CN106526901A - Solid state optical scanner - Google Patents
Solid state optical scanner Download PDFInfo
- Publication number
- CN106526901A CN106526901A CN201610940131.7A CN201610940131A CN106526901A CN 106526901 A CN106526901 A CN 106526901A CN 201610940131 A CN201610940131 A CN 201610940131A CN 106526901 A CN106526901 A CN 106526901A
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- China
- Prior art keywords
- light
- heater
- refrigerator
- deflectable material
- photoscanner
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The invention relates to a solid state optical scanner based on the working principle for performing gradient temperature modulating on a material having a significant thermo-optic effect. The solid state optical scanner includes a light deflection material, a refrigerator and a heater. An input end of the light deflection material is connected to a light beam input by an external light source, a second input end of the light deflection material is connected to an output end of the refrigerator, a third input end of the light deflection material is connected to an output end of the heater, and an output end of the light deflection material is connected to an external scanning target; an input end of the refrigerator is connected to an external refrigerator power source and a control circuit; and an input end of the heater is connected to an external heater power source and the control circuit. The solid state optical scanner does not include any mechanical moving parts, is small in size, is little in power consumption, is long in service life, and can be used for various micro-optics systems.
Description
Technical field
The present invention relates to a kind of solid-state photoscanner, being based particularly on carries out gradient to the material with notable thermo-optic effect
The operation principle of temperature modulation.Any mechanical movable part is not included in solid-state photoscanner, small volume is low in energy consumption, the life-span
It is long, can be used for various micro-optical systems.
Background technology
Photoscanner is widely used in needing for light beam to form one-dimensional by the quick deflection of optical element, two dimension or
The occasions such as 3-D graphic, such as bar code scan, optical scanning microscope, laser projection tv etc..
Difference of the common large scale photoscanner according to core optical deflection component, can be divided into electromagnetic mechanical deflection
(such as galvanometer Galvanometer), polyhedral prism mechanical deflection, electro-optical deflection, audio-optical deflection etc.；For micro-electro-mechanical systems
The On Microoptical Scanner of system (Microelectromechanical Systems, MEMS) is according to the driving principle of microdrive
Difference, can be divided into electric heating, electromagnetic type, electrostatic etc..For current minimum MEMS On Microoptical Scanners, its chip (Die)
Also in several millimeters square, thickness can be less than 1 millimeter to size.In addition the problems such as yet suffering from complex process, high processing costs.
Thermo-optic effect, refers to the physical effect that the refractive index of optical medium changes with temperature change, is light
Learn a kind of optical property of material.In given temperature field, crystal, semi-conducting material, glass and other application are in difference
Optical material in optical device and system, its refractive index are not constant parameters.Under certain pressure, the refraction of material
Rate variation with temperature amount is referred to as thermo-optical coeffecient.It is defined as the refractive index and temperature that dn/dT, n and T are material respectively,
Unit is per degree Celsius or every Kelvin.For organic polymer, the Refractive Index of Material change master that temperature change causes
To be determined by density of material change, its thermo-optical coeffecient is 10-4Magnitude is higher relative to inorganic material such as silicon.
Therefore the present invention proposes a kind of solid-state photoscanner, is based particularly on and the material with notable thermo-optic effect is entered
The operation principle of row gradient temperature modulation.Any mechanical movable part is not included in solid-state photoscanner, with small volume, work(
The advantages of consuming low, process is simple, low cost, life-span length, can be used for various micro-optical systems.
The content of the invention
It is an object of the invention to propose a kind of solid-state photoscanner, it is based particularly on to the material with notable thermo-optic effect
Material carries out the operation principle of gradient temperature modulation.Any mechanical movable part is not included in solid-state photoscanner, with volume
Little, low in energy consumption, process is simple, low cost the advantages of life-span length, can be used for various micro-optical systems.
For achieving the above object, the present invention using technical scheme is：It includes light deflectable material, refrigerator and heater.
The light beam that one input of light deflectable material is input into external light source is connected, second input and the refrigeration of light deflectable material
The outfan of device is connected, and the 3rd input of light deflectable material is connected with the outfan of heater, the output of light deflectable material
End is connected with external scan target；The input of refrigerator is connected with external refrigeration device power supply and control circuit；Heater it is defeated
Enter end to be connected with external heater power supply and control circuit；
Described light deflectable material is the low thermal conductivity with high thermo-optical coeffecient, the homogeneous materialses of high heat resisting temperature, can be with
For but be not limited to various high molecular polymers, such as polymethyl acrylate (PMMA), Merlon (PC), SU8 etc.；
The profile of described light deflectable material is cuboid, has certain inclination angle with incident beam in order to set up
The gradient temperature field of degree；The surface of one group of relative rectangle plane of cuboid has a low roughness, optical clear, and
Be coated with high permeability plated film, the surface of another group of relative rectangle plane of cuboid has low roughness, respectively with
The output plane of refrigerator and heater is closely coupled, and slight void therebetween adopts heat-conducting silicone grease to fill to improve heat conduction system
Number；
Described refrigerator can be the semiconductor cooler based on Peltier (Peltier) effect, and heat pipe or water-cooled are led
Hot device, the output plane of refrigerator are closely coupled with the surface of one group of relative rectangle plane of light deflectable material, therebetween micro-
Little space adopts heat-conducting silicone grease to fill to improve heat conductivity；Refrigerator is operated in constant power-mode, for deflecting material in light
Stable low temperature is set up in the side of material；
Described heater is resistance type heater, and one group of relative rectangle of its output plane and light deflectable material is flat
The surface in face is closely coupled, and slight void therebetween adopts heat-conducting silicone grease to fill to improve heat conductivity；Heater is operated in change
Change power mode, in light deflectable material opposite side set up by external control circuit control change high temperature, so as to
The gradient temperature field of change is realized in light deflectable material.
The operation principle of the present invention is such：The profile of light deflectable material be cuboid, cuboid
The surface of one group of relative rectangle plane there is low roughness, optical clear, and be coated with high permeability plated film, it is straight parallel hexahedro
The surface of another group of relative rectangle plane of body has low roughness, tight with the output plane of refrigerator and heater respectively
It is connected, slight void therebetween adopts heat-conducting silicone grease to fill to improve heat conductivity；Refrigerator can be based on peltier effect
Semiconductor cooler, heat pipe or water-cooled conducting heat are operated in constant power-mode, for setting up in the side of light deflectable material
Stable low temperature；Heater is resistance type heater, is operated in change power mode, for building in the opposite side of light deflectable material
The high temperature of the vertical change by external control circuit control, so as to the gradient temperature field for realizing changing in light deflectable material；Light is inclined
It is with high thermo-optical coeffecient and the homogeneous materialses of high heat resisting temperature to turn material, can be various high molecular polymers；Below with poly-
As a example by methyl methacrylate, thermo-optical coeffecient is -1.44x10-4K-1, heat conductivity is 0.17W/ (m K), in 832nm wavelength
Lower refractive index is about 20 DEG C of 1.5025@, 1.3581 12 DEG C of@, and maximum temperature is 120 DEG C；Refrigerator adopts semiconductor cooler, reason
By 60 DEG C of temperature difference above can be maintained between cold end and hot junction, actual efficiency is no so high, and cold junction temperature is set to constant -10
℃；Heater makes hot-side temperature fluctuate between about 20 DEG C to 120 DEG C, and the temperature difference is 100 DEG C；When incident angle is 70 degree, can
To calculate greatest optical deflection angle as 70-arcsin (sin70 degree * 1.3581/1.5025)=11.86 degree, light beam to plus
The hot junction deflection of hot device side；As light beam is continuously deflected in gradual change gradient temperature field, therefore can be in the defeated of light deflectable material
Go out endlap and add a lateral displacement.
The present invention is had the advantage that as a result of above-mentioned technical proposal：
1st, it is based on thermo-optic effect, with small volume, low in energy consumption, process is simple, low cost, the advantages of life-span length；
2nd, profile rule, material are common, and compatible MEMS technology, are easy to integrated with micro-optical systems.
Description of the drawings
Fig. 1 is the structured flowchart of the present invention；
Fig. 2 is the structural representation of the present invention；
Fig. 3 is the one-dimensional cascade schematic diagram of the present invention；
Fig. 4 is the two dimensional cascade schematic diagram of the present invention；
Specific embodiment
The invention will be further described with reference to the accompanying drawings and examples：As depicted in figs. 1 and 2, it includes that light is deflected
Material 1, refrigerator 2 and heater 3.The light beam that one input of light deflectable material 1 is input into external light source is connected, light deflection
Second input of material 1 is connected with the outfan of refrigerator 2, the 3rd input and the heater 3 of light deflectable material 1
Outfan is connected, and the outfan of light deflectable material 1 is connected with external scan target；The input of refrigerator 2 and external refrigeration device
Power supply is connected with control circuit；The input of heater 3 is connected with external heater power supply and control circuit；
Described light deflectable material 1 is that the homogeneous materialses of high heat resisting temperature can with high thermo-optical coeffecient, low thermal conductivity
Think various high molecular polymers, such as polymethyl acrylate, Merlon, SU8 etc.；
The profile of described light deflectable material 1 is cuboid, has certain inclination with incident beam in order to set up
The gradient temperature field of angle；The surface of one group of relative rectangle plane of cuboid has a low roughness, optical clear,
And high permeability plated film is coated with, the surface of another group of relative rectangle plane of cuboid has low roughness, respectively
Closely coupled with the output plane of refrigerator 2 and heater 3, slight void therebetween adopts heat-conducting silicone grease to fill to improve heat conduction
Coefficient；
Described refrigerator 2 can be the semiconductor cooler based on peltier effect, heat pipe or water-cooled conducting heat, freeze
The output plane of device 2 is closely coupled with the surface of one group of relative rectangle plane of light deflectable material 1, and slight void therebetween is adopted
Filled to improve heat conductivity with heat-conducting silicone grease；Refrigerator 2 is operated in constant power-mode, for the one of light deflectable material 1
Stable low temperature is set up in side；
Described heater 3 is resistance type heater, one group of relative rectangle of its output plane and light deflectable material 1
The surface of plane is closely coupled, and slight void therebetween adopts heat-conducting silicone grease to fill to improve heat conductivity；Heater 3 is operated in
Change power mode, sets up the high temperature of the change by external control circuit control for the opposite side in light deflectable material 1, so as to
The gradient temperature field of change is realized in light deflectable material 1.
The operation principle of the present invention is such：The profile of light deflectable material 1 be cuboid, cuboid
The surface of one group of relative rectangle plane there is low roughness, optical clear, and be coated with high permeability plated film, it is straight parallel hexahedro
The surface of another group of relative rectangle plane of body has low roughness, tight with the output plane of refrigerator 2 and heater 3 respectively
Close to be connected, slight void therebetween adopts heat-conducting silicone grease to fill to improve heat conductivity；Refrigerator 2 can be to be imitated based on Peltier
The semiconductor cooler answered, heat pipe or water-cooled conducting heat, are operated in constant power-mode, for building in the side of light deflectable material
Vertical stable low temperature；Heater 3 is resistance type heater, is operated in change power mode, in the another of light deflectable material 1
The high temperature of the change by external control circuit control is set up in side, so as to the gradient temperature field of change is realized in light deflectable material 1；
Light deflectable material 1 is with high thermo-optical coeffecient and the homogeneous materialses of high heat resisting temperature, can be various high molecular polymers；Below
By taking polymethyl acrylate as an example, thermo-optical coeffecient is -1.44x10-4K-1, heat conductivity is 0.17W/ (m K), in 832nm
Under wavelength, refractive index is about 20 DEG C of 1.5025@, 1.3581 12 DEG C of@, and maximum temperature is 120 DEG C；Refrigerator 2 adopts semiconductor refrigerating
Device, can maintain 60 DEG C of temperature difference in theory between cold end and hot junction, and actual efficiency is no so high, and cold junction temperature is set to constant
- 10 DEG C；Heater 3 makes hot-side temperature fluctuate between about 20 DEG C to 120 DEG C, and the temperature difference is 100 DEG C；It it is 70 degree in incident angle
When, greatest optical deflection angle can be calculated for 70-arcsin (sin70 degree * 1.3581/1.5025)=11.86 degree, light beam
Deflect to the hot junction of 3 side of heater.
The extension of the expansion or two-dimensional scan of scanning angle can be realized by the cascade of multiple present invention；It is below one-dimensional
The embodiment of cascade：As shown in figure 3, it include two groups it is of the invention, two groups the present invention be connected along incident light axis in the same direction, make incident illumination
Same plane is in the deflection of two groups of present invention, makes beam deflection angle degree reach twice；
It is below the embodiment of two dimensional cascade：As shown in figure 4, it include two groups it is of the invention, two groups the present invention along incident illumination
Axle be rotated by 90 ° it is connected, make incident illumination two groups the present invention deflection planes differ 90 degree, formation X-Y two-dimensional scans.
Claims (9)
1. a kind of solid-state photoscanner, it is characterised in that：It includes light deflectable material, refrigerator and heater, light deflectable material
The light beam that is input into external light source of an input be connected, second input of light deflectable material and the outfan of refrigerator
It is connected, the 3rd input of light deflectable material is connected with the outfan of heater, and outfan and the outside of light deflectable material are swept
Retouch target to be connected；The input of refrigerator is connected with external refrigeration device power supply and control circuit；The input of heater and outside
Heater power source is connected with control circuit.
2. solid-state photoscanner as claimed in claim 1, it is characterised in that：Described light deflectable material is with hyperpyrexia spectrum
Number, low thermal conductivity, the homogeneous materialses of high heat resisting temperature are but are not limited to various high molecular polymers, such as poly- methacrylate
Methyl ester, Merlon, SU8 etc.；Thermo-optical coeffecient is -1.0x10-4K-1To -1.0x10-3K-1。
3. solid-state photoscanner as claimed in claim 1, it is characterised in that：The profile of described light deflectable material is straight parallel
Hexahedron；The surface roughness of one group of relative rectangle plane of cuboid is 0.01 micron to 0.8 micron.
4. solid-state photoscanner as claimed in claim 1, it is characterised in that：The profile of described light deflectable material is straight parallel
Hexahedron；The surface of one group of relative rectangle plane of cuboid is coated with high permeability plated film, transmitance be 80% to
100%.
5. solid-state photoscanner as claimed in claim 1, it is characterised in that：The profile of described light deflectable material is straight parallel
Hexahedron；The surface of another group of relative rectangle plane of cuboid has low roughness, respectively with refrigerator and plus
The output plane of hot device is closely coupled, and slight void therebetween adopts heat-conducting silicone grease to fill to improve heat conductivity.
6. solid-state photoscanner as claimed in claim 1, it is characterised in that：Described refrigerator is based on peltier effect
Semiconductor cooler, the output plane of refrigerator are closely coupled with the surface of one group of relative rectangle plane of light deflectable material,
Slight void therebetween adopts heat-conducting silicone grease to fill to improve heat conductivity.
7. solid-state photoscanner as claimed in claim 1, it is characterised in that：Described refrigerator is operated in firm power mould
Formula, for setting up stable low temperature in the side of light deflectable material.
8. solid-state photoscanner as claimed in claim 1, it is characterised in that：Described heater is resistance type heater, its
Output plane it is closely coupled with the surface of one group of relative rectangle plane of light deflectable material, slight void therebetween is using leading
Hot silicone grease fills to improve heat conductivity.
9. solid-state photoscanner as claimed in claim 1, it is characterised in that：Described heater is operated in change power mould
Formula, sets up the high temperature of the change by external control circuit control for the opposite side in light deflectable material, so as to deflect material in light
The gradient temperature field of change is realized in material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610940131.7A CN106526901A (en) | 2016-10-28 | 2016-10-28 | Solid state optical scanner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610940131.7A CN106526901A (en) | 2016-10-28 | 2016-10-28 | Solid state optical scanner |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106526901A true CN106526901A (en) | 2017-03-22 |
Family
ID=58291999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610940131.7A Pending CN106526901A (en) | 2016-10-28 | 2016-10-28 | Solid state optical scanner |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106526901A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59147327A (en) * | 1983-02-10 | 1984-08-23 | Omron Tateisi Electronics Co | Optical deflector |
| JPS59185313A (en) * | 1983-04-05 | 1984-10-20 | Omron Tateisi Electronics Co | Optical deflector |
| JPS60242431A (en) * | 1984-05-16 | 1985-12-02 | Omron Tateisi Electronics Co | Optical deflector |
| JPS60242434A (en) * | 1984-05-16 | 1985-12-02 | Omron Tateisi Electronics Co | Optical deflector |
| GB2215071A (en) * | 1988-02-02 | 1989-09-13 | British Broadcasting Corp | Thermo-optio deflector |
-
2016
- 2016-10-28 CN CN201610940131.7A patent/CN106526901A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59147327A (en) * | 1983-02-10 | 1984-08-23 | Omron Tateisi Electronics Co | Optical deflector |
| JPS59185313A (en) * | 1983-04-05 | 1984-10-20 | Omron Tateisi Electronics Co | Optical deflector |
| JPS60242431A (en) * | 1984-05-16 | 1985-12-02 | Omron Tateisi Electronics Co | Optical deflector |
| JPS60242434A (en) * | 1984-05-16 | 1985-12-02 | Omron Tateisi Electronics Co | Optical deflector |
| GB2215071A (en) * | 1988-02-02 | 1989-09-13 | British Broadcasting Corp | Thermo-optio deflector |
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Application publication date: 20170322 |