WO2017075859A1

WO2017075859A1 - Instrument for measuring impedance of heating disk and measurement method thereof

Info

Publication number: WO2017075859A1
Application number: PCT/CN2015/096922
Authority: WO
Inventors: 张亚新; 柴智
Original assignee: 沈阳拓荆科技有限公司
Priority date: 2015-11-03
Filing date: 2015-12-10
Publication date: 2017-05-11
Also published as: CN106645954B; CN106645954A

Abstract

An instrument for measuring impedance of a heating disk and measurement method thereof, applicable to the technical field of semiconductor coating devices, for solving the technical problems of large errors in measured data and weak signals of existing measurement methods. The structure of the instrument comprises an insulating assembly (3) and an electrode assembly (4). The insulating assembly (3) comprises an insulating block A (16), an insulating block B (17), and a spring (18). The electrode assembly (4) comprises N connector socket locating bases (5), fixing screws (6), a connecting plate (9), an insulating plate (10), an electrode plate A (11), an insulating base A (12), an insulating base B (13), an electrode plate B (14), an insulating sleeve (15), and a spring (18). The N connector socket locating bases (5) are connected with a network analyzer. The network analyzer outputs fast frequency sweeping low-power electrical signals by means of a port. The signals are transmitted to a heating disc by means of a radio frequency cable, so that reflected electrical signals are generated. The impedance ZL of the heating disc can be obtained by measuring a complex reflection coefficient.

Description

Heating plate impedance measuring tooling and measuring method

Technical field

[0001] The present invention relates to a heating plate impedance measuring tool and a measuring method, specifically, an electrode plate is respectively connected with a heating plate and a cavity, and the heating plate and the cavity are separated by an insulating block, which is convenient for measuring the heating plate installation. Tooling structure and measurement method of impedance in the cavity. It belongs to the field of RF impedance measurement application technology for semiconductor devices.

Background technique

[0002] With the increasing demand for electronic products, the rapid development of semiconductor devices has become a key component widely used in wafer deposition reaction chambers in semiconductor devices. The impedance of the heating plate directly affects the distribution of the individual ion fields during the deposition of the silicon wafer, thereby affecting the quality of the silicon wafer coating. At present, the measurement of the impedance of the heating plate is measured by a network analyzer, but the area of the network analyzer connected to the heating plate and the cavity is too small, and the fast-sweeping low-power electrical signal of the port output becomes weaker in the transmission, and the measurement signal is measured. Weak, unable to measure the exact value of the heating plate impedance.

technical problem

[0003] The present invention aims to solve the above problems, and mainly solves the technical problem that the measurement error of the existing measurement method is large and the signal is too weak, provides a measurement tool for the resistance of the heating plate, and increases the output signal of the network analyzer and the heating plate and The contact area of the cavity enhances the measurement signal and improves the accuracy and stability of the heating plate impedance measurement.

Problem solution

Technical solution

In order to achieve the above object, the present invention adopts the following technical solution: The heating plate impedance measuring tool is mainly composed of two parts: an insulating component (3) and an electrode component (4). The insulating component (3) comprises an insulating block A (16), an insulating block B (17) and a spring (18), and the insulating block A (16) and the B (17) intermediate mounting spring (18) form a compressible preload Force, against the heating plate (2) The force from the electrode assembly (4) during the impedance measurement process ensures that the heating plate is evenly stressed and the position is centered.

[0005] The electrode assembly (4) includes an N connector socket positioning base (5), a fixing screw (6), a nut (4) 7), gasket (8), connecting plate (9), insulating plate (10), electrode plate A (11), insulator A (12), insulator B (13), electrode plate B (14), insulation Set (15) and spring (18).

[0006] The N connector socket positioning base (5) is fixedly connected to the electrode plate B (14) by a fixing screw (6), a nut (7), and a gasket (8), and is connected to the cavity (1) Forming a first electrode; the electrode plate A (11) and the heating plate (2) are in contact with each other by a circular arc surface to form a second electrode; the insulating seat A (12) and the insulating seat B (13) separate the first and second electrodes to ensure The two electrodes are insulated, and the same insulator (A) is mounted inside the insulating seat A (12) and the insulating seat B (1 3), and the first and second electrodes can be pressed to contact the cavity (1). And the heating plate (2), increase the transmission area of the RF electrical signal, and improve the stability of signal transmission.

[0007] The method for measuring the impedance of a heating plate using the above tooling method is to obtain a single-port test of the impedance of the heating plate by measuring the reflection coefficient, and the network analyzer outputs a fast-swept low-power electrical signal through the port, and the signal passes through the RF cable. The transmission reaches the heating plate and produces a reflected electrical signal. The reflectivity of the RF signal has the following relationship with the impedance of the heating plate.

mouth

Wherein R is a complex reflection coefficient, Ζ0 is the impedance of the transmission line, and ZL is the impedance of the load. When it is determined that a transmission line having a characteristic impedance of 50 Ω is used, Ζ0 = 50 Ω can be determined, and thus, the impedance ZL of the heating plate can be obtained by measuring the complex reflection coefficient.

[0009] The network analyzer is connected to the N connector socket positioning base, and the signal transmission path passes through the connecting plate, the electrode plate B, and reaches the cavity, and the signal is transmitted to the heating plate on the internal connecting part of the cavity, waiting for the heating plate The signal of the complex reflection coefficient.

[0010] Further, the heating plate is completely insulated from the other end of the network analyzer. After the electrical signal passes through the electrode plate B, the insulating plate and the insulating sleeve respectively block electrical signals from being transmitted to the electrode plate A, and the insulating blocks A and B are effectively The electrode plates A and B are separated, and the internal spring device is used to make the electrode plate A and the heating plate and the electrode plate B tightly combined with the cavity, thereby increasing the signal transmission area and the stability of the transmission.

[0011] Further, a positional shift occurs between the heating plate and the cavity under the action of the spring inside the electrode assembly, in the electric The pole assembly is placed with an insulating component between the heating plate and the cavity in the same linear direction. The spring force inside the insulating component will counteract the force of the electrode assembly, forming a balance, ensuring the alignment of the heating plate and the cavity, and improving the accuracy of the impedance measurement result. Sex.

Advantageous effects of the invention

Beneficial effect

[0012] The heating plate impedance measuring tooling structure is reasonable, and the operation method is simple. It can increase the electrical signal transmission area of the cavity and the heating plate and the impedance measuring tool, increase the strength of the electrical signal, and make the measurement result more reliable. The electrode assembly and the spring inside the insulation assembly ensure that the contact between the signal transmission is tighter when the heating plate is centered with the cavity, which effectively improves the stability of the resistance measurement of the heating plate. Can be widely used in the field of semiconductor coating equipment technology.

Brief description of the drawing

DRAWINGS

1 is a schematic diagram of a heating disk impedance measuring tool measuring method.

2 is a schematic view of the interior of a heating plate impedance measuring tooling insulation assembly.

[0015] FIG. 3 is a schematic structural view of a heating plate impedance measuring tool assembly motor assembly.

4 is a schematic structural view of a heating plate impedance measuring tooling insulation assembly.

[0017] FIG. 5 is a schematic diagram of the interior of a heating plate impedance measuring tooling motor assembly.

[0018] In the figure: 1, cavity; 2, heating plate; 3, insulation components; 4, electrode assembly; 5, N connector socket positioning base; 6, fixing screws; 7, nut; 8, gasket; 9, connecting plate; 10, insulating plate; 11, electrode plate A; 12, insulating seat A; 13, insulating seat B; 14, electrode plate B; 15, insulating sleeve; 16, insulating block A; 17, insulating block B 18, spring.

[0019] The present invention will be further described in detail below with reference to the accompanying drawings:

BEST MODE FOR CARRYING OUT THE INVENTION

[0020] Referring to Figures 1-5, the heating plate impedance measuring tool is mainly composed of two parts, an insulating component 3 and an electrode assembly 4.

[0021] The insulating component 3 includes an insulating block A16, an insulating block B17 and a spring 18, and the insulating blocks A16 and B17 The inter-mounting spring 18 forms a compressible pre-tightening force against the force from the electrode assembly 4 during the impedance measurement of the heating disc 2, ensuring uniform force and positional alignment of the heating disc.

[0022] The electrode assembly 4 includes an N connector socket positioning base 5, a fixing screw 6, a nut 7, a gasket 8, a connecting plate 9, an insulating plate 10, an electrode plate Al1, an insulating seat A12, and an insulating seat B13. , electrode plate B14, insulating sleeve 15 and spring 18.

[0023] The N connector socket positioning base 5 is fixedly connected to the electrode plate B14 by fixing screws 6, nuts 7, and spacers 8, and is connected with the cavity 1 to form a first electrode; the electrode plate Al1 and the heating plate 2 The second electrode is formed by the contact of the circular arc surface; the insulating seat A12 and the insulating seat B 13 separate the first and second electrodes to ensure insulation between the two electrodes, and the spring 18 is mounted inside the insulating seat A12 and the insulating seat B13. The first and second electrodes are in close contact with the cavity 1 and the heating plate 2, thereby increasing the transmission area of the radio frequency electrical signal and improving the stability of signal transmission.

[0024] The N connector socket positioning base is connected to the network analyzer, and the network analyzer outputs a fast-swept low-power electrical signal through the port, and the signal reaches the heating disk through the transmission of the RF cable, and generates a reflected electrical signal. The impedance ZL of the heating plate can be obtained by measuring the complex reflection coefficient. The structure is reasonable, the operation method is simple, the measurement result is more reliable, and the stability of the impedance measurement of the heating plate is effectively improved.

[0025] As can be seen from FIG. 1, between the mounting cavity of the tooling structure and the heating plate, the motor assembly 4 and the insulating assembly 3 are maintained in the same straight line.

[0026] The method for measuring the impedance of a heating plate of the above tooling is to obtain a single-port test of the impedance of the heating plate by measuring the reflection coefficient, and the network analyzer outputs a fast-swept low-power electrical signal through the port, and the signal passes through the RF cable. The transmission reaches the heating plate and generates a reflected electrical signal, and the impedance ZL of the heating plate can be obtained by measuring the complex reflection coefficient.

[0027] The network analyzer is connected to the N connector socket positioning base, and the signal transmission path passes through the connection plate, the electrode plate B, and reaches the cavity, and the signal is transmitted to the heating plate on the internal connecting part of the cavity, waiting for the heating plate The signal of the complex reflection coefficient.

[0028] Further, the heating plate is completely insulated from the other end of the network analyzer. After the electrical signal passes through the electrode plate B, the insulating plate and the insulating sleeve respectively block electrical signals from being transmitted to the electrode plate A, and the insulating blocks A and B are effectively The electrode plates A and B are separated, and the internal spring device is used to make the electrode plate A and the heating plate and the electrode plate B tightly combined with the cavity, thereby increasing the signal transmission area and the stability of the transmission. [0029] Further, a positional displacement occurs between the heating plate and the cavity under the action of the spring inside the electrode assembly, and an insulating component is placed between the heating plate and the cavity in the same linear direction of the electrode assembly, and the spring force inside the insulating component will be The force against the electrode assembly forms a balance, ensuring the alignment of the heating plate and the cavity, and improving the accuracy of the impedance measurement.

[0030] The above measurement method is simple in operation, effectively improves the stability of the resistance measurement of the heating plate, and further improves the quality of the silicon wafer coating.

Claims

Claim

[Claim 1] A heating plate impedance measuring tool, characterized in that it is mainly composed of an insulating component and an electrode assembly, the insulating component comprising an insulating block A, an insulating block B and a spring, and an insulating block A and B intermediate mounting spring forms a compressible pre-tightening force against the force from the electrode assembly during the impedance measurement of the heating plate, ensuring uniform force and position alignment of the heating plate; the electrode assembly, including the N connector socket positioning base, a fixing screw, a nut, a gasket, a connecting plate, an insulating plate, an electrode plate A, an insulating seat A, an insulating seat B, an electrode plate B, an insulating sleeve and a spring; the N connector socket positioning base is fixed by a screw, a nut, The gasket is fixedly connected to the electrode plate B, and is connected with the cavity to form a first electrode. The electrode plate A and the heating plate are in contact with each other to form a second electrode, and the insulating seat A and the insulating seat B separate the first electrode and the second electrode. Insulation between the two electrodes ensures that the first and second electrodes are in close contact with the cavity and the heating plate to increase the transmission area of the RF electrical signal.

[Claim 2] The heating plate impedance measuring tool according to claim 1, wherein: between the mounting cavity of the tooling structure and the heating plate, the motor assembly and the insulating assembly are maintained in the same straight line.

[Claim 3] A method for measuring a heating plate impedance of a heating plate impedance measuring tool according to claim 1, wherein the single port test of the heating plate impedance is obtained by measuring a reflection coefficient, and the network analyzer quickly sweeps through the port output. The low-power electrical signal, which is transmitted to the heating plate through the RF cable, and generates a reflected electrical signal. The impedance ZL of the heating plate can be obtained by measuring the complex reflection coefficient, and the network analyzer is connected to the positioning base of the N connector socket. The signal transmission path passes through the connecting plate, the electrode plate B, and reaches the cavity, and the signal is transmitted to the heating plate on the internal connecting part of the cavity, waiting for the signal of the heating plate to reflect the reflection coefficient.

[Claim 4] The method for measuring the impedance of a heating plate according to claim 3, wherein the heating plate is completely insulated from the other end of the network analyzer, and after the electrical signal passes through the electrode plate B, the insulating plate and the insulating sleeve respectively block the electrical signal Into the electrode plate A, the same insulation seat A, B effectively separate the electrode plates A, B, and use the internal spring device to make the electrode plate A and the heating plate and the electrode plate B and the cavity tightly combined, increasing the signal transmission area and The stability of the transmission.

[Claim 5] The method for measuring a resistance of a heating plate according to claim 3, wherein a positional shift occurs between the heating plate and the cavity under the action of a spring inside the electrode assembly, and the electrode assembly is in the same straight line An insulating component is placed between the heating plate and the cavity, and the spring force inside the insulating component will resist the force of the electrode assembly, form a balance, ensure the position of the heating plate and the cavity, and improve the accuracy of the impedance measurement result.