric current is 8 ~ 9A, and power is about 120W, it can be seen that the power of this case is relatively low, the most energy-conservation, meanwhile, the thermocouple of this case can measure now that evaporating temperature is between 1180 ~ 1300 DEG C, and traditional metal evaporation sources cannot obtain this information.
Above the technical solution of the utility model is fully described; it should be noted that; detailed description of the invention of the present utility model is also not limited by the description set out above; all technical schemes that those of ordinary skill in the art is formed in the aspect employing equivalents such as structure, method or function or equivalent transformation according to spirit of the present utility model, within all falling within protection domain of the present utility model.
Claims (10)
1. it is applied to the evaporation of metal device of evaporation coating, it is characterised in that: include crunch seal electrode and evaporation of metal main body,
Wherein, described evaporation of metal main body includes earthenware, crucible, heater strip and main body rack, three piece aluminum oxide potsherds and plural number support screw,
Described main body rack is extended through at least three piece aluminum oxide potsherds by plural number support screw and forms, and is relatively fixed, leaves gap between adjacent alumina potsherd between support screw and alumina ceramic plate,
Described earthenware sheathed with described main body rack on, and be limited between the both sides alumina ceramic plate of main body rack,
Being provided through electrode column on the side alumina ceramic plate of described main body rack, opposite side alumina ceramic plate offers the slotted eye loading described crucible, described crucible is arranged in described slotted eye, and crucible uncovered outwardly,
Between alumina ceramic plate that the axial cross-under of described heater strip is wound on loaded crucible and the alumina ceramic plate that is adjacent, and heater strip is around the outer wall of described crucible, and the two ends of described heater strip are conducted with electrode column respectively and are connected,
Described crunch seal electrode is conducted with described electrode column and is connected.
The evaporation of metal device being applied to evaporation coating the most according to claim 1, it is characterised in that: it is provided with tantalum foil layer between described earthenware and described main body rack.
The evaporation of metal device being applied to evaporation coating the most according to claim 1, it is characterized in that: in described evaporation of metal main body, be provided with the thermocouple for measuring temperature, described thermocouple is conducted with described electrode column and is connected, and the temperature-sensitive point of described thermocouple is adjacent with described heater strip.
The evaporation of metal device being applied to evaporation coating the most according to claim 3, it is characterised in that: described electrode column is conducted with described thermocouple and heater strip by an adapter sleeve and is connected.
The evaporation of metal device being applied to evaporation coating the most according to claim 4, it is characterised in that: described thermocouple is S type thermoelectricity occasionally Wolfram rhenium heat electric couple.
The evaporation of metal device being applied to evaporation coating the most according to claim 1, it is characterized in that: the slotted eye surrounding of the alumina ceramic plate of described loaded crucible is provided with the jack hole for cross-under heater strip, the alumina ceramic plate adjacent with the alumina ceramic plate of described loaded crucible is also provided with the jack hole for cross-under heater strip, and described heater strip is connected between two alumina ceramic plates along jack hole.
The evaporation of metal device being applied to evaporation coating the most according to claim 1, it is characterised in that: described heater strip at least includes tantalum wire and tungsten filament.
8. according to the evaporation of metal device being applied to evaporation coating described in claim 1 or 7, it is characterised in that: the line footpath of described heater strip is 0.3 ~ 1mm.
The evaporation of metal device being applied to evaporation coating the most according to claim 2, it is characterised in that: the thickness of described tantalum foil layer is 0.02 ~ 0.1mm, and surface roughness is better than Ra0.8.
The evaporation of metal device being applied to evaporation coating the most according to claim 1, it is characterised in that: described support screw is tungsten bar or molybdenum rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620248740.1U CN205576265U (en) | 2016-03-29 | 2016-03-29 | Be applied to metal evaporation plant of evaporation coating film |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201620248740.1U CN205576265U (en) | 2016-03-29 | 2016-03-29 | Be applied to metal evaporation plant of evaporation coating film |
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| CN205576265U true CN205576265U (en) | 2016-09-14 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105624612A (en) * | 2016-03-29 | 2016-06-01 | 苏州方昇光电装备技术有限公司 | Metal evaporation device applied to evaporation coatings |
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2016
- 2016-03-29 CN CN201620248740.1U patent/CN205576265U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105624612A (en) * | 2016-03-29 | 2016-06-01 | 苏州方昇光电装备技术有限公司 | Metal evaporation device applied to evaporation coatings |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: Room 102, A4 Building, 218 Xinghu Street, Suzhou Industrial Park, Jiangsu Province Patentee after: Suzhou Fang Sheng Au Optronics Co Address before: 215 000 A4-102, 218 Xinghu Street, Suzhou Industrial Park, Jiangsu Province Patentee before: Suzhou Fangsheng Optoelectronics Equipment & Technology Co., Ltd. |
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| CP03 | Change of name, title or address |