CN106556911A - A kind of independent support unit and optical element supporting device - Google Patents
A kind of independent support unit and optical element supporting device Download PDFInfo
- Publication number
- CN106556911A CN106556911A CN201611058938.4A CN201611058938A CN106556911A CN 106556911 A CN106556911 A CN 106556911A CN 201611058938 A CN201611058938 A CN 201611058938A CN 106556911 A CN106556911 A CN 106556911A
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- China
- Prior art keywords
- glue
- support unit
- optical element
- independent support
- line
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
The invention discloses a kind of independent support unit and optical element supporting device.The independent support unit of the present invention includes a kind of independent support unit, and the independent support unit includes：Glue-line, glue-line bearing, flexible member, adjusting screw；The adjusting screw is arranged on the glue-line bearing and stretches out from the glue-line bearing；The flexible member is set on the part that the adjusting screw is stretched out from the glue-line bearing.The invention also discloses a kind of optical element supporting device including the independent support unit.The independent support unit and optical element supporting device can realize that active surface shape is adjusted, and compensate impact of the extraneous factor to optical component surface shape.
Description
Technical field
The present invention relates to optical field, more particularly to a kind of independent support unit and optical element supporting device.
Background technology
With the fast-developing and application of high accuracy precision optical instrument, optical system imaging quality is required also increasingly
Height, especially extreme ultraviolet lithography (EUVL) apply, operation wavelength is the wave band of 13～14nm, thus to optical element add
Work, detection, support debug etc. technical requirements require than traditional optical system it is higher.Extreme ultraviolet lithography system will reach diffraction pole
The requirement of limit resolution ratio, system wavefront deviation are less than λ/14, and for six mirror systems, single reflecting surface face shape requires to reach
0.20nmrms.In the case where so extreme harsh face shape is required, the disturbing factor opposite shape in assembling process affects to become very tight
Weight.
The content of the invention
It is contemplated that overcoming the defect that prior art is present, the present invention to employ the following technical solutions：
On the one hand, the present invention provides a kind of independent support unit, and the independent support unit includes：Glue-line, glue-line bearing,
Flexible member, adjusting screw；The adjusting screw is arranged on the glue-line bearing and stretches out from the glue-line bearing；It is described
Flexible member is set on the part that the adjusting screw is stretched out from the glue-line bearing.
In some embodiments, the flexible member is butterfly spring
In some embodiments, through hole on the glue-line bearing, is provided with, the through hole is arranged in the glue-line bearing
The heart.
In some embodiments, the adjusting screw is two, and the relatively described glue-line bearing center pair of the adjusting screw
Claim.
In some embodiments, the glue-line is arranged on the glue-line bearing by viscose glue.
On the other hand, the present invention provides a kind of optical element supporting device, and the optical element supporting device is included as front
Described independent support unit, and optical element and support plate；The opposite side of the glue-line of the independent support unit is arranged on
On the optical element；Match somebody with somebody with the support plate part that the adjusting screw of the independent support unit is stretched out from glue-line bearing
Close, and by the flexible member pressure holding between the support plate and the glue-line bearing.
In some embodiments, the independent support unit is at least three, and the independent support unit is in institute's support plate
On be uniformly arranged.
In some embodiments, the independent support unit is 6, and the independent support unit is uniform in institute's support plate
Arrange.
In some embodiments, screw hole is provided with the support plate and is coordinated with the supporting screw.
In some embodiments, the glue-line is arranged on the optical element by viscose glue.
The beneficial effects of the present invention is：The independent support unit and optical element supporting device that the present invention is provided can
Realize that active surface shape is adjusted, compensate impact of the extraneous factor to optical component surface shape, so as to improve the precision of optical element.
Description of the drawings
Fig. 1 is the structural representation of the optical element supporting device according to one embodiment of the invention；
Fig. 2 is the optical element supporting device sectional view according to another embodiment of the present invention；
Fig. 3 is the zoomed-in view of part A in Fig. 2.
Specific embodiment
In order that the objects, technical solutions and advantages of the present invention become more apparent, below in conjunction with accompanying drawing and it is embodied as
Example, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only to explain this
It is bright, and be not construed as limiting the invention.
The independent support unit and optical element supporting device of the embodiment of the present invention are entered below with reference to Fig. 1 to Fig. 3
Row is described in detail.
As shown in Figure 1 to Figure 3, the present invention provides a kind of independent support unit 3, and the independent support unit 3 includes：Glue-line
31st, glue-line bearing 32, flexible member 33, adjusting screw 34；The adjusting screw 34 be arranged on the glue-line bearing 32 and from
Stretch out on the glue-line bearing 32；The flexible member 33 is set in the adjusting screw 34 and stretches out from the glue-line bearing 32
Part on.
In some embodiments, the flexible member 33 is butterfly spring.
In some embodiments, through hole 35 on the glue-line bearing 32, is provided with, the through hole 35 is arranged on the glue-line
The center of seat 32.
In some embodiments, the adjusting screw 34 is two, and the glue-line bearing 32 relatively of the adjusting screw 34
Central Symmetry.
In some embodiments, the glue-line 31 is arranged on the glue-line bearing 32 by viscose glue.
On the other hand, the present invention provides a kind of optical element supporting device 100, and the optical element supporting device 100 is wrapped
Include foregoing independent support unit 3, and optical element 1 and support plate 2；The glue-line 31 of the independent support unit 3
Opposite side is arranged on the optical element 1；What the adjusting screw 34 of the independent support unit 3 was stretched out from glue-line bearing 32
Part is coordinated with the support plate 2, and by 33 pressure holding of the flexible member the support plate 3 and the glue-line bearing 32 it
Between.
In some embodiments, the independent support unit 3 is at least three, and the independent support unit 3 is being supported
It is uniformly arranged on disk 2.
In some embodiments, the independent support unit 3 is 6, and the independent support unit 3 is in institute's support plate 2
It is uniformly arranged.
In some embodiments, screw hole is provided with the support plate 2 and is coordinated with the supporting screw 34.
In some embodiments, the glue-line 31 is arranged on the optical element 1 by viscose glue.
It is specifically described as a example by being provided with six independent support units, 3 optics support meanss below.
As shown in Figures 1 to 3, between optical element 1 and support plate 2, six are provided with and support optics are uniformly arranged on by 60 °
The equally distributed independence being made up of glue-line 31, glue-line bearing 32, butterfly spring 33, adjusting screw 34 of circumference of element
Support unit 3.In each independent support unit 3,31 side of glue-line is bonded on optical element 1, and opposite side is bonded in glue-line
On seat 32, adjusting screw 34 and butterfly spring 33 are pressed to glue-line bearing 32 in support plate 2, can by reversing adjusting screw 2
To realize adjustment 31 thickness of glue-line.
Its overall free degree is analyzed, be made up of glue-line 31, glue-line bearing 32, butterfly spring 33, adjusting screw 34
Independent support unit 3 provides the constraint of vertical direction, and at six, independence support unit 3 is overall provides six-freedom degree constraint, completes
Accurate constraint and support function.For each strong point local in six strong points, as shown in figure 3, along optical element 1
Radial rotating direction (Mr directions), along optical element axial rotation direction (Mz directions), along the tangential rotation direction (Mt of optical element
Direction) structural flexibility of the three degree of freedom by glue-line 31 on corresponding each direction realizing, along optical element radial direction translation
Direction (Fr directions) free degree is by an independence being made up of glue-line 31, glue-line bearing 32, butterfly spring 33, adjusting screw 34
3 active accommodation of support unit is realized.
The beneficial effects of the present invention is：The independent support unit and optical element supporting device that the present invention is provided can
Realize that active surface shape is adjusted, compensate impact of the extraneous factor to optical component surface shape, so as to improve the precision of optical element.
In describing the invention, it is to be understood that term " " center ", " longitudinal direction ", " horizontal ", " length ", " width ",
" thickness ", " on ", D score, "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outward ", " up time
The orientation or position relationship of the instruction such as pin ", " counterclockwise ", " axial direction ", " radial direction ", " circumference " be based on orientation shown in the drawings or
Position relationship, is for only for ease of the description present invention and simplifies description, rather than indicates or imply that the device or element of indication must
With specific orientation, with specific azimuth configuration and operation, therefore must be not considered as limiting the invention.
Additionally, term " first ", " second " are only used for describing purpose, and it is not intended that indicating or implying relative importance
Or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can express or
Implicitly include at least one this feature.
In the present invention, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection ", " fixation " etc.
Term should be interpreted broadly, for example, it may be fixedly connected, or be detachably connected, or it is integral；Can be that machinery connects
Connect, or electrically connect；Can be joined directly together, it is also possible to be indirectly connected to by intermediary, can be in two elements
The connection in portion or the interaction relationship of two elements, unless otherwise clearly restriction.For one of ordinary skill in the art
For, above-mentioned term concrete meaning in the present invention can be understood as the case may be.
In the present invention, unless otherwise clearly defined and limited, fisrt feature second feature " on " or D score can be with
It is the first and second feature directly contacts, or the first and second features is by intermediary mediate contact.And, fisrt feature exists
Second feature " on ", " top " and " above " but fisrt feature are directly over second feature or oblique upper, or be merely representative of
Fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " lower section " and " below " can be
One feature is immediately below second feature or obliquely downward, or is merely representative of fisrt feature level height less than second feature.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
Example ", or the description of " some examples " etc. mean specific features with reference to the embodiment or example description, structure, material or spy
Point is contained at least one embodiment or example of the present invention.In this manual, to the schematic representation of above-mentioned term not
Identical embodiment or example must be directed to.And, the specific features of description, structure, material or feature can be with office
Combined in one or more embodiments or example in an appropriate manner.Additionally, in the case of not conflicting, the skill of this area
The feature of the different embodiments or example described in this specification and different embodiments or example can be tied by art personnel
Close and combine.
Although embodiments of the invention have been shown and described above, it is to be understood that above-described embodiment is example
Property, it is impossible to limitation of the present invention is interpreted as, one of ordinary skill in the art within the scope of the invention can be to above-mentioned
Embodiment is changed, changes, replacing and modification.
The specific embodiment of present invention described above, does not constitute limiting the scope of the present invention.Any basis
Various other corresponding change and deformation done by the technology design of the present invention, should be included in the guarantor of the claims in the present invention
In the range of shield.
Claims (10)
1. a kind of independent support unit, it is characterised in that include：
Glue-line, glue-line bearing, flexible member, adjusting screw；
The side of the glue-line is arranged on the glue-line bearing；
The adjusting screw is arranged on the glue-line bearing and stretches out from the glue-line bearing；
The flexible member is set on the part that the adjusting screw is stretched out from the glue-line bearing.
2. independent support unit as claimed in claim 1, it is characterised in that the flexible member is butterfly spring.
3. independent support unit as claimed in claim 1, it is characterised in that be provided with through hole on the glue-line bearing, it is described
Through hole is arranged on the center of the glue-line bearing.
4. independent support unit as claimed in claim 1, it is characterised in that the adjusting screw is two, and the adjustment
The relatively described glue-line bearing Central Symmetry of screw.
5. independent support unit as claimed in claim 1, it is characterised in that the glue-line is arranged on the glue-line by viscose glue
On bearing.
6. a kind of optical element supporting device, it is characterised in that including independent support unit as claimed in claim 1, and
Optical element and support plate；
The opposite side of the glue-line of the independent support unit is arranged on the optical element；
The part that the adjusting screw of the independent support unit is stretched out from glue-line bearing is coordinated with the support plate, and will be described
Flexible member pressure holding is between the support plate and the glue-line bearing.
7. optical element supporting device as claimed in claim 6, it is characterised in that the independent support unit is at least three
It is individual, and the independent support unit is uniformly arranged in institute's support plate.
8. optical element supporting device as claimed in claim 7, it is characterised in that the independent support unit is 6, and institute
State independent support unit to be uniformly arranged in institute's support plate.
9. optical element supporting device as claimed in claim 6, it is characterised in that be provided with the support plate screw hole with
The supporting screw is coordinated.
10. optical element supporting device as claimed in claim 6, it is characterised in that the glue-line is arranged on institute by viscose glue
State on optical element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611058938.4A CN106556911B (en) | 2016-11-25 | 2016-11-25 | A kind of independent support unit and optical element supporting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611058938.4A CN106556911B (en) | 2016-11-25 | 2016-11-25 | A kind of independent support unit and optical element supporting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106556911A true CN106556911A (en) | 2017-04-05 |
| CN106556911B CN106556911B (en) | 2019-04-23 |
Family
ID=58445078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611058938.4A Active CN106556911B (en) | 2016-11-25 | 2016-11-25 | A kind of independent support unit and optical element supporting device |
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| Country | Link |
|---|---|
| CN (1) | CN106556911B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107907958A (en) * | 2017-11-24 | 2018-04-13 | 中国科学院长春光学精密机械与物理研究所 | A kind of device for being used to support optical element |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62175933A (en) * | 1986-01-29 | 1987-08-01 | Olympus Optical Co Ltd | Inclination adjusting device for actuator |
| CN105403154A (en) * | 2015-12-21 | 2016-03-16 | 中国科学院长春光学精密机械与物理研究所 | Support apparatus capable of realizing active surface shape control of optical element |
| CN105423989A (en) * | 2015-12-21 | 2016-03-23 | 中国科学院长春光学精密机械与物理研究所 | Flexible supporting device of high-precision surface shape detection of optical component |
| CN105425389A (en) * | 2015-12-21 | 2016-03-23 | 中国科学院长春光学精密机械与物理研究所 | Multi-point flexible supporting device allowing realization of active surface shape adjustment |
| CN105467544A (en) * | 2015-12-21 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | Multi-point flexible supporting device used for high-precision optical component |
| CN105467545A (en) * | 2015-12-21 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | Optical component supporting device with surface shape adjustment function |
-
2016
- 2016-11-25 CN CN201611058938.4A patent/CN106556911B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62175933A (en) * | 1986-01-29 | 1987-08-01 | Olympus Optical Co Ltd | Inclination adjusting device for actuator |
| CN105403154A (en) * | 2015-12-21 | 2016-03-16 | 中国科学院长春光学精密机械与物理研究所 | Support apparatus capable of realizing active surface shape control of optical element |
| CN105423989A (en) * | 2015-12-21 | 2016-03-23 | 中国科学院长春光学精密机械与物理研究所 | Flexible supporting device of high-precision surface shape detection of optical component |
| CN105425389A (en) * | 2015-12-21 | 2016-03-23 | 中国科学院长春光学精密机械与物理研究所 | Multi-point flexible supporting device allowing realization of active surface shape adjustment |
| CN105467544A (en) * | 2015-12-21 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | Multi-point flexible supporting device used for high-precision optical component |
| CN105467545A (en) * | 2015-12-21 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | Optical component supporting device with surface shape adjustment function |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107907958A (en) * | 2017-11-24 | 2018-04-13 | 中国科学院长春光学精密机械与物理研究所 | A kind of device for being used to support optical element |
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| Publication number | Publication date |
|---|---|
| CN106556911B (en) | 2019-04-23 |
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