CN102508359A - Two-dimensional plane adjusting device of movable mirror - Google Patents
Two-dimensional plane adjusting device of movable mirror Download PDFInfo
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- CN102508359A CN102508359A CN2011103436752A CN201110343675A CN102508359A CN 102508359 A CN102508359 A CN 102508359A CN 2011103436752 A CN2011103436752 A CN 2011103436752A CN 201110343675 A CN201110343675 A CN 201110343675A CN 102508359 A CN102508359 A CN 102508359A
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Abstract
The invention discloses a two-dimensional plane adjusting device of a movable mirror. The two-dimensional plane adjusting device of the movable mirror is composed of two connecting rods, two drivers, two piezoelectric ceramic, eight flexible hinges and three support frames, wherein the support frame at the first layer is fixedly provided with a first driver; the first flexible hinge, the second flexible hinge, the third flexible hinge and the fourth flexible hinge are positioned between the support frame at the first layer and the support frame at the second layer and are connected with the support frame at the second layer through four flexible hinges; the support frame at the second layer is fixedly provided with a second driver; the fifth flexible hinge, the sixth flexible hinge, the seventh flexible hinge and the eighth flexible hinge are positioned between the support frame at the second layer and the support frame at the third layer and are connected with the support frame at the third layer through four flexible hinges; the first piezoelectric ceramic is fixedly connected to the first driver; the first piezoelectric ceramic is connected with the first connecting rod; the first connecting rod is connected with the top end of the support frame at the second layer; the second piezoelectric ceramic is fixedly connected to the second driver; the second piezoelectric ceramic is connected with the second connecting rod; and the second connecting rod is connected with the left end of the support frame at the third layer. Through the internal friction transfer of the flexible hinges, the two-dimensional plane adjusting device of the movable mirror, disclosed by the invention, adjusts the positions of the movable mirror in X and Y directions.
Description
Technical field
The present invention relates to the installation and the adjustment of index glass in a kind of litho machine, also can be used in the enterprise production installation and measuring and debugging workpiece.
Background technology
In projection mask aligner after object lens are debug completion; Owing to the rigging error that in manufacture process, inevitably occurs producing in mismachining tolerance and the assembling process, can cause the objective system image quality to descend the deviation theory value; For improving image quality; Need carry out the adjusting on X, the Y direction to some particular optic in the object lens,, improve image quality to proofread and correct rigging error.
Summary of the invention
In order to solve prior art problems, the purpose of this invention is to provide a kind of index glass micromatic setting, make index glass in adjustment process is installed, can not produce stress deformation because of the effect of external force; Improved the debug precision of object lens to the axle center; The optical axis that has guaranteed object lens is vertical with the silicon chip face, and the compliant mechanism after adjustment is accomplished has favorable rigidity and thermal stability; Guarantee that picture element and focal plane are stable, guaranteed photoetching quality.
In order to realize said purpose; The present invention provides a kind of index glass two dimensional surface adjusting gear, and said device is made up of first connecting rod, second connecting rod, first flexible hinge, second flexible hinge, the 3rd flexible hinge, the 4th flexible hinge, the 5th flexible hinge, the 6th flexible hinge, the 7th flexible hinge, the 8th flexible hinge, first driver, first piezoelectric ceramics, second driver, second piezoelectric ceramics and bracing frame; Support frame as described above is divided into ground floor bracing frame, second layer bracing frame and the 3rd layer of bracing frame, and said ground floor bracing frame, second layer bracing frame and the 3rd layer of bracing frame are at grade;
On the ground floor bracing frame, be fixed with first driver; First flexible hinge, second flexible hinge, the 3rd flexible hinge, the 4th flexible hinge are between ground floor bracing frame and second layer bracing frame; The outer fulcrum of the outer fulcrum of first flexible hinge, the outer fulcrum of second flexible hinge, the 3rd flexible hinge, the outer fulcrum of the 4th flexible hinge are positioned on the ground floor bracing frame, and link to each other with second layer bracing frame through four inner-supports on these four flexible hinges;
On second layer bracing frame, be fixed with second driver; The 5th flexible hinge, the 6th flexible hinge, the 7th flexible hinge, the 8th flexible hinge are between second layer bracing frame and the 3rd layer of bracing frame; The outer fulcrum of the outer fulcrum of the 5th flexible hinge, the outer fulcrum of the 6th flexible hinge, the 7th flexible hinge, the outer fulcrum of the 8th flexible hinge are positioned on the second layer bracing frame, and link to each other with the 3rd layer of bracing frame through four inner-supports on these four flexible hinges;
First piezoelectric ceramics is fixed on first driver;
First piezoelectric ceramics links to each other with first connecting rod, and first connecting rod links to each other with the top of second layer bracing frame;
Second piezoelectric ceramics is fixed on second driver;
Second piezoelectric ceramics links to each other with second connecting rod, and second connecting rod links to each other with the left end of the 3rd layer of bracing frame;
Adjustment index glass eyeglass the time, at eight on the described bracing frame identical said flexible hinges the position of index glass on X, Y direction regulated.
Preferred embodiment: have an outer fulcrum on said first flexible hinge, second flexible hinge, the 3rd flexible hinge, the 4th flexible hinge respectively; Said outer fulcrum is positioned on the ground floor bracing frame, and all has the groove that penetrates bracing frame respectively between every adjacent flexible hinge.
Preferred embodiment: have an outer fulcrum on said the 5th flexible hinge, the 6th flexible hinge, the 7th flexible hinge, the 8th flexible hinge respectively; Said outer fulcrum is positioned on the second layer bracing frame, and all offers the groove that penetrates bracing frame between every adjacent said flexible hinge.
Preferred embodiment: bracing frame is processed with the 65Mn metal material.
Preferred embodiment: the central authorities of bracing frame have a through hole with the level, and index glass is placed on the step in the through hole.
Preferred embodiment: the central point that is positioned at two flexible hinges placing relatively up and down on ground floor bracing frame and the second layer bracing frame is on same center line; The central point of the circular arc of two flexible hinges placing relatively up and down is also on same center line.
Preferred embodiment: be positioned on ground floor bracing frame and the second layer bracing frame about the central point of two flexible hinges relatively placing on same center line; The central point of the circular arc of the flexible hinge of placing relatively is also on same center line.
This device is through carrying out planar layer to bracing frame, and through the flexible hinge on each layer bracing frame index glass carried out two dimensional surface fine motion adjustment.
The invention has the beneficial effects as follows: in projection mask aligner after object lens are debug completion; Owing to the rigging error that in manufacture process, inevitably occurs producing in mismachining tolerance and the assembling process, can cause the objective system image quality to descend the deviation theory value; For improving image quality; Need regulate the fine motion that some particular optic in the object lens is carried out on X, the Y direction,, improve image quality to proofread and correct rigging error.Device of the present invention has used lever principle, makes index glass in when adjustment, and is highly sensitive, do not have the lost motion intervention, and control accuracy is high.Device of the present invention is when adjustment index glass position, and index glass does not receive internal stress influence, does not have the lost motion intervention, and transmission efficiency is high; And the rigidity and the thermal stability of flexible hinge were very good after adjustment was accomplished, and had guaranteed the stable of picture element and focal plane.Bracing frame is processed with the 65Mn metal material, makes flexible hinge have the better elastic performance.
Description of drawings
Fig. 1 is the schematic top plan view of index glass two dimensional surface adjusting gear of the present invention;
Fig. 2 is the auxiliary schematic top plan view of Fig. 1 bracing frame;
Fig. 3 is that bracing frame K-K is to cut-open view;
Fig. 4 is that bracing frame P-P is to cut-open view;
Fig. 5 is the bracing frame schematic perspective view;
Embodiment
For making the object of the invention, technical scheme and advantage clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, to further explain of the present invention.
Please refer to the schematic top plan view of the index glass two dimensional surface adjusting gear of the present invention shown in Fig. 1, the auxiliary schematic top plan view of the bracing frame shown in Fig. 2 and the bracing frame schematic perspective view shown in Fig. 5; Constitute by first connecting rod 1, second connecting rod 2, first flexible hinge 3, second flexible hinge 4, the 3rd flexible hinge 5, the 4th flexible hinge 6, the 5th flexible hinge 7, the 6th flexible hinge 8, the 7th flexible hinge 9, the 8th flexible hinge 10, first driver 22, first piezoelectric ceramics 23, second driver 24, second piezoelectric ceramics 25, bracing frame 30, lock- screw 71,72,73,74,75,76,81,82,83,84,85,86, index glass 60; Bracing frame 30 is divided into ground floor bracing frame 31 (like Fig. 3, Fig. 4 dash area), second layer bracing frame 32 (as 3, Fig. 4 dash area) and the 3rd layer of bracing frame 33 (like Fig. 3, Fig. 4 dash area) is positioned on the same plane;
On ground floor bracing frame 31, fix or be bonded with first driver 22 through lock- screw 73,74,75,76; First flexible hinge 3, second flexible hinge 4, the 3rd flexible hinge 5, the 4th flexible hinge 6 are between ground floor bracing frame 31 and second layer bracing frame 32; First flexible hinge, second flexible hinge, the 3rd flexible hinge, the outer fulcrum A of the 4th flexible hinge, B, C, D are positioned on the ground floor bracing frame 31, and link to each other with second layer bracing frame 32 through inner-support AA, BB, CC, the DD on these four flexible hinges;
On second layer bracing frame 32, be fixedly connected or glue together second driver 24 through lock- screw 83,84,85,86; The 5th flexible hinge 7, the 6th flexible hinge 8, the 7th flexible hinge 9, the 8th flexible hinge 10 are between second layer bracing frame 32 and the 3rd layer of bracing frame 33; The 5th flexible hinge, the 6th flexible hinge, the 7th flexible hinge, the outer fulcrum E of the 8th flexible hinge, F, G, H are positioned on the second layer bracing frame 32, and link to each other with the 3rd layer of bracing frame 33 through inner-support EE, FF, GG, the HH on these four flexible hinges.
First piezoelectric ceramics 23 is fixed on first driver 22;
First piezoelectric ceramics 23 links to each other with first connecting rod 1, and first connecting rod 1 links to each other with the top 90 of second layer bracing frame 32 through lock-screw 71,72 or glue again or glues together;
Second piezoelectric ceramics 25 is fixed on second driver 24;
Second piezoelectric ceramics 25 links to each other with second connecting rod 2, and second connecting rod 2 links to each other with the left end 91 of the 3rd layer of bracing frame 33 through lock-screw 81,82 or glue again or glues together;
When adjusting the eyeglass of index glass 60, the position of index glass 60 on X, Y direction regulated at two groups eight identical said flexible hinges on the described bracing frame 30.
Have outer fulcrum A, B, C, D respectively on said first flexible hinge 3, second flexible hinge 4, the 3rd flexible hinge 5, the 4th flexible hinge 6; Said outer fulcrum A, B, C, D are positioned on the ground floor bracing frame 31; And all have the groove 40,41,42,43 that penetrates bracing frame 30 between every adjacent said flexible hinge, see Fig. 3,4.
Have outer fulcrum E, F, G, H respectively on said the 5th flexible hinge 7, the 6th flexible hinge 8, the 7th flexible hinge 9, the 8th flexible hinge 10; Said outer fulcrum E, F, G, H are positioned on the second layer bracing frame 32; And all have the groove 50,51,52,53 that penetrates bracing frame 30 between every adjacent said flexible hinge, see Fig. 3, Fig. 4.
All have the groove that penetrates bracing frame 30 between every adjacent flexible hinge, these grooves have been divided into three layers with bracing frame on same plane.
The central authorities of bracing frame 30 have the through hole 20 of a band step 21, and index glass 60 is placed on the step 21 in the through hole 20.
Be arranged in the central point (like centre line L 1, L5 of Fig. 1) on same center line of two flexible hinges placing relatively up and down on ground floor bracing frame 31 and the second layer bracing frame 32; The central point of the circular arc of two flexible hinges placing relatively up and down is on same center line (like the centre line L among Fig. 12, L6) also.
Be arranged on ground floor bracing frame 31 and the second layer bracing frame 32 about the central point (like centre line L 3, L7 of Fig. 1) on same center line of two flexible hinges placing relatively; The central point of the circular arc of the flexible hinge of placing relatively is on same center line (like the centre line L among Fig. 14, L8) also.
When the position adjustments that need carry out on the Y direction index glass 60, first driver 22 will drive first piezoelectric ceramics 23 and produce forward thrust or pulling force backward.When first piezoelectric ceramics 23 promotes forward; Through the top 90 generations thrust forward of 1 pair second bracing frame 32 of first connecting rod, because outer fulcrum A, B, C, the D of flexible hinge 3,4,5,6 are fixed as basic point with ground floor bracing frame 31, therefore; When the top 90 of second bracing frame 32 receives forward the thrust of Y direction; Under the effect of lever principle, flexible hinge 3,4,5,6 is deformed, do travelling forward on the Y direction thereby drive the 2nd bracing frame 32.Otherwise second layer bracing frame 32 is done the motion backward on the Y direction.Because the 3rd layer of bracing frame 33 is included in 32 li of the 2nd layer of bracing frames, therefore, when second layer bracing frame 32 is done seesawing of Y direction, also driven the 3rd layer of bracing frame 33 and on the Y direction, done the front-back direction adjustment.
Second layer bracing frame 32 is motionless with respect to the 3rd layer of bracing frame 33.When the position adjustments that need carry out on the directions X index glass 60, second driver 24 will drive second piezoelectric ceramics 25 and produce the thrust forward of directions Xs or pulling force backward.When second piezoelectric ceramics 25 promotes forward; Produce the thrust forward of directions X through the left end 91 of 2 pairs of the 3rd layer of bracing frames 33 of second connecting rod; Because outer fulcrum E, F, G, the H of flexible hinge 7,8,9,10 are fixed as basic point with second layer bracing frame 32; Therefore, when the left end 91 of the 3rd layer of bracing frame 33 receives forward the thrust from directions X, under the effect of lever principle; Flexible hinge 7,8,9,10 is deformed, do travelling forward on the directions X thereby drive the 3rd layer of bracing frame 33.Otherwise the 3rd layer of bracing frame 33 done the motion backward on the directions X.Because index glass 60 is to be placed on the step 21 of the 3rd layer of bracing frame 33; Therefore, no matter be that second layer bracing frame 32 is done the motion on the Y direction, still the 3rd layer of bracing frame 33 done the motion on the directions X; Index glass 60 all can be done locational adjustment with it; Realize the adjustment of index glass two dimensional surface,, improve image quality to proofread and correct rigging error.
Because this device has used lever principle, and carry out interior friction through flexible hinge and transmit, therefore; In the position adjustment of index glass 60, index glass 60 does not receive the influence of internal stress, can not produce stress deformation because of the effect of external force; And, there is not the lost motion intervention, transmission efficiency is high; And the rigidity and the thermal stability of flexible hinge were very good after adjustment was accomplished, and had guaranteed the stable of picture element and focal plane.
The above; Be merely the embodiment among the present invention, but protection scope of the present invention is not limited thereto, anyly is familiar with this technological people in the technical scope that the present invention disclosed; Can understand conversion or the replacement expected, all should be encompassed within the protection domain of claims of the present invention.
Claims (7)
1. index glass two dimensional surface adjusting gear, it is characterized in that: said device is made up of first connecting rod, second connecting rod, first flexible hinge, second flexible hinge, the 3rd flexible hinge, the 4th flexible hinge, the 5th flexible hinge, the 6th flexible hinge, the 7th flexible hinge, the 8th flexible hinge, first driver, first piezoelectric ceramics, second driver, second piezoelectric ceramics and bracing frame; Support frame as described above is divided into ground floor bracing frame, second layer bracing frame and the 3rd layer of bracing frame, and said ground floor bracing frame, second layer bracing frame and the 3rd layer of bracing frame are at grade;
On the ground floor bracing frame, be fixed with first driver; First flexible hinge, second flexible hinge, the 3rd flexible hinge, the 4th flexible hinge are between ground floor bracing frame and second layer bracing frame; The outer fulcrum of the outer fulcrum of first flexible hinge, the outer fulcrum of second flexible hinge, the 3rd flexible hinge, the outer fulcrum of the 4th flexible hinge are positioned on the ground floor bracing frame, and link to each other with second layer bracing frame through four inner-supports on these four flexible hinges;
On second layer bracing frame, be fixed with second driver; The 5th flexible hinge, the 6th flexible hinge, the 7th flexible hinge, the 8th flexible hinge are between second layer bracing frame and the 3rd layer of bracing frame; The outer fulcrum of the 5th flexible hinge, the 6th flexible hinge, the 7th flexible hinge, the 8th flexible hinge is positioned on the second layer bracing frame, and links to each other with the 3rd layer of bracing frame through four inner-supports on these four flexible hinges;
First piezoelectric ceramics is fixed on first driver;
First piezoelectric ceramics links to each other with first connecting rod, and first connecting rod links to each other with the top of second layer bracing frame;
Second piezoelectric ceramics is fixed on second driver;
Second piezoelectric ceramics links to each other with second connecting rod, and second connecting rod links to each other with the left end of the 3rd layer of bracing frame;
During adjustment index glass eyeglass, the position of index glass on X, Y direction regulated at eight on the described bracing frame identical said flexible hinges.
2. index glass two dimensional surface adjusting gear as claimed in claim 1; It is characterized in that: have an outer fulcrum on said first flexible hinge, second flexible hinge, the 3rd flexible hinge, the 4th flexible hinge respectively; Said outer fulcrum is positioned on the ground floor bracing frame, and all has the groove that penetrates bracing frame respectively between every adjacent flexible hinge.
3. index glass two dimensional surface adjusting gear as claimed in claim 1; It is characterized in that: have an outer fulcrum on said the 5th flexible hinge, the 6th flexible hinge, the 7th flexible hinge, the 8th flexible hinge respectively; Said outer fulcrum is positioned on the second layer bracing frame, and all offers the groove that penetrates bracing frame between every adjacent said flexible hinge.
4. index glass two dimensional surface adjusting gear as claimed in claim 1, it is characterized in that: bracing frame is processed with the 65Mn metal material.
5. index glass two dimensional surface adjusting gear as claimed in claim 1 is characterized in that: the central authorities of bracing frame have a through hole with the level, and index glass is placed on the step in the through hole.
6. index glass two dimensional surface adjusting gear as claimed in claim 1 is characterized in that: the central point that is positioned at two flexible hinges placing relatively up and down on ground floor bracing frame and the second layer bracing frame is on same center line; The central point of the circular arc of two flexible hinges placing relatively up and down is also on same center line.
7. index glass two dimensional surface adjusting gear as claimed in claim 1 is characterized in that: be positioned on ground floor bracing frame and the second layer bracing frame about the central point of two flexible hinges relatively placing on same center line; The central point of the circular arc of the flexible hinge of placing relatively is also on same center line.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103436752A CN102508359A (en) | 2011-11-03 | 2011-11-03 | Two-dimensional plane adjusting device of movable mirror |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2011103436752A CN102508359A (en) | 2011-11-03 | 2011-11-03 | Two-dimensional plane adjusting device of movable mirror |
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| CN102508359A true CN102508359A (en) | 2012-06-20 |
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| CN2011103436752A Pending CN102508359A (en) | 2011-11-03 | 2011-11-03 | Two-dimensional plane adjusting device of movable mirror |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102981244A (en) * | 2012-12-25 | 2013-03-20 | 中国科学院长春光学精密机械与物理研究所 | Two-dimensional large-diameter transmission-type quick reflecting mirror |
| CN103278907A (en) * | 2013-05-28 | 2013-09-04 | 中国科学院光电技术研究所 | Axial unloading device for index mirror |
| CN105071689A (en) * | 2015-07-17 | 2015-11-18 | 南京航空航天大学 | Two-dimensional piezoelectric micro displacement driver |
| CN106547063A (en) * | 2015-09-17 | 2017-03-29 | 上海微电子装备有限公司 | A kind of movable lens adjustment mechanism |
| CN107290835A (en) * | 2016-03-30 | 2017-10-24 | 上海微电子装备（集团）股份有限公司 | A kind of movable lens adjustment mechanism |
| CN108459471A (en) * | 2018-03-20 | 2018-08-28 | 中国科学院光电技术研究所 | A kind of index glass five degree of freedom on-line tuning control system based on DSP |
| CN109239887A (en) * | 2018-11-28 | 2019-01-18 | 中国科学院长春光学精密机械与物理研究所 | Space optical remote sensor large-scale circular reflecting mirror flexible support structure |
| CN110221395A (en) * | 2018-03-02 | 2019-09-10 | 深圳光峰科技股份有限公司 | A kind of regulating mechanism of optical element, out optical module and its projection device |
| CN113917645A (en) * | 2021-11-01 | 2022-01-11 | 中国科学院光电技术研究所 | Lens elastic supporting device |
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| CN101226345A (en) * | 2008-01-31 | 2008-07-23 | 上海微电子装备有限公司 | Device for installing and leveling photo-etching machine projection objective |
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Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102981244B (en) * | 2012-12-25 | 2014-10-15 | 中国科学院长春光学精密机械与物理研究所 | Two-dimensional large-diameter transmission-type quick reflecting mirror |
| CN102981244A (en) * | 2012-12-25 | 2013-03-20 | 中国科学院长春光学精密机械与物理研究所 | Two-dimensional large-diameter transmission-type quick reflecting mirror |
| CN103278907A (en) * | 2013-05-28 | 2013-09-04 | 中国科学院光电技术研究所 | Axial unloading device for index mirror |
| CN105071689A (en) * | 2015-07-17 | 2015-11-18 | 南京航空航天大学 | Two-dimensional piezoelectric micro displacement driver |
| CN105071689B (en) * | 2015-07-17 | 2017-06-13 | 南京航空航天大学 | A kind of two-dimensional piezoelectric micro-displacement driver |
| CN106547063A (en) * | 2015-09-17 | 2017-03-29 | 上海微电子装备有限公司 | A kind of movable lens adjustment mechanism |
| CN106547063B (en) * | 2015-09-17 | 2019-03-26 | 上海微电子装备（集团）股份有限公司 | A kind of movable lens adjustment mechanism |
| CN107290835A (en) * | 2016-03-30 | 2017-10-24 | 上海微电子装备（集团）股份有限公司 | A kind of movable lens adjustment mechanism |
| CN107290835B (en) * | 2016-03-30 | 2019-08-23 | 上海微电子装备（集团）股份有限公司 | A kind of movable lens adjustment mechanism |
| CN110221395A (en) * | 2018-03-02 | 2019-09-10 | 深圳光峰科技股份有限公司 | A kind of regulating mechanism of optical element, out optical module and its projection device |
| CN110221395B (en) * | 2018-03-02 | 2021-02-26 | 深圳光峰科技股份有限公司 | Optical element's adjustment mechanism, light-emitting module and projection equipment thereof |
| CN108459471B (en) * | 2018-03-20 | 2020-04-10 | 中国科学院光电技术研究所 | Five-degree-of-freedom online adjustment control system for movable mirror based on DSP |
| CN108459471A (en) * | 2018-03-20 | 2018-08-28 | 中国科学院光电技术研究所 | A kind of index glass five degree of freedom on-line tuning control system based on DSP |
| CN109239887A (en) * | 2018-11-28 | 2019-01-18 | 中国科学院长春光学精密机械与物理研究所 | Space optical remote sensor large-scale circular reflecting mirror flexible support structure |
| CN113917645A (en) * | 2021-11-01 | 2022-01-11 | 中国科学院光电技术研究所 | Lens elastic supporting device |
| CN113917645B (en) * | 2021-11-01 | 2023-03-31 | 中国科学院光电技术研究所 | Lens elastic supporting device |
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Application publication date: 20120620 |