CN101799279B - Optical fiber point diffraction phase shift interferometry method of surface shape of large relative aperture sphere - Google Patents
Optical fiber point diffraction phase shift interferometry method of surface shape of large relative aperture sphere Download PDFInfo
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Abstract
The invention discloses an optical fiber point diffraction phase shift interferometry method of the surface shape of a large relative aperture sphere, belonging to the field of optical measurement. The method comprises the following steps of: firstly, measuring the diffraction wavefront of an optical fiber, transmitting the diffraction wavefront through a beam splitter prism, converting the diffraction wavefront into a measurement wavefront capable of covering a measured large relative aperture spherical mirror through a microobjective and reflecting on the surface of the measured spherical mirror; transmitting the microobjective by a reflecting wavefront carrying the surface shape information of the measured spherical mirror, reflecting the reflecting wavefront through the beam splitter prism, then converging to the end face of a reference optical fiber to form the measurement wavefront and converging the measurement wavefront with a reference wavefront diffracted by the reference optical fiber to form an interference; then removing the measured spherical mirror and keeping other optical elements unchanged; placing a plane mirror at the part of the focal point of the microobjective; and measuring astigmations brought by the microobjective, the beam splitter prism and the roughness of the end face of the reference optical fiber by using the same method. The invention is realized through two steps, and both the two steps utilize point diffraction spherical waves approximate to ideas as the reference wavefront and can realize the high-precision measurement of the surface shape of the large relative aperture sphere.
Description
Technical field
The invention belongs to technical field of optical precision measurement, relate to a kind of high precision interferometric method of object lens of large relative aperture sphere face shape, can under the situation without sub-aperture stitching, realize the holomorphism high precision interferometry of object lens of large relative aperture sphere.
Background technology
In recent years, object lens of large relative aperture sphere element such as ball bowl, spherical joint etc. are widely used in high-tech areas such as infotech, space technology, remote sensing technology.Detection to this type of object lens of large relative aperture sphere element is a difficult point in optical measurement field always.Its main cause is: traditional optical interferometry method is to adopt the high precision standard lens to produce with reference to the corrugated, but the processing of high precision sphere standard lens is very difficult, and is just more difficult to the processing of object lens of large relative aperture sphere standard lens.The minimum F number of the sphere standard lens that current commercial interferometer is equipped with is 0.75, corresponding maximum detection angular aperture is about 82.3 ° (being equivalent to numerical aperture 0.67 approximately), its surface figure accuracy with reference to sphere can only reach λ/10, about 1.5 λ of transmitted wave difference (peak-to-valley value), but except the angle measurement aperture, its various performance parameters is all far below conventional criteria sphere camera lens, and manufacturing cost is very expensive.This just causes the measuring accuracy of object lens of large relative aperture sphere on the low side, also can't satisfy simultaneously the testing requirement of object lens of large relative aperture sphere more (be angular aperture＞90 °) face shape.Therefore, the technician press for a kind of convenient, efficiently, detection means cheaply, realize the high-acruracy survey of object lens of large relative aperture sphere face shape.
At required this problem of object lens of large relative aperture standard spherical mirror head processing difficulties in measuring, the most frequently used method is to adopt the sub-aperture stitching interferometer measuring technique at present, is used for the object lens of large relative aperture sphere surface shape measurement of angular aperture more than 90 °.The method is stitched together by the interferometry result with repeatedly little relative aperture, realizes that the face shape of object lens of large relative aperture sphere is detected.Compare with traditional measurement method, the sub-aperture stitching method has avoided making the difficulty of object lens of large relative aperture standard spherical mirror head, greatly reduces the measurement cost.But the needs of this method in order to splice, each sub-aperture must overlapped measured zone, cause measuring increased frequency, inefficiency, simultaneously the splicing of measurement data repeatedly also reduced the precision of final holomorphism measurement result.
For improving the sphere surface shape measurement precision on the interferometer, Jensen has at first proposed the absolute interferometric method of sphere face shape, and people such as Bruning and Elssner furtherd investigate this technology again afterwards.This method can obtain the absolute face shape of tested sphere under imperfect situation with reference to the corrugated.The measuring process of sphere face shape was divided into for three steps, and draw tested spherical mirror respectively in the wave aberration at three diverse location places: a certain deflection position records wave aberration W
1, this position ° records wave aberration W around the optical axis Rotate 180
2, the opal position records wave aberration W
3, then with measured value W
1, W
2, W
3Carry out corresponding phase tranformation computing, can obtain the face shape of tested sphere.But this method measuring process more complicated, tested spherical mirror rotation and when mobile easily eccentric, tilt, be difficult to coaxially, thereby influenced measuring accuracy.
The key that improves interferometric method sphere surface shape measurement precision is to seek high-precision reference sphere ground roll, and the spherical wave front that produces approximate ideal by means of aperture point diffraction is a feasible method.And replace aperture just to constitute the optical fiber point-diffraction interferometer with the end face of flexible optical fibre fibre core.The size of optical fiber core diameter has determined the numerical aperture of diffraction light and has departed from the error of spherical wave.Theoretical calculating shows that if adopt He-Ne laser instrument (λ=0.6328 μ m), the core diameter of optical fiber is 2.4 μ m (4 λ), and numerical aperture (NA) is that 0.2 o'clock diffraction spherical aberration is less than λ/10
4The reference sphere surface accuracy that the ratio of precision of visible point reference diffraction spherical wave camera lens in kind produces is high more than 200 times.For actual measurement, it can be considered desirable corrugated with reference to sphere, adopts the optical fiber point-diffraction interferometric method will improve the accuracy of measurement of sphere face shape greatly.
Chinese patent application " a kind of spherical surface shaped optical fiber point-diffraction phase-shifting interference measuring method " (application number: 200910235650.3) realized sphere (convex surface and concave surface) surface shape measurement based on the optical fiber point-diffraction technology, solved that ordinary optic fibre point-diffraction interference measuring method can only detect concave spherical surface and the difficult problem that can not detect protruding sphere.Because used whole diffracted beams to participate in measuring, the technical scheme that this patented claim is put down in writing can be measured aperture angle and enlarge one times simultaneously.But because the numerical aperture of optical fiber diffraction field is limited, usually all below 0.3, even all diffracted beam all participates in measuring, the angular aperture that its sphere is measured also only can reach about 35 °.To realize that the measurement of object lens of large relative aperture sphere (angular aperture＞90 °) just must consider new scheme at the optical fiber point-diffraction interferometer.
Summary of the invention
The objective of the invention is for solve realize the sub-aperture stitching method that exists in the object lens of large relative aperture sphere measuring process of angular aperture＞90 ° at the optical fiber point-diffraction interferometer measurement often, efficient is low, the problem that splicing back measuring accuracy reduces, and in the sphere face shape absolute method of measurement tested spherical mirror can't be accurately the difficult problem of coaxial and location, a kind of optical fiber point-diffraction phase-shifting interference measuring method of object lens of large relative aperture sphere face shape has been proposed.
Because microcobjective can be realized the amplification of small items, also can realize the conversion of image aperture angle simultaneously, the object space aperture angle under its normal operating condition will be much larger than picture side's aperture angle.For example: numerical aperture is that 0.8 microcobjective object space aperture angle is 106.4 °, and numerical aperture is that 0.86 microcobjective object space aperture angle then reaches 120 °.The principle of the inventive method is: by introducing an inverted microcobjective aperture angle conversion is carried out on the optical fiber diffraction corrugated.The low-angle spherical wave front that is produced by the measuring optical fiber diffraction sees through beam splitter prism, produces the measurement wavefront that can cover tested object lens of large relative aperture spherical mirror at the object space of microcobjective, and reflects on the surface of tested spherical mirror.Carry the preceding microcobjective that sees through of reflection wave of tested object lens of large relative aperture sphere minute surface shape information, the reference sphere ground roll with the reference optical fiber diffraction after the beam splitter prism reflection interferes, thereby obtains the face shape information of tested spherical mirror.In this measuring process, the aberration of beam splitter prism and microcobjective can have influence on measurement result.And to obtain high-precision sphere face shape information, just must revise the aberration that beam splitter prism and microcobjective are introduced.
The objective of the invention is to be achieved through the following technical solutions.
A kind of device of optical fiber point-diffraction phase-shifting interference measuring of object lens of large relative aperture sphere face shape comprises beam splitting system, measuring optical fiber, beam splitter prism, microcobjective, reference optical fiber, imaging lens, ccd video camera, computing machine, tested object lens of large relative aperture spherical mirror and plane mirror.
The process that adopts said apparatus to measure is as follows:
The first step: enter the measuring beam of measuring optical fiber from beam splitting system, at the end face generation diffraction of measuring optical fiber.See through beam splitter prism before the diffracted wave, be transformed to the object lens of large relative aperture spherical wave front through microcobjective, its centre of sphere is positioned at the focus in object space place of microcobjective; This spherical wave front is in the reflection of the surface of tested object lens of large relative aperture spherical mirror, sees through microcobjective again before carrying the reflection wave of tested object lens of large relative aperture sphere minute surface shape information, after the inclined end face reflection of beam splitter prism, reference optical fiber, forms and measures wavefront; By the reference spherical wave front of the inclined end face diffraction of reference optical fiber, converge with above-mentioned measurement wavefront and interfere.The interferogram that obtain this moment is received by ccd video camera by imaging lens, adopts standard method to handle and analyze in the input computing machine.
Second step: remove tested spherical mirror, plane mirror is positioned over the focus place of microcobjective, it is motionless to fix other optical elements simultaneously.See through beam splitter prism, microcobjective from the spherical wave of measuring optical fiber end face diffraction, through the plane reflection mirror reflection.See through microcobjective before the reflection wave, after the inclined end face reflection of beam splitter prism, reference optical fiber, form and measure wavefront.Converge and interfere from the reference spherical wave front of the inclined end face diffraction of reference optical fiber and above-mentioned measurement wavefront.The interferogram that obtain this moment is received by ccd video camera by imaging lens, adopts standard method to handle and analyze in the input computing machine.
The 3rd step: first step measurement result is deducted the second pacing amount result, and the ripple that obtains tested object lens of large relative aperture spherical mirror is poor.Then, this ripple difference divided by 2, can be obtained the face shape of tested object lens of large relative aperture spherical mirror.
Beneficial effect
The present invention's prior art relatively both at home and abroad has following remarkable advantage:
1, utilize microcobjective that the optical fiber point-diffraction spherical wave front of little relative aperture is carried out the aperture angle conversion, solve conventional fiber point diffraction sphere measuring method and can survey the limited difficult problem of aperture angle, realized the object lens of large relative aperture sphere surface shape measurement on the optical fiber point-diffraction interferometer.
2, object lens of large relative aperture sphere surface shape measurement is divided into two the step realize, and two pacing amounts have all been utilized near desirable some diffraction spherical wave as the reference wavefront, can guarantee the high precision of twice interferometry, also just can guarantee final object lens of large relative aperture sphere surface shape measurement result's precision.
3, equipment of the present invention constitutes simply, owing to utilized the optical fiber point-diffraction spherical wave as the reference corrugated, thereby need not to use the standard spherical mirror head, and when improving object lens of large relative aperture sphere surface shape measurement precision, greatly reduce the measurement cost.
Description of drawings
Fig. 1 is the optical fiber point-diffraction phase-shifting interference measuring method first step synoptic diagram of object lens of large relative aperture sphere face shape;
Fig. 2 is second step of the optical fiber point-diffraction phase-shifting interference measuring method synoptic diagram of object lens of large relative aperture sphere face shape;
Fig. 3 is end surface shape and the wavefront synoptic diagram of reference optical fiber;
Wherein, 1-laser instrument; The adjustable neutral density filter of 2-; The 3-1/2 wave plate; The 4-polarization beam splitter prism; 5-first right-angle prism; 6-second right-angle prism; 7-first quarter wave plate; 8-second quarter wave plate; The 9-piezoelectric ceramics; 10-first polaroid; 11-second polaroid; 12-first coupled lens; 13-second coupled lens; The 14-measuring optical fiber; The 15-beam splitter prism; The 16-microcobjective; The tested object lens of large relative aperture spherical mirror of 17-; The 18-reference optical fiber; The 19-imaging lens; The 20-CCD video camera; The 21-computing machine; The 22-plane mirror; The 23-lock pin; The 24-axis; The 25-normal line of butt end; 26-diffracted beam axis; 27-incident measuring beam; The measuring beam of 28-reflection; Before the 29-diffracted wave.
Embodiment
Below in conjunction with accompanying drawing the specific embodiment of the present invention is described in further details.
A kind of optical fiber point-diffraction phase-shifting interference measuring method of object lens of large relative aperture sphere face shape.At first choose with lower device, as shown in Figure 1 and Figure 2, comprising: beam splitting system, measuring optical fiber 14, beam splitter prism 15, microcobjective 16, tested object lens of large relative aperture spherical mirror 17, reference optical fiber 18, imaging lens 19, ccd video camera 20, computing machine 21, plane mirror 22;
Wherein, beam splitting system comprises laser instrument 1, adjustable neutral density filter 2,1/2 wave plate 3, polarization beam splitter prism 4, first right-angle prism 5, second right-angle prism 6, first quarter wave plate 7, second quarter wave plate 8, piezoelectric ceramics 9, first polaroid 10, second polaroid 11, first coupled lens 12 and second coupled lens 13.
Object lens of large relative aperture sphere surface shape measurement method of the present invention is as follows:
The first step: as shown in Figure 1, decay by adjustable neutral density filter 2 from the linearly polarized light of laser instrument 1 outgoing, by inciding polarizing beam splitter mirror 4 behind 1/2 wave plate, the 3 adjustment polarization directions, be broken down into the mutually perpendicular two bunch polarized lights in polarization direction, a branch of is transmission (measuring light), a branch of for reflecting (reference light).When this two bunch polarisation during respectively by first right-angle prism 5 and second right-angle prism, 6 reflected back polarizing beam splitter mirrors 4 twice through first quarter wave plate 7 and second quarter wave plate 8, its polarization direction changes 90 degree separately, previous transmitted light beam will reflect, and by piezoelectric ceramics 9 realization phase shifts, and previous folded light beam is with transmission.Adjust its polarization direction, and then be coupled to measuring optical fiber 14 and reference optical fiber 18 respectively by first coupled lens 12, second coupled lens 13 by first polaroid 10, second polaroid 11 respectively from two bundle crossed polarized lights of polarizing beam splitter mirror 4 outgoing.See through beam splitter prism 15 from the spherical wave of measuring optical fiber 14 end face diffraction, be transformed to the object lens of large relative aperture spherical wave front through microcobjective 16, its centre of sphere is positioned at the focus place of microcobjective 16.This spherical wave front reflects on the surface of tested object lens of large relative aperture spherical mirror 17, see through microcobjective 16 again before carrying the reflection wave of 17 shape information of tested object lens of large relative aperture spherical mirror, after the inclined end face reflection of beam splitter prism 15, reference optical fiber 18, form and measure wavefront (shown in solid line among Fig. 1); Converge with above-mentioned measurement wavefront and interfere by the reference spherical wave front (as shown in phantom in Figure 1) of the inclined end face diffraction of reference optical fiber 18.By computing machine 21 control piezoelectric ceramics 9, realize that step-length is the phase shift of pi/2, phase-shift interference is received by ccd video camera 20 by imaging lens 19, sends in the computing machine 21 and carries out Treatment Analysis by standard method (4 steps or 5 step phase shift algorithms).Among Fig. 1, can adjust the relative intensity of reference light and measuring light by rotation 1/2 wave plate 3 and first polaroid 10, second polaroid 11, to reach best fringe contrast.
Obviously, it is poor that the measurement result of this step not only includes the ripple of tested object lens of large relative aperture spherical mirror 17, also include the wavefront error that the end face roughness of microcobjective 16, beam splitter prism 15 and reference optical fiber 18 is brought into, second step will be measured the aberration of these relay optical systems introducings.
Second step: as shown in Figure 2, remove tested object lens of large relative aperture spherical mirror 17, plane mirror 22 is positioned over the focus place of microcobjective 16, it is motionless to fix other optical elements simultaneously.See through beam splitter prism 15, microcobjective 16 from the spherical wave of measuring optical fiber 14 end face diffraction, then through plane mirror 22 reflections, see through microcobjective 16 before the reflection wave again, after the inclined end face reflection of beam splitter prism 15, reference optical fiber 18, form and measure wavefront (shown in solid line among Fig. 2); Converge with above-mentioned measurement wavefront and interfere from the reference spherical wave front (shown in dotted line 2 figure) of the inclined end face diffraction of reference optical fiber 18.Realize that by computing machine 21 control piezoelectric ceramics 9 step-length is the phase shift of pi/2, phase-shift interference is received by ccd video camera 20 by imaging lens 19, sends into computing machine 21 and carries out Treatment Analysis by standard method (4 steps or 5 step phase shift algorithms).Because light path and the first step basically identical of the second pacing amount, so this pacing amount can obtain the aberration that all relay optical systems are introduced.
The 3rd step: first step measurement result is deducted relay optical system aberration that the second pacing amount obtains, and can to obtain the ripple of tested object lens of large relative aperture spherical mirror 17 poor.At last, above-mentioned ripple difference divided by 2, is namely obtained the face shape of tested object lens of large relative aperture spherical mirror 17.
In the above-mentioned implementation process, the end face of described reference optical fiber 18 requires to be polished to the inclined-plane, and its angle of inclination is calculated as follows:
The end surface shape of reference optical fiber 18 and wavefront be as shown in Figure 3: the related lock pin 23 of the end face of reference optical fiber 18 is angled the inclined-plane of α by whole polishing, and end face is coated with semi-transparent semi-reflecting film.Wherein the axis 24 of reference optical fiber 18 is α with normal line of butt end 25 angles, and the diffracted beam axis 26 of reference optical fiber 18 is β with normal line of butt end 25 angles of reference optical fiber 18, and according to refraction law, and to get air refraction be 1, has:
nsinα＝sinβ
The fiber core refractive index of getting reference optical fiber 18 is n=1.5, if expect the refraction angle of β=45 °, the end slope angle that can be calculated reference optical fiber 18 by following formula is: 28 ° of α ≈.Namely when the end face of reference optical fiber 18 is polished to 28 ° of inclined-planes, the incident measuring beam 27 that carries tested sphere face shape information incides the end face of reference optical fiber 18 with 45, the measuring beam 28 of its reflection will be turned back 90 °, just overlap with the diffracted wave of reference optical fiber 18 preceding 29 and produce interference.
Claims (1)
1. the optical fiber point-diffraction phase-shifting interference measuring method of an object lens of large relative aperture concave spherical surface face shape is characterized in that:
To the optical fiber point-diffraction phase-shifting interference measuring of the concave spherical surface face shape of angular aperture＞90 ° the time,
The first step is chosen following equipment: beam splitting system, measuring optical fiber, beam splitter prism, microcobjective, reference optical fiber, imaging lens, ccd video camera, computing machine, tested object lens of large relative aperture concave spherical mirror and plane mirror;
In second step, enter the measuring beam of measuring optical fiber from beam splitting system, at the end face generation diffraction of measuring optical fiber; See through beam splitter prism before the diffracted wave, be transformed to the object lens of large relative aperture spherical wave front through inverted microcobjective, its centre of sphere is positioned at the focus in object space place of microcobjective; This spherical wave front is in the reflection of the surface of tested object lens of large relative aperture concave spherical mirror, sees through microcobjective again before carrying the reflection wave of tested object lens of large relative aperture concave spherical surface minute surface shape information, after the inclined end face reflection of beam splitter prism, reference optical fiber, forms and measures wavefront; By the reference spherical wave front of the inclined end face diffraction of reference optical fiber, converge with above-mentioned measurement wavefront and interfere; The interferogram that obtained this moment is received by ccd video camera by imaging lens, adopts standard method to handle and analyze in the input computing machine;
The 3rd step removed tested object lens of large relative aperture concave spherical mirror, and plane mirror is positioned over the focus place of microcobjective, and it is motionless to fix other optical elements simultaneously; See through beam splitter prism, microcobjective from the spherical wave of measuring optical fiber end face diffraction, through the plane reflection mirror reflection; See through microcobjective before the reflection wave, after the inclined end face reflection of beam splitter prism, reference optical fiber, form and measure wavefront; Converge and interfere from the reference spherical wave front of the inclined end face diffraction of reference optical fiber and above-mentioned measurement wavefront; The interferogram that obtained this moment is received by ccd video camera by imaging lens, adopts standard method to handle and analyze in the input computing machine;
Subsequently, deduct the measurement result in the 3rd step in the measurement result with second step, the ripple that obtains tested object lens of large relative aperture concave spherical mirror is poor, and is last, and this ripple difference divided by 2, can be obtained the face shape of tested object lens of large relative aperture concave spherical mirror.
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| CN102288105A (en) * | 2011-07-22 | 2011-12-21 | 大连民族学院 | Structure and detection method of optical fiber point-diffraction interferometer |
| CN102829733B (en) * | 2012-08-03 | 2015-03-11 | 中国计量学院 | Fringe contrast ratio-adjustable large-numerical value bore diameter point-diffraction interference device and method |
| CN103344198B (en) * | 2013-07-25 | 2016-05-11 | 哈尔滨工业大学 | The measuring instrument and the measuring method that detect for tiny spherical surface surface profile |
| CN105300273B (en) * | 2015-10-27 | 2018-05-08 | 中国科学院上海光学精密机械研究所 | The adjustable dynamic point-diffraction interferometer of fringe contrast |
| CN108732561B (en) * | 2018-07-01 | 2020-03-13 | 北京工业大学 | Air refractive index compensation method of laser tracking measurement system based on dual-wavelength interference |
| CN109470454B (en) * | 2018-12-05 | 2020-09-04 | 陕西理工大学 | Curved surface micro lens array surface shape detection device |
| CN111751923B (en) * | 2019-03-29 | 2023-03-10 | 成都理想境界科技有限公司 | Optical fiber and scanning light imaging display device |
| CN112964455B (en) * | 2021-02-09 | 2022-10-11 | 中国科学院上海光学精密机械研究所 | Wave aberration splicing measuring device and method for large-numerical-aperture objective lens |
| CN117490604B (en) * | 2024-01-03 | 2024-03-19 | 中国科学院长春光学精密机械与物理研究所 | Optical plane shape absolute detection method |
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