CN105425389A - Multi-point flexible supporting device allowing realization of active surface shape adjustment - Google Patents
Multi-point flexible supporting device allowing realization of active surface shape adjustment Download PDFInfo
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- CN105425389A CN105425389A CN201510967159.5A CN201510967159A CN105425389A CN 105425389 A CN105425389 A CN 105425389A CN 201510967159 A CN201510967159 A CN 201510967159A CN 105425389 A CN105425389 A CN 105425389A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
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- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
A multi-point flexible supporting device allowing realization of active surface shape adjustment belongs to the technical field of precise supporting of high-precision optical elements and aims to solve problems in the prior art that interference factors during assembly will seriously influence surface shapes, a friction coefficient is big, and ultrahigh-precision surface shape requirements cannot be satisfied. The multi-point flexible supporting device allowing the realization of the active surface shape adjustment provided by the invention comprises bosses, n groups of main flexible supporting structure units, n groups of assistant flexible supporting structure units and a supporting, wherein circumferences of the 2n bosses are uniformly distributed on the side wall of an optical element, the 2n bosses on the side wall of the optical element are respectively firmly connected to the supporting disk by the n groups of main flexible supporting structure units and the n groups of assistant flexible supporting structure units, and the n group of main flexible supporting structure units and the n groups of assistant flexible supporting structure units are disposed in a staggered manner; and the main flexible supporting structure units provide restraints in the vertical direction and along a side face tangential direction of the optical element, and the assistant flexible supporting structure units provide restraints along the vertical direction of the optical element.
Description
Technical field
The invention belongs to the accurate support technology field of high-precision optical element, be specifically related to a kind of multi-point flexibly bracing or strutting arrangement that can realize the adjustment of active surface shape.
Background technology
Along with fast development and the application of high precision precision optical instrument, require also more and more higher to optical system imaging quality, especially extreme ultraviolet lithography EUVL applies, the technology such as operation wavelength is the wave band of 13 ~ 14nm, and optical element is processed, detect, support is debug require higher than traditional optical system.Extreme ultraviolet etching system will reach the requirement of resolution of diffraction, and system wavefront deviation is less than λ/14, and for six mirror systems, single reflecting surface face shape requires to reach 0.20nmrms.Under so extreme harsh face shape requires, disturbing factor opposite shape impact in assembling process becomes very serious, the solution of general employing reduces the friction factor in assembling process between surface of contact, as lubricating layers such as Contact Pair plated surface molybdenum disulfide, reduce the perturbed force introduced in assembling process thus reduce assembling process to the impact of final face shape.Even if but like this, the magnitude of friction factor is also difficult to meet the shape requirement of superhigh precision face.
Summary of the invention
The object of the invention is to propose a kind of multi-point flexibly bracing or strutting arrangement that can realize the adjustment of active surface shape, the disturbing factor opposite shape impact solved in the assembling process of prior art existence is serious, and friction factor is large, can not meet the problem that superhigh precision face shape requires.
For achieving the above object, a kind of multi-point flexibly bracing or strutting arrangement that can realize the adjustment of active surface shape of the present invention comprises boss, the main flexible support structure unit of n group, n group auxiliary flexible supporting construction unit and supporting disk;
2n described boss circumference uniform distribution is on optical element sidewall, 2n boss on optical element sidewall is fixedly connected with supporting disk with n group auxiliary flexible supporting construction unit respectively by the main flexible support structure unit of n group, and the main flexible support structure unit of described n group and n group auxiliary flexible supporting construction unit are crisscross arranged; Described main flexible support structure unit provides vertical direction and the constraint along optical element side tangential direction, and described auxiliary flexible supporting construction unit provides the constraint along optical element vertical direction.
Described main flexible support structure unit provides vertical direction and is specially along the constraint of optical element side tangential direction: described main flexible support structure unit comprises main support rim pressing plate, main fulcrum ball, main support rim clamp nut, main supporting flexible supportive body structure and main support hold-down nut, boss is pressed in main supporting flexible supportive body structure by main support rim pressing plate and main support rim clamp nut, contacted by main fulcrum ball between described boss and main supporting flexible supportive body structure, main supporting flexible supportive body structure is fixed on described supporting disk by main support hold-down nut.
Described main supporting flexible supportive body structure comprises cruciform flexible hinge structure and V grooved supports; Described main supporting flexible supportive body structure comprises the upper end horizontal part of integral type, center vertical portion and lower end horizontal part; Described V grooved supports the upper end being arranged on upper end horizontal part, V grooved is supported and is contacted with described boss by described main fulcrum ball, described cruciform flexible hinge structure refers to that top and bottom, center vertical portion have the groove structure of right-angled intersection, described groove structure comprises two symmetrically arranged grooves, described groove comprises vertical portion and horizontal component, and the horizontal component of groove is arranged on center vertical portion and horizontal part junction, lower end.
Described auxiliary flexible supporting construction unit provides the constraint along optical element vertical direction to be specially: boss is pressed in supplemental support flexible support agent structure by supplemental support boss pressing plate and supplemental support boss clamp nut, contacted by supplemental support ball between described boss and supplemental support flexible support agent structure, supplemental support flexible support agent structure is pressed on supporting disk by supplemental support position adjusting nut, is provided with butterfly spring between supplemental support flexible support agent structure and supporting disk.
Supplemental support flexible support agent structure comprises lamellar body flexible structure in parallel and plane supports; Described supplemental support flexible support agent structure comprises the upper end horizontal part of integral type, by-level portion and lower end horizontal part; Described plane supports the upper end being arranged on upper end horizontal part, plane is supported and is contacted with described boss by described main fulcrum ball, described lamellar body flexible structure in parallel refers on the left of by-level portion and right side has groove structure, described groove structure comprises four symmetrically arranged grooves, described groove structure forms four horizontally disposed flexible piece structures, connection upper end, one end horizontal part of lamellar body flexibility knot in parallel, the other end connects lower end horizontal part.
The value of the quantity n of described main flexible support structure unit and auxiliary flexible supporting construction unit is: n >=3.
The value 3 of the quantity n of described main flexible support structure unit and auxiliary flexible supporting construction unit.
Beneficial effect of the present invention is: a kind of multi-point flexibly bracing or strutting arrangement that can realize the adjustment of active surface shape of the present invention is provided with six along supporting the equally distributed flexible support structure unit of minute surface circumference between support and optical element, wherein comprise three main flexible support structure unit, three auxiliary flexible supporting construction unit.Main flexible support structure unit adopts cruciform flexible hinge structure and V grooved support combinations to realize basic support function.The single V groove structure of this main flexible support structure unit realizes two place's point cantact with the single boss in optical element side by steel ball and coordinates, main flexible support structure unit provides vertical direction and the constraint along optical element side this both direction of tangential direction, cruciform flexible hinge structure is responsible for the extra internal stress of absorption three rotation directions, and three main flexible support structure unit realize the six degree of freedom constraint of optical element; Auxiliary flexible supporting construction unit adopts lamellar body flexible structure in parallel to realize basic support function.The top planes of this auxiliary flexible supporting construction unit and optical element side boss realize a single point by steel ball and contact and coordinate, auxiliary flexible supporting construction unit provides the constraint along optical element vertical direction, lamellar body flexible structure in parallel is responsible for absorbing along optical element vertical direction translational degree of freedom, along optical element tangential direction rotational freedom, element internal stress along optical element radially rotational freedom three directions, the part that multiple spot distribution supports Planar Mechanisms adopts auxiliary flexible supporting construction cell position adjustment function to compensate.
A kind of multi-point flexibly bracing or strutting arrangement that can realize the adjustment of active surface shape of the present invention can realize the support effect consistent with desirable multi-point support structure; Main flexible support structure unit can realize the accurate location of element, and auxiliary flexible supporting construction unit compensates in conjunction with flexible structure and absorbs associated freedom direction optical element internal stress, ensures by the realization of supporting optical component surface figure accuracy; Because main supporting flexible supportive body structure and supplemental support flexible support agent structure have employed flexible structure, associated freedom direction optical element thermal stress also can transform in order to flexible structure distortional stress, is affected little by the optical element supported factor of being heated.
Accompanying drawing explanation
Fig. 1 is desirable multi-point support support structure view;
Fig. 2 is optical element and lug boss position structural representation;
Fig. 3 is a kind of multi-point flexibly support device structure vertical view that can realize the adjustment of active surface shape of the present invention;
Fig. 4 is a kind of multi-point flexibly support device structure side view that can realize the adjustment of active surface shape of the present invention;
Fig. 5 is a kind of partial sectional view that can realize main strong point place in the multi-point flexibly bracing or strutting arrangement of active surface shape adjustment of the present invention;
Fig. 6 is a kind of partial sectional view that can realize supplemental support point place in the multi-point flexibly bracing or strutting arrangement of active surface shape adjustment of the present invention;
Wherein: 1, optical element, 2, boss, 3, main flexible support structure unit, 4, auxiliary flexible supporting construction unit, 5, supporting disk, 6, main supporting flexible supportive body structure, 7, main support rim pressing plate, 8, main fulcrum ball, 9, main support rim clamp nut, 10, main support hold-down nut, 11, supplemental support flexible support agent structure, 12, supplemental support boss pressing plate, 13, supplemental support ball, 14, butterfly spring, 15, supplemental support boss clamp nut, 16, supplemental support position adjusting nut.
Embodiment
Below in conjunction with accompanying drawing, embodiments of the present invention are described further.
See accompanying drawing 1, accompanying drawing 2, accompanying drawing 3, accompanying drawing 4, accompanying drawing 5 and accompanying drawing 6, a kind of multi-point flexibly bracing or strutting arrangement that can realize the adjustment of active surface shape of the present invention comprises boss 2, the main flexible support structure unit 3 of n group, n group auxiliary flexible supporting construction unit 4 and supporting disk 5;
2n described boss 2 circumference uniform distribution is on optical element 1 sidewall, 2n boss 2 on optical element 1 sidewall is fixedly connected with supporting disk 5 with n group auxiliary flexible supporting construction unit 4 respectively by the main flexible support structure unit 3 of n group, and the main flexible support structure unit 3 of described n group and n group auxiliary flexible supporting construction unit 4 are crisscross arranged; Described main flexible support structure unit 3 provides vertical direction and the constraint along optical element 1 side tangential direction, and described auxiliary flexible supporting construction unit 4 provides the constraint along optical element 1 vertical direction.
Described main flexible support structure unit 3 provides vertical direction and is specially along the constraint of optical element 1 side tangential direction: described main flexible support structure unit 3 comprises main support rim pressing plate 7, main fulcrum ball 8, main support rim clamp nut 9, main supporting flexible supportive body structure 6 and main support hold-down nut 10, boss 2 is pressed in main supporting flexible supportive body structure 6 by main support rim pressing plate 7 and main support rim clamp nut 9, contacted by main fulcrum ball 8 between described boss 2 and main supporting flexible supportive body structure 6, main supporting flexible supportive body structure 6 is fixed on described supporting disk 5 by main support hold-down nut 10.
Described main supporting flexible supportive body structure 6 comprises cruciform flexible hinge structure and V grooved supports; Described main supporting flexible supportive body structure 6 comprises the upper end horizontal part of integral type, center vertical portion and lower end horizontal part; Described V grooved supports the upper end being arranged on upper end horizontal part, V grooved is supported and is contacted with described boss 2 by described main fulcrum ball 8, described cruciform flexible hinge structure refers to that top and bottom, center vertical portion have the groove structure of right-angled intersection, described groove structure comprises two symmetrically arranged grooves, described groove comprises vertical portion and horizontal component, and the horizontal component of groove is arranged on center vertical portion and horizontal part junction, lower end.
Described auxiliary flexible supporting construction unit 4 provides the constraint along optical element 1 vertical direction to be specially: boss 2 is pressed in supplemental support flexible support agent structure 11 by supplemental support boss pressing plate 12 and supplemental support boss clamp nut 15, contacted by supplemental support ball 13 between described boss 2 and supplemental support flexible support agent structure 11, supplemental support flexible support agent structure 11 is pressed on supporting disk 5 by supplemental support position adjusting nut 16, is provided with butterfly spring 14 between supplemental support flexible support agent structure 11 and supporting disk 5.
Supplemental support flexible support agent structure 11 comprises lamellar body flexible structure in parallel and plane supports; Described supplemental support flexible support agent structure 11 comprises the upper end horizontal part of integral type, by-level portion and lower end horizontal part; Described plane supports the upper end being arranged on upper end horizontal part, plane is supported and is contacted with described boss 2 by described main fulcrum ball 13, described lamellar body flexible structure in parallel refers on the left of by-level portion and right side has groove structure, described groove structure comprises four symmetrically arranged grooves, described groove structure forms four horizontally disposed flexible piece structures, connection upper end, one end horizontal part of lamellar body flexibility knot in parallel, the other end connects lower end horizontal part.
The value of the quantity n of described main flexible support structure unit 3 and auxiliary flexible supporting construction unit 4 is: n >=3.
The value 3 of the quantity n of described main flexible support structure unit 3 and auxiliary flexible supporting construction unit 4.
A kind of Degree of Freedom Analysis of multi-point flexibly bracing or strutting arrangement entirety that can realize the adjustment of active surface shape of the present invention: the main flexible support structure unit 3 that often overlaps be made up of boss 2, main support rim pressing plate 7, main support rim clamp nut 9, main fulcrum ball 8, main supporting flexible supportive body structure 6, main support hold-down nut 10 provides vertical direction and along the constraint in the tangential direction of minute surface side, the main flexible support structure unit 3 of three covers limits six-freedom degree altogether respectively.
By boss 2, supplemental support boss pressing plate 12, supplemental support boss clamp nut 15, supplemental support ball 13, supplemental support flexible support agent structure 11, butterfly spring 14, what supplemental support position adjusting nut 16 formed often overlaps the constraint that auxiliary flexible supporting construction unit 4 provides vertical direction one degree of freedom respectively, three cover auxiliary flexible supporting construction unit 4 limit three degree of freedom altogether, because the main flexible support structure unit 3 of three covers has limited complete six-freedom degree, so this three degree of freedom belongs to the part of Planar Mechanisms, this part is carried out the adjustment of auxiliary flexible supporting construction unit 4 position by rotation supplemental support position adjusting nut 16 and is compensated.
Claims (7)
1. one kind can realize the multi-point flexibly bracing or strutting arrangement of active surface shape adjustment, it is characterized in that, comprise boss (2), the main flexible support structure unit (3) of n group, n group auxiliary flexible supporting construction unit (4) and supporting disk (5);
2n described boss (2) circumference uniform distribution is on optical element (1) sidewall, 2n boss (2) on optical element (1) sidewall is fixedly connected with supporting disk (5) with n group auxiliary flexible supporting construction unit (4) respectively by the main flexible support structure unit (3) of n group, and the main flexible support structure unit (3) of described n group and n group auxiliary flexible supporting construction unit (4) are crisscross arranged; Described main flexible support structure unit (3) provides vertical direction and the constraint along optical element (1) side tangential direction, and described auxiliary flexible supporting construction unit (4) provides the constraint along optical element (1) vertical direction.
2. a kind of multi-point flexibly bracing or strutting arrangement that can realize the adjustment of active surface shape according to claim 1, it is characterized in that, described main flexible support structure unit (3) provides vertical direction and is specially along the constraint of optical element (1) side tangential direction: described main flexible support structure unit (3) comprises main support rim pressing plate (7), main fulcrum ball (8), main support rim clamp nut (9), main supporting flexible supportive body structure (6) and main support hold-down nut (10), boss (2) is pressed on main supporting flexible supportive body structure (6) by main support rim pressing plate (7) and main support rim clamp nut (9), by main fulcrum ball (8) contact between described boss (2) and main supporting flexible supportive body structure (6), main supporting flexible supportive body structure (6) is fixed on described supporting disk (5) by main support hold-down nut (10).
3. a kind of multi-point flexibly bracing or strutting arrangement that can realize the adjustment of active surface shape according to claim 2, is characterized in that, described main supporting flexible supportive body structure (6) comprises cruciform flexible hinge structure and V grooved supports; Described main supporting flexible supportive body structure (6) comprises the upper end horizontal part of integral type, center vertical portion and lower end horizontal part; Described V grooved supports the upper end being arranged on upper end horizontal part, V grooved is supported and is contacted with described boss (2) by described main fulcrum ball (8), described cruciform flexible hinge structure refers to that top and bottom, center vertical portion have the groove structure of right-angled intersection, described groove structure comprises two symmetrically arranged grooves, described groove comprises vertical portion and horizontal component, and the horizontal component of groove is arranged on center vertical portion and horizontal part junction, lower end.
4. a kind of multi-point flexibly bracing or strutting arrangement that can realize the adjustment of active surface shape according to claim 1, it is characterized in that, described auxiliary flexible supporting construction unit (4) provides the constraint along optical element (1) vertical direction to be specially: boss (2) is pressed in supplemental support flexible support agent structure (11) by supplemental support boss pressing plate (12) and supplemental support boss clamp nut (15), by supplemental support ball (13) contact between described boss (2) and supplemental support flexible support agent structure (11), supplemental support flexible support agent structure (11) is pressed on supporting disk (5) by supplemental support position adjusting nut (16), butterfly spring (14) is provided with between supplemental support flexible support agent structure (11) and supporting disk (5).
5. a kind of multi-point flexibly bracing or strutting arrangement that can realize the adjustment of active surface shape according to claim 4, is characterized in that, supplemental support flexible support agent structure (11) comprises lamellar body flexible structure in parallel and plane supports; Described supplemental support flexible support agent structure (11) comprises the upper end horizontal part of integral type, by-level portion and lower end horizontal part; Described plane supports the upper end being arranged on upper end horizontal part, plane is supported and is contacted with described boss (2) by described main fulcrum ball (13), described lamellar body flexible structure in parallel refers on the left of by-level portion and right side has groove structure, described groove structure comprises four symmetrically arranged grooves, described groove structure forms four horizontally disposed flexible piece structures, connection upper end, one end horizontal part of sheet body structure, the other end connects lower end horizontal part.
6. a kind of multi-point flexibly bracing or strutting arrangement that can realize the adjustment of active surface shape according to claim 1, it is characterized in that, the value of the quantity n of described main flexible support structure unit (3) and auxiliary flexible supporting construction unit (4) is: n >=3.
7. a kind of multi-point flexibly bracing or strutting arrangement that can realize the adjustment of active surface shape according to claim 6, is characterized in that, the value 3 of the quantity n of described main flexible support structure unit (3) and auxiliary flexible supporting construction unit (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201510967159.5A CN105425389B (en) | 2015-12-21 | 2015-12-21 | It is a kind of to realize the multi-point flexibly support meanss of active surface shape adjustment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510967159.5A CN105425389B (en) | 2015-12-21 | 2015-12-21 | It is a kind of to realize the multi-point flexibly support meanss of active surface shape adjustment |
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| CN105425389A true CN105425389A (en) | 2016-03-23 |
| CN105425389B CN105425389B (en) | 2017-10-31 |
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Cited By (5)
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| CN105834775A (en) * | 2016-06-15 | 2016-08-10 | 沈阳飞机工业（集团）有限公司 | Multi-point changeable-supporting-height combined positioning supporting mechanism and supporting method thereof |
| CN106556911A (en) * | 2016-11-25 | 2017-04-05 | 中国科学院长春光学精密机械与物理研究所 | A kind of independent support unit and optical element supporting device |
| CN110634372A (en) * | 2019-09-29 | 2019-12-31 | 中国科学院长春光学精密机械与物理研究所 | Optical system installation and adjustment strategy verification system |
| CN114198389A (en) * | 2021-11-15 | 2022-03-18 | 哈尔滨工业大学 | Flexible hinge assembly for micro-rotation of workpiece table |
| CN114526406A (en) * | 2022-02-14 | 2022-05-24 | 中国电子科技集团公司第四十一研究所 | Self-aligning spherical support device and method for laser outer cavity base |
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Cited By (9)
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| CN105834775A (en) * | 2016-06-15 | 2016-08-10 | 沈阳飞机工业（集团）有限公司 | Multi-point changeable-supporting-height combined positioning supporting mechanism and supporting method thereof |
| CN105834775B (en) * | 2016-06-15 | 2018-01-19 | 沈阳飞机工业（集团）有限公司 | Multiple spot becomes the high integrated positioning supporting mechanism of branch and its method for supporting |
| CN106556911A (en) * | 2016-11-25 | 2017-04-05 | 中国科学院长春光学精密机械与物理研究所 | A kind of independent support unit and optical element supporting device |
| CN106556911B (en) * | 2016-11-25 | 2019-04-23 | 中国科学院长春光学精密机械与物理研究所 | A kind of independent support unit and optical element supporting device |
| CN110634372A (en) * | 2019-09-29 | 2019-12-31 | 中国科学院长春光学精密机械与物理研究所 | Optical system installation and adjustment strategy verification system |
| CN114198389A (en) * | 2021-11-15 | 2022-03-18 | 哈尔滨工业大学 | Flexible hinge assembly for micro-rotation of workpiece table |
| CN114198389B (en) * | 2021-11-15 | 2022-07-05 | 哈尔滨工业大学 | Flexible hinge assembly for micro-rotation of workpiece table |
| CN114526406A (en) * | 2022-02-14 | 2022-05-24 | 中国电子科技集团公司第四十一研究所 | Self-aligning spherical support device and method for laser outer cavity base |
| CN114526406B (en) * | 2022-02-14 | 2024-03-22 | 中国电子科技集团公司第四十一研究所 | Device and method for supporting self-aligning spherical surface of laser external cavity base |
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