JPS60103828U - Electric furnace for semiconductors - Google Patents
Electric furnace for semiconductorsInfo
- Publication number
- JPS60103828U JPS60103828U JP19751283U JP19751283U JPS60103828U JP S60103828 U JPS60103828 U JP S60103828U JP 19751283 U JP19751283 U JP 19751283U JP 19751283 U JP19751283 U JP 19751283U JP S60103828 U JPS60103828 U JP S60103828U
- Authority
- JP
- Japan
- Prior art keywords
- thermocouple
- electric furnace
- temperature
- furnace
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
- Control Of Resistance Heating (AREA)
- Furnace Details (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来より広く用いられている液相エピタキシャ
ル炉の上面より見た断面構造を示す図である。第２図は
第１図の中央部で、炉の中心軸に対して垂直な断面の構
造を示す図である。第３゛図は本発明の一実施例を示す
第１図の中央部での炉の中心軸に対して垂直な断面の構
造を示す図、第４図は本発明の別の一実施例を示す第１
図の中央部での炉の中心軸に対して垂直な断面の構造を
示す図である。
１・・・反応管、２・・・液相成長用ボート、３・・・
操作棒、４・・・発熱体、５・・・炉の本体、６・・・
支持台、７・・・第１の取付金具、８・・・第２の取付
金具、９・・・ネジ、１０・・・熱電対の温度検出部、
１１・・・熱電対の第１の素線、１２・・・熱電対の第
２の素線、１３・・・絶縁管、１４・・・熱電対、１５
・・・第１の位置表示、１６・・・第２の位置表示、２
０・・・スピンドル、２１・・・スリーブ、２２・・・
外筒、２３・・・マイクロメータ、２４・・・固定用金
具、２５・・・固定用金具。FIG. 1 is a diagram showing the cross-sectional structure of a conventionally widely used liquid phase epitaxial furnace viewed from the top. FIG. 2 is a diagram showing the structure of the central part of FIG. 1 in a cross section perpendicular to the central axis of the furnace. Fig. 3 is a view showing a cross-sectional structure perpendicular to the central axis of the furnace at the center of Fig. 1, showing one embodiment of the present invention, and Fig. 4 is a diagram showing another embodiment of the present invention. 1st to show
It is a figure which shows the structure of the cross section perpendicular|vertical to the central axis of a furnace in the center part of a figure. 1... Reaction tube, 2... Boat for liquid phase growth, 3...
Operation rod, 4... Heating element, 5... Main body of the furnace, 6...
Support stand, 7... First mounting bracket, 8... Second mounting bracket, 9... Screw, 10... Temperature detection part of thermocouple,
DESCRIPTION OF SYMBOLS 11... First strand of thermocouple, 12... Second strand of thermocouple, 13... Insulating tube, 14... Thermocouple, 15
...First position display, 16...Second position display, 2
0...Spindle, 21...Sleeve, 22...
Outer cylinder, 23...Micrometer, 24...Fixing metal fittings, 25...Fixing metal fittings.
Claims (2)
出用の熱電対において、熱電対絶縁管上の外部より容易
に観察しうる部分のしよも熱電対の温度検出部から一定
の距離にある位置に第１の位置表示があり、さらに前記
熱電対を保持するために炉の本体に固着された支持台上
に温度検出用熱電対を保持すべき位置を表示するための
第２の位置表示があり、上記２種類の表示を整合させる
事によって、温度検出用熱電対の温度検出部の位置を常
に一定に保つことを特徴とする半導体用電気炉。(1) In a thermocouple for temperature detection used to control the temperature inside an electric furnace, a constant temperature is detected from the temperature detection part of the thermocouple at the edge of the thermocouple insulating tube, which can be easily observed from the outside. A first position indicator is provided at a position at a distance, and a second position indicator is provided to indicate the position at which the temperature sensing thermocouple should be held on a support base fixed to the body of the furnace for holding the thermocouple. An electric furnace for semiconductors, characterized in that the position of the temperature detection part of the temperature detection thermocouple is always kept constant by aligning the two types of display.
固定する際に支持台上に固着された微動装置上に検出用
熱電対を固定し、前記微動装置により前記第１の位置表
示と前記第２の位置表示を整合させる事を特徴とする実
用新案登録請求の範囲第１項の半導体用電気炉。(2) When fixing the detection thermocouple on the support stand fixed to the main body of the furnace, fix the detection thermocouple on the fine movement device fixed on the support stand, and use the fine movement device to move the detection thermocouple to the first The electric furnace for semiconductors according to claim 1 of the utility model registration, characterized in that the position indication and the second position indication are matched.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19751283U JPS60103828U (en) | 1983-12-21 | 1983-12-21 | Electric furnace for semiconductors |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19751283U JPS60103828U (en) | 1983-12-21 | 1983-12-21 | Electric furnace for semiconductors |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60103828U true JPS60103828U (en) | 1985-07-15 |
Family
ID=30422910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19751283U Pending JPS60103828U (en) | 1983-12-21 | 1983-12-21 | Electric furnace for semiconductors |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60103828U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102944121A (en) * | 2012-10-23 | 2013-02-27 | 北京七星华创电子股份有限公司 | Thermocouple-installing fixing system |
-
1983
- 1983-12-21 JP JP19751283U patent/JPS60103828U/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102944121A (en) * | 2012-10-23 | 2013-02-27 | 北京七星华创电子股份有限公司 | Thermocouple-installing fixing system |
| CN102944121B (en) * | 2012-10-23 | 2015-01-21 | 北京七星华创电子股份有限公司 | Thermocouple-installing fixing system |
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