CN104216237B - Lens eccentricity setting device in the photoetching projection objective lens of a kind of decoupling zero - Google Patents

Lens eccentricity setting device in the photoetching projection objective lens of a kind of decoupling zero Download PDF

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CN104216237B
CN104216237B CN201410427113.XA CN201410427113A CN104216237B CN 104216237 B CN104216237 B CN 104216237B CN 201410427113 A CN201410427113 A CN 201410427113A CN 104216237 B CN104216237 B CN 104216237B
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picture frame
flexible
lens
projection objective
objective lens
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CN104216237A (en
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张德福
李显凌
赵磊
郭抗
隋永新
杨怀江
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Abstract

In the photoetching projection objective lens of decoupling zero, lens eccentricity setting device belongs to a lithographic projection manufacturing technology field, and object is to solve the problem of coupling nonlinear error, cost height and adjustment difficulty that prior art exists. The present invention comprises picture frame, sensor and driving mechanism; Picture frame comprises outer picture frame, interior picture frame, support seat, guiding hole, connecting thread hole, flexible guiding mechanism and flexible linking device; Picture frame entirety is circular ring structure, scope frame bottom is fixed with support seat, interior picture frame and outer picture frame running fit, interior picture frame and outer picture frame are connected by the n group flexible linking device of circumference uniform distribution, on circumferential direction, being provided with one group of flexible guiding mechanism between adjacent two flexible linking devices, outer picture frame and flexible guiding mechanism relative answer position to be provided with radial guiding hole, and two guiding holes about center of circle symmetry are respectively arranged with a driving mechanism and a sensor. The flexible leaf spring unit integral structure of the present invention, cost is low, reduces the coupling nonlinear error of orthogonal directions.

Description

一种解耦的光刻投影物镜中透镜偏心调节装置A decoupled lens eccentricity adjustment device in lithography projection objective lens

技术领域technical field

本发明属于光刻投影制造技术领域,具体涉及一种解耦的光刻投影物镜中透镜偏心调节装置。The invention belongs to the technical field of lithography projection manufacturing, and in particular relates to a lens eccentricity adjusting device in a decoupled lithography projection objective lens.

背景技术Background technique

应用于大规模集成电路制造的深紫外光刻投影物镜的精度要求非常高。但是,在装配过程中,会因装配应力、系统外部振动、温度变化等导致光刻系统性能下降。为了补偿由上述原因产生的部分旋转不对称误差,可以通过调节投影物镜中透镜的位置进行补偿,因此有必要设计专用的偏心调节机构装置。The precision requirements of deep ultraviolet lithography projection objective lenses used in the manufacture of large-scale integrated circuits are very high. However, during the assembly process, the performance of the lithography system will be degraded due to assembly stress, external vibration of the system, temperature changes, etc. In order to compensate part of the rotational asymmetry error caused by the above reasons, it can be compensated by adjusting the position of the lens in the projection objective lens, so it is necessary to design a special eccentric adjustment mechanism.

公开号为CN102162894的中国专利公开了一项发明名称为一种投影物镜中光学元件调心装置的技术方案。该套装置分为宏动调心模块和微动调心模块。通过三个螺旋测微仪实现大行程调心。微动调整时,通过作用在镜框柔性体上的两个压电驱动器带动镜框内环运动,从而带动光学元件实现精密的微动调整。根据机构工作原理,该方法用小行程的旋转运动近似直线运动,随着调节行程的增大,导致其正交方向的耦合误差非线性增大,补偿难度增大。The Chinese patent with the publication number CN102162894 discloses a technical solution of an invention titled a centering device for optical elements in a projection objective lens. The device is divided into a macro-alignment module and a micro-alignment module. Large stroke alignment is realized by three screw micrometers. During micro-adjustment, two piezoelectric drivers acting on the flexible body of the frame drive the inner ring of the frame to move, thereby driving the optical elements to achieve precise micro-adjustment. According to the working principle of the mechanism, this method approximates the linear motion with the rotary motion of a small stroke. With the increase of the adjustment stroke, the coupling error in the orthogonal direction increases non-linearly, and the compensation difficulty increases.

公开号为CN102707404的中国专利公开了一项发明名称为一种光学元件X-Y-θZ三自由度微动调整装置的技术方案。该套装置基于3-RRR平面机构,包括镜框、三个驱动器和两个传感器。镜框为一体化结构,由镜框内环、外环和三个运动支链组成,三个运动支链沿着圆周方向120°均布。该装置使用的两个传感器只能检测XY两个方向的平移运动,其θZ运动无法检测。因此该方案中有一个驱动器是设计冗余的,一方面增加了制造成本,另一方面给位移调节时闭环解耦控制算法带来困难。The Chinese patent with the publication number CN102707404 discloses an invention titled a technical solution of an optical element XY-θ Z three-degree-of-freedom micro-adjustment device. The set is based on a 3-RRR planar mechanism, including a mirror frame, three drivers and two sensors. The frame is an integrated structure, which is composed of an inner ring, an outer ring, and three motion branch chains, and the three motion branch chains are evenly distributed along the circumferential direction at 120°. The two sensors used in this device can only detect the translational motion in the XY two directions, and the θ Z motion cannot be detected. Therefore, one driver in this scheme is designed redundantly, which increases the manufacturing cost on the one hand, and brings difficulties to the closed-loop decoupling control algorithm during displacement adjustment on the other hand.

发明内容Contents of the invention

本发明的目的在于提出一种解耦的光刻投影物镜中透镜偏心调节装置,解决现有技术存在的耦合非线性误差、成本高和调节困难的问题。The object of the present invention is to propose a decoupled lens eccentricity adjustment device in a lithographic projection objective lens, which solves the problems of coupling nonlinear error, high cost and difficult adjustment in the prior art.

为实现上述目的,本发明的一种解耦的光刻投影物镜中透镜偏心调节装置包括镜框、传感器和驱动器;所述镜框包括外镜框、内镜框、支撑座、导向孔、连接螺纹孔、柔性导向机构和柔性连接机构;In order to achieve the above object, the lens eccentricity adjustment device in a decoupled lithographic projection objective lens of the present invention includes a mirror frame, a sensor and a driver; Guiding mechanism and flexible connection mechanism;

所述镜框整体为圆环结构,所述内镜框底部固定有支撑座,所述内镜框和所述外镜框间隙配合,所述内镜框和外镜框通过圆周均布的n组柔性连接机构连接,圆周方向上,相邻两个柔性连接机构之间设置有一组柔性导向机构,所述外镜框与柔性导向机构相对应位置设置有径向的导向孔,关于圆心对称的两个导向孔分别设置有一个驱动器和一个传感器。The picture frame as a whole is a ring structure, the bottom of the inner picture frame is fixed with a support base, the inner picture frame and the outer picture frame are in clearance fit, and the inner picture frame and the outer picture frame are connected by n groups of flexible connection mechanisms uniformly distributed around the circumference, In the circumferential direction, a group of flexible guide mechanisms is arranged between two adjacent flexible connection mechanisms, and radial guide holes are provided on the corresponding positions of the outer mirror frame and the flexible guide mechanisms, and two guide holes that are symmetrical about the center of the circle are respectively provided with One driver and one sensor.

所述n组柔性连接机构具体指4组。The n groups of flexible connection mechanisms specifically refer to 4 groups.

所述柔性导向机构包括四个具有沿着外镜框径向柔性的平行四边形机构和两个具有沿着外镜框切向柔性的复合四边形机构;每个平行四边形机构由两个柔性板簧连接两个刚性连杆组成;每个复合四边形机构由6个柔性板簧连接5个可动的刚性连杆组成。The flexible guide mechanism includes four parallelogram mechanisms with radial flexibility along the outer mirror frame and two compound quadrilateral mechanisms with tangential flexibility along the outer mirror frame; each parallelogram mechanism is connected by two flexible leaf springs. Composed of rigid links; each compound quadrilateral mechanism is composed of 6 flexible leaf springs connected to 5 movable rigid links.

所述柔性连接机构为两个Z形柔性板簧。The flexible connection mechanism is two Z-shaped flexible leaf springs.

所述外镜框法兰端面均布多个连接螺纹孔。A plurality of connection threaded holes are evenly distributed on the flange end surface of the outer mirror frame.

所述连接螺纹孔的个数为12个。The number of the connecting threaded holes is 12.

本发明的工作原理为:本发明的一种解耦的光刻投影物镜中透镜偏心调节装置中透镜通过胶结方式固定在支撑座上,通过驱动器作用在柔性导向机构上,推动内镜框运动,进而带动透镜产生偏心运动。柔性连接机构连接内镜框和外镜框,并防止内镜框调节过程中发生旋转。传感器检测内镜框的调节位移量,反馈给驱动器,形成闭环调节。The working principle of the present invention is as follows: the lens in the lens eccentricity adjustment device of a decoupled lithographic projection objective lens of the present invention is fixed on the support base by cementing, and the driver acts on the flexible guide mechanism to push the inner mirror frame to move, and then Drive the lens to produce eccentric movement. The flexible connection mechanism connects the inner mirror frame and the outer mirror frame and prevents the inner mirror frame from rotating during adjustment. The sensor detects the adjustment displacement of the inner mirror frame, and feeds back to the driver to form a closed-loop adjustment.

本发明的有益效果为:本发明的一种解耦的光刻投影物镜中透镜偏心调节装置采用了柔性板簧单元一体式的结构设计方案,一方面镜框整体结构简单、紧凑,成本低,对于提高物镜系统整体模态具有重要作用。另一方面,从设计原理上消除耦合运动误差,获得运动解耦的高精度偏心调节装置。水平面内单向调节时,在其正交方向引入的耦合位移和主运动位移的比小于0.29%,沿着光轴方向耦合位移和主运动位移的比小于0.012%,达到光学系统补偿效果,进一步提高了光学系统的性能,降低了正交方向的耦合误差。The beneficial effects of the present invention are: the lens eccentricity adjustment device in a decoupled lithography projection objective lens of the present invention adopts a structural design scheme of an integrated flexible leaf spring unit. On the one hand, the overall structure of the mirror frame is simple, compact, and low in cost. Improving the overall modality of the objective lens system plays an important role. On the other hand, the coupling motion error is eliminated from the design principle, and a high-precision eccentric adjustment device with motion decoupling is obtained. When adjusting in one direction in the horizontal plane, the ratio of the coupling displacement introduced in the orthogonal direction to the main motion displacement is less than 0.29%, and the ratio of the coupling displacement to the main motion displacement along the optical axis is less than 0.012%, which achieves the compensation effect of the optical system and further The performance of the optical system is improved, and the coupling error in the orthogonal direction is reduced.

附图说明Description of drawings

图1为本发明的一种解耦的光刻投影物镜中透镜偏心调节装置整体结构示意图;Fig. 1 is a schematic diagram of the overall structure of a lens eccentricity adjustment device in a decoupled lithography projection objective lens of the present invention;

图2为本发明的一种解耦的光刻投影物镜中透镜偏心调节装置中镜框整体结构示意图。FIG. 2 is a schematic diagram of the overall structure of the mirror frame in the lens eccentricity adjustment device in a decoupled lithographic projection objective lens of the present invention.

图3为本发明的一种解耦的光刻投影物镜中透镜偏心调节装置中柔性导向机构示意图;3 is a schematic diagram of a flexible guide mechanism in a lens eccentricity adjustment device in a decoupled lithography projection objective lens of the present invention;

图4为本发明的一种解耦的光刻投影物镜中透镜偏心调节装置中柔性导向机构中的平行四边形机构示意图;4 is a schematic diagram of a parallelogram mechanism in a flexible guide mechanism in a lens eccentricity adjustment device in a decoupled lithographic projection objective lens of the present invention;

图5为本发明的一种解耦的光刻投影物镜中透镜偏心调节装置中柔性导向机构中的复合四边形机构示意图;5 is a schematic diagram of a compound quadrilateral mechanism in a flexible guide mechanism in a lens eccentricity adjustment device in a decoupled lithographic projection objective lens of the present invention;

图6为本发明的一种解耦的光刻投影物镜中透镜偏心调节装置中柔性导向机构中的柔性板簧单元结构示意图;Fig. 6 is a structural schematic diagram of the flexible leaf spring unit in the flexible guide mechanism in the lens eccentricity adjusting device in a decoupled lithography projection objective lens of the present invention;

图7为本发明的一种解耦的光刻投影物镜中透镜偏心调节装置中柔性连接机构示意图;7 is a schematic diagram of a flexible connection mechanism in a lens eccentricity adjustment device in a decoupled lithography projection objective lens of the present invention;

图8为本发明的一种解耦的光刻投影物镜中透镜偏心调节装置中柔性连接机构中的Z形柔性板簧结构示意图;8 is a schematic structural diagram of the Z-shaped flexible leaf spring in the flexible connection mechanism of the lens eccentricity adjustment device in a decoupled lithography projection objective lens of the present invention;

其中:1、透镜,2、外镜框,3、内镜框,4、支撑座,5、导向孔,6、连接螺纹孔,7、柔性导向机构,701、刚性连杆a,702、柔性板簧a,703、柔性板簧b,704、刚性连杆b,705、刚性连杆c,706、刚性连杆d,707、柔性板簧c,708、柔性板簧d,709、柔性板簧e,710、刚性连杆e,711、刚性连杆f,712、刚性连杆g,713、柔性板簧f,714、柔性板簧g,715、柔性板簧h,8、柔性连接机构,801、Z形柔性板簧,9、传感器,10、驱动器。Among them: 1. lens, 2. outer mirror frame, 3. inner mirror frame, 4. support seat, 5. guide hole, 6. connecting threaded hole, 7. flexible guide mechanism, 701, rigid connecting rod a, 702, flexible leaf spring a, 703, flexible leaf spring b, 704, rigid connecting rod b, 705, rigid connecting rod c, 706, rigid connecting rod d, 707, flexible leaf spring c, 708, flexible leaf spring d, 709, flexible leaf spring e , 710, rigid connecting rod e, 711, rigid connecting rod f, 712, rigid connecting rod g, 713, flexible leaf spring f, 714, flexible leaf spring g, 715, flexible leaf spring h, 8, flexible connection mechanism, 801 , Z-shaped flexible leaf spring, 9, sensor, 10, driver.

具体实施方式detailed description

下面结合附图对本发明的实施方式作进一步说明。Embodiments of the present invention will be further described below in conjunction with the accompanying drawings.

参见附图1和附图2,本发明的一种解耦的光刻投影物镜中透镜偏心调节装置包括镜框、传感器9和驱动器10;所述镜框包括外镜框2、内镜框3、支撑座4、导向孔5、连接螺纹孔6、柔性导向机构7和柔性连接机构8;Referring to accompanying drawing 1 and accompanying drawing 2, the lens eccentricity adjusting device in a kind of decoupling photolithography projection objective lens of the present invention comprises mirror frame, sensor 9 and driver 10; Described mirror frame comprises outer mirror frame 2, inner mirror frame 3, support seat 4 , guide hole 5, connecting threaded hole 6, flexible guiding mechanism 7 and flexible connecting mechanism 8;

所述镜框整体为圆环结构,所述内镜框3底部固定有支撑座4,所述支撑座4和透镜1胶结固定,所述内镜框3和所述外镜框2间隙配合,所述内镜框3和外镜框2通过圆周均布的n组柔性连接机构8连接,圆周方向上,相邻两个柔性连接机构8之间设置有一组柔性导向机构7,所述外镜框2与柔性导向机构7相对应位置设置有径向的导向孔5,关于圆心对称的两个导向孔5分别设置有一个驱动器10和一个传感器9。The picture frame as a whole is a ring structure, the bottom of the inner picture frame 3 is fixed with a support seat 4, the support seat 4 and the lens 1 are cemented and fixed, the inner picture frame 3 and the outer picture frame 2 are in clearance fit, and the inner picture frame 3 and the outer mirror frame 2 are connected by n sets of flexible connecting mechanisms 8 uniformly distributed on the circumference. In the circumferential direction, a group of flexible guiding mechanisms 7 are arranged between two adjacent flexible connecting mechanisms 8. The outer mirror frame 2 and the flexible guiding mechanisms 7 Radial guide holes 5 are provided at corresponding positions, and two guide holes 5 symmetrical to the center of the circle are provided with a driver 10 and a sensor 9 respectively.

所述n组柔性连接机构8具体指4组。The n groups of flexible connection mechanisms 8 specifically refer to 4 groups.

参见附图3、附图4、附图5、和附图6,所述柔性导向机构7包括四个具有沿着外镜框2径向柔性的平行四边形机构和两个具有沿着外镜框2切向柔性的复合四边形机构;每个平行四边形机构由两个柔性板簧连接两个刚性连杆组成,具体为:每个柔性单元包括柔性板簧a702、柔性板簧b703、刚性连杆a701和刚性连杆b704,所述柔性板簧a702和柔性板簧b703平行设置,两端分别于刚性连杆a701和刚性连杆b704固连;Referring to accompanying drawing 3, accompanying drawing 4, accompanying drawing 5 and accompanying drawing 6, described flexible guiding mechanism 7 comprises four parallelogram mechanisms with radial flexibility along outer mirror frame 2 and two have along outer mirror frame 2 cuts It is a flexible compound quadrilateral mechanism; each parallelogram mechanism is composed of two flexible leaf springs connected to two rigid links, specifically: each flexible unit includes flexible leaf spring a702, flexible leaf spring b703, rigid link a701 and rigid The connecting rod b704, the flexible leaf spring a702 and the flexible leaf spring b703 are arranged in parallel, and the two ends are fixedly connected to the rigid connecting rod a701 and the rigid connecting rod b704 respectively;

每个复合四边形机构由6个柔性板簧连接5个可动的刚性连杆组成,具体为:每个复合四边形机构包括柔性板簧c707、柔性板簧d708、柔性板簧e709、柔性板簧f713、柔性板簧g714、柔性板簧h715、刚性连杆c705、刚性连杆d706、刚性连杆e710、刚性连杆f711和刚性连杆g712,所述柔性板簧c707、柔性板簧d708、柔性板簧e709、柔性板簧f713、柔性板簧g714和柔性板簧h715平行设置,刚性连杆c705、刚性连杆d706、刚性连杆e710、刚性连杆f711和刚性连杆g712平行设置,所述柔性板簧c707和柔性板簧f713两端分别与刚性连杆d706和刚性连杆f711固连,柔性板簧d708两端分别与刚性连杆c705和刚性连杆e710固连,柔性板簧g714两端分别与刚性连杆d706和刚性连杆g712固连,柔性板簧e709两端分别与刚性连杆a701和刚性连杆e710固连,柔性板簧h715两端分别与刚性连杆g712和刚性连杆a701固连。Each compound quadrilateral mechanism is composed of 6 flexible leaf springs connected with 5 movable rigid links, specifically: each compound quadrilateral mechanism includes flexible leaf spring c707, flexible leaf spring d708, flexible leaf spring e709, flexible leaf spring f713 , flexible leaf spring g714, flexible leaf spring h715, rigid connecting rod c705, rigid connecting rod d706, rigid connecting rod e710, rigid connecting rod f711 and rigid connecting rod g712, the flexible leaf spring c707, flexible leaf spring d708, flexible plate Spring e709, flexible leaf spring f713, flexible leaf spring g714 and flexible leaf spring h715 are arranged in parallel, rigid link c705, rigid link d706, rigid link e710, rigid link f711 and rigid link g712 are arranged in parallel, and the flexible Both ends of leaf spring c707 and flexible leaf spring f713 are fixedly connected with rigid link d706 and rigid link f711 respectively, both ends of flexible leaf spring d708 are fixedly connected with rigid link c705 and rigid link e710 respectively, and both ends of flexible leaf spring g714 The two ends of the flexible leaf spring e709 are fixedly connected with the rigid link a701 and the rigid link e710 respectively, and the two ends of the flexible leaf spring h715 are respectively connected with the rigid link g712 and the rigid link a701 is fixed.

参见附图7和附图8,所述柔性连接机构8为两个Z形柔性板簧801。Referring to accompanying drawings 7 and 8, the flexible connection mechanism 8 is two Z-shaped flexible leaf springs 801 .

所述外镜框2法兰端面均布多个连接螺纹孔6。A plurality of connecting threaded holes 6 are evenly distributed on the flange end surface of the outer mirror frame 2 .

所述连接螺纹孔6的个数为12个。The number of the connecting threaded holes 6 is 12.

Claims (5)

1. a lens eccentricity setting device in the photoetching projection objective lens of decoupling zero, comprises picture frame, sensor (9) and driving mechanism (10); It is characterized in that, described picture frame comprises outer picture frame (2), interior picture frame (3), support seat (4), guiding hole (5), connecting thread hole (6), flexible guiding mechanism (7) and flexible linking device (8);
Described picture frame entirety is circular ring structure, described interior picture frame (3) bottom is fixed with and supports seat (4), described interior picture frame (3) and described outer picture frame (2) running fit, described interior picture frame (3) and outer picture frame (2) are connected by n group flexible linking device (8) of circumference uniform distribution, on circumferential direction, it is provided with one group of flexible guiding mechanism (7) between adjacent two flexible linking devices (8), described outer picture frame (2) and flexible guiding mechanism (7) opposite position are provided with radial guiding hole (5), two guiding hole (5) about center of circle symmetry are respectively arranged with a driving mechanism (10) and a sensor (9),
Described flexible guiding mechanism (7) comprises four to be had and has along the tangential flexible compound quadrangular mechanism of outer picture frame (2) along the parallel-crank mechanism of outer picture frame (2) radial compliance and two; Each parallel-crank mechanism connects two rigid link by two flexible leaf springs and forms; Each compound quadrangular mechanism connects 5 movable rigid link by 6 flexible leaf springs and forms.
2. lens eccentricity setting device in the photoetching projection objective lens of a kind of decoupling zero according to claim 1, it is characterised in that, described n group flexible linking device (8) specifically refers to 4 groups.
3. lens eccentricity setting device in the photoetching projection objective lens of a kind of decoupling zero according to claim 1, it is characterised in that, described flexible linking device (8) is two Z-shaped flexible leaf springs (801).
4. lens eccentricity setting device in the photoetching projection objective lens of a kind of decoupling zero according to claim 1, it is characterised in that, the uniform multiple connecting thread hole (6) of described outer picture frame (2) end face of flange.
5. lens eccentricity setting device in the photoetching projection objective lens of a kind of decoupling zero according to claim 4, it is characterised in that, the number of described connecting thread hole (6) is 12.
CN201410427113.XA 2014-08-26 2014-08-26 Lens eccentricity setting device in the photoetching projection objective lens of a kind of decoupling zero Expired - Fee Related CN104216237B (en)

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