CN106662509A - 化学物质浓缩器以及化学物质检测装置 - Google Patents

化学物质浓缩器以及化学物质检测装置 Download PDF

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CN106662509A
CN106662509A CN201580043099.6A CN201580043099A CN106662509A CN 106662509 A CN106662509 A CN 106662509A CN 201580043099 A CN201580043099 A CN 201580043099A CN 106662509 A CN106662509 A CN 106662509A
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chemical substance
adsorbent
inspissator
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中尾厚夫
冈弘章
柳田刚
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Panasonic Intellectual Property Management Co Ltd
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Abstract

本发明的化学物质浓缩器对气体试样中的化学物质进行浓缩。该化学物质浓缩器具备：流路，其中流动气体试样；导电性的吸附剂，设置在流路内，并对化学物质进行吸附；以及一对电极，用于在吸附剂中流动电流。

Description

化学物质浓缩器以及化学物质检测装置
技术领域
本发明涉及对气体中的化学物质进行分析、检测的技术。
背景技术
关于分析气体中的化学物质的技术，例如，专利文献1公开了对电力设备内部气体中的有机物质进行分析的装置。在该装置中，一边保持收集器的温度恒定，一边使气体通过配管，从而使气体中的有机物质吸附于吸附剂，然后对收集器进行加热，将吸附的有机物质导入到检测器。此外，专利文献2公开了极微量的分析物的检测装置，该检测装置使用了具有吸附分析物的能力和使浓缩的分析物吸附/脱离的能力的吸附剂物质。
在先技术文献
专利文献
专利文献1：日本特开2001-296218号公报
专利文献2：日本特表2002-518668号公报
发明内容
化学物质浓缩器对气体试样中的化学物质进行浓缩。该化学物质浓缩器具备流动气体试样的流路、设置在流路内并对化学物质进行吸附的导电性的吸附剂、以及用于在吸附剂中流动电流的一对电极。
该化学物质浓缩器能够以低功耗使吸附的化学物质脱离。
附图说明
图1是实施方式涉及的化学物质浓缩器的概略结构图。
图2是包括实施方式涉及的化学物质浓缩器的检测装置的结构图。
图3A是示出实施方式涉及的化学物质浓缩器的流路中的导电性吸附剂的配置的图。
图3B是示出实施方式涉及的化学物质浓缩器的流路中的导电性吸附剂的另一种配置的图。
图3C是示出实施方式涉及的化学物质浓缩器的流路中的导电性吸附剂的又一种配置的图。
具体实施方式
图1是实施方式涉及的检测装置100的化学物质浓缩器1的概略结构图。化学物质浓缩器(以下，称为浓缩器)1使流入的气体试样中的化学物质吸附于吸附剂12并进行浓缩，然后通过加热使其从吸附剂脱离，并送出到后级的检测器2。作为化学物质，例如有酮类、胺类、醇类、芳香烃类、醛类、酯类、有机酸、硫化氢、甲硫醇、二硫化物等挥发性有机化合物。
浓缩器1具备流过气体试样的流路11、设置在流路11内的导电性的吸附剂12、用于使电流在吸附剂12中流动的一对电极13a、13b、以及对在流路11内流动的气体试样进行冷却的冷却部14。电流供给部15对一对电极13a、13b供给电流I。控制部16对冷却部14和电流供给部15的动作进行控制。吸附剂12构成为吸附气体试样的化学物质。
本实施方式涉及的浓缩器1将连接在对置的电极13a、13b之间的导电性的纳米线12a用作化学物质的吸附剂12。即，在由冷却部14进行的冷却处理的过程中，气体试样中的化学物质吸附于纳米线12a的表面，并被浓缩捕获。此后，电流供给部15经由电极13a、13b使纳米线12a中流动微小电流I，从而纳米线12a由于焦耳效应而发热(自加热)。由于纳米线12a的自加热造成的温度上升，吸附在纳米线12a的表面的化学物质脱离，并导入到后级的检测器2。即，导电性的纳米线12a还兼具对化学物质进行加热的作为加热部的作用。
通过这样的结构和动作，浓缩器1能够在不使用功耗大的外部加热器的情况下以低功耗将浓缩的化学物质送出到检测器2。
根据专利文献1、2公开的以往的结构，在将吸附的化学物质导入到检测器时，需要使用像外部加热器那样的加热单元。在不使用加热单元而使化学物质脱离的情况下，脱离将不充分。因此，检测装置的功耗增大。例如，在现有技术中使用的加热器的情况下，需要几十～几百mW程度的功率。此外，在MEMS(Micro Electro Mechanical Systems：微机电系统)技术中，例如在使用Pt线电阻加热器的情况下，需要几mW以上的功耗。
像这样，在现有技术中使用的加热器的情况下，需要几十～几百mW程度的功率，相对于此，在本实施方式中，能够以10μW程度以下的功率使化学物质脱离。此外，不需要外部加热器，因此能够使包括浓缩器的检测装置100小型化。
在此，在导电体中流动电流I时，由导电体的电阻R产生的热量Q如下(焦耳效应)。
Q＝R·|2·t
此外，热量Q与温度变化ΔT的关系可使用热容量C表示如下，热容量C为导电体的比热与质量之积。
Q＝C·ΔT
热容量C取决于导电体的质量(体积)。因此，像纳米线12a那样体积非常小的物质的热容量C非常小，因此即使流过电流时产生的热量Q例如为一点点，也会产生大的温度变化ΔT。
在本实施方式中作为吸附剂12使用纳米线12a的理由在于，纳米线12a的比表面积大且可得到高的浓缩(吸附)效率，除此之外，热容量C非常小，因此以低功耗即可产生大的温度变化。作为比表面积大的其它材料，例如有多孔体，但是与纳米线12a相比体积大，因此，因为由焦耳效应造成的自加热而消耗的功率大于纳米线12a。但是，本实施方式中的导电性的吸附剂12不限于纳米线12a，也可以使用多孔体等其它构造体。
作为纳米线12a、多孔体等导电性的吸附剂12，例如使用SnO2、ZnO、In2O3、In2-xSnxO3(例如，0.1≤x≤0.2)、NiO、CuO、TiO2、SiO2等金属氧化物；Al、Ag、Au、Pd、Pt等金属；碳或硅等导电材料即可。作为由碳构成的纳米线，例如可以使用碳纳米管。即，作为吸附剂的材料，只要是具有导电性且具有可有效地产生由焦耳效应造成的自加热的程度的电阻值的材料即可。
在本实施方式中，对置的电极13a、13b例如使用金、铂、银、铜、铝等金属；氧化铟锡(ITO)、Al掺杂氧化锌(AZO)等导电性氧化物；导电性高分子等即可。此外，电极13a、13b的表面可以为凹凸形状。即，电极13a、13b具有与纳米线12a、多孔体的表面的凹凸相应的形状。此外，吸附材料12的一部分也可以埋设在电极13a、13b。例如，纳米线12a的端部也可以埋设在电极13a、13b。多孔体的一部分也可以埋设在电极13a、13b。由此，化学物质浓缩器1能够实现吸附材料12与电极13a或电极13b的稳定的电连接。
图2是包括实施方式涉及的浓缩器1的化学物质检测装置100的示意图。在图2的结构中，例如在硅基板、玻璃环氧树脂基板、陶瓷基板等基板17的面17a上设置有例如由聚二甲基硅氧烷(PDMS)、环氧树脂、聚1，1-二氯乙烯树脂、玻璃等形成的框体18。而且，在框体18作为流过气体试样的微流路而形成有流路11a、11b、11c。流路11a、11b、11c从流入气体试样的浓缩器1经检测器2形成。另外，虽然在图2中形成有3个流路11a、11b、11c，但是流路的个数不限于此。
在浓缩器1中，在每个流路11a、11b、11c的上下配置有一对电极13a、13b。而且，在电极13a、13b之间设置有纳米线12a。此外，在基板17的面17a的相反一侧的面17b面设置有例如珀尔帖元件等冷却元件14a。冷却元件14a作为对流过流路11a、11b、11c的气体试样进行冷却的冷却部14发挥功能。此外，在检测器2中，在流路11a、11b、11c例如呈阵列状地设置有用于检测特定的化学物质的传感器21。另外，在图2中，对于用于使电流在电极13a、13b中流动的布线、对传感器21提供电力的布线、以及用于输出传感器21的检测信号的布线，省略图示。
通过像图2那样的结构，能够通过浓缩器1从在流路11a、11b、11c中流动的气体试样对化学物质进行吸附并进行浓缩，并能够通过检测器2对浓缩的化学物质进行检测。即，在由冷却元件14a进行的冷却处理的过程中，气体试样中的化学物质吸附于纳米线12a的表面，并被浓缩捕获。此后，经由电极13a、13b使电流在纳米线12a中流动，从而纳米线12a进行自加热。由于该自加热造成的温度上升，吸附在纳米线12a的表面的化学物质脱离，并导入到检测器2，从而被传感器21检测到。
另外，虽然在图2的构成例中电极13a、13b配置在每个流路11a、11b、11c的上下，但是电极13a、13b的位置不限于此，只要能够使电流在纳米线12a中流动，就可以设置在任意位置。
此外，虽然在图2的构成例中冷却元件14a配置在基板17的面17b，但是冷却元件14a的位置不限于此，只要能够对气体试样进行冷却，就可以设置在任意位置。例如，冷却元件14a也可以设置在框体18或电极13a、13b上。在冷却元件14a设置在电极13a或电极13b上的情况下，也可以在冷却元件14a与电极13a、13b之间设置绝缘体。
图3A至图3C示出纳米线12a等导电性的吸附剂12的配置。在图3A中，吸附剂12包括彼此分开配置的多个组31A～31C，像图2的构成例那样，组31A、31B、31C分别配置在流路11a、11b、11c。在图3B中，吸附剂12包括彼此分开配置的多个组32A～31D，在流路11中，组32A、32B、32C、32D排列配置在与气体试样流过的方向垂直的方向上。在图3C中，吸附剂12包括彼此分开配置的多个组33A～33D，在流路11中，组33A、33B、33C、33D沿着气体试样流动的方向排列配置。
如图2以及图3A至图3C所示，导电性吸附剂12(纳米线12a)包括彼此分开配置的多个组。在该情况下，可以使导电性的吸附剂12的材料、其表面的修饰方式(涂覆)互不相同。由此，能够选择性地对气体分子进行吸附、浓缩。例如，因为气体分子容易吸附到与该分子极性相同的表面，所以当作为导电性吸附剂准备具有表面的极性不同的表面的多个纳米线12a(吸附剂12)时，极性分子比无极性分子更容易吸附到表面具有高极性的导电性吸附剂12，无极性分子比有极性分子更容易吸附到表面为无极性的导电性吸附剂。即，导电性的吸附剂12的多个组优选包括材料互不相同的组。或者，吸附剂12的多个组优选包括表面的修饰方式互不相同的组。
此外，在导电性吸附剂12分为多个组的情况下，对导电性吸附剂12供给电流的电流供给部15优选构成为能够对设置在各组的多对电极选择性地供给电流。由此，能够按导电性吸附剂12的每一组对使吸附在导电性吸附剂12的各组的化学物质脱离的定时进行控制。例如，能够将吸附在导电性吸附剂12的各组的化学物质按给定的顺序送到后级的检测器，因此在能够确定吸附在导电性吸附剂12的各组的化学物质的情况下，作为后级的检测器并不需要精密的分析装置。因此，能够进一步实现检测装置100的小型化。
此外，在本实施方式的检测装置100中，从电流供给部15向导电性吸附剂12流动电流，因此能够监测导电性吸附剂12的电阻。另一方面，导电性吸附剂12的电阻会由于吸附化学物质而变化。例如，在导电性吸附剂12由金属氧化物形成的情况下，存在于其表面的氧的量会根据化学物质的吸附而变化，由此电阻变化。或者，在导电性吸附剂12由硅形成的情况下，如果吸附的分子具有极性，则电阻也会根据分子的吸附量而变化。因此，如图1所示，本实施方式涉及的浓缩器1也可以具备吸附量推定部115，吸附量推定部115基于导电性吸附剂12的电阻值的变化来推定吸附于导电性吸附剂12的化学物质的量。
吸附量推定部115预先存储有化学物质的吸附量与作为吸附剂12的纳米线12a的电阻的变化的关系。吸附量推定部115根据流过吸附剂12的电流量检测出吸附剂12的电阻值的变化，并基于该变化参照预先存储的化学物质的吸附量与电阻的变化的关系，推定吸附于吸附剂12的化学物质的量。通过设置这样的吸附量推定部115，从而例如控制部16能够更准确地控制使吸附的化学物质脱离的定时。
如上所述，化学物质浓缩器1构成为对气体试样中的化学物质进行浓缩。化学物质浓缩器1具备流过气体试样的流路11(11a、11b、11c)、设置在流路11(11a、11b、11c)内并对化学物质进行吸附的导电性的吸附剂12、用于使吸附剂12流过电流的一对电极13a、13b、以及对在流路11(11a、11b、11c)内流动的气体试样进行冷却的冷却部14。
根据该方式，在气体试样流动的流路11内设置有对化学物质进行吸附的导电性的吸附剂12。而且，设置有用于使电流在吸附剂12中流动的一对电极13a、13b。在由冷却部14进行的冷却处理的过程中，气体试样中的化学物质吸附于吸附剂12的表面，并被浓缩捕获。此后，经由电极13a、13b使电流在吸附剂12中流动，从而吸附剂12由于焦耳效应而发热，由于该发热造成的温度上升，吸附在吸附剂12的表面的化学物质脱离。由此，化学物质浓缩器1能够在不使用功耗大的外部加热器的情况下以低功耗将被浓缩的化学物质送出到检测器2。此外，因为不需要外部加热器，所以能够使检测装置100小型化。
另外，在不对气体试样进行冷却也可在吸附材料12吸附充分的量的化学物质的情况下，化学物质浓缩器1也可以不具备冷却部14。
吸附剂12可以是纳米线12a。
由此，纳米线12a能够以低功耗产生大的温度变化，因此能够进一步降低化学物质浓缩器1的功耗。
吸附剂12可以是多孔体。
吸附剂12可以由金属氧化物、金属、碳或硅中的任一种形成。
吸附剂12可以包括彼此分开配置的多个组31A～31C。
吸附剂12的多个组31A～31C可以包括材料或表面的修饰方式互不相同的组。
通过这些方式，能够通过吸附剂12的多个组31A～31C对种类不同的化学物质选择性地进行浓缩。
化学物质浓缩器1还可以具备电流供给部15，电流供给部15构成为能够对一对电极13a、13b供给电流。一对电极13a、13b对吸附剂12的多个组31A～31C分别设置，包括多对电极13a、13b。电流供给部15构成为能够对多对电极13a、13b选择性地供给电流。
通过该方式，能够选择性地使吸附、浓缩的化学物质从吸附剂12脱离。
化学物质浓缩器1还可以具备基板17和框体18，基板17具有面17a和面17a的相反一侧的面17b，框体18设置在基板17的面17a上，并设置有流路11(11a、11b、11c)。冷却部14是设置在基板17的面17b上的冷却元件14a。
吸附量推定部115根据在吸附剂12中流动的电流量检测出吸附剂12的电阻值的变化，并基于变化推定吸附于吸附剂12的化学物质的量。
通过该方式，能够更准确地控制使吸附、浓缩的化学物质脱离的定时。
检测装置100具备化学物质浓缩器1和导入被化学物质浓缩器1浓缩的化学物质的检测器2。检测器2例如具有半导体式传感器、电化学式传感器、弹性波传感器、场效应晶体管型传感器等检测元件。另外，检测元件不限于此。检测器2能够使用最适合对在化学物质浓缩器1中浓缩的化学物质进行检测的检测元件。
由此，可实现功耗小且小型的化学物质检测装置100(100A)。
产业上的可利用性
本发明涉及的化学物质浓缩器能够通过功耗低且小型的检测装置检测气体试样中的化学物质，因此，例如对于能够检测身边的挥发性有机化合物的超小型化学传感器是有用的。
附图标记说明
1：化学物质浓缩器；
2：检测器；
11、11a、11b、11c：流路；
12：吸附剂；
12a：纳米线；
13a、13b：电极；
14：冷却部；
14a：冷却元件；
15：电流供给部；
16：控制部；
17：基板；
18：框体；
31A～31C、32A～32D、33A～33D：吸附剂的组；
100：检测装置；
115：吸附量推定部。

Claims (11)

1.一种化学物质浓缩器，对气体试样中的化学物质进行浓缩，所述化学物质浓缩器具备：
流路，其中流动所述气体试样；
导电性的吸附剂，其被设置在所述流路内，并对所述化学物质进行吸附；以及
一对电极，其用于在所述吸附剂中流动电流。
2.根据权利要求1所述的化学物质浓缩器，其中，
所述吸附剂是纳米线。
3.根据权利要求1所述的化学物质浓缩器，其中，
所述吸附剂是多孔体。
4.根据权利要求1至3中的任一项所述的化学物质浓缩器，其中，
所述吸附剂由金属氧化物、金属、碳或硅中的任一种形成。
5.根据权利要求1所述的化学物质浓缩器，其中，
所述吸附剂包括彼此分开配置的多个组。
6.根据权利要求5所述的化学物质浓缩器，其中，
所述吸附剂的所述多个组包括材料或表面的修饰方式互不相同的组。
7.根据权利要求5或6所述的化学物质浓缩器，其中，
该化学物质浓缩器还具备电流供给部，该电流供给部构成为能够对所述一对电极供给电流，
所述一对电极针对所述吸附剂的所述多个组分别设置并包括多对电极，
所述电流供给部构成为能够对所述多对电极选择性地供给所述电流。
8.根据权利要求1至7中的任一项所述的化学物质浓缩器，其中，
所述化学物质浓缩器还具备冷却部，该冷却部对在所述流路内流动的所述气体试样进行冷却。
9.根据权利要求8所述的化学物质浓缩器，其中，
所述化学物质浓缩器还具备：
基板，其具有第一面和所述第一面的相反一侧的第二面；以及
框体，其设置在所述基板的所述第一面上，并设置有所述流路，
所述冷却部是设置在所述基板的所述第二面上的冷却元件。
10.根据权利要求1所述的化学物质浓缩器，其中，
所述化学物质浓缩器还具备吸附量推定部，该吸附量推定部根据在所述吸附剂中流动的电流量而检测出所述吸附剂的电阻值的变化，基于所述变化推定被所述吸附剂吸附的所述化学物质的量。
11.一种化学物质检测装置，具备：
权利要求1所述的化学物质浓缩器；以及
检测器，其导入由所述化学物质浓缩器浓缩的所述化学物质。
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