CN106702477B - Coaxial electrode for guided-mode furnace - Google Patents
Coaxial electrode for guided-mode furnace Download PDFInfo
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- CN106702477B CN106702477B CN201710091492.3A CN201710091492A CN106702477B CN 106702477 B CN106702477 B CN 106702477B CN 201710091492 A CN201710091492 A CN 201710091492A CN 106702477 B CN106702477 B CN 106702477B
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- electrode
- edge surface
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- guided mode
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/34—Edge-defined film-fed crystal-growth using dies or slits
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/20—Aluminium oxides
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
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- Crystallography & Structural Chemistry (AREA)
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- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Vertical, Hearth, Or Arc Furnaces (AREA)
- Resistance Heating (AREA)
Abstract
The invention is used for the coaxial electrode of the guided mode furnace, through being equipped with the electrode perforation on the electrode body (11), there is insulating sleeve in the said electrode perforation, there is right electrode (13) in the said insulating sleeve, there is sealing sleeve (15) in the underpart of the electrode perforation, there are sealing bodies between inner edge surface of the electrode perforation and the inner edge surface of the said sealing sleeve, there are sealing bodies between inner edge surface of the sealing sleeve and outer edge surface of the right electrode, there is at least one cooling hole A (5) on one side of the electrode perforation, the said cooling hole A upper end connects the left electrode (3), the invention has greatly simplified the electrode structure through setting up the left electrode parallel with right electrode on the outer edge surface of the electrode body, further, because the electrode body is cylindrical structure, has greatly improved the sealing performance between electrode and furnace chamber, has effectively prevented the leakage etc. of the furnace chamber, the invention has simple structure, the good sealing performance and installs and removes the characteristic conveniently.
Description
[ field of technology ]
The invention relates to a coaxial electrode, in particular to a coaxial electrode for a guided-die furnace, and particularly relates to a coaxial electrode for a guided-die furnace for drawing sapphire crystals.
[ background Art ]
It is known that, today, where technology is rapidly evolving, the use of crystals is very wide ranging from marine to aerospace, from microelectronics to optoelectronics, from automation to smart technology, from computer to communications, from life sciences to medical technology, from civilian technology to national defense technology, no new technology can leave the crystal material, different crystals have different strengths, and a wide variety of artificial crystals are windy in modern science and technology; taking sapphire as an example, because the sapphire has excellent optical performance, mechanical performance and chemical stability, the sapphire has high strength, high hardness, scouring resistance and corrosion resistance, can work under severe conditions of high temperature close to 2000 ℃, and has good heat conductivity and electrical insulation, and most importantly, the sapphire also has good light transmittance, and is widely applied to the technical fields of infrared windows, high-strength optical windows, medical instruments and the like;
the sapphire is grown by a single crystal furnace, so that the single crystal furnace becomes important crystal growth equipment in the LED industry chain, and the sapphire monocrystal is required to be grown slowly under the conditions of high temperature and inert gas protection, so that the tightness, the conductivity, the heat resistance and the like of the electrode connected with the heater are extremely important. At present, most of electrodes used in the sapphire furnace have the defects of complex structure, large size, troublesome installation and the like, and meanwhile, the electrodes are extremely easy to leak on contact surfaces due to poor sealing performance.
[ invention ]
In view of the defects in the background art, the invention discloses a coaxial electrode for a guided mode furnace, which is characterized in that a right electrode is arranged on an electrode main body, a left electrode parallel to the right electrode is arranged on the outer edge surface of the electrode main body, and the right electrode is isolated from the electrode main body through an insulating sleeve, so that the electrode structure is greatly simplified, and the sealing performance between the electrode and a furnace chamber is greatly improved, the leakage of the furnace chamber is effectively prevented, the difficulty in disassembling and assembling the electrode is reduced, and the like.
In order to achieve the purpose of the invention, the invention adopts the following technical scheme:
the utility model provides a coaxial electrode for guided mode stove, includes left electrode, electrode main part, right electrode and insulating cover, is equipped with the electrode perforation in the electrode main part be equipped with the insulating cover in the electrode perforation, be equipped with the right electrode in the insulating cover, be equipped with the seal cover at the fenestrate lower extreme of electrode, be equipped with the sealing body between the outer fringe face of seal cover and the fenestrated inner fringe face of electrode, be equipped with the sealing body between the inner fringe face of seal cover and the outer fringe face of right electrode, be equipped with at least one cooling hole A in the fenestrated one side of electrode, left electrode formation is connected to cooling hole A upper end be used for guided mode stove coaxial electrode.
Coaxial electrode for guided mode stove, cooling hole A be fan-shaped interval setting to threely, be equipped with the arc wall A who link up three cooling hole A in the upper end of three cooling hole A, arc wall A's upper end is sealed through the apron, is equipped with the through-hole in one side of arc wall A, the left electrode is connected to the through-hole, is equipped with the arc wall B who link up three cooling hole A in three cooling hole A's lower extreme arc wall B's open end is equipped with the apron, be equipped with the through-hole on the apron, through-hole attach fitting A.
The coaxial electrode for the guided mode furnace is characterized in that the sealing body is an O-shaped sealing ring.
The coaxial electrode for the guided mode furnace is characterized in that the sealing sleeve is fixed on the electrode perforation through the locking ring.
The coaxial electrode for the guided mode furnace is characterized in that the insulating sleeve comprises an insulating sleeve upper section, an insulating sleeve middle section and an insulating sleeve lower section, an annular boss is arranged at the upper end of the insulating sleeve upper section, the insulating sleeve middle section is arranged at the lower end of the insulating sleeve upper section, the insulating sleeve lower section is arranged at the lower end of the insulating sleeve middle section, and a sealing sleeve is arranged at the lower end of the insulating sleeve lower section.
The coaxial electrode for the guided mode furnace is characterized in that the electrode main body is of a cylindrical structure, an electrode fixing sleeve is arranged on the outer edge surface of the electrode main body, and the electrode fixing sleeve is connected with the furnace body.
The coaxial electrode for the guided mode furnace is characterized in that a thread is arranged on the outer edge surface of the upper end of the left electrode, a hole penetrating through the cooling hole A is formed in the middle of the upper end of the left electrode, and an annular groove A is formed in the periphery of the hole.
The coaxial electrode for the guided mode furnace is characterized in that threads are arranged on the outer edge surface of the upper end of the right electrode, a cooling hole B is formed in the middle of the upper end of the right electrode, and an annular groove B is formed in the periphery of the cooling hole B.
The coaxial electrode for the guided mode furnace is characterized in that a joint B is arranged at the lower end of the right electrode.
By adopting the technical scheme, the invention has the following beneficial effects:
the coaxial electrode for the guided mode furnace is characterized in that the right electrode is arranged on the electrode main body, the right electrode is isolated from the electrode main body through the insulating sleeve, the left electrode parallel to the right electrode is arranged on the outer edge surface of the electrode main body, the electrode structure is greatly simplified, annular grooves are respectively arranged at the upper ends of the right electrode and the left electrode, and sealing rings are arranged in the annular grooves, so that the sealing performance between the electrode and the heating coil is ensured.
[ description of the drawings ]
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic partial cross-sectional view of the present invention;
in the figure: 1. an annular groove A; 2. a cover plate; 3. a left electrode; 4. an arc-shaped groove A; 5. a cooling hole A; 6. a joint A; 7. an annular groove B; 8. a cooling hole B; 9. an upper section of the insulating sleeve; 10. a middle section of the insulating sleeve; 11. an electrode main body; 12. the lower section of the insulating sleeve; 13. a right electrode; 14. a seal ring; 15. sealing sleeve; 16. a locking ring; 17. a joint B; 18. and an arc-shaped groove B.
[ detailed description ] of the invention
The present invention will be explained in more detail with reference to the following examples; however, the present invention is not limited to these examples.
The coaxial electrode for the guided mode furnace comprises a left electrode 3, an electrode main body 11, a right electrode 13 and an insulating sleeve, wherein the electrode main body 11 is of a cylindrical structure, an electrode fixing sleeve is arranged on the outer edge surface of the electrode main body 11, and the electrode fixing sleeve is connected with a furnace body; when the electrode fixing sleeve is installed, a sealing ring is arranged between the electrode fixing sleeve and the furnace body, in practical application, the sealing ring can be an O-shaped sealing ring, and the electrode fixing sleeve can be fixed on the furnace body through bolts;
further, an electrode perforation is arranged on the electrode main body 11, the center of the electrode perforation deviates from the center of the electrode main body 11, an insulating sleeve is arranged in the electrode perforation, the insulating sleeve comprises an insulating sleeve upper section 9, an insulating sleeve middle section 10 and an insulating sleeve lower section 12, an annular boss is arranged at the upper end of the insulating sleeve upper section 9, the insulating sleeve middle section 10 is arranged at the lower end of the insulating sleeve upper section 9, an insulating sleeve lower section 12 is arranged at the lower end of the insulating sleeve middle section 10, a sealing sleeve 15 is arranged at the lower end of the insulating sleeve lower section 12, a right electrode 13 is arranged in the insulating sleeve, threads are arranged on the outer edge surface of the upper end of the right electrode 13, a cooling hole B8 is formed in the middle of the upper end of the right electrode 13, an annular groove B7 is formed in the periphery of the cooling hole B8, and a joint B17 is arranged at the lower end of the right electrode 13. The lower end of the electrode perforation is provided with a sealing sleeve 15, the sealing sleeve 15 is fixed on the electrode perforation through a locking ring 16, a sealing body is arranged between the outer edge surface of the sealing sleeve 15 and the inner edge surface of the electrode perforation, a sealing body is arranged between the inner edge surface of the sealing sleeve 15 and the outer edge surface of the right electrode 13, at least one cooling hole A5 is arranged on one side of the electrode perforation, the center of the cooling hole A5 deviates from the center of the electrode main body 11, in the practical implementation process, the cooling holes A5 are preferably arranged in a sector shape at intervals, the upper ends of the three cooling holes A5 are provided with arc grooves A4 penetrating through the three cooling holes A5, the upper ends of the arc grooves A4 are sealed through a cover plate 2, one side of the arc grooves A4 is provided with a through hole, the through hole is connected with the left electrode 3, the left electrode 3 is of an L-shaped structure, one end of the left electrode 3 is arranged in parallel with the electrode main body 11 at intervals, the other end of the left electrode 3 is fixed on the outer edge surface of the electrode main body 11 through brazing, threads (shown in fig. 1) are arranged on the outer edge surface of the upper end of the left electrode 3, the upper end is provided with a circular groove A5, the upper end of the left electrode 3 is provided with a circular groove A1 is provided with a through hole penetrating through the upper middle part. The lower ends of the three cooling holes A5 are provided with arc-shaped grooves B18 penetrating through the three cooling holes A5, the opening end of the arc-shaped grooves B18 is provided with a cover plate, the cover plate is provided with a through hole, and the through hole is connected with a joint A6; the upper end of the cooling hole A5 is connected with the left electrode 3 to form the coaxial electrode for the guided mode furnace, wherein the sealing body is an O-shaped sealing ring.
When the invention is specifically used, the right electrode 13 is arranged on the electrode main body 11, the right electrode 13 is isolated from the electrode main body 11 through the insulating sleeve, the left electrode 3 parallel to the right electrode 13 is arranged on the outer edge surface of the electrode main body 11, so that the electrode structure is greatly simplified, meanwhile, annular grooves are respectively arranged at the upper ends of the right electrode 13 and the left electrode 3, and sealing rings are arranged in the annular grooves, so that the sealing performance between the electrode and the heating coil is ensured, and further, the electrode main body 11 is of a cylindrical structure, so that the sealing performance between the electrode and the furnace chamber is greatly improved, the leakage of the furnace chamber is effectively prevented, and the like.
The invention is not described in detail in the prior art.
The embodiments selected herein for the purposes of disclosing the present invention are presently considered to be suitable, but it is to be understood that the present invention is intended to include all variations and modifications of the embodiments falling within the spirit and scope of the invention.
Claims (9)
1. The utility model provides a coaxial electrode for guided mode stove, includes left electrode (3), electrode main part (11), right electrode (13) and insulating cover, characterized by: electrode perforation is arranged on an electrode main body (11), an insulating sleeve is arranged in the electrode perforation, a right electrode (13) is arranged in the insulating sleeve, a sealing sleeve (15) is arranged at the lower end of the electrode perforation, a sealing body is arranged between the outer edge surface of the sealing sleeve (15) and the inner edge surface of the electrode perforation, a sealing body is arranged between the inner edge surface of the sealing sleeve (15) and the outer edge surface of the right electrode (13), at least one cooling hole A (5) is arranged on one side of the electrode perforation, and the upper end of the cooling hole A (5) is connected with a left electrode (3) to form the coaxial electrode for the guide mold furnace.
2. The coaxial electrode for a guided mode furnace according to claim 1, wherein: the cooling holes A (5) are arranged into three in fan-shaped intervals, arc-shaped grooves A (4) penetrating through the three cooling holes A (5) are formed in the upper ends of the three cooling holes A (5), the upper ends of the arc-shaped grooves A (4) are sealed through cover plates (2), through holes are formed in one sides of the arc-shaped grooves A (4), the through holes are connected with left electrodes (3), arc-shaped grooves B (18) penetrating through the three cooling holes A (5) are formed in the lower ends of the three cooling holes A (5), cover plates are arranged at the opening ends of the arc-shaped grooves B (18), through holes are formed in the cover plates, and the through holes are connected with connectors A (6).
3. The coaxial electrode for a guided mode furnace according to claim 1, wherein: the sealing body is an O-shaped ring.
4. The coaxial electrode for a guided mode furnace according to claim 1, wherein: the sealing sleeve (15) is fixed on the electrode perforation through a locking ring (16).
5. The coaxial electrode for a guided mode furnace according to claim 1, wherein: the insulation cover includes insulation cover upper segment (9), insulation cover middle section (10) and insulation cover hypomere (12), the upper end of insulation cover upper segment (9) is equipped with annular boss, is equipped with insulation cover middle section (10) at the lower extreme of insulation cover upper segment (9), the lower extreme of insulation cover middle section (10) is equipped with insulation cover hypomere (12), is equipped with seal cover (15) at the lower extreme of insulation cover hypomere (12).
6. The coaxial electrode for a guided mode furnace according to claim 1, wherein: the electrode main body (11) is of a cylindrical structure, an electrode fixing sleeve is arranged on the outer edge surface of the electrode main body (11), and the electrode fixing sleeve is connected with the furnace body.
7. The coaxial electrode for a guided mode furnace according to claim 1, wherein: the outer edge surface of the upper end of the left electrode (3) is provided with threads, the middle part of the upper end of the left electrode (3) is provided with a hole penetrating through the cooling hole A (5), and the periphery of the hole is provided with an annular groove A (1).
8. The coaxial electrode for a guided mode furnace according to claim 1, wherein: the outer edge surface of the upper end of the right electrode (13) is provided with threads, the middle part of the upper end of the right electrode (13) is provided with a cooling hole B (8), and the periphery of the cooling hole B (8) is provided with an annular groove B7.
9. The coaxial electrode for a guided mode furnace according to claim 1, wherein: the lower end of the right electrode (13) is provided with a joint B (17).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710091492.3A CN106702477B (en) | 2017-02-21 | 2017-02-21 | Coaxial electrode for guided-mode furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710091492.3A CN106702477B (en) | 2017-02-21 | 2017-02-21 | Coaxial electrode for guided-mode furnace |
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| Publication Number | Publication Date |
|---|---|
| CN106702477A CN106702477A (en) | 2017-05-24 |
| CN106702477B true CN106702477B (en) | 2023-05-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710091492.3A Active CN106702477B (en) | 2017-02-21 | 2017-02-21 | Coaxial electrode for guided-mode furnace |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201588009U (en) * | 2010-01-26 | 2010-09-22 | 中国电子科技集团公司第二十六研究所 | Concentric water cooling electrode of single crystal furnace |
| DE102010005911A1 (en) * | 2010-01-27 | 2011-07-28 | Diether 65375 Böttger | Electrode for electrical heating of a glass melt in a glass melting furnace or a channel in which the electrodes are guided from above and/or from below, comprises a 2-in-1 electrode assembly from a concentric stick electrode |
| CN102995106A (en) * | 2012-09-25 | 2013-03-27 | 北京京运通科技股份有限公司 | Electrode of heating device for zone melting furnace |
| CN103160919A (en) * | 2013-03-09 | 2013-06-19 | 青海铸玛蓝宝石晶体有限公司 | Heating electrodes in sapphire crystal Kyropoulos production device |
| CN103590115A (en) * | 2013-08-21 | 2014-02-19 | 西安隆基硅材料股份有限公司 | Double-heater combined electrode structure of single crystal furnace |
| CN206494983U (en) * | 2017-02-21 | 2017-09-15 | 洛阳金诺光电子材料有限公司 | A kind of coaxial electrode for guided mode stove |
-
2017
- 2017-02-21 CN CN201710091492.3A patent/CN106702477B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201588009U (en) * | 2010-01-26 | 2010-09-22 | 中国电子科技集团公司第二十六研究所 | Concentric water cooling electrode of single crystal furnace |
| DE102010005911A1 (en) * | 2010-01-27 | 2011-07-28 | Diether 65375 Böttger | Electrode for electrical heating of a glass melt in a glass melting furnace or a channel in which the electrodes are guided from above and/or from below, comprises a 2-in-1 electrode assembly from a concentric stick electrode |
| CN102995106A (en) * | 2012-09-25 | 2013-03-27 | 北京京运通科技股份有限公司 | Electrode of heating device for zone melting furnace |
| CN103160919A (en) * | 2013-03-09 | 2013-06-19 | 青海铸玛蓝宝石晶体有限公司 | Heating electrodes in sapphire crystal Kyropoulos production device |
| CN103590115A (en) * | 2013-08-21 | 2014-02-19 | 西安隆基硅材料股份有限公司 | Double-heater combined electrode structure of single crystal furnace |
| CN206494983U (en) * | 2017-02-21 | 2017-09-15 | 洛阳金诺光电子材料有限公司 | A kind of coaxial electrode for guided mode stove |
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| CN106702477A (en) | 2017-05-24 |
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