CN201588009U - Concentric water cooling electrode of single crystal furnace - Google Patents
Concentric water cooling electrode of single crystal furnace Download PDFInfo
- Publication number
- CN201588009U CN201588009U CN2010201018160U CN201020101816U CN201588009U CN 201588009 U CN201588009 U CN 201588009U CN 2010201018160 U CN2010201018160 U CN 2010201018160U CN 201020101816 U CN201020101816 U CN 201020101816U CN 201588009 U CN201588009 U CN 201588009U
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- copper pipe
- copper tube
- concentric
- single crystal
- electrode
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Abstract
The utility model relates to a concentric water cooling electrode of a single crystal furnace, comprising two copper tubes as electrodes, wherein one copper tube is sheathed on the other copper tube, and an insulated sealing sleeve is arranged between the outer copper tube and the inner copper tube; the outer copper tube is in a double-layer structure with two closed ends, an annular cooling water channel is formed between tow layers, and a water inlet copper tube and a water outlet copper tube which are communicated with the cooling water channel are arranged on the outer wall of the outer copper tube. As an input pipeline and an output pipeline of a power supply are concentric and magnetic fields generated by the two pipelines are also concentric, the concentric water cooling electrode can effectively reduce self-inductance superposition between the two copper tubes, effectively inhibit the induced heat generation of magnetic fields around the electrodes and an ambient furnace body and reduce energy waste. Simultaneously, as the phenomenon of local heat generation is avoided, a temperature field in a hearth is uniform, thereby being more beneficial to improving the quality of crystals.
Description
Technical field
The utility model relates to single crystal growing furnace, specifically refers to the single crystal growing furnace water cooled electrode that is made of copper pipe.
Background technology
Single crystal growing furnace is the equipment of artificial growing crystal, and it consist of a number, as burner hearth, grate, heating unit, lift unit, rotary unit, control unit and weighting unit etc.Wherein heating unit is that load coil passes through the heating in medium frequency mode and heats, and two electrodes of load coil adopt copper pipe.And all be arranged in parallel mostly as two copper pipes of load coil electrode at present, wherein copper pipe two ends connect an end and the positive source of load coil respectively, another root copper pipe two ends connect the other end and the power cathode of load coil respectively, see Fig. 1 and Fig. 2.In order to prevent the too high and early failure of electrode temperature, in copper pipe, introduce water coolant is arranged, water coolant enters from the wherein copper pipe as electrode, by heater coil (is the flat copper pipe, do not draw on the figure, be physically located in Fig. 1 left end) then come out from another root copper pipe as electrode, so two copper pipes claim water cooled electrode again.The straight arrow of solid line is a water (flow) direction among the figure, and the straight arrow of dotted line is the sense of current, L
1And L
2Be the self-induction magnetic field of two copper pipes.As can be seen from Figure 1, present decoration form can cause two copper pipe self-induction magnetic fields seriously to superpose, and there is quite a few power loss in induction heating power on two copper pipes, cause the serious waste of energy; More seriously cause electrode burner hearth heating on every side serious, thereby even cause that the temperature field changes the uneven crystal mass that influences in the burner hearth.
The utility model content
At the prior art above shortcomings, the purpose of this utility model provides a kind of concentric water cooled electrode of single crystal growing furnace that can effectively reduce self-induction stack amount between two copper pipe electrodes.
The technical solution of the utility model is achieved in that the concentric water cooled electrode of single crystal growing furnace, comprise two copper pipes as electrode, wherein a copper pipe is enclosed within on another root copper pipe, cover copper pipe outside is outer copper pipe, cover copper pipe inside is interior copper pipe, is provided with the insulated enclosure cover between outer copper pipe and the interior copper pipe; Described outer copper pipe is the bilayer structure of closed at both ends, forms the cyclic cooling-water duct between two-layer, and the copper pipe outer wall is provided with water inlet copper pipe and the water outlet copper pipe that is communicated with cooling-water duct outside.
Further, in order under the insulating prerequisite, to fix as a whole outer copper pipe and interior copper pipe so that install, the utility model (welding) on interior copper pipe is fixed with setscrew nut, described insulated enclosure overlaps an end and is threaded with setscrew nut, at the insulated enclosure cover the other end set nut that has been threaded, put close setscrew nut one end at insulated enclosure and be provided with the protruding dish in location, set nut lock onto outer copper pipe between protruding dish in location and the set nut.
Further, be arranged with the isolated flange of fixedlying connected with the single crystal growing furnace furnace wall outside on the copper pipe, isolated flange is fixed by metal flange and outer copper pipe, and metal flange overlaps outside on the copper pipe and with outer copper pipe welding to be fixed.This structure insulated when both having guaranteed with the single crystal growing furnace furnace wall fixedly reliably, had guaranteed the reliability that connects again.
The utility model is simple in structure, because the input and output pipeline of power supply is concentric, the magnetic field of two pipeline generations is also concentric, so concentric water cooled electrode can effectively reduce the self-induction stack amount of two plumbers sheds, effectively suppress electrode surrounding magnetic field and the induction heating of body of heater all around, reduce energy wastage.Simultaneously, owing to avoided the local pyrexia phenomenon, the temperature field is even in the burner hearth, thereby is more conducive to improve crystal mass.This shows that water cooled electrode more has superiority technically than traditional electrode with one heart, also more possesses practical value.
Description of drawings
Fig. 1-prior art structural representation;
Fig. 2-Fig. 1 side-view;
Fig. 3-the utility model structural representation;
Fig. 4-Fig. 3 side-view.
Wherein, the outer copper pipe of 1-; Copper pipe in the 2-; 3-insulated enclosure cover; The 4-cooling-water duct; The 5-water inlet copper pipe; 6-water outlet copper pipe; The 7-setscrew nut; The 8-set nut; 9-locatees protruding dish; The 10-isolated flange; The 11-metal flange; The 12-sealing-ring.
Embodiment
The utility model is described in further detail below in conjunction with accompanying drawing.
Referring to Fig. 3 and Fig. 4, from the figure as can be seen, the concentric water cooled electrode of the utility model single crystal growing furnace, comprise two copper pipes as electrode, wherein a copper pipe is enclosed within on another root copper pipe, and cover copper pipe outside is outer copper pipe 1, cover copper pipe inside is interior copper pipe 2, be provided with insulated enclosure cover 3 between outer copper pipe 1 and the interior copper pipe 2, on the copper pipe 2, outer copper pipe 1 was enclosed within on the insulated enclosure cover 3 again in promptly insulated enclosure cover 3 was enclosed within.Described outer copper pipe 1 is the bilayer structure of closed at both ends, forms cyclic cooling-water duct 4 between two-layer, and copper pipe 1 outer wall is provided with water inlet copper pipe 5 and the water outlet copper pipe 6 that is communicated with cooling-water duct 4 outside.The utility model heater coil two ends connect water inlet copper pipe and close that end of water inlet copper pipe (promptly illustrating left end) of interior copper pipe on the outer copper pipe respectively, and the induction heating power two ends connect water outlet copper pipe and close that end of water outlet copper pipe (promptly illustrating right-hand member) of interior copper pipe on the outer copper pipe respectively.
Further, in order to fix as a whole under the insulating prerequisite outer copper pipe and interior copper pipe so that install, the utility model is fixed with setscrew nut 7 on interior copper pipe 2, and setscrew nut 7 is a metal material, and is fixing with interior copper pipe 2 welding.Described insulated enclosure overlaps 3 one ends and is provided with outside screw and is threaded with setscrew nut 7 by this outside screw, overlapping 3 the other ends at insulated enclosure also is provided with outside screw and is connected with set nut 8 by this outside screw, be provided with the protruding dish 9 in location near setscrew nut one end on insulated enclosure cover 3, set nut 8 lock onto outer copper pipe 1 between protruding dish 9 in location and the set nut 8.In order to guarantee the good insulation performance effect, the utility model set nut 8 is the insulation material.
The utility model is installed in as a whole interior copper pipe and outer copper pipe on the single crystal growing furnace furnace wall by flange, and flange is an isolated flange, and isolated flange 10 is set on the outer copper pipe 1.Because isolated flange can not be fixing with outer copper pipe welding, the utility model isolated flange 10 is fixed by metal flange 11 and outer copper pipe 1, metal flange 11 overlaps outside on the copper pipe 1 and is fixing with outer copper pipe 1 welding, and isolated flange 10 is connected with metal flange 11 by screw again.Between isolated flange 10 and metal flange 11, be provided with sealing-ring 12, be beneficial to burner hearth and vacuumize.
As an embodiment, the electrode working conditions is as follows: input voltage 800V, received current 1200A, frequency 7～10KHz.
The straight arrow of dotted line is represented the sense of current among the figure, and the straight arrow of solid line is represented cooling-water flowing direction, I
InBe received current, I
OutBe outward current; L
1Be the self-induction magnetic field of interior copper pipe, L
2Self-induction magnetic field for outer copper pipe.From the figure as can be seen, the magnetic field of two copper pipe generations is concentric and direction is opposite, part magnetic field can be offset, so concentric water cooled electrode can effectively reduce the self-induction stack amount of two plumbers sheds, effectively suppress electrode surrounding magnetic field and the induction heating of body of heater all around, make the interior temperature of burner hearth field evenly, thereby be more conducive to improve crystal mass.
Experiment shows, under all identical situation of other conditions such as body of heater, load coil, power and frequency, uses concentric water cooled electrode of the present utility model than using traditional electrode and can save the more energy.Under the foregoing description working conditions, can save 1Kw/ days～2Kw/ days.When using traditional electrode, about 110 ℃ of the furnace body temperature around the electrode far above other regional temperature, and can raise with the rising of power; And after using concentric water cooled electrode, the furnace body temperature around the electrode is constant, and is consistent with other regional temperatures, and can change with the variation of power hardly, whole stove body temperature only and stove intravital temperature field and temperature of cooling water relation is arranged.
Claims (3)
1. the concentric water cooled electrode of single crystal growing furnace, comprise two copper pipes as electrode, it is characterized in that: wherein a copper pipe is enclosed within on another root copper pipe, and cover copper pipe outside is outer copper pipe, cover copper pipe inside is interior copper pipe, is provided with insulated enclosure cover (3) between outer copper pipe (1) and the interior copper pipe (2); Described outer copper pipe (1) is the bilayer structure of closed at both ends, forms cyclic cooling-water duct (4) between two-layer, and copper pipe (1) outer wall is provided with water inlet copper pipe (5) and the water outlet copper pipe (6) that is communicated with cooling-water duct outside.
2. the concentric water cooled electrode of single crystal growing furnace according to claim 1, it is characterized in that: on interior copper pipe (2), be fixed with setscrew nut (7), described insulated enclosure cover (3) one ends are threaded with setscrew nut (7), at insulated enclosure cover (3) the other end set nut (8) that has been threaded, go up close setscrew nut one end at insulated enclosure cover (3) and be provided with location protruding dish (9), set nut (8) lock onto outer copper pipe (1) between location protruding dish (9) and the set nut (8).
3. the concentric water cooled electrode of single crystal growing furnace according to claim 1 and 2, it is characterized in that: be arranged with the isolated flange (10) of fixedlying connected outside on the copper pipe (1) with the single crystal growing furnace furnace wall, isolated flange (10) is fixing by metal flange (11) and outer copper pipe (1), and metal flange (11) overlaps outside on the copper pipe and with outer copper pipe (1) welding to be fixed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201018160U CN201588009U (en) | 2010-01-26 | 2010-01-26 | Concentric water cooling electrode of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201018160U CN201588009U (en) | 2010-01-26 | 2010-01-26 | Concentric water cooling electrode of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201588009U true CN201588009U (en) | 2010-09-22 |
Family
ID=42747779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201018160U Expired - Fee Related CN201588009U (en) | 2010-01-26 | 2010-01-26 | Concentric water cooling electrode of single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201588009U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103052192A (en) * | 2012-12-04 | 2013-04-17 | 江苏华盛天龙光电设备股份有限公司 | Coaxial electrode for supply of electricity and water |
| CN103668454A (en) * | 2013-12-10 | 2014-03-26 | 南京晶升能源设备有限公司 | Water cooled electrode of sapphire single crystal furnace |
| CN105627560A (en) * | 2015-12-28 | 2016-06-01 | 北京航天益森风洞工程技术有限公司 | High-temperature continuous nitrogen heater |
| CN106702477A (en) * | 2017-02-21 | 2017-05-24 | 洛阳金诺光电子材料有限公司 | Coaxial electrode for film guide furnace |
| CN106906512A (en) * | 2017-04-14 | 2017-06-30 | 南京晶能半导体科技有限公司 | Water-cooled core pipe and its application for semiconductor grade monocrystal stove electrode |
-
2010
- 2010-01-26 CN CN2010201018160U patent/CN201588009U/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103052192A (en) * | 2012-12-04 | 2013-04-17 | 江苏华盛天龙光电设备股份有限公司 | Coaxial electrode for supply of electricity and water |
| CN103052192B (en) * | 2012-12-04 | 2014-10-15 | 江苏华盛天龙光电设备股份有限公司 | Coaxial electrode for supply of electricity and water |
| CN103668454A (en) * | 2013-12-10 | 2014-03-26 | 南京晶升能源设备有限公司 | Water cooled electrode of sapphire single crystal furnace |
| CN103668454B (en) * | 2013-12-10 | 2015-12-09 | 南京晶升能源设备有限公司 | The water cooled electrode of sapphire single-crystal furnace |
| CN105627560A (en) * | 2015-12-28 | 2016-06-01 | 北京航天益森风洞工程技术有限公司 | High-temperature continuous nitrogen heater |
| CN105627560B (en) * | 2015-12-28 | 2018-06-05 | 北京航天益森风洞工程技术有限公司 | High temperature continous way nitrogen heater |
| CN106702477A (en) * | 2017-02-21 | 2017-05-24 | 洛阳金诺光电子材料有限公司 | Coaxial electrode for film guide furnace |
| CN106702477B (en) * | 2017-02-21 | 2023-05-30 | 洛阳金诺光电子材料有限公司 | Coaxial electrode for guided-mode furnace |
| CN106906512A (en) * | 2017-04-14 | 2017-06-30 | 南京晶能半导体科技有限公司 | Water-cooled core pipe and its application for semiconductor grade monocrystal stove electrode |
| CN106906512B (en) * | 2017-04-14 | 2023-03-28 | 南京晶能半导体科技有限公司 | Water-cooled core tube for semiconductor grade silicon single crystal furnace electrode and application thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100922 Termination date: 20180126 |