CN106442564B - The detection device and detection method of heavy caliber super-smooth surface defect - Google Patents
The detection device and detection method of heavy caliber super-smooth surface defect Download PDFInfo
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- CN106442564B CN106442564B CN201610902339.XA CN201610902339A CN106442564B CN 106442564 B CN106442564 B CN 106442564B CN 201610902339 A CN201610902339 A CN 201610902339A CN 106442564 B CN106442564 B CN 106442564B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
Abstract
A kind of heavy caliber super-smooth surface defect detecting device and detection method, the device mainly includes laser, laser beam expanding system, high reflective mirror, the polarizer, polarization splitting prism, quarter wave plate, rotating prism, telecentricity field lens, high angle detector for scattered light, low angle detector for scattered light, row triggering detector, reflection light detector, precision displacement platform and computers.The present invention can significantly improve the detection efficiency to optical elements of large caliber, avoid and seriously affect because high speed rotation makes optical elements of large caliber generate vibration, axial runout etc. to testing result generation.It is able to achieve and classifies to surface defect, identify that the defect detected is the dust of pit, scratch or protrusion, fiber etc..
Description
Technical field
The present invention relates to surface defect, especially a kind of detection device of heavy caliber super-smooth surface defect and detection side
Identification and classification to defect may be implemented in method.
Background technique
In high-tech areas such as precision optics engineering, semiconductors manufacture, precision machinery manufacture and defence and militaries, to added
The surface defect of the material of work has strict requirements.Surface defect refers to the links such as processing, carrying, produces in component surface
Raw shape, size are different, the tiny flaws such as the scratch of random distribution and point.The presence of these tiny flaws will seriously affect
The performance of component, such as: in high power laser system, the surface defect of optical component can greatly reduce laser deflection
Value causes the damage of optical component even to destroy.A large number of studies show that surface defect will cause not incident intense laser beam
With the heat absorption of degree, as high energy laser radiates increasing for number on component, the defect of component can cause material
Further damage, will ultimately result in material damage.It is dissipated in addition, incoming laser beam will generate at the surface defect of optical component
It penetrates, causes the capacity usage ratio of laser beam to reduce, significantly limit the performance of whole system.Therefore, it is necessary to optics member device
The surface defect of part is accurately detected.
Currently, specifically including that visual method, micro- scattering dark-field imaging method to the detection method of surface defect both at home and abroad and swashing
Light-scattering measurement.Visual method irradiates component surface mainly in dark room conditions, with glare light electric torch, passes through surface defect
The scattering light of generation carries out artificial observation.This method have subjectivity is strong, resolution ratio is low, can not precise quantification flaw size and
The disadvantages of testing result is unreliable.Micro- scattering dark-field imaging method (bibliography CN1563957A) by dark-ground illumination mode,
It collect the scattering light that only surface defect generates could by microscopic system, at bright picture in CCD camera.This method single aperture at
As range is small, needs to take a long time imaging, the image in later period are scanned to large-aperture optical component whole surface
Splicing and quantification treatment will also take considerable time that detection speed is slow.Laser defusing measure method is highly sensitive extensive due to it
For in semiconductor detection, KLA-Tencor company, the U.S. to make laser beam in silicon using this method (bibliography US5798829)
Piece surface is focused into tens microns of diameter of small point, is realized by silicon wafer high speed rotation and radial motion to round silicon wafer table
The defects detection of the high speed high sensitivity in face.But this method is measured using single-point laser beam scanning, to large-aperture optical member
Device carries out detection and takes a long time.Large-aperture optical component weight is big simultaneously, the vibration of high speed rotation bring, axial jump
The seriousness that will seriously affect testing result such as dynamic, therefore, this method are unable to satisfy the inspection of large-aperture optical component surface defect
Survey demand.
Summary of the invention
The present invention discloses a kind of heavy caliber super-smooth surface defect detecting device and detection method, this method focus laser
Point becomes the point front of high-velocity scanning, and the high speed detection of the surface defects such as scratch and point may be implemented；By to defect scattering
The detection of the different angle scattering light in space, realizes the classification to defect.
In order to achieve the above objectives, The technical solution adopted by the invention is as follows:
A kind of detection device of heavy caliber super-smooth surface defect, including laser and precision displacement platform, the essence
Close displacement platform is placed for sample to be tested, it is characterized in that, the laser beam outbound course along the laser is successively laser beam expanding
System, high reflective mirror, the polarizer, polarization splitting prism, quarter wave plate, rotating prism, telecentricity field lens and precision displacement platform, it is described
The laser beam that issues of laser be incident on described rise through the laser beam expanding system collimator and extender and the high reflective mirror
Inclined device generates S polarized light, which is incident on the quarter wave plate and generates after the polarization splitting prism reflection
Circularly polarized light injects the telecentricity field lens, which makes respectively after the circularly polarized light is by the rotating prism reflection
The rotatory polarization of a angle incidence becomes laser focus on light beam and vertically focuses on sample to be tested surface, the shape on sample to be tested surface
At a laser focus point front；High angle is set outside laser focus on light beam between the telecentricity field lens and sample to be tested
Detector for scattered light and low angle detector for scattered light, the optical axis direction and sample to be tested of the high angle detector for scattered light
Surface normal angle less than 45 °；The optical axis direction of the low angle detector for scattered light and the surface normal of sample to be tested
Angle is greater than 45 °；Detector is triggered with the telecentricity field lens row placed side by side, generates row triggering for receiving portion incident light
Signal；Reflection light detector is set in the P-polarized light transmission direction of the polarization splitting prism, which is used for
It is anti-to receive from sample to be tested surface reflection and through telecentricity field lens, rotating prism, quarter wave plate, polarization splitting prism P polarization state
Penetrate optical signal；The precision displacement platform is controlled by computer and passes through precision displacement platform driving circuit and driven, and is made it
Enough drive the movement of sample to be tested, the high angle detector for scattered light, low angle detector for scattered light, row triggering detector
It is connected with the output end of reflection light detector with the input terminal of the computer.
The reflecting mirror that the rotating prism can also drive for galvanometer, acousto-optic modulator, electrooptic modulator or rotating electric machine.
The high angle detector for scattered light and low angle detector for scattered light includes but is not limited to photodiode, electricity
Lotus coupling element or photomultiplier tube.
The detection of heavy caliber component surface defect is carried out using the detection device of above-mentioned heavy caliber super-smooth surface defect
Method, this method include the following steps:
1. the length L and width W of sample to be tested are inputted on the computer, according to the laser focus point front
Length l and width w, calculate the columns M and line number N of scanning, scanning columns is M=L/l, and each column scan line number is N=W/
W takes its integer part if M and N are not integer respectively, then plus one, guarantee that sample to be tested entire surface can be scanned；
2. the computer controls and pass through the precision displacement platform driving circuit, the accurate displacement is driven
Platform drives sample to be tested to be moved at initial position (X0, Y0), and the rotating prism starts turning, and the row triggering is visited
After survey device receives signal, the computer record start position, then sample to be tested the first row is swept by laser focus on light beam
It retouches, scanning length and width are respectively above-mentioned l and w, and when scanning, the high angle detector for scattered light and low angle scatter optical detection
Device records the intensity of corresponding high angle scattering light and the intensity of low angle scattering light respectively, and the reflection light detector record is anti-
The intensity of light and real-time transmission are penetrated to the computer；
3. after the completion of the first row scanning, under the computer control, the precision displacement platform is driven to test sample
Product carry out next line scanning along Y-direction moving distance w；
4. repeating 3. scanning that step completes all remaining rows of first row；
5. after the completion of first row scanning, driving the sample to be tested to move in X direction using the precision displacement platform
It is dynamic, moving distance l, then repeatedly step 3.~4. complete all rows scannings of secondary series；
6. repeat step 3.~5. complete sample to be tested entire surface scanning；
7. analyzing the signal of measurement acquisition:
The high angle scattering that the analysis high angle detector for scattered light and low angle detector for scattered light record respectively
The intensity of optical signal and the intensity of low angle scattered light signal, if the received scattering light letter of the high angle detector for scattered light
Number intensity scattered light signal intensity more received than the described low angle detector for scattered light is big, then the surface defect of sample to be tested is
Pit or scratch；Conversely, then the surface defect of sample to be tested is protrusion；According to this, it is inferred to the type of sample to be tested surface defect,
Classify to realize to defect；
When the region that laser focus point front is radiated at sample to be tested surface does not have defect, incoming laser beam is to test sample
The region surface of product does not occur to scatter or scattering optrode is weak, and the high angle detector for scattered light and low angle scattering light are visited
The intensity of the intensity and low angle scattered light signal of surveying the high angle scattered light signal that device records respectively is very weak, at this moment, described
Reflection light detector received signal intensity reflects the surface reflectivity information of sample to be tested.
Advantages of the present invention is as follows:
Compared with traditional scatter measurement method, surface defect detection apparatus of the present invention and method mainly have following excellent
Point:
1, detection efficiency is improved.Traditional laser defusing measure method is scanned using single focus point, and efficiency is lower.
The present invention relies on rotating prism high speed rotation, and the point front that traditional single laser focus point measurement becomes high-velocity scanning is carried out
Scanning Detction highly shortened the detection time to heavy caliber sample.Meanwhile sample to be tested without carry out high speed rotation,
It avoids and serious shadow is generated to testing result because high speed rotation makes large-aperture optical component generate the factors such as vibration, axial runout
It rings.Therefore, testing result is also more reliable.
2, the present invention can distinguish different classes of surface defect.Traditional laser defusing measure method cannot be distinguished surface and lack
Fall into classification, the present invention using two with sample surfaces normal at the detector for scattered light of different angle, scattered by comparing two
It is pit, scratch, or dust, the fiber of protrusion etc. that optical detector while received signal intensity, which can distinguish defect,.For sample
The post-production of product, cleaning provide more accurate guiding opinion.
Detailed description of the invention
Fig. 1 is the structure of the detecting device schematic diagram of heavy caliber super-smooth surface defect of the present invention
Fig. 2 is surface defects detection scanning route schematic diagram of the present invention
Fig. 3 is pit defect detection schematic diagram of the present invention
Fig. 4 is bump defects detection schematic diagram of the present invention
In figure: 1- laser；2- laser beam expanding system；3- high reflective mirror；The 4- polarizer；5- polarization splitting prism；Wave
Piece；7- rotating prism；8- telecentricity field lens；9- laser focus point front；10- sample to be tested；11- high angle detector for scattered light；
12- low angle detector for scattered light；13- row triggers detector；14- reflection light detector；15- laser focus on light beam；16- is accurate
Displacement platform；17- precision displacement platform driving circuit；18- computer；19- scatters light.
Specific embodiment
The present invention is further elaborated below with reference to specific drawings and examples, but the present invention should not be limited with this
Protection scope.
First referring to Fig. 1, Fig. 1 is the structure of the detecting device schematic diagram of heavy caliber super-smooth surface defect of the present invention, by scheming
As it can be seen that the detection device of heavy caliber super-smooth surface defect of the present invention, including laser 1 and precision displacement platform 16, it is described
Precision displacement platform 16 is placed for sample to be tested 10, and the laser beam outbound course along the laser 1 is successively laser beam expanding system
2, high reflective mirror 3, the polarizer 4, polarization splitting prism 5, quarter wave plate 6, rotating prism 7, telecentricity field lens 8 and precision displacement platform 16,
The laser beam that the laser 1 issues is incident on institute through 2 collimator and extender of laser beam expanding system and the high reflective mirror 3
The polarizer 4 stated generates S polarized light, which is incident on described 1/4 after the polarization splitting prism 5 reflects
Wave plate 6 generates circularly polarized light, after which is reflected by the rotating prism 7, injects the telecentricity field lens 8, should
Telecentricity field lens 8 makes the rotatory polarization of all angles incidence become laser focus on light beam 15 vertically to focus on 10 surface of sample to be tested,
A laser focus point front 9 is formed on 10 surface of sample to be tested；Between the telecentricity field lens 8 and sample to be tested 10
High angle detector for scattered light 11 and low angle detector for scattered light 12 are set outside laser focus on light beam 15, and the high angle dissipates
The optical axis direction of optical detector 11 and the surface normal angle of sample to be tested 10 are penetrated less than 45 °；The low angle scattering light is visited
The surface normal angle of the optical axis direction and sample to be tested 10 of surveying device 12 is greater than 45 °；With the row placed side by side of telecentricity field lens 8
Detector 13 is triggered, generates line triggering signal for receiving portion incident light；In the P-polarized light of the polarization splitting prism 5
Reflection light detector 14 is arranged in transmission direction, and the reflection light detector 14 is for receiving from 10 surface reflection of sample to be tested and passing through
Telecentricity field lens 8, rotating prism 7, quarter wave plate 6, polarization splitting prism 5 P polarization state reflected light signal；The accurate displacement
The precision displacement platform driving circuit 17 that platform 16 is controlled by computer 18 drives, and enables the shifting for driving sample to be tested 10
Dynamic, described high angle detector for scattered light 11, low angle detector for scattered light 12, row triggering detector 13 and reflection optical detection
The output end of device 14 is connected with the input terminal of the computer 18.
The detection of heavy caliber component surface defect is carried out using the detection device of above-mentioned heavy caliber super-smooth surface defect
Method, including the following steps:
1. inputting the length L and width W of sample to be tested on the computer 18, dot matrix is focused according to the laser
The length l and width w of line 9 calculate the columns M and line number N of scanning, and scanning columns is M=L/l, and each column scan line number is N=
W/w takes its integer part if M and N are not integer respectively, then plus one, guarantee that 10 entire surface of sample to be tested can be scanned；
2. the computer 18 controls and by the precision displacement platform driving circuit 17, the precision is driven
Displacement platform 16 drives sample to be tested 10 to be moved at initial position (X0, Y0), and the rotating prism 7 starts turning, described
Row triggering detector 13 receive signal after, the 18 record start position of computer, then 10 the first row of sample to be tested
It being scanned by laser focus on light beam 15, scanning length and width are respectively above-mentioned l and w, when scanning, the high angle detector for scattered light
11 and low angle detector for scattered light 12 record the intensity of corresponding high angle scattering light and the intensity of low angle scattering light, institute respectively
The reflection light detector 14 stated records the intensity of reflected light and real-time transmission is to the computer 18；
3. after the completion of the first row scanning, in the case where the computer 18 controls, the precision displacement platform 16 drive to
Sample 10 carries out next line scanning along Y-direction moving distance w；
4. repeating 3. scanning that step completes all remaining rows of first row；
5. driving the sample to be tested 10 along the side X using the precision displacement platform 16 after the completion of first row scanning
To movement, moving distance l, then repeatedly step 3.~4. complete all rows scannings of secondary series；
6. repeat step 3.~5. complete 10 entire surface of sample to be tested scanning；
7. analyzing the signal of measurement acquisition:
The high angle that the analysis high angle detector for scattered light 11 and low angle detector for scattered light 12 record respectively
The intensity of scattered light signal and the intensity of low angle scattered light signal dissipate if the high angle detector for scattered light 11 is received
Penetrate light signal strength bigger than the received scattered light signal intensity of low angle detector for scattered light 12, then sample to be tested 10
Surface defect is pit or scratch；Conversely, then the surface defect of sample to be tested 10 is protrusion；According to this, it is inferred to sample to be tested table
The type of planar defect classifies to defect to realize；
When the region that laser focus point front 9 is radiated at 10 surface of sample to be tested does not have defect, incoming laser beam to
The region surface of sample 10 does not occur to scatter or scattering light 17 is extremely weak, the high angle detector for scattered light 11 and low angle
The intensity for the high angle scattered light signal that degree detector for scattered light 12 records respectively and the intensity of low angle scattered light signal are very weak,
For dark background signal, at this moment, the surface that the 14 received signal intensity of reflection light detector reflects sample to be tested 10 is anti-
Penetrate rate information.
Embodiment:
As shown in Figure 1, measurement is that computer 18 controls precision displacement platform driving circuit 17, make 16 band of precision displacement platform
Dynamic sample to be tested 10 is scanned along scanning route shown in Fig. 2, realizes the scanning to 10 entire surface of sample to be tested.High angle dissipates
The optical axis direction of optical detector 11 and the surface normal angle of sample to be tested 10 are penetrated less than 45 °, low angle detector for scattered light 12
Optical axis direction and sample to be tested 10 surface normal angle be greater than 45 °.Reflection light detector monitors 10 table of sample to be tested in real time
Face reflection condition.High angle detector for scattered light 11, low angle detector for scattered light 12,14 received signal of reflection light detector
It is saved in real-time transmission to computer 18.
From figure 3, it can be seen that high angle detector for scattered light 11 receives more scatterings when surface defect is pit defect
Light, scattered light signal intensity are bigger than the received scattered light signal intensity of low angle detector for scattered light 12.
From fig. 4, it can be seen that low angle detector for scattered light 12 receives more scatterings when surface defect is bump defects
Light, scattered light signal intensity are bigger than the received scattered light signal intensity of high angle detector for scattered light 11.
Rotating prism 7 is for incoming laser beam to be carried out continuous angle scanning within the scope of certain angle in the present embodiment
Device, realize that the device of the function further includes but is not limited to galvanometer, acousto-optic modulator, electrooptic modulator, rotating electric machine.
High angle detector for scattered light 11 and low angle detector for scattered light 12 are to realize photoelectric conversion in the present embodiment
Device realizes that the device of the function includes but is not limited to photodiode, charge coupled cell, photomultiplier tube.
It is put between high angle detector for scattered light 11 and low angle detector for scattered light 12 and scattering light 19 in the present embodiment
Optical lens system is set, scattering light is collected effectively, increases scattered energy, improve system signal noise ratio.
Claims (4)
1. a kind of detection device of heavy caliber super-smooth surface defect, including laser (1) and precision displacement platform (16), described
Precision displacement platform (16) for sample to be tested (10) place, which is characterized in that along the laser beam outbound course of the laser (1)
It is successively laser beam expanding system (2), high reflective mirror (3), the polarizer (4), polarization splitting prism (5), quarter wave plate (6), rotating prism
(7), telecentricity field lens (8) and precision displacement platform (16), the laser beam that the laser (1) issues is through the laser beam expanding
System (2) collimator and extender and the high reflective mirror (3) are incident on the polarizer (4) and generate S polarized light, S polarized light warp
After crossing polarization splitting prism (5) reflection, it is incident on the quarter wave plate (6) and generates circularly polarized light, the circularly polarized light is logical
After crossing rotating prism (7) reflection, the telecentricity field lens (8) is injected, which makes all angles incidence
Rotatory polarization becomes laser focus on light beam (15) and vertically focuses on sample to be tested (10) surface, the shape on sample to be tested (10) surface
At a laser focus point front (9)；Laser focus on light beam between the telecentricity field lens (8) and sample to be tested (10)
(15) high angle detector for scattered light (11) and low angle detector for scattered light (12) are set outside, and the high angle scattering light is visited
The optical axis direction of device (11) and the surface normal angle of sample to be tested (10) are surveyed less than 45 °；The low angle scatters optical detection
The optical axis direction of device (12) and the surface normal angle of sample to be tested (10) are greater than 45 °；With the telecentricity field lens (8) and discharge
Row triggering detector (13) is set, generates line triggering signal for receiving portion incident light；In the polarization splitting prism (5)
Reflection light detector (14) are arranged in P-polarized light transmission direction, and the reflection light detector (14) is for receiving from sample to be tested (10)
Surface reflection and through the P polarization state of telecentricity field lens (8), rotating prism (7), quarter wave plate (6), polarization splitting prism (5) reflect
Optical signal；The precision displacement platform (16) is driven by the precision displacement platform driving circuit (17) that computer (18) controls,
Enable the movement of drive sample to be tested (10), the high angle detector for scattered light (11), low angle scatter optical detection
The input terminal phase of the output end and the computer (18) of device (12), row triggering detector (13) and reflection light detector (14)
Even.
2. the detection device of heavy caliber super-smooth surface defect according to claim 1, which is characterized in that the rotation
The reflecting mirror that prism (7) can also drive for galvanometer, acousto-optic modulator, electrooptic modulator or rotating electric machine.
3. the detection device of heavy caliber super-smooth surface defect according to claim 1, which is characterized in that the angle of elevation
Degree detector for scattered light (11) and low angle detector for scattered light (12) include photodiode, charge coupled cell or photoelectricity times
Increase pipe.
4. carrying out heavy caliber component surface using the detection device of heavy caliber super-smooth surface defect described in claim 1 to lack
Sunken detection method, it is characterised in that this method includes the following steps:
1. the length L and width W of sample to be tested are inputted on the computer (18), according to the laser focus point front
(9) length l and width w calculate the columns M and line number N of scanning, and scanning columns is M=L/l, and each column scan line number is N=
W/w takes its integer part if M and N are not integer respectively, then plus one, guarantee that sample to be tested (10) entire surface can be swept
It retouches；
2. the computer (18) controls and by the precision displacement platform driving circuit (17), the precision is driven
Displacement platform (16) drives sample to be tested (10) to be moved at initial position (X0, Y0), and the rotating prism (7) starts to turn
It is dynamic, after row triggering detector (13) receives signal, the computer (18) record start position, then to test sample
Product (10) the first row is scanned by laser focus on light beam (15), and scanning length and width are respectively above-mentioned l and w, when scanning, the angle of elevation
Degree detector for scattered light (11) and low angle detector for scattered light (12) record corresponding high angle respectively and scatter the intensity of light and low
Angle scatters the intensity of light, and the reflection light detector (14) records the intensity of reflected light and real-time transmission to the calculating
Machine (18)；
3. after the completion of the first row scanning, under described computer (18) control, the precision displacement platform (16) drive to
Sample (10) carries out next line scanning along Y-direction moving distance w；
4. repeating 3. scanning that step completes all remaining rows of first row；
5. after the completion of first row scanning, driving the sample to be tested (10) along the side X using the precision displacement platform (16)
To movement, moving distance l, then repeatedly step 3.~4. complete all rows scannings of secondary series；
6. repeat step 3.~5. complete sample to be tested (10) entire surface scanning；
7. analyzing the measurement of each hot spot:
The high angle that the analysis high angle detector for scattered light (11) and low angle detector for scattered light (12) record respectively
The intensity of scattered light signal and the intensity of low angle scattered light signal, if the high angle detector for scattered light (11) is received
Scattered light signal intensity scattered light signal intensity more received than the described low angle detector for scattered light (12) is big, then sample to be tested
(10) surface defect is pit or scratch；Conversely, then the surface defect of sample to be tested (10) is protrusion；According to this, be inferred to
The type of sample surface defect classifies to defect to realize；
When the region that laser focus point front (9) is radiated at sample to be tested (10) surface does not have defect, incoming laser beam to
The region surface of sample (10) does not occur to scatter or scatter light (17) extremely weak, described high angle detector for scattered light (11)
The intensity of the high angle scattered light signal recorded respectively with low angle detector for scattered light (12) and low angle scattered light signal
Intensity is very weak, is dark background signal, at this moment, the reflection light detector (14) received signal intensity reflects sample to be tested
(10) surface reflectivity information.
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