CN107450173A - A kind of Mirau molded breadths visual field interferes microcobjective optical system - Google Patents
A kind of Mirau molded breadths visual field interferes microcobjective optical system Download PDFInfo
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- CN107450173A CN107450173A CN201710528486.XA CN201710528486A CN107450173A CN 107450173 A CN107450173 A CN 107450173A CN 201710528486 A CN201710528486 A CN 201710528486A CN 107450173 A CN107450173 A CN 107450173A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/02—Objectives
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
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Abstract
The invention discloses a kind of Mirau molded breadths visual field to interfere microcobjective optical system.The system includes the first lens, the second lens, the 3rd lens, the 4th lens, the 5th lens, the 6th lens, the 7th lens, the 8th lens, reference plate and the beam-splitter being sequentially arranged along same optical axis；Illumination light passes sequentially through the first~the 8th lens and reference plate, it is divided into two beams at beam-splitter, it is a branch of to incide the return of reference plate surface, another beam incides part surface to be measured and returned, two beams, which are launched after light overlaps at beam-splitter, to be interfered, according to the microscopic characteristics of caused interference fringe analysis part to be measured.The system magnification is 0.5X, and numerical aperture 0.015, Entry pupil diameters are 12 millimeters, and focal length is 400 millimeters, and parfocal distance is 280 millimeters, and visual field is up to 48 millimeters.Optical system structure of the present invention is simple, good imaging quality, suitable for relevant scanning interferometer method, the three-dimensional appearance available for measurement rough surface.
Description
Technical field
The invention belongs to microcobjective Optical System Design field, a kind of Mirau molded breadths visual field interferes microcobjective optics
System.
Background technology
Interference microcobjective is mainly used in micro surface three dimension topography measurement, and such as industry and scientific research field are commonly used non-
Contact contourgraph, it is necessary to used with the interference microcobjective of various multiplying powers.In 2/3 " CCD, cylinder mirror is when being 1X, 2.5X
The linear field of interference microcobjective be 9.3mm, the linear field of 10X interference microcobjectives be 0.58mm, and 20X interferes microcobjective
Linear field be 0.15mm, the linear fields of 50X interference microcobjectives be 0.023mm, and 100X interferes the linear field of microcobjective to be
0.0009mm.Under normal circumstances, enlargement ratio is lower, and visual field is bigger, and therefore, the interference microcobjective of low power is generally with bigger
Visual field.The primary structure of interference microcobjective has three kinds of Linnik types, Mirau types and Michelson types.Linnik types due to
Due to needing two essentially equal Amici prisms, take up space big, cost is high, is typically only used for the powerful micro- thing of interference
Mirror.
Mirau types due to the presence of central obscuration, block too many light, influence to be imaged when enlargement ratio is less than 10X
Effect.J.F.Biegen has delivered " New developments in Mirau in Optical Society of America's annual meeting in 1988
Interferometry " speech, it is proposed that a solution is to go control by reference to planar surface using polarizer
The transmission quantity of the light of transparent part, here it is nothing to block Mirau type object lens.But polarizer to design it is more complicated, more
It is difficult to compensate dispersion, while can also introduces due to sensitivity issues caused by polarization effect.
The interference microcobjective of the low power produced on the market at present is mainly Michelson types interference microcobjective.But
It is that, because microcobjective enlargement ratio is smaller, operating distance is bigger, when design is less than 2X interference microcobjective,
Because Amici prism and off-axis reference path are orthogonal, the mechanical structure corresponding to it takes up space too greatly Michelson types structure,
It is and impracticable.T.Dresel et al. is being published in AO article " Three-dimensional sensing of rough
Itd is proposed in surface by coherence radar ", when visual field is more than 10mm, Michelson types interference microcobjective mistake
It is specific in interferometer that big mechanical structure can only be used to it, and flexible can not must switch other object lens, and inadvisable.
The content of the invention
It is an object of the invention to provide a kind of Mirau molded breadths visual field simple in construction, good imaging quality to interfere micro- thing
Mirror optical system.
The technical solution for realizing the object of the invention is：A kind of Mirau molded breadths visual field interferes microcobjective optical system,
Including arranged from left to right along same optical axis the first lens, the second lens, the 3rd lens, the 4th lens, the 5th lens, the 6th
Lens, the 7th lens, the 8th lens, reference plate and beam-splitter；
Illumination light pass sequentially through the first lens, the second lens, the 3rd lens, the 4th lens, the 5th lens, the 6th lens,
7th lens, the 8th lens and reference plate, two beams are divided at beam-splitter, it is a branch of to incide the return of reference plate surface, separately
A branch of to incide part surface return to be measured, two beams, which are launched after light overlaps at beam-splitter, to be interfered, according to caused interference bar
Line analyzes the microscopic characteristics of part to be measured.
Further, first lens and the second lens are cemented doublet, and the 3rd lens and the 4th lens are double glue
Lens are closed, the 5th lens and the 6th lens are cemented doublet.
Further, the bore of first lens is 14 millimeters, and center thickness is 2.5 millimeters, and the surface of left and right two is
Sphere, left sphere curvature radius are 27.15 millimeters, and right sphere curvature radius is -51.30 millimeters, and the glass trade mark used is H-
BAK2；The bore of second lens is 14 millimeters, and center thickness is 2.0 millimeters, and the surface of left and right two is sphere, left spheric curvature half
Footpath is -51.30 millimeters, and right sphere curvature radius is 327.14 millimeters, and the glass trade mark used is H-LAK7A；3rd lens
Bore is 12 millimeters, and center thickness is 2.5 millimeters, and the surface of left and right two is sphere, and left sphere curvature radius is -97.36 millimeters,
Right sphere curvature radius is -12.30 millimeters, and the glass trade mark used is H-FK61；The bore of 4th lens is 12 millimeters, center
Thickness be 2 millimeters, the surface of left and right two is sphere, left sphere curvature radius be -12.30 millimeters, right sphere curvature radius for -
890.55 millimeters, the glass trade mark used is H-ZLAF76；The bore of 5th lens is 20 millimeters, and center thickness is 3 millimeters, left and right
Two surfaces are sphere, and left sphere curvature radius is -36.13 millimeters, and right sphere curvature radius is 21.02 millimeters, use
The glass trade mark is F6；The bore of 6th lens is 20 millimeters, and center thickness is 4 millimeters, and the surface of left and right two is sphere, left sphere
Radius of curvature is 21.02 millimeters, and right sphere curvature radius is 90.67 millimeters, and the glass trade mark used is H-ZBAF4；7th is saturating
The bore of mirror is 54 millimeters, and center thickness is 6 millimeters, and the surface of left and right two is sphere, and left sphere curvature radius is -88.51 millis
Rice, right sphere curvature radius are -44.10 millimeters, and the glass trade mark used is H-ZK21；The bore of 8th lens is 58 millimeters,
Center thickness is 6 millimeters, and the surface of left and right two is sphere, and left sphere curvature radius is 232.69 millimeters, right sphere curvature radius
For -232.69 millimeters, the glass trade mark used is H-ZF5；Reference plate is a circular optical flat board, its a diameter of 60 millimeters, thick
Spend for 8 millimeters, the glass material used is fused silica；Beam-splitter is a circular optical flat board, its a diameter of 60 millimeters, and thickness is
8 millimeters, the glass material used is fused silica；
The airspace of second lens and the 3rd lens is 40.2 millimeters, between the air of the 4th lens and the 5th lens
It is divided into 31.04 millimeters, the airspace of the 6th lens and the 7th lens is 38.56 millimeters, the sky of the 7th lens and the 8th lens
For gas at intervals of 0.2 millimeter, the airspace of the 8th lens and reference plate is 8 millimeters, and the airspace of reference plate and beam-splitter is
58 millimeters.
Further, the reference plate angle of inclination is 3 °.
Further, the reference plate upper surface plating depolarization spectro-film, transmittance are 85%: 15% with reflectivity.
Further, the reference plate be located at the side surface of the 8th lens one surface roughness Ra value be better than 0.2 nanometer, position
Surface roughness Ra value in the side surface of beam-splitter one is better than 0.5 nanometer.
Further, the angle of inclination of the beam-splitter is 1.5 °.
Further, the surface plating depolarization spectro-film of the beam-splitter, transmittance is 50%: 50% with reflectivity.
Further, the surface roughness Ra value of the light splitting plate surface is better than 0.5 nanometer.
Further, it is characterised in that the numerical aperture of the interference microcobjective optical system is 0.015, Entry pupil diameters
For 12 millimeters, focal length is 400 millimeters, and parfocal distance is 280 millimeters, and operating distance is 58 millimeters, and linear field is 48 millimeters, is used
Part thang-kng flat board is formd without Mirau type structures are blocked, and by reference to the inclination of plate, beam-splitter, makes to be not involved in the anti-of interference
Irradiating light beam is off-axis.
Compared with prior art, its remarkable advantage is the present invention：(1) part thang-kng flat board is employed, without central obscuration,
Inclination with reference to plate and beam-splitter makes the reflected beams for being not involved in interference off-axis, forms complete two-beam interference, so as to
High fringe contrast can be obtained；(2) numerical aperture be 0.015, Entry pupil diameters be 12 millimeters, focal length be 400 millimeters, parfocalization away from
From for 280 millimeters, operating distance is 58 millimeters, and linear field is 48 millimeters, and image quality is excellent, and image quality is close to diffraction pole
Limit；(3) it is simple in construction, using optical element is few, cost is low, suitable for relevant scanning interferometer method, available for measuring rough surface
Three-dimensional appearance.
Brief description of the drawings
Fig. 1 is the structural representation that Mirau molded breadths visual field of the present invention interferes microcobjective optical system.
Fig. 2 is the light path schematic diagram that Mirau molded breadths visual field of the present invention interferes microcobjective optical system.
Fig. 3 is the transfer curve figure that Mirau molded breadths visual field of the present invention interferes microcobjective optical system.
Fig. 4 is the wave aberration curve map that Mirau molded breadths visual field of the present invention interferes microcobjective optical system.
Fig. 5 is the curvature of field/distortion curve figure that Mirau molded breadths visual field of the present invention interferes microcobjective optical system.
Fig. 6 is the vertical axial aberration curve map that Mirau molded breadths visual field of the present invention interferes microcobjective optical system.
Embodiment
The enlargement ratio of the interference microcobjective optical system of the present invention is 0.5X, numerical aperture 0.015, Entry pupil diameters
For 12 millimeters, focal length is 400 millimeters, and parfocal distance is 280 millimeters, and visual field is up to 48 millimeters.0.5 times of unpolarized nothing of the present invention
Block Mirau molded breadths visual field interference microcobjective and be similar to Mirau types, difference is to employ part thang-kng flat board, without in
The heart blocks, meanwhile, the reflected beams that the inclination of reference plate and beam-splitter makes those be not involved in interfering are off-axis, form complete double light
Beam interferometer, so as to obtain high fringe contrast, its optical system structure is simple, good imaging quality, suitable for relevant scanning
Interferometric method, the three-dimensional appearance available for measurement rough surface.
As shown in figure 1, Mirau molded breadths visual field of the present invention interference microcobjective optical system, including along same optical axis from a left side
The first lens 1, the second lens 2, the 3rd lens 3, the 4th lens 4, the 5th lens 5, the 6th lens the 6, the 7th arranged to the right are saturating
Mirror 7, the 8th lens 8, reference plate 9 and beam-splitter 10；
Illumination light passes sequentially through the first lens 1, the second lens 2, the 3rd lens 3, the 4th lens 4, the 5th lens the 5, the 6th
Lens 6, the 7th lens 7, the 8th lens 8 and reference plate 9, two beams are divided at beam-splitter 10, it is a branch of to incide reference plate
Surface is returned, and another beam incides part surface to be measured and returned, and two beams, which are launched after light overlaps at beam-splitter 10, to be interfered, according to
The microscopic characteristics of caused interference fringe analysis part to be measured.
Further, the lens 2 of the first lens 1 and second are cemented doublet, and the 3rd lens 3 are with the 4th lens 4
Cemented doublet, the 5th lens 5 and the 6th lens 6 are cemented doublet.
With reference to table 1, the bore of first lens 1 is 14 millimeters, and center thickness is 2.5 millimeters, and the surface of left and right two is
Sphere, left sphere curvature radius are 27.15 millimeters, and right sphere curvature radius is -51.30 millimeters, and the glass trade mark used is H-
BAK2；The bore of second lens 2 is 14 millimeters, and center thickness is 2.0 millimeters, and the surface of left and right two is sphere, left spheric curvature
Radius is -51.30 millimeters, and right sphere curvature radius is 327.14 millimeters, and the glass trade mark used is H-LAK7A；3rd lens 3
Bore be 12 millimeters, center thickness be 2.5 millimeters, the surface of left and right two is sphere, left sphere curvature radius be -97.36 milli
Rice, right sphere curvature radius are -12.30 millimeters, and the glass trade mark used is H-FK61；The bore of 4th lens 4 is 12 millimeters,
Center thickness is 2 millimeters, and the surface of left and right two is sphere, and left sphere curvature radius is -12.30 millimeters, right sphere curvature radius
For -890.55 millimeters, the glass trade mark used is H-ZLAF76；The bore of 5th lens 5 is 20 millimeters, and center thickness is 3 millimeters,
The surface of left and right two is sphere, and left sphere curvature radius is -36.13 millimeters, and right sphere curvature radius is 21.02 millimeters, is adopted
The glass trade mark is F6；The bore of 6th lens 6 is 20 millimeters, and center thickness is 4 millimeters, and the surface of left and right two is sphere,
Left sphere curvature radius is 21.02 millimeters, and right sphere curvature radius is 90.67 millimeters, and the glass trade mark used is H-ZBAF4；
The bore of 7th lens 7 be 54 millimeters, center thickness be 6 millimeters, the surface of left and right two is sphere, left sphere curvature radius for-
88.51 millimeters, right sphere curvature radius is -44.10 millimeters, and the glass trade mark used is H-ZK21；The bore of 8th lens 8 is
58 millimeters, center thickness is 6 millimeters, and the surface of left and right two is sphere, and left sphere curvature radius is 232.69 millimeters, and right sphere is bent
Rate radius is -232.69 millimeters, and the glass trade mark used is H-ZF5；Reference plate 9 is a circular optical flat board, and its a diameter of 60
Millimeter, thickness are 8 millimeters, and the glass material used is fused silica；Beam-splitter 10 is a circular optical flat board, its a diameter of 60 milli
Rice, thickness are 8 millimeters, and the glass material used is fused silica；
The airspace of the lens 3 of second lens 2 and the 3rd is 40.2 millimeters, the sky of the 4th lens 4 and the 5th lens 5
For gas at intervals of 31.04 millimeters, the airspace of the 6th lens 6 and the 7th lens 7 is 38.56 millimeters, the 7th lens 7 and the 8th saturating
The airspace of mirror 8 is 0.2 millimeter, and the airspace of the 8th lens 8 and reference plate 9 is 8 millimeters, reference plate 9 and beam-splitter 10
Airspace be 58 millimeters.
Table 1
As a kind of specific example, the angle of inclination of reference plate 9 is 3 °.
As a kind of specific example, depolarization spectro-film is plated in the upper surface of reference plate 9, and transmittance is 85% with reflectivity
: 15%.
As a kind of specific example, the surface roughness Ra value that the reference plate 9 is located at the side surface of the 8th lens 8 one is better than
0.2 nanometer, the surface roughness Ra value positioned at the side surface of beam-splitter 10 1 is better than 0.5 nanometer.
As a kind of specific example, the angle of inclination of the beam-splitter 10 is 1.5 °.
As a kind of specific example, depolarization spectro-film is plated on the surface of the beam-splitter 10, and transmittance is with reflectivity
50%: 50%.
As a kind of specific example, the surface roughness Ra value on the surface of beam-splitter 10 is better than 0.5 nanometer.
As a kind of specific example, the numerical aperture of the interference microcobjective optical system is 0.015, Entry pupil diameters 12
Millimeter, focal length are 400 millimeters, and parfocal distance is 280 millimeters, and operating distance is 58 millimeters, and linear field is 48 millimeters, using part
Thang-kng flat board is formd without Mirau type structures are blocked, and by reference to the inclination of plate 9, beam-splitter 10, makes the reflection for being not involved in interference
Light beam is off-axis.
Optical system of the present invention is that infinite conjugate needs directional light incident illumination away from optical system, during work.
With reference to Fig. 2,0.5 times of unpolarized nothing blocks Mirau molded breadths visual field and interferes its operation principle of microcobjective optical system
Parallel light, illumination light pass sequentially through the first lens 1, the second lens 2, the 3rd lens 3, the 4th lens 4, the 5th lens 5,
6th lens 6, the 7th lens 7, the 8th lens 8 and reference plate 9, two beams are divided at beam-splitter 10, it is a branch of to incide reference
Planar surface returns, and another beam incides part surface to be measured and returned, and two-beam interferes after being overlapped at beam-splitter, according to it
Caused interference fringe, the microscopic characteristics of part to be measured can be analyzed.
Fig. 3 is that 0.5 times of unpolarized nothing of the invention blocks the transmission letter that Mirau molded breadths visual field interferes microcobjective optical system
Number curve figure, transmission function is in 0 visual field, 0.707 visual field and full filed as can be seen, optical transfer function 20 lines it is right/
During millimeter, more than 0.4 is all higher than.
Fig. 4 is that 0.5 times of unpolarized nothing of the invention blocks the wave aberration that Mirau molded breadths visual field interferes microcobjective optical system
Curve map, visible in figure, wavelength is superior to diffraction limit in 486nm~656nm wavelength bands in the range of full filed.
Fig. 5 be 0.5 times of unpolarized nothing of the invention block Mirau molded breadths visual field interfere the curvature of field of microcobjective optical system/
Distortion curve figure, as seen from the figure the greatest optical distortion of whole system are less than 0.05%.
Fig. 6 is that 0.5 times of unpolarized nothing of the invention blocks the vertical axle picture that Mirau molded breadths visual field interferes microcobjective optical system
Dygoram, ordinate maximum is ± 50 microns in figure, and wavelength is in the range of 486nm -656nm, white light curve shape phase
Seemingly, deviation Maximum constraint is within 20 microns.
0.5 times of unpolarized nothing of the invention blocks Mirau molded breadths visual field interference microcobjective optical system can be in visible light wave
Section (486nm~656nm) operated within range, its numerical aperture are 0.015, and Entry pupil diameters are 12 millimeters, and focal length is 400 millimeters,
Parfocal distance is 280 millimeters, and operating distance is 58 millimeters, and linear field is 48 millimeters, and image quality is excellent, and image quality is close to spread out
Emitter-base bandgap grading limits.
Claims (10)
1. a kind of Mirau molded breadths visual field interferes microcobjective optical system, it is characterised in that including along same optical axis from left to right
The first lens (1), the second lens (2), the 3rd lens (3), the 4th lens (4), the 5th lens (5), the 6th lens of arrangement
(6), the 7th lens (7), the 8th lens (8), reference plate (9) and beam-splitter (10)；
Illumination light passes sequentially through the first lens (1), the second lens (2), the 3rd lens (3), the 4th lens (4), the 5th lens
(5), the 6th lens (6), the 7th lens (7), the 8th lens (8) and reference plate (9), it is divided into two beams at beam-splitter (10) place,
A branch of to incide the return of reference plate surface, another beam incides part surface to be measured and returned, and two beams launch light in beam-splitter (10)
Place interferes after overlapping, according to the microscopic characteristics of caused interference fringe analysis part to be measured.
2. Mirau molded breadths visual field according to claim 1 interferes microcobjective optical system, it is characterised in that described the
One lens (1) and the second lens (2) be cemented doublet, and the 3rd lens (3) and the 4th lens (4) are cemented doublet, the 5th
Lens (5) and the 6th lens (6) are cemented doublet.
3. Mirau molded breadths visual field according to claim 1 interferes microcobjective optical system, it is characterised in that described the
The bore of one lens (1) is 14 millimeters, and center thickness is 2.5 millimeters, and the surface of left and right two is sphere, and left sphere curvature radius is
27.15 millimeters, right sphere curvature radius is -51.30 millimeters, and the glass trade mark used is H-BAK2；The bore of second lens (2)
For 14 millimeters, center thickness is 2.0 millimeters, and the surface of left and right two is sphere, and left sphere curvature radius is -51.30 millimeters, right ball
Curvature radius is 327.14 millimeters, and the glass trade mark used is H-LAK7A；The bore of 3rd lens (3) is 12 millimeters, center
Thickness be 2.5 millimeters, the surface of left and right two is sphere, left sphere curvature radius be -97.36 millimeters, right sphere curvature radius for -
12.30 millimeters, the glass trade mark used is H-FK61；The bore of 4th lens (4) is 12 millimeters, and center thickness is 2 millimeters, left and right
Two surfaces are sphere, and left sphere curvature radius is -12.30 millimeters, and right sphere curvature radius is -890.55 millimeters, is used
The glass trade mark be H-ZLAF76；The bore of 5th lens (5) is 20 millimeters, and center thickness is 3 millimeters, and the surface of left and right two is
Sphere, left sphere curvature radius are -36.13 millimeters, and right sphere curvature radius is 21.02 millimeters, and the glass trade mark used is F6；
The bore of 6th lens (6) is 20 millimeters, and center thickness is 4 millimeters, and the surface of left and right two is sphere, and left sphere curvature radius is
21.02 millimeters, right sphere curvature radius is 90.67 millimeters, and the glass trade mark used is H-ZBAF4；The bore of 7th lens (7)
For 54 millimeters, center thickness is 6 millimeters, and the surface of left and right two is sphere, and left sphere curvature radius is -88.51 millimeters, right sphere
Radius of curvature is -44.10 millimeters, and the glass trade mark used is H-ZK21；The bore of 8th lens (8) is 58 millimeters, and center is thick
For 6 millimeters, the surface of left and right two is sphere, left sphere curvature radius be 232.69 millimeters, right sphere curvature radius for-
232.69 millimeters, the glass trade mark used is H-ZF5；Reference plate (9) is a circular optical flat board, its a diameter of 60 millimeters, thick
Spend for 8 millimeters, the glass material used is fused silica；Beam-splitter (10) is a circular optical flat board, its a diameter of 60 millimeters, thick
Spend for 8 millimeters, the glass material used is fused silica；
The airspace of second lens (2) and the 3rd lens (3) is 40.2 millimeters, the 4th lens (4) and the 5th lens (5)
Airspace be 31.04 millimeters, the airspace of the 6th lens (6) and the 7th lens (7) is 38.56 millimeters, the 7th lens
(7) it is 0.2 millimeter with the airspace of the 8th lens (8), the airspace of the 8th lens (8) and reference plate (9) is 8 millimeters,
The airspace of reference plate (9) and beam-splitter (10) is 58 millimeters.
4. Mirau molded breadths visual field according to claim 1 interferes microcobjective optical system, it is characterised in that the ginseng
Plate (9) angle of inclination is examined as 3 °.
5. Mirau molded breadths visual field according to claim 1 interferes microcobjective optical system, it is characterised in that the ginseng
Plate (9) upper surface plating depolarization spectro-film is examined, transmittance is 85%: 15% with reflectivity.
6. Mirau molded breadths visual field according to claim 1 interferes microcobjective optical system, it is characterised in that the ginseng
Examine plate (9) be located at the side surface of the 8th lens (8) one surface roughness Ra value be better than 0.2 nanometer, positioned at beam-splitter (10) side
The surface roughness Ra value on surface is better than 0.5 nanometer.
7. Mirau molded breadths visual field according to claim 1 interferes microcobjective optical system, it is characterised in that described point
The angle of inclination of tabula rasa (10) is 1.5 °.
8. Mirau molded breadths visual field according to claim 1 interferes microcobjective optical system, it is characterised in that described point
The surface plating depolarization spectro-film of tabula rasa (10), transmittance is 50%: 50% with reflectivity.
9. Mirau molded breadths visual field according to claim 1 interferes microcobjective optical system, it is characterised in that described point
The surface roughness Ra value on tabula rasa (10) surface is better than 0.5 nanometer.
10. the Mirau molded breadths visual field interference microcobjective optical system according to foregoing any one claim, its feature
It is, the numerical aperture of the interference microcobjective optical system is 0.015, and Entry pupil diameters are 12 millimeters, and focal length is 400 millimeters,
Parfocal distance is 280 millimeters, and operating distance is 58 millimeters, and linear field is 48 millimeters, and no screening is formd using part thang-kng flat board
Mirau type structures are blocked, by reference to the inclination of plate (9), beam-splitter (10), make the reflected beams for being not involved in interference off-axis.
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| CN201710528486.XA CN107450173B (en) | 2017-07-01 | 2017-07-01 | Mirau type wide-field interference microscope objective optical system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110596878A (en) * | 2019-10-14 | 2019-12-20 | 南京大学 | Double-lens microscope system with ultra-short focal length |
| CN114923435A (en) * | 2022-04-29 | 2022-08-19 | 南京理工大学 | Cylindrical surface micro interference device for measuring micro-cylindrical optical piece phase chromatography information |
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| US20100214570A1 (en) * | 2009-02-24 | 2010-08-26 | National Taipei University Of Technology | Orthogonal-polarization mirau interferometry and beam-splitting module and interferometric system using the same |
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| CN104280867A (en) * | 2014-10-29 | 2015-01-14 | 南京恒磊光学技术研究有限公司 | Microscope objective lens |
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| CN110596878A (en) * | 2019-10-14 | 2019-12-20 | 南京大学 | Double-lens microscope system with ultra-short focal length |
| CN110596878B (en) * | 2019-10-14 | 2021-11-16 | 南京大学 | Double-lens microscope system with ultra-short focal length |
| CN114923435A (en) * | 2022-04-29 | 2022-08-19 | 南京理工大学 | Cylindrical surface micro interference device for measuring micro-cylindrical optical piece phase chromatography information |
| CN114923435B (en) * | 2022-04-29 | 2024-06-07 | 南京理工大学 | Cylindrical surface micro-interference device for measuring phase chromatographic information of micro-columnar optical piece |
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