CN106556911B - A kind of independent support unit and optical element supporting device - Google Patents
A kind of independent support unit and optical element supporting device Download PDFInfo
- Publication number
- CN106556911B CN106556911B CN201611058938.4A CN201611058938A CN106556911B CN 106556911 B CN106556911 B CN 106556911B CN 201611058938 A CN201611058938 A CN 201611058938A CN 106556911 B CN106556911 B CN 106556911B
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- CN
- China
- Prior art keywords
- glue
- line
- support unit
- support
- optical element
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
Abstract
The invention discloses a kind of independent support unit and optical element supporting devices.Independent support unit of the invention includes a kind of independent support unit, and the independent support unit includes: glue-line, glue-line support, elastic element, adjusting screw；The adjusting screw setting is stretched out on the glue-line support and from the glue-line support；The elastic element is set on the part that the adjusting screw is stretched out from the glue-line support.The invention also discloses a kind of optical element supporting devices including the independent support unit.The independent support unit and optical element supporting device can be realized the adjustment of active surface shape, compensate influence of the extraneous factor to optical component surface shape.
Description
Technical field
The present invention relates to optical field, in particular to a kind of independent support unit and optical element supporting device.
Background technique
With the fast development and application of high-precision precision optical instrument, optical system imaging quality is required also increasingly
The application of height, especially extreme ultraviolet lithography (EUVL), operation wavelength are the wave band of 13~14nm, so optical element is processed,
The technical requirements such as detection, support adjustment require higher than traditional optical system.Extreme ultraviolet lithography system will reach diffraction limit
The requirement of resolution ratio, system wavefront deviation are less than λ/14, and single reflecting surface face shape requires to reach for six mirror systems
0.20nmrms.In the case where so extreme harsh face shape requires, the disturbing factor opposite shape influence in assembling process becomes very tight
Weight.
Summary of the invention
The present invention is directed to overcome defect of the existing technology, the invention adopts the following technical scheme:
On the one hand, the present invention provides a kind of independent support unit, the independent support unit include: glue-line, glue-line support,
Elastic element, adjusting screw；The adjusting screw setting is stretched out on the glue-line support and from the glue-line support；It is described
Elastic element is set on the part that the adjusting screw is stretched out from the glue-line support.
In some embodiments, the elastic element is butterfly spring
In some embodiments, through-hole is provided on the glue-line support, the through-hole is arranged in the glue-line support
The heart.
In some embodiments, the adjusting screw is two, and adjusting screw glue-line support center pair relatively
Claim.
In some embodiments, the glue-line is arranged on the glue-line support by viscose glue.
On the other hand, the present invention provides a kind of optical element supporting device, and the optical element supporting device includes as before
The independent support unit and optical element and support plate；The other side setting of the glue-line of the independent support unit exists
On the optical element；Match with the support plate part that the adjusting screw of the independent support unit is stretched out from glue-line support
It closes, and by elastic element pressure holding between the support plate and the glue-line support.
In some embodiments, the independent support unit is at least three, and the independent support unit is in institute's support plate
On be uniformly arranged.
In some embodiments, the independent support unit is 6, and the independent support unit is uniform in institute's support plate
Setting.
In some embodiments, it is provided with screw hole in the support plate and is cooperated with the supporting screw.
In some embodiments, the glue-line is arranged on the optical element by viscose glue.
The beneficial effects of the present invention are: independent support unit and optical element supporting device provided by the invention can
It realizes the adjustment of active surface shape, influence of the extraneous factor to optical component surface shape is compensated, to improve the precision of optical element.
Detailed description of the invention
Fig. 1 is the structural schematic diagram according to the optical element supporting device of one embodiment of the invention；
Fig. 2 is the optical element supporting device cross-sectional view according to another embodiment of the present invention；
Fig. 3 is the enlarged view of part A in Fig. 2.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with attached drawing and specific implementation
Example, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only to explain this hair
It is bright, but not to limit the present invention.
Below with reference to Fig. 1 to Fig. 3 come to the independent support unit of the embodiment of the present invention and optical element supporting device into
Row is described in detail.
As shown in Figure 1 to Figure 3, the present invention provides a kind of independent support unit 3, and the independent support unit 3 includes: glue-line
31, glue-line support 32, elastic element 33, adjusting screw 34；The adjusting screw 34 be arranged on the glue-line support 32 and from
It is stretched out on the glue-line support 32；The elastic element 33 is set in the adjusting screw 34 and stretches out from the glue-line support 32
Part on.
In some embodiments, the elastic element 33 is butterfly spring.
In some embodiments, through-hole is provided on the glue-line support 32, the through-hole is arranged in the glue-line support 32
Center.
In some embodiments, the adjusting screw 34 is two, and the relatively described glue-line support 32 of the adjusting screw 34
Central symmetry.
In some embodiments, the glue-line 31 is arranged on the glue-line support 32 by viscose glue.
On the other hand, the present invention provides a kind of optical element supporting device 100, and the optical element supporting device 100 wraps
Include foregoing independent support unit 3 and optical element 1 and support plate 2；The glue-line 31 of the independent support unit 3
The other side is arranged on the optical element 1；What the adjusting screw 34 of the independent support unit 3 was stretched out from glue-line support 32
Part cooperates with the support plate 2, and by the elastic element 33 pressure holding the support plate 2 and the glue-line support 32 it
Between.
In some embodiments, the independent support unit 3 is at least three, and the independent support unit 3 is being supported
It is uniformly arranged on disk 2.
In some embodiments, the independent support unit 3 is 6, and the independent support unit 3 is in institute's support plate 2
It is uniformly arranged.
In some embodiments, it is provided with screw hole in the support plate 2 and is cooperated with the adjusting screw 34.
In some embodiments, the glue-line 31 is arranged on the optical element 1 by viscose glue.
To be arranged, there are six be specifically described for 3 optics support devices of independent support unit below.
As shown in Figures 1 to 3, between optical element 1 and support plate 2, if there are six be uniformly arranged on support optics by 60 °
The equally distributed independent branch being made of glue-line 31, glue-line support 32, butterfly spring 33, adjusting screw 34 of the circumferential direction of element
Support unit 3.In each independent support unit 3,31 side of glue-line is bonded on optical element 1, and the other side is bonded in glue-line branch
On seat 32, glue-line support 32 is pressed in support plate 2 by adjusting screw 34 and butterfly spring 33, by reversing adjusting screw 34
Adjustment 31 thickness of glue-line may be implemented.
Analyze its whole freedom degree, one be made of glue-line 31, glue-line support 32, butterfly spring 33, adjusting screw 34
Independent support unit 3 provides the constraint of vertical direction, and independence support unit 3 is whole at six provides six-freedom degree constraint, completes
Accurate constraint and support function.For each supporting point part in six supporting points, as shown in figure 3, along optical element 1
Radial rotating direction (direction Mr), along optical element axial direction rotation direction (direction Mz), along the tangential rotation direction (Mt of optical element
Direction) three degree of freedom realizes in corresponding in each direction structural flexibility by glue-line 31, is radially translatable along optical element
Direction (direction Fr) freedom degree relies on an independence being made of glue-line 31, glue-line support 32, butterfly spring 33, adjusting screw 34
3 active accommodation of support unit is realized.
The beneficial effects of the present invention are: independent support unit and optical element supporting device provided by the invention can
It realizes the adjustment of active surface shape, influence of the extraneous factor to optical component surface shape is compensated, to improve the precision of optical element.
In the description of the present invention, it is to be understood that, term " center ", " longitudinal direction ", " transverse direction ", " length ", " width ",
" thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", "outside", " up time
The orientation or positional relationship of the instructions such as needle ", " counterclockwise ", " axial direction ", " radial direction ", " circumferential direction " be orientation based on the figure or
Positional relationship is merely for convenience of description of the present invention and simplification of the description, rather than the device or element of indication or suggestion meaning must
There must be specific orientation, be constructed and operated in a specific orientation, therefore be not considered as limiting the invention.
In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance
Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include at least one this feature.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " etc.
Term shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integral；It can be mechanical connect
It connects, is also possible to be electrically connected；It can be directly connected, can also can be in two elements indirectly connected through an intermediary
The interaction relationship of the connection in portion or two elements, unless otherwise restricted clearly.For those of ordinary skill in the art
For, the specific meanings of the above terms in the present invention can be understood according to specific conditions.
In the present invention unless specifically defined or limited otherwise, fisrt feature in the second feature " on " or " down " can be with
It is that the first and second features directly contact or the first and second features pass through intermediary mediate contact.Moreover, fisrt feature exists
Second feature " on ", " top " and " above " but fisrt feature be directly above or diagonally above the second feature, or be merely representative of
First feature horizontal height is higher than second feature.Fisrt feature can be under the second feature " below ", " below " and " below "
One feature is directly under or diagonally below the second feature, or is merely representative of first feature horizontal height less than second feature.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means specific features, structure, material or spy described in conjunction with this embodiment or example
Point is included at least one embodiment or example of the invention.In the present specification, schematic expression of the above terms are not
It must be directed to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be in office
It can be combined in any suitable manner in one or more embodiment or examples.In addition, without conflicting with each other, the skill of this field
Art personnel can tie the feature of different embodiments or examples described in this specification and different embodiments or examples
It closes and combines.
Although the embodiments of the present invention has been shown and described above, it is to be understood that above-described embodiment is example
Property, it is not considered as limiting the invention, those skilled in the art within the scope of the invention can be to above-mentioned
Embodiment is changed, modifies, replacement and variant.
The above described specific embodiments of the present invention are not intended to limit the scope of the present invention..Any basis
Any other various changes and modifications made by technical concept of the invention should be included in the guarantor of the claims in the present invention
It protects in range.
Claims (10)
1. a kind of independent support unit characterized by comprising
Glue-line, glue-line support, elastic element, adjusting screw；
The side of the glue-line is arranged on the glue-line support；
The adjusting screw setting is stretched out on the glue-line support and from the glue-line support；
The elastic element is set on the part that the adjusting screw is stretched out from the glue-line support.
2. independent support unit as described in claim 1, which is characterized in that the elastic element is butterfly spring.
3. independent support unit as described in claim 1, which is characterized in that it is provided with through-hole on the glue-line support, it is described
The center of the glue-line support is arranged in through-hole.
4. independent support unit as described in claim 1, which is characterized in that the adjusting screw is two, and the adjustment
The relatively described glue-line support central symmetry of screw.
5. independent support unit as described in claim 1, which is characterized in that the glue-line is arranged by viscose glue in the glue-line
On support.
6. a kind of optical element supporting device, which is characterized in that including independent support unit as described in claim 1, and
Optical element and support plate；
The other side of the glue-line of the independent support unit is arranged on the optical element；
The part that the adjusting screw of the independent support unit is stretched out from glue-line support cooperates with the support plate, and will be described
Elastic element presses between the support plate and the glue-line support.
7. optical element supporting device as claimed in claim 6, which is characterized in that the independent support unit is at least three
It is a, and the independent support unit is uniformly arranged in the support plate.
8. optical element supporting device as claimed in claim 7, which is characterized in that the independent support unit is 6, and institute
Independent support unit is stated to be uniformly arranged in the support plate.
9. optical element supporting device as claimed in claim 6, which is characterized in that be provided in the support plate screw hole with
The adjusting screw is cooperated.
10. optical element supporting device as claimed in claim 6, which is characterized in that the glue-line is arranged by viscose glue in institute
It states on optical element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611058938.4A CN106556911B (en) | 2016-11-25 | 2016-11-25 | A kind of independent support unit and optical element supporting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611058938.4A CN106556911B (en) | 2016-11-25 | 2016-11-25 | A kind of independent support unit and optical element supporting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106556911A CN106556911A (en) | 2017-04-05 |
| CN106556911B true CN106556911B (en) | 2019-04-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611058938.4A Active CN106556911B (en) | 2016-11-25 | 2016-11-25 | A kind of independent support unit and optical element supporting device |
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| CN (1) | CN106556911B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107907958B (en) * | 2017-11-24 | 2019-10-25 | 中国科学院长春光学精密机械与物理研究所 | A kind of device being used to support optical element |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62175933A (en) * | 1986-01-29 | 1987-08-01 | Olympus Optical Co Ltd | Inclination adjusting device for actuator |
| CN105403154A (en) * | 2015-12-21 | 2016-03-16 | 中国科学院长春光学精密机械与物理研究所 | Support apparatus capable of realizing active surface shape control of optical element |
| CN105423989A (en) * | 2015-12-21 | 2016-03-23 | 中国科学院长春光学精密机械与物理研究所 | Flexible supporting device of high-precision surface shape detection of optical component |
| CN105425389A (en) * | 2015-12-21 | 2016-03-23 | 中国科学院长春光学精密机械与物理研究所 | Multi-point flexible supporting device allowing realization of active surface shape adjustment |
| CN105467544A (en) * | 2015-12-21 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | Multi-point flexible supporting device used for high-precision optical component |
| CN105467545A (en) * | 2015-12-21 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | Optical component supporting device with surface shape adjustment function |
-
2016
- 2016-11-25 CN CN201611058938.4A patent/CN106556911B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62175933A (en) * | 1986-01-29 | 1987-08-01 | Olympus Optical Co Ltd | Inclination adjusting device for actuator |
| CN105403154A (en) * | 2015-12-21 | 2016-03-16 | 中国科学院长春光学精密机械与物理研究所 | Support apparatus capable of realizing active surface shape control of optical element |
| CN105423989A (en) * | 2015-12-21 | 2016-03-23 | 中国科学院长春光学精密机械与物理研究所 | Flexible supporting device of high-precision surface shape detection of optical component |
| CN105425389A (en) * | 2015-12-21 | 2016-03-23 | 中国科学院长春光学精密机械与物理研究所 | Multi-point flexible supporting device allowing realization of active surface shape adjustment |
| CN105467544A (en) * | 2015-12-21 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | Multi-point flexible supporting device used for high-precision optical component |
| CN105467545A (en) * | 2015-12-21 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | Optical component supporting device with surface shape adjustment function |
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| CN106556911A (en) | 2017-04-05 |
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