CN106521419A - 合金表面镀钛工艺 - Google Patents

合金表面镀钛工艺 Download PDF

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CN106521419A
CN106521419A CN201611072853.1A CN201611072853A CN106521419A CN 106521419 A CN106521419 A CN 106521419A CN 201611072853 A CN201611072853 A CN 201611072853A CN 106521419 A CN106521419 A CN 106521419A
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substrate
alloy
technology
iron
nitrogen
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田绍洁
孙香兰
马克信
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Dalian Holy Vacuum Technology Development Co Ltd Development Division
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Dalian Holy Vacuum Technology Development Co Ltd Development Division
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/24—Nitriding

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

本发明涉及一种合金表面镀钛工艺，属于金属材料表面处理领域。本发明利用电子束物理气相沉积法(EB‑PVD)在铁碳合金上镀钛的工艺，在镀钛完成的同时，进行渗氮工艺，使其在钛的表面层形成TiN表层，可以改善表面的钛层在使用过程中的剥落，更为重要的是提高了表面层的强度及耐磨性。

Description

合金表面镀钛工艺
技术领域
本发明涉及一种合金表面镀钛工艺，属于金属材料表面处理领域。
背景技术
铁碳合金分为钢与生铁两大类，钢是含碳量为0.03％～2％的铁碳合金。碳钢是最常用的普通钢，冶炼方便、加工容易、价格低廉，而且在多数情况下能满足使用要求，所以应用十分普遍。按含碳量不同，碳钢又分为低碳钢、中碳钢和高碳钢。随含碳量升高，碳钢的硬度增加、韧性下降。合金钢又叫特种钢，在碳钢的基础上加入一种或多种合金元素，使钢的组织结构和性能发生变化，从而具有一些特殊性能，如高硬度、高耐磨性、高韧性等。与纯铜相同，铁碳合金的表面耐腐蚀性也一般。
为提高上述材料表面的耐腐蚀特性，可在其表面镀或渗透钛层。目前发展阶段，目前的镀钛方法包括化学转化、真空沉积、喷涂等处理方法，然而这些方法的弊端在于镀层与基体结合不紧密。
发明内容
为解决上述技术问题，本发明的目的是提供一种合金表面镀钛工艺，具体为一种利用电子束物理气相沉积法(EB-PVD)在铁碳合金上镀钛的工艺。
一种合金表面镀钛工艺，所述镀钛工艺为电子束物理气相沉积法，所述方法工艺步骤如下：
(1)将待处理的铁碳合金进行打磨处理，使其表面粗糙度不大于0.25；将打磨后的铁碳合金利用丙酮清洗，烘干；
(2)将铁碳合金置于基板上，基板转速10～50r/min，基板表面温度为490～560℃；工作室的工作压力为0.005～0.5Pa，蒸镀速率4～6微米/min，蒸镀时间5～15min；
(3)向工作室内通入氮气和氢气的混合气体，关闭电子束装置，将基板表面温度为800～960℃，保持工作室内的压力为50～500Pa，保温时间30～360min，其中，所述氮气与氢气的体积比为1:0.5～3。
本发明所述电子束物理气相沉积法在现有技术公开的电子束物理气相沉积设备中进行，所述电子束物理气相沉积设备可商业购得。
本发明所述合金表面镀钛工艺优选所述步骤(3)中，所述氮气与氢气的体积比为1:1。
本发明所述合金表面镀钛工艺优选所述步骤(2)中，将铁碳合金置于基板上，基板转速25r/min，基板表面温度为520℃；工作室的工作压力为0.005Pa，蒸镀速率5微米/min，蒸镀时间10min。
本发明所述合金表面镀钛工艺优选所述步骤(3)中，向工作室内通入氮气和氢气的混合气体，关闭电子束装置，将基板表面温度为800～960℃，保持工作室内的压力为250～500Pa，保温时间120～360min。
本发明一个优选的技术方案为：
一种合金表面镀钛工艺，所述镀钛工艺为电子束物理气相沉积法，所述方法工艺步骤如下：
(1)将待处理的铁碳合金进行打磨处理，使其表面粗糙度不大于0.25；将打磨后的铁碳合金利用丙酮清洗，烘干；
(2)将铁碳合金置于基板上，基板转速25r/min，基板表面温度为520℃；工作室的工作压力为0.005Pa，蒸镀速率5微米/min，蒸镀时间10min；
(3)向工作室内通入氮气和氢气的混合气体，关闭电子束装置，将基板表面温度为800～960℃，保持工作室内的压力为250～500Pa，保温时间120～360min，所述氮气与氢气的体积比为1:1。
本发明的有益效果为：本发明提供了一种利用电子束物理气相沉积法(EB-PVD)在铁碳合金上镀钛的工艺，在镀钛完成的同时，进行渗氮工艺，使其在钛的表面层形成TiN表层，可以改善表面的钛层在使用过程中的剥落，更为重要的是提高了表面层的强度及耐磨性。
具体实施方式
下述非限制性实施例可以使本领域的普通技术人员更全面地理解本发明，但不以任何方式限制本发明。
下述实施例中所述试验方法，如无特殊说明，均为常规方法；所述试剂和材料，如无特殊说明，均可从商业途径获得。
实施例1
一种合金表面镀钛工艺，所述镀钛工艺为电子束物理气相沉积法，所述方法工艺步骤如下：
(1)将待处理的铁碳合金进行打磨处理，使其表面粗糙度不大于0.25；将打磨后的铁碳合金利用丙酮清洗，烘干；
(2)将铁碳合金置于基板上，基板转速25r/min，基板表面温度为520℃；工作室的工作压力为0.005Pa，蒸镀速率5微米/min，蒸镀时间10min；
(3)向工作室内通入氮气和氢气的混合气体，关闭电子束装置，将基板表面温度为9009℃，保持工作室内的压力为300Pa，保温时间240min，所述氮气与氢气的体积比为1:1。
实施例2
一种合金表面镀钛工艺，所述镀钛工艺为电子束物理气相沉积法，所述方法工艺步骤如下：
(1)将待处理的铁碳合金进行打磨处理，使其表面粗糙度不大于0.25；将打磨后的铁碳合金利用丙酮清洗，烘干；
(2)将铁碳合金置于基板上，基板转速25r/min，基板表面温度为520℃；工作室的工作压力为0.005Pa，蒸镀速率5微米/min，蒸镀时间10min；
(3)向工作室内通入氮气和氢气的混合气体，关闭电子束装置，将基板表面温度为960℃，保持工作室内的压力为500Pa，保温时间120min，所述氮气与氢气的体积比为1:1。

Claims (4)

1.合金表面镀钛工艺，其特征在于：所述镀钛工艺为电子束物理气相沉积法，所述方法工艺步骤如下：
(1)将待处理的铁碳合金进行打磨处理，使其表面粗糙度不大于0.25；将打磨后的铁碳合金利用丙酮清洗，烘干；
(2)将铁碳合金置于基板上，基板转速10～50r/min，基板表面温度为490～560℃；工作室的工作压力为0.005～0.5Pa，蒸镀速率4～6微米/min，蒸镀时间5～15min；
(3)向工作室内通入氮气和氢气的混合气体，关闭电子束装置，将基板表面温度为800～960℃，保持工作室内的压力为50～500Pa，保温时间30～360min，其中，所述氮气与氢气的体积比为1:0.5～3。
2.根据权利要求1所述的工艺，其特征在于：所述步骤(3)中，所述氮气与氢气的体积比为1:1。
3.根据权利要求3所述的工艺，其特征在于：所述步骤(2)中，将铁碳合金置于基板上，基板转速25r/min，基板表面温度为520℃；工作室的工作压力为0.005Pa，蒸镀速率5微米/min，蒸镀时间10min
4.根据权利要求3所述的工艺，其特征在于：所述步骤(3)中，向工作室内通入氮气和氢气的混合气体，关闭电子束装置，将基板表面温度为800～960℃，保持工作室内的压力为250～500Pa，保温时间120～360min。
CN201611072853.1A 2016-11-29 2016-11-29 合金表面镀钛工艺 Pending CN106521419A (zh)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108531853A (zh) * 2018-06-01 2018-09-14 南京联塑科技实业有限公司 一种适用于模具表面处理的qpq盐浴处理方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101169048A (zh) * 2006-10-26 2008-04-30 通用电气公司 抗蚀涂料和其制备方法
CN103233219A (zh) * 2013-03-22 2013-08-07 常州大学 一种制备金属TiN陶瓷涂层的工艺方法
CN103409722A (zh) * 2013-07-15 2013-11-27 北京航空航天大学 一种在航空发动机压气机叶片表面制备抗侵蚀涂层的方法
CN103628024A (zh) * 2013-11-15 2014-03-12 桂林电子科技大学 一种在4Cr13不锈钢游标卡尺表面沉积氮化钛薄膜的工艺
CN104862649A (zh) * 2015-04-07 2015-08-26 太原理工大学 一种钛合金表面梯度Ni/TiN复合改性层的制备方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101169048A (zh) * 2006-10-26 2008-04-30 通用电气公司 抗蚀涂料和其制备方法
CN103233219A (zh) * 2013-03-22 2013-08-07 常州大学 一种制备金属TiN陶瓷涂层的工艺方法
CN103409722A (zh) * 2013-07-15 2013-11-27 北京航空航天大学 一种在航空发动机压气机叶片表面制备抗侵蚀涂层的方法
CN103628024A (zh) * 2013-11-15 2014-03-12 桂林电子科技大学 一种在4Cr13不锈钢游标卡尺表面沉积氮化钛薄膜的工艺
CN104862649A (zh) * 2015-04-07 2015-08-26 太原理工大学 一种钛合金表面梯度Ni/TiN复合改性层的制备方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108531853A (zh) * 2018-06-01 2018-09-14 南京联塑科技实业有限公司 一种适用于模具表面处理的qpq盐浴处理方法
CN108531853B (zh) * 2018-06-01 2020-06-05 南京联塑科技实业有限公司 一种适用于模具表面处理的qpq盐浴处理方法

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