CN107450173B - Mirau type wide-field interference microscope objective optical system - Google Patents
Mirau type wide-field interference microscope objective optical system Download PDFInfo
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- CN107450173B CN107450173B CN201710528486.XA CN201710528486A CN107450173B CN 107450173 B CN107450173 B CN 107450173B CN 201710528486 A CN201710528486 A CN 201710528486A CN 107450173 B CN107450173 B CN 107450173B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
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Abstract
The invention discloses a Mirau type wide-field interference microscope objective optical system. The system comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a reference plate and a light splitting plate which are sequentially arranged along the same optical axis; the illumination light passes through the first lens, the second lens, the third lens, the fourth lens and the fourth lens in sequence, the illumination light is divided into two beams at the light splitting plate, one beam is incident on the surface of the reference flat plate and returns, the other beam is incident on the surface of the piece to be detected and returns, the two beams of emission light are overlapped at the light splitting plate and then interfere, and the microscopic characteristics of the piece to be detected are analyzed according to the generated interference fringes. The system has the magnification of 0.5X, the numerical aperture of 0.015, the diameter of an entrance pupil of 12 mm, the focal length of 400 mm, the parfocal distance of 280 mm and the visual field of 48 mm. The optical system has simple structure and good imaging quality, is suitable for a coherent scanning interferometry, and can be used for measuring the three-dimensional morphology of a rough surface.
Description
Technical Field
The invention belongs to the field of design of a microobjective optical system, and relates to a Mirau type wide-field interference microobjective optical system.
Background
The interference microscope objective is mainly applied to the measurement of the three-dimensional appearance of the microscopic surface, for example, a non-contact contourgraph commonly used in the industrial and scientific research fields needs to be matched with the interference microscope objective with various multiplying powers for use. When 2/3' CCD and the tube lens are 1X, the line view field of the 2.5X interference micro objective is 9.3mm, the line view field of the 10X interference micro objective is 0.58mm, the line view field of the 20X interference micro objective is 0.15mm, the line view field of the 50X interference micro objective is 0.023mm, and the line view field of the 100X interference micro objective is 0.0009 mm. Generally, the lower the magnification, the larger the field of view, and thus, the lower power interference microscope objective generally has a larger field of view. The interference microscope objective has three main structures, namely a Linnik type, a Mirau type and a Michelson type. The Linnik type is generally used only for high-magnification interference microscope objectives because two identical beam splitting prisms are required, which occupies a large space and is high in cost.
When the magnification is lower than 10X, the Mirau type blocks too much light due to the existence of the central barrier, and the imaging effect is influenced. Biegen, 1988, published a presentation of "New definitions in Mirauite theory" at the annual meeting of the American society for optics, and proposed a solution to use a polarizing element to control the amount of light transmitted through a transparent portion of the surface of a reference plate, which is an unblanked Mirau type objective lens. However, the polarization element makes the design more complex, makes it more difficult to compensate for dispersion, and introduces sensitivity problems due to polarization effects.
The low-power interference microscope objective produced on the market at present is mainly a Michelson type interference microscope objective. However, since the smaller the magnification of the microscope objective lens is, the larger the working distance is, and when designing an interference microscope objective lens smaller than 2X, the Michelson type structure occupies too much space due to the fact that the beam splitter prism is orthogonal to the off-axis reference optical path, and is not practical. Dresel et al in the article "Three-dimensional sensing of the interference surface by coherent radar" published in AO propose that, at a field of view greater than 10mm, the mechanical structure of the Michelson-type interference microscope objective is too large to be used exclusively in interferometers and to be able to switch other objectives flexibly, which is not preferred.
Disclosure of Invention
The invention aims to provide a Mirau type wide-field interference microscope objective optical system with simple structure and good imaging quality.
The technical solution for realizing the purpose of the invention is as follows: a Mirau type wide-field interference microscope objective optical system comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a reference plate and a beam splitter plate which are arranged from left to right along the same optical axis;
the illumination light sequentially passes through the first lens, the second lens, the third lens, the fourth lens, the fifth lens, the sixth lens, the seventh lens, the eighth lens and the reference plate, the illumination light is divided into two beams at the light splitting plate, one beam is incident to the surface of the reference plate and returns, the other beam is incident to the surface of the piece to be measured and returns, the two beams of emission light are overlapped at the light splitting plate and then interfere, and the microscopic characteristic of the piece to be measured is analyzed according to the generated interference fringes.
Furthermore, the first lens and the second lens are double-cemented lenses, the third lens and the fourth lens are double-cemented lenses, and the fifth lens and the sixth lens are double-cemented lenses.
Furthermore, the aperture of the first lens is 14 mm, the center thickness is 2.5 mm, the left surface and the right surface are both spherical surfaces, the radius of curvature of the left spherical surface is 27.15 mm, the radius of curvature of the right spherical surface is-51.30 mm, and the adopted glass brand is H-BAK 2; the aperture of the second lens is 14 mm, the center thickness is 2.0 mm, the left surface and the right surface are both spherical surfaces, the curvature radius of the left spherical surface is-51.30 mm, the curvature radius of the right spherical surface is 327.14 mm, and the adopted glass brand is H-LAK 7A; the aperture of the third lens is 12 mm, the center thickness is 2.5 mm, the left surface and the right surface are both spherical surfaces, the curvature radius of the left spherical surface is-97.36 mm, the curvature radius of the right spherical surface is-12.30 mm, and the adopted glass brand is H-FK 61; the aperture of the fourth lens is 12 mm, the center thickness is 2 mm, the left surface and the right surface are both spherical surfaces, the curvature radius of the left spherical surface is-12.30 mm, the curvature radius of the right spherical surface is-890.55 mm, and the adopted glass brand is H-ZLAF 76; the aperture of the fifth lens is 20 mm, the center thickness is 3mm, the left surface and the right surface are both spherical surfaces, the curvature radius of the left spherical surface is-36.13 mm, the curvature radius of the right spherical surface is 21.02 mm, and the adopted glass brand is F6; the aperture of the sixth lens is 20 mm, the center thickness is 4 mm, the left surface and the right surface are both spherical surfaces, the radius of curvature of the left spherical surface is 21.02 mm, the radius of curvature of the right spherical surface is 90.67 mm, and the adopted glass brand is H-ZBAF 4; the aperture of the seventh lens is 54 mm, the center thickness is 6 mm, the left surface and the right surface are both spherical surfaces, the curvature radius of the left spherical surface is-88.51 mm, the curvature radius of the right spherical surface is-44.10 mm, and the adopted glass brand is H-ZK 21; the aperture of the eighth lens is 58mm, the center thickness is 6 mm, the left surface and the right surface are both spherical surfaces, the curvature radius of the left spherical surface is 232.69 mm, the curvature radius of the right spherical surface is-232.69 mm, and the adopted glass brand is H-ZF 5; the reference plate is a circular optical flat plate, the diameter of the reference plate is 60 mm, the thickness of the reference plate is 8mm, and the adopted glass material is fused quartz; the light splitting plate is a circular optical flat plate, the diameter of the light splitting plate is 60 mm, the thickness of the light splitting plate is 8mm, and the adopted glass material is fused quartz;
the air space between the second lens and the third lens is 40.2 mm, the air space between the fourth lens and the fifth lens is 31.04 mm, the air space between the sixth lens and the seventh lens is 38.56 mm, the air space between the seventh lens and the eighth lens is 0.2 mm, the air space between the eighth lens and the reference plate is 8mm, and the air space between the reference plate and the light splitting plate is 58 mm.
Further, the reference plate is inclined at an angle of 3 °.
Furthermore, a depolarization light splitting film is plated on the upper surface of the reference plate, and the transmission ratio and the reflection ratio are 85% to 15%.
Further, the surface roughness Ra value of the surface of the reference plate on the eighth lens side is better than 0.2 nanometer, and the surface roughness Ra value of the surface of the reference plate on the light splitting plate side is better than 0.5 nanometer.
Further, the inclination angle of the light splitting plate is 1.5 degrees.
Furthermore, the surface of the light splitting plate is plated with a depolarization light splitting film, and the transmission ratio and the reflection ratio are 50% to 50%.
Further, the surface roughness Ra value of the surface of the light splitting plate is better than 0.5 nanometer.
Further, the numerical aperture of the interference microscope objective optical system is 0.015, the diameter of an entrance pupil is 12 mm, the focal length is 400 mm, the parfocal distance is 280 mm, the working distance is 58mm, the linear view field is 48 mm, a partial light-transmitting flat plate is adopted to form an unshielded Mirau type structure, and a reflected light beam which does not participate in interference is off-axis through the inclination of the reference plate and the light splitting plate.
Compared with the prior art, the invention has the following remarkable advantages: (1) a partial light-passing flat plate is adopted without central blocking, and the inclination of the reference plate and the light splitting plate enables reflected light beams which do not participate in interference to be off-axis, so that complete double-beam interference is formed, and high fringe contrast can be obtained; (2) the numerical aperture is 0.015, the diameter of the entrance pupil is 12 millimeters, the focal length is 400 millimeters, the parfocal distance is 280 millimeters, the working distance is 58 millimeters, the linear view field is 48 millimeters, the imaging quality is excellent, and the imaging quality is close to the diffraction limit; (3) the device has the advantages of simple structure, less used optical elements and low cost, is suitable for a coherent scanning interferometry, and can be used for measuring the three-dimensional morphology of a rough surface.
Drawings
FIG. 1 is a schematic structural diagram of an optical system of a Mirau type wide-field interference microscope objective lens of the invention.
FIG. 2 is a schematic diagram of the optical path of the Mirau type wide-field interference microscope objective optical system of the present invention.
FIG. 3 is a transfer function curve diagram of the optical system of the Mirau type wide-field interference microscope objective lens of the invention.
FIG. 4 is a wave aberration diagram of the optical system of the Mirau type wide-field interference microscope objective lens of the present invention.
FIG. 5 is a field curvature/distortion plot of the optical system of the Mirau type wide-field interference microscope objective of the present invention.
FIG. 6 is a vertical axis aberration diagram of the optical system of the Mirau type wide-field interference microscope objective lens of the present invention.
Detailed Description
The magnification of the interference microscope objective optical system is 0.5X, the numerical aperture is 0.015, the diameter of an entrance pupil is 12 mm, the focal length is 400 mm, the parfocal distance is 280 mm, and the field of view can reach 48 mm. The 0.5-time unpolarized obscuration-free Mirau type wide-field-of-view interference microscope objective is similar to a Mirau type, and is characterized in that a partial light-passing flat plate is adopted, no central obscuration exists, and meanwhile, the inclination of a reference plate and a light splitting plate enables reflected light beams which do not participate in interference to be off-axis to form complete double-beam interference, so that high fringe contrast can be obtained, the optical system is simple in structure and good in imaging quality, is suitable for a coherent scanning interference method, and can be used for measuring the three-dimensional morphology of a rough surface.
As shown in fig. 1, the Mirau type wide-field interference microscope objective optical system of the present invention includes a first lens 1, a second lens 2, a third lens 3, a fourth lens 4, a fifth lens 5, a sixth lens 6, a seventh lens 7, an eighth lens 8, a reference plate 9 and a beam splitter plate 10 arranged from left to right along the same optical axis;
the illumination light sequentially passes through the first lens 1, the second lens 2, the third lens 3, the fourth lens 4, the fifth lens 5, the sixth lens 6, the seventh lens 7, the eighth lens 8 and the reference plate 9, the illumination light is divided into two beams at the light splitting plate 10, one beam is incident on the surface of the reference plate and returns, the other beam is incident on the surface of the to-be-detected piece and returns, the two beams of emission light are overlapped at the light splitting plate 10 and then interfere, and the microscopic characteristic of the to-be-detected piece is analyzed according to the generated interference fringes.
Further, the first lens element 1 and the second lens element 2 are double-cemented lens elements, the third lens element 3 and the fourth lens element 4 are double-cemented lens elements, and the fifth lens element 5 and the sixth lens element 6 are double-cemented lens elements.
With reference to table 1, the aperture of the first lens 1 is 14 mm, the center thickness is 2.5 mm, the left and right surfaces are spherical surfaces, the radius of curvature of the left spherical surface is 27.15 mm, the radius of curvature of the right spherical surface is-51.30 mm, and the adopted glass brand is H-BAK 2; the aperture of the second lens 2 is 14 mm, the center thickness is 2.0 mm, the left surface and the right surface are both spherical surfaces, the curvature radius of the left spherical surface is-51.30 mm, the curvature radius of the right spherical surface is 327.14 mm, and the adopted glass brand is H-LAK 7A; the aperture of the third lens 3 is 12 mm, the center thickness is 2.5 mm, the left and right surfaces are spherical surfaces, the radius of curvature of the left spherical surface is-97.36 mm, the radius of curvature of the right spherical surface is-12.30 mm, and the adopted glass brand is H-FK 61; the aperture of the fourth lens 4 is 12 mm, the center thickness is 2 mm, the left surface and the right surface are both spherical surfaces, the curvature radius of the left spherical surface is-12.30 mm, the curvature radius of the right spherical surface is-890.55 mm, and the adopted glass brand is H-ZLAF 76; the aperture of the fifth lens 5 is 20 mm, the center thickness is 3mm, the left surface and the right surface are both spherical surfaces, the curvature radius of the left spherical surface is-36.13 mm, the curvature radius of the right spherical surface is 21.02 mm, and the adopted glass brand is F6; the aperture of the sixth lens 6 is 20 mm, the center thickness is 4 mm, the left surface and the right surface are both spherical surfaces, the curvature radius of the left spherical surface is 21.02 mm, the curvature radius of the right spherical surface is 90.67 mm, and the adopted glass brand is H-ZBAF 4; the aperture of the seventh lens 7 is 54 mm, the center thickness is 6 mm, the left surface and the right surface are both spherical surfaces, the curvature radius of the left spherical surface is-88.51 mm, the curvature radius of the right spherical surface is-44.10 mm, and the adopted glass brand is H-ZK 21; the aperture of the eighth lens 8 is 58mm, the center thickness is 6 mm, the left surface and the right surface are both spherical surfaces, the curvature radius of the left spherical surface is 232.69 mm, the curvature radius of the right spherical surface is-232.69 mm, and the adopted glass brand is H-ZF 5; the reference plate 9 is a circular optical flat plate, the diameter of the reference plate is 60 mm, the thickness of the reference plate is 8mm, and the adopted glass material is fused quartz; the light splitting plate 10 is a circular optical flat plate, the diameter of the light splitting plate is 60 mm, the thickness of the light splitting plate is 8mm, and the adopted glass material is fused quartz;
the air space between the second lens 2 and the third lens 3 is 40.2 mm, the air space between the fourth lens 4 and the fifth lens 5 is 31.04 mm, the air space between the sixth lens 6 and the seventh lens 7 is 38.56 mm, the air space between the seventh lens 7 and the eighth lens 8 is 0.2 mm, the air space between the eighth lens 8 and the reference plate 9 is 8mm, and the air space between the reference plate 9 and the spectroscopic plate 10 is 58 mm.
TABLE 1
As a specific example, the reference plate 9 is inclined at an angle of 3 °.
As a specific example, the upper surface of the reference plate 9 is plated with a depolarizing light splitting film, and the transmission ratio and the reflection ratio are 85% to 15%.
As a specific example, the reference plate 9 has a surface roughness Ra value of better than 0.2 nm on the side of the eighth lens 8 and a surface roughness Ra value of better than 0.5 nm on the side of the spectroscopic plate 10.
As a specific example, the inclination angle of the spectroscopic plate 10 is 1.5 °.
As a specific example, the surface of the light-splitting plate 10 is plated with a depolarizing light-splitting film, and the transmittance ratio and the reflectance ratio are 50% to 50%.
As a specific example, the surface roughness Ra value of the surface of the spectroscopic plate 10 is better than 0.5 nm.
As a specific example, the numerical aperture of the interference microscope objective optical system is 0.015, the diameter of an entrance pupil is 12 mm, the focal length is 400 mm, the parfocal distance is 280 mm, the working distance is 58mm, the line field of view is 48 mm, a part of light-passing flat plate is adopted to form an unblanked Mirau type structure, and the reflected light beams which do not participate in interference are off-axis through the inclination of the reference plate 9 and the light splitting plate 10.
The optical system is an infinite conjugate distance optical system, and parallel light is required to be incident for illumination when the optical system works.
With reference to fig. 2, the operating principle of the 0.5-time unpolarized non-blocking Mirau type wide-field interference microscope objective optical system is parallel light illumination, illumination light sequentially passes through a first lens 1, a second lens 2, a third lens 3, a fourth lens 4, a fifth lens 5, a sixth lens 6, a seventh lens 7, an eighth lens 8 and a reference plate 9, is divided into two beams at a beam splitter plate 10, one beam is incident on the surface of the reference plate and returns, the other beam is incident on the surface of a to-be-detected object and returns, the two beams of light are overlapped at the beam splitter plate and then interfere, and the microscopic characteristics of the to-be-detected object can be analyzed according to interference fringes generated by the two beams of light.
FIG. 3 is a transfer function graph of a 0.5-fold unpolarized non-obscuration Mirau wide-field interference microscope objective optical system of the present invention, and as can be seen from the graph, the transfer functions are in the 0 field, the 0.707 field and the full field, and the optical transfer functions are all larger than 0.4 at 20 line pairs/mm.
FIG. 4 is a wave aberration curve diagram of a 0.5-fold unpolarized and non-blocking Mirau wide-field interference microscope objective optical system of the present invention, in which it can be seen that the wavelength is in the range of 486nm to 656nm, and the full field range is superior to the diffraction limit.
FIG. 5 is a graph of field curvature/distortion of a 0.5-fold unpolarized obscuration-free Mirau wide-field interference microscope objective optical system of the present invention, from which it can be seen that the maximum optical distortion of the whole system is less than 0.05%.
FIG. 6 is a vertical axis aberration curve diagram of a 0.5-fold unpolarized and non-blocking Mirau wide-field interference microscope objective optical system, in which the maximum value of the ordinate is + -50 microns, the wavelength is in the range of 486 nm-656 nm, the shapes of the light curves of all colors are similar, and the maximum value of the deviation is controlled within 20 microns.
The 0.5-time unpolarized non-blocking Mirau type wide-field interference microscope objective optical system can work in the range of a visible light wave band (486 nm-656 nm), the numerical aperture is 0.015, the diameter of an entrance pupil is 12 mm, the focal length is 400 mm, the parfocal distance is 280 mm, the working distance is 58mm, the linear field is 48 mm, the imaging quality is excellent, and the imaging quality is close to the diffraction limit.
Claims (8)
1. The Mirau type wide-field interference microscope objective optical system is characterized by comprising a first lens (1), a second lens (2), a third lens (3), a fourth lens (4), a fifth lens (5), a sixth lens (6), a seventh lens (7), an eighth lens (8), a reference plate (9) and a beam splitter plate (10) which are arranged from left to right along the same optical axis;
the illumination light sequentially passes through a first lens (1), a second lens (2), a third lens (3), a fourth lens (4), a fifth lens (5), a sixth lens (6), a seventh lens (7), an eighth lens (8) and a reference plate (9), the illumination light is divided into two beams at a beam splitter plate (10), one beam is incident on the surface of the reference plate and returns, the other beam is incident on the surface of the piece to be measured and returns, the two beams of emission light are overlapped at the beam splitter plate (10) and then interfere with each other, and the microscopic characteristics of the piece to be measured are analyzed according to the generated interference fringes;
the aperture of the first lens (1) is 14 mm, the center thickness is 2.5 mm, the left surface and the right surface are both spherical surfaces, the curvature radius of the left spherical surface is 27.15 mm, the curvature radius of the right spherical surface is-51.30 mm, and the adopted glass brand is H-BAK 2; the aperture of the second lens (2) is 14 mm, the center thickness is 2.0 mm, the left surface and the right surface are both spherical surfaces, the curvature radius of the left spherical surface is-51.30 mm, the curvature radius of the right spherical surface is 327.14 mm, and the adopted glass brand is H-LAK 7A; the aperture of the third lens (3) is 12 mm, the center thickness is 2.5 mm, the left surface and the right surface are both spherical surfaces, the radius of curvature of the left spherical surface is-97.36 mm, the radius of curvature of the right spherical surface is-12.30 mm, and the adopted glass brand is H-FK 61; the aperture of the fourth lens (4) is 12 mm, the center thickness is 2 mm, the left surface and the right surface are both spherical surfaces, the curvature radius of the left spherical surface is-12.30 mm, the curvature radius of the right spherical surface is-890.55 mm, and the adopted glass brand is H-ZLAF 76; the aperture of the fifth lens (5) is 20 mm, the center thickness is 3mm, the left surface and the right surface are both spherical surfaces, the curvature radius of the left spherical surface is-36.13 mm, the curvature radius of the right spherical surface is 21.02 mm, and the adopted glass brand is F6; the aperture of the sixth lens (6) is 20 mm, the center thickness is 4 mm, the left surface and the right surface are both spherical surfaces, the radius of curvature of the left spherical surface is 21.02 mm, the radius of curvature of the right spherical surface is 90.67 mm, and the adopted glass brand is H-ZBAF 4; the aperture of the seventh lens (7) is 54 mm, the center thickness is 6 mm, the left surface and the right surface are both spherical surfaces, the curvature radius of the left spherical surface is-88.51 mm, the curvature radius of the right spherical surface is-44.10 mm, and the adopted glass brand is H-ZK 21; the caliber of the eighth lens (8) is 58mm, the center thickness is 6 mm, the left surface and the right surface are both spherical surfaces, the curvature radius of the left spherical surface is 232.69 mm, the curvature radius of the right spherical surface is-232.69 mm, and the adopted glass brand is H-ZF 5; the reference plate (9) is a circular optical flat plate, the diameter of the reference plate is 60 mm, the thickness of the reference plate is 8mm, and the adopted glass material is fused quartz; the light splitting plate (10) is a circular optical flat plate, the diameter of the light splitting plate is 60 mm, the thickness of the light splitting plate is 8mm, and the adopted glass material is fused quartz;
the air space between the second lens (2) and the third lens (3) is 40.2 mm, the air space between the fourth lens (4) and the fifth lens (5) is 31.04 mm, the air space between the sixth lens (6) and the seventh lens (7) is 38.56 mm, the air space between the seventh lens (7) and the eighth lens (8) is 0.2 mm, the air space between the eighth lens (8) and the reference plate (9) is 8mm, and the air space between the reference plate (9) and the beam splitter plate (10) is 58 mm;
the first lens (1) and the second lens (2) are double-cemented lenses, the third lens (3) and the fourth lens (4) are double-cemented lenses, and the fifth lens (5) and the sixth lens (6) are double-cemented lenses.
2. Mirau-type wide-field interference microscope objective optical system according to claim 1, characterized in that the reference plate (9) is tilted at an angle of 3 °.
3. The Mirau wide-field interference microscope objective optical system according to claim 1, wherein the reference plate (9) is coated with a depolarizing beam splitting film on the upper surface, and the transmission ratio and the reflection ratio are 85% to 15%.
4. Mirau-type wide-field interference microscope objective optical system according to claim 1, characterized in that the reference plate (9) has a surface roughness Ra value of better than 0.2 nm on the side of the eighth lens (8) and a surface roughness Ra value of better than 0.5 nm on the side of the beam splitter plate (10).
5. Mirau-type wide-field interference microscope objective optical system according to claim 1, characterized in that the inclination angle of the beam splitter plate (10) is 1.5 °.
6. The Mirau wide-field interference microscope objective optical system according to claim 1, wherein the surface of the beam splitter plate (10) is plated with a depolarizing beam splitter film, and the transmission ratio and the reflection ratio are 50% to 50%.
7. Mirau-type wide-field interference microscope objective optical system according to claim 1, characterized in that the surface roughness Ra value of the surface of the beam splitter plate (10) is better than 0.5 nm.
8. Mirau-type wide-field interference microobjective optical system according to any of the preceding claims, characterized in that the interference microobjective optical system has a numerical aperture of 0.015, an entrance pupil diameter of 12 mm, a focal length of 400 mm, a parfocal distance of 280 mm, a working distance of 58mm, and a line field of view of 48 mm, and uses a partially transparent flat plate to form an unblanked Mirau-type structure, and the reflected light beams not participating in interference are off-axis by the inclination of the reference plate (9) and the splitting plate (10).
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| EP2454554B1 (en) * | 2009-06-19 | 2015-08-12 | Zygo Corporation | Equal-path interferometer |
| CN202794687U (en) * | 2012-07-25 | 2013-03-13 | 陶纯堪 | Mirau-type object lens, interference microscope using the same and measurement system |
| CN103792648B (en) * | 2013-10-10 | 2016-06-08 | 中国科学院上海光学精密机械研究所 | Interfere microcobjective optical system |
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