CN205079762U - Heating plate level survey frock structure - Google Patents
Heating plate level survey frock structure Download PDFInfo
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- CN205079762U CN205079762U CN201520743164.3U CN201520743164U CN205079762U CN 205079762 U CN205079762 U CN 205079762U CN 201520743164 U CN201520743164 U CN 201520743164U CN 205079762 U CN205079762 U CN 205079762U
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- digital display
- heating plate
- display dial
- dial gauge
- positioning pedestal
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Abstract
Heating plate level survey frock structure includes: location base, fastening digital display dial gauge bolt, mount, locating pin, fastening bolt and digital display dial gauge. The location base is placed on the reaction chamber, and the location benchmark on location base disc lower surface and the reaction chamber coincides for the benchmark moves down to the locating hole of location base three amesdial on. Location base amesdial locating hole can guarantee that three digital display dial gauge is in same level measurement to angle equipartition with 120 is on the heating plate surface. Its methods of measurement is through the cooperation of location base with the mount, accomplishes the tight and measuring position location of horizontal location, clamp of digital display amesdial, and the adjustment heating plate makes three digital display dial gauge reading the same, at this moment the heating plate level. Its is rational in infrastructure, and operating method is simple and convenient, effectively improves heating plate upper surface level adjustment's work efficiency. But wide application in semiconductor coating equipment technical field.
Description
Technical field
The utility model relates to a kind of heating plate horizontal survey tool structure, specifically a kind of device adopting fixing and accurate location digital display dial gauge, is convenient to the tool structure of levelness when heating plate is installed in digital display dial gauge measurement cavity.Belong to semiconductor coated film equipment applied technical field.
Background technology
Along with the increase of electronic product demand, drive semiconductor equipment to develop rapidly, heating plate is widely used in the critical component in semiconductor equipment in silicon chip deposition reaction chamber.Environmental requirement needed for silicon chip deposition is very high, and comprise the heating plate placing silicon chip and require height level, the horizontality of heating plate directly affects the quality of silicon chip film forming, therefore needs to carry out horizontal adjustment to heating plate upper surface when installing heating plate.The horizontal adjustment of current heating plate upper surface mainly relies on three digital display dial gauges to choose on heating plate surface at 3 and measures, and when the numerical value of digital display dial gauge display is identical, is considered as heating plate surface level.But this method also exists shortcomings and deficiencies, error effect measurement result can be there is during three digital display dial gauge location, 3 of three digital display dial gauge location can not ensure evenly, and positioning action more complicated, needs to consume a large amount of time to the adjustment of heating plate level simultaneously.
Summary of the invention
The utility model is for the purpose of solving the problem, mainly solve existing measuring method more complicated, not easy-operating technical matters, and a kind of measurement frock of heating plate surface level is provided, simplify the installation operating process of digital display dial gauge, strengthen reliability and the homogeneity of three digital display dial gauge location, improve the efficiency and precision of heating plate upper surface horizontality adjustment.
To achieve these goals, the utility model adopts following technical proposals: heating plate horizontal survey tool structure, comprising: positioning pedestal, fastening digital display dial gauge bolt, fixed mount, register pin, fastening bolt and digital display dial gauge.Described positioning pedestal is placed on reaction chamber, and positioning pedestal lower disk surface overlaps with the positioning datum on reaction chamber, and benchmark is displaced downwardly on the pilot hole of positioning pedestal three clock gauges.The clock gauge pilot hole of described positioning pedestal can ensure that three digital display dial gauges are at same level planar survey, and is distributed on heating plate surface with the angle of 120 °.By register pin, fixed mount is placed on positioning pedestal, and with fastening bolt, fixed mount is fastened on positioning pedestal.Digital display dial gauge is placed on the circular arc reduced on positioning pedestal and fixed mount and by fastening digital display dial gauge bolt tightening on fixed mount, completes the clamping of digital display dial gauge.Adjustment heating plate, when three digital display dial gauge readings are consistent, heating plate surface is up to the standard state.
Adopt the heating plate level measurement method of above-mentioned frock, the method is coordinating by positioning pedestal and fixed mount, complete the horizontal location of digital display dial gauge, clamping and location, measuring position, adjustment heating plate makes three digital display dial gauge readings identical, now heating plate level.
With reaction chamber upper surface for positioning datum, utilize the lower surface of positioning pedestal disk to engage with positioning datum and position.The depth of parallelism of the locating surface on positioning pedestal by given positioning pedestal lower disk surface and digital display dial gauge, controls three digital display dial gauges and measures in same level, and ensure that three clock gauges are distributed on heating plate on the surface with the angle of 120 °.
Further, fixed mount there is register pin, the convenient contraposition be connected with positioning pedestal, fixed mount adopts circular arc type clamping means to fix digital display dial gauge, by bolt, digital display dial gauge is clamped, fixed mount is fastened on positioning pedestal by bolt simultaneously, prevents clock gauge from moving in z-direction.
Further, fixed mount, in digital display dial gauge clamping place, processes little plane with positioning pedestal surface of contact, makes there is one section of gap between fixture and positioning pedestal, and when preventing with bolted clock gauge, two surfaces friction occur and cause surface of contact to damage.
The beneficial effects of the utility model and feature are: rational in infrastructure, and method of operating is easy.Reaction chamber benchmark is effectively combined with digital display dial gauge horizontal survey benchmark, increases the accuracy that digital display dial gauge is measured.Simplify location and the clamp operation process of digital display dial gauge, effectively improve the work efficiency of heating plate upper surface horizontal adjustment.Semiconductor coated film equipment technical field can be widely used in.
Accompanying drawing explanation
Fig. 1 is heating plate horizontal survey tool structure schematic diagram.
Fig. 2 is heating plate horizontal survey frock stretch-out view.
In figure: 1. positioning pedestal; 2. fastening digital display dial gauge bolt; 3. fixed mount; 4. register pin; 5. digital display dial gauge; 6. fastening bolt.
Fig. 3 is heating plate horizontal survey frock scheme of installation.
In figure: 1. positioning pedestal; 3. fixed mount; 4. register pin; 5. digital display dial gauge; 6. fastening bolt; 7. silicon chip reaction chamber; 8. heating plate.
Below in conjunction with accompanying drawing, the utility model is described in further detail:
Embodiment
Embodiment
With reference to Fig. 1-3, heating plate horizontal survey tool structure, comprising: positioning pedestal 1, fastening digital display dial gauge bolt 2, fixed mount 3, register pin 4, fastening bolt 6 and digital display dial gauge 5.Described positioning pedestal 1 is placed on reaction chamber, and positioning pedestal 1 lower disk surface overlaps with the positioning datum on reaction chamber, and benchmark is displaced downwardly on the pilot hole of positioning pedestal 1 three clock gauges.The clock gauge pilot hole of described positioning pedestal 1 can ensure that three digital display dial gauges 6 are at same level planar survey, and is distributed on heating plate surface with the angle of 120 °.By register pin 4, fixed mount 3 is placed on positioning pedestal 1, and with fastening bolt 6, fixed mount 3 is fastened on positioning pedestal 1.Digital display dial gauge 5 to be placed on positioning pedestal 1 and fixed mount 3 and to tighten by fastening digital display dial gauge bolt 2 circular arc reduced on fixed mount 3, completes the clamping of digital display dial gauge 5.Adjustment heating plate, when three digital display dial gauge 5 readings are consistent, heating plate surface is up to the standard state.
As can be seen from Figure 3, the positioning pedestal 1 of this tool structure is arranged in silicon chip reaction chamber 7, and heating plate 8 is in below positioning pedestal 1.
Adopt the heating plate level measurement method of above-mentioned frock, the method is coordinating by positioning pedestal and fixed mount, complete the horizontal location of digital display dial gauge, clamping and location, measuring position, adjustment heating plate makes three digital display dial gauge readings identical, now heating plate level.
With reaction chamber upper surface for positioning datum, utilize the lower surface of positioning pedestal disk to engage with positioning datum and position.The depth of parallelism of the locating surface on positioning pedestal by given positioning pedestal lower disk surface and digital display dial gauge, controls three digital display dial gauges and measures in same level, and ensure that three clock gauges are distributed on heating plate on the surface with the angle of 120 °.
Further, fixed mount there is register pin, the convenient contraposition be connected with positioning pedestal, fixed mount adopts circular arc type clamping means to fix digital display dial gauge, by bolt, digital display dial gauge is clamped, fixed mount is fastened on positioning pedestal by bolt simultaneously, prevents clock gauge from moving in z-direction.
Further, fixed mount, in digital display dial gauge clamping place, processes little plane with positioning pedestal surface of contact, makes there is one section of gap between fixture and positioning pedestal, and when preventing with bolted clock gauge, two surfaces friction occur and cause surface of contact to damage.
The utility model, by the positioning precision of raising three digital display dial gauges, simplifies the fixing operation of digital display dial gauge, effectively can improve precision and the efficiency of heating plate horizontal adjustment.When three digital display dial gauge readings are consistent, heating plate surface is up to the standard state.
Claims (1)
1. heating plate horizontal survey tool structure, comprise digital display dial gauge, it is characterized in that: it also comprises positioning pedestal, fastening digital display dial gauge bolt, fixed mount, register pin, fastening bolt, described positioning pedestal is placed on reaction chamber, positioning pedestal lower disk surface overlaps with the positioning datum on reaction chamber, makes benchmark be displaced downwardly on the pilot hole of positioning pedestal three clock gauges; The clock gauge pilot hole of described positioning pedestal can ensure that three digital display dial gauges are at same level planar survey, and be distributed on heating plate surface with the angle of 120 °, by register pin, fixed mount is placed on positioning pedestal, and with fastening bolt, fixed mount is fastened on positioning pedestal, digital display dial gauge is placed on the circular arc reduced on positioning pedestal and fixed mount and by fastening digital display dial gauge bolt tightening on fixed mount, completes the clamping of digital display dial gauge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520743164.3U CN205079762U (en) | 2015-09-23 | 2015-09-23 | Heating plate level survey frock structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520743164.3U CN205079762U (en) | 2015-09-23 | 2015-09-23 | Heating plate level survey frock structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205079762U true CN205079762U (en) | 2016-03-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201520743164.3U Active CN205079762U (en) | 2015-09-23 | 2015-09-23 | Heating plate level survey frock structure |
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| CN (1) | CN205079762U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106645954A (en) * | 2015-11-03 | 2017-05-10 | 沈阳拓荆科技有限公司 | Heating plate impedance measuring tool and heating plate impedance measuring method |
| CN111307023A (en) * | 2018-12-12 | 2020-06-19 | 奇景光电股份有限公司 | Parallelism measuring device and method |
-
2015
- 2015-09-23 CN CN201520743164.3U patent/CN205079762U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106645954A (en) * | 2015-11-03 | 2017-05-10 | 沈阳拓荆科技有限公司 | Heating plate impedance measuring tool and heating plate impedance measuring method |
| CN106645954B (en) * | 2015-11-03 | 2019-02-01 | 沈阳拓荆科技有限公司 | Heating dish impedance measurement tooling and measurement method |
| CN111307023A (en) * | 2018-12-12 | 2020-06-19 | 奇景光电股份有限公司 | Parallelism measuring device and method |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: No.900 Shuijia, Hunnan District, Shenyang City, Liaoning Province Patentee after: Tuojing Technology Co.,Ltd. Address before: 110179 3rd floor, No.1-1 Xinyuan street, Hunnan New District, Shenyang City, Liaoning Province Patentee before: PIOTECH Co.,Ltd. |