CN106624371B - 一种在目标器件上形成图案化的石墨烯的方法 - Google Patents
一种在目标器件上形成图案化的石墨烯的方法 Download PDFInfo
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- CN106624371B CN106624371B CN201611243053.1A CN201611243053A CN106624371B CN 106624371 B CN106624371 B CN 106624371B CN 201611243053 A CN201611243053 A CN 201611243053A CN 106624371 B CN106624371 B CN 106624371B
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- graphene
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/361—Removing material for deburring or mechanical trimming
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
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- Optics & Photonics (AREA)
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- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Abstract
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201611243053.1A CN106624371B (zh) | 2016-12-29 | 2016-12-29 | 一种在目标器件上形成图案化的石墨烯的方法 |
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CN201611243053.1A CN106624371B (zh) | 2016-12-29 | 2016-12-29 | 一种在目标器件上形成图案化的石墨烯的方法 |
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Publication Number | Publication Date |
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CN106624371A CN106624371A (zh) | 2017-05-10 |
CN106624371B true CN106624371B (zh) | 2018-04-20 |
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CN201611243053.1A Active CN106624371B (zh) | 2016-12-29 | 2016-12-29 | 一种在目标器件上形成图案化的石墨烯的方法 |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109406586A (zh) * | 2017-08-18 | 2019-03-01 | 蓝思科技(长沙)有限公司 | 碳纳米管传感器的制作方法及其用途 |
CN109932867A (zh) * | 2017-12-15 | 2019-06-25 | 无锡格菲电子薄膜科技有限公司 | 石墨烯薄膜转移同时图案化的方法 |
CN108364859A (zh) * | 2018-02-11 | 2018-08-03 | 苏州华维纳纳米科技有限公司 | 一种采用激光直写的原子层刻蚀方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102568657A (zh) * | 2012-02-21 | 2012-07-11 | 友达光电股份有限公司 | 一种透明导电层的制造方法 |
CN102637584A (zh) * | 2012-04-20 | 2012-08-15 | 兰州大学 | 一种图形化石墨烯的转移制备方法 |
KR101174670B1 (ko) * | 2011-05-13 | 2012-08-17 | 한국화학연구원 | 그래핀 기반 소자에 응용 할 수 있는 패턴된 그래핀의 제조방법 |
KR101282867B1 (ko) * | 2012-03-28 | 2013-07-05 | (주)지니아텍 | 하이브리드 라디칼 플라즈마 그래핀 에칭 장치 |
CN103995619A (zh) * | 2014-06-13 | 2014-08-20 | 郑州巨顺佳电子科技有限公司 | 无边框触摸屏感应片及其制备方法 |
CN106148909A (zh) * | 2015-04-01 | 2016-11-23 | 南昌欧菲光学技术有限公司 | 一种在基材上图案化石墨烯的方法及用于所述方法的模板 |
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2016
- 2016-12-29 CN CN201611243053.1A patent/CN106624371B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101174670B1 (ko) * | 2011-05-13 | 2012-08-17 | 한국화학연구원 | 그래핀 기반 소자에 응용 할 수 있는 패턴된 그래핀의 제조방법 |
CN102568657A (zh) * | 2012-02-21 | 2012-07-11 | 友达光电股份有限公司 | 一种透明导电层的制造方法 |
KR101282867B1 (ko) * | 2012-03-28 | 2013-07-05 | (주)지니아텍 | 하이브리드 라디칼 플라즈마 그래핀 에칭 장치 |
CN102637584A (zh) * | 2012-04-20 | 2012-08-15 | 兰州大学 | 一种图形化石墨烯的转移制备方法 |
CN103995619A (zh) * | 2014-06-13 | 2014-08-20 | 郑州巨顺佳电子科技有限公司 | 无边框触摸屏感应片及其制备方法 |
CN106148909A (zh) * | 2015-04-01 | 2016-11-23 | 南昌欧菲光学技术有限公司 | 一种在基材上图案化石墨烯的方法及用于所述方法的模板 |
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Effective date of registration: 20190325 Address after: No. 518-5 Zhonghui Road, Standard Factory Building of Chang'an Industrial Park, Huishan Economic Development Zone, Wuxi City, Jiangsu Province, 214000 Co-patentee after: Wuxi Sixth Element Electronic Film Technology Co., Ltd. Patentee after: Wuxi Gefei Electronic Film Technology Co.,Ltd. Address before: 214174 No. 518-5 Zhonghui Road, Chang'an Industrial Park, Huishan Economic Development Zone, Wuxi City, Jiangsu Province Patentee before: Wuxi Gefei Electronic Film Technology Co.,Ltd. |
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Address after: No. 518-5 Zhonghui Road, Standard Factory Building of Chang'an Industrial Park, Huishan Economic Development Zone, Wuxi City, Jiangsu Province, 214000 Patentee after: WUXI GRAPHENE FILM Co.,Ltd. Patentee after: Changzhou sixth element Semiconductor Co., Ltd Address before: No. 518-5 Zhonghui Road, Standard Factory Building of Chang'an Industrial Park, Huishan Economic Development Zone, Wuxi City, Jiangsu Province, 214000 Patentee before: WUXI GRAPHENE FILM Co.,Ltd. Patentee before: Wuxi sixth element electronic film technology Co., Ltd |
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