CN106548981A - 硅晶片的激光加工方法 - Google Patents
硅晶片的激光加工方法 Download PDFInfo
- Publication number
- CN106548981A CN106548981A CN201610879085.4A CN201610879085A CN106548981A CN 106548981 A CN106548981 A CN 106548981A CN 201610879085 A CN201610879085 A CN 201610879085A CN 106548981 A CN106548981 A CN 106548981A
- Authority
- CN
- China
- Prior art keywords
- cutting road
- silicon wafer
- scribing
- laser
- laser processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Laser Beam Processing (AREA)
- Dicing (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610879085.4A CN106548981B (zh) | 2016-09-30 | 2016-09-30 | 硅晶片的激光加工方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610879085.4A CN106548981B (zh) | 2016-09-30 | 2016-09-30 | 硅晶片的激光加工方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106548981A true CN106548981A (zh) | 2017-03-29 |
CN106548981B CN106548981B (zh) | 2019-01-22 |
Family
ID=58368406
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610879085.4A Active CN106548981B (zh) | 2016-09-30 | 2016-09-30 | 硅晶片的激光加工方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN106548981B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110312590A (zh) * | 2019-02-12 | 2019-10-08 | 大族激光科技产业集团股份有限公司 | 一种硬脆性产品的加工方法、装置以及系统 |
CN117020397A (zh) * | 2023-09-20 | 2023-11-10 | 北京理工大学 | 一种基于时空同步聚焦激光的碳化硅晶锭剥片方法 |
TWI825241B (zh) * | 2018-12-21 | 2023-12-11 | 日商東京威力科創股份有限公司 | 基板處理裝置及基板處理方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080057680A1 (en) * | 2006-08-29 | 2008-03-06 | Disco Corporation | Wafer laser processing method |
TW201041178A (en) * | 2009-03-03 | 2010-11-16 | Showa Denko Kk | Laser machining method and method for manufacturing compound semiconductor light-emitting element |
CN103377909A (zh) * | 2012-04-17 | 2013-10-30 | 台湾积体电路制造股份有限公司 | 用于分割半导体晶圆的设备和方法 |
CN103537805A (zh) * | 2012-07-17 | 2014-01-29 | 深圳市大族激光科技股份有限公司 | 晶圆片激光切割方法及晶圆片加工方法 |
-
2016
- 2016-09-30 CN CN201610879085.4A patent/CN106548981B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080057680A1 (en) * | 2006-08-29 | 2008-03-06 | Disco Corporation | Wafer laser processing method |
TW201041178A (en) * | 2009-03-03 | 2010-11-16 | Showa Denko Kk | Laser machining method and method for manufacturing compound semiconductor light-emitting element |
CN103377909A (zh) * | 2012-04-17 | 2013-10-30 | 台湾积体电路制造股份有限公司 | 用于分割半导体晶圆的设备和方法 |
CN103537805A (zh) * | 2012-07-17 | 2014-01-29 | 深圳市大族激光科技股份有限公司 | 晶圆片激光切割方法及晶圆片加工方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI825241B (zh) * | 2018-12-21 | 2023-12-11 | 日商東京威力科創股份有限公司 | 基板處理裝置及基板處理方法 |
CN110312590A (zh) * | 2019-02-12 | 2019-10-08 | 大族激光科技产业集团股份有限公司 | 一种硬脆性产品的加工方法、装置以及系统 |
CN117020397A (zh) * | 2023-09-20 | 2023-11-10 | 北京理工大学 | 一种基于时空同步聚焦激光的碳化硅晶锭剥片方法 |
Also Published As
Publication number | Publication date |
---|---|
CN106548981B (zh) | 2019-01-22 |
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Legal Events
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210827 Address after: 518000 No. 9988 Shennan Road, Nanshan District, Shenzhen, Guangdong Patentee after: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd. Patentee after: Shenzhen Han's micromachining Software Technology Co.,Ltd. Address before: 518000 Dazu laser building, 9 new West Road, North Nanshan District high tech park, Shenzhen, Guangdong Patentee before: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20211109 Address after: 518000 Han's laser office building 301325, No. 29, Gaoxin North Sixth Road, songpingshan community, Xili street, Nanshan District, Shenzhen, Guangdong Patentee after: Shenzhen Han's micromachining Software Technology Co.,Ltd. Address before: 518000 No. 9988 Shennan Road, Nanshan District, Shenzhen, Guangdong Patentee before: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd. Patentee before: Shenzhen Han's micromachining Software Technology Co.,Ltd. |