CN105425389A - Multi-point flexible supporting device allowing realization of active surface shape adjustment - Google Patents
Multi-point flexible supporting device allowing realization of active surface shape adjustment Download PDFInfo
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- 230000003287 optical effect Effects 0.000 claims abstract description 41
- 238000003825 pressing Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 description 7
- 230000035882 stress Effects 0.000 description 4
- 238000001900 extreme ultraviolet lithography Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- BWGNESOTFCXPMA-UHFFFAOYSA-N Dihydrogen disulfide Chemical compound SS BWGNESOTFCXPMA-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
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Abstract
Description
技术领域 technical field
本发明属于高精度光学元件精密支撑技术领域，具体涉及一种可以实现主动面形调整的多点柔性支撑装置。 The invention belongs to the technical field of precision support of high-precision optical elements, and in particular relates to a multi-point flexible support device capable of realizing active surface shape adjustment.
背景技术 Background technique
随着高精度精密光学仪器的快速发展和应用，对光学系统成像质量要求也越来越高，尤其极紫外光刻技术EUVL应用，工作波长为13～14nm的波段，光学元件加工、检测、支撑装调等技术比传统的光学系统要求更高。极紫外光刻系统要达到衍射极限分辨率的要求，系统波前偏差要小于λ/14，对于六镜系统而言单个反射面面形要求达到0.20nmrms。在如此极端苛刻的面形要求下，装配过程中的干扰因素对面形影响变得十分严重，一般采用的解决方案是减小装配过程中接触面之间的摩擦系数，如接触副表面镀二硫化钼等润滑层，减小装配过程中引入的干扰力从而减小装配过程对最终面形的影响。但是即便是这样，摩擦系数的量级也很难满足超高精度面形要求。 With the rapid development and application of high-precision precision optical instruments, the requirements for the imaging quality of optical systems are getting higher and higher, especially the extreme ultraviolet lithography technology EUVL application, the working wavelength is 13-14nm band, optical components processing, testing, support Techniques such as adjustment are more demanding than traditional optical systems. To meet the requirements of diffraction-limited resolution for an EUV lithography system, the wavefront deviation of the system should be less than λ/14. For a six-mirror system, the shape of a single reflective surface should reach 0.20nmrms. Under such extremely demanding surface shape requirements, the interference factors in the assembly process have a very serious impact on the surface shape. The general solution is to reduce the friction coefficient between the contact surfaces during the assembly process, such as plating disulfide on the contact surface Molybdenum and other lubricating layers reduce the interference force introduced during the assembly process and thus reduce the impact of the assembly process on the final surface shape. But even so, the magnitude of the friction coefficient is difficult to meet the requirements of ultra-high precision surface shape.
发明内容 Contents of the invention
本发明的目的在于提出一种可以实现主动面形调整的多点柔性支撑装置，解决现有技术存在的装配过程中的干扰因素对面形影响严重，摩擦系数大，不能满足超高精度面形要求的问题。 The purpose of the present invention is to propose a multi-point flexible support device that can realize active surface shape adjustment, so as to solve the problems in the prior art that the interference factors in the assembly process seriously affect the surface shape, and the friction coefficient is large, which cannot meet the requirements of ultra-high precision surface shape The problem.
为实现上述目的，本发明的一种可以实现主动面形调整的多点柔性支撑装置包括凸台、n组主柔性支撑结构单元、n组辅助柔性支撑结构单元和支撑盘； In order to achieve the above object, a multi-point flexible support device capable of realizing active surface shape adjustment according to the present invention includes a boss, n sets of main flexible support structure units, n sets of auxiliary flexible support structure units and a support plate;
2n个所述凸台圆周均布在光学元件侧壁上，光学元件侧壁上的2n个凸台分别通过n组主柔性支撑结构单元和n组辅助柔性支撑结构单元与支撑盘固定连接，所述n组主柔性支撑结构单元和n组辅助柔性支撑结构单元交错设置；所述主柔性支撑结构单元提供竖直方向和沿光学元件侧面切向方向的约束，所述辅助柔性支撑结构单元提供沿光学元件竖直方向的约束。 The circumference of the 2n bosses is evenly distributed on the side wall of the optical element, and the 2n bosses on the side wall of the optical element are respectively fixedly connected to the support plate through n sets of main flexible support structure units and n sets of auxiliary flexible support structure units. The n groups of main flexible support structure units and n groups of auxiliary flexible support structure units are arranged alternately; the main flexible support structure units provide constraints in the vertical direction and the tangential direction along the side of the optical element, and the auxiliary flexible support structure units provide constraints along the Constraints in the vertical direction of optical components.
所述主柔性支撑结构单元提供竖直方向和沿光学元件侧面切向方向的约束具体为：所述主柔性支撑结构单元包括主支撑凸台压板、主支撑球、主支撑凸台紧固螺母、主支撑柔性支撑主体结构和主支撑固定螺母，凸台通过主支撑凸台压板和主支撑凸台紧固螺母压紧在主支撑柔性支撑主体结构上，所述凸台和主支撑柔性支撑主体结构之间通过主支撑球接触，主支撑柔性支撑主体结构通过主支撑固定螺母固定在所述支撑盘上。 The main flexible support structure unit provides constraints in the vertical direction and the tangential direction along the side of the optical element, specifically: the main flexible support structure unit includes a main support boss pressing plate, a main support ball, a main support boss fastening nut, The main support flexible support main structure and the main support fixing nut, the boss is pressed on the main support flexible support main structure through the main support boss pressing plate and the main support boss fastening nut, the boss and the main support flexible support main structure Contact between the main support balls, the main support flexible support main structure is fixed on the support plate through the main support fixing nut.
所述主支撑柔性支撑主体结构包括十字形柔性铰链结构和V槽型支撑；所述主支撑柔性支撑主体结构包括一体式的上端水平部、中间竖直部和下端水平部；所述V槽型支撑设置在上端水平部的上端，V槽型支撑通过所述主支撑球和所述凸台接触，所述十字形柔性铰链结构是指中间竖直部上端和下端开有十字交叉的通槽结构，所述通槽结构包括两个对称设置的通槽，所述通槽包括竖直部分和水平部分，通槽的水平部分设置在中间竖直部和下端水平部连接处。 The main support flexible support body structure includes a cross-shaped flexible hinge structure and a V-groove support; the main support flexible support body structure includes an integrated upper horizontal part, a middle vertical part and a lower horizontal part; the V groove The support is arranged on the upper end of the upper horizontal part, and the V-groove support is in contact with the boss through the main support ball. The cross-shaped flexible hinge structure refers to the through-slot structure with a cross on the upper and lower ends of the middle vertical part. , the through groove structure includes two symmetrically arranged through grooves, the through grooves include a vertical part and a horizontal part, and the horizontal part of the through groove is arranged at the junction of the middle vertical part and the lower end horizontal part.
所述辅助柔性支撑结构单元提供沿光学元件竖直方向的约束具体为：凸台通过辅助支撑凸台压板和辅助支撑凸台紧固螺母压紧在辅助支撑柔性支撑主体结构上，所述凸台和辅助支撑柔性支撑主体结构之间通过辅助支撑球接触，辅助支撑位置调整螺母将辅助支撑柔性支撑主体结构压紧到支撑盘上，辅助支撑柔性支撑主体结构和支撑盘之间设置有蝶形弹簧。 The auxiliary flexible support structure unit provides constraints along the vertical direction of the optical element, specifically: the boss is pressed on the main structure of the auxiliary support flexible support through the auxiliary support boss pressing plate and the auxiliary support boss fastening nut, and the boss The auxiliary support flexible support main structure is in contact with the auxiliary support ball, the auxiliary support position adjustment nut presses the auxiliary support flexible support main structure onto the support plate, and a butterfly spring is arranged between the auxiliary support flexible support main structure and the support plate .
辅助支撑柔性支撑主体结构包括并联片体性柔性结构和平面型支撑；所述的辅助支撑柔性支撑主体结构包括一体式的上端水平部、中间水平部和下端水平部；所述平面型支撑设置在上端水平部的上端，平面型支撑通过所述主支撑球和所述凸台接触，所述并联片体性柔性结构是指中间水平部左侧和右侧开有通槽结构，所述通槽结构包括四个对称设置的通槽，所述通槽结构形成四个水平布置的柔性片体结构，并联片体性柔性结的一端连接上端水平部，另一端连接下端水平部。 The auxiliary support flexible support main structure includes a parallel sheet flexible structure and a planar support; the auxiliary support flexible support main structure includes an integrated upper horizontal part, a middle horizontal part and a lower horizontal part; the planar support is arranged on At the upper end of the upper horizontal part, the planar support is in contact with the boss through the main support ball. The flexible structure of the parallel sheet means that the left and right sides of the middle horizontal part have a through-slot structure, and the through-slot The structure includes four symmetrically arranged through-slots, and the said through-slot structures form four horizontally arranged flexible sheet structures. One end of the parallel-connected sheet flexible junction is connected to the upper horizontal part, and the other end is connected to the lower horizontal part.
所述主柔性支撑结构单元和辅助柔性支撑结构单元的数量n的取值为：n≥3。 The value n of the main flexible supporting structure unit and the auxiliary flexible supporting structure unit is: n≥3.
所述主柔性支撑结构单元和辅助柔性支撑结构单元的数量n的取值3。 The value n of the main flexible support structure unit and the auxiliary flexible support structure unit is 3.
本发明的有益效果为：本发明的一种可以实现主动面形调整的多点柔性支撑装置在支架和光学元件间设有六个沿支撑镜面周向均匀分布的柔性支撑结构单元，其中包含三个主柔性支撑结构单元，三个辅助柔性支撑结构单元。主柔性支撑结构单元采用十字形柔性铰链结构和V槽型支撑组合来实现基本支撑功能。该主柔性支撑结构单元的单个V槽结构与光学元件侧面单个凸台通过钢珠实现两处点接触配合，主柔性支撑结构单元提供竖直方向和沿光学元件侧面切向方向这两个方向的约束，十字形柔性铰链结构负责吸收三个转动方向的额外内应力，三个主柔性支撑结构单元实现光学元件的六自由度约束；辅助柔性支撑结构单元采用并联片体性柔性结构实现基本支撑功能。该辅助柔性支撑结构单元的顶部平面与光学元件侧面凸台通过钢珠实现单个点接触配合，辅助柔性支撑结构单元提供沿光学元件竖直方向的约束，并联片体性柔性结构负责吸收沿光学元件竖直方向平动自由度、沿光学元件切向方向转动自由度、沿光学元件沿径向转动自由度三个方向的元件内应力，多点分布支撑过约束的部分采用辅助柔性支撑结构单元位置调整功能进行补偿。 The beneficial effect of the present invention is: a kind of multi-point flexible support device of the present invention that can realize active surface shape adjustment is provided with six flexible support structure units uniformly distributed along the circumferential direction of the support mirror surface between the bracket and the optical element, including three There are one main flexible support structure unit and three auxiliary flexible support structure units. The main flexible support structure unit adopts the combination of cross-shaped flexible hinge structure and V-groove support to realize the basic support function. The single V-groove structure of the main flexible support structure unit and the single boss on the side of the optical element realize two point contact and fit through steel balls, and the main flexible support structure unit provides constraints in the vertical direction and the tangential direction along the side of the optical element. , the cross-shaped flexible hinge structure is responsible for absorbing the additional internal stress in the three rotation directions, and the three main flexible support structure units realize the six-degree-of-freedom constraint of the optical element; the auxiliary flexible support structure unit adopts a parallel flexible structure to realize the basic support function. The top plane of the auxiliary flexible support structure unit and the side boss of the optical element realize a single point contact and fit through steel balls. The auxiliary flexible support structure unit provides constraints along the vertical direction of the optical element, and the flexible structure of the parallel sheet is responsible for absorbing The internal stress of the component in the three directions of the translational degree of freedom in the straight direction, the rotational degree of freedom along the tangential direction of the optical element, and the rotational degree of freedom along the radial direction of the optical element, and the position adjustment of the over-constrained part of the multi-point distribution support adopts the auxiliary flexible support structure unit function to compensate.
本发明的一种可以实现主动面形调整的多点柔性支撑装置能够实现与理想多点支撑结构一致的支撑效果；主柔性支撑结构单元能实现元件的精确定位，辅助柔性支撑结构单元结合柔性结构补偿和吸收相关自由度方向光学元件内应力，保证被支撑光学元件面形精度的实现；由于主支撑柔性支撑主体结构和辅助支撑柔性支撑主体结构采用了柔性结构，相关自由度方向光学元件热应力也可转化为了柔性结构变形应力，被支撑的光学元件受热因素影响小。 A multi-point flexible support device of the present invention that can realize active surface shape adjustment can achieve the same support effect as the ideal multi-point support structure; the main flexible support structure unit can realize the precise positioning of components, and the auxiliary flexible support structure unit combines the flexible structure Compensate and absorb the internal stress of optical components in the direction of relevant degrees of freedom to ensure the realization of the surface shape accuracy of the supported optical components; since the main structure of the main support flexible support and the main structure of the auxiliary support flexible support adopt a flexible structure, the thermal stress of the optical components in the direction of relevant degrees of freedom It can also be transformed into flexible structural deformation stress, and the supported optical elements are less affected by thermal factors.
附图说明 Description of drawings
图1为理想多点支撑结构支撑状态示意图； Fig. 1 is the schematic diagram of ideal multi-point support structure support state;
图2为光学元件和凸台位置结构示意图； Fig. 2 is a schematic diagram of the position structure of the optical element and the boss;
图3为本发明的一种可以实现主动面形调整的多点柔性支撑装置结构俯视图； Fig. 3 is a top view of the structure of a multi-point flexible support device that can realize active surface shape adjustment according to the present invention;
图4为本发明的一种可以实现主动面形调整的多点柔性支撑装置结构侧视图； Fig. 4 is a side view of the structure of a multi-point flexible support device that can realize active surface shape adjustment according to the present invention;
图5为本发明的一种可以实现主动面形调整的多点柔性支撑装置中主支撑点处的局部剖视图； Fig. 5 is a partial cross-sectional view of the main support point in a multi-point flexible support device capable of realizing active surface shape adjustment according to the present invention;
图6为本发明的一种可以实现主动面形调整的多点柔性支撑装置中辅助支撑点处的局部剖视图； Fig. 6 is a partial cross-sectional view of an auxiliary support point in a multi-point flexible support device capable of realizing active surface shape adjustment according to the present invention;
其中：1、光学元件，2、凸台，3、主柔性支撑结构单元，4、辅助柔性支撑结构单元，5、支撑盘，6、主支撑柔性支撑主体结构，7、主支撑凸台压板，8、主支撑球，9、主支撑凸台紧固螺母，10、主支撑固定螺母，11、辅助支撑柔性支撑主体结构，12、辅助支撑凸台压板，13、辅助支撑球，14、蝶形弹簧，15、辅助支撑凸台紧固螺母，16、辅助支撑位置调整螺母。 Among them: 1. Optical element, 2. Boss, 3. Main flexible support structure unit, 4. Auxiliary flexible support structure unit, 5. Support plate, 6. Main support flexible support main structure, 7. Main support boss pressure plate, 8. Main support ball, 9. Main support boss fastening nut, 10. Main support fixing nut, 11. Auxiliary support flexible support main structure, 12. Auxiliary support boss pressure plate, 13. Auxiliary support ball, 14. Butterfly Spring, 15, auxiliary support boss fastening nut, 16, auxiliary support position adjustment nut.
具体实施方式 detailed description
下面结合附图对本发明的实施方式作进一步说明。 Embodiments of the present invention will be further described below in conjunction with the accompanying drawings.
参见附图1、附图2、附图3、附图4、附图5和附图6，本发明的一种可以实现主动面形调整的多点柔性支撑装置包括凸台2、n组主柔性支撑结构单元3、n组辅助柔性支撑结构单元4和支撑盘5； Referring to accompanying drawing 1, accompanying drawing 2, accompanying drawing 3, accompanying drawing 4, accompanying drawing 5 and accompanying drawing 6, a kind of multi-point flexible supporting device of the present invention that can realize active surface shape adjustment includes boss 2, n groups of main Flexible support structure unit 3, n groups of auxiliary flexible support structure units 4 and support plate 5;
2n个所述凸台2圆周均布在光学元件1侧壁上，光学元件1侧壁上的2n个凸台2分别通过n组主柔性支撑结构单元3和n组辅助柔性支撑结构单元4与支撑盘5固定连接，所述n组主柔性支撑结构单元3和n组辅助柔性支撑结构单元4交错设置；所述主柔性支撑结构单元3提供竖直方向和沿光学元件1侧面切向方向的约束，所述辅助柔性支撑结构单元4提供沿光学元件1竖直方向的约束。 The 2n bosses 2 are evenly distributed on the side wall of the optical element 1, and the 2n bosses 2 on the side wall of the optical element 1 are respectively connected to each other through n sets of main flexible support structure units 3 and n sets of auxiliary flexible support structure units 4. The supporting plate 5 is fixedly connected, and the n groups of main flexible supporting structure units 3 and n groups of auxiliary flexible supporting structure units 4 are arranged alternately; constraints, the auxiliary flexible support structure unit 4 provides constraints along the vertical direction of the optical element 1 .
所述主柔性支撑结构单元3提供竖直方向和沿光学元件1侧面切向方向的约束具体为：所述主柔性支撑结构单元3包括主支撑凸台压板7、主支撑球8、主支撑凸台紧固螺母9、主支撑柔性支撑主体结构6和主支撑固定螺母10，凸台2通过主支撑凸台压板7和主支撑凸台紧固螺母9压紧在主支撑柔性支撑主体结构6上，所述凸台2和主支撑柔性支撑主体结构6之间通过主支撑球8接触，主支撑柔性支撑主体结构6通过主支撑固定螺母10固定在所述支撑盘5上。 The main flexible support structure unit 3 provides constraints in the vertical direction and the tangential direction along the side of the optical element 1. Specifically, the main flexible support structure unit 3 includes a main support boss pressing plate 7, a main support ball 8, a main support convex Table fastening nut 9, main support flexible support main structure 6 and main support fixing nut 10, boss 2 is pressed on main support flexible support main structure 6 through main support boss pressing plate 7 and main support boss fastening nut 9 The main support ball 8 is in contact with the boss 2 and the main support flexible support main structure 6 , and the main support flexible support main structure 6 is fixed on the support plate 5 by the main support fixing nut 10 .
所述主支撑柔性支撑主体结构6包括十字形柔性铰链结构和V槽型支撑；所述主支撑柔性支撑主体结构6包括一体式的上端水平部、中间竖直部和下端水平部；所述V槽型支撑设置在上端水平部的上端，V槽型支撑通过所述主支撑球8和所述凸台2接触，所述十字形柔性铰链结构是指中间竖直部上端和下端开有十字交叉的通槽结构，所述通槽结构包括两个对称设置的通槽，所述通槽包括竖直部分和水平部分，通槽的水平部分设置在中间竖直部和下端水平部连接处。 The main support flexible support main structure 6 includes a cross-shaped flexible hinge structure and a V-groove support; the main support flexible support main structure 6 includes an integrated upper horizontal part, a middle vertical part and a lower horizontal part; the V The groove support is arranged on the upper end of the upper horizontal part, and the V groove support is in contact with the boss 2 through the main support ball 8. The cross-shaped flexible hinge structure means that the upper and lower ends of the middle vertical part have a cross The through groove structure includes two symmetrically arranged through grooves, the through grooves include a vertical part and a horizontal part, and the horizontal part of the through groove is arranged at the junction of the middle vertical part and the lower end horizontal part.
所述辅助柔性支撑结构单元4提供沿光学元件1竖直方向的约束具体为：凸台2通过辅助支撑凸台压板12和辅助支撑凸台紧固螺母15压紧在辅助支撑柔性支撑主体结构11上，所述凸台2和辅助支撑柔性支撑主体结构11之间通过辅助支撑球13接触，辅助支撑位置调整螺母16将辅助支撑柔性支撑主体结构11压紧到支撑盘5上，辅助支撑柔性支撑主体结构11和支撑盘5之间设置有蝶形弹簧14。 The auxiliary flexible support structure unit 4 provides constraints along the vertical direction of the optical element 1, specifically: the boss 2 is pressed against the auxiliary support flexible support main structure 11 by the auxiliary support boss pressing plate 12 and the auxiliary support boss fastening nut 15 Above, the boss 2 and the auxiliary support flexible support main structure 11 are in contact with the auxiliary support ball 13, and the auxiliary support position adjustment nut 16 presses the auxiliary support flexible support main structure 11 onto the support plate 5, and the auxiliary support flexible support A belleville spring 14 is arranged between the main structure 11 and the support plate 5 .
辅助支撑柔性支撑主体结构11包括并联片体性柔性结构和平面型支撑；所述的辅助支撑柔性支撑主体结构11包括一体式的上端水平部、中间水平部和下端水平部；所述平面型支撑设置在上端水平部的上端，平面型支撑通过所述主支撑球13和所述凸台2接触，所述并联片体性柔性结构是指中间水平部左侧和右侧开有通槽结构，所述通槽结构包括四个对称设置的通槽，所述通槽结构形成四个水平布置的柔性片体结构，并联片体性柔性结的一端连接上端水平部，另一端连接下端水平部。 Auxiliary support flexible support main structure 11 includes parallel sheet flexible structure and planar support; said auxiliary support flexible support main structure 11 includes integrated upper end horizontal part, middle horizontal part and lower end horizontal part; said planar support It is arranged at the upper end of the upper horizontal part, and the planar support is in contact with the boss 2 through the main support ball 13. The flexible structure of the parallel sheet means that there are through groove structures on the left and right sides of the middle horizontal part. The through-slot structure includes four symmetrically arranged through-slots, and the through-slot structure forms four horizontally arranged flexible sheet structures. One end of the parallel sheet flexible junction is connected to the upper horizontal part, and the other end is connected to the lower horizontal part.
所述主柔性支撑结构单元3和辅助柔性支撑结构单元4的数量n的取值为：n≥3。 The value n of the main flexible support structure unit 3 and the auxiliary flexible support structure unit 4 is: n≧3.
所述主柔性支撑结构单元3和辅助柔性支撑结构单元4的数量n的取值3。 The value n of the main flexible support structure unit 3 and the auxiliary flexible support structure unit 4 is 3.
本发明的一种可以实现主动面形调整的多点柔性支撑装置整体的自由度分析：由凸台2、主支撑凸台压板7、主支撑凸台紧固螺母9、主支撑球8、主支撑柔性支撑主体结构6、主支撑固定螺母10组成的每套主柔性支撑结构单元3分别提供竖直方向和沿镜面侧面切向方向上的约束，三套主柔性支撑结构单元3共限制六个自由度。 An overall degree of freedom analysis of a multi-point flexible support device that can realize active surface shape adjustment of the present invention: the boss 2, the main support boss pressing plate 7, the main support boss fastening nut 9, the main support ball 8, the main Each set of main flexible support structure unit 3 composed of supporting flexible support main structure 6 and main support fixing nut 10 respectively provides constraints in the vertical direction and tangential direction along the side of the mirror surface, and three sets of main flexible support structure units 3 limit a total of six degrees of freedom.
由凸台2、辅助支撑凸台压板12、辅助支撑凸台紧固螺母15、辅助支撑球13、辅助支撑柔性支撑主体结构11、蝶形弹簧14、辅助支撑位置调整螺母16组成的每套辅助柔性支撑结构单元4分别提供竖直方向一个自由度的约束，三套辅助柔性支撑结构单元4共限制三个自由度，因为三套主柔性支撑结构单元3已经限制完整的六个自由度，所以这三个自由度属于过约束的部分，该部分通过转动辅助支撑位置调整螺母16进行辅助柔性支撑结构单元4位置调整进行补偿。 Each set of auxiliary support is composed of boss 2, auxiliary support boss pressing plate 12, auxiliary support boss fastening nut 15, auxiliary support ball 13, auxiliary support flexible support main structure 11, butterfly spring 14, and auxiliary support position adjustment nut 16. The flexible support structure units 4 respectively provide constraints of one degree of freedom in the vertical direction, and the three sets of auxiliary flexible support structure units 4 limit three degrees of freedom in total, because the three sets of main flexible support structure units 3 have already restricted the complete six degrees of freedom, so These three degrees of freedom belong to the over-constrained part, which is compensated by rotating the auxiliary support position adjustment nut 16 to adjust the position of the auxiliary flexible support structure unit 4 .
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105834775A (en) * | 2016-06-15 | 2016-08-10 | 沈阳飞机工业（集团）有限公司 | Multi-point changeable-supporting-height combined positioning supporting mechanism and supporting method thereof |
| CN106556911A (en) * | 2016-11-25 | 2017-04-05 | 中国科学院长春光学精密机械与物理研究所 | A kind of independent support unit and optical element supporting device |
| CN110634372A (en) * | 2019-09-29 | 2019-12-31 | 中国科学院长春光学精密机械与物理研究所 | A Verification System for Optical System Assembly and Adjustment Strategy |
| CN114198389A (en) * | 2021-11-15 | 2022-03-18 | 哈尔滨工业大学 | A flexible hinge assembly for micro-rotation of workpiece table |
| CN114526406A (en) * | 2022-02-14 | 2022-05-24 | 中国电子科技集团公司第四十一研究所 | Self-aligning spherical support device and method for laser outer cavity base |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103969788A (en) * | 2014-05-05 | 2014-08-06 | 中国科学院长春光学精密机械与物理研究所 | Lateral flexible supporting structure of space optical remote sensor circulator reflector |
| CN103968796A (en) * | 2014-05-05 | 2014-08-06 | 中国科学院长春光学精密机械与物理研究所 | High-reproducibility surface shape detection supporting device of optical element |
-
2015
- 2015-12-21 CN CN201510967159.5A patent/CN105425389B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103969788A (en) * | 2014-05-05 | 2014-08-06 | 中国科学院长春光学精密机械与物理研究所 | Lateral flexible supporting structure of space optical remote sensor circulator reflector |
| CN103968796A (en) * | 2014-05-05 | 2014-08-06 | 中国科学院长春光学精密机械与物理研究所 | High-reproducibility surface shape detection supporting device of optical element |
Non-Patent Citations (4)
| Title |
|---|
| 杨亮: ""空间反射镜柔性支撑设计与分析"", 《光机电信息》 * |
| 王忠善 等: ""一种小型空间反射镜支撑结构的设计与分析"", 《光学技术》 * |
| 王辉: ""极紫外光刻系统物镜光学元件的支撑与分析"", 《中国光学与应用光学》 * |
| 薛向尧 等: ""卫星激光测距中主镜柔性支撑结构设计及分析"", 《电子测量与仪器学报》 * |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105834775A (en) * | 2016-06-15 | 2016-08-10 | 沈阳飞机工业（集团）有限公司 | Multi-point changeable-supporting-height combined positioning supporting mechanism and supporting method thereof |
| CN105834775B (en) * | 2016-06-15 | 2018-01-19 | 沈阳飞机工业（集团）有限公司 | Multiple spot becomes the high integrated positioning supporting mechanism of branch and its method for supporting |
| CN106556911A (en) * | 2016-11-25 | 2017-04-05 | 中国科学院长春光学精密机械与物理研究所 | A kind of independent support unit and optical element supporting device |
| CN106556911B (en) * | 2016-11-25 | 2019-04-23 | 中国科学院长春光学精密机械与物理研究所 | An independent support unit and an optical element support device |
| CN110634372A (en) * | 2019-09-29 | 2019-12-31 | 中国科学院长春光学精密机械与物理研究所 | A Verification System for Optical System Assembly and Adjustment Strategy |
| CN114198389A (en) * | 2021-11-15 | 2022-03-18 | 哈尔滨工业大学 | A flexible hinge assembly for micro-rotation of workpiece table |
| CN114198389B (en) * | 2021-11-15 | 2022-07-05 | 哈尔滨工业大学 | Flexible hinge assembly for micro-rotation of workpiece table |
| CN114526406A (en) * | 2022-02-14 | 2022-05-24 | 中国电子科技集团公司第四十一研究所 | Self-aligning spherical support device and method for laser outer cavity base |
| CN114526406B (en) * | 2022-02-14 | 2024-03-22 | 中国电子科技集团公司第四十一研究所 | Device and method for supporting self-aligning spherical surface of laser external cavity base |
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