CN102169218B - Optical element axial adjusting device with aligning function - Google Patents
Optical element axial adjusting device with aligning function Download PDFInfo
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- CN102169218B CN102169218B CN2011101270305A CN201110127030A CN102169218B CN 102169218 B CN102169218 B CN 102169218B CN 2011101270305 A CN2011101270305 A CN 2011101270305A CN 201110127030 A CN201110127030 A CN 201110127030A CN 102169218 B CN102169218 B CN 102169218B
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- optical element
- lens barrel
- balladeur train
- adjusting device
- microscope base
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- Microscoopes, Condenser (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
The invention provides an optical element axial adjusting device with an aligning function and relates to the technical field of deep ultraviolet lithography objective lens design and debugging. By using the device, the problem that the radial error is caused in the axial adjustment of the traditional optical element axial adjusting device is solved. The axial adjusting device can be regarded as a lens cone unit of an objective lens integrally, wherein a lens base is placed into the lens cone through the precise matching of an axle hole; a sliding frame is arranged on an external cylindrical surface of the lens cone; the lens base is used for aligning a lens frame component; the sliding frame is connected with an internal lens frame component through guide nails; the sliding frame is pushed by three piezoelectric drivers at the same time, so as to drive the lens frame and an optical element to axially move forwards; a recovering force supporting the sliding frame to retreat is supplied by a spring; and when any position of stroke is adjusted axially, the optical element can be aligned by precisely adjusting a spiral dial gauge and the guide nails. The axial adjusting device provided by the invention has the advantages of large adjustment stroke, high adjustment precision and the like and is convenient to operate.
Description
Technical field
The present invention relates to deep UV projection photoetching objective lens structural design and integration techno logy field, be specifically related to a kind of device that optical element is axially adjusted in the photoetching projection objective lens system that can be used for.
Background technology
The projection lithography equipment is the key equipment in the large scale integrated circuit manufacturing process; Improving constantly along with integrated circuit live width fine degree in recent years; The resolution of projection optics equipment also improves gradually, and the ArF excimer laser projection lithography of wavelength 193.368nm equipment has become the main flow equipment that 90nm, 65nm and 45nm node integrated circuit are made at present.In the structural design and assembling process of light projection photoetching objective lens,, thereby need adjust the axial location of some responsive optical element for the various aberrations of acquisition good optical performance need to optical system compensate.
U.S. Pat 6275344B1; A kind of optical element axial adjusting device is disclosed in calendar year 2001; Three drivers are distributed in picture frame circumferentially so that driving force to be provided, and spring provides restoring force, and realize motion switching-over and the final axially function of adjustment that realizes through flexible structure.U.S. Pat 6930842B2; The optical component keeper that discloses a kind of exposure sources in 2005; Three drive mechanism of radial equipartition drive the tangential through amplification module and oriented module and convert axially-movable into, thereby realize the axially-movable of optical element.But above-mentioned adjusting gear is difficult to be controlled at reasonable range with axially adjusting the Radial Motion Error that causes owing to receive the restriction of processing technology, machining precision, can bring other aberration when compensating certain aberration.
Summary of the invention
The present invention provides a kind of optical element axial adjusting device with aligning function for solving the problem that causes radial error when existing optical element axial adjusting device is axially adjusted.
A kind of optical element axial adjusting device with aligning function; Comprise optical element, picture frame, microscope base, lens barrel, balladeur train, three piezoelectric actuators, three piezoelectric actuator seats, three guide pins of three spiral dial gauges and springs; Said microscope base is arranged in the lens barrel; Picture frame is arranged in the microscope base, and said optical element is arranged in the picture frame; Said balladeur train is installed on the last ladder face of cylinder of lens barrel; Said three spiral dial gauges pass three spiral dial gauge microscope base mounting holes adjustment picture frames that are provided with on three the spiral dial gauge lens barrel mounting holes being provided with on the ladder face of cylinder on three spiral dial gauge balladeur train holes being provided with on the balladeur train external cylindrical surface, the lens barrel and the microscope base face of cylinder; On three guide pin lens barrel mounting holes that are provided with on the ladder face of cylinder on three guide pin balladeur train holes through being provided with on the balladeur train external cylindrical surface of three guide pins, the lens barrel, the microscope base face of cylinder three guide pin threaded holes that are provided with on three guide pin microscope base mounting holes and the picture frame external cylindrical surface being set is threaded; Said three piezoelectric actuators are fixed on three piezoelectric actuator seats, and said three piezoelectric actuator seats are installed on three datum clamp faces on the lens barrel downstairs face of cylinder, and an end of said spring is fixed on the lens barrel external cylindrical surface, and the other end is fixed on the balladeur train.
Principle of the present invention: the optical element axial adjusting device with aligning function of the present invention, can regard a lens barrel unit of object lens on the whole as.Put into microscope base after picture frame, optical element are bonding, and grind inclination tolerance and the tolerance of interval that spacer ring guarantees the optical element initial position through repairing; Through the axis hole precision-fit microscope base is put into lens barrel; Balladeur train is installed on the lens barrel external cylindrical surface, and to the picture frame assembly aligning in the microscope base, the picture frame and the outermost balladeur train that will mix up the heart through guide pin then fuse through three spiral dial gauges; During work; Three piezoelectric actuators promote balladeur train simultaneously and picture frame axially moves along the lens barrel external cylindrical surface; And the error that rotatablely moves of a plurality of mounting holes restriction optical elements through being distributed in lens barrel and microscope base, the spring restoring force that provides balladeur train and picture frame axially to retreat simultaneously.Axially in the whole stroke of adjustment, all can realize the aligning of picture frame assembly optional position through accurate adjustment guide pin and spiral dial gauge.
Beneficial effect of the present invention: optical element axial adjusting device of the present invention all has the aligning function in the everywhere of axially adjusting stroke; Overcome existing adjusting gear and unavoidably can bring the shortcoming of Radial Motion Error into, can effectively reach the performance that compensation effect improves optical system.
Description of drawings
Fig. 1 is the optical element axial adjusting device synoptic diagram with aligning function of the present invention;
Fig. 2 is the optical element axial adjusting device cut-open view with aligning function of the present invention;
Fig. 3 is a lens barrel structure synoptic diagram of the present invention;
Fig. 4 is a balladeur train structural representation of the present invention;
Fig. 5 is a mirror-seat structure synoptic diagram of the present invention;
Fig. 6 is a picture frame structural representation of the present invention.
Among the figure: 1, optical element, 2, picture frame, 3, microscope base, 4, lens barrel, 5, balladeur train; 6, piezoelectric actuator, 7, the piezoelectric actuator seat, 8, the spiral dial gauge, 9, spring, 10, guide pin; 11, spacer ring, 4-1, spiral dial gauge lens barrel mounting hole, 4-2, guide pin lens barrel mounting hole, 4-3, datum clamp face, 4-3-1, threaded hole; 5-1, balladeur train boss, 5-2, spiral dial gauge balladeur train hole, 5-3, guide pin balladeur train hole, 3-1 microscope base boss; 3-2, spiral dial gauge microscope base hole, 3-3, guide pin microscope base mounting hole, 2-1 picture frame boss, 2-2, guide pin threaded hole.
Embodiment
Embodiment one, combination Fig. 1 to Fig. 6 explain this embodiment; A kind of optical element axial adjusting device with aligning function; Comprise optical element 1, picture frame 2, microscope base 3, lens barrel 4, balladeur train 5, three piezoelectric actuators 6, three piezoelectric actuator seats 7, three 8 three guide pins 10 of spiral dial gauge and springs 9; Said microscope base 3 is arranged in the lens barrel 4, and picture frame 2 is arranged in the microscope base 3, and said optical element 1 is arranged in the picture frame 2; Said balladeur train 5 is installed on the last ladder face of cylinder of lens barrel 4; Said three spiral dial gauges 8 pass three spiral dial gauge microscope base mounting hole 3-2 being provided with on three the spiral dial gauge lens barrel mounting hole 4-1 being provided with on the ladder face of cylinder on three spiral dial gauge balladeur train hole 5-2 being provided with on balladeur train 5 external cylindrical surfaces, the lens barrel 4 and microscope base 3 faces of cylinder to picture frame 2 alignings; On three guide pin lens barrel mounting hole 4-2 that are provided with on the ladder face of cylinder on three guide pin balladeur train hole 5-3 through being provided with on balladeur train 5 external cylindrical surfaces of three guide pins 10, the lens barrel 4, microscope base 3 faces of cylinder three guide pin microscope base mounting hole 3-3 are set, three threaded hole 2-2 that are provided with on picture frame 2 external cylindrical surfaces are threaded; Said three piezoelectric actuators 6 are fixed on three piezoelectric actuator seats 7; Said three piezoelectric actuator seats 7 are installed on three datum clamp face 4-3 on the lens barrel 4 downstairs faces of cylinder; One end of said spring 9 is fixed on lens barrel 4 external cylindrical surfaces, and the other end is fixed on the balladeur train 5.
The described balladeur train 5 of this embodiment is an annular, circumferentially is uniformly distributed with three balladeur train boss 5-1 on said balladeur train 5 external cylindrical surfaces, and said piezoelectric actuator 6 is delivered to axially-movable on the balladeur train 5 through it; Described three spiral dial gauge balladeur train hole 5-2 and three guide pin balladeur train hole 5-3 circumferentially evenly are provided with along balladeur train 5.
Described three the spiral dial gauge lens barrel mounting hole 4-1 of this embodiment and three guide pin lens barrel mounting hole 4-2 are provided with along the last ladder cylindrical surface peripheral of lens barrel 4 is even.Be distributed with the threaded hole 4-3-1 that is connected with piezoelectric actuator seat 7 on the datum clamp face 4-3 of three electric drive seats 7 on the said lens barrel 4 downstairs faces of cylinder.
Described three the guide pin microscope base mounting hole 3-3 of this embodiment and three spiral dial gauge microscope base mounting hole 3-2 are provided with along the external cylindrical surface of microscope base 3 is circumferentially even; Be respectively applied for the guiding when realizing that spiral dial gauge 8 and guide pin 10 move, microscope base 3 bottom surfaces are provided with microscope base boss 3-1 and are used to install spacer ring 11 and picture frame 2; Picture frame 2 bottom surfaces are provided with picture frame boss 2-1 and are used to place optical element 1, and picture frame 2 circumferentially is uniformly distributed with the many places through hole, realize the bonding of picture frame 2 and optical element 1 as glue injection channel; Circumferentially be uniformly distributed with threaded hole 2-2 on picture frame 2 external cylindrical surfaces, be threaded with guide pin 10 through described threaded hole 2-2.
Picture frame of the present invention 2, optical element 1 are put into microscope base 3 through feeling relieved after bonding, and grind spacer ring 11 to guarantee the inclination tolerance and the tolerance of interval of optical element 1 initial position through repairing; Through the axis hole precision-fit microscope base 3 is put into lens barrel 4; Balladeur train 5 is installed on the lens barrel external cylindrical surface, and through picture frame 2 alignings in 8 pairs of microscope bases of three spiral dial gauges 3, the picture frame 2 that will mix up the heart through guide pin 10 then fuses with outermost balladeur train 5; During operation; Three piezoelectric actuators 7 promote balladeur train 5 simultaneously and axially move along the lens barrel external cylindrical surface; And the error that rotatablely moves of a plurality of mounting holes restriction optical elements 1 through being distributed in lens barrel 4 and microscope base 3; Balladeur train 5 will drive the axial advancement that inboard picture frame 2 is realized optical elements 1, and the restoring force of spring 9 can guarantee that balladeur train 5 axially retreats along the lens barrel external cylindrical surface.Axially in the whole stroke of adjustment, all can realize the aligning of picture frame assembly optional position through accurate adjustment guide pin 10 and spiral dial gauge 8.
Claims (7)
1. optical element axial adjusting device with aligning function; Comprise optical element (1), picture frame (2), microscope base (3), lens barrel (4), balladeur train (5), three piezoelectric actuators (6), three piezoelectric actuator seats (7), three spiral dial gauges (8), three guide pins (10) and spring (9); Said microscope base (3) is arranged in the lens barrel (4); Picture frame (2) is arranged in the microscope base (3), and said optical element (1) is arranged in the picture frame (2); It is characterized in that; Said balladeur train (5) is installed on the last ladder face of cylinder of lens barrel (4); Said three spiral dial gauges (8) pass three spiral dial gauge balladeur train holes (5-2) of being provided with on balladeur train (5) external cylindrical surface, lens barrel (4) and go up three the spiral dial gauge microscope base mounting holes (3-2) that are provided with on three the spiral dial gauge lens barrel mounting holes (4-1) that are provided with on the ladder face of cylinder and microscope base (3) face of cylinder; Three guide pin balladeur train holes (5-3), the lens barrel (4) of three guide pins (10) through being provided with on balladeur train (5) external cylindrical surface gone up three the guide pin microscope base mounting holes (3-3) that are provided with on three guide pin lens barrel mounting holes (4-2) of being provided with on the ladder face of cylinder, microscope base (3) face of cylinder, and three the guide pin threaded holes (2-2) that are provided with on picture frame (2) external cylindrical surface are threaded; Said three piezoelectric actuators (6) are fixed on three piezoelectric actuator seats (7); Said three piezoelectric actuator seats (7) are installed on three datum clamp faces (4-3) on lens barrel (4) the downstairs face of cylinder; One end of said spring (9) is fixed on the external cylindrical surface of lens barrel (4), and the other end is fixed on the balladeur train (5).
2. a kind of optical element axial adjusting device with aligning function according to claim 1 is characterized in that said balladeur train (5) is an annular, circumferentially is uniformly distributed with three place's balladeur train boss (5-1) on balladeur train (5) external cylindrical surface.
3. a kind of optical element axial adjusting device with aligning function according to claim 1 is characterized in that, described three spiral dial gauge balladeur train holes (5-2) and three guide pin balladeur train holes (5-3) circumferentially evenly are provided with along balladeur train (5) respectively.
4. a kind of optical element axial adjusting device according to claim 1 with aligning function; It is characterized in that three spiral dial gauge lens barrel mounting holes (4-1) and three guide pin lens barrel mounting holes (4-2) evenly are provided with along the last ladder cylindrical surface peripheral of lens barrel (4) respectively.
5. a kind of optical element axial adjusting device according to claim 1 with aligning function; It is characterized in that three guide pin microscope base mounting holes (3-3) and three spiral dial gauge microscope base mounting holes (3-2) circumferentially evenly are provided with along the external cylindrical surface of microscope base (3) respectively.
6. a kind of optical element axial adjusting device with aligning function according to claim 1 is characterized in that microscope base (3) bottom surface is provided with boss (3-1), and picture frame (2) bottom surface is provided with boss (2-1).
7. a kind of optical element axial adjusting device according to claim 1 with aligning function; It is characterized in that, be distributed with the threaded hole (4-3-1) that is connected with piezoelectric actuator seat (7) on three datum clamp faces (4-3) on said lens barrel (4) the downstairs face of cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101270305A CN102169218B (en) | 2011-05-17 | 2011-05-17 | Optical element axial adjusting device with aligning function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101270305A CN102169218B (en) | 2011-05-17 | 2011-05-17 | Optical element axial adjusting device with aligning function |
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| Publication Number | Publication Date |
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| CN102169218A CN102169218A (en) | 2011-08-31 |
| CN102169218B true CN102169218B (en) | 2012-06-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2011101270305A Expired - Fee Related CN102169218B (en) | 2011-05-17 | 2011-05-17 | Optical element axial adjusting device with aligning function |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103389558B (en) * | 2013-07-29 | 2015-12-02 | 中国科学院长春光学精密机械与物理研究所 | Lens axial adjusting device in lithographic objective |
| CN103913808B (en) * | 2014-03-25 | 2016-09-28 | 中国人民解放军国防科学技术大学 | Four-dimensional optical regulator and using method thereof |
| CN107702677A (en) * | 2017-11-24 | 2018-02-16 | 中国科学院长春光学精密机械与物理研究所 | A kind of adjustable support for optical element detection |
| CN109521543B (en) * | 2018-11-19 | 2020-05-19 | 浙江大学 | High-precision eccentricity-eliminating focusing mechanism suitable for general optical system |
| CN110908058B (en) * | 2019-10-31 | 2023-04-07 | 中国航空工业集团公司洛阳电光设备研究所 | Multi freedom optical axis timing device |
| CN112859529A (en) * | 2019-11-28 | 2021-05-28 | 上海微电子装备（集团）股份有限公司 | Optical element adjusting device |
| CN113671661B (en) * | 2021-08-19 | 2024-07-26 | 青岛睿维申信息科技有限公司 | Focusing mechanism of objective lens |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6275344B1 (en) * | 1999-03-12 | 2001-08-14 | Carl Zeiss | Device for displacing an optical element along the optical axis |
| US6930842B2 (en) * | 2000-03-31 | 2005-08-16 | Nikon Corporation | Optical element holding device for exposure apparatus |
| EP1605290A2 (en) * | 2004-06-11 | 2005-12-14 | Fujinon Corporation | Piezoelectric actuator, its control method and a lens device |
| CN101025464A (en) * | 2006-02-20 | 2007-08-29 | 佳能株式会社 | Lens apparatus and optical apparatus |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4395052B2 (en) * | 2004-11-10 | 2010-01-06 | 太陽誘電株式会社 | Drive device |
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2011
- 2011-05-17 CN CN2011101270305A patent/CN102169218B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6275344B1 (en) * | 1999-03-12 | 2001-08-14 | Carl Zeiss | Device for displacing an optical element along the optical axis |
| US6930842B2 (en) * | 2000-03-31 | 2005-08-16 | Nikon Corporation | Optical element holding device for exposure apparatus |
| EP1605290A2 (en) * | 2004-06-11 | 2005-12-14 | Fujinon Corporation | Piezoelectric actuator, its control method and a lens device |
| CN101025464A (en) * | 2006-02-20 | 2007-08-29 | 佳能株式会社 | Lens apparatus and optical apparatus |
Non-Patent Citations (1)
| Title |
|---|
| JP特开2006-141102A 2006.06.01 |
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| CN102169218A (en) | 2011-08-31 |
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