CN105873245B

CN105873245B - Buckle type heater for heating semiconductor vacuum pipeline

Info

Publication number: CN105873245B
Application number: CN201610421868.8A
Authority: CN
Inventors: 顾幼范; 谢龙
Original assignee: Wuxi Nhl Technology Co ltd
Current assignee: Wuxi Nhl Technology Co ltd
Priority date: 2016-06-14
Filing date: 2016-06-14
Publication date: 2022-07-12
Anticipated expiration: 2036-06-14
Also published as: CN105873245A

Abstract

The invention discloses a buckle type heater for heating a semiconductor vacuum pipeline, which comprises a first heating semi-ring and a second heating semi-ring, wherein the first heating semi-ring and the second heating semi-ring both comprise a high heat conduction lining, the high heat conduction lining is provided with a clamping groove for accommodating a flange to be heated, a heating film is attached to the high heat conduction lining, aerogel heat insulation layers are coated outside the high heat conduction lining and the heating film, the first heating semi-ring and the second heating semi-ring are both connected with a connector through connecting lines, and the connector is inserted into a power supply to supply power to the heating film. The buckle type heater tightly clings the heating film to the high-heat-conduction lining, so that the temperature of the inner surface of the heater is still very uniform even under the condition of local contact. Thereby greatly prolonging the life of the heater. Meanwhile, the temperature of the buckle is very close to that of the straight pipe, and the problem of blockage of the buckle caused by local low temperature is thoroughly solved.

Description

Buckle type heater for heating semiconductor vacuum pipeline

Technical Field

The invention belongs to the semiconductor vacuum pipeline heating technology, and particularly relates to a buckle type heater for heating a semiconductor vacuum pipeline.

Background

Semiconductor vacuum line heating has been widely used in many semiconductor manufacturing processes. Since many semiconductor manufacturing processes (e.g., CVD, PECVD, Etch) have significant amounts of condensable products formed, heating the tube can prevent deposition of such products on the inner wall of the tube, thereby preventing clogging of the tube and ensuring proper operation of the semiconductor manufacturing equipment. A perfectly heated semiconductor pipeline can greatly increase the utilization rate of equipment, prolong the service life of a vacuum pump, improve the yield of finished products and reduce the contact between operators and toxic gas.

In order to facilitate the installation and maintenance of the vacuum pipeline, a vacuum pipeline quick connector is arranged. For pipes with a pipe diameter of less than 50mm, a quick coupling of the KF type is generally used. The flange is sealed by a center ring with an O-shaped ring, and the flange and the center ring are fastened by a metal buckle. For pipes with a diameter of more than 50mm, ISO joints are generally used for the connection. Since the flange diameter is often much larger than the pipe diameter and the snap is much larger than the flange diameter, a heat sink fin is formed at the flange joint on the vacuum heating pipe. Therefore, the temperature is much lower than on the pipe. In order to ensure that there are no cold spots along the conduit, the lowest temperature snap fitting on the conduit is first heated. However, due to the irregular shape of the snap, the snap is now substantially insulated and thus not heated in the heated area. So that the temperature at the snap fitting is much lower than the temperature of the straight line pipe. For example, when the temperature of the linear pipeline is 150 ℃, the temperature of the buckle is only about 115 ℃.

For heating of irregular snaps, heating with conventional contact conduction is often not feasible. This is because flexible heaters are often made of materials that have relatively poor thermal conductivity, such as fiberglass or silicone rubber. Localized contact with the highly thermally conductive metal material (e.g., snap fit with aluminum alloy) can result in extreme non-uniformity in the heater temperature distribution, often causing localized ultra-high temperatures, resulting in localized premature aging and even burnout of the heater.

Disclosure of Invention

The invention aims to provide a buckle type heater for heating a semiconductor vacuum pipeline, which has the characteristics of good heating effect, uniform heating and long service life and aims to solve the problems of heating of the semiconductor vacuum pipeline in the prior art.

In order to achieve the purpose, the invention adopts the following technical scheme:

the utility model provides a buckle formula heater for semiconductor vacuum pipe heating, its includes first heating semi-ring and second heating semi-ring, the one end of first heating semi-ring with the one end of second heating semi-ring is articulated, the other end of first heating semi-ring with the other end buckle of second heating semi-ring is connected, wherein, first heating semi-ring and second heating semi-ring all include high heat conduction inside lining, have the draw-in groove that is used for the holding to treat the heating flange on the high heat conduction inside lining, just high heat conduction inside lining facing is equipped with the heating film, high heat conduction inside lining and the outer cladding of heating film have the aerogel heat preservation, just first heating semi-ring and second heating semi-ring all are connected with the connector through the connecting wire, the connector is pegged graft and is supplied power for the heating film on the power.

Particularly, the high-thermal-conductivity lining is made of aluminum alloy.

Particularly, the heating film comprises an electric heating film positioned in the middle, and two glass fiber layers are arranged on two sides of the electric heating film.

Particularly, a controller for controlling the temperature of the heater is arranged on the connecting line, and an indicator lamp is arranged on the controller.

Particularly, the aerogel heat preservation is provided with the crust outward, correspond on the crust of first heating semi-ring and second heating semi-ring and be provided with buckle subassembly.

Compared with the prior art, the buckle type heater for heating the semiconductor vacuum pipeline has the advantages that the heating film is tightly attached to the high-heat-conduction lining, so that the temperature of the inner surface of the heater is still uniform even under the condition of local contact. Thereby greatly prolonging the life of the heater. The problem of the short life of buckle heater is solved, simultaneously, really make the temperature of buckle and the temperature of straight tube very close, thoroughly eliminated because the buckle that local low temperature leads to blocks up the problem.

Drawings

Fig. 1 is a schematic structural diagram of a snap-in heater for heating a semiconductor vacuum pipeline according to embodiment 1 of the present invention;

fig. 2 is a schematic view of an internal structure of a clip-on heater for heating a semiconductor vacuum pipe according to embodiment 1 of the present invention.

Detailed Description

The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.

Referring to fig. 1 and 2, in this embodiment, a fastening type heater for heating a semiconductor vacuum pipeline includes a first heating half ring 1 and a second heating half ring 2, one end of the first heating half ring 1 is hinged to one end of the second heating half ring 2, the other end of the first heating half ring 1 is fastened to the other end of the second heating half ring 2, the first heating half ring 1 and the second heating half ring 2 both include a high thermal conductive lining 3, the high thermal conductive lining 3 is made of an aluminum alloy, a clamping groove 4 for accommodating a flange to be heated is formed in the high thermal conductive lining 3, a heating film 5 is attached to the high thermal conductive lining 3, the heating film 5 includes an electric heating film located in the middle, and both sides of the electric heating film are provided with glass fiber layers. The high heat conduction lining 3 and the heating film 5 are coated with an aerogel heat-insulating layer 6. Be provided with the crust outside aerogel heat preservation 6, correspond on the crust of first heating semi-ring 1 and second heating semi-ring 2 and be provided with buckle assembly.

The first heating semi-ring 1 and the second heating semi-ring 2 are respectively connected with a male plug-in unit 7 and a female plug-in unit 8 through connecting wires, and the male plug-in unit 7 and the female plug-in unit 8 are inserted into a power supply to supply power to the heating film 5.

The controller 9 is arranged on a connecting line of the mother plug-in unit 8, the heating temperature of the heating film 5 is controlled through the controller 9, and the indicator light 10 is arranged on the controller 9.

After adopting above-mentioned buckle heater, to the KF buckle of minor diameter, heat transfer is mainly accomplished through the buckle body of high heat conduction inside lining 3. Whereas for larger diameter ISO flanges, heat transfer is primarily accomplished by the conduction of heat through air. That is, the snap heater forms an oven that effectively heats the metal flange.

The buckle type heater for heating the semiconductor vacuum pipeline solves the problem that the flange joint on the heating pipeline along the line is blocked. The maintenance time of the equipment is greatly reduced. In particular practice, a semiconductor manufacturing plant must perform pipe maintenance every month, even in the combined use of hot nitrogen, before the use of the snap heater described above is eliminated. That is, the local pipe is replaced and cleaned. Generally, it takes 24 to 48 hours. For current semiconductor devices, this means a loss of $ 12 to 24 ten thousand! After the buckle heater is used, the pipeline is still very clean after 6 months. There is substantially no need for monthly periodic maintenance of the pipes. Because the pipeline does not need to be disassembled and assembled, the contact of workers to toxic gas is reduced, and the pipeline is beneficial to the health of the workers!

The foregoing embodiments are merely illustrative of the principles and features of this invention, which is not limited to the above-described embodiments, but is capable of various modifications and changes without departing from the spirit and scope of the invention, which are intended to be within the scope of the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. A buckle type heater for heating a semiconductor vacuum pipeline comprises a first heating semi-ring and a second heating semi-ring, wherein one end of the first heating semi-ring is hinged with one end of the second heating semi-ring, the other end of the first heating semi-ring is in buckle connection with the other end of the second heating semi-ring, the buckle type heater is characterized in that the first heating semi-ring and the second heating semi-ring respectively comprise a high heat conduction lining, the high heat conduction lining is made of aluminum alloy, a clamping groove for accommodating a flange to be heated is formed in the high heat conduction lining, a heating film is attached to the high heat conduction lining and comprises an electric heating film positioned in the middle, glass fiber layers are arranged on two sides of the electric heating film, a heat insulation layer is coated outside the high heat conduction lining and the heating film, an aerogel heat insulation layer is arranged outside the aerogel heat insulation layer, and buckle components are correspondingly arranged on outer skins of the first heating semi-ring and the second heating semi-ring, and the first heating semi-ring and the second heating semi-ring are both connected with connectors through connecting wires, and the connectors are inserted in the power supply to supply power to the heating film.

2. The buckle heater for heating the semiconductor vacuum pipeline as claimed in claim 1, wherein a controller for controlling the temperature of the heater is arranged on the connecting line, and an indicator lamp is arranged on the controller.