CN106645954A - Heating plate impedance measuring tool and heating plate impedance measuring method - Google Patents
Heating plate impedance measuring tool and heating plate impedance measuring method Download PDFInfo
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- CN106645954A CN106645954A CN201510736030.3A CN201510736030A CN106645954A CN 106645954 A CN106645954 A CN 106645954A CN 201510736030 A CN201510736030 A CN 201510736030A CN 106645954 A CN106645954 A CN 106645954A
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- heating dish
- heating plate
- electrode
- cavity
- battery lead
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
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- General Physics & Mathematics (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
A heating plate impedance measuring tool and a heating plate impedance measuring method mainly settle technical problems of large measurement data error and overweak signals in an existing measuring method. The heating plate impedance measuring tool comprises an insulating assembly and an electrode assembly. The insulating assembly comprises an insulating block A, an insulating block B and a spring. The electrode assembly comprises an N connector socket positioning base, fixing screws, a connecting board, an insulating board, an electrode board A, an insulating base A, an insulating base B, an electrode board B, insulating sleeves and a spring. The N connector socket positioning base is connected with a network analyzer. The network analyzer outputs a quick frequency sweeping low-power electric signal through a port. The signal arrives at a heating plate through transmission of an RF cable and generates a reflected electric signal. The impedance ZL of the heating plate can be obtained through measuring a complex reflection coefficient. The heating plate impedance measuring tool and the heating plate impedance measuring method have advantages of reasonable structure, convenient operation method, reliable measurement result, and effective stability improvement in heating plate impedance measurement. The heating plate impedance measuring tool and the heating plate impedance measuring method can be widely used in the technical field of semiconductor film plating equipment.
Description
Technical field
The present invention relates to a kind of heating dish impedance measurement frock and measuring method, specifically a kind of to adopt
Battery lead plate is connected respectively with heating dish, cavity, and with collets heating dish and cavity are separated, and is easy to measurement to add
Hot plate is arranged on the tool structure and measuring method of cavity middle impedance.Belong to the survey of semiconductor equipment RF impedance
Amount applied technical field.
Background technology
With the increase of electronic product demand, semiconductor equipment is driven to develop rapidly, heating dish is extensively should
For the critical component in silicon chip deposition reaction chamber in semiconductor equipment.The impedance of heating dish directly affects silicon
The distribution situation of piece deposition process each ion field, so as to affect silicon chip film-coated quality.Currently for plus
The measurement of hot plate impedance is measured using Network Analyzer, but Network Analyzer connects with heating dish and cavity
The area for connecing is too small, and the rapid frequency-sweeping low-power electric signal of port output becomes in the transmission fainter,
Measurement signal is faint, it is impossible to measure the exact value of heating dish impedance.
The content of the invention
The present invention mainly solves existing measuring method error of measured data greatly for the purpose of solving the above problems,
A kind of excessively weak technical problem of signal, there is provided measurement frock of heating dish impedance, increases Network Analyzer defeated
Go out signal and heating dish and the contact area of cavity, strengthen measurement signal, improve heating dish impedance measurement
Accuracy and stability.
To achieve these goals, the present invention adopts following technical proposals：Heating dish impedance measurement frock,
It is main to be made up of (4) two parts of insulation assembly (3) and electrode assemblie.Insulation assembly (3) bag
Include collets A (16), collets B (17) and spring (18), collets A (16) and B (17)
Centre is installed spring (18) and forms compressible pretightning force, during antagonism heating dish (2) impedance measurement
From the power of electrode assemblie (4), it is ensured that heating dish uniform force, position centering.
The electrode assemblie (4) includes N connector body positioning pedestals (5), fixing screws (6), spiral shell
Female (7), pad (8), connecting plate (9), insulation board (10), battery lead plate A (11), insulating base A (12),
Insulating base B (13), battery lead plate B (14), insulation sleeve (15) and spring (18).
The N connector bodies positioning pedestal (5) is by fixing screws (6), nut (7), pad (8)
It is fixedly attached on battery lead plate B (14), is connected to form first electrode with cavity (1)；Battery lead plate A (11)
Contact to form second electrode by arc surface with heating dish (2)；Insulating base A (12) and insulating base B (13)
By first, second electrode separation, it is ensured that two electric electrode insulations, while insulating base A (12) and insulating base B
(13) it is internal that spring (18) is installed, first, second two electrodes can be extruded, it is respectively contacted
Cavity (1) and heating dish (2), increase rf signal transmission area, improve the stability of signal transmission.
Using the heating dish impedance measurement method of above-mentioned frock, the method be by measure reflectance factor come
Single port to heating dish impedance is tested, and Network Analyzer exports the low-power electricity of rapid frequency-sweeping by port
Signal, the signal is transferred to up to heating dish by radio-frequency cable, and produces reflection electric signal.Radio frequency is believed
Number the impedance of reflectivity and heating dish have relationship below
Wherein, R is complex reflection coefficient, Z0It is the impedance of transmission line, ZLIt is the impedance of load.It is determined that making
During with the transmission line that characteristic impedance is 50 Ω, it may be determined that Z0=50 Ω, thus, by measuring interflection system
Number is obtained the impedance Z of heating dishL。
Network Analyzer is connected in N connector body positioning pedestals, and the transmission path of signal is by connection
Plate, battery lead plate B, arrival cavity, transmit a signal to heating dish in inside cavity connection member, wait
The signal of heating dish complex reflection coefficient.
Further, heating dish is completely insulated with the other end of Network Analyzer, and electric signal is via battery lead plate B
Afterwards, insulation board and insulation sleeve stop respectively the incoming battery lead plate A of electric signal, while insulating base A, B effectively will
Battery lead plate A, B are separated, and cause battery lead plate A with heating dish and battery lead plate B using internal spring assembly
Combine closely with cavity, increase the stability of signal transmission area and transmission.
Further, there is position in the presence of electrode assemblie contained spring between heating dish and cavity to offset,
Insulation assembly is put between the heating dish and cavity of the same rectilinear direction of electrode assemblie, inside insulation assembly
The power of confronting electrode component is formed balance by spring force, it is ensured that heating dish and the position centering of cavity, is carried
The accuracy of high impedance measurement result.
Beneficial effects of the present invention and feature are：Heating dish impedance measurement tool structure is reasonable, operation side
Method is easy.The electric signal transmission area of cavity and heating dish and impedance measurement frock can be increased, increase electricity
The intensity of signal, makes measurement result relatively reliable.Spring inside its electrode assemblie and insulation assembly, protects
In the case that card is in heating dish and cavity position pair, the contact at signal transmission is even closer, effectively carries
The stability of high heating dish impedance measurement.Can be widely applied to semiconductor coated film equipment technical field.
Description of the drawings
Fig. 1 is heating dish impedance measurement frock measuring method schematic diagram.
Fig. 2 is heating dish impedance measurement frock insulation assembly schematic internal view.
Fig. 3 is heating dish impedance measurement frock motor component structure schematic diagram.
Fig. 4 is heating dish impedance measurement frock insulation assembly structural representation.
Fig. 5 is heating dish impedance measurement frock electric machine assembly schematic internal view.
In figure：1st, cavity；2nd, heating dish；3rd, insulation assembly；4th, electrode assemblie；5th, N connectors
Socket positioning pedestal；6th, fixing screws；7th, nut；8th, pad；9th, connecting plate；10th, insulation board；
11st, battery lead plate A；12nd, insulating base A；13rd, insulating base B；14th, battery lead plate B；15th, insulation sleeve；
16th, collets A；17th, collets B；18th, spring.
The present invention is described in further detail below in conjunction with the accompanying drawings：
Specific embodiment
Embodiment
Referring to the drawings 1-5, heating dish impedance measurement frock, mainly by 4 liang of insulation assembly 3 and electrode assemblie
Individual part composition.
The insulation assembly 3, including collets A16, collets B17 and spring 18, collets A16 with
Spring 18 is installed in the middle of B17 and forms compressible pretightning force, come during the antagonism impedance measurement of heating dish 2
The power of self-electrode component 4, it is ensured that heating dish uniform force, position centering.
The electrode assemblie 4, including N connector bodies positioning pedestal 5, fixing screws 6, nut 7,
Pad 8, connecting plate 9, insulation board 10, battery lead plate A11, insulating base A12, insulating base B13, electrode
Plate B14, insulation sleeve 15 and spring 18.
The N connector bodies positioning pedestal 5 is fixedly connected by fixing screws 6, nut 7, pad 8
To on battery lead plate B14, it is connected to form first electrode with cavity 1；Battery lead plate A11 is relied on heating dish 2
Arc surface contacts to form second electrode；Insulating base A12 and insulating base B13 by first, second electrode separation,
Ensure two electric electrode insulations, while spring 18 is installed inside insulating base A12 and insulating base B13, can
Make first, second two electrode seals touch cavity 1 and heating dish 2, increase rf signal transmission face
Product, improves the stability of signal transmission.
The N connector bodies positioning pedestal is connected with Network Analyzer, and Network Analyzer is defeated by port
Go out the low-power electric signal of rapid frequency-sweeping, the signal is transferred to up to heating dish by radio-frequency cable, and is produced
Raw reflection electric signal, the impedance Z of heating dish is obtained by measuring complex reflection coefficientL.Its is rational in infrastructure,
Method of operating is easy, and measurement result is relatively reliable, effectively improves the stability of heating dish impedance measurement.
From figure 1 it appears that between the installation cavity and heating dish of the tool structure, electric machine assembly 4 with
Insulation assembly 3 keeps on the same line.
Using the heating dish impedance measurement method of above-mentioned frock, the method be by measure reflectance factor come
Single port to heating dish impedance is tested, and Network Analyzer exports the low-power electricity of rapid frequency-sweeping by port
Signal, the signal is transferred to up to heating dish by radio-frequency cable, and produces reflection electric signal, by surveying
Amount complex reflection coefficient is obtained the impedance Z of heating dishL。
Network Analyzer is connected in N connector body positioning pedestals, and the transmission path of signal is by connection
Plate, battery lead plate B, arrival cavity, transmit a signal to heating dish in inside cavity connection member, wait
The signal of heating dish complex reflection coefficient.
Further, heating dish is completely insulated with the other end of Network Analyzer, and electric signal is via battery lead plate B
Afterwards, insulation board and insulation sleeve stop respectively the incoming battery lead plate A of electric signal, while insulating base A, B effectively will
Battery lead plate A, B are separated, and cause battery lead plate A with heating dish and battery lead plate B using internal spring assembly
Combine closely with cavity, increase the stability of signal transmission area and transmission.
Further, there is position in the presence of electrode assemblie contained spring between heating dish and cavity to offset,
Insulation assembly is put between the heating dish and cavity of the same rectilinear direction of electrode assemblie, inside insulation assembly
The power of confronting electrode component is formed balance by spring force, it is ensured that heating dish and the position centering of cavity, is carried
The accuracy of high impedance measurement result.
Above-mentioned measuring method is easy to operate, effectively improves the stability of heating dish impedance measurement, and then improves
Silicon chip film-coated quality.
Claims (5)
1. a kind of heating dish impedance measurement frock, it is characterised in that：It is mainly by insulation assembly and electrode group
Two parts of part constitute, the insulation assembly, including collets A, collets B and spring, collets A
Compressible pretightning force is formed with spring is installed in the middle of B, from electricity during antagonism heating dish impedance measurement
The power of pole component, it is ensured that heating dish uniform force, position centering；The electrode assemblie, including N connections
Device socket positioning pedestal, fixing screws, nut, pad, connecting plate, insulation board, battery lead plate A, insulation
Seat A, insulating base B, battery lead plate B, insulation sleeve and spring；The N connector bodies positioning pedestal passes through
Fixing screws, nut, pad are fixedly attached on battery lead plate B, are connected to form first electrode with cavity,
Battery lead plate A contacts to form second electrode with heating dish by arc surface, and insulating base A and insulating base B are by the
First, second electrode is separated, it is ensured that two electric electrode insulations, connects can first, second two electrode seals
Cavity and heating dish are contacted, increases rf signal transmission area.
2. heating dish impedance measurement frock as claimed in claim 1, it is characterised in that：The tool structure
Installation cavity and heating dish between, electric machine assembly and insulation assembly keep on the same line.
3. using the heating dish impedance measurement method of heating dish impedance measurement frock as claimed in claim 1,
The method is that the single port that heating dish impedance is obtained by measuring reflectance factor is tested, and Network Analyzer leads to
Cross the low-power electric signal that port exports rapid frequency-sweeping, the signal being transferred to up to heating by radio-frequency cable
Disk, and reflection electric signal is produced, the impedance Z of heating dish is obtained by measuring complex reflection coefficientL, net
Network analyzer is connected in N connector body positioning pedestals, and the transmission path of signal passes through connecting plate, electricity
Pole plate B, arrival cavity, transmit a signal to heating dish in inside cavity connection member, wait heating dish
The signal of complex reflection coefficient.
4. heating dish impedance measurement method as claimed in claim 3, heating dish and network point in the method
The other end of analyzer is completely insulated, and after electric signal is via battery lead plate B, insulation board and insulation sleeve stop respectively
The incoming battery lead plate A of electric signal, while insulating base A, B effectively separate battery lead plate A, B, and using internal
Spring assembly battery lead plate A is combined closely with heating dish and battery lead plate B with cavity, increase signal pass
The stability that the chances of losing games is accumulated and transmitted.
5. heating dish impedance measurement method as claimed in claim 3, in the method between heating dish and cavity
There is position skew, adding in the same rectilinear direction of electrode assemblie in the presence of electrode assemblie contained spring
Insulation assembly is put between hot plate and cavity, the spring force inside insulation assembly by the power of confronting electrode component,
Form balance, it is ensured that heating dish and the position centering of cavity, improve the accuracy of impedance measurements.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510736030.3A CN106645954B (en) | 2015-11-03 | 2015-11-03 | Heating dish impedance measurement tooling and measurement method |
| PCT/CN2015/096922 WO2017075859A1 (en) | 2015-11-03 | 2015-12-10 | Instrument for measuring impedance of heating disk and measurement method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510736030.3A CN106645954B (en) | 2015-11-03 | 2015-11-03 | Heating dish impedance measurement tooling and measurement method |
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| Publication Number | Publication Date |
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| CN106645954A true CN106645954A (en) | 2017-05-10 |
| CN106645954B CN106645954B (en) | 2019-02-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510736030.3A Active CN106645954B (en) | 2015-11-03 | 2015-11-03 | Heating dish impedance measurement tooling and measurement method |
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| Country | Link |
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| CN (1) | CN106645954B (en) |
| WO (1) | WO2017075859A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107894555A (en) * | 2017-11-08 | 2018-04-10 | 武汉航空仪表有限责任公司 | A kind of method of testing for heating component insulating properties |
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| CN103074606A (en) * | 2012-02-22 | 2013-05-01 | 光达光电设备科技（嘉兴）有限公司 | Graphite plate, reaction chamber with graphite plate, and substrate heating method |
| CN103266307A (en) * | 2013-05-22 | 2013-08-28 | 光垒光电科技（上海）有限公司 | Reaction cavity |
| CN203750529U (en) * | 2014-03-21 | 2014-08-06 | 江苏李文甲化工有限公司 | Circling-type kettle inner heating device |
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| CN107894555A (en) * | 2017-11-08 | 2018-04-10 | 武汉航空仪表有限责任公司 | A kind of method of testing for heating component insulating properties |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106645954B (en) | 2019-02-01 |
| WO2017075859A1 (en) | 2017-05-11 |
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Address after: No.900 Shuijia, Hunnan District, Shenyang City, Liaoning Province Patentee after: Tuojing Technology Co.,Ltd. Address before: 110179 3rd floor, No.1-1 Xinyuan street, Hunnan New District, Shenyang City, Liaoning Province Patentee before: PIOTECH Co.,Ltd. |
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