CN105785299A - Coplanar waveguide reflection amplitude etalon of on-chip measurement system and design method thereof - Google Patents
Coplanar waveguide reflection amplitude etalon of on-chip measurement system and design method thereof Download PDFInfo
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- CN105785299A CN105785299A CN201410818445.0A CN201410818445A CN105785299A CN 105785299 A CN105785299 A CN 105785299A CN 201410818445 A CN201410818445 A CN 201410818445A CN 105785299 A CN105785299 A CN 105785299A
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Abstract
The invention discloses a design method for a coplanar waveguide reflection amplitude etalon of an on-chip measurement system. The coplanar waveguide reflection amplitude etalon comprises a dielectric substrate, a central conductor formed on the surface of the dielectric substrate, and a coplanar waveguide transmission line. The coplanar waveguide transmission line is formed by a first grounding conductor and a second grounding conductor and the first grounding conductor and the second grounding conductor are symmetrically arranged on the two sides of the central conductor. The transmission line is composed of matched parts, and a mismatched part arranged between the matched parts, wherein the matched parts are arranged at an input terminal and an output terminal. The method comprises the steps of determining the target measurement range of a reflection amplitude etalon; determining the conductor sizes of the matched parts, and calculating the width of the central conductor of the mismatched part according to the determined conductor sizes of the matched parts and the target standing wave ratio, wherein the width of the central conductor of the mismatched part is smaller than the widths of the central conductors of the matched parts.
Description
Technical field
The present invention relates to the fields of measurement of the reflection amplitudes accuracy measuring system on sheet, more particularly, to a kind of reflection amplitudes standard with coplanar waveguide transmission line form and method for designing thereof.
Background technology
In recent years, modern various military, civil electronic are equipped the performances such as high integration, altofrequency, low-power consumption and parameter request is more and more higher, for meeting these requirements, have employed sufacing in the design of device in a large number, the thing followed is the measurement problem first having to solve these surface device S parameter.The measurement of surface device generally adopts measurement system on sheet to realize, and on sheet, measurement system includes Network Analyzer, probe station, probe and calibration chip composition.
Sheet is measured the accuracy of measurement remainder error by Network Analyzer of system, the technical specification of probe, the calibration steps adopted, calibration chip desired level and connect repeatability etc. determine, owing to the Relationship Comparison complexity between these several persons and each component are difficult to accurately individually determine, so being difficult to determine, by the method for subanalysis, the accuracy of measurement measuring system on sheet.In order to determine the accuracy of measurement measuring system on sheet, typically require the standard with certain standard value the measurement parameter of system is calibrated, the scaled values of comparison standard and the value utilizing the actual measurement of measurement system on sheet to obtain, thus obtaining the accuracy of measurement of system.
Reflection amplitudes accuracy of measurement is to measure an important parameter of system on sheet, and the reflection amplitudes inspection device that the sheet adopted at present is measured system is a length with co-planar waveguide connecting line form and straight standard transmission line.As shown in Figure 1A and 1B, coplanar waveguide transmission line includes dielectric substrate 1, forms the central conductor 2 being used as holding wire on substrate and is used as the first earth conductor 3a and the second earth conductor 3b of ground wire.The metal level of holding wire 2 and ground wire 3a, 3b respectively even width.This transmission line have by holding wire width w, dielectric substrate dielectric constant and thickness, metal layer thickness, holding wire and ground wire between the determined specified impedance of gap s, for instance the impedance of transmission line is designed to 50 Ω.On sheet measurement system calibrated after ride over the both sides of standard transmission line with probe, and measure reflection coefficient, carry out the checking of systematic survey accuracy by this method.The transmission amplitude criteria device of prior art design is formed by the standard transmission line that impedance is 50 Ω, suitable with the characteristic impedance of the system of measurement.When measuring the reflection standing wave amount of transmission amplitude criteria device, transmit amplitude criteria device standing wave standard value about 1.00, utilize such reflection amplitudes standard to be able to validate only on sheet measurement system accuracy of measurement in mated condition.In real work, undesirable due to calibration open circuit device, short-circuiting device etc. can affect measurement system accuracy of measurement under little reflection and big reflective condition on sheet, cannot assess system reflection amplitudes accuracy of measurement under different reflective conditions with the reflection amplitudes standard of method as defined above design.Cannot meet and measurement system transfers amplitude measurement accuracy on sheet is comprehensively verified.
The reflection amplitudes standard of reflection amplitudes measurement when different measuring can be applicable to accordingly, it would be desirable to a kind of.
Summary of the invention
Owing to the reflection amplitudes standard of prior art design is 50 Ω transmission lines, system can only be tested in the accuracy of measurement of the reflection amplitudes of matching status, it is impossible to the reflection amplitudes accuracy of measurement under various mismatch Conditions is tested.In order to overcome this technological deficiency, one group of co-planar waveguide reflection amplitudes standard provided by the invention includes a series of coplanar waveguide transmission line with various sizes of holding wire and ground wire.By introducing mismatched structures in reflection amplitudes standard, and the size of mismatch can be adjusted according to the size of holding wire and ground wire, the accuracy of measurement when measuring different reflection amplitudes of the measurement system on sheet can be tested by the reflection amplitudes standard according to the present invention, being a kind of covering from matching the reflection amplitudes standard of accuracy of measurement inspection different mismatch Conditions, the reflection amplitudes extending existing reflection amplitudes standard measures scope.
According to an aspect of the present invention, a kind of method for designing for forming the co-planar waveguide reflection amplitudes standard measuring system on sheet is provided, this co-planar waveguide reflection amplitudes standard includes: dielectric substrate, by the central conductor formed on the surface of described dielectric substrate be symmetrically located at the first earth conductor of central conductor both sides and coplanar waveguide transmission line that the second earth conductor is formed, compatible portion that this transmission line includes being positioned at input and outfan and therebetween mismatch part, the method includes:
Determine the target measurement scope of reflection amplitudes standard；
Determine each conductor size of compatible portion,
Target standing-wave ratio based on each conductor size of determined compatible portion and this standard, assume the width width equal to compatible portion the first earth conductor and the second earth conductor of mismatch part the first earth conductor and the second earth conductor, utilize electromagnetic simulation software, calculate the width obtaining mismatch part central conductor, if it is less than the width of compatible portion central conductor, obtain each conductor size of this standard mismatch part.
Preferably, the step of the described each conductor size determining compatible portion farther includes
The width of the central conductor of compatible portion and the width of the first earth conductor and the second earth conductor is determined based on the pin spacing of this measurement system probe；
Based on the conductor layer thickness of the dielectric constant of substrate, formation conductor, the target impedance of the width of compatible portion central conductor and this measurement system, the gap size between central conductor and the first earth conductor and second earth conductor of compatible portion described in simulation calculation.
Preferably, ADS software is utilized to carry out the simulation calculation of the gap size between central conductor and the first earth conductor and the second earth conductor.
Preferably, the Electromagnetic Simulation that HFSS software carries out each conductor size of mismatch part is utilized to calculate so that the design size that each conductor size of mismatch part is this standard mismatch part corresponding when calculated standing-wave ratio is equal with target standing-wave ratio.
Preferably, the method farther includes
The width of calculated mismatch part central conductor and the known process limits of error are compared,
If the width of calculated mismatch part central conductor is more than the known process limits of error, then being confirmed as the width of mismatch part central conductor, the width of mismatch part the first earth conductor and the second earth conductor is equal to the width of compatible portion the first earth conductor and the second earth conductor.
Preferably, the method farther includes
By to width and the known process limits of error of mismatch part central conductor compare,
If the width of the mismatch part central conductor obtained is less than the known process limits of error, by reducing the described width assuming the first earth conductor and the second earth conductor, obtained the size of each conductor of mismatch part by simulation calculation according to the target standing-wave ratio of this standard.
According to a further aspect in the invention, a kind of co-planar waveguide reflection amplitudes standard measuring system on sheet is provided, this reflection amplitudes standard includes dielectric substrate, by the central conductor formed on the surface of described dielectric substrate be symmetrically located at the first earth conductor of central conductor both sides and transmission line that the second earth conductor is formed, it is characterized in that
Compatible portion that this transmission line includes being positioned at input and outfan and therebetween mismatch part,
The central conductor length of described mismatch part is 1/4th of this measurement system centre frequency corresponding wavelength,
The central conductor width of described mismatch part is less than the central conductor width of compatible portion.
Preferably, the width of the central conductor of described compatible portion depends on the pin spacing of this measurement system probe, gap size between central conductor and the first earth conductor and second earth conductor of described compatible portion depends on the dielectric constant of substrate, forms the conductor layer thickness of conductor, the target impedance of the width of compatible portion central conductor and this measurement system.
In accordance with a further aspect of the present invention, one group of co-planar waveguide reflection amplitudes standard measuring system on sheet is provided, in this group, each reflection amplitudes standard has different target standing-wave ratios, each standard includes dielectric substrate, by the central conductor formed on the surface of described dielectric substrate be symmetrically located at the first earth conductor of central conductor both sides and coplanar waveguide transmission line that the second earth conductor is formed, it is characterized in that, each transmission line includes
It is positioned at the compatible portion of input and outfan and therebetween mismatch part,
The central conductor length of described mismatch part is 1/4th of this measurement system centre frequency corresponding wavelength,
The central conductor width of described mismatch part less than the central conductor width of compatible portion, and
The width of the central conductor of described compatible portion depends on the pin spacing of this measurement system probe,
Gap size between central conductor and the first earth conductor and second earth conductor of described compatible portion depends on the dielectric constant of substrate, forms the conductor layer thickness of conductor, the target impedance of the width of compatible portion central conductor and this measurement system,
The width of the central conductor of described mismatch part is obtained and more than the known process limits of error by simulation calculation according to the target standing-wave ratio of this standard,
First earth conductor of described mismatch part and the width of the second earth conductor equal to or less than the width of described compatible portion the first earth conductor and the second earth conductor.
Beneficial effects of the present invention is as follows:
One group of reflection amplitudes standard of present invention design is a series of coplanar waveguide transmission lines with various sizes of holding wire and ground wire.Owing to the reflection amplitudes standard of the present invention introduces mismatched structures in the coupling structure of coplanar waveguide transmission line, and mismatch size can be adjusted according to the size of holding wire and ground wire, so the accuracy of measurement when measuring different reflection amplitudes of measurement system on sheet can be tested by this reflection amplitudes standard, it is a kind of covering from the reflection amplitudes standard matched different mismatch Conditions, compensate for the reflection amplitudes standard of prior art design can only system be tested in the accuracy of measurement of the reflection amplitudes of matching status, defect reflection amplitudes accuracy of measurement under various mismatch Conditions cannot tested.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail.
Figure 1A and 1B illustrates the co-planar waveguide reflection amplitudes standard of prior art.
Fig. 2 illustrates the co-planar waveguide reflection amplitudes standard design procedure flow chart according to the present invention.
Fig. 3 illustrates co-planar waveguide reflection amplitudes standard according to a first embodiment of the present invention.
Fig. 4 illustrates co-planar waveguide reflection amplitudes standard according to a second embodiment of the present invention.
Detailed description of the invention
In order to be illustrated more clearly that the present invention, below in conjunction with preferred embodiments and drawings, the present invention is described further.Parts similar in accompanying drawing are indicated with identical accompanying drawing labelling.It will be appreciated by those skilled in the art that following specifically described content is illustrative and be not restrictive, should not limit the scope of the invention with this.
In order to the reflection amplitudes measurement capability under mismatch Conditions of the measurement system on sheet is carried out quantitative assessment, it is necessary to design has the reflection amplitudes standard inspection part as system of standard value such as target impedance value or target standing-wave ratio.According to the present invention, the one group of co-planar waveguide reflection amplitudes standard measuring system on sheet is a series of coplanar waveguide transmission lines being respectively provided with different resistance value.They are respectively connected in the gauge measurement system that impedance is 50 Ω, due to the reflection that generation is varied in size by the existence of mismatch, the measured value that measurement system is obtained by this reflected value available under corresponding mismatch Conditions is tested, and becomes a series of reflection amplitudes standard.
Each reflection amplitudes standard according to the present invention adopts the form of the coplanar waveguide transmission line with symmetrical structure to design, and is structurally divided into dielectric substrate, by forming the holding wire formed at the conductor of dielectric substrate and laying respectively at holding wire both sides and the first ground wire that holding wire separates and the second ground wire.Preferably, the conductor belt electrode as holding wire and ground wire is formed with gold.In order to realize measurement system calibration under mismatch Conditions on sheet, coplanar waveguide transmission line according to the present invention is divided into the compatible portion laying respectively at transmission line input 301,401 and outfan 303,403 and therebetween mismatch part 302 on conductor structure, 402, referring to Fig. 3 and Fig. 4.The width of the holding wire of compatible portion and the width of the first and second ground wires depend on the pin spacing of this measurement system probe.Gap size between holding wire and the first ground wire and second ground wire of compatible portion depends on the conductor layer thickness of the dielectric constant of substrate, formation conductor, the width of compatible portion holding wire and ground wire and the target impedance value of this standard.Preferably, the holding wire length of this mismatch part is 1/4th of this measurement system centre frequency corresponding wavelength.The holding wire width of this mismatch part is less than the width of the holding wire of compatible portion, and ground line width is equal to or less than compatible portion ground line width.
Below in conjunction with Fig. 2, the method for designing for forming the co-planar waveguide reflection amplitudes standard measuring system on sheet of the present invention is specifically described.
The selection of substrate
The corresponding semi-conducting material of different choice according to the difference and measurand of measuring system operating frequency on sheet is as substrate.Such as in microwave and millimeter wave frequency range, semiconductor substrate materials generally may select the materials such as GaAs, aluminium sesquioxide or silicon.
Firstly the need of determining that the reflection amplitudes measuring system on sheet measures scope, it is then determined that the reflection amplitudes measurement scope that a reflection amplitudes standard is corresponding, step S201.The size of ground wire and holding wire is designed by the target measurement scope according to reflection amplitudes.Assuming that the reflection amplitudes standing-wave ratio V measuring system on sheet represents, its SWR measurement ranges for V1～Vn.At V1～VnScope in choose multiple such as k target standing wave ratio, be designated as V1、V2、……、Vk, k is positive integer, designs the reflection amplitudes standard with respective objects standing wave ratio.
The method for designing of compatible portion holding wire and ground wire
For V1～VnScope internal object standing-wave ratio be Vi(i=1,2 ..., reflection amplitudes standard k), it is first determined the electrode size of its compatible portion, step S202.As it is shown on figure 3, the pin spacing of the width of the holding wire 301,303 of compatible portion probe used by measurement system on sheet determines, it is set to w1.By the thickness t according to the DIELECTRIC CONSTANT ε of selected backing material, surface conductor layer gold, the width w of matched signal line1, target impedance 50 these known parameters of Ω, bring known software for calculation such as ADS into and be calculated, obtain the gap width g between the holding wire of compatible portion and the first ground wire and the second ground wire1.The width of compatible portion the first ground wire and the second ground wire is equal, the pin spacing of probe determine, it is preferable that take the probe pin spacing of 2～3 times, so both can guarantee that probe tip is pressed on measured piece, also avoids device size excessive on integral layout generation impact simultaneously.
The method for designing of mismatch part holding wire and ground wire
It is V for target standing-wave ratioiReflection amplitudes standard, it is first determined the holding wire length l of mismatch part2, l2The method for designing of length be chosen on sheet and measure wavelength corresponding to system centre frequency about 1/4, so ensure that there is smooth amplitude characteristic in full frequency band；Then designing the width w2 of mismatch signal line, the width w2 of holding wire is less than the width w1 of compatible portion holding wire.Assume initially that the width of mismatch part ground wire is identical with compatible portion ground line width, by the holding wire of the compatible portion holding wire determined in above-mentioned steps and ground line width, gap width w1 between holding wire and ground wire and mismatch part and ground line width, and each size such as gap width between holding wire and the ground wire of design, input sets up model to known electromagnetic simulation software, such as HFSS software, calculating standing-wave ratio under this mismatch part holding wire width w2 size.The width w2 of mismatch part holding wire is adjusted according to calculated standing-wave ratio, until the target standing-wave ratio V of calculated standing-wave ratio and designiEqual.Record the size of this mismatch part holding wire, step S203.But, the size of mismatch part holding wire now can't be defined as design size.
Compared with calculated holding wire width w2 is limit with mismachining tolerance, it is determined that mismatch part conductor size, step S204.
According to processing technique, it is known that mismachining tolerance is limited to ± Δ, if < < w2, then this calculated holding wire width w2 is the width of mismatch part holding wire to mismachining tolerance limit Δ, and the width of ground wire is identical with compatible portion ground line width, as shown in Figure 3.Otherwise, if mismachining tolerance limit Δ > > w2, then need to increase the width of w2 so that it is be simultaneously greater than the mismachining tolerance limit Δ of at least twice less than standard size and compatible portion holding wire width w1.Reduce the width dimensions of mismatch part ground wire, set up phantom and be brought in same electromagnetic simulation software such as HFSS and be calculated, until ground line width is reduced to the target standing-wave ratio V of certain size standing-wave ratio now and designkiEqual.Mismatch part ground line width now is design size with holding wire width, as shown in Figure 4.
The method for designing devising a kind of co-planar waveguide reflection amplitudes standard measuring system on sheet of innovation in the present invention.This reflection amplitudes standard is a series of coplanar waveguide transmission lines with different mismatch size.Different from the method for designing of prior art, owing to the present invention introducing mismatch co-planar waveguide part, the reflection amplitudes standard collectively formed by mismatch co-planar waveguide part and coupling co-planar waveguide part can be calibrated having measurement system on the sheet of different standing wave ratio, rather than can only the matching status of system be calibrated as standard by coupling coplanar transmission in prior art.This method for designing and the reflection amplitudes standard thus obtained are greatly expanded the checking scope measuring system amplitude measurement accuracy on sheet.The design method has fully taken into account processing technique impact on design result when design.When the holding wire line thickness of processing technique error Yu design can be compared, in order to reduce the impact on final result of the processing technique error, suitably increase the width of mismatch part holding wire when design, reduce the width of ground wire simultaneously, to reach to ensure the purpose of suitable target standing-wave ratio.
Obviously; the above embodiment of the present invention is only for clearly demonstrating example of the present invention; and be not the restriction to embodiments of the present invention; for those of ordinary skill in the field; can also make other changes in different forms on the basis of the above description; here cannot all of embodiment be given exhaustive, every belong to apparent change that technical scheme extended out or the variation row still in protection scope of the present invention.
Claims (9)
1. one kind for forming the method for designing of the co-planar waveguide reflection amplitudes standard measuring system on sheet, this co-planar waveguide reflection amplitudes standard includes: dielectric substrate, by the central conductor formed on the surface of described dielectric substrate be symmetrically located at the first earth conductor of central conductor both sides and coplanar waveguide transmission line that the second earth conductor is formed, compatible portion that this transmission line includes being positioned at input and outfan and therebetween mismatch part, the method includes:
Determine the target measurement scope of reflection amplitudes standard；
Determine each conductor size of compatible portion,
Target standing-wave ratio based on each conductor size of determined compatible portion and this standard, assume the width width equal to compatible portion the first earth conductor and the second earth conductor of mismatch part the first earth conductor and the second earth conductor, utilize electromagnetic simulation software, calculate the width obtaining mismatch part central conductor, if it is less than the width of compatible portion central conductor, obtain each conductor size of this standard mismatch part.
2. method for designing as claimed in claim 1, it is characterised in that the step of the described each conductor size determining compatible portion farther includes
The width of the central conductor of compatible portion and the width of the first earth conductor and the second earth conductor is determined based on the pin spacing of this measurement system probe；
Based on the conductor layer thickness of the dielectric constant of substrate, formation conductor, the target impedance of the width of compatible portion central conductor and this measurement system, the gap size between central conductor and the first earth conductor and second earth conductor of compatible portion described in simulation calculation.
3. method for designing as claimed in claim 2, it is characterised in that utilize ADS software to carry out the simulation calculation of the gap size between central conductor and the first earth conductor and the second earth conductor.
4. method for designing as claimed in claim 1, it is characterized in that, the Electromagnetic Simulation that HFSS software carries out each conductor size of mismatch part is utilized to calculate so that the design size that each conductor size of mismatch part is this standard mismatch part corresponding when calculated standing-wave ratio is equal with target standing-wave ratio.
5. method for designing as claimed in claim 1, it is characterised in that the method farther includes
The width of calculated mismatch part central conductor and the known process limits of error are compared,
If the width of calculated mismatch part central conductor is more than the known process limits of error, then being confirmed as the width of mismatch part central conductor, the width of mismatch part the first earth conductor and the second earth conductor is equal to the width of compatible portion the first earth conductor and the second earth conductor.
6. method for designing as claimed in claim 1, it is characterised in that the method farther includes
By to width and the known process limits of error of mismatch part central conductor compare,
If the width of the mismatch part central conductor obtained is less than the known process limits of error, by reducing the described width assuming the first earth conductor and the second earth conductor, obtained the size of each conductor of mismatch part by simulation calculation according to the target standing-wave ratio of this standard.
7. the co-planar waveguide reflection amplitudes standard measuring system on sheet, this reflection amplitudes standard includes dielectric substrate, by the central conductor formed on the surface of described dielectric substrate be symmetrically located at the first earth conductor of central conductor both sides and transmission line that the second earth conductor is formed, it is characterized in that
Compatible portion that this transmission line includes being positioned at input and outfan and therebetween mismatch part,
The central conductor length of described mismatch part is 1/4th of this measurement system centre frequency corresponding wavelength,
The central conductor width of described mismatch part is less than the central conductor width of compatible portion.
8. co-planar waveguide reflection amplitudes standard as claimed in claim 7, it is characterised in that
The width of the central conductor of described compatible portion depends on the pin spacing of this measurement system probe,
Gap size between central conductor and the first earth conductor and second earth conductor of described compatible portion depends on the dielectric constant of substrate, forms the conductor layer thickness of conductor, the target impedance of the width of compatible portion central conductor and this measurement system.
9. one group of co-planar waveguide reflection amplitudes standard measuring system on sheet, in this group, each reflection amplitudes standard has different target standing-wave ratios, each standard includes dielectric substrate, by the central conductor formed on the surface of described dielectric substrate be symmetrically located at the first earth conductor of central conductor both sides and coplanar waveguide transmission line that the second earth conductor is formed, it is characterized in that, each transmission line includes
It is positioned at the compatible portion of input and outfan and therebetween mismatch part,
The central conductor length of described mismatch part is 1/4th of this measurement system centre frequency corresponding wavelength,
The central conductor width of described mismatch part less than the central conductor width of compatible portion, and
The width of the central conductor of described compatible portion depends on the pin spacing of this measurement system probe,
Gap size between central conductor and the first earth conductor and second earth conductor of described compatible portion depends on the dielectric constant of substrate, forms the conductor layer thickness of conductor, the target impedance of the width of compatible portion central conductor and this measurement system,
The width of the central conductor of described mismatch part is obtained and more than the known process limits of error by simulation calculation according to the target standing-wave ratio of this standard,
First earth conductor of described mismatch part and the width of the second earth conductor equal to or less than the width of described compatible portion the first earth conductor and the second earth conductor.
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| CN106707210A (en) * | 2016-11-24 | 2017-05-24 | 北京航空航天大学 | Traveling wave calibration method based on near-field probe spatial resolution of transmission line |
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| CN107870310A (en) * | 2017-09-30 | 2018-04-03 | 北京无线电计量测试研究所 | A kind of both-end port mismatch device design method and device |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106707210A (en) * | 2016-11-24 | 2017-05-24 | 北京航空航天大学 | Traveling wave calibration method based on near-field probe spatial resolution of transmission line |
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| CN107870310A (en) * | 2017-09-30 | 2018-04-03 | 北京无线电计量测试研究所 | A kind of both-end port mismatch device design method and device |
| CN107870310B (en) * | 2017-09-30 | 2020-01-21 | 北京无线电计量测试研究所 | Method and device for designing dual-port mismatch device |
| CN111025217A (en) * | 2019-12-27 | 2020-04-17 | 北京无线电计量测试研究所 | Waveguide inspection piece system |
| CN111025217B (en) * | 2019-12-27 | 2022-08-30 | 北京无线电计量测试研究所 | Waveguide inspection piece system |
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Application publication date: 20160720 |