CN109935531B - Surface detection device, system and method - Google Patents
Surface detection device, system and method Download PDFInfo
- Publication number
- CN109935531B CN109935531B CN201910303754.7A CN201910303754A CN109935531B CN 109935531 B CN109935531 B CN 109935531B CN 201910303754 A CN201910303754 A CN 201910303754A CN 109935531 B CN109935531 B CN 109935531B
- Authority
- CN
- China
- Prior art keywords
- laser beam
- reflecting
- reflective
- drum
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 61
- 238000000034 method Methods 0.000 title claims abstract description 11
- 238000007689 inspection Methods 0.000 claims description 10
- 238000012545 processing Methods 0.000 claims description 5
- 238000012546 transfer Methods 0.000 claims description 4
- 230000000694 effects Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 14
- 239000002245 particle Substances 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 230000007547 defect Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000004441 surface measurement Methods 0.000 description 1
Images
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The embodiment of the invention discloses a surface detection device, a system and a method. The surface detection device includes: the light emitting module, the reflecting module and the scattered light detection loop are sequentially arranged along the light propagation path; the light emitting module is used for emitting a first laser beam and a second laser beam; the reflection module comprises a reflection rotary drum and a reflector; the scattered light detection circuit is used for receiving a first scattered light beam which is scattered after the first laser light beam is reflected by the reflecting drum and projected to the surface of the measured object in a first direction, and receiving a second scattered light beam which is scattered after the second laser light beam is reflected by the reflecting drum and the reflecting mirror in sequence and projected to the surface of the measured object in a second direction; wherein, the included angle between the first direction and the surface normal direction of the measured object is A, and A is more than 0 and less than 90 degrees; the second direction is perpendicular to the surface of the object to be measured. The surface detection device provided by the embodiment of the invention can realize the effect of improving the detection efficiency.
Description
Technical Field
The embodiment of the invention relates to the technical field of semiconductors, in particular to a surface detection device, system and method.
Background
With the rapid development of large-scale integrated circuits, the influence of the particle condition on the surface of a silicon wafer on the manufacture of devices is more and more paid attention by people.
Fig. 1 is a schematic structural diagram of a typical measurement apparatus for performing scattering measurement on particles on a silicon wafer surface, and as shown in fig. 1, the measurement apparatus includes a machine body 10 and a silicon wafer transmission interface 20 disposed on the machine body 10 for receiving a silicon wafer, wherein a workpiece stage 11 for placing a silicon wafer 14 to be measured, an emission unit 12 for emitting normal incident light λ and oblique incident light μ, and a photodetector 13 are disposed inside the machine body 10. The normal incident light lambda and the oblique incident light mu emitted by the emission unit 12 irradiate the surface of the silicon wafer 14 to be tested of the workpiece table 11, and the particle condition detection on the surface of the silicon wafer 14 to be tested is realized by analyzing the reflected light and the scattered light gamma on the surface of the silicon wafer 14 to be tested. In order to realize the detection of the whole silicon wafer, the workpiece stage 11 is provided with a y-direction moving stage and an x-direction moving stage, and is additionally provided with a rotating stage (fig. 2) rotating around a z-axis, and the scanning detection of the whole area of the silicon wafer 14 to be detected is realized through the movement of the moving stage in the x-direction and the y-direction or through the unidirectional movement along the x-axis while rotating around the z-axis.
However, the prior art method of detecting the workpiece by moving the workpiece table (the scanning speed depends on the moving speed of the moving table) is inefficient.
Disclosure of Invention
The invention provides a surface detection device, a surface detection system and a surface detection method, which aim to achieve the effect of improving detection efficiency.
An embodiment of the present invention provides a surface detection apparatus, including: the light emitting module, the reflecting module and the scattered light detection loop are sequentially arranged along the light propagation path;
the light emitting module is used for emitting a first laser beam and a second laser beam;
the reflection module comprises a reflection rotary drum and a reflection mirror;
the scattered light detection circuit is used for receiving a first scattered light beam which is reflected by the reflecting drum and projected to the surface of a measured object in a first direction and then scattered, and receiving a second scattered light beam which is reflected by the reflecting drum and the reflecting mirror in sequence and projected to the surface of the measured object in a second direction and then scattered;
wherein, the included angle between the first direction and the surface normal direction of the object to be measured is A, and A is more than 0 and less than 90 degrees; the second direction is perpendicular to the surface of the object to be measured.
Further, the light emitting module includes: a first transmitting unit and a second transmitting unit;
the first emission unit is used for emitting the first laser beam;
the second emitting unit is used for emitting the second laser beam.
Further, the mirror comprises an off-axis parabolic mirror;
the focus of the off-axis parabolic mirror coincides with the light spot of the second laser beam on the reflecting rotary drum, and the symmetry axis of the off-axis parabolic mirror is perpendicular to the surface of the measured object.
Further, the reflector comprises a semi-transparent semi-reflective parabolic mirror;
and the focus of the semi-transmitting semi-reflecting parabolic mirror is superposed with the light spot of the second laser beam on the reflecting rotary drum.
Further, the shape of the reflective drum comprises any one of a prism, a pyramid or a frustum of a pyramid, the reflective drum has a plurality of outer side walls which are adjacently arranged in sequence, at least a part of the outer side walls of the reflective drum is provided with a first reflecting mirror, and the first reflecting mirror is used for receiving the first laser beam and the second laser beam.
Further, the surface detection apparatus further includes: a work table;
the object to be measured is placed on the workbench, and the workbench moves along a third direction;
the first laser beam is reflected by the reflecting rotary drum and projected to the surface of the measured object in the first direction to complete scanning in the fourth direction; the second laser beam is reflected by the reflecting rotary drum and the reflecting mirror in sequence and projected to the surface of the measured object in the second direction to complete scanning in the fifth direction; the third direction and the fourth direction intersect, and the third direction intersects the fifth direction.
Further, the reflective drum comprises a first reflective subunit and a second reflective subunit which are stacked, a rotation axis of the first reflective subunit is overlapped with a rotation axis of the second reflective subunit, an outer side wall of the first reflective subunit is connected with an outer side wall of the second reflective subunit, an included angle between the outer side wall of the first reflective subunit and the outer side wall of the second reflective subunit is not equal to 90 ° x L, and L is a natural number;
the shape of the first reflecting subunit comprises a prism, the first reflecting subunit is provided with a plurality of outer side walls which are sequentially arranged adjacently, at least one part of the outer side walls of the first reflecting subunit is provided with a first sub-reflector, and the first laser beam is projected onto the surface of the object to be measured through the first sub-reflector;
the shape of second reflection subunit includes pyramid or terrace with edge, second reflection subunit has a plurality of lateral walls that adjoin in proper order and set up, at least some lateral walls of second reflection subunit are equipped with the sub-speculum of second, the second laser beam process passes through in proper order the sub-speculum of second with the speculum is projected the surface of testee.
Based on the same inventive concept, the embodiment of the invention also provides a surface detection system, which comprises the surface detection device, the processing unit and the detected object transmission interface.
Based on the same inventive concept, the embodiment of the invention also provides a surface detection method, which is realized based on the surface detection device;
the surface detection method comprises the following steps:
s1, starting the light emitting module to form a first laser beam and a second laser beam;
s2, controlling the reflective drum of the reflective module to receive the first laser beam and the second laser beam and reflect the first laser beam and the second laser beam, and controlling the reflector of the reflective module to receive the second laser beam reflected by the reflective drum and reflect the second laser beam;
s3, receiving a first scattered light beam scattered after the first laser beam is reflected by the reflecting drum and projected to the surface of the measured object in a first direction and a second scattered light beam scattered after the second laser beam is reflected by the reflecting drum and the reflecting mirror in sequence and projected to the surface of the measured object in a second direction through a scattered light detection circuit;
wherein, the included angle between the first direction and the surface normal direction of the object to be measured is A, and A is more than 0 and less than 90 degrees; the second direction is perpendicular to the surface of the object to be measured.
Further, after S2, the method further includes:
controlling the workbench to move a preset distance along the third direction; or,
s2, further comprising:
controlling the workbench to move a preset distance along the third direction;
the first laser beam is reflected by the reflecting rotary drum and projected to the surface of the measured object in the first direction to complete scanning in the fourth direction; the second laser beam is reflected by the reflecting rotary drum and the reflecting mirror in sequence and projected to the surface of the measured object in the second direction to complete scanning in the fifth direction; the third direction and the fourth direction intersect, and the third direction intersects the fifth direction.
The embodiment of the invention transmits a first laser beam and a second laser beam through a light emitting module, receives a first scattered beam which is reflected by a reflecting rotary drum and projected on the surface of a measured object in a first direction and then scattered and receives a second scattered beam which is reflected by the reflecting rotary drum and a reflecting mirror in sequence, projected on the surface of the measured object in a second direction and then scattered through a scattered light detection circuit, finishes the high-speed scanning of oblique incidence and normal incidence of the measured object through the high-speed rotation of the reflecting rotary drum and the arrangement of the reflecting mirror, solves the problem of low efficiency of detecting particles on the surface of the measured object in the prior art, realizes the high-speed scanning of the measured object, effectively improves the efficiency of detecting the particles on the surface of the measured object, and quickly identifies different types of defects and particles on the surface of the measured object.
Drawings
FIG. 1 is a schematic diagram of a prior art surface measurement apparatus;
FIG. 2 is a top view of a surface measuring device of the prior art;
FIG. 3 is a schematic structural diagram of a surface inspection apparatus according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of another surface inspection apparatus provided in an embodiment of the present invention;
fig. 5 is a schematic diagram of a scanning path of a surface detection device for detecting a surface of an object to be detected according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a scanning path of a surface detection device for detecting a surface of an object to be detected according to another embodiment of the present invention;
FIG. 7 is a schematic structural diagram of a surface inspection system according to an embodiment of the present invention;
fig. 8 is a flowchart of a surface inspection method according to an embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
Fig. 3 is a schematic structural diagram of a surface inspection apparatus according to an embodiment of the present invention, and as shown in fig. 3, the surface inspection apparatus includes: the light emitting module 110, the reflecting module 120 and the scattered light detecting circuit 130 are arranged in sequence along the light propagation path; the light emitting module 110 is used for emitting a first laser beam a and a second laser beam b; the reflective module 120 includes a reflective drum 121 and a mirror 122; the scattered light detection circuit 130 is configured to receive a first scattered light beam c that is reflected by the reflective drum 121 and is scattered after being projected onto the surface of the object to be measured 140 in the first direction m, and receive a second scattered light beam d that is scattered after a second laser light beam b is reflected by the reflective drum 121 and the reflective mirror 122 in sequence and is projected onto the surface of the object to be measured 140 in the second direction n; wherein, the included angle between the first direction m and the surface normal of the object 140 is A, A is more than 0 and less than 90 degrees; the second direction n is perpendicular to the surface of the object 140 to be measured.
The reflective drum 121 includes any one of a prism, a frustum of a pyramid, or a pyramid, and the cross section of the reflective drum 121 is polygonal, such as octagonal, and accordingly, the reflective drum 121 has at least eight side surfaces, and each side surface has at least one reflective unit 123. Preferably, the entire outer side wall of the reflective drum 121 is continuously arranged with the reflective unit 123. The reflection unit 123 may include, for example, a mirror having a reflection function. The reflective drum 121 rotates rapidly about its axis of rotation 124, for example, the axis of rotation 124 is parallel to the z-direction.
Specifically, after the light emitting module 110 emits the first laser beam a and the second laser beam b, the at least one reflection unit 123 of the reflective drum 121 can receive the first laser beam a and the second laser beam b. Because the reflective drum 121 rotates rapidly, when the reflective drum 121 rotates, the reflective unit 123 rotates rapidly around the rotation axis 124 of the reflective drum 121, the first laser beam a and the second laser beam b are reflected by the reflective unit 123 rotating rapidly, so that the first laser beam a is projected onto the surface of the object 140 to be measured in the first direction m, and accordingly, the spot on the surface of the object 140 to be measured is scanned, and a scanning arc, that is, a first arc, is formed, because the included angle between the first direction m and the normal direction of the surface of the object 140 to be measured is greater than 0 ° and less than 90 °, according to this scheme, high-speed scanning in an oblique incidence manner can be achieved, and simultaneously the mirror 122 receives the second laser beam b reflected by the reflective drum 121, so that the second laser beam b is projected onto the surface of the object 140 to be measured in the second direction n, and accordingly, the spot on the surface of the object 140 to, a section of scanning arc, i.e. the second arc, is formed, and since the second direction n is perpendicular to the surface of the object 140 to be measured, the scheme can realize high-speed scanning in a normal incidence mode. That is, the first laser beam projected onto the surface of the object 140 to be measured in the first direction m completes the scanning of the oblique incidence direction of the object 140 to be measured, and the second laser beam projected onto the surface of the object 140 to be measured in the second direction n completes the scanning of the normal incidence direction of the object 140 to be measured, so that the technical scheme can realize the high-speed scanning of two incidence modes of oblique incidence and normal incidence, thereby realizing the detection and identification of different types of surface defects and particles of the object 140 to be measured. The scattered light detection circuit 130 receives a first scattered light beam c, which is reflected by the reflective drum 121 and is scattered after being projected onto the surface of the object to be measured 140 in the first direction m, and receives a second scattered light beam d, which is scattered after the second laser light beam b is reflected by the reflective drum 121 and the reflective mirror 122 in sequence and is projected onto the surface of the object to be measured 140 in the second direction n.
Illustratively, the other Q is the number of the reflection units 123 on the reflection drum, and it can be obtained through rough calculation that the central angle corresponding to a segment of the scanning arc formed by reflection through one reflection unit 123 is 2 pi/Q. When Q is large enough, the central angle becomes small and the scanning arc will approach a straight line. Q scans can be achieved for each revolution of the reflective drum. Further, high-frequency scanning of the light spots in the first direction m and the second direction n can be achieved by matching with high-speed rotation of the reflecting rotary drum.
It should be noted that, as will be understood by those skilled in the art, the cross section of the reflective drum 121 includes but is not limited to an octagon, and those skilled in the art can set the number of sides of the cross section according to the product requirement, and the invention is not limited thereto. In addition, the number of the reflection units 123 may be set as needed.
The embodiment of the invention transmits a first laser beam and a second laser beam through a light emitting module, receives a first scattered beam which is reflected by a reflecting rotary drum and projected on the surface of a measured object in a first direction and then scattered and receives a second scattered beam which is reflected by the reflecting rotary drum and a reflecting mirror in sequence, projected on the surface of the measured object in a second direction and then scattered through a scattered light detection circuit, finishes the high-speed scanning of oblique incidence and normal incidence of the measured object through the high-speed rotation of the reflecting rotary drum and the arrangement of the reflecting mirror, solves the problem of low efficiency of detecting particles on the surface of the measured object in the prior art, realizes the high-speed scanning of the measured object, effectively improves the efficiency of detecting the particles on the surface of the measured object, and quickly identifies different types of defects and particles on the surface of the measured object.
On the basis of the above technical solution, optionally, with continuing reference to fig. 3, the light emitting module 110 includes: a first transmitting unit and a second transmitting unit (not shown in the figure); the first emission unit is used for emitting a first laser beam a; the second emitting unit is used for emitting a second laser beam b.
On the basis of the above technical solution, optionally, the reflector 122 includes an off-axis parabolic mirror; the focus of the off-axis parabolic mirror coincides with the light spot of the second laser beam b on the reflective drum 121, and the symmetry axis of the off-axis parabolic mirror is perpendicular to the surface of the object 140 to be measured.
When the focus of the off-axis parabolic mirror coincides with the light spot of the second laser beam b on the reflective drum 121 and the symmetry axis of the off-axis parabolic mirror is perpendicular to the surface of the object to be measured 140, the second laser beam b is reflected by the off-axis parabolic mirror and then vertically projected onto the surface of the object to be measured 140, so that normal incidence high-speed scanning of the object to be measured 140 is realized.
On the basis of the above technical solution, optionally, fig. 4 is a schematic structural diagram of another surface detection apparatus provided in an embodiment of the present invention, and as shown in fig. 4, the reflecting mirror 122 includes a half-mirror and a half-mirror; the focus of the semi-transparent and semi-reflective parabolic mirror coincides with the light spot of the second laser beam b on the reflective drum 121.
When the second laser beam b is incident in a direction perpendicular to the reflection unit 123 of the reflection drum 121, a part of the second laser beam b passes through the semi-transparent and semi-reflective parabolic mirror and then enters the reflection unit 123 of the reflection drum 121, and returns to the semi-transparent and semi-reflective parabolic mirror through the reflection unit 123 of the reflection drum 121, and when the focus of the semi-transparent and semi-reflective parabolic mirror coincides with the light spot of the second laser beam b on the reflection drum 121, the second laser beam b is reflected by the semi-transparent and semi-reflective parabolic mirror and then vertically projected onto the surface of the object to be measured 140, so that normal incidence high-speed scanning of the object to be measured 140 is realized.
Based on the above technical solution, optionally, the shape of the reflective drum 121 includes any one of a prism (see fig. 4), a pyramid or a frustum of a prism, the reflective drum 121 has a plurality of outer sidewalls disposed adjacently in sequence, and at least a portion of the outer sidewalls of the reflective drum 121 is provided with a first mirror for receiving the first laser beam a and the second laser beam b. On the basis of the above technical solution, optionally, with continuing reference to fig. 3, the surface detecting apparatus further includes: a work table 150; the object to be measured 140 is placed on the workbench 150, and the workbench 150 moves along the third direction x; wherein, the first laser beam a is reflected by the reflective drum 121 and projected to the surface of the object 140 to be measured in the first direction m to complete the scanning in the fourth direction y; the second laser beam b is reflected by the reflective drum 121 and the reflective mirror 122 in sequence and projected onto the surface of the object 140 to be measured in the second direction n to complete scanning in a fifth direction (not shown in the figure), and the third direction x intersects with the fourth direction y; the third direction x intersects the fifth direction.
When the first laser beam a is projected onto the surface of the object 140 to be measured in an oblique incidence manner, the scanning in the fourth direction y is completed, a section of scanning arc, namely a first arc, is formed on the object 140 to be measured, and the central angle corresponding to the first arc is 2 pi/Q; when the second laser beam b is projected onto the surface of the object 140 to be measured in a normal incidence manner, the scanning in the fifth direction is completed, a section of scanning arc is also formed on the object 140 to be measured, the scanning arc is a second arc, and the central angle corresponding to the second arc is 2 pi/Q. When Q is sufficiently large, the central angle becomes small and the first arc and the second arc will approach a straight line. Preferably, the third direction x and the fourth direction y are perpendicular; the third direction x is perpendicular to the fifth direction. It should be noted that, in the embodiment of the present invention, the included angle between the third direction x and the fourth direction y and the included angle between the third direction x and the fifth direction are not specifically limited, as long as the third direction x and the fourth direction y and the third direction x and the fifth direction are crossed, and fig. 3 is only exemplarily illustrated in the case that the third direction x is perpendicular to the fourth direction y. And fig. 3 illustrates only a segment of a scanning line formed on the object 140 to be measured by scanning in the fourth direction y. Every 1/Q rotation of the reflective drum 121, where Q is the number of the reflective units 123, that is, the incident light spot emitted by the first laser beam a is completely scanned from one side to the other side of the reflective unit 123 on one side of the reflective drum 121, and accordingly, the light spot reflected from the reflective unit 123 is projected onto the surface of the object to be measured 140 in the first direction m, and a column of scanning in the fourth direction y is completed on the surface of the object to be measured 140, and the incident light spot emitted by the second laser beam b is completely scanned from one side to the other side of the reflective unit 123 on one side of the reflective drum 121, and accordingly, the light spot reflected from the reflective unit 123 is projected onto the surface of the object to be measured 140 in the second direction n by the light spot emitted from the reflective mirror 122, and a column of scanning in the fifth direction is completed on the surface of the object to be measured 140. The third direction x then moves the stage 150 to step to the next column scan position. Similarly, within the next 1/Q turn of the reflective drum 121, the second scanning and the third stepping of the stage 150 in the third direction x are completed, so as to repeatedly complete the scanning of one region, and the region is defined as the scanning unit region 200, specifically referring to fig. 5, fig. 5 is a schematic scanning path diagram of the surface detection device for the object to be measured according to the embodiment of the present invention, and it should be noted that fig. 5 is a schematic scanning path diagram received by the scattered light detection circuit 130 after completing the scanning in the fourth direction y only when the first laser beam a is projected onto the surface of the object to be measured 140 in an oblique incidence manner. Fig. 6 is a schematic diagram of a scanning path of a surface detection device for detecting a surface of an object to be measured according to another embodiment of the present invention, referring to fig. 3 and 6, when the reflective drum 121 rotates and the table 150 moves at a constant speed in the third direction x, the reflective drum 121 rotates 1/Q turn, a light spot reflected by the reflective drum 121 performs an oblique scanning on the surface of the object to be measured 140, and a second oblique scanning is performed within a rotation time of the reflective drum 121 in the next 1/Q turn, so as to perform a scanning of a scanning unit area repeatedly, and define the area as a scanning unit area 300. It should be noted that fig. 6 is a schematic diagram of the scanning path received by the scattered light detection circuit 130 after the scanning in the fourth direction y is completed only when the first laser beam a is projected onto the surface of the object to be measured 140 in an oblique incidence manner.
On the basis of the foregoing technical solution, optionally, referring to fig. 3 again, the reflective drum 121 includes a first reflective subunit and a second reflective subunit which are stacked, a rotation axis of the first reflective subunit and a rotation axis of the second reflective subunit are overlapped, an outer sidewall of the first reflective subunit is connected to an outer sidewall of the second reflective subunit, an included angle between the outer sidewall of the first reflective subunit and the outer sidewall of the second reflective subunit is not equal to 90 ° L, and L is a natural number; the shape of the first reflecting subunit comprises a prism, the first reflecting subunit is provided with a plurality of outer side walls which are sequentially arranged adjacently, at least one part of the outer side walls of the first reflecting subunit is provided with a first sub-reflecting mirror, and the first laser beam a is projected onto the surface of the object to be measured through the first sub-reflecting mirror; the shape of the second reflection subunit includes a pyramid or a frustum of a pyramid, the second reflection subunit has a plurality of outer sidewalls which are adjacently arranged in sequence, at least a part of the outer sidewalls of the second reflection subunit is provided with a second sub-reflector, and the second laser beam b passes through the second sub-reflector and the reflector 122 in sequence and is projected onto the surface of the object to be measured 140.
Based on the same inventive concept, an embodiment of the present invention further provides a surface detection system, and fig. 7 is a schematic structural diagram of the surface detection system provided in the embodiment of the present invention, as shown in fig. 7, the surface detection system includes the surface detection apparatus 1000, the processing unit 3000, and the detected object transfer interface 2000 described above.
The detected object transfer interface 2000 is configured to transfer the detected object to a workbench of the surface detection device 1000, the surface detection device 1000 is configured to detect a surface of the detected object, and the processing unit 3000 is configured to receive a detection state obtained by the surface detection device 1000 and obtain a particle condition of the surface of the detected object according to the detection state obtained by the surface detection device 1000.
This technical scheme, high-speed rotation through surface detection device's reflection rotary drum and set up the reflector and accomplish the high-speed scanning to the oblique incidence and the normal incidence of testee, solve the problem that testee surface detection particle is inefficient among the prior art, realize the high-speed scanning to the testee, effectively promote the efficiency that testee surface particle detected, and the detection state that obtains through processing unit contrast surface detection device, the scattered light information of equidirectional incident light promptly, can examine different kinds of defect and granule on testee surface fast and effectively.
Based on the same inventive concept, an embodiment of the present invention further provides a surface detection method, and fig. 8 is a flowchart of the surface detection method provided in the embodiment of the present invention, as shown in fig. 8, the surface detection method includes:
s1, starting the light emitting module to form a first laser beam and a second laser beam;
s2, controlling the reflective drum of the reflective module to receive the first laser beam and the second laser beam and reflect the first laser beam and the second laser beam, and controlling the reflector of the reflective module to receive the second laser beam reflected by the reflective drum and reflect the second laser beam;
s3, receiving a first scattered light beam scattered after the first laser beam is reflected by the reflecting drum and projected to the surface of the measured object in a first direction and a second scattered light beam scattered after the second laser beam is reflected by the reflecting drum and the reflecting mirror in sequence and projected to the surface of the measured object in a second direction through the scattered light detection circuit;
wherein, the included angle between the first direction and the surface normal direction of the measured object is A, and A is more than 0 and less than 90 degrees; the second direction is perpendicular to the surface of the object to be measured.
The embodiment of the invention transmits a first laser beam and a second laser beam through a light emitting module, receives a first scattered beam which is reflected by a reflecting rotary drum and projected to the surface of a measured object in a first direction and then scattered and receives a second scattered beam which is reflected by the reflecting rotary drum and a reflecting mirror in sequence, projected to the surface of the measured object in a second direction and then scattered through the reflecting rotary drum and the reflecting mirror, and finishes high-speed scanning of oblique incidence and normal incidence of the measured object through high-speed rotation of the reflecting rotary drum and arrangement of the reflecting mirror.
On the basis of the above scheme, optionally, after S2, the method further includes:
controlling the workbench to move a preset distance along the third direction; or,
s2, further comprising:
controlling the workbench to move a preset distance along the third direction;
the first laser beam is reflected by the reflecting rotary drum and projected to the surface of the measured object in the first direction to complete scanning in the fourth direction; the second laser beam is reflected by the reflecting rotary drum and the reflecting mirror in sequence and projected to the surface of the measured object in the second direction to complete scanning in the fifth direction; the third direction and the fourth direction intersect, and the third direction intersects the fifth direction.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (9)
1. A surface sensing device, comprising: the light emitting module, the reflecting module and the scattered light detection loop are sequentially arranged along the light propagation path;
the light emitting module is used for emitting a first laser beam and a second laser beam;
the reflection module comprises a reflection rotary drum and a reflection mirror;
the scattered light detection circuit is used for receiving a first scattered light beam which is reflected by the reflecting drum and projected to the surface of a measured object in a first direction and then scattered, and receiving a second scattered light beam which is reflected by the reflecting drum and the reflecting mirror in sequence and projected to the surface of the measured object in a second direction and then scattered;
wherein, the included angle between the first direction and the surface normal direction of the object to be measured is A, and A is more than 0 and less than 90 degrees; the second direction is perpendicular to the surface of the measured object;
the shape of the reflecting rotary drum comprises any one of a prism, a pyramid or a frustum of a pyramid, the reflecting rotary drum is provided with a plurality of outer side walls which are sequentially arranged adjacently, at least one part of the outer side walls of the reflecting rotary drum is provided with a first reflecting mirror, and the first reflecting mirror is used for receiving the first laser beam and the second laser beam.
2. The surface sensing device of claim 1, wherein the light emitting module comprises: a first transmitting unit and a second transmitting unit;
the first emission unit is used for emitting the first laser beam;
the second emitting unit is used for emitting the second laser beam.
3. The surface sensing device of claim 1, wherein the mirror comprises an off-axis parabolic mirror;
the focus of the off-axis parabolic mirror coincides with the light spot of the second laser beam on the reflecting rotary drum, and the symmetry axis of the off-axis parabolic mirror is perpendicular to the surface of the measured object.
4. The surface sensing device of claim 1, wherein the mirror comprises a semi-transparent semi-reflective parabolic mirror;
and the focus of the semi-transmitting semi-reflecting parabolic mirror is superposed with the light spot of the second laser beam on the reflecting rotary drum.
5. The surface sensing device of claim 1, further comprising: a work table;
the object to be measured is placed on the workbench, and the workbench moves along a third direction;
the first laser beam is reflected by the reflecting rotary drum and projected to the surface of the measured object in the first direction to complete scanning in the fourth direction; the second laser beam is reflected by the reflecting rotary drum and the reflecting mirror in sequence and projected to the surface of the measured object in the second direction to complete scanning in the fifth direction; the third direction and the fourth direction intersect, and the third direction intersects the fifth direction.
6. The surface detection device according to claim 1, wherein the reflective drum comprises a first reflective subunit and a second reflective subunit which are arranged in a stacked manner, the rotation axis of the first reflective subunit and the rotation axis of the second reflective subunit are coincident, the outer side wall of the first reflective subunit is connected with the outer side wall of the second reflective subunit, the included angle between the outer side wall of the first reflective subunit and the outer side wall of the second reflective subunit is not equal to 90 ° L, and L is a natural number;
the shape of the first reflecting subunit comprises a prism, the first reflecting subunit is provided with a plurality of outer side walls which are sequentially arranged adjacently, at least one part of the outer side walls of the first reflecting subunit is provided with a first sub-reflector, and the first laser beam is projected onto the surface of the object to be measured through the first sub-reflector;
the shape of second reflection subunit includes pyramid or terrace with edge, second reflection subunit has a plurality of lateral walls that adjoin in proper order and set up, at least some lateral walls of second reflection subunit are equipped with the sub-speculum of second, second laser beam passes through in proper order the sub-speculum of second with the speculum is projected the surface of testee.
7. A surface inspection system comprising the surface inspection apparatus of any one of claims 1 to 6, a processing unit, and an inspected object transfer interface.
8. A surface inspection method, which is carried out based on the surface inspection apparatus according to any one of claims 1 to 6;
the surface detection method comprises the following steps:
s1, starting the light emitting module to form a first laser beam and a second laser beam;
s2, controlling the reflective drum of the reflective module to receive the first laser beam and the second laser beam and reflect the first laser beam and the second laser beam, and controlling the reflector of the reflective module to receive the second laser beam reflected by the reflective drum and reflect the second laser beam;
s3, receiving a first scattered light beam scattered after the first laser beam is reflected by the reflecting drum and projected to the surface of the measured object in a first direction and a second scattered light beam scattered after the second laser beam is reflected by the reflecting drum and the reflecting mirror in sequence and projected to the surface of the measured object in a second direction through a scattered light detection circuit;
wherein, the included angle between the first direction and the surface normal direction of the object to be measured is A, and A is more than 0 and less than 90 degrees; the second direction is perpendicular to the surface of the measured object;
the shape of the reflecting rotary drum comprises any one of a prism, a pyramid or a frustum of a pyramid, the reflecting rotary drum is provided with a plurality of outer side walls which are sequentially arranged adjacently, at least one part of the outer side walls of the reflecting rotary drum is provided with a first reflecting mirror, and the first reflecting mirror is used for receiving the first laser beam and the second laser beam.
9. The method of claim 8, further comprising, after S2:
controlling the workbench to move a preset distance along the third direction; or,
s2, further comprising:
controlling the workbench to move a preset distance along the third direction;
the first laser beam is reflected by the reflecting rotary drum and projected to the surface of the measured object in the first direction to complete scanning in the fourth direction; the second laser beam is reflected by the reflecting rotary drum and the reflecting mirror in sequence and projected to the surface of the measured object in the second direction to complete scanning in the fifth direction; the third direction and the fourth direction intersect; the third direction intersects the fifth direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910303754.7A CN109935531B (en) | 2019-04-16 | 2019-04-16 | Surface detection device, system and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910303754.7A CN109935531B (en) | 2019-04-16 | 2019-04-16 | Surface detection device, system and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109935531A CN109935531A (en) | 2019-06-25 |
| CN109935531B true CN109935531B (en) | 2020-01-10 |
Family
ID=66990081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910303754.7A Active CN109935531B (en) | 2019-04-16 | 2019-04-16 | Surface detection device, system and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109935531B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110763690B (en) * | 2019-11-14 | 2022-04-12 | 上海精测半导体技术有限公司 | Surface detection device and method |
| WO2021093264A1 (en) * | 2019-11-14 | 2021-05-20 | 上海精测半导体技术有限公司 | Surface detection apparatus and method |
| CN111175205A (en) * | 2020-02-18 | 2020-05-19 | 长江存储科技有限责任公司 | Air cylinder |
| CN111637849B (en) * | 2020-05-29 | 2021-11-26 | 上海精测半导体技术有限公司 | Method, device and equipment for measuring morphology parameters |
| US11959961B2 (en) | 2022-04-08 | 2024-04-16 | Orbotech Ltd. | Method of determining an X and Y location of a surface particle |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2812292Y (en) * | 2005-07-12 | 2006-08-30 | 中国科学院上海光学精密机械研究所 | Silicon chip surface defect detector with scattered light intensity multiplication system |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2159562Y (en) * | 1993-02-24 | 1994-03-23 | 浙江大学 | Optical-sound/optical-heat surface and internal fault nondestructive detector |
| CN101672801B (en) * | 2009-09-23 | 2011-04-06 | 中国科学院上海光学精密机械研究所 | Silicon Wafer Surface Defect Detector with Defect Classification Capability and Defect Classification Method |
| CN106442564B (en) * | 2016-10-17 | 2019-12-03 | 中国科学院上海光学精密机械研究所 | The detection device and detection method of heavy caliber super-smooth surface defect |
| US10665504B2 (en) * | 2017-07-28 | 2020-05-26 | Veeco Instruments Inc. | Laser-based systems and methods for melt-processing of metal layers in semiconductor manufacturing |
| CN109459438B (en) * | 2018-11-27 | 2023-06-20 | 中国工程物理研究院激光聚变研究中心 | Defect detection equipment and method |
-
2019
- 2019-04-16 CN CN201910303754.7A patent/CN109935531B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2812292Y (en) * | 2005-07-12 | 2006-08-30 | 中国科学院上海光学精密机械研究所 | Silicon chip surface defect detector with scattered light intensity multiplication system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109935531A (en) | 2019-06-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109935531B (en) | Surface detection device, system and method | |
| US6549825B2 (en) | Alignment apparatus | |
| US11940377B2 (en) | Device and method for detecting a surface defect using interference between polarized lights | |
| WO2020038360A1 (en) | Detection system | |
| WO2012145966A1 (en) | Wafer inspection method and wafer inspection apparatus | |
| CN110907468B (en) | Surface detection device and method | |
| WO2023070283A1 (en) | Wafer bonding device and method | |
| US20080208523A1 (en) | Method of determining geometric parameters of a wafer | |
| WO2002023123A1 (en) | Optical sensor | |
| TW202014691A (en) | Detection system and method | |
| CN109724995A (en) | Measurement equipment and its surface detection module and detection method | |
| WO2016054266A1 (en) | Wafer edge inspection with trajectory following edge profile | |
| US20100085561A1 (en) | Laser scattering defect inspection system and laser scattering defect inspection method | |
| JPH0442945A (en) | Inspection of wafer slip line | |
| JP2009145141A (en) | Defect inspection device and defect inspection program | |
| CN110763689B (en) | Surface detection device and method | |
| KR100878425B1 (en) | Surface measurement apparatus | |
| CN110208272B (en) | Surface detection device and method | |
| CN114144662B (en) | Imaging of combined transmitted and reflected light of internal cracks in semiconductor devices | |
| KR20040088139A (en) | Method and apparatus for detecting a particle | |
| CN113109349A (en) | Detection method, system, device and computer readable storage medium | |
| US20100201974A1 (en) | Surface measurement apparatus and surface measurement method | |
| CN211086131U (en) | Detection equipment | |
| JP2001280926A (en) | Three-dimensional measuring instrument, three- dimensional measuring method, and method of inspecting component using the instrument and the method | |
| JPS62223649A (en) | Method and device for inspection |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |