CN219473976U - Inert gas heating device and exhaust gas treatment equipment - Google Patents
Inert gas heating device and exhaust gas treatment equipment Download PDFInfo
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- CN219473976U CN219473976U CN202223519429.0U CN202223519429U CN219473976U CN 219473976 U CN219473976 U CN 219473976U CN 202223519429 U CN202223519429 U CN 202223519429U CN 219473976 U CN219473976 U CN 219473976U
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Abstract
The utility model relates to the technical field of waste gas treatment, and provides an inert gas heating device and waste gas treatment equipment, wherein the inert gas heating device comprises: the air inlet pipe, the air outlet pipe and the heating pipe; the air inlet pipe and the air outlet pipe are arranged at two opposite ends of the heating pipe, the air inlet pipe is used for being connected with an air source, and the air outlet pipe is used for being connected with a circulation pipeline of the waste gas treatment equipment; the heating tube comprises a PTC layer and is used for being connected with a power supply. The inert gas heating device comprises an air inlet pipe, a heating pipe and an air outlet pipe which are sequentially connected, the heating pipe comprises a PTC layer, the PTC layer is connected with a power supply, current is introduced into the PTC layer through the power supply, the temperature after the PTC layer is heated is stabilized in a target temperature range, the target temperature is greater than the crystallization temperature of waste gas, the inert gas heating device is simple in structure and reliable in performance, and the blocking of a circulating pipeline of the waste gas can be effectively avoided.
Description
Technical Field
The utility model relates to the technical field of waste gas treatment, in particular to an inert gas heating device and waste gas treatment equipment.
Background
Semiconductor materials are important materials for manufacturing transistors, integrated circuits and optoelectronic devices, and a large amount of toxic waste gas is generated in the semiconductor production process, and the waste gas can be discharged into the environment after being treated by waste gas treatment equipment.
In the prior art, waste gas is treated through waste gas treatment equipment, and the waste gas flows into a circulating pipeline in a reaction cavity of the waste gas treatment equipment, so that the circulating pipeline is required to be heated, and the waste gas is prevented from being solidified and powder is prevented from being blocked due to temperature reduction.
The pipeline blocking area is usually a temperature reducing area in the pipeline, and the temperature of the waste gas is ensured to be higher than the crystallization temperature of the waste gas by introducing hot inert gas into the front end of the easy blocking position so as to avoid the phenomenon that the pipeline is blocked due to the crystallization of the waste gas. Inert gas is usually selected to be used for nitrogen with abundant sources and low cost, the nitrogen is heated in the prior art by a resistance wire heating mode, and a heating module comprises a temperature control instrument, a resistance wire heating pipe, a relay, a temperature sensor and other components, so that the structure is complex, the resistance wire is easy to damage, and a closed-loop controller is required to be relied on, so that the reliability is poor.
Disclosure of Invention
The utility model provides an inert gas heating device and waste gas treatment equipment, which are used for solving the problems of complex structure and poor reliability of an inert gas heater in the existing waste gas treatment process.
In a first aspect, the present utility model provides an inert gas heating device comprising: the air inlet pipe, the air outlet pipe and the heating pipe;
the air inlet pipe and the air outlet pipe are arranged at two opposite ends of the heating pipe, the air inlet pipe is used for being connected with an air source, and the air outlet pipe is used for being connected with a circulation pipeline of the waste gas treatment equipment;
the heating tube comprises a PTC layer and is used for being connected with a power supply.
According to the inert gas heating device provided by the utility model, the heating pipe further comprises a first stainless steel layer and a second stainless steel layer;
the first stainless steel layer and the second stainless steel layer are both coaxially arranged with the PTC layer, the first stainless steel layer is arranged on the inner side of the PTC layer, and the second stainless steel layer is arranged on the outer side of the PTC layer.
According to the inert gas heating device provided by the utility model, the heating pipe further comprises a heat pipe layer;
the heat pipe layer is embedded in the first stainless steel layer.
According to the inert gas heating device provided by the utility model, the heating pipe further comprises an insulating layer;
the heat preservation layer is sleeved on the second stainless steel layer.
According to the inert gas heating device provided by the utility model, the outer wall surface of the heating pipe is provided with the hook part.
According to the inert gas heating device provided by the utility model, the air inlet pipe and/or the air outlet pipe are/is a metal corrugated pipe.
According to the inert gas heating device provided by the utility model, the PTC layer is cylindrical.
According to the inert gas heating device provided by the utility model, the inert gas heating device further comprises a temperature sensor;
the temperature sensor is arranged at the end part of the air outlet pipe and is used for detecting the temperature of inert gas exhausted by the air outlet pipe.
According to the inert gas heating device provided by the utility model, the inert gas heating device further comprises an alarm;
the alarm is connected with the temperature sensor and is used for giving out alarm sound.
In a second aspect, the present utility model provides an exhaust gas treatment apparatus comprising said inert gas heating device;
the waste gas treatment device is provided with a reaction container, and the inert gas heating device is used for introducing heated inert gas into a circulation pipeline of waste gas in the reaction container.
The inert gas heating device comprises the air inlet pipe, the heating pipe and the air outlet pipe which are sequentially connected, the heating pipe comprises the PTC layer, the PTC layer is connected with the power supply, current is introduced into the PTC layer through the power supply, the temperature after the PTC layer is heated is stabilized in a target temperature range, the target temperature is greater than the crystallization temperature of waste gas, and the inert gas heating device is simple in structure and reliable in performance, and can effectively avoid the blockage of a circulating pipeline of the waste gas.
Drawings
In order to more clearly illustrate the utility model or the technical solutions of the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the utility model, and other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of an inert gas heating device according to the present utility model;
FIG. 2 is a schematic cross-sectional view of a heating tube according to the present utility model;
reference numerals: 1: an air inlet pipe; 2: heating pipes; 21: a PTC layer; 22: a first stainless steel layer; 23: a second stainless steel layer; 24: a heat pipe layer; 25: a heat preservation layer; 3: and an air outlet pipe.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present utility model more apparent, the technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
An inert gas heating device according to an embodiment of the present utility model is described below with reference to fig. 1 and 2.
As shown in fig. 1 and 2, an inert gas heating device provided in an embodiment of the present utility model includes: an air inlet pipe 1, an air outlet pipe 3 and a heating pipe 2.
The air inlet pipe 1 and the air outlet pipe 3 are arranged at two opposite ends of the heating pipe 2, the air inlet pipe 1 is used for being connected with an air source, and the air outlet pipe 3 is used for being connected with a circulation pipeline of the waste gas treatment equipment; the heating tube 2 comprises a PTC layer 21, and the heating tube 2 is intended to be connected to a power source.
Specifically, the PTC material is a positive temperature coefficient semiconductor material, a PTC heating element made of the PTC material is adopted, alternating current or direct current voltage is applied to the PTC heating element, the temperature of the PTC material is lower than the Curie temperature, the resistance is small, and the current is large, so that the PTC material can be used for heating; after the temperature of the PTC material is higher than the Curie temperature, the resistance value is increased sharply, the current is reduced to a stable value, and the temperature begins to be reduced, so that the purposes of automatically controlling the temperature and keeping the temperature constant can be achieved. The PTC heating element has an automatic temperature control function, and a temperature control unit is not required to be additionally arranged in the use process.
The waste gas treatment equipment is internally provided with a circulating pipeline for circulating waste gas, the waste gas flows in the circulating pipeline, the temperature of the waste gas is lower than the crystallization temperature of the waste gas, the waste gas can be crystallized, a pipeline is blocked, in order to avoid pipeline blocking, in the prior art, hot inert gas is usually introduced into the front end of a position easy to block, the temperature of the waste gas is ensured not to be lower than the crystallization temperature of the waste gas, and the inert gas is usually nitrogen.
In the prior art, a heater used in the waste gas treatment equipment and used for heating inert gas is a resistance wire heater, and the resistance wire heater comprises a resistance wire heating pipe, a solid relay, a PID temperature control instrument, a temperature sensor and other components. The solid-state relay is easy to break down and conduct, an overtemperature breaking heating power module is required to be added for protection, a heating system excessively depends on a closed-loop controller, and proper PID parameter adjustment is required to be set. The whole structure is complex, an independent control cabinet needs to be arranged, and the electric control cabinet of the resistance wire heater and the electric control cabinet of the waste gas treatment equipment are connected through a plurality of cables, so that the installation is complicated.
The temperature of the nitrogen gas introduced into the circulation pipeline in the waste gas treatment equipment does not need to be accurately controlled, and the temperature of the nitrogen gas is stable within a target temperature range and is larger than the crystallization temperature of the waste gas, so that the waste gas is ensured not to be crystallized in the circulation pipeline. The inert gas heating device can be integrated into waste gas treatment equipment, can heat inert gas, has a simple structure, and has the functions of constant temperature and temperature control.
The inert gas heating device comprises an air inlet pipe 1, an air outlet pipe 3 and a heating pipe 2, wherein the air inlet pipe 1 and the air outlet pipe 3 are arranged at two opposite ends of the heating pipe 2, the air inlet pipe 1 is connected with an air source, the air source is used for introducing inert gas into the air inlet pipe 1, and the inert gas can be nitrogen or helium and the like. The air outlet pipe 3 is used for being connected with a circulation pipeline of waste gas in a reaction cavity of the waste gas treatment equipment.
The heating pipe 2 comprises a PTC layer 21, wherein the PTC layer 21 is made of a PTC material, and the PTC material can be a ceramic-based PTC material or a macromolecule-based PTC material. By setting the element components of the PTC material, the PTC layer 21 having the curie temperature satisfying the target temperature is prepared, for example, the temperature of hot nitrogen gas introduced into the circulation line is maintained at about 200 degrees celsius, and the PTC material having the curie temperature of about 200 degrees celsius is selected to prepare the PTC layer 21.
The PTC layer 21 is cylindrical, the inner diameter and the thickness of the PTC layer 21 are set according to the requirements, the power interface of the heating pipe 2 is connected with a power supply, when the PTC layer 21 is heated by supplying 220V alternating current through the power supply, and after the temperature of the PTC layer 21 exceeds the Curie temperature, the resistance is increased sharply, the current is reduced, and the temperature is reduced; the temperature of the PTC layer 21 is lower than the curie temperature, the resistance returns to normal, the current becomes large, and the PTC layer 21 starts to heat again, whereby the temperature of the PTC layer 21 can be stabilized around the curie temperature, which is within the target temperature range required for the exhaust gas treatment, and the temperature of the PTC layer 21 can be stabilized at the target temperature.
The power is electrified to the heating pipe 2, the temperature of the heating pipe 2 is stabilized at the target temperature, low-temperature nitrogen flows through the heating pipe 2 through the air inlet pipe 1, the low-temperature nitrogen and the heating pipe 2 are subjected to heat exchange and are converted into high-temperature nitrogen, the high-temperature nitrogen flows into a circulating pipeline of waste gas through the air outlet pipe 3, the temperature of the high-temperature nitrogen is higher than the crystallization temperature of the waste gas, the waste gas is effectively prevented from crystallizing in the circulating pipeline, the circulating pipeline is prevented from being blocked, and the reliable operation of waste gas treatment equipment is ensured.
In the embodiment of the utility model, the inert gas heating device comprises the air inlet pipe 1, the heating pipe 2 and the air outlet pipe 3 which are sequentially connected, the heating pipe 2 comprises the PTC layer 21, the PTC layer 21 is connected with a power supply, current is introduced into the PTC layer 21 through the power supply, the temperature after the PTC layer 21 is heated is stabilized in a target temperature range, the target temperature is greater than the crystallization temperature of waste gas, the inert gas heating device has a simple structure and reliable performance, and the blocking of a circulating pipeline of the waste gas can be effectively avoided.
In an alternative embodiment, as shown in fig. 2, the heating tube 2 further comprises a first stainless steel layer 22 and a second stainless steel layer 23; the first stainless steel layer 22 and the second stainless steel layer 23 are both coaxially arranged with the PTC layer 21, the first stainless steel layer 22 is arranged on the inner side of the PTC layer 21, and the second stainless steel layer 23 is arranged on the outer side of the PTC layer 21.
Specifically, the first stainless steel layer 22 and the second stainless steel layer 23 are both cylindrical, the first stainless steel layer 22, the second stainless steel layer 23 and the PTC layer 21 are coaxially arranged, the length of the first stainless steel layer 22 is equal to or similar to the length of the PTC layer 21, and the length of the second stainless steel layer 23 is equal to or similar to the length of the PTC layer 21.
The first stainless steel layer 22, the PTC layer 21 and the second stainless steel layer 23 are nested in sequence, the first stainless steel layer 22 being embedded in the PTC layer 21, the PTC layer 21 being embedded in the second stainless steel layer 23. The wall thickness of the first stainless steel layer 22 and the wall thickness of the second stainless steel layer 23 are set according to actual requirements, meanwhile, the first stainless steel layer 22 can be smoothly embedded into the PTC layer 21, and the PTC layer 21 can be smoothly embedded into the second stainless steel layer 23, so that assembly is facilitated.
The first stainless steel layer 22 may be made of ferritic stainless steel, austenitic-ferritic duplex stainless steel, or martensitic stainless steel; the second stainless steel layer 23 may also be made of ferritic stainless steel, austenitic-ferritic duplex stainless steel, or martensitic stainless steel.
The inert gas heating device is applied to waste gas treatment equipment, the inert gas heating device is integrally arranged in a reaction cavity of the waste gas treatment equipment, steam and corrosive gas exist in the reaction cavity, part of the steam, the corrosive gas and the like can flow through the heating pipe 2 along with the inert gas in the process of flowing through the heating pipe 2, the first stainless steel layer 22 arranged on the inner side of the PTC layer 21 and the second stainless steel layer 23 arranged on the outer side of the PTC layer 21 can effectively avoid corrosion of the corrosive gas to the heating pipe 2, and the service life of the heating pipe 2 is prolonged.
In an alternative embodiment, as shown in fig. 2, the heating tube 2 further comprises a heat tube layer 24; the heat pipe layer 24 is embedded in the first stainless steel layer 22.
Specifically, the first stainless steel layer 22 is further embedded with a heat pipe layer 24, the pipe diameter of the heat pipe layer 24 is set according to actual requirements, the length of the heat pipe layer 24 is matched with the length of the PTC layer 21, and the length of the heat pipe layer 24 is equal to or similar to the length of the PTC layer 21.
The heat pipe layer 24 is favorable for heat transfer and has high heat exchange efficiency, and meanwhile, the heat pipe layer 24 is favorable for uniform distribution of heat in the heating pipe 2.
In an alternative embodiment, as shown in fig. 2, the heating tube 2 further comprises an insulating layer 25; the heat-insulating layer 25 is sleeved on the second stainless steel layer 23.
Specifically, the second stainless steel layer 23 is sleeved with the heat-insulating layer 25, the thickness of the heat-insulating layer 25 is set according to actual requirements, and the length of the heat-insulating layer 25 is equal to or similar to that of the PTC layer 21. The heat insulating layer 25 may be made of polyurethane, foam or asbestos.
The heat preservation 25 can effectively reduce the heat loss in the heat exchange process, and is beneficial to saving energy consumption.
In an alternative embodiment, the outer wall surface of the heating tube 2 is provided with a hooking portion.
Specifically, the heating pipe 2 includes PTC layer 21 and locates heat preservation 25 in the PTC layer 21 outside, and the outer wall of heat preservation 25 is equipped with couple portion, and couple portion includes connecting portion and couple, and the one end and the couple of connecting portion are connected, and the other end of connecting portion is used for being connected with heat preservation 25, and the couple is the crotch form.
The inert gas heating device can be conveniently hung at any position in the frame cabinet through the hook part, the installation is convenient, and the occupied space is small.
In an alternative embodiment, the inlet pipe 1 and/or the outlet pipe 3 are metal bellows.
In particular, the metal corrugated pipe has better tensile strength and compression resistance, and good toughness and ductility. The air inlet pipe 1 is made of a metal corrugated pipe, the air inlet pipe 1 is used for being connected with an air source, and in the field installation process, the metal corrugated pipe can be bent and folded along with the position of an installation space, so that convenience of field installation is facilitated.
The air outlet pipe 3 can be made of metal corrugated pipes, the air outlet pipe 3 is connected with a circulating pipeline for conveying waste gas, a plurality of components are arranged in a reaction cavity of waste gas treatment equipment, and the air outlet pipe 3 can be bent and folded along with the inner space of the reaction cavity, so that the convenience of installation is facilitated.
The air inlet pipe 1 and the air outlet pipe 3 are made of metal corrugated pipes, and the use is not affected under the condition that the air inlet pipe 1 and the air outlet pipe 3 are reversely connected. For example, the air inlet pipe 1 is connected with a circulation pipeline for conveying waste gas, and the air outlet pipe 3 is connected with an air source and can still be used normally. The air inlet pipe 1 and the air outlet pipe 3 are used as circulation channels of inert gas, when the air inlet pipe 1 and the air outlet pipe 3 are installed, the air inlet pipe 1 and the air outlet pipe 3 have universality, operators do not need to specially distinguish the air inlet pipe 1 and the air outlet pipe 3, and convenience in installation is facilitated.
In an alternative embodiment, PTC layer 21 is cylindrical.
Specifically, the PTC layer 21 is cylindrical, the inner diameter and thickness of the PTC layer 21 are set according to actual requirements, and the heating pipe 2 is composed of a plurality of coaxially arranged cylindrical bodies. For example, in the radial direction of the heating tube 2, the heating tube 2 is formed of five layers of cylindrical bodies, namely, a heat insulation layer 25, a second stainless steel layer 23, a PTC layer 21, a first stainless steel layer 22 and a heat tube layer 24 from outside to inside.
The heating pipe 2 is of a cylindrical structure, so that uniform heat distribution is facilitated, and the heating pipe 2 has the characteristics of constant temperature, rust prevention, uniform heat distribution, energy consumption saving and the like.
In an alternative embodiment, the inert gas heating device further comprises a temperature sensor; the temperature sensor is arranged at the end part of the air outlet pipe 3 and is used for detecting the temperature of the inert gas discharged by the air outlet pipe 3.
Specifically, the inert gas heating device further comprises a temperature sensor, the temperature sensor is arranged at the outlet of the air outlet pipe 3, and the temperature of the inert gas at the outlet is detected through the temperature sensor. The real-time temperature of the inert gas detected by the temperature sensor is in the target temperature range, which indicates that the inert gas heating device works normally, and the heated inert gas can effectively avoid the blockage of the circulating pipeline of the waste gas.
The real-time temperature of the inert gas detected by the temperature sensor is lower than the target temperature, so that the inert gas heating device is indicated to work abnormally, and operators can be prompted to overhaul the inert gas heating device in time.
In an alternative embodiment, the inert gas heating device further comprises an alarm; the alarm is connected with the temperature sensor and is used for giving out alarm sound.
Specifically, the alarm and the temperature sensor are both connected with the controller, and the controller can control whether the alarm gives out alarm sound according to the temperature signal sent by the temperature sensor.
The real-time temperature of the inert gas detected by the temperature sensor is lower than the target temperature, so that the inert gas heating device is indicated to work abnormally, the controller controls the alarm to give out alarm sound, and operators can be prompted to overhaul the inert gas heating device in time.
The embodiment of the utility model also provides an exhaust gas treatment device, which comprises the inert gas heating device, wherein the exhaust gas treatment device is provided with a reaction container, and the inert gas heating device is used for introducing heated inert gas into the reaction container.
Specifically, the inert gas heating device comprises an air inlet pipe 1, a heating pipe 2 and an air outlet pipe 3 which are sequentially connected, wherein a power interface is arranged on the heating pipe 2 and is used for being connected with a power supply. The air inlet pipe 1 is connected with an air source, the power interface of the heating pipe 2 is connected with a power source, and the air outlet pipe 3 is connected with a circulating pipeline of waste gas.
The gas source is used to provide an inert gas, which is illustrated as nitrogen. The waste gas treatment equipment comprises a reaction container, a circulation pipeline for conveying waste gas is arranged in the reaction container, and the waste gas is subjected to catalytic combustion reaction in the reaction container under a high-temperature environment and is further discharged along with the circulation pipeline. The waste gas in the circulating pipeline is heated through the hot nitrogen, so that the temperature of the waste gas is ensured to be kept above the crystallization temperature, the nitrogen is inert gas and does not participate in catalytic combustion reaction, and the purification efficiency of the waste gas is not affected.
The heating pipe 2 is of a multi-layer structure, and the heating pipe 2 comprises a heat preservation layer 25, a second stainless steel layer 23, a PTC layer 21, a first stainless steel layer 22 and a heat pipe layer 24 which are sequentially arranged from outside to inside. The power interface of the heating pipe 2 is connected with a power supply, 220V alternating current is supplied to the power supply, the PTC layer 21 has a constant temperature function in the heating process, and the appropriate PTC layer 21 is selected according to the crystallization temperature of waste gas in the waste gas treatment process, so that the curie temperature of the PTC layer 21 is higher than the crystallization temperature of the waste gas. During the heating process, the temperature of the heating pipe 2 is kept near the Curie temperature by the constant temperature function of the PTC layer 21, so that the blockage of the circulating pipeline of the waste gas is effectively avoided.
The inside on PTC layer 21 inlays and is equipped with first stainless steel layer 22, and the outside cover on PTC layer 21 is equipped with second stainless steel layer 23, and first stainless steel layer 22 and second stainless steel layer 23 can effectively avoid heating pipe 2 to appear corrosion phenomenon in the use, are favorable to promoting heating pipe 2's life.
The heat pipe layer 24 is embedded on the inner side of the first stainless steel layer 22, in the heating process, the heat pipe layer 24 is favorable for uniformly distributing heat in the heating pipe 2, and in the process that nitrogen flows through the heating pipe 2, the nitrogen is guaranteed to be uniformly heated.
The heat preservation layer 25 is sleeved on the outer side of the second stainless steel layer 23, and the heat dissipation of the heating pipe 2 can be effectively reduced by the heat preservation layer 25, so that energy consumption is saved.
The heating pipe 2 adopting the structure has the characteristics of constant temperature, rust prevention, uniform heat distribution, energy consumption saving, reliable use and the like, and the heating pipe 2 has a simple structure. The constant temperature performance of the heating pipe 2 can effectively avoid the blockage of the circulation pipeline of the waste gas, thereby being beneficial to the reliable operation of the waste gas treatment equipment.
The air inlet pipe 1 and the air outlet pipe 3 are made of metal corrugated pipes, the metal corrugated pipes can be bent and folded along with the installation space, the field installation is convenient, and meanwhile, the universality is strong.
The outer wall surface of the heating pipe 2 is provided with a hook part, so that the heating pipe is convenient to hang at any position of the frame cabinet, and the occupied space is small.
The inert gas heating device is provided with three interfaces, namely a power interface, an air inlet and an air outlet, and is integrated in the waste gas treatment equipment, and the inert gas heating device is connected with a power supply, an air source and a flow pipeline of waste gas through the three interfaces, so that the inert gas heating device is convenient to install, occupies small space and is beneficial to the compactness of the internal structure of the waste gas treatment equipment.
In the use process of the inert gas heating device, the temperature of the heating pipe 2 can be always kept near the Curie temperature, so that the temperature of nitrogen flowing into the circulation pipeline from the air outlet pipe 3 is ensured to be higher than the crystallization temperature of waste gas, and the reliable operation of waste gas treatment equipment is effectively ensured.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model.
Claims (10)
1. An inert gas heating device, comprising: the air inlet pipe, the air outlet pipe and the heating pipe;
the air inlet pipe and the air outlet pipe are arranged at two opposite ends of the heating pipe, the air inlet pipe is used for being connected with an air source, and the air outlet pipe is used for being connected with a circulation pipeline of the waste gas treatment equipment;
the heating tube comprises a PTC layer and is used for being connected with a power supply.
2. The inert gas heating apparatus of claim 1, wherein the heating tube further comprises a first stainless steel layer and a second stainless steel layer;
the first stainless steel layer and the second stainless steel layer are both coaxially arranged with the PTC layer, the first stainless steel layer is arranged on the inner side of the PTC layer, and the second stainless steel layer is arranged on the outer side of the PTC layer.
3. The inert gas heating apparatus of claim 2, wherein the heating tube further comprises a heat tube layer;
the heat pipe layer is embedded in the first stainless steel layer.
4. The inert gas heating apparatus of claim 2, wherein the heating tube further comprises a heat preservation layer;
the heat preservation layer is sleeved on the second stainless steel layer.
5. The inert gas heating device according to claim 1, wherein an outer wall surface of the heating pipe is provided with a hooking portion.
6. An inert gas heating apparatus according to claim 1, wherein said inlet pipe and/or said outlet pipe is a metal bellows.
7. An inert gas heating device according to claim 1, wherein said PTC layer is cylindrical.
8. The inert gas heating device of claim 1, further comprising a temperature sensor;
the temperature sensor is arranged at the end part of the air outlet pipe and is used for detecting the temperature of inert gas exhausted by the air outlet pipe.
9. The inert gas heating device of claim 8, further comprising an alarm;
the alarm is connected with the temperature sensor and is used for giving out alarm sound.
10. An exhaust gas treatment apparatus comprising an inert gas heating device according to any one of claims 1 to 9;
the waste gas treatment device is provided with a reaction container, and the inert gas heating device is used for introducing heated inert gas into a circulation pipeline of waste gas in the reaction container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223519429.0U CN219473976U (en) | 2022-12-28 | 2022-12-28 | Inert gas heating device and exhaust gas treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223519429.0U CN219473976U (en) | 2022-12-28 | 2022-12-28 | Inert gas heating device and exhaust gas treatment equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219473976U true CN219473976U (en) | 2023-08-04 |
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| CN202223519429.0U Active CN219473976U (en) | 2022-12-28 | 2022-12-28 | Inert gas heating device and exhaust gas treatment equipment |
Country Status (1)
| Country | Link |
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| CN (1) | CN219473976U (en) |
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2022
- 2022-12-28 CN CN202223519429.0U patent/CN219473976U/en active Active
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