CN106941064B - X-ray tube and its manufacturing method - Google Patents

X-ray tube and its manufacturing method Download PDF

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Publication number
CN106941064B
CN106941064B CN201710278207.9A CN201710278207A CN106941064B CN 106941064 B CN106941064 B CN 106941064B CN 201710278207 A CN201710278207 A CN 201710278207A CN 106941064 B CN106941064 B CN 106941064B
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Prior art keywords
ray tube
current
anode
ring
ceramic shell
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CN106941064A (en
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刘斌
张晓梅
陈帅
杨晓风
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Chengdu kaisaier Technology Co.,Ltd.
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CHENGDU KAISAIER ELECTRONICS CO LTD
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • H01J35/16Vessels; Containers; Shields associated therewith
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38Exhausting, degassing, filling, or cleaning vessels
    • H01J9/385Exhausting vessels
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38Exhausting, degassing, filling, or cleaning vessels
    • H01J9/39Degassing vessels

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • X-Ray Techniques (AREA)

Abstract

The present invention discloses a kind of X-ray tube, including ceramic shell, it includes cavity, the cavity includes the interconnecting piece that cylindrical first part, one end are connect with the first part one end and the cylindrical second part that one end is connect with the other end of the interconnecting piece, wherein, the diameter of the first part is more than the diameter of the second part, which is connected smoothly the first part and the second part, and the interconnecting piece, the first and second part are coaxial;Anode is set in the second part and coaxial with the ceramic shell;Shielding case is set in the other end of the first part and coaxial with the ceramic shell;Cathode is set in the shielding case.Its impact resistance, alternating hot and cold performance and pressure-resistant performance are stronger.Invention additionally discloses a kind of manufacturing methods for the X-ray tube that X-ray tube can be made more fully to deflate.

Description

X-ray tube and its manufacturing method
Technical field
The present invention relates to X-ray Manifold technologies, and in particular to X-ray tube and its manufacturing method.
Background technology
X ray tubes include two electrodes of anode and cathode, are respectively used to receive the target of electron bombardment and launching electronics Filament.Two electrodes are sealed in the shell of high vacuum.
The mainly glass tube of safety check class X-ray tube at present, and glass tube just has the general drawback of glass tube, shock resistance Property, alternating hot and cold performance and pressure-resistant performance be not strong.Cause glass tube be easy in transit with damaged in use, to affect The yield rate and service life of pipe.
For this reason, it may be desirable to seek a kind of technical solution, at least to mitigate the above problem.
Invention content
On the one hand, the technical problem to be solved by the present invention is to provide a kind of impact resistance, alternating hot and cold performance and pressure resistance The stronger X ray tubes of performance.
On the other hand, the technical problem to be solved by the present invention is to provide a kind of X that X ray tubes can be made more fully to deflate The manufacturing method of ray tube.
The technical issues of to solve one side, the present invention use following technical proposals.
A kind of X-ray tube, including:
Ceramic shell comprising cavity, the cavity include cylindrical first part, one end and the first part one end The cylindrical second part that the interconnecting piece of connection and one end are connect with the other end of the interconnecting piece, wherein this first The diameter divided is more than the diameter of the second part, which is connected smoothly the first part and the second part, should Interconnecting piece, the first and second part are coaxial;
Anode is set in the second part and coaxial with the ceramic shell;
Shielding case is set in the other end of the first part and coaxial with the ceramic shell;And
Cathode is set in the shielding case.
The shielding case includes the second ring in annular shape for being less than the first ring outer diameter in the first circular ring, outer diameter And the connection ring for connecting one end of first ring with one end of second ring, wherein second ring is coaxial with first ring And towards the anode.
There is gap between the anode and the ceramic shell.
It further include the window for making thin formation by grinding positioned at ceramic shell outer wall corresponding with first part.
Further include be installed on first part's other end by binding post, the exhaust pipe edge of a knife, argon arc welding lid together in interior Protective cover.
It further include the radiator being connect with the anode.
The technical issues of to solve another aspect, the present invention use following technical proposals.
A kind of manufacturing method of X-ray tube, includes the following steps:
Step 1, the X-ray tube of above structure is assembled;
Step 2, the X-ray tube assembled to step 1 vacuumizes, and is evacuated to vacuum degree and is at least 10^(-4)The order of magnitude;
Step 3, gas exhaust treatment is carried out in two steps:
The first step, the X-ray tube after step 2 is vacuumized are placed in roasting plant, and the temperature of roasting plant is risen from 0 DEG C To 350-380 DEG C, heating-up time at least 1h, vacuum degree at this time reaches 10^(-5)The order of magnitude, and keep this order of magnitude Vacuum degree keeps the temperature at least 2h at this temperature and the vacuum degree order of magnitude;It then proceedes to be warming up to 500-580 DEG C, the heating-up time is extremely Few 2h, cools down after keeping the temperature at least 3h at this temperature, until X-ray tube drops to room temperature;
Second step, first to the filament of X-ray tube be powered, electrical current 3.7A, make filament be warming up to 2000 degree and with On, further degassing is carried out to filament;Then in X-ray tube plus 40kV high pressures, adjustment heater current make tube current be 4mA simultaneously Keep at least 2.5h;Subsequently so that tube current is increased to 6mA as low as 30kV adjustment heater currents high pressure drop and keeps at least 2h; Later by high pressure drop as low as 20kV, adjustment heater current makes tube current increase to 8mA and keeps at least 0.5h, then high pressure is reduced To 15kV, so that tube current is continually maintained in 8mA and keep at least 0.5h;High pressure is finally closed, waits for that X-ray tube is cooled to room temperature It will be taken out after X-ray tube clamp afterwards;
Step 4, it is seasoned that the X-ray tube taken out to step 3 carries out oil pressure;
In step 3, voltage range ± 0.5%, current range ± 0.2%.
Oil pressure is seasoned to be as follows:
Step 41,1h and within the experienced voltage for being applied to X-ray tube is gradually increased to 190kV, X-ray from 50 kV The anode current of pipe is maintained at 2mA;
Step 42, after completing step 41, X-ray tube is steady in the case where experienced voltage is 190kV, anode current is 2mA Fixed work at least 2h;
Step 43, after completing step 42, X-ray tube is steady in the case where experienced voltage is 175kV, anode current is 2mA Fixed work at least 8h;
Step 44, after completing step 43, X-ray tube is opened in the case where experienced voltage is 175kV, anode current is 2mA It is at least 1000 times disconnected;
Step 45, complete step 44 after, X-ray tube in the case where experienced voltage is 175kV, anode current is 2mA again Steady operation at least 8h;
In step 41-45, voltage range ± 0.5%, current range ± 0.05%.
The present invention has following advantageous effects.
The ceramic shell of X-ray tube of the present invention includes cavity, which includes cylindrical first part, one end and the The interconnecting piece of a part of one end connection and the cylindrical second part of the other end of one end and interconnecting piece connection, first The diameter divided is more than the diameter of second part, which is connected smoothly first part and the second part, interconnecting piece, First and second part is coaxial;Anode jacket is loaded in second part and coaxial with ceramic shell;Shielding case is set in the another of first part It is in one end and coaxial with ceramic shell;Ceramic shell plays insulating effect, and cavity is whole using the above structure, and first part is protected Demonstrate,prove pressure-resistant distance, first part in the middle part of X-ray tube makes electric field shrink to second part reduced diameter, reaches second part The electric field of the end opposite with first part is almost nil, to reduce the discharge probability of X-ray tube, improves X-ray tube Compressive resistance.Also, ceramics itself pressure resistance, alternating hot and cold performance and intensity will be better than glass, have compared with high impact properties, can To meet harsher working environment.
The manufacturing method of the present invention gas exhaust treatment step is carried out in two steps, and strictly controls the gas exhaust treatment technique ginseng of two steps Number, the first step integrally heat up to X-ray tube by roasting plant, so that the gas that X-ray tube material surface adheres to is excluded clean, the Two steps are by electron bombardment target surface, and so that target is generated instantaneous high-temperature makes material deflate again, and electron bombardment can will hide in X The gas of ray tube material deeper releases.As it can be seen that the manufacturing method of the present invention can make X-ray tube more fully deflate, carry Vacuum degree in senior executive ensures X-ray tube steady operation.
Description of the drawings
Fig. 1 is the structural schematic diagram of X-ray tube of the present invention.
Fig. 2 is the focusing electrode of X-ray tube of the present invention and the structural schematic diagram that focusing electrode locating plate is combined.
Fig. 3 is the upward view of Fig. 2.
Fig. 4 is the focus mask of X-ray tube of the present invention.
Specific implementation mode
For can the technical characteristic that the present invention will be described in detail and effect, and can be realized according to the content of this specification, below Embodiments of the present invention are further illustrated.
Fig. 1 illustrates a kind of embodiment of X-ray tube in the numerous embodiments of the present invention.The X-ray tube includes poly- Burnt pole 1, focusing electrode locating plate 2, focus mask 4, ceramic shell 5, anode 6, shielding case 8 and cathode 11.
Ceramic shell 5 includes cavity, which includes first part 51, interconnecting piece 52 and second part 53.First part 51 is cylindrical.One end of interconnecting piece 52 is connect with one end of first part 51.Second part 53 is cylindrical, one end and company The second part 53 of the other end connection of socket part 52.The diameter of first part 51 is more than the diameter of second part 53, interconnecting piece 52 are connected smoothly first part 51 and this second 53 points, and interconnecting piece 52, the first and second part 51,53 are coaxial.
Anode 6 is set in second part 53, coaxial with ceramic shell 5 preferable.
Shielding case 8 is set in the other end of first part 51, coaxial with ceramic shell 5 preferable.
Cathode 11 is set in shielding case 8.Together referring to Fig. 2-4, focusing electrode 1 is set in shielding case 8, the lamp of cathode 11 Silk stretches into focusing electrode 1.Focus mask 4 is fixed on by laser welding on focusing electrode 1, that side opposite with cathode 11 is located at.It is poly- Burnt pole locating plate 2 is set in in cathode 11, is fixed by screw 3 and focusing electrode 1.
In some embodiments, shielding case 8 includes being less than the first ring outer diameter 81 in the first circular ring 81, outer diameter In circular the second ring 82 and the connection ring 83 for connecting one end of first ring 81 with one end of the second ring 82.Second ring 82 is coaxial with the first ring 81, and the second ring 82 is towards anode 6.Shielding case 8 uses this stepped design, so that electric field is reached root several It is zero, preferably can plays the role of shielding electric field to the burr of 1 the inside of focusing electrode, to improve resistance to voltage levels.
In some embodiments, there is gap between anode 6 and ceramic shell 5.Anode 6 is made of oxygen-free copper, can be Electronics is beaten the heat generated on tungsten target and is taken away rapidly.
In some embodiments, X-ray tube of the invention further includes corresponding with first part 51 outer positioned at ceramic shell 5 The window 54 for making thin formation by grinding of wall makees thin other X for reaching window effect, capable of constraining except for the windows 54 by grinding Ray ensures that injection ray is more uniform.
In some embodiments, X-ray tube of the invention further include be installed on first part 51 the other end by wiring Column 10, the exhaust pipe edge of a knife, argon arc welding lid are together in interior protective cover 9.
In some embodiments, X-ray tube of the invention further includes the radiator 7 being connect with anode 6, to increase radiating surface Product.
A kind of manufacturing method of X-ray tube of the present invention, includes the following steps:
Step 1, the X-ray tube of above structure is assembled;
Step 2, the X-ray tube assembled to step 1 vacuumizes, and is evacuated to vacuum degree and is at least 10^(-4)The order of magnitude;
Step 3, gas exhaust treatment is carried out in two steps:
The first step, the X-ray tube after step 2 is vacuumized are placed in roasting plant, and the temperature of roasting plant is risen from 0 DEG C To 350-380 DEG C, such as 350 DEG C, 360 DEG C, 370 DEG C, 380 DEG C etc., heating-up time at least 1h, such as 1h, 1.5h, 2h etc., this When vacuum degree reach 10^(-5)The order of magnitude, and the vacuum degree of this order of magnitude is kept, in this temperature and the vacuum degree order of magnitude Lower heat preservation at least 2h, such as 2h, 2.5h, 3h etc.;Then proceed to be warming up to 500-580 DEG C, for example, 500 DEG C, 520 DEG C, 540 DEG C, 560 DEG C, 580 DEG C etc., heating-up time at least 2h, such as 2h, 2.5h, 3h etc., heating rate should not be too fast preferable at this time, is maintained at 10^(-6)The outgassing rate of the order of magnitude is preferable, cools down after keeping the temperature at least 3h at this temperature, such as 3h, 3.5h, 4h etc., so that Material is fully deflated, until X-ray tube drops to room temperature, vacuum degree goes back up to 3.5-4.5 × 10^(-6)Pa is preferable;
Second step, first to the filament of X-ray tube be powered, electrical current 3.7A, make filament be warming up to 2000 degree and with On, such as 2000 degree, 2100 degree, 2200 degree, 2300 degree etc., further degassing is carried out to filament;Then add in X-ray tube 40kV high pressures, adjustment heater current make tube current be 4mA, and vacuum degree can continue to reduce at this time, down to 2.5-3.5 × 10 ^(-6)Pa, in X-ray tube plus 40kV high pressures and adjustment heater current make tube current be to keep at least 2.5h under this operating modes of 4mA, Such as 2.5h, 3h, 3.5h etc., vacuum degree will go back up to 7.5-8.5 × 10^ this period(-7)pa;Subsequently high pressure is reduced To 30kV, adjustment heater current makes tube current increase to 6mA, and at this moment increasing power can make vacuum degree be again decreased to 1.0-2.0 ×10^(-6)Pa, high pressure drop make tube current increase under this operating modes of 6mA to keep at least as low as 30kV and adjustment heater current 2h, such as 2h, 2.5h, 3h etc., vacuum degree will go back up to 4.5-5.5 × 10^ this period(-7)pa;Later by high pressure drop as low as 20kV, adjustment heater current make tube current increase to 8mA, at this moment reduce power, increase tube current, gone to target surface deeper Gas, vacuum degree, which has, at this time faint is reduced to 5.5-6.5 × 10^(-7)Pa, high pressure drop make pipe as low as 20kV and adjustment heater current Electric current, which increases under this operating modes of 8 mA, keeps at least 0.5h, such as 0.5h, 0.7h, 0.9h etc., then by high pressure drop as low as 15kV , so that tube current is continually maintained in 8mA, slowly reduce power at this time, make degassing more abundant, high pressure drop is as low as 15kV and makes pipe Electric current is continually maintained under this operating modes of 8mA and keeps at least 0.5h, such as 0.5h, 0.7h, 0.9h etc.;High pressure is finally closed, waits for X Ray tube is cooled to room temperature, and vacuum degree reaches 7.5-8.5 × 10^ at this time(-8)Pa, then will be taken out after the X-ray tube clamp;
Step 4, it is seasoned that the X-ray tube taken out to step 3 carries out oil pressure.
Above, voltage range ± 0.5%, current range ± 0.2%.
In above-mentioned steps 4, oil pressure is seasoned to be as follows:
Step 41,1h and within(Such as 0.4h, 0.5h, 0.6h, 0.8h, 1h etc.)The old of X-ray tube will be applied to Practice voltage and be gradually increased to 190kV from 50 kV, the anode current of X-ray tube is maintained at 2mA, which is added in anode and cathode by high pressure Between, make electrode surface local melting using the electric discharge of breakdown, tentatively eliminate burr so that the stress levels of X-ray tube are gradually It improves;
Step 42, after completing step 41, X-ray tube is steady in the case where experienced voltage is 190kV, anode current is 2mA Fixed work at least 2h, such as 2h, 2.5h, 3h etc., this step progress superpressure is seasoned, further eliminates the burr of X-ray tube so that X The stress levels of ray tube further increase, and are further ensured that the stability that X-ray tube works long hours;
Step 43, after completing step 42, X-ray tube is steady in the case where experienced voltage is 175kV, anode current is 2mA Fixed work at least 8h, such as 8h, 8.5h, 9h etc., this step simulates normal operating conditions, higher 15kV than real work, ensures just Often stabilization when work;
Step 44, after completing step 43, X-ray tube is opened in the case where experienced voltage is 175kV, anode current is 2mA It is at least 1000 times disconnected, specifically, opening high pressure, stablize at least 30s, close high pressure, recycles at least 1000 times, by cut-offfing this mode Simulate a kind of low-frequency pulse voltage, to X-ray tube carry out it is a kind of profound level it is seasoned, be further ensured that X-ray tube long-time work The stability of work;
Step 45, complete step 44 after, X-ray tube in the case where experienced voltage is 175kV, anode current is 2mA again Steady operation at least 8h, such as 8h, 8.5h, 9h etc., this step simulate normal operating conditions again, so as to the performance of X-ray tube Finally settle out.
Above-mentioned steps 42,43,44,45 step up the discharge probability of anode and cathode, X are made to penetrate by different pressuring methods Spool obtain fully it is seasoned, to obtain relatively reliable job stability.As it can be seen that above-mentioned steps 41,42,43,44,45 are to each other Cooperation eliminates the small inhomogeneities of negative and positive pole surface, can improve the stress levels of X-ray tube, ensures X-ray tube for a long time The stability of work, and relatively reliable job stability can be obtained.
In above step 41-45, voltage range ± 0.5%, current range ± 0.05%.
Further include shape processing step between above-mentioned steps 3 and step 4.
It should be noted that each particular technique feature described in above-mentioned specific implementation mode, in reconcilable feelings Under condition, it can be combined by any suitable mode.In order to avoid unnecessary repetition, the present invention is to various possible groups Conjunction mode is not described.
Above with reference to embodiment to the present invention have been described in detail, it is illustrative rather than restrictive, is not taking off From the change and modification under present general inventive concept, within protection scope of the present invention.

Claims (7)

1. a kind of X-ray tube, which is characterized in that including:
Ceramic shell comprising cavity, the cavity include that cylindrical first part, one end are connect with the first part one end Interconnecting piece and the cylindrical second part that is connect with the other end of the interconnecting piece of one end, wherein the first part Diameter is more than the diameter of the second part, which is connected smoothly the first part and the second part, the connection Portion, the first and second part are coaxial;
Anode is set in the second part and coaxial with the ceramic shell;
Shielding case is set in the other end of the first part and coaxial with the ceramic shell;And
Cathode is set in the shielding case;
The shielding case include in the first circular ring, outer diameter be less than the first ring outer diameter in circular the second ring and The connection ring that one end of first ring is connect with one end of second ring, wherein second ring is coaxial with first ring and court To the anode.
2. X-ray tube according to claim 1, which is characterized in that between having between the anode and the ceramic shell Gap.
3. X-ray tube according to claim 1, which is characterized in that further include opposite with first part positioned at ceramic shell Answer the window for making thin formation by grinding of outer wall.
4. X-ray tube according to any one of claims 1 to 3, which is characterized in that further include being installed on the first part The other end by binding post, the exhaust pipe edge of a knife, argon arc welding lid together in interior protective cover.
5. X-ray tube according to any one of claims 1 to 3, which is characterized in that further include connect with the anode dissipate Hot device.
6. a kind of manufacturing method of X-ray tube, which is characterized in that include the following steps:
Step 1, X-ray tube described in any one of claim 1 to 5 is assembled;
Step 2, the X-ray tube assembled to step 1 vacuumizes, and is evacuated to vacuum degree and is at least 10^ (- 4) order of magnitude;
Step 3, gas exhaust treatment is carried out in two steps:
The first step, the X-ray tube after step 2 is vacuumized are placed in roasting plant, and the temperature of roasting plant is raised to from 0 DEG C 350-380 DEG C, heating-up time at least 1h, vacuum degree at this time reaches 10^ (- 5) order of magnitude, and keeps the true of this order of magnitude Reciprocal of duty cycle keeps the temperature at least 2h at this temperature and the vacuum degree order of magnitude;It then proceedes to be warming up to 500-580 DEG C, the heating-up time is at least 2h cools down after keeping the temperature at least 3h at this temperature, until X-ray tube drops to room temperature;
Second step is first powered to the filament of X-ray tube, and electrical current 3.7A makes filament be warming up to 2000 degree or more, right Filament carries out further degassing;Then add 40kV high pressures, adjustment heater current that tube current is made to be 4mA and keep in X-ray tube At least 2.5h;Subsequently so that tube current is increased to 6mA as low as 30kV adjustment heater currents high pressure drop and keeps at least 2h;Later By high pressure drop as low as 20kV, adjustment heater current makes tube current increase to 8mA and keeps at least 0.5h, then by high pressure drop as low as 15kV makes tube current be continually maintained in 8mA and keeps at least 0.5h;High pressure is finally closed, it will after X-ray tube is cooled to room temperature It is taken out after X-ray tube clamp;
Step 4, it is seasoned that the X-ray tube taken out to step 3 carries out oil pressure;
In step 3, voltage range ± 0.5%, current range ± 0.2%.
7. the manufacturing method of X-ray tube according to claim 6, which is characterized in that in the step 4, oil pressure is seasoned It is as follows:
Step 41,1h and within the experienced voltage for being applied to X-ray tube is gradually increased to 190kV, the sun of X-ray tube from 50kV Electrode current is maintained at 2mA;
Step 42, after completing step 41, X-ray tube stablizes work in the case where experienced voltage is 190kV, anode current is 2mA Make at least 2h;
Step 43, after completing step 42, X-ray tube stablizes work in the case where experienced voltage is 175kV, anode current is 2mA Make at least 8h;
Step 44, complete step 43 after, X-ray tube cut-off in the case where experienced voltage is 175kV, anode current is 2mA to It is 1000 times few;
Step 45, after completing step 44, X-ray tube is stablized again in the case where experienced voltage is 175kV, anode current is 2mA Work at least 8h;
In step 41-45, voltage range ± 0.5%, current range ± 0.05%.
CN201710278207.9A 2017-04-25 2017-04-25 X-ray tube and its manufacturing method Active CN106941064B (en)

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CN116741607B (en) * 2023-07-20 2024-01-30 上海超群检测科技股份有限公司 Anti-sparking cathode assembly and X-ray tube
CN116978762B (en) * 2023-09-22 2023-11-24 上海超群检测科技股份有限公司 Pocket welding method for anode assembly

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