CN106653791A - 显示面板及其制造方法 - Google Patents
显示面板及其制造方法 Download PDFInfo
- Publication number
- CN106653791A CN106653791A CN201510734445.7A CN201510734445A CN106653791A CN 106653791 A CN106653791 A CN 106653791A CN 201510734445 A CN201510734445 A CN 201510734445A CN 106653791 A CN106653791 A CN 106653791A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 40
- 238000000034 method Methods 0.000 claims description 27
- 238000002161 passivation Methods 0.000 claims description 17
- 239000012212 insulator Substances 0.000 claims description 16
- 239000010409 thin film Substances 0.000 claims description 14
- 238000005530 etching Methods 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 230000004888 barrier function Effects 0.000 claims description 6
- 230000000903 blocking effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 113
- 208000034699 Vitreous floaters Diseases 0.000 description 33
- 229910001111 Fine metal Inorganic materials 0.000 description 11
- 239000010408 film Substances 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 230000027756 respiratory electron transport chain Effects 0.000 description 7
- 230000008859 change Effects 0.000 description 5
- 239000003086 colorant Substances 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 239000004411 aluminium Substances 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 239000012780 transparent material Substances 0.000 description 4
- 229910015844 BCl3 Inorganic materials 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000002346 layers by function Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005842 biochemical reaction Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
- G09G3/30—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
- G09G3/32—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
- G09G3/3208—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Theoretical Computer Science (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
Claims (16)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510734445.7A CN106653791B (zh) | 2015-11-03 | 2015-11-03 | 显示面板及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510734445.7A CN106653791B (zh) | 2015-11-03 | 2015-11-03 | 显示面板及其制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106653791A true CN106653791A (zh) | 2017-05-10 |
CN106653791B CN106653791B (zh) | 2020-02-21 |
Family
ID=58809963
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201510734445.7A Active CN106653791B (zh) | 2015-11-03 | 2015-11-03 | 显示面板及其制造方法 |
Country Status (1)
Country | Link |
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CN (1) | CN106653791B (zh) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107564945A (zh) * | 2017-08-30 | 2018-01-09 | 上海天马微电子有限公司 | 透明显示面板、透明显示装置及透明显示面板的制作方法 |
CN108206244A (zh) * | 2017-12-28 | 2018-06-26 | 信利(惠州)智能显示有限公司 | 有机发光显示装置及其制备方法 |
CN108877521A (zh) * | 2018-06-28 | 2018-11-23 | 京东方科技集团股份有限公司 | 信息显示器和信息显示装置 |
CN108987480A (zh) * | 2017-06-02 | 2018-12-11 | 上海和辉光电有限公司 | 双栅薄膜晶体管及其制备方法、显示面板及其制备方法 |
CN109728184A (zh) * | 2017-10-27 | 2019-05-07 | 株式会社日本有机雷特显示器 | 电子器件和电子器件的制造方法 |
WO2021012399A1 (zh) * | 2019-07-25 | 2021-01-28 | 武汉华星光电半导体显示技术有限公司 | 显示面板、显示装置及其制作方法 |
WO2021233220A1 (zh) * | 2020-05-21 | 2021-11-25 | 京东方科技集团股份有限公司 | 一种显示基板和显示装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101930994A (zh) * | 2010-08-12 | 2010-12-29 | 友达光电股份有限公司 | 有机发光装置的像素结构 |
CN102130148A (zh) * | 2009-12-21 | 2011-07-20 | 三星移动显示器株式会社 | 有机发光二极管显示器 |
US20150015834A1 (en) * | 2011-04-25 | 2015-01-15 | Samsung Display Co., Ltd. | Display apparatus and method of operating the same |
CN104362169A (zh) * | 2014-11-26 | 2015-02-18 | 京东方科技集团股份有限公司 | 一种有机发光二极管阵列基板及其制备方法、显示装置 |
CN204651324U (zh) * | 2015-06-12 | 2015-09-16 | 昆山国显光电有限公司 | 有机发光二极管显示器 |
-
2015
- 2015-11-03 CN CN201510734445.7A patent/CN106653791B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102130148A (zh) * | 2009-12-21 | 2011-07-20 | 三星移动显示器株式会社 | 有机发光二极管显示器 |
CN101930994A (zh) * | 2010-08-12 | 2010-12-29 | 友达光电股份有限公司 | 有机发光装置的像素结构 |
US20150015834A1 (en) * | 2011-04-25 | 2015-01-15 | Samsung Display Co., Ltd. | Display apparatus and method of operating the same |
CN104362169A (zh) * | 2014-11-26 | 2015-02-18 | 京东方科技集团股份有限公司 | 一种有机发光二极管阵列基板及其制备方法、显示装置 |
CN204651324U (zh) * | 2015-06-12 | 2015-09-16 | 昆山国显光电有限公司 | 有机发光二极管显示器 |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108987480A (zh) * | 2017-06-02 | 2018-12-11 | 上海和辉光电有限公司 | 双栅薄膜晶体管及其制备方法、显示面板及其制备方法 |
CN108987480B (zh) * | 2017-06-02 | 2021-11-16 | 上海和辉光电股份有限公司 | 双栅薄膜晶体管及其制备方法、显示面板及其制备方法 |
CN107564945A (zh) * | 2017-08-30 | 2018-01-09 | 上海天马微电子有限公司 | 透明显示面板、透明显示装置及透明显示面板的制作方法 |
CN109728184A (zh) * | 2017-10-27 | 2019-05-07 | 株式会社日本有机雷特显示器 | 电子器件和电子器件的制造方法 |
CN109728184B (zh) * | 2017-10-27 | 2022-01-14 | 株式会社日本有机雷特显示器 | 电子器件和电子器件的制造方法 |
CN108206244A (zh) * | 2017-12-28 | 2018-06-26 | 信利(惠州)智能显示有限公司 | 有机发光显示装置及其制备方法 |
CN108877521A (zh) * | 2018-06-28 | 2018-11-23 | 京东方科技集团股份有限公司 | 信息显示器和信息显示装置 |
US10861921B2 (en) | 2018-06-28 | 2020-12-08 | Chengdu Boe Optoelectronics Technology Co., Ltd | Display panel, display device, and manufacturing method of display panel |
WO2021012399A1 (zh) * | 2019-07-25 | 2021-01-28 | 武汉华星光电半导体显示技术有限公司 | 显示面板、显示装置及其制作方法 |
WO2021233220A1 (zh) * | 2020-05-21 | 2021-11-25 | 京东方科技集团股份有限公司 | 一种显示基板和显示装置 |
Also Published As
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CN106653791B (zh) | 2020-02-21 |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: 201500, building two, building 100, 1, Jinshan Industrial Road, 208, Shanghai, Jinshan District Patentee after: Shanghai Hehui optoelectronic Co., Ltd Address before: 201500, building two, building 100, 1, Jinshan Industrial Road, 208, Shanghai, Jinshan District Patentee before: EverDisplay Optronics (Shanghai) Ltd. |
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CP01 | Change in the name or title of a patent holder | ||
CP02 | Change in the address of a patent holder |
Address after: 201506, No. nine, No. 1568, Jinshan Industrial Zone, Shanghai, Jinshan District Patentee after: Shanghai Hehui optoelectronic Co., Ltd Address before: 201500, building two, building 100, 1, Jinshan Industrial Road, 208, Shanghai, Jinshan District Patentee before: Shanghai Hehui optoelectronic Co., Ltd |
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CP02 | Change in the address of a patent holder |