CN102944121A - Thermocouple-installing fixing system - Google Patents

Thermocouple-installing fixing system Download PDF

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Publication number
CN102944121A
CN102944121A CN201210406084XA CN201210406084A CN102944121A CN 102944121 A CN102944121 A CN 102944121A CN 201210406084X A CN201210406084X A CN 201210406084XA CN 201210406084 A CN201210406084 A CN 201210406084A CN 102944121 A CN102944121 A CN 102944121A
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China
Prior art keywords
thermocouple
installs
pad
sealing
mounting groove
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CN201210406084XA
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CN102944121B (en
Inventor
董金卫
孙少东
赵燕平
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North China Science And Technology Group Ltd By Share Ltd
Beijing Naura Microelectronics Equipment Co Ltd
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Beijing Sevenstar Electronics Co Ltd
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Abstract

The invention relates to the technical field of thermocouples and discloses a thermocouple-installing fixing system. The thermocouple-installing fixing system comprises a thermocouple and a thermocouple fixing unit, wherein the thermocouple is vertically arranged inside a process pipeline interlayer of a heat treatment furnace; the tail end of the thermocouple stretches out of the side wall of a process chamber; the thermocouple fixing unit is positioned on the outer part of the heat treatment furnace; the thermocouple fixing unit comprises an installing rack and a thermocouple pressing block; the installing rack is installed on supporting equipment; and the tail end of the thermocouple is fixed between the installing rack and the thermocouple pressing block. The end part of a transverse section of the thermocouple is fixed between the installing rack and the thermocouple pressing block, so that the thermocouple is firmly installed, and looseness and swing of the thermocouple in an installing or working process can be avoided. Furthermore, the thermocouple-installing fixing system further comprises a sealing connector; the sealing connector is connected with the side wall of the process chamber; and the tail end of the thermocouple is led out of the process chamber through the sealing connector, so that the sealing performance at a junction of the thermocouple and the process chamber is improved.

Description

A kind of thermocouple installs and fixes system
Technical field
The present invention relates to the thermocouple technical field, particularly relate to a kind of thermocouple and install and fix system.
Background technology
In existing vertical thermal-processing device, use long thermocouple, because thermocouple is a kind of fragile material, this brings very large difficulty for installing and fixing of thermocouple, can't be effectively fixing thermocouple, cause thermocouple install and the follow-up course of work in the phenomenon of becoming flexible, waving easily, easily cause the thermocouple damage, and bring adverse influence for the measurement of temperature, have influence at last the result of whole Technology for Heating Processing; Especially in low pressure process equipment, require to reach certain vacuum in the processing chamber, requirement to the sealing of processing chamber is also just higher, and such thermocouple is indispensable in technique, and the mounting means of thermocouple can bring larger impact to the sealing of processing chamber.Sealing bad meeting increases the difficulty that vacuumizes, and also can infiltrate environmental gas simultaneously, and technique is brought pollution.
Summary of the invention
The technical problem that (one) will solve
The technical problem to be solved in the present invention is how to avoid thermocouple that loosening phenomenon occurs in installation or the course of work, and effectively reliably mounting means is provided under the prerequisite of not damaging thermocouple, and reaches the effect of sealing.
(2) technical scheme
In order to solve the problems of the technologies described above, a kind of thermocouple provided by the invention installs and fixes system, described fixed system comprises thermocouple and thermocouple fixed cell, described thermocouple vertically is arranged in the process duct interlayer of heat treatment furnace body, its end is stretched out by the processing chamber sidewall, described thermocouple fixed cell is positioned at the outside of heat treatment furnace body, and described thermocouple fixed cell comprises installing rack and thermocouple briquetting; Described installing rack is installed on the fastening; The thermocouple end is fixed between described installing rack and the thermocouple briquetting.
Wherein, be provided with the first mounting groove between described thermocouple briquetting and the installing rack, described thermocouple end is fixed in described the first mounting groove.
Wherein, be provided with pad in described the first mounting groove, be provided with the second mounting groove that is complementary with described thermocouple end in the described pad, described thermocouple end is fixed in described the second mounting groove.
Wherein, described pad comprises the first pad and the second pad, described the first pad and the second pad lay respectively at the both sides of described thermocouple end, be respectively equipped with the first groove and the second groove on described the first pad and the second pad, described the first groove and the second groove have consisted of described the second mounting groove.
Wherein, the height of described pad is less than the height of described the first mounting groove, and described pad has in described the first mounting groove can up and down space.
Wherein, described the first mounting groove is located on the described thermocouple briquetting.
Wherein, the cross section of described thermocouple end is polygon.
Wherein, described installing rack is provided with horizontal installing hole and vertical installing hole, and described vertical installing hole is used for being connected with the thermocouple briquetting, and described horizontal installing hole is used for being connected with fastening.
Wherein, described horizontal installing hole is slotted hole.
Wherein, described vertical installing hole is slotted hole.
Wherein, described fixed system also comprises seal nipple, and described seal nipple is connected with the processing chamber sidewall, and described thermocouple end is drawn from processing chamber by described seal nipple.
Wherein, described seal nipple comprises sealing bolt, cutting ferrule, sealing ring and sealing nut, described sealing bolt, cutting ferrule and sealing nut have the coaxial through-hole that is complementary with described thermocouple, and described thermocouple passes the coaxial through-hole of described sealing bolt, cutting ferrule and sealing nut successively; One end of described sealing bolt is connected with the processing chamber sidewall, and the other end is connected with described sealing nut, and described sealing nut is positioned at the outside of processing chamber sidewall; One end of described cutting ferrule is between described sealing bolt and thermocouple, and the other end is between described sealing nut and thermocouple, and the end of described cutting ferrule and the junction of described sealing bolt are provided with sealing ring.
Wherein, described sealing bolt and processing chamber sidewall are tightly connected.
Wherein, described being tightly connected as being welded to connect.
Wherein, the junction of described thermocouple and described seal nipple is revolving body.
Wherein, described revolving body is cylinder.
(3) beneficial effect
A kind of thermocouple that technique scheme provides installs and fixes system, the crosspiece end of thermocouple is fixed between installing rack and the thermocouple briquetting, this is simple in structure, cost is lower, so that thermocouple is installed firmly, can avoid thermocouple that phenomenon loosening and that wave occurs in installation or the course of work, and then can avoid the damage of thermocouple.Further, also comprise seal nipple, seal nipple is connected with the processing chamber sidewall, the thermocouple end is drawn from processing chamber by the sealing joint, improved the sealing of thermocouple and vacuum generation chamber junction, can avoid impurity in the external environment condition to enter and destroy its vacuum system in the vacuum generation chamber.
Description of drawings
Fig. 1 is the structural representation that a kind of thermocouple of the present invention installs and fixes system;
Fig. 2 is the partial enlarged drawing of Fig. 1;
Fig. 3 is the structural representation of fixed cell among the present invention;
Fig. 4 is the structural representation of installing rack among the present invention;
Fig. 5 is the structural representation of seal nipple of the present invention.
Wherein, 1, heat treatment furnace body; 2, processing chamber; 3, thermocouple; 31, thermocouple is terminal; 4, thermocouple fixed cell; 41, installing rack; 411, vertical installing hole; 412, horizontal installing hole; 42, thermocouple briquetting; 43, the first mounting groove; 44, the first pad; 45, the second pad; 46, the second mounting groove; 5, securing member; 6, seal nipple; 61, sealing bolt; 62, cutting ferrule; 63, sealing nut; 64, sealing ring.
The specific embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples are used for explanation the present invention, but are not used for limiting the scope of the invention.
As depicted in figs. 1 and 2, a kind of thermocouple of the present invention installs and fixes system, this system of installing and fixing comprises thermocouple 3 and thermocouple fixed cell 4, thermocouple 3 vertically is located in the process duct interlayer of heat treatment furnace body 1, its end is stretched out by the processing chamber sidewall, this thermocouple fixed cell 4 is positioned at the outside of heat treatment furnace body, and it comprises installing rack 41 and thermocouple briquetting 42; Installing rack 41 is installed on the fastening; Thermocouple end 31 is fixed between thermocouple briquetting 42 and the installing rack 41.Above-mentioned fastening can be the auxiliary equipment for the heat-treatment furnace body running.
Such as Fig. 3, be provided with the first mounting groove 43 between thermocouple briquetting 42 and the installing rack 41, thermocouple end 31 is fixedly mounted in this first mounting groove 43.The present invention adopts installing rack 41 and thermocouple briquetting 42 that thermocouple 3 is fixed on the first mounting groove 43, it is simple in structure, cost is lower, the cross section of this thermocouple end 31 can be set to polygon and installs and fixes firmly to guarantee thermocouple 3 in the present embodiment, limited thus the rotation of thermocouple 3, so that thermocouple 3 is installed firmly, can avoid thermocouple 3 that phenomenon loosening and that wave occurs in installation or the course of work, and then can avoid the damage of thermocouple 3.Preferably, the first mounting groove 43 is located on the thermocouple briquetting 42, and this thermocouple briquetting 42 can be several fonts.
Also be provided with pad in the first mounting groove 43, be provided with the second mounting groove 47 that is complementary with thermocouple end 31 in this pad, thermocouple end 31 is fixed in this second mounting groove 46.Pad can improve the pressuring action to thermocouple 3 on the one hand, and the thermocouple end 31 applicable to different size installs and fixes on the other hand.The height of pad can allow pad interior up and down at the first mounting groove 43 less than the height of the first mounting groove 43, with the requirement that installs and fixes of the thermocouple 3 that is applicable to differing heights in the certain limit.Pad comprises the first pad 44 and the second pad 45, this first pad 44 and the second pad 45 lay respectively at the both sides of thermocouple end 31, be respectively equipped with the first groove and the second groove on the first pad 44 and the second pad 45, the first groove and the second groove have consisted of the second above-mentioned mounting groove.Preferably, the first pad 44 of present embodiment and the second pad 45 can be made as respectively " recessed " font.
Preferably, installing rack 41 is " L " shape, and its perpendicular section is connected with thermocouple briquetting 42, and its crosspiece is connected with fastening.For conveniently assemble and disassemble, can adopt respectively securing member to be connected between installing rack 41 and thermocouple briquetting 42 and the fastening.Such as Fig. 4, further, installing rack 41 is provided with vertical installing hole 411 and horizontal installing hole 412, and vertically installing hole 411 is connected with thermocouple briquetting 42, and horizontal installing hole 412 is used for being connected with fastening.In order to satisfy the flexibility of thermocouple 3 installation sites, to eliminate the impact of process and assemble error, installing rack 41 can be set to slotted hole with the vertical installing hole 411 of thermocouple briquetting 42 junctions, so that the position of thermocouple briquetting 42 on the height of installing rack 41 can arrange flexibly, install and fix variation on the height to adapt to thermocouple 3; Further, in order to satisfy the flexibility of thermocouple 3 installation sites, to eliminate the impact of process and assemble error, installing rack 41 can be set to slotted hole with the horizontal installing hole 412 of fastening junction, and the installation site of installing rack 41 on fastening can arrange within the specific limits flexibly.
Such as Fig. 5, in order to improve the sealing of thermocouple 3 and processing chamber junction, to avoid impurity in the external environment condition to enter in the processing chamber and destroy its vacuum system, the system that installs and fixes of present embodiment also comprises seal nipple 6, sealing joint 6 is connected with processing chamber 2 sidewalls, and draw from processing chamber 2 by the sealing joint thermocouple end 31.Thermocouple 3 is rotary structure with the junction of seal nipple 6 in the present embodiment, preferably is made as cylinder.Sealing joint 6 comprises sealing bolt 61, cutting ferrule 62, sealing ring 64 and sealing nut 63, sealing bolt 61, cutting ferrule 62 and sealing nut 63 have the coaxial through-hole that is complementary with thermocouple 3, and thermocouple 3 passes the coaxial through-hole of described sealing bolt 61, cutting ferrule 62 and sealing nut 63 successively; One end of sealing bolt 61 is connected with processing chamber 2 sidewalls, and the other end is connected with sealing nut 63.Wherein, sealing bolt 61 is tightly connected with processing chamber 2 sidewalls, and the sealing connection can be and is welded to connect.Sealing nut 63 is positioned at the outside of processing chamber 2 sidewalls.One end of cutting ferrule 62 is between sealing bolt 61 and thermocouple 3, the one end is between sealing nut 63 and thermocouple 3, in order further to guarantee the sealing effectiveness between cutting ferrule 62 and the sealing bolt 61, the junction of the end of cutting ferrule 62 and sealing bolt 61 is provided with sealing ring 64.Sealing in order to ensure being connected between the sidewall of sealing bolt 61 and processing chamber and the thermocouple 3 adopts between the sidewall of sealing bolt 61 and processing chamber to be welded to connect.When tightening sealing nut 63, it is close to sealing bolt 61 that sealing nut 63 promotes cutting ferrules 62, and then crush seal circle 64, and sealing ring 64 week that deformation also are close to thermocouple 3 occurs upwards, thereby so that processing chamber and external environment thoroughly keep apart.Sealing ring 64 has limited the motion of thermocouple 3 on axially, avoids thermocouple 3 plaies, and so far, the free degree of thermocouple 3 has all obtained restriction to a certain extent, for the installation steadiness of thermocouple 3 provides another guarantee.
The thermocouple process of installing and fixing that a kind of thermocouple that technique scheme provides installs and fixes system is: at first respectively sealing bolt 61, sealing ring 64, cutting ferrule 62 and sealing nut 63 are inserted in respectively the end that thermocouple 3 is positioned at the processing chamber outside, one end of sealing bolt 61 is welded on the processing chamber sidewall, and fastening nut 63 is tightened in cutting ferrule 62 and sealing ring 64 other end of sealing bolt 61; Then thermocouple end 31 is installed in the first mounting groove 43 between installing rack 41 and the thermocouple briquetting 42, put into simultaneously the first pad 44 and the second pad 45 in the both sides of thermocouple end 31, according to the size of thermocouple end 31 with highly regulate the position of the first pad 44 and the second pad 45, regulate simultaneously the installation site of suitable installing rack 41 and thermocouple briquetting 42 by vertical installing hole 411, adopt at last securing member 5 that installing rack 41 and thermocouple briquetting 42 is fastening so that thermocouple 3 is installed firm, can avoid thermocouple 3 that phenomenon loosening and that wave occurs in installation or the course of work, and then can avoid the damage of thermocouple 3.
The above only is preferred embodiment of the present invention; should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the technology of the present invention principle; can also make some improvement and replacement, these improvement and replacement also should be considered as protection scope of the present invention.

Claims (16)

1. a thermocouple installs and fixes system, it is characterized in that, described fixed system comprises thermocouple and thermocouple fixed cell, described thermocouple vertically is arranged in the process duct interlayer of heat treatment furnace body, its end is stretched out by the processing chamber sidewall, described thermocouple fixed cell is positioned at the outside of heat treatment furnace body, and described thermocouple fixed cell comprises installing rack and thermocouple briquetting; Described installing rack is installed on the fastening; The thermocouple end is fixed between described installing rack and the thermocouple briquetting.
2. thermocouple as claimed in claim 1 installs and fixes system, it is characterized in that, is provided with the first mounting groove between described thermocouple briquetting and the installing rack, and described thermocouple end is fixed in described the first mounting groove.
3. thermocouple as claimed in claim 2 installs and fixes system, it is characterized in that, is provided with pad in described the first mounting groove, is provided with the second mounting groove that is complementary with described thermocouple end in the described pad, and described thermocouple end is fixed in described the second mounting groove.
4. thermocouple as claimed in claim 3 installs and fixes system, it is characterized in that, described pad comprises the first pad and the second pad, described the first pad and the second pad lay respectively at the both sides of described thermocouple end, be respectively equipped with the first groove and the second groove on described the first pad and the second pad, described the first groove and the second groove have consisted of described the second mounting groove.
5. thermocouple as claimed in claim 3 installs and fixes system, it is characterized in that, the height of described pad is less than the height of described the first mounting groove, and described pad has in described the first mounting groove can up and down space.
6. thermocouple as claimed in claim 2 installs and fixes system, it is characterized in that, described the first mounting groove is located on the described thermocouple briquetting.
7. thermocouple as claimed in claim 1 installs and fixes system, it is characterized in that, the cross section of described thermocouple end is polygon.
8. thermocouple as claimed in claim 1 installs and fixes system, it is characterized in that, described installing rack is provided with horizontal installing hole and vertical installing hole, and described vertical installing hole is used for being connected with the thermocouple briquetting, and described horizontal installing hole is used for being connected with fastening.
9. thermocouple as claimed in claim 8 installs and fixes system, it is characterized in that, described horizontal installing hole is slotted hole.
10. thermocouple as claimed in claim 8 installs and fixes system, it is characterized in that, described vertical installing hole is slotted hole.
11. thermocouple as claimed in claim 1 installs and fixes system, it is characterized in that, described fixed system also comprises seal nipple, and described seal nipple is connected with the processing chamber sidewall, and described thermocouple end is drawn from processing chamber by described seal nipple.
12. thermocouple as claimed in claim 11 installs and fixes system, it is characterized in that, described seal nipple comprises sealing bolt, cutting ferrule, sealing ring and sealing nut, described sealing bolt, cutting ferrule and sealing nut have the coaxial through-hole that is complementary with described thermocouple, and described thermocouple passes the coaxial through-hole of described sealing bolt, cutting ferrule and sealing nut successively; One end of described sealing bolt is connected with the processing chamber sidewall, and the other end is connected with described sealing nut, and described sealing nut is positioned at the outside of processing chamber sidewall; One end of described cutting ferrule is between described sealing bolt and thermocouple, and the other end is between described sealing nut and thermocouple, and the end of described cutting ferrule and the junction of described sealing bolt are provided with sealing ring.
13. thermocouple as claimed in claim 12 installs and fixes system, it is characterized in that, described sealing bolt and processing chamber sidewall are tightly connected.
14. thermocouple as claimed in claim 13 installs and fixes system, it is characterized in that, described being tightly connected as being welded to connect.
15. thermocouple as claimed in claim 11 installs and fixes system, it is characterized in that, the junction of described thermocouple and described seal nipple is revolving body.
16. thermocouple as claimed in claim 15 installs and fixes system, it is characterized in that, described revolving body is cylinder.
CN201210406084.XA 2012-10-23 2012-10-23 Thermocouple-installing fixing system Active CN102944121B (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105115610A (en) * 2015-08-06 2015-12-02 中家院(北京)检测认证有限公司 Thermocouple double support device suitable for refrigeration equipment performance test
CN105758207A (en) * 2016-03-18 2016-07-13 沈阳飞机工业(集团)有限公司 Combined heat treatment furnace temperature measuring rack and application method
CN106500861A (en) * 2016-10-28 2017-03-15 北京七星华创电子股份有限公司 A kind of thermocouple fixing device for installing of Equipment for Heating Processing

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Publication number Priority date Publication date Assignee Title
US4043200A (en) * 1974-03-04 1977-08-23 Thermo-Couple Products Company, Inc. Surface thermocouple
JPS60103828U (en) * 1983-12-21 1985-07-15 住友電気工業株式会社 Electric furnace for semiconductors
CN201302490Y (en) * 2008-08-15 2009-09-02 中芯国际集成电路制造(上海)有限公司 Thermocouple thermometer
CN201697719U (en) * 2010-04-27 2011-01-05 新疆三叶管道技术有限责任公司 Production halt-free temperature detecting sleeve
CN201748978U (en) * 2010-09-03 2011-02-16 中国国际海运集装箱(集团)股份有限公司 Fixing device for thermocouple
CN201876322U (en) * 2010-10-22 2011-06-22 成都发动机(集团)有限公司 External sealing device of armoured thermocouple for vacuum furnace
CN202915740U (en) * 2012-10-23 2013-05-01 北京七星华创电子股份有限公司 Thermal couple installation fixing system

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4043200A (en) * 1974-03-04 1977-08-23 Thermo-Couple Products Company, Inc. Surface thermocouple
JPS60103828U (en) * 1983-12-21 1985-07-15 住友電気工業株式会社 Electric furnace for semiconductors
CN201302490Y (en) * 2008-08-15 2009-09-02 中芯国际集成电路制造(上海)有限公司 Thermocouple thermometer
CN201697719U (en) * 2010-04-27 2011-01-05 新疆三叶管道技术有限责任公司 Production halt-free temperature detecting sleeve
CN201748978U (en) * 2010-09-03 2011-02-16 中国国际海运集装箱(集团)股份有限公司 Fixing device for thermocouple
CN201876322U (en) * 2010-10-22 2011-06-22 成都发动机(集团)有限公司 External sealing device of armoured thermocouple for vacuum furnace
CN202915740U (en) * 2012-10-23 2013-05-01 北京七星华创电子股份有限公司 Thermal couple installation fixing system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105115610A (en) * 2015-08-06 2015-12-02 中家院(北京)检测认证有限公司 Thermocouple double support device suitable for refrigeration equipment performance test
CN105758207A (en) * 2016-03-18 2016-07-13 沈阳飞机工业(集团)有限公司 Combined heat treatment furnace temperature measuring rack and application method
CN106500861A (en) * 2016-10-28 2017-03-15 北京七星华创电子股份有限公司 A kind of thermocouple fixing device for installing of Equipment for Heating Processing
CN106500861B (en) * 2016-10-28 2019-05-14 北京北方华创微电子装备有限公司 A kind of thermocouple fixing device for installing of Equipment for Heating Processing

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Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District

Patentee after: North China Science and technology group Limited by Share Ltd.

Address before: 100015 Jiuxianqiao Chaoyang District, East Beijing Road, building M2, floor 1, No. 2

Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd.

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Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd.

Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District

Patentee before: North China Science and technology group Limited by Share Ltd.