KR20170012905A - Method for welding the stem onto the ceramic X-ray tube - Google Patents

Method for welding the stem onto the ceramic X-ray tube Download PDF

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Publication number
KR20170012905A
KR20170012905A KR1020150105534A KR20150105534A KR20170012905A KR 20170012905 A KR20170012905 A KR 20170012905A KR 1020150105534 A KR1020150105534 A KR 1020150105534A KR 20150105534 A KR20150105534 A KR 20150105534A KR 20170012905 A KR20170012905 A KR 20170012905A
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South Korea
Prior art keywords
tube
ceramic
glass
metal
stem portion
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KR1020150105534A
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Korean (ko)
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KR101737399B1 (en
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이동훈
김상효
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(주)선재하이테크
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/18—Windows
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H05G2/005—X-ray radiation generated from plasma being produced from a liquid or gas containing a metal as principal radiation generating component
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/28—Heaters for thermionic cathodes
    • H01J2201/2889—Characterised by material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)

Abstract

The present invention relates to a method of welding a stem part onto a ceramic X-ray tube, for welding the stem part, which is formed of a glass or a material having physical and chemical properties equivalent to the glass, at a lower portion of a ceramic X-ray tube formed at an upper portion thereof with an X-ray irradiation window and opened at the lower portion thereof, and for forming a vacuum inside the X-ray tube in a direct vacuum exhausting way. According to the method of welding the stem part onto the ceramic X-ray tube proposed by the present invention: 1. a conventional X-ray tube using a glass tube is replaced with a ceramic tube having excellent impact-resistance and heat-resistance; 2. a glass stem part having a feature different from the ceramic tube is welded onto the lower portion of the ceramic tube; and 3. the vacuum of the ceramic tube is formed in the direct vacuum exhausting way under normal pressure, thereby implementing a vacuum state having preferable quality, to compare with a conventional process of performing a vacuum brazing in a vacuum chamber to form the glass stem part at the lower portion of the ceramic tube.

Description

FIELD OF THE INVENTION [0001] The present invention relates to a method of joining a stem portion of an X-ray tube having a ceramic material,

More particularly, the present invention relates to a method of joining an X-ray tube having a ceramic material to a stem portion of a ceramic material, The present invention relates to a method of joining a stem portion of an X-ray tube having a ceramic material, in which a stem portion having an X-ray tube is bonded and a vacuum degree inside the X-ray tube can be formed by a direct vacuum evacuation method.

Generally, radiation with low permeability, which is easily absorbed by a thin air layer depending on the material permeability, is called a pumped x ray, and the one having high permeability used for a nylon is called a ray ray.

The energy of the X-ray is lower by several tens of minutes than that of the X-ray, and the effect of direct irradiation is also much smaller.

Table 1 shows the characteristics of the soft X-ray and the soft X-ray.

division wavelength energy Usage Soft x-ray 1 to 10 Å 1 to 10 keV Analytical, static elimination Light X-ray 0.01 to 1 A 10 to 1000 keV Medical, industrial

As is known, since the soft X-ray of the soft X-ray generator is generated when accelerated electrons collide with the metal target Be, the soft X-ray generator is composed of a high voltage generator and a target that accelerate electrons at a high speed.

When the voltage applied to the electrode is referred to as an acceleration voltage (target voltage), the energy E of the electron movement at the time of collision is expressed by the following equation.

E = eV = (1/2) mv 2

here,

e: electron charge amount (-1.602X10 -19 C)

m: electronic mass (9.109X10 -31 kg)

V: Acceleration voltage

v: Electronic speed.

As it is known, the kinetic energy of the electron changes to almost heat when it collides with the target, and only about 1% of energy is emitted to the x-rays, and the efficiency of x-ray generation is expressed as follows.

Generation efficiency = 1.1X10 -9 ZV

Here, Z is the atomic number of the target material.

This pseudo-x-ray irradiation equation is based on the ionization of ions and electrons necessary for large-scale neutralization by the photon absorption of gas molecules and atoms around the charged body. It is possible to remove the static electricity in a short time and to maintain the residual constant voltage at almost 0 V and to remove the static electricity even in the atmosphere of the inert gas under the atmospheric pressure.

As is known, in the corona discharge type electrostatic eliminator, a separate blowing device is required for transferring ions, but the pivoting X-ray static eliminating device is advantageous in that it can discharge electricity even in a windless atmosphere.

In addition, since the x-ray irradiating static eliminator has high energy (wavelength is about 1.3 Å or less), oxygen molecules or atoms can be rapidly ionized, thereby causing almost no ozone generation.

1 shows an example of an X-ray tube that is connected to a high-voltage generator among irradiating x-ray ionizers manufactured and marketed by the present applicant and irradiates an open x-ray tube.

2 and 3 are respectively a front view and a rear view of the X-ray tube shown in FIG. 1 (for reference, there is a filament connected to a core wire in a cylindrical cathode serving as a focusing tube, Not shown).

1, the X-ray tube includes a glass tube 100, an X-ray radiator 200 (including a metal target such as Be, an X-ray irradiating window) coupled to one end of the glass tube, (Hereinafter referred to as a glass material) having a physical or chemical property equivalent to glass or glass or an equivalent degree bonded to the other end portion of the base 100.

The X-ray tube shown in FIG. 1 includes a cylindrical cathode 110 (also referred to as a focusing tube) positioned inside the glass tube and focusing the electrons, a power supply of about -1 k to about 200 kHz outputted from a high voltage generator (not shown) A clip part 130 made of a glass material for interconnecting a conductive wire 120 (kovar wire) to which a voltage of 60 kV is applied and a conductive wire 120 inserted into the glass tube 100, A guide spring 140 attached to the outside of the cathode 110 and the other end of which is in close contact with the inner wall of the glass tube 100 to support the cathode 110 and a getter 150 for maintaining a vacuum state inside the glass tube 100 And the inside of the X-ray tube maintains a predetermined degree of vacuum controlled by a direct vacuum evacuation method.

However, the glass tube generally used in the conventional X-ray tube manufacturing is weak against external impact, and there are some limitations in miniaturization as well as deterioration of thermal shock or thermal stability due to aging.

For this reason, research is being conducted on a method of manufacturing an X-ray tube using a ceramic tube that can replace a glass tube.

However, in the case of using a ceramic tube, a vacuum brazing process is performed in a vacuum chamber in which a predetermined degree of vacuum is maintained in order to bond the ceramic tube and the glass stem portion. In the vacuum brazing process, The degree of vacuum of the tube does not reach a predetermined value frequently, which results in a problem in that the yield of the X-ray tube is decreased, for example, the predetermined degree of internal vacuum can not be maintained.

1. Patent Application No. 10-2013-0047924, entitled "X-ray tube structure"

The present invention has been proposed in order to solve the problems of the prior art. The present invention proposes a method of controlling the internal vacuum degree of the X-ray tube made of a ceramic tube by performing a vacuum evacuation process directly in the vacuum chamber, do.

In addition, in the present invention, an X-ray tube using a ceramic tube is provided instead of a conventional X-ray tube using a glass tube to increase the hardness of the X-ray tube, The purpose is to provide.

In addition, in the present invention, a method of bonding a glass stem portion having a heterogeneous tissue characteristic to a lower end portion of a ceramic tube having an irradiation window formed at an upper end thereof is proposed.

The method of joining an X-ray tube having a ceramic material according to the present invention includes the steps of: (a) preparing a cylindrical ceramic tube; (b) a glass stem portion having a substantially flat annular structure with a hollow formed thereon, a plurality of metal wires penetrating the edge of the glass stem portion, a filament connected between the metal wires to perform a function of emitting thermoelectrons, Preparing a filament assembly comprising a cylindrical focusing tube for focusing thermoelectrons emitted from the filament, a getter bonded to the outside of the focusing tube, and a cylindrical glass tube connected to the hollow of the glass stem portion; (c) joining an annular metal flange having a hollow at an upper end of the ceramic tube and an annular metal stem having a hollow at a lower end thereof; (d) inserting the filament assembly into the ceramic tube through the hollow of the metal flange to place the glass stem portion of the filament assembly in the metal stem portion of the ceramic tube, Joining the parts; (e) bonding the metal stem portion and the glass stem portion of the filament assembly to each other by a heat treatment process; (f) forming an X-ray irradiation window by joining a stainless steel flange to which a metal target such as Be or the like is bonded on the metal flange at an upper end of the ceramic tube; (g) evacuating the inside of the ceramic tube through the cylindrical glass material tube of the filament assembly to form the interior of the ceramic tube at a predetermined degree of vacuum; (h) heating and sealing one side of the cylindrical glass material tube.

In addition to the above-described processes, the technical idea of the present invention is that the X-ray irradiating window is formed at the upper end, the metal stem portion having the hollow formed at the edge of the lower end thereof is bonded, and the filament assembly having the glass stem portion inside the metal stem portion, The inside of the ceramic tube is evacuated through a cylindrical glass material pipe passing through the center of the glass stem portion to form the inside of the ceramic tube at a predetermined degree of vacuum and then one side of the cylindrical glass material tube is heated and sealed The present invention is applied to all the methods of joining the stem portion of the X-ray tube having the ceramic material.

The method of joining the stem portion of the X-ray tube having the ceramic material proposed in the present invention has the following advantages.

1. Instead of a conventional X-ray tube that used a glass tube, it was replaced by a ceramic tube that is strong against impact and has excellent heat resistance.

2. A stem portion made of a glass having a heterogeneous property or a material equal to or higher than that of the ceramic tube can be bonded to the lower end of the ceramic tube.

3. By forming vacuum of ceramic tube by direct vacuum exhaust method under atmospheric pressure environment, it is possible to realize high quality vacuum state compared to the existing process of vacuum brazing inside vacuum chamber to form glass stem at the lower end of ceramic tube Respectively.

1 to 3 show an example of a conventional X-ray tube.
4 is a cross-sectional view of an X-ray tube having a ceramic material to be manufactured in the present invention.
5 is a sectional view of an X-ray tube having a ceramic tube produced by sealing one side of a cylindrical glass material tube.

Hereinafter, the present invention will be described in detail with reference to the drawings.

4 is a structural view of an X-ray tube having a ceramic material to be manufactured in the present invention.

As shown in the figure, in order to perform the method of joining the stem portion of the X-ray tube having the ceramic material according to the present invention, a cylindrical ceramic tube having a hollow is first prepared.

For reference, in the present invention, Al 2 O 3 A ceramic material was used, but this is merely an example and Al 2 O 3 Various types of insulating ceramics having strength and heat resistance similar to those of the ceramic tube of the present invention can be used as the ceramic tube of the present invention.

Next, a round type metal target (for example, Be, W, Ag, P, Ti, Rh or the like) is placed on a flange of an annular type stainless steel having a hollow formed thereon, brazing, and then joined to each other. Then, a stainless steel flange is placed on a hollow flange having a hollow shape, and then laser welding is performed to form a stainless steel flange and a metal flange Case Kovar flange).

In the present invention, for convenience of explanation, the ceramic and the upper structure formed by the above process will be referred to as an X-ray irradiation window. That is, the X-ray irradiation window is a component in which a metal target, a flange made of stainless steel, and a metal flange are sequentially coupled to each other on an upper part of a ceramic tube.

Next, the X-ray irradiation window is placed facing the upper end of the ceramic tube, and then the upper end of the semimic tube which contacts the outer peripheral portion of the metal flange (Kovar flange) located at the lowermost portion of the X- In addition, another metal flange is placed at the lower end of the ceramic tube and bonded together by the same metalizing process.

For convenience of explanation, in the present invention, the flange joined to the upper end of the ceramic tube is referred to as a "metal flange ", and the metal flange bonded to the lower end of the ceramic tube is referred to as a & .

Next, the filament assembly is prepared in the present invention.

The filament assembly, which is an electron beam generating mechanism described in the present invention, includes a glass material stem portion having a substantially flat annular structure formed with a hollow, a plurality of metal wires penetrating the edge of the glass material stem portion, A cylindrical collecting tube for collecting the thermoelectrons emitted from the filament, a getter joined to the outside of the focusing tube, and a cylindrical glass material tube integrally connected to the hollow of the glass material stem portion. .

Here, the metal material used as the filament of the present invention may include an alloy of W, W and Re (red), an alloy of W and ThO 2 (thorium dioxide), and the like. will be.

In addition, the material of the glass material stem part and the cylindrical glass material pipe used in the present invention may include glass beads, SiO 2 (quartz glass), UV glass, and the like.

Since the structure of the filament assembly described above is generally widely used in electrostatic removing apparatuses, a further explanation will be omitted.

Next, the filament assembly prepared above is inserted in the lower direction from the upper part of the ceramic tube, so that the outer circumferential surface of the glass material stem part of the filament assembly is seated on the inner circumferential surface of the metal stem part having the hollow, which is joined to the lower end part of the ceramic tube, The outer circumferential surface of the glass stem portion and the inner circumferential surface of the metal stem portion are bonded to each other.

Next, in order to complete the X-ray tube of the present invention, the inside of the ceramic tube must be made to have a high vacuum state, for example, of about 10 -6 to 10 -7 Torr.

For this purpose, in the present invention, a cylindrical glass material pipe located below the filament assembly is interlocked with a vacuum pump, and then a vacuum pump is operated.

When the degree of internal vacuum of the ceramic tube reaches the degree of vacuum desired by the designer, one side of the cylindrical glass tube is heated and sealed to maintain the internal vacuum degree of the ceramic tube. This is called direct vacuum evacuation.

5 is an example of a cross-sectional view of an X-ray tube having a ceramic tube produced by sealing one side of a cylindrical glass material tube.

In the present invention, when the internal vacuum degree of the ceramic tube constituting the body of the X-ray tube is controlled by the direct vacuum evacuation method as described above, the flat glass material stem portion is heated at the lower end portion of the ceramic tube in the vacuum chamber having the predetermined degree of vacuum, It is advantageous in that a relatively high vacuum state can be created because the possibility of interfering with impurities is low as compared with the method of mutually joining by the process.

More specifically, in the case of a conventional X-ray tube in which a glass tube is replaced with a ceramic tube, a plate-like non-insulating material is bonded in a vacuum chamber having a predetermined degree of vacuum to form a stem portion at the lower end of the ceramic tube . However, the conventional stem part forming method has a disadvantage in that the degree of internal vacuum of the completed X-ray tube can not have a desired degree of vacuum because of the impurities generated in the heat treatment process performed inside the vacuum chamber.

Therefore, in the present invention, instead of the step of forming the stem portion in the vacuum chamber, the above-described manufacturing process for directly evacuating the vacuum chamber through the cylindrical glass material tube under atmospheric pressure is carried out. Thus, the conventional X-ray tube including the glass tube and the glass material stem portion It is possible to maintain the same high vacuum state and maintain the reliability of the product, and also it is possible to manufacture an X-ray tube using a ceramic tube which is strong against impact and has excellent heat resistance as compared with a conventional X-ray tube made of a glass tube.

The technical idea of the method of joining the stem portion of the X-ray tube having the ceramic material according to the present invention as described above is summarized as follows.

1. According to the present invention, since the vacuum of the ceramic tube is formed by the direct vacuum exhaust method under the atmospheric pressure environment, the vacuum brazing process is performed inside the vacuum chamber in order to form the glass material stem portion at the lower end of the ceramic tube. So that it can be implemented.

2. In addition, in the present invention, in place of a conventional X-ray tube using a glass tube, a ceramic tube having a strong impact resistance and excellent heat resistance can be joined to a lower end of a ceramic tube with a glass material stem having a heterogeneous property .

Claims (5)

A method of joining a stem portion of an X-ray tube having a ceramic material,
(a) preparing a cylindrical ceramic tube;
(b) a glass material stem part having a substantially flat annular structure with a hollow formed thereon, a plurality of metal wires penetrating the edge of the glass material stem part, and a plurality of filaments connected between the metal wires, Preparing a filament assembly comprising a cylindrical focusing tube for focusing thermoelectrons emitted from the filament, a getter joined to the outside of the focusing tube, and a cylindrical glass material tube connected to the hollow of the glass material stem portion ;
(c) joining an annular metal flange having a hollow at an upper end of the ceramic tube and an annular metal stem having a hollow at a lower end thereof;
(d) inserting the filament assembly into the ceramic tube through the hollow of the metal flange to place the glass stem part of the filament assembly in the metal stem part of the ceramic tube, Joining the metal stem portion;
(e) bonding the metal stem portion and the glass material stem portion of the filament assembly to each other by a heat treatment process;
(f) forming an X-ray irradiation window by joining a stainless steel flange having a metal target bonded to the metal flange at an upper end of the ceramic tube;
(g) evacuating the inside of the ceramic tube through the cylindrical glass material tube of the filament assembly to form the interior of the ceramic tube at a predetermined degree of vacuum;
(h) heating and sealing one side of the tube of cylindrical glass material. The method according to claim 1,
Wherein the metal target can be any one of Be, W, Ag, P, Ti, and Rh. The method according to claim 1,
Wherein the filament is a metal material used as a filament is any one of W, W and Re (red) alloys, and W and ThO 2 (thorium dioxide) alloys. Way. The method according to claim 1,
Wherein the glass material stem portion can be made of any one of a glass bead glass, SiO 2 (quartz glass), and UV glass. A method of joining a stem portion of an X-ray tube having a ceramic material,
A metal stem portion having a hollow formed at an edge of a lower end portion thereof is joined to an upper portion of the glass stem portion, and a filament assembly having a glass material stem portion is disposed inside the metal stem portion, Ray tube having a ceramic material for evacuating the inside of the ceramic tube through a cylindrical glass material pipe passing through the center to form a predetermined degree of vacuum inside the ceramic tube and then heating and sealing one side of the cylindrical glass material tube, Bonding method.
KR1020150105534A 2015-07-27 2015-07-27 Method for welding the stem onto the ceramic X-ray tube KR101737399B1 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020009753A (en) * 2018-07-06 2020-01-16 モックステック・インコーポレーテッド Liquid crystal polymer for mounting x-ray windows
CN111816532A (en) * 2020-07-17 2020-10-23 核工业西南物理研究院 Replaceable filament assembly for hot cathode arc discharge ion source
KR20230068622A (en) * 2021-11-11 2023-05-18 경북대학교 산학협력단 Jig for glass tube of X-ray tube

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130047924A (en) 2011-11-01 2013-05-09 주식회사신도리코 Image forming apparatus with coating function and control method thereof

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8833105B2 (en) * 2012-05-18 2014-09-16 Guardian Industries Corp. Method and apparatus for making vacuum insulated glass (VIG) window unit including pump-out tube sealing technique
KR101439208B1 (en) * 2013-04-30 2014-09-12 (주)선재하이테크 X-ray tube structure

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130047924A (en) 2011-11-01 2013-05-09 주식회사신도리코 Image forming apparatus with coating function and control method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020009753A (en) * 2018-07-06 2020-01-16 モックステック・インコーポレーテッド Liquid crystal polymer for mounting x-ray windows
CN111816532A (en) * 2020-07-17 2020-10-23 核工业西南物理研究院 Replaceable filament assembly for hot cathode arc discharge ion source
KR20230068622A (en) * 2021-11-11 2023-05-18 경북대학교 산학협력단 Jig for glass tube of X-ray tube

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