CN106500861B - A kind of thermocouple fixing device for installing of Equipment for Heating Processing - Google Patents
A kind of thermocouple fixing device for installing of Equipment for Heating Processing Download PDFInfo
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- CN106500861B CN106500861B CN201610959734.1A CN201610959734A CN106500861B CN 106500861 B CN106500861 B CN 106500861B CN 201610959734 A CN201610959734 A CN 201610959734A CN 106500861 B CN106500861 B CN 106500861B
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- thermocouple
- fixed block
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- casing pipe
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/14—Supports; Fastening devices; Arrangements for mounting thermometers in particular locations
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- General Physics & Mathematics (AREA)
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Abstract
The invention discloses a kind of thermocouple fixing device for installing of Equipment for Heating Processing, comprising: thermocouple fixed block, front and rear sides are inwardly equipped with one to several pairs Thermal couple casing pipe connecting holes and thermocouple connecting hole communicated in opposite directions, and are equipped with the chocking construction for leading to thermocouple connecting hole；Thermocouple fixes bracket, is detachably connected thermocouple fixed block, and fix with Equipment for Heating Processing, and the fixed bracket of thermocouple protrudes from the setting of thermocouple fixed block front end from the bottom surface of thermocouple fixed block or top side location level；Thermal couple casing pipe, Thermal couple casing pipe connecting hole is inserted into one end and thermocouple fixed block is formed and is socketed, and the other end is supported in Equipment for Heating Processing；Thermal couple casing pipe fixes bracket, is detachably set to the fixed support level protruding portion of thermocouple, provides the support to Thermal couple casing pipe.The present invention has structure simple, and light weight is easy to operate, comprehensive advantage at low cost.
Description
Technical field
The present invention relates to semiconductor manufacturing equipment fields, install admittedly more particularly, to a kind of thermocouple of Equipment for Heating Processing
Determine device.
Background technique
Semiconductor heat treatment equipment is the important technological equipment of IC manufacturing, suitable for ic manufacturing process
The techniques such as various oxidations, annealing and film growth.In heat treatment process, need to be inserted into thermocouple between furnace silk, it is right
Furnace silk carries out thermometric, to guarantee technological temperature.Since thermocouple is a kind of fragile material, this just comes very to the installation fixing belt of thermocouple
It is big difficult.If thermocouple can not be effectively fixed, thermocouple is caused to occur to loosen in installation and the subsequent course of work, wave
Phenomenon is easy for that thermocouple is caused to damage, and brings detrimental effect to the measurement of temperature, finally influences entire heat treatment process
Result.
Referring to Fig. 1, Fig. 1 is a kind of traditional thermocouple fixture structure schematic diagram.As shown in Figure 1, the thermocouple is fixed
Device includes thermocouple support plate 1, thermocouple fixed block 3, thermocouple fixinig plate 4, ceramics tongs block 6.Thermocouple support plate 1 is ceramic member,
It is fixed on and is heat-treated on hot standby by screw 10, and adjustable upper and lower position (up and down direction arrow as shown is signified).It is stainless
The thermocouple fixed block 3 of steel is inserted in thermocouple support plate 1, and is fixed on heat by screw 5 together with the thermocouple fixinig plate 4 of stainless steel
On even component fagging 1 (rotation direction that diagram is suitable, counter clockwise direction arrow represents screw 5)；Thermocouple fixed block 3 and thermocouple fixinig plate
4 same adjustable upper and lower positions.The tube-in-tube structure 2 that thermocouple support plate 1 has is used to protect the thermocouple 7 being inserted, in order to avoid
Thermocouple 7 is heat-treated equipment crushing.In 6 sets of the ceramics tongs block protection pipes before the terminal box 8 of 7 cold end of thermocouple, and with heat
It is installed in thermocouple support plate 1 after even 7 bonding；Ceramics tongs block 6 is used cooperatively with thermocouple 7, to determine the insertion depth of thermocouple
(left and right directions arrow as shown is signified).
When device replacement thermocouple 7 fixed using above-mentioned thermocouple, screw 5 is unclamped first, thermocouple fixinig plate 4 is lifted, it will
The related ceramics tongs block 6 of thermocouple 7 is removed from thermocouple support plate 1；Secondly, take new thermocouple 7, ceramics tongs block 6 and binder by
As requested position is bonded；Thermocouple fixinig plate 4 is lifted after bonding, thermocouple 7 is inserted into the tube-in-tube structure 2 of thermocouple support plate 1
In to suitable position；It finally falls thermocouple fixinig plate 4 and tightens screw 5, complete the replacement and fixation of thermocouple 7.
However, the fixed device of above-mentioned thermocouple has the following problems:
1) apparatus structure is complicated, and ceramic member processing difficulties, price increase use cost；
2) it needs to use after bonding between ceramics tongs block and thermocouple, will be caused to execute-in-place when replacing thermocouple
It is difficult；
3) ceramic member and stainless steel part are attached by screw, are restricted the torque of screw, are be easy to cause
The loosening of thermocouple.
In view of the above problems, needing to provide a kind of thermocouple fixing device for installing of new Equipment for Heating Processing.
Summary of the invention
It is an object of the invention to overcome drawbacks described above of the existing technology, a kind of thermocouple peace of Equipment for Heating Processing is provided
Fixed device is filled, structure is simple, and it is easy to operate, and there is lower cost.
To achieve the above object, technical scheme is as follows:
A kind of thermocouple fixing device for installing of Equipment for Heating Processing, comprising:
Thermocouple fixed block, front and rear sides are inwardly equipped with one to several pairs Thermal couple casing pipe connecting holes and thermocouple communicated in opposite directions
Connecting hole, and it is equipped with the chocking construction for leading to thermocouple connecting hole；
Thermocouple fixes bracket, is detachably connected thermocouple fixed block, and fix with Equipment for Heating Processing, the fixed bracket of the thermocouple
The setting of thermocouple fixed block front end is protruded from from the bottom surface of thermocouple fixed block or top side location level；
Thermal couple casing pipe, Thermal couple casing pipe connecting hole is inserted into one end and thermocouple fixed block is formed and is socketed, and the other end is supported in hot place
Manage equipment；
Thermal couple casing pipe fixes bracket, is detachably set to the fixed support level protruding portion of thermocouple, provides the branch to Thermal couple casing pipe
Support；
Wherein, the thermocouple measurement end is inserted into Thermal couple casing pipe by thermocouple connecting hole from rear side of thermocouple fixed block, and by thermocouple
The opening of the casing other end is exposed, and carries out thermometric to furnace silk, meanwhile, by making the terminal box positioned at the thermocouple cold end contradict heat
On rear side of even fixed block, with installation site of the determination thermocouple in thermocouple fixing device for installing, and by chocking construction to heat
Occasionally it is fixed.
Preferably, the left and right sides of the thermocouple fixed block is equipped with installing port up and down, the fixed bracket of the thermocouple
It is correspondingly provided with mounting hole, is fastened by the way that the first screw is passed through mounting hole, installing port and nut, to the thermocouple fixed block
It is attached with the fixed bracket of thermocouple.
Preferably, the installing port is the slot being open towards thermocouple fixed block front side or rear side.
Preferably, the mounting hole is the first screw hole with the first screw fit.
Preferably, by adjusting the relative forward/backward position between the thermocouple fixed block installing port and the first screw, to adjust
Installation site of the thermocouple of whole different length in thermocouple fixing device for installing.
Preferably, the fixed support ring of the Thermal couple casing pipe is arranged around Thermal couple casing pipe, and is spirally connected with the fixed bracket of thermocouple.
Preferably, the support bracket fastened left and right sides of the thermocouple is equipped with mounting plate vertically, and be equipped with by mounting plate
Kidney slot and Equipment for Heating Processing installation are fixed.
Preferably, the chocking construction is equipped with the second screw hole for leading to thermocouple connecting hole, by importing into the second screw hole
Second screw or spring make it withstand thermocouple, thermocouple to be fixed, prevent thermocouple rotation or mobile.
Preferably, the front-rear direction thickness of the thermocouple fixed block is determined by the depth that thermocouple is inserted into.
Preferably, the fixed bracket of the thermocouple protrudes from the distance of thermocouple fixed block front end by the front and back of thermocouple fixed block
It is determined to thickness.
The invention has the following advantages that
1) depth that is correctly inserted into of thermocouple is the depth that thermocouple junction box part is contacted with thermocouple fixed block, makes thermocouple more
It changes very convenient；
2) there is Thermal couple casing pipe, thermocouple can be protected, in order to avoid it is heat-treated equipment crushing；
3) mounting hole on the fixed bracket of thermocouple uses threaded hole, when dismantling thermocouple fixed block, can prevent screw from falling；
4) Thermal couple casing pipe uses the form separated with thermocouple fixed block, and one end is using Equipment for Heating Processing as supporting point, separately
One end is fixed using the fixed bracket of Thermal couple casing pipe, and structure is simple, and handling ease firmly installs, and reduces the production cost；
5) light-weight metal production can be used in the fixed bracket of thermocouple fixed block, thermocouple, avoid previous ceramic member and screw it
Between cooperate when torque deficiency problem；
6) using the fixed thermocouple of the structures such as limit screw or spring, thermocouple rotation or mobile can be prevented, ensure that process warm
The stabilization of degree.
Detailed description of the invention
Fig. 1 is a kind of traditional thermocouple fixture structure schematic diagram；
Fig. 2 is a kind of thermocouple fixing device for installing structural schematic diagram of Equipment for Heating Processing of a preferred embodiment of the present invention；
Fig. 3 is the sectional view of thermocouple fixed block in Fig. 2.
Specific embodiment
With reference to the accompanying drawing, specific embodiments of the present invention will be described in further detail.
It should be noted that in following specific embodiments, when describing embodiments of the invention in detail, in order to clear
Ground indicates structure of the invention in order to illustrate, spy does not draw to the structure in attached drawing according to general proportion, and has carried out part
Amplification, deformation and simplified processing, therefore, should be avoided in this, as limitation of the invention to understand.
In specific embodiment of the invention below, referring to Fig. 2, Fig. 2 is one kind of a preferred embodiment of the present invention
The thermocouple fixing device for installing structural schematic diagram of Equipment for Heating Processing.As shown in Fig. 2, a kind of thermocouple of Equipment for Heating Processing of the invention
Fixing device for installing, comprising: the fixed bracket 28 of thermocouple fixed block 27, thermocouple, Thermal couple casing pipe 20 and the fixed bracket 32 of Thermal couple casing pipe
Several dominant structural moieties.The fixed bracket 28 of thermocouple fixed block 27 and thermocouple is connected to a fixed, and by the fixed bracket of thermocouple and
Equipment for Heating Processing is connected to a fixed, such as the fixed bracket of thermocouple can be mounted on the sidewall of the furnace body of Equipment for Heating Processing；Thermocouple set
Pipe 20 is passed through in thermocouple fixed block 27 from front side, and thermocouple 30 is from rear side insertion thermocouple fixed block 27 and then is inserted into Thermal couple casing pipe
In 20, thermocouple measurement end 33 is exposed from the opening portion of the Thermal couple casing pipe other end, to measure to the furnace silk temperature in furnace body.
Referring to Fig. 3, Fig. 3 is the sectional view of thermocouple fixed block in Fig. 2.As shown in figure 3, thermocouple fixed block 27 is whole to be adopted
With such as rectangular block, and using materials such as the light aluminium of architecture quality, but the present invention is not construed as limiting its shape, material.In thermocouple
The front and rear sides (two sides up and down of diagram) of fixed block 27 to being machined with Thermal couple casing pipe connecting hole 35 inside it and thermocouple connects respectively
Connect hole 37.Thermal couple casing pipe connecting hole 35 and thermocouple connecting hole 37 are oppositely arranged, i.e. the axis of the two is parallel；Also, thermocouple set
Pipe connecting hole 35 and thermocouple connecting hole 37 side before and after the inside of thermocouple fixed block 27 is connected to each other and to form perforation thermocouple fixed block
Through-hole 35 and 37.
It please refers to Fig. 3 and combines refering to Fig. 2.One Thermal couple casing pipe connecting hole 35 is for being passed through a Thermal couple casing pipe 20, and one
A thermocouple connecting hole 37 makes thermocouple 30 and then is inserted into Thermal couple casing pipe 20 for being inserted into a thermocouple 30.In general, Thermal couple casing pipe
The aperture of connecting hole 35 is greater than thermocouple connecting hole 37, and is docked using the mode of being coaxial docking.
Thermal couple casing pipe connecting hole 35 and thermocouple connecting hole 37 can be arranged in pairs one to several right on thermocouple fixed block, such as
2 pairs of diagram, so as to be inserted into the thermocouple of corresponding number.
One end insertion Thermal couple casing pipe connecting hole 35 and thermocouple fixed block 27 of Thermal couple casing pipe 20, which are formed, to be socketed, and the other end can prop up
It supports in Equipment for Heating Processing, such as may be supported on the sidewall of the furnace body of Equipment for Heating Processing, and between furnace silk, to facilitate thermocouple
Measurement end 33 from the opening portion of Thermal couple casing pipe expose carry out thermometric.Ceramic material can be used in Thermal couple casing pipe, for protecting thermocouple
In order to avoid being heat-treated equipment crushing.
Please continue to refer to Fig. 3 and combine refering to Fig. 2.The left and right sides of thermocouple fixed block 27 is equipped with installing port up and down
24, for being attached with the fixed bracket 28 of thermocouple.A plate shaped bottom surface can be used in the fixed bracket 28 of the thermocouple, this is plate shaped
The left and right sides of bottom surface and 24 corresponding position of installing port are equipped with mounting hole (not shown).By by the installing port of thermocouple fixed block 27
24 mounting holes for fixing bracket 28 with thermocouple carry out position alignment, for example, can be by the support bracket fastened plate shaped bottom surface of thermocouple by figure
The mode of showing is placed on the lower section (top that may also placed in thermocouple fixed block) of thermocouple fixed block, and passes through screw (the first screw)
31 sequentially pass through mounting hole, installing port and the nut 29 installed from top from below is fastened, thus by thermocouple fixed block 27
It is connected and fixed with the fixed bracket 28 of thermocouple.The lightweights material such as aluminium can also be used in the fixed bracket of thermocouple.
As a preferred embodiment, the installing port 24 can be used to be opened towards thermocouple fixed block front side or rear side
Mouthful rectangular groove structure, such as diagram towards thermocouple fixed block front openings, can be in this way when removing thermocouple fixed block 27
After unscrewing nut 29, directly thermocouple fixed block 27 is removed from level on the fixed bracket 28 of thermocouple using the opening slot structure 24.
Also, the mounting hole can be processed into the screw hole (the first screw hole) that can cooperate with the first screw 31, rather than through-hole, it can tear open
When unloading thermocouple fixed block 27, prevent the first screw 31 from falling after removing nut 29, in order to avoid smash equipment.
In addition, operation in order to facilitate the installation of, nut 29 can be used knurled nut and be formed, and cooperate with the first screw 31, with
Save the installation tools such as spanner.Torque is little herein, uses knurled nut convenient manual operation.
It is adjustable by adjusting the relative forward/backward position between the thermocouple fixed block installing port 24 and the first screw 31
Installation site of the thermocouple of different length in thermocouple fixing device for installing.
Please refer to Fig. 2.The plate shaped bottom surface of the fixed bracket 28 of the thermocouple is from the bottom surface (or top surface) of thermocouple fixed block 27
Position level protrudes from the setting of thermocouple fixed block front end.On the support bracket fastened protrusion bottom surface of thermocouple, it is located at Thermal couple casing pipe company
The position for connecing hole 35 is equipped with the fixed bracket 32 of Thermal couple casing pipe.The fixed bracket 32 of the Thermal couple casing pipe can be used around thermocouple set
The U-shaped clip that pipe 20 is arranged, and fixed using screw 34 and the plate shaped bottom surface of the fixed bracket 28 of thermocouple.Since Thermal couple casing pipe connects
The depth for connecing hole 35 is limited, and the fixed bracket 32 of Thermal couple casing pipe can be used for when Thermal couple casing pipe 20 is passed through in thermocouple fixed block 27, right
Thermal couple casing pipe is supported and fastens.Thus, under the premise of reaching support and fastening Thermal couple casing pipe purpose, Thermal couple casing pipe is fixed
Any other applicable structure can be used in bracket.
It can be equipped with mounting plate 23 vertically in the left and right sides of the fixed bracket 28 of thermocouple, and a waist can be processed on a mounting board
Shape hole 22 passes through kidney slot 22 using screw 21 and Equipment for Heating Processing installation is fixed.Utilize the adjustable present invention dress of kidney slot 22
Set the height installation site in Equipment for Heating Processing.
Other removablies connection thermocouple fixed block can also be used in the fixed bracket of thermocouple, and fixes with Equipment for Heating Processing.
The invention is not limited thereto.
Please continue to refer to Fig. 3 and combine refering to Fig. 2.Thermocouple fixed block 27 is equipped with the stop knot for leading to thermocouple connecting hole 37
Structure 26.For example, the chocking construction 26 can lead to the spiral shell of thermocouple connecting hole 37 by processing in the upper surface of thermocouple fixed block 27
Hole (the second screw hole) 36, and by importing limit screw (the second screw) 25 or retaining spring into the second screw hole 36, make its top
The thermocouple 30 being firmly inserted into thermocouple connecting hole 37 can effectively prevent thermocouple rotation or mobile so that thermocouple be fixed.It is reaching
Under the premise of holding out against thermocouple purpose, any other applicable structure is can also be used in the chocking construction.
The materials such as stainless steel can be used in the fasteners such as above-mentioned various screws, nut, spring.
The front-rear direction thickness of the thermocouple fixed block 27 is determined by the depth that thermocouple 30 is inserted into；The fixed bracket of the thermocouple
28 distance (the i.e. fixed support plate shape bottom surface of the thermocouple width that protrude from thermocouple fixed block front end for protruding from thermocouple fixed block front end
Degree) it is determined by the front-rear direction thickness of thermocouple fixed block 27.After thermocouple 30 is inserted into thermocouple connecting hole 37, the terminal box of cold end
When (i.e. its tail portion metal part, please refer to the terminal box 8 of Fig. 1) and thermocouple fixed block 27 contact, as thermocouple is correctly inserted into
The installation site of depth, i.e. thermocouple in thermocouple fixing device for installing.
Above-mentioned apparatus of the present invention is in use, first install thermocouple fixed block 27 and the fixed bracket 28 of thermocouple, by thermocouple
20 one end of casing is passed through in the Thermal couple casing pipe connecting hole 35 of thermocouple fixed block, and is carried out using the fixed fastening of bracket 32 of Thermal couple casing pipe
Support；Then, the fixed bracket 28 of thermocouple is installed with Equipment for Heating Processing, and 20 other end of Thermal couple casing pipe is made to be supported on hot place
Manage equipment between furnace silk position；Then, thermocouple measurement end is inserted into thermocouple from the thermocouple connecting hole 37 of thermocouple fixed block
In casing 20, and exposed by the opening of the Thermal couple casing pipe other end, thermometric can be carried out to furnace silk.
When replacing thermocouple, limit screw 25 is spun up first, extracts thermocouple；New thermocouple is then taken out, it is solid to be inserted into thermocouple
Determine in block 27, the correct depth of insertion is depth when thermocouple metal part is contacted with thermocouple fixed block, and screws stop spiral shell
25 pairs of thermocouples are followed closely to be fixed.
In conclusion the thermocouple fixing device for installing of Equipment for Heating Processing of the invention has structure simple, and light weight, operation
Convenient, at low cost comprehensive advantage, and there is following remarkable advantage:
1) depth that is correctly inserted into of thermocouple is the depth that thermocouple junction box part is contacted with thermocouple fixed block, makes thermocouple more
It changes very convenient；
2) there is Thermal couple casing pipe, thermocouple can be protected, in order to avoid it is heat-treated equipment crushing；
3) mounting hole on the fixed bracket of thermocouple uses threaded hole, when dismantling thermocouple fixed block, can prevent screw from falling；
4) Thermal couple casing pipe uses the form separated with thermocouple fixed block, and one end is using Equipment for Heating Processing as supporting point, separately
One end is fixed using the fixed bracket of Thermal couple casing pipe, and structure is simple, and handling ease firmly installs, and reduces the production cost；
5) light-weight metal production can be used in the fixed bracket of thermocouple fixed block, thermocouple, avoid previous ceramic member and screw it
Between cooperate when torque deficiency problem；
6) using the fixed thermocouple of the structures such as limit screw or spring, thermocouple rotation or mobile can be prevented, ensure that process warm
The stabilization of degree.
Above-described to be merely a preferred embodiment of the present invention, the patent that the embodiment is not intended to limit the invention is protected
Range is protected, therefore all with the variation of equivalent structure made by specification and accompanying drawing content of the invention, similarly should be included in
In protection scope of the present invention.
Claims (10)
1. a kind of thermocouple fixing device for installing of Equipment for Heating Processing characterized by comprising
Thermocouple fixed block, front and rear sides are inwardly equipped with one to several pairs Thermal couple casing pipe connecting holes communicated in opposite directions and connect with thermocouple
Hole, and it is equipped with the chocking construction for leading to thermocouple connecting hole；
Thermocouple fixes bracket, is detachably connected thermocouple fixed block, and fix with Equipment for Heating Processing, and the thermocouple fixes bracket from heat
The bottom surface of even fixed block or top side location level protrude from the setting of thermocouple fixed block front end；
Thermal couple casing pipe, Thermal couple casing pipe connecting hole is inserted into one end and thermocouple fixed block is formed and is socketed, and the other end is supported in heat treatment and sets
It is standby；
Thermal couple casing pipe fixes bracket, is detachably set to the fixed support level protruding portion of thermocouple, provides the support to Thermal couple casing pipe；
Wherein, the thermocouple measurement end is inserted into Thermal couple casing pipe by thermocouple connecting hole from rear side of thermocouple fixed block, and by Thermal couple casing pipe
The opening of the other end is exposed, and carries out thermometric to furnace silk, meanwhile, it is solid by making the terminal box positioned at the thermocouple cold end contradict thermocouple
Determine on rear side of block, with installation site of the determination thermocouple in thermocouple fixing device for installing, and by chocking construction to thermocouple into
Row is fixed.
2. the thermocouple fixing device for installing of Equipment for Heating Processing according to claim 1, which is characterized in that the thermocouple is fixed
The left and right sides of block is equipped with installing port up and down, and the fixed bracket of the thermocouple is correspondingly provided with mounting hole, by by the first spiral shell
Nail is fastened across mounting hole, installing port and nut, is attached to the thermocouple fixed block and the fixed bracket of thermocouple.
3. the thermocouple fixing device for installing of Equipment for Heating Processing according to claim 2, which is characterized in that the installing port is
The slot being open towards thermocouple fixed block front side or rear side.
4. the thermocouple fixing device for installing of Equipment for Heating Processing according to claim 2, which is characterized in that the mounting hole is
With the first screw hole of the first screw fit.
5. the thermocouple fixing device for installing of Equipment for Heating Processing according to claim 2 or 3, which is characterized in that pass through adjusting
Relative forward/backward position between the thermocouple fixed block installing port and the first screw is pacified with adjusting the thermocouple of different length in thermocouple
Fill the installation site in fixed device.
6. the thermocouple fixing device for installing of Equipment for Heating Processing according to claim 1, which is characterized in that the Thermal couple casing pipe
Fixed support ring is arranged around Thermal couple casing pipe, and is spirally connected with the fixed bracket of thermocouple.
7. according to claim 1, the thermocouple fixing device for installing of Equipment for Heating Processing described in 2 or 6, which is characterized in that the heat
The even support bracket fastened left and right sides is equipped with mounting plate vertically, and the kidney slot and Equipment for Heating Processing that are equipped with by mounting plate are installed
It is fixed.
8. the thermocouple fixing device for installing of Equipment for Heating Processing according to claim 1, which is characterized in that the chocking construction
Equipped with the second screw hole for leading to thermocouple connecting hole, it is set to withstand thermocouple by importing the second screw or spring into the second screw hole,
Thermocouple to be fixed, thermocouple rotation or mobile is prevented.
9. the thermocouple fixing device for installing of Equipment for Heating Processing according to claim 1, which is characterized in that the thermocouple is fixed
The front-rear direction thickness of block is determined by the depth that thermocouple is inserted into.
10. the thermocouple fixing device for installing of Equipment for Heating Processing according to claim 9, which is characterized in that the thermocouple is solid
The distance that fixed rack protrudes from thermocouple fixed block front end is determined by the front-rear direction thickness of thermocouple fixed block.
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| CN201610959734.1A CN106500861B (en) | 2016-10-28 | 2016-10-28 | A kind of thermocouple fixing device for installing of Equipment for Heating Processing |
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| CN201610959734.1A CN106500861B (en) | 2016-10-28 | 2016-10-28 | A kind of thermocouple fixing device for installing of Equipment for Heating Processing |
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| CN108131960B (en) * | 2017-12-15 | 2020-03-17 | 成都光明光电股份有限公司 | Combined temperature measuring frame and heat treatment furnace temperature measuring method |
| CN109175277A (en) * | 2018-09-13 | 2019-01-11 | 浙江万丰奥威汽轮股份有限公司 | A kind of the installation of TC technology |
| CN113909740A (en) * | 2021-09-28 | 2022-01-11 | 晶澳（邢台）太阳能有限公司 | Stitch welding machine welding head temperature measuring device, stitch welding machine and using method of stitch welding machine |
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| CN201440094U (en) * | 2009-06-30 | 2010-04-21 | 北京七星华创电子股份有限公司 | Fixing device of self-locking thermoelectric couple |
| CN201748978U (en) * | 2010-09-03 | 2011-02-16 | 中国国际海运集装箱(集团)股份有限公司 | Fixing device for thermocouple |
| CN102944121A (en) * | 2012-10-23 | 2013-02-27 | 北京七星华创电子股份有限公司 | Thermocouple-installing fixing system |
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