CN101672632B - Optical spherical surface shaped fiber point-diffraction phase-shifting interference measuring method - Google Patents
Optical spherical surface shaped fiber point-diffraction phase-shifting interference measuring method Download PDFInfo
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- CN101672632B CN101672632B CN2009102356503A CN200910235650A CN101672632B CN 101672632 B CN101672632 B CN 101672632B CN 2009102356503 A CN2009102356503 A CN 2009102356503A CN 200910235650 A CN200910235650 A CN 200910235650A CN 101672632 B CN101672632 B CN 101672632B
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Abstract
The invention relates to an optical spherical surface shaped fiber point-diffraction phase-shifting interference measuring method, belonging to the optical measurement technical field. Firstly, spherical surface wave diffracted by measuring fiber is reflected to an auxiliary positive lens by a dispersion prism, is converted into convergence spherical surface wave and is reflected at the surface of the measured spherical surface; the spherical surface wave carries the reflecting wavefront of the information of the measured spherical surface and is converged to the end surface of reference fiber by the auxiliary positive lens by penetrating the dispersion prism, so as to form measuring wavefront; the measured spherical surface is removed, other optical elements keep still, a planar reflecting mirror is arranged at the focus of the auxiliary positive lens, and the astigmation carried in by the auxiliary positive lens, the dispersion prism and the roughness of the end surface of the reference fiber can be measured by the same method. In the invention, the convex spherical surface and the concave spherical surface can be measured by two steps, and the near-ideal point-diffraction spherical surface wave is taken as the reference wavefront in the two-step measurement, thereby ensuring the high precision of twice interference measurement and ensuring the precision of the final spherical surface shaped measuring result.
Description
Technical field
A kind of spherical surface shaped optical fiber point-diffraction phase-shifting interference measuring method of the present invention belongs to field of optical measuring technologies.
Background technology
The major technique means of current spherical surface shaped measurement are laser digital corrugated phase-shifting interferometers, representational Related product as U.S. ZYGO and WYKO company.This quasi-instrument all uses the standard spherical mirror head to produce the reference sphere ground roll, but because the influence of optics processing and assembling, its with reference to the aberration of sphere generally all greater than λ/50, can't further reduce, this directly causes the accuracy of measurement of its sphere face shape can only reach λ/20～λ/50 (wavelength is 632.8nm).Far can not satisfy the demand of cutting edge technology researches such as ultraprecise processing and ultraviolet photolithographic.
The key that improves interferometric method sphere surface shape measurement precision is to seek high-precision reference sphere ground roll, and the spherical wave front that produces approximate ideal by means of aperture point diffraction is a feasible method.And replace aperture just to constitute the optical fiber point-diffraction interferometer with the end face of flexible optical fibre fibre core.The size of optical fiber core diameter has determined the numerical aperture of diffraction light and has departed from the error of spherical wave.Theoretical Calculation shows, if adopt He-Ne laser instrument (λ=0.6328 μ m), the core diameter of optical fiber is 2.4 μ m (4 λ), and numerical aperture (NA) is that 0.3 o'clock diffraction spherical aberration is less than λ/10
4The reference sphere surface accuracy that the ratio of precision of visible point reference diffraction spherical wave camera lens in kind produces is high more than 200 times.For actual measurement, it can be considered desirable corrugated with reference to sphere, adopts the optical fiber point-diffraction interferometric method will improve the accuracy of measurement of sphere face shape.
The reference spherical wave front that the some diffraction produces is dispersed, thereby naturally is suitable for measuring concave spherical surface, but can't directly apply to protruding sphere and measure.The reference sphere ground roll that only converges just can directly apply to protruding sphere and measure, and disperses owing to converge the wavefront of spherical wave after by focus, also can be used for measuring concave spherical surface so converge spherical wave.
To realize the measurement of concave spherical surface and protruding sphere with a diffraction method simultaneously, at first be transformed to the spherical wave front that converges before the some diffracted wave that must will disperse by relay optical system.Though use auxiliary positive lens can finish wavefront transformation, the aberration of positive lens itself has introduced error for undoubtedly the measurement of sphere face shape.Obtain sphere surface shape measurement result accurately, just must accurately measure aberration that auxiliary positive lens introduces and measurement result is revised.
When existing optical fiber point-diffraction interference technique is measured the face shape of concave spherical surface, be a part with the optical fiber diffraction wavefront as measuring beam, and get another part before the diffracted wave as the reference light beam.Owing to can't use whole effectively diffraction apertures of optical fiber, thereby limit the bore that to survey sphere.
Summary of the invention
The objective of the invention is to detect concave spherical surface and can not detect protruding sphere in order to solve the ordinary optic fibre point-diffraction phase-shifting interference measuring method, and the little problem of measuring of sphere bore, a kind of spherical surface shaped optical fiber point-diffraction phase-shifting interference measuring method has been proposed.
The present invention is by introducing an auxiliary positive lens to the some diffracted wave of the dispersing line translation of advancing, to be implemented in the measurement of finishing protruding sphere and concave spherical surface on the same set of device.Sphere surface shape measurement process was divided into for two steps: it is poor at first to measure the ripple that comprises tested sphere and relay optical system, then the aberration of independent measurement relay optical system.Two pacing amounts are all used near desirable some diffraction spherical wave as the reference wavefront, to guarantee each accuracy of measuring.The face shape of tested sphere can be subtracted each other by two pacing amount results and obtained.
Whole effectively diffraction apertures in order to utilize optical fiber to produce among the present invention, the present invention is polished to the certain angle inclined-plane with the end face of reference optical fiber, and replaces catoptron with this inclined end face.Make that when measuring light incides the reference optical fiber end face with certain incident angle the measuring light of reflection is just in time converged with the reference sphere ground roll of reference optical fiber diffraction and interfered.
The objective of the invention is to be achieved through the following technical solutions.
A kind of spherical surface shaped optical fiber point-diffraction phase-shifting interference measuring method of the present invention, the measurement mechanism of realizing this method comprises beam splitting system, measuring optical fiber, reference optical fiber, Amici prism, auxiliary positive lens, tested spherical mirror, end face, imaging lens, ccd video camera, computing machine, tested spherical mirror is convex mirror or concave mirror, and the tested spherical mirror centre of sphere places the focus place of auxiliary positive lens; Beam splitting system comprises laser instrument, adjustable neutral density filter, wave plate, polarizing beam splitter mirror, right-angle prism, 1/2 wave plate, quarter wave plate, piezoelectric ceramics, polaroid and microcobjective,
A kind of spherical surface shaped optical fiber point-diffraction phase-shifting interference measuring method of the present invention, its concrete implementation step is as follows:
The first step: enter the concurrent spherical wave of penetrating that gains interest of measuring optical fiber from beam splitting system and reflex to auxiliary positive lens, be transformed to the spherical wave front that converges by Amici prism; Above-mentioned surface reflection of converging spherical wave front at tested spherical mirror, the face shape information of having carried tested spherical mirror before the reflection wave; By auxiliary positive lens, see through Amici prism and converge to the reference optical fiber end face before the above-mentioned reflection wave, form first and measure wavefront; The reference optical fiber end face is polished the inclined-plane and plates semi-transparent semi-reflecting film, and above-mentioned first measures wavefront makes mirror to reflection at the reference optical fiber end face, and the high precision spherical wave front of the measurement wavefront of reflection and reference optical fiber self diffraction is converged and interfered; Interferogram adopts standard method to handle and analyze;
Second step: remove tested spherical mirror, keep other optical element original positions motionless, place plane mirror at the focus place of auxiliary positive lens; Spherical wave by the measuring optical fiber diffraction reflexes to auxiliary positive lens by Amici prism, is transformed to the spherical wave front that converges; This converges spherical wave front by above-mentioned plane reflection mirror reflection, by auxiliary positive lens, sees through Amici prism before the reflection wave, converges to the reference optical fiber end face, forms second and measures wavefront; The reference optical fiber end face is polished the inclined-plane and plates semi-transparent semi-reflecting film, and above-mentioned second measures wavefront makes mirror to reflection at the reference optical fiber end face, and the high precision spherical wave front of the measurement wavefront of reflection and reference optical fiber self diffraction is converged and interfered; Interferogram adopts standard method to handle and analyze.
Deducting the second pacing amount result from first step measurement result, promptly to obtain the ripple of tested spherical mirror poor; With this ripple difference divided by the 2 face shapes that promptly obtain tested spherical mirror.
Beneficial effect
Method of the present invention realized the surface shape measurement of protruding sphere and concave spherical surface on same table apparatus, solved that the general point diffraction interferometer can only be measured concave spherical surface and the difficult problem that can't measure protruding sphere.Simultaneously because the whole effective diffraction apertures that utilized measuring optical fiber and reference optical fiber point diffraction to produce, thereby can be used for the measurement of object lens of large relative aperture sphere face shape, solve the limited difficult problem of sphere measurement bore of conventional point-diffraction interferometer.
Protruding sphere of the present invention and concave spherical surface are measured and all were divided into for two steps and realize, two pacing amounts have all been utilized near desirable some diffraction spherical wave as the reference wavefront, can guarantee the high precision of twice interferometry, also just can guarantee final sphere surface shape measurement result's precision.
Description of drawings
Fig. 1 is the optical fiber point-diffraction phase-shifting interference measuring synoptic diagram of protruding sphere;
Fig. 2 is the optical fiber point-diffraction phase-shifting interference measuring synoptic diagram of relay optical system aberration;
Fig. 3 is the optical fiber point-diffraction phase-shifting interference measuring synoptic diagram of concave spherical surface;
Fig. 4 is the end surface shape and the wavefront synoptic diagram of reference optical fiber;
Wherein, 1-laser instrument, the adjustable neutral density filter of 2-, the 3-1/2 wave plate, the 4-polarizing beam splitter mirror, the 5-right-angle prism, the 6-right-angle prism, the 7-1/4 wave plate, the 8-1/4 wave plate, the 9-piezoelectric ceramics, the 10-polaroid, the 11-polaroid, the 12-microcobjective, the 13-microcobjective, the 14-measuring optical fiber, the 15-reference optical fiber, the 16-Amici prism, 17-assists positive lens, the 18-convex mirror, the 19-end face, the 20-imaging lens, the 21-CCD video camera, the 22-computing machine, the 23-plane mirror, the 24-concave mirror, the 25-lock pin, 26-diffracted beam axis, the 27-normal line of butt end, the 28-measuring beam, the 29-measuring beam, before the 30-diffracted wave, the 31-axis.
Embodiment
On the basis of above-mentioned measuring method,, realized a kind of optical fiber point-diffraction phase-shifting interference measuring method that is used for the sphere surface shape measurement by introducing conventional phase shifting device and using the light intensity of polarized light to adjust scheme (as Fig. 1, Fig. 2, shown in Figure 3).
Protruding sphere measuring method of the present invention is as follows:
The first step: as shown in Figure 1: decay by adjustable neutral density filter 2 from the linearly polarized light of laser instrument 1 outgoing, by inciding polarizing beam splitter mirror 4 behind 1/2 wave plate, the 3 adjustment polarization directions, be broken down into the mutually perpendicular two bunch polarized lights in polarization direction, a branch of transmission (measuring light), a branch of reflection (reference light).When this two bunch polarisation during respectively by right-angle prism 5 and right-angle prism 6 reflected back polarizing beam splitter mirrors 4 twice through quarter wave plate 7 and quarter wave plate 8, its polarization direction changes 90 degree separately, previous transmitted light beam will reflect, and previous folded light beam is with transmission.This measuring beam is wherein realized phase shift by piezoelectric ceramics 9.Adjust its polarization direction, and then be coupled to measuring optical fiber 14 and reference optical fiber 15 respectively by polaroid 10, polaroid 11 respectively from two bundle crossed polarized lights of polarizing beam splitter mirror 4 outgoing by microcobjective 12, microcobjective 13.Reflex to auxiliary positive lens 17 from the spherical wave of measuring optical fiber 14 other end diffraction by Amici prism 16, be transformed to the spherical wave front that converges.Because the centre of sphere of tested convex mirror 18 is positioned at the focus place of auxiliary positive lens 17, converging spherical wave will be in the surface reflection of tested convex mirror 18.The reflection wave forward position original optical path that carries 18 shape information of tested convex mirror returns, and by auxiliary positive lens 17, and sees through the end face 19 that Amici prism 16 converges to reference optical fiber 15, forms and measures wavefront.Because the end face 19 of reference optical fiber 15 is polished the inclined-plane and plates semi-transparent semi-reflecting film, measure wavefront and will make mirror to reflection at the end face 19 of reference optical fiber 15, the high precision spherical wave front (shown in solid line among the figure) of the measurement wavefront (as shown in phantom in FIG.) of reflection and reference optical fiber 15 self diffraction is converged and is interfered.Realize that by computing machine 22 control piezoelectric ceramics 9 step-length is the phase shift of pi/2, phase-shift interference is received by ccd video camera 21 by imaging lens 20, sends into computing machine 22 and carries out Treatment Analysis by standard method (4 steps or 5 step phase shift algorithms).Can adjust the relative intensity of reference light and measuring light by rotating 1/2 wave plate 3 and polaroid 10,11 among Fig. 5, to reach best fringe contrast.Obviously, it is poor that this pacing amount result not only includes the ripple of tested convex mirror 18, also include the wavefront error that end face 19 roughness of auxiliary positive lens 17, Amici prism 16 and reference optical fiber 15 are brought into, second step will be measured the aberration of these relay optical systems introducings.
Second step: as shown in Figure 2: remove tested convex mirror 18, and keep other optical element original positions motionless, plane mirror 23 is placed at focus place at auxiliary positive lens 17, spherical wave by measuring optical fiber 14 diffraction reflexes to auxiliary positive lens 17 by Amici prism 16, is transformed to the spherical wave front that converges.This converges spherical wave front and is reflected by plane mirror 23, by auxiliary positive lens 17, sees through Amici prism 16 before the reflection wave, converges to the end face 19 of reference optical fiber 15, forms and measures wavefront.Because the end face 19 of reference optical fiber 15 is polished the inclined-plane and plates semi-transparent semi-reflecting film, measure wavefront and will make mirror to reflection at the end face 19 of reference optical fiber 15, the high precision spherical wave front (shown in solid line among the figure) that the measurement wavefront (as shown in phantom in FIG.) of reflection and reference optical fiber 15 self diffraction produces is converged and is interfered.Realize that by computing machine 22 control piezoelectric ceramics 9 step-length is the phase shift of pi/2, phase-shift interference is received by ccd video camera 21 by imaging lens 20, sends into computing machine 22 and carries out Treatment Analysis by standard method (4 steps or 5 step phase shift algorithms).Because the light path and the first step basically identical of the second pacing amount, so this pacing amount can obtain the aberration that all relay optical systems are introduced.It is poor that the relay optical system aberration that the second pacing amount that deducts from first step measurement result obtains can obtain the ripple of tested convex mirror 18, obtain the face shape of tested convex mirror 18, only needs the ripple difference of tested convex mirror 18 is got final product divided by 2.
Concave spherical surface measuring method of the present invention is as follows:
The first step: as shown in Figure 3: decay by adjustable neutral density filter 2 from the linearly polarized light of laser instrument 1 outgoing, by inciding polarizing beam splitter mirror 4 behind 1/2 wave plate, the 3 adjustment polarization directions, be broken down into the mutually perpendicular two bunch polarized lights in polarization direction, a branch of transmission (measuring light), a branch of reflection (reference light).When this two bunch polarisation during respectively by right-angle prism 5 and 6 reflected back polarizing beam splitter mirrors 4 twice through quarter wave plate 7 and 8, its polarization direction changes 90 degree separately, previous transmitted light beam will reflect, and previous folded light beam is with transmission.This measuring beam is wherein realized phase shift by piezoelectric ceramics 9.Adjust its polarization direction by polaroid 10,11 respectively from two bundle crossed polarized lights of polarizing beam splitter mirror 4 outgoing, and then be coupled to measuring optical fiber 14 and reference optical fiber 15 respectively by microcobjective 12,13.Reflex to auxiliary positive lens 17 from the spherical wave of measuring optical fiber 14 other end diffraction by Amici prism 16, be transformed to the spherical wave front that converges.Because the centre of sphere of tested concave mirror 24 is positioned at the focus place of auxiliary positive lens 17, converge that the focus of spherical wave by auxiliary positive lens 17 continues to propagate and in the surface reflection of tested concave mirror 24.The reflection wave forward position original optical path that carries 24 shape information of tested concave mirror returns, and by auxiliary positive lens 17, and sees through the end face 19 that Amici prism 16 converges to reference optical fiber 15, forms and measures wavefront.Because the end face 19 of reference optical fiber 15 is polished 28 ° of inclined-planes and plates semi-transparent semi-reflecting film, measure wavefront and will make mirror to reflection at the end face 19 of reference optical fiber 15, the high precision spherical wave front (shown in solid line among the figure) of the measurement wavefront (as shown in phantom in FIG.) of reflection and reference optical fiber 15 self diffraction is converged and is interfered.Realize that by computing machine 22 control piezoelectric ceramics 9 step-length is the phase shift of pi/2, phase-shift interference is received by ccd video camera 21 by imaging lens 20, sends into computing machine 22 and carries out Treatment Analysis by standard method (4 steps or 5 step phase shift algorithms).Can adjust the relative intensity of reference light and measuring light by rotating 1/2 wave plate 3 and polaroid 10,11 among Fig. 7, to reach best fringe contrast.Obviously, it is poor that this pacing amount result not only includes the ripple of tested concave mirror 24, also include the wavefront error that end face 19 roughness of auxiliary positive lens 17, Amici prism 16 and reference optical fiber 15 are brought into, second step will be measured the aberration of these relay optical systems introducings.
Second step: as shown in Figure 2: remove tested concave mirror 24, and keep other optical element original positions motionless, plane mirror 23 is placed at focus place at auxiliary positive lens 17, spherical wave by measuring optical fiber 14 diffraction reflexes to auxiliary positive lens 17 by Amici prism 16, is transformed to the spherical wave front that converges.This converges spherical wave front and is reflected by plane mirror 23, by auxiliary positive lens 17, sees through Amici prism 16 before the reflection wave, converges to the end face 19 of reference optical fiber 15, forms and measures wavefront.Because the end face 19 of reference optical fiber 15 is polished 28 ° of inclined-planes and plates semi-transparent semi-reflecting film, measure wavefront and will make mirror to reflection at the end face 19 of reference optical fiber 15, the high precision spherical wave front (shown in solid line among the figure) of the measurement wavefront (as shown in phantom in FIG.) of reflection and reference optical fiber 15 self diffraction is converged and is interfered.Realize that by computing machine 22 control piezoelectric ceramics 9 step-length is the phase shift of pi/2, phase-shift interference is received by ccd video camera 21 by imaging lens 20, sends into computing machine 22 and carries out Treatment Analysis by standard method (4 steps or 5 step phase shift algorithms).Because the light path and the first step basically identical of the second pacing amount, so this pacing amount can obtain the aberration that all relay optical systems are introduced.
It is poor that the relay optical system aberration that the second pacing amount that deducts from first step measurement result obtains can obtain the ripple of tested concave mirror 24, obtain the face shape of tested concave mirror 24, only needs the ripple difference of tested concave mirror 24 is got final product divided by 2.
The computing method of fiber end face angle: the shape of the end face 19 of optical fiber 15 and wavefront as shown in Figure 4: the end face of reference optical fiber 15 19 related lock pins 25 are angled the inclined-plane of α by whole polishing, and end face 19 is coated with semi-transparent semi-reflecting film.Wherein the axis 31 of reference optical fiber 15 is α with normal line of butt end 27 angles, and the diffracted beam axis 26 of reference optical fiber 15 is β with normal line of butt end 27 angles of reference optical fiber 15, and according to refraction law, and to get air refraction be 1, has:
nsinα＝sinβ
The fiber core refractive index of getting reference optical fiber 15 is n=1.5, if expect the refraction angle of β=45 °, the angle of inclination that can be calculated reference optical fiber 15 end faces 19 by following formula is: 28 ° of α ≈.Promptly when the end face 19 of reference optical fiber 15 is polished to 28 ° of inclined-planes, the measuring beam 28 that carries tested sphere face shape information incides the end face 19 of reference optical fiber 15 with 45, the measuring beam 29 of its reflection will be turned back 90 °, just overlap with the diffracted wave of reference optical fiber 15 preceding 30 and produce interference.
Claims (1)
1. spherical surface shaped optical fiber point-diffraction phase-shifting interference measuring method, the measurement mechanism of realizing this method comprises beam splitting system, measuring optical fiber (14), reference optical fiber (15), Amici prism (16), auxiliary positive lens (17), tested spherical mirror, end face (19), imaging lens (20), ccd video camera (21), computing machine (22), tested spherical mirror is convex mirror (18) or concave mirror (24), it is characterized in that: the tested spherical mirror centre of sphere places the focus place of auxiliary positive lens (17);
The first step: enter the concurrent spherical wave of penetrating that gains interest of measuring optical fiber (14) from beam splitting system and reflex to auxiliary positive lens (17), be transformed to the spherical wave front that converges by Amici prism (16); Above-mentioned surface reflection of converging spherical wave front at tested spherical mirror, the face shape information of having carried tested spherical mirror before the reflection wave; By auxiliary positive lens (17), see through Amici prism (16) and converge to reference optical fiber (15) end face (19) before the above-mentioned reflection wave, form first and measure wavefront; Reference optical fiber (15) end face (19) is polished 28 ° of inclined-planes and plates semi-transparent semi-reflecting film, above-mentioned first measures wavefront makes mirror to reflection at reference optical fiber (15) end face (19), and the high precision spherical wave front of the measurement wavefront of reflection and reference optical fiber (15) self diffraction is converged and interfered; Interferogram adopts standard method to handle and analyze;
Second step: remove tested spherical mirror, keep other optical element original positions motionless, place plane mirror (23) at the focus place of auxiliary positive lens (17); Spherical wave by measuring optical fiber (14) diffraction reflexes to auxiliary positive lens (17) by Amici prism (16), is transformed to the spherical wave front that converges; This converges spherical wave front by above-mentioned plane mirror (23) reflection, by auxiliary positive lens (17), sees through Amici prism (16) before the reflection wave, converges to reference optical fiber (15) end face (19), forms second and measures wavefront; Above-mentioned second measures wavefront makes mirror to reflection at reference optical fiber (15) end face (19), and the high precision spherical wave front of the measurement wavefront of reflection and reference optical fiber (15) self diffraction is converged and interfered; Interferogram adopts standard method to handle and analyze;
First step measurement result deducts the second pacing amount result, and promptly to obtain the ripple of tested spherical mirror poor; With this ripple difference divided by the 2 face shapes that promptly obtain tested spherical mirror.
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