CN106249370A - A kind of integral shaft is to precision micrometer adjustable device - Google Patents
A kind of integral shaft is to precision micrometer adjustable device Download PDFInfo
- Publication number
- CN106249370A CN106249370A CN201610652135.5A CN201610652135A CN106249370A CN 106249370 A CN106249370 A CN 106249370A CN 201610652135 A CN201610652135 A CN 201610652135A CN 106249370 A CN106249370 A CN 106249370A
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- CN
- China
- Prior art keywords
- flexible chain
- hinge
- linking arm
- driver
- fixed part
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Pivots And Pivotal Connections (AREA)
- Prostheses (AREA)
Abstract
The present invention relates to deep UV projection photoetching objective lens technical field, concrete open a kind of integral shaft is to precision micrometer adjustable device.The present invention provides a kind of integral shaft to precision micrometer adjustable device, including picture frame, driver, picture frame is circular ring structure, including translation portion, fixed part and connecting portion, translation portion and fixed part are by indirect line of cut circumferentially separately, connecting portion is the hinge of integral cutting, and hinge is arranged on the indirect place of line of cut, for translation portion and the connection of fixed part；Driver is arranged on hinge, for the axial fine setting of picture frame.By the design of integral type circular ring structure, make this axial precision micrometer adjustable device simple in construction, compact, it is simple to process, assemble, improve axially-movable precision.
Description
Technical field
The present invention relates to deep UV projection photoetching objective lens technical field, concrete open a kind of integral shaft fills to Precision trimming
Put.
Background technology
Light projection photoetching objective lens is the key equipment manufacturing large scale integrated circuit.Continuous along with integrated circuit operational ability
Promoting, integrated circuit feature live width is constantly segmented, and the resolution of light projection photoetching objective lens needs to improve constantly.For promoting projection lithography
The resolution of object lens, in the stage of debuging, part picture frame and lens position need to constantly compensate to obtain optimal system aberration, only rely on
Processing and build-up tolerance are difficult to meet required precision, need to develop special tooling and carry out optical element axial location intense adjustment,
At exposure stage, introducing aberration change for adapting to thermal source, in object lens, part sense optical element axial location needs precise jiggle
Regulation.
Patent CN101900862A, disclosed a kind of axial jog adjustment device for optical element, its reversing machine in 2010
The principle of structure is wedge block, and due to the existence of fretting wear, optical element exists contaminated possible and mechanical stability
Bad.Patent CN102169218A, disclosed a kind of optical element axial adjusting device with aligning function in 2011, its
Principle is directly to drive picture frame axially-movable by 3 drivers, and this device is only capable of applying debugs the stage at optical element, it is impossible to straight
Scoop out and use in photoetching projection objective lens system.
For solving axial location adjusting apparatus structure complexity, processing difficulties, shortcoming that assembly precision is high, design integral type is justified
Ring structure picture frame, uses uniform along external cylindrical surface, the most through flexible hinge structure to realize guiding and commutation, it is ensured that picture frame
Key character once can machine in axis cutting.Simple in construction, compact, greatly reduce processing link, greatly subtract
Lack assembling link, and then improve axially-movable precision.
Summary of the invention
It is contemplated that overcome existing axial location adjusting apparatus structure complexity, processing difficulties, shortcoming that assembly precision is high,
There is provided a kind of integral shaft to precision micrometer adjustable device.
For achieving the above object, the present invention is by the following technical solutions:
The present invention provides a kind of integral shaft to precision micrometer adjustable device, and including picture frame and driver, picture frame is circular ring structure,
Circular ring structure integral cutting forms translation portion, fixed part and connecting portion, and translation portion and fixed part are connected by connecting portion, driver
Being arranged on connecting portion, driver drives connecting portion moves, thus drives translation portion to move relative to fixed part.
Further, connecting portion includes guiding hinge and driving hinge, guides hinge and drives hinge all along picture frame radially
Through, driver is arranged on driving hinge.
Further, drive hinge quantity be even number, be circumferentially symmetrical arranged, number of drives is also even number, and with drive
Dynamic hinge with the use of；Guiding hinge quantity is even number, is circumferentially symmetrical arranged.
Further, guide hinge and include the first flexible chain, the second flexible chain and the first linking arm, the first flexible chain and the
The width of two flexible chains is less than the width of the first linking arm.
Further, first flexible chain one end connects translation portion, and the other end connects the first linking arm；Second flexible chain one end
Connecting portion, the other end connects the first linking arm.
Further, hinge is driven to include the 3rd flexible chain, the 4th flexible chain and the second linking arm, the 3rd flexible chain and the
The width of four flexible chains is less than the width of the second linking arm.
Further, the 3rd flexible chain one end connects translation portion, and the other end connects the second linking arm；4th flexible chain one end
Connecting portion, the other end connects the second linking arm.
Further, the first flexible chain, the second flexible chain, the 3rd flexible chain, the 4th flexible chain have dough deformation, are driving
During dynamic device stretching motion, miniature deformation can occur.
Further, driver is connected with the second linking arm.Further, driver contact with the second linking arm connection or
Bolt connects.
The beneficial effects of the present invention is: by integral type circular ring structure picture frame, use be uniformly distributed along the circumference, the most through
Flexible hinge structure realizes guiding and commutation, it is ensured that the key character of picture frame once can machine in axis cutting.Knot
Structure is simple, compact, greatly reduces processing link, greatly reduces assembling link, and then improves axially-movable precision.
Accompanying drawing explanation
Fig. 1 is the schematic diagram according to an embodiment of the present invention；
Fig. 2 is the sectional view according to an embodiment of the present invention；
Fig. 3 is that the first guides hinge schematic diagram according to the present invention；
Fig. 4 is to guide hinge schematic diagram according to the second of the present invention
Fig. 5 is that the first drives hinge schematic diagram according to the present invention；
Fig. 6 is to drive hinge schematic diagram according to the second of the present invention；
Fig. 7 is that the third drives hinge schematic diagram according to the present invention；
The toponym that in accompanying drawing, each number designation is referred to is as follows:
1 is picture frame, and 2 is driver, and 3 is bolt, and 1-1 is translation portion, and 1-2 is fixed part, and 1-3 is to guide hinge, and 1-4 is
Driving hinge, 1-5 is line of cut, and 1-3-1 is the first flexible chain, and 1-3-2 is the second flexible chain, and 1-3-3 is the first linking arm, 1-
4-1 is the 3rd flexible chain, and 1-4-2 is the 4th flexible chain, and 1-4-3 is the second linking arm.
Detailed description of the invention
In order to make the purpose of the present invention, technical scheme and advantage clearer, below in conjunction with accompanying drawing and be embodied as
Example, is further elaborated to the present invention.Should be appreciated that specific embodiment described herein is only in order to explain this
Bright, and be not construed as limiting the invention.
A kind of integral shaft is to precision micrometer adjustable device, and as shown in Figure 1, 2, including picture frame 1 and driver 2, picture frame 1 is annulus
Structure, circular ring structure integral cutting forms translation portion 1-1, fixed part 1-2 and connecting portion, translation portion 1-1 and fixed part 1-2 by edge
Separately, line of cut 1-5 is intermittent line to the line of cut 1-5 of circumference, forms connecting portion in discontinuities, and connecting portion is that integral cutting is formed
Hinge, connecting portion be used for translation portion 1-1 and the connection of fixed part 1-2；Driver 2 is arranged on connecting portion, and driver 2 drives
Connecting portion moves, thus drives translation portion 1-1 to move relative to fixed part 1-2.
Connecting portion includes guiding hinge 1-3 and driving hinge 1-4, guides hinge 1-3 and drives hinge 1-4 all along picture frame 1
The most through, driver 2 is arranged on driving hinge 1-4.Driving hinge 1-4 quantity is even number, is circumferentially symmetrical arranged, best
It it is 4, in same level, in 90 ° of arrangements, it is simple to axially steady during fine setting.Driver 2 coordinates with driving hinge 1-4 to be made
With, quantity is identical with driving hinge 1-4 quantity；Guiding hinge 1-3 quantity is even number, is circumferentially symmetrical arranged, preferably 8,
Each driving hinge 1-4 side arranges 2 and guides hinge 1-3, and these 2 guide hinge 1-3 to drive hinge 1-4 to be symmetrical arranged.
Guide hinge 1-3 to be mainly used in when driver 2 is stretched translation portion 1-1 is guided, as it is shown on figure 3, first
Plant and guide hinge 1-3, including connecting the first flexible chain 1-3-1 of translation portion 1-1, the second flexible chain 1-of connecting portion 1-2
3-2 and the first linking arm 1-3-3 of connection the first flexible chain 1-3-1 and the second flexible chain 1-3-2, when driver 2 is stretched, Gu
Determine portion 1-2 to maintain static, the first flexible chain 1-3-1 and the second flexible chain 1-3-2 according to the flexible generation of driver 2 upwards or to
Under miniature deformation, drive translation portion by the motion up or down of the first flexible chain 1-3-1 and the second flexible chain 1-3-2
1-1 makees motion up or down relative to fixed part 1-2.
As shown in Figure 4, it is along symmetrical for line of cut 1-5 two the first guiding hinge 1-3 that the second guides hinge 1-3,
Soft including the connection first flexible chain 1-3-1 of translation portion 1-1, the second flexible chain 1-3-2 of connecting portion 1-2 and connection first
Property chain 1-3-1 and the second flexible chain 1-3-2 the first linking arm 1-3-3, when driver 2 is stretched, fixed part 1-2 is fixing not
Dynamic, the first flexible chain 1-3-1 and the second flexible chain 1-3-2 is according to the flexible generation of driver 2 miniature deformation up or down.
This guiding hinge 1-3 can occur the deformation of bigger position.
Drive hinge 1-4 for connecting driver 2, when driver 2 is stretched, miniature deformation occurs.As it is shown in figure 5, include
Connect the 3rd flexible chain 1-4-1 of translation portion 1-1, the 4th flexible chain 1-4-2 of connecting portion 1-2 and connect the 3rd flexible chain
The second linking arm 1-4-3 of 1-4-1 and the 4th flexible chain 1-4-2.Driver 2 is horizontally installed on two the second linking arm 1-4-3
Between, connect by bolt 3 is fixing, when driver 2 is stretched, fixed part 1-2 maintains static, and the second linking arm 1-4-3 drives
3rd flexible chain 1-4-1 and the 4th flexible chain 1-4-2, according to the flexible generation of driver 2 miniature deformation up or down.
As shown in Figure 6, hinge 1-4 is driven to include connecting the 3rd flexible chain 1-4-1, the connecting portion 1-2 of translation portion 1-1
The 4th flexible chain 1-4-2 and connect the 3rd flexible chain 1-4-1 and the 4th flexible chain 1-4-2 the second linking arm 1-4-3.Drive
Device 2 is horizontally installed between the second linking arm 1-4-3 and fixed part 1-2, connects by bolt 3 is fixing, stretches in driver 2
Time, fixed part 1-2 maintains static, and the second linking arm 1-4-3 drives the 3rd flexible chain 1-4-1 and the 4th flexible chain 1-4-2, according to
The flexible generation of driver 2 miniature deformation up or down.
As it is shown in fig. 7, driver 2 can also directly be vertically arranged between fixed part 1-2 and translation portion 1-1, driver 2
One end and fixed part 1-2 bolt 3 is fixing to be connected, and the other end can stretch, translation portion 1-1 according to the flexible generation of driver 2 to
Upper or downward miniature deformation.
As seen in figures 3-6, when driver 2 extends, there is outside deformation, the 3rd flexible chain in the second linking arm 1-4-3
1-4-1 is stretched, and affects translation portion 1-1 to move downward；When driver 2 is shunk, there is inside change in the second linking arm 1-4-3
Shape, the 3rd flexible chain 1-4-1 is compressed, and promotes translation portion 1-1 to move upward.Stretching by driver 2, it is possible to achieve optics
The axial Precision trimming of element.
The detailed description of the invention of present invention described above, is not intended that limiting the scope of the present invention.Any basis
Various other done by the technology design of the present invention change and deformation accordingly, should be included in the guarantor of the claims in the present invention
In the range of protecting.
Claims (10)
1. an integral shaft is to precision micrometer adjustable device, it is characterised in that include that picture frame and driver, described picture frame are annulus knot
Structure, described circular ring structure integral cutting forms translation portion, fixed part and connecting portion, and described translation portion and described fixed part pass through institute
Stating connecting portion to connect, described driver is arranged on described connecting portion, connecting portion motion described in described driver drives, thus carries
Dynamic described translation portion moves relative to described fixed part.
2. as claimed in claim 1 device, it is characterised in that described connecting portion includes guiding hinge and driving hinge, described in lead
All the most through along described picture frame to hinge and described driving hinge, described driver is arranged on described driving hinge.
3. device as claimed in claim 2, it is characterised in that described driving hinge quantity is even number, along the circumference of described picture frame
It is symmetrical arranged；Described number of drives is even number, and with described driving hinge with the use of；Described guiding hinge quantity is even
Number, the circumference along described picture frame is symmetrical arranged.
4. as claimed in claim 2 device, it is characterised in that described guiding hinge include the first flexible chain, the second flexible chain and
First linking arm, the width of described first flexible chain and described second flexible chain is less than the width of described first linking arm.
5. device as claimed in claim 4, it is characterised in that described first flexible chain one end connects described translation portion, the other end
Connect described first linking arm；Described second flexible chain one end connects described fixed part, and the other end connects described first linking arm.
6. as claimed in claim 2 device, it is characterised in that described driving hinge include the 3rd flexible chain, the 4th flexible chain and
Second linking arm, the width of described 3rd flexible chain and described 4th flexible chain is less than the width of described second linking arm.
7. device as claimed in claim 6, it is characterised in that described 3rd flexible chain one end connects described translation portion, the other end
Connect described second linking arm；Described 4th flexible chain one end connects described fixed part, and the other end connects described second linking arm.
8. device as described in any one in claim 4-7, it is characterised in that described first flexible chain, described second flexibility
Chain, described 3rd flexible chain, described 4th flexible chain have dough deformation, when described driver stretching motion, can occur micro-
Little deformation.
9. device as claimed in claim 7, it is characterised in that described driver is connected with described second linking arm.
10. device as claimed in claim 9, it is characterised in that described driver contacts connection or spiral shell with described second linking arm
Tether and connect.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610652135.5A CN106249370B (en) | 2016-08-10 | 2016-08-10 | A kind of integral shaft is to precision micrometer adjustable device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610652135.5A CN106249370B (en) | 2016-08-10 | 2016-08-10 | A kind of integral shaft is to precision micrometer adjustable device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106249370A true CN106249370A (en) | 2016-12-21 |
| CN106249370B CN106249370B (en) | 2019-08-23 |
Family
ID=58078627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610652135.5A Active CN106249370B (en) | 2016-08-10 | 2016-08-10 | A kind of integral shaft is to precision micrometer adjustable device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106249370B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110928238A (en) * | 2019-10-23 | 2020-03-27 | 广东工业大学 | Rigid-flexible coupling rotary platform and control method thereof |
| CN110941241A (en) * | 2019-10-23 | 2020-03-31 | 广东工业大学 | Rigid-flexible coupling rotary platform |
| CN111022483A (en) * | 2019-10-23 | 2020-04-17 | 广东工业大学 | Combined type rotating flexible hinge ring and rotating platform applying same |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030137761A1 (en) * | 2002-01-19 | 2003-07-24 | Leica Camera Ag. | Play-free rotary mounting |
| CN2619275Y (en) * | 2003-06-03 | 2004-06-02 | 矽峰光电科技股份有限公司 | Lens regulator |
| CN104536112A (en) * | 2014-12-25 | 2015-04-22 | 中国科学院长春光学精密机械与物理研究所 | Optical element axial jogging adjustment device of bridge type flexible hinge structure |
-
2016
- 2016-08-10 CN CN201610652135.5A patent/CN106249370B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030137761A1 (en) * | 2002-01-19 | 2003-07-24 | Leica Camera Ag. | Play-free rotary mounting |
| CN2619275Y (en) * | 2003-06-03 | 2004-06-02 | 矽峰光电科技股份有限公司 | Lens regulator |
| CN104536112A (en) * | 2014-12-25 | 2015-04-22 | 中国科学院长春光学精密机械与物理研究所 | Optical element axial jogging adjustment device of bridge type flexible hinge structure |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110928238A (en) * | 2019-10-23 | 2020-03-27 | 广东工业大学 | Rigid-flexible coupling rotary platform and control method thereof |
| CN110941241A (en) * | 2019-10-23 | 2020-03-31 | 广东工业大学 | Rigid-flexible coupling rotary platform |
| CN111022483A (en) * | 2019-10-23 | 2020-04-17 | 广东工业大学 | Combined type rotating flexible hinge ring and rotating platform applying same |
| CN110928238B (en) * | 2019-10-23 | 2022-05-13 | 广东工业大学 | Rigid-flexible coupling rotary platform and control method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106249370B (en) | 2019-08-23 |
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